WO2006074175A3 - Method and structure for forming an integrated spatial light modulator - Google Patents
Method and structure for forming an integrated spatial light modulator Download PDFInfo
- Publication number
- WO2006074175A3 WO2006074175A3 PCT/US2006/000100 US2006000100W WO2006074175A3 WO 2006074175 A3 WO2006074175 A3 WO 2006074175A3 US 2006000100 W US2006000100 W US 2006000100W WO 2006074175 A3 WO2006074175 A3 WO 2006074175A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- standoff
- layer
- light modulator
- spatial light
- forming
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112006000131T DE112006000131T5 (en) | 2005-01-03 | 2006-01-03 | Method and structure for forming an integrated spatial light modulator |
JP2007549708A JP2008527426A (en) | 2005-01-03 | 2006-01-03 | Method and structure for forming an integrated spatial light modulator |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/028,946 | 2005-01-03 | ||
US11/028,946 US7172921B2 (en) | 2005-01-03 | 2005-01-03 | Method and structure for forming an integrated spatial light modulator |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006074175A2 WO2006074175A2 (en) | 2006-07-13 |
WO2006074175A3 true WO2006074175A3 (en) | 2006-12-07 |
Family
ID=36641009
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2006/000100 WO2006074175A2 (en) | 2005-01-03 | 2006-01-03 | Method and structure for forming an integrated spatial light modulator |
Country Status (4)
Country | Link |
---|---|
US (2) | US7172921B2 (en) |
JP (1) | JP2008527426A (en) |
DE (1) | DE112006000131T5 (en) |
WO (1) | WO2006074175A2 (en) |
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US8207004B2 (en) | 2005-01-03 | 2012-06-26 | Miradia Inc. | Method and structure for forming a gyroscope and accelerometer |
US7349140B2 (en) * | 2005-05-31 | 2008-03-25 | Miradia Inc. | Triple alignment substrate method and structure for packaging devices |
US7382513B2 (en) * | 2005-10-13 | 2008-06-03 | Miradia Inc. | Spatial light modulator with multi-layer landing structures |
US7453624B2 (en) * | 2005-10-28 | 2008-11-18 | Miradia Inc. | Projection display system including a high fill ratio silicon spatial light modulator |
US7763489B2 (en) * | 2006-09-27 | 2010-07-27 | Miradia, Inc. | Method of forming a micromechanical system containing a microfluidic lubricant channel |
US7932569B2 (en) * | 2006-09-27 | 2011-04-26 | Miradia, Inc. | Micromechanical device with microfluidic lubricant channel |
US7430359B2 (en) * | 2006-10-02 | 2008-09-30 | Miradia, Inc. | Micromechanical system containing a microfluidic lubricant channel |
JP5496453B2 (en) * | 2007-11-28 | 2014-05-21 | ケイ・エス・ティ・ワ−ルド株式会社 | Laminated structure wafer having a plurality of cavities and method for manufacturing the same |
US8105736B2 (en) * | 2008-03-13 | 2012-01-31 | Miradia Inc. | Method and system for overlay correction during photolithography |
DE102012212445A1 (en) | 2012-07-17 | 2014-01-23 | Robert Bosch Gmbh | Micromechanical structure, in particular sensor arrangement, and corresponding operating method |
US9018723B2 (en) * | 2013-06-27 | 2015-04-28 | Stmicroelectronics Pte Ltd | Infrared camera sensor |
US9776852B2 (en) * | 2016-02-01 | 2017-10-03 | Taiwan Semiconductor Manufacturing Company Ltd. | Method for controlling surface roughness in MEMS structure |
CN109686659A (en) * | 2019-01-10 | 2019-04-26 | 济南晶正电子科技有限公司 | A method of film is prepared on various substrates material |
US11305988B2 (en) * | 2020-09-01 | 2022-04-19 | Aac Acoustic Technologies (Shenzhen) Co., Ltd. | Method for preparing silicon wafer with rough surface and silicon wafer |
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US6642913B1 (en) * | 1999-01-20 | 2003-11-04 | Fuji Photo Film Co., Ltd. | Light modulation element, exposure unit, and flat-panel display unit |
US20040214350A1 (en) * | 2002-06-19 | 2004-10-28 | Pan Shaoher X. | Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge |
US20050052725A1 (en) * | 2003-09-04 | 2005-03-10 | Frank Niklaus | Adhesive sacrificial bonding of spatial light modulators |
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-
2005
- 2005-01-03 US US11/028,946 patent/US7172921B2/en active Active
-
2006
- 2006-01-03 DE DE112006000131T patent/DE112006000131T5/en not_active Withdrawn
- 2006-01-03 JP JP2007549708A patent/JP2008527426A/en active Pending
- 2006-01-03 WO PCT/US2006/000100 patent/WO2006074175A2/en active Application Filing
-
2007
- 2007-02-01 US US11/670,362 patent/US7670880B2/en not_active Expired - Fee Related
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5170283A (en) * | 1991-07-24 | 1992-12-08 | Northrop Corporation | Silicon spatial light modulator |
US5757536A (en) * | 1995-08-30 | 1998-05-26 | Sandia Corporation | Electrically-programmable diffraction grating |
US6642913B1 (en) * | 1999-01-20 | 2003-11-04 | Fuji Photo Film Co., Ltd. | Light modulation element, exposure unit, and flat-panel display unit |
US6489241B1 (en) * | 1999-09-17 | 2002-12-03 | Applied Materials, Inc. | Apparatus and method for surface finishing a silicon film |
US20020024483A1 (en) * | 2000-06-19 | 2002-02-28 | Takuya Makino | Optical switching element, and switching device and image display apparatus each using the optical switching element |
US20030030118A1 (en) * | 2000-11-13 | 2003-02-13 | Eon-Kyeong Kim | Thin film resonator and method for manufacturing the same |
WO2003068669A1 (en) * | 2002-02-14 | 2003-08-21 | Silex Microsystems Ab | Deflectable microstructure and method of manufacturing the same through bonding of wafers |
US20040214350A1 (en) * | 2002-06-19 | 2004-10-28 | Pan Shaoher X. | Fabrication of a high fill ratio reflective spatial light modulator with hidden hinge |
US20050052725A1 (en) * | 2003-09-04 | 2005-03-10 | Frank Niklaus | Adhesive sacrificial bonding of spatial light modulators |
US20050157370A1 (en) * | 2004-01-20 | 2005-07-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Deformable mirror device (DMD) spatial light modulator (SLM) with dual counter-opposed deflection electrodes |
Also Published As
Publication number | Publication date |
---|---|
US20070128771A1 (en) | 2007-06-07 |
US7172921B2 (en) | 2007-02-06 |
JP2008527426A (en) | 2008-07-24 |
US20060148121A1 (en) | 2006-07-06 |
DE112006000131T5 (en) | 2007-11-22 |
WO2006074175A2 (en) | 2006-07-13 |
US7670880B2 (en) | 2010-03-02 |
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