WO2006055593A3 - Fabrication methods and structures for micro-reservoir devices - Google Patents

Fabrication methods and structures for micro-reservoir devices Download PDF

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Publication number
WO2006055593A3
WO2006055593A3 PCT/US2005/041453 US2005041453W WO2006055593A3 WO 2006055593 A3 WO2006055593 A3 WO 2006055593A3 US 2005041453 W US2005041453 W US 2005041453W WO 2006055593 A3 WO2006055593 A3 WO 2006055593A3
Authority
WO
WIPO (PCT)
Prior art keywords
reservoir
substrate
silicon
reservoirs
optionally
Prior art date
Application number
PCT/US2005/041453
Other languages
French (fr)
Other versions
WO2006055593A2 (en
Inventor
John M Maloney
Zouhair Sbiaa
John T Santini Jr
Norman F Sheppard Jr
Scott A Uhland
Original Assignee
Microchips Inc
John M Maloney
Zouhair Sbiaa
John T Santini Jr
Norman F Sheppard Jr
Scott A Uhland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microchips Inc, John M Maloney, Zouhair Sbiaa, John T Santini Jr, Norman F Sheppard Jr, Scott A Uhland filed Critical Microchips Inc
Publication of WO2006055593A2 publication Critical patent/WO2006055593A2/en
Publication of WO2006055593A3 publication Critical patent/WO2006055593A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/508—Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above
    • B01L3/5085—Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above for multiple samples, e.g. microtitration plates
    • B01L3/50853—Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above for multiple samples, e.g. microtitration plates with covers or lids
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K9/00—Medicinal preparations characterised by special physical form
    • A61K9/0012—Galenical forms characterised by the site of application
    • A61K9/0019—Injectable compositions; Intramuscular, intravenous, arterial, subcutaneous administration; Compositions to be administered through the skin in an invasive manner
    • A61K9/0024—Solid, semi-solid or solidifying implants, which are implanted or injected in body tissue
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61K—PREPARATIONS FOR MEDICAL, DENTAL OR TOILETRY PURPOSES
    • A61K9/00—Medicinal preparations characterised by special physical form
    • A61K9/0087—Galenical forms not covered by A61K9/02 - A61K9/7023
    • A61K9/0097—Micromachined devices; Microelectromechanical systems [MEMS]; Devices obtained by lithographic treatment of silicon; Devices comprising chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/12—Specific details about manufacturing devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0819—Microarrays; Biochips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0677—Valves, specific forms thereof phase change valves; Meltable, freezing, dissolvable plugs; Destructible barriers

Abstract

Methods are provided for making a multi-reservoir device comprising (i) patterning one or more photoresist layers on a substrate; (ii) depositing onto the substrate at least one metal layer by a sputtering process to form a plurality of reservoir caps and conductive traces; (iii) removing the photoresist layers using a liftoff process; (iv) forming a plurality of reservoirs in the substrate; (v) loading each reservoir with reservoir contents (such as a drug or sensor); and (vi) sealing each reservoir. Optionally, the reservoir cap comprises a first conductive metal layer coated with one or more protective noble metal films. To enhance the resistance of the substrate (e.g., a silicon substrate) to etching in vivo, the interior sidewalls of the reservoirs optionally can include a protective coating (e.g., gold, platinum, carbon, silicon carbide, silicon dioxide, and platinum silicide), or sidewalls comprising silicon can be doped with boron or another impurity.
PCT/US2005/041453 2004-11-15 2005-11-15 Fabrication methods and structures for micro-reservoir devices WO2006055593A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/988,667 2004-11-15
US10/988,667 US7413846B2 (en) 2004-11-15 2004-11-15 Fabrication methods and structures for micro-reservoir devices

Publications (2)

Publication Number Publication Date
WO2006055593A2 WO2006055593A2 (en) 2006-05-26
WO2006055593A3 true WO2006055593A3 (en) 2007-04-19

Family

ID=35840525

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/041453 WO2006055593A2 (en) 2004-11-15 2005-11-15 Fabrication methods and structures for micro-reservoir devices

Country Status (2)

Country Link
US (2) US7413846B2 (en)
WO (1) WO2006055593A2 (en)

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