WO2006017078A3 - Probe head having a membrane suspended probe - Google Patents

Probe head having a membrane suspended probe Download PDF

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Publication number
WO2006017078A3
WO2006017078A3 PCT/US2005/023806 US2005023806W WO2006017078A3 WO 2006017078 A3 WO2006017078 A3 WO 2006017078A3 US 2005023806 W US2005023806 W US 2005023806W WO 2006017078 A3 WO2006017078 A3 WO 2006017078A3
Authority
WO
WIPO (PCT)
Prior art keywords
probe
elastic membrane
membrane suspended
head
probe head
Prior art date
Application number
PCT/US2005/023806
Other languages
French (fr)
Other versions
WO2006017078A2 (en
Inventor
Kenneth Smith
Michael Jolley
Syckel Victoria Van
Original Assignee
Cascade Microtech Inc
Kenneth Smith
Michael Jolley
Syckel Victoria Van
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US10/565,356 priority Critical patent/US7708544B2/en
Application filed by Cascade Microtech Inc, Kenneth Smith, Michael Jolley, Syckel Victoria Van filed Critical Cascade Microtech Inc
Priority to JP2007520437A priority patent/JP4980903B2/en
Priority to KR1020077001093A priority patent/KR101157449B1/en
Priority to CA002570886A priority patent/CA2570886A1/en
Priority to EP05764375.1A priority patent/EP1766426B1/en
Publication of WO2006017078A2 publication Critical patent/WO2006017078A2/en
Priority to IL180188A priority patent/IL180188A0/en
Publication of WO2006017078A3 publication Critical patent/WO2006017078A3/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

Abstract

A probe head including an elastic membrane capable of exerting a restoring force when one of the surfaces of the elastic membrane is distorted. A conductive probe includes a beam having a first end and a second end, with a probe tip proximate the first end for contacting a device under test A beam contact proximate the second end of the beam. The beam being movable to deform at least one surface of the elastic membrane.
PCT/US2005/023806 2003-07-21 2005-07-05 Probe head having a membrane suspended probe WO2006017078A2 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US10/565,356 US7708544B2 (en) 2003-07-21 2004-07-21 Apparatus and method for manufacturing microneedles
JP2007520437A JP4980903B2 (en) 2004-07-07 2005-07-05 Probe head with membrane suspension probe
KR1020077001093A KR101157449B1 (en) 2004-07-07 2005-07-05 Probe head having a membrane suspended probe
CA002570886A CA2570886A1 (en) 2004-07-07 2005-07-05 Probe head having a membrane suspended probe
EP05764375.1A EP1766426B1 (en) 2004-07-07 2005-07-05 Probe head having a membrane suspended probe
IL180188A IL180188A0 (en) 2004-07-07 2006-12-19 Probe head having a membrane suspended probe

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US58629904P 2004-07-07 2004-07-07
US60/586,299 2004-07-07

Publications (2)

Publication Number Publication Date
WO2006017078A2 WO2006017078A2 (en) 2006-02-16
WO2006017078A3 true WO2006017078A3 (en) 2008-08-07

Family

ID=35839715

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/023806 WO2006017078A2 (en) 2003-07-21 2005-07-05 Probe head having a membrane suspended probe

Country Status (9)

Country Link
US (2) US7368927B2 (en)
EP (1) EP1766426B1 (en)
JP (2) JP4980903B2 (en)
KR (1) KR101157449B1 (en)
CA (1) CA2570886A1 (en)
DE (1) DE202005021386U1 (en)
IL (1) IL180188A0 (en)
TW (1) TWI372249B (en)
WO (1) WO2006017078A2 (en)

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US20060006889A1 (en) 2006-01-12
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