WO2006053218A8 - Pressure control system in a photovoltaic substrate deposition - Google Patents

Pressure control system in a photovoltaic substrate deposition

Info

Publication number
WO2006053218A8
WO2006053218A8 PCT/US2005/040932 US2005040932W WO2006053218A8 WO 2006053218 A8 WO2006053218 A8 WO 2006053218A8 US 2005040932 W US2005040932 W US 2005040932W WO 2006053218 A8 WO2006053218 A8 WO 2006053218A8
Authority
WO
WIPO (PCT)
Prior art keywords
control system
pressure control
substrate deposition
photovoltaic substrate
substrate
Prior art date
Application number
PCT/US2005/040932
Other languages
French (fr)
Other versions
WO2006053218A2 (en
WO2006053218A3 (en
Inventor
John R Tuttle
Original Assignee
Daystar Technologies Inc
John R Tuttle
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daystar Technologies Inc, John R Tuttle filed Critical Daystar Technologies Inc
Priority to CA002586969A priority Critical patent/CA2586969A1/en
Priority to EP05851547A priority patent/EP1809787A2/en
Priority to JP2007541349A priority patent/JP2008520107A/en
Publication of WO2006053218A2 publication Critical patent/WO2006053218A2/en
Publication of WO2006053218A8 publication Critical patent/WO2006053218A8/en
Publication of WO2006053218A3 publication Critical patent/WO2006053218A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/206—Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Abstract

This invention comprises an apparatus for the deposition of thin layers upon a substrate for the production of photovoltaic cells wherein the individual reaction chambers are separated from each other by low pressure isolation zones which prevent cross contamination of adjacent reaction chambers and control pressure levels in each reaction chamber while, at the same time, allowing the uninterrupted transfer of a substrate from one reaction chamber to the next without any mechanical obstruction.
PCT/US2005/040932 2004-11-10 2005-11-10 Pressure control system in a photovoltaic substrate deposition WO2006053218A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CA002586969A CA2586969A1 (en) 2004-11-10 2005-11-10 Pressure control system in a photovoltaic substrate deposition
EP05851547A EP1809787A2 (en) 2004-11-10 2005-11-10 Pressure control system in a photovoltaic substrate deposition
JP2007541349A JP2008520107A (en) 2004-11-10 2005-11-10 Pressure control system in photovoltaic substrate deposition equipment

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US62684304P 2004-11-10 2004-11-10
US60/626,843 2004-11-10
US11/272,536 2005-11-10
US11/272,536 US20060096536A1 (en) 2004-11-10 2005-11-10 Pressure control system in a photovoltaic substrate deposition apparatus

Publications (3)

Publication Number Publication Date
WO2006053218A2 WO2006053218A2 (en) 2006-05-18
WO2006053218A8 true WO2006053218A8 (en) 2007-10-18
WO2006053218A3 WO2006053218A3 (en) 2007-11-29

Family

ID=36315036

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/040932 WO2006053218A2 (en) 2004-11-10 2005-11-10 Pressure control system in a photovoltaic substrate deposition

Country Status (2)

Country Link
US (1) US20060096536A1 (en)
WO (1) WO2006053218A2 (en)

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USD662040S1 (en) 2009-06-12 2012-06-19 Stion Corporation Pin striped thin film solar module for garden lamp
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Also Published As

Publication number Publication date
WO2006053218A2 (en) 2006-05-18
US20060096536A1 (en) 2006-05-11
WO2006053218A3 (en) 2007-11-29

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