WO2006017078A3 - Probe head having a membrane suspended probe - Google Patents
Probe head having a membrane suspended probe Download PDFInfo
- Publication number
- WO2006017078A3 WO2006017078A3 PCT/US2005/023806 US2005023806W WO2006017078A3 WO 2006017078 A3 WO2006017078 A3 WO 2006017078A3 US 2005023806 W US2005023806 W US 2005023806W WO 2006017078 A3 WO2006017078 A3 WO 2006017078A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- probe
- elastic membrane
- membrane suspended
- head
- probe head
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
Abstract
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/565,356 US7708544B2 (en) | 2003-07-21 | 2004-07-21 | Apparatus and method for manufacturing microneedles |
JP2007520437A JP4980903B2 (en) | 2004-07-07 | 2005-07-05 | Probe head with membrane suspension probe |
KR1020077001093A KR101157449B1 (en) | 2004-07-07 | 2005-07-05 | Probe head having a membrane suspended probe |
CA002570886A CA2570886A1 (en) | 2004-07-07 | 2005-07-05 | Probe head having a membrane suspended probe |
EP05764375.1A EP1766426B1 (en) | 2004-07-07 | 2005-07-05 | Probe head having a membrane suspended probe |
IL180188A IL180188A0 (en) | 2004-07-07 | 2006-12-19 | Probe head having a membrane suspended probe |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US58629904P | 2004-07-07 | 2004-07-07 | |
US60/586,299 | 2004-07-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2006017078A2 WO2006017078A2 (en) | 2006-02-16 |
WO2006017078A3 true WO2006017078A3 (en) | 2008-08-07 |
Family
ID=35839715
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/023806 WO2006017078A2 (en) | 2003-07-21 | 2005-07-05 | Probe head having a membrane suspended probe |
Country Status (9)
Country | Link |
---|---|
US (2) | US7368927B2 (en) |
EP (1) | EP1766426B1 (en) |
JP (2) | JP4980903B2 (en) |
KR (1) | KR101157449B1 (en) |
CA (1) | CA2570886A1 (en) |
DE (1) | DE202005021386U1 (en) |
IL (1) | IL180188A0 (en) |
TW (1) | TWI372249B (en) |
WO (1) | WO2006017078A2 (en) |
Families Citing this family (49)
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JP5687172B2 (en) * | 2011-11-01 | 2015-03-18 | 三菱電機株式会社 | Semiconductor test jig and withstand voltage measurement method using the same |
US8901948B2 (en) * | 2011-12-05 | 2014-12-02 | Winway Technology Co., Ltd. | Wafer probe card |
KR20140000561A (en) * | 2012-06-25 | 2014-01-03 | 주식회사 세디콘 | Probe card |
WO2014099072A1 (en) * | 2012-09-26 | 2014-06-26 | The Trustees Of Columbia University In The City Of New York | Micro-device transfer for hybrid photonic and electronic integration using polydimethylsiloxane probes |
US9470715B2 (en) * | 2013-01-11 | 2016-10-18 | Mpi Corporation | Probe head |
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KR20220053553A (en) * | 2019-08-28 | 2022-04-29 | 주식회사 아도반테스토 | Test apparatus, automated test equipment and methods for testing a device under test comprising a circuit and an antenna coupled to the circuit |
US11363746B2 (en) | 2019-09-06 | 2022-06-14 | Teradyne, Inc. | EMI shielding for a signal trace |
TWI704358B (en) * | 2019-09-16 | 2020-09-11 | 旺矽科技股份有限公司 | Suitable for probe modules with multiple units to be tested with inclined conductive contacts |
KR102271347B1 (en) * | 2019-10-28 | 2021-06-30 | 주식회사 나노엑스 | Probe-head for led probe device |
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- 2005-07-05 WO PCT/US2005/023806 patent/WO2006017078A2/en active Application Filing
- 2005-07-05 DE DE202005021386U patent/DE202005021386U1/en not_active Expired - Lifetime
- 2005-07-05 CA CA002570886A patent/CA2570886A1/en not_active Abandoned
- 2005-07-05 KR KR1020077001093A patent/KR101157449B1/en active IP Right Grant
- 2005-07-07 TW TW094122944A patent/TWI372249B/en not_active IP Right Cessation
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2006
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KR101157449B1 (en) | 2012-06-22 |
DE202005021386U1 (en) | 2007-11-29 |
WO2006017078A2 (en) | 2006-02-16 |
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TW200606436A (en) | 2006-02-16 |
TWI372249B (en) | 2012-09-11 |
KR20070053696A (en) | 2007-05-25 |
JP2008506112A (en) | 2008-02-28 |
EP1766426A4 (en) | 2011-07-06 |
JP5374568B2 (en) | 2013-12-25 |
CA2570886A1 (en) | 2006-02-16 |
EP1766426B1 (en) | 2013-09-11 |
JP4980903B2 (en) | 2012-07-18 |
US7514944B2 (en) | 2009-04-07 |
JP2012068256A (en) | 2012-04-05 |
IL180188A0 (en) | 2007-06-03 |
EP1766426A2 (en) | 2007-03-28 |
US20060006889A1 (en) | 2006-01-12 |
US7368927B2 (en) | 2008-05-06 |
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