WO2005079443A3 - Qwip with tunable spectral response - Google Patents
Qwip with tunable spectral response Download PDFInfo
- Publication number
- WO2005079443A3 WO2005079443A3 PCT/US2005/005005 US2005005005W WO2005079443A3 WO 2005079443 A3 WO2005079443 A3 WO 2005079443A3 US 2005005005 W US2005005005 W US 2005005005W WO 2005079443 A3 WO2005079443 A3 WO 2005079443A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mwir
- channel
- detector layer
- qwip
- tunability
- Prior art date
Links
- 230000003595 spectral effect Effects 0.000 title abstract 2
- 230000002902 bimodal effect Effects 0.000 abstract 1
- 238000001514 detection method Methods 0.000 abstract 1
- 238000003384 imaging method Methods 0.000 abstract 1
- 238000004611 spectroscopical analysis Methods 0.000 abstract 1
- 238000001228 spectrum Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14649—Infrared imagers
- H01L27/1465—Infrared imagers of the hybrid type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14649—Infrared imagers
- H01L27/14652—Multispectral infrared imagers, having a stacked pixel-element structure, e.g. npn, npnpn or MQW structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/0304—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L31/03046—Inorganic materials including, apart from doping materials or other impurities, only AIIIBV compounds including ternary or quaternary compounds, e.g. GaAlAs, InGaAs, InGaAsP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
- H01L31/035236—Superlattices; Multiple quantum well structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/1013—Devices sensitive to infrared, visible or ultraviolet radiation devices sensitive to two or more wavelengths, e.g. multi-spectrum radiation detection devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05723186A EP1723399A4 (en) | 2004-02-18 | 2005-02-17 | Qwip with tunable spectral response |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/781,523 | 2004-02-18 | ||
US10/781,523 US7238960B2 (en) | 1999-12-24 | 2004-02-18 | QWIP with enhanced optical coupling |
US10/829,574 | 2004-04-22 | ||
US10/829,574 US7291858B2 (en) | 1999-12-24 | 2004-04-22 | QWIP with tunable spectral response |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005079443A2 WO2005079443A2 (en) | 2005-09-01 |
WO2005079443A3 true WO2005079443A3 (en) | 2006-05-26 |
Family
ID=34890635
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/005005 WO2005079443A2 (en) | 2004-02-18 | 2005-02-17 | Qwip with tunable spectral response |
Country Status (3)
Country | Link |
---|---|
US (1) | US7291858B2 (en) |
EP (1) | EP1723399A4 (en) |
WO (1) | WO2005079443A2 (en) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3835260B2 (en) * | 2001-11-19 | 2006-10-18 | 株式会社日立製作所 | Optical disk device |
US6897447B2 (en) * | 2002-12-05 | 2005-05-24 | Lockheed Martin Corporation | Bias controlled multi-spectral infrared photodetector and imager |
WO2006044983A2 (en) * | 2004-10-20 | 2006-04-27 | Massachusetts Institute Of Technology | Multi-spectral pixel and focal plane array |
FR2910133B1 (en) * | 2006-12-13 | 2009-02-13 | Thales Sa | IMAGING SYSTEM IR2-IR3 BI-FIELD COMPACT |
DE102008006987A1 (en) * | 2008-01-31 | 2009-08-06 | Osram Opto Semiconductors Gmbh | Radiation receiver and method for producing a radiation receiver |
US20090201400A1 (en) * | 2008-02-08 | 2009-08-13 | Omnivision Technologies, Inc. | Backside illuminated image sensor with global shutter and storage capacitor |
US7926961B2 (en) * | 2008-11-20 | 2011-04-19 | Bae Systems Information And Electronic Systems Integration Inc. | Low background flux telescope with integrated baffle |
US8075144B2 (en) * | 2008-11-20 | 2011-12-13 | Bae Systems Information And Electronic Systems Integration Inc. | Integrated telescope baffle and mirror support |
US8399820B2 (en) | 2009-06-23 | 2013-03-19 | Sensors Unlimited, Inc. | Multicolor detectors and applications thereof |
US8669588B2 (en) * | 2009-07-06 | 2014-03-11 | Raytheon Company | Epitaxially-grown position sensitive detector |
CN102280458A (en) * | 2010-06-11 | 2011-12-14 | 英属开曼群岛商恒景科技股份有限公司 | Back irradiation sensor |
JP5630213B2 (en) * | 2010-10-28 | 2014-11-26 | 富士通株式会社 | Photodetector |
US8338200B2 (en) | 2011-02-02 | 2012-12-25 | L-3 Communications Cincinnati Electronics Corporation | Frontside-illuminated inverted quantum well infrared photodetector devices and methods of fabricating the same |
US8441087B2 (en) * | 2011-07-22 | 2013-05-14 | Raytheon Company | Direct readout focal plane array |
US10115764B2 (en) * | 2011-08-15 | 2018-10-30 | Raytheon Company | Multi-band position sensitive imaging arrays |
EP3385989A1 (en) | 2011-09-13 | 2018-10-10 | L3 Cincinnati Electronics Corporation | Frontside-illuminated barrier infrared photodetector device and methods of fabricating the same |
FR2982706A1 (en) * | 2011-11-15 | 2013-05-17 | Soc Fr Detecteurs Infrarouges Sofradir | DEVICE FOR DETECTION OF TWO DIFFERENT COLORS WITH IMPROVED OPERATING CONDITIONS |
US11158754B1 (en) * | 2013-08-09 | 2021-10-26 | Hrl Laboratories, Llc | Back-to-back dual band p-CB-n |
US9621864B2 (en) * | 2014-01-14 | 2017-04-11 | Microsoft Technology Licensing, Llc | Spectral imaging system |
JP6880601B2 (en) * | 2016-08-22 | 2021-06-02 | 富士通株式会社 | Photodetector and imaging device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6469358B1 (en) * | 2000-09-21 | 2002-10-22 | Lockheed Martin Corporation | Three color quantum well focal plane arrays |
US6818917B2 (en) * | 2003-03-12 | 2004-11-16 | National Taiwan University | Voltage-switchable and-tunable and environment-insensitive multi-color superlattice infrared photodetector |
Family Cites Families (22)
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FR2663787B1 (en) | 1990-06-26 | 1997-01-31 | Thomson Csf | ELECTROMAGNETIC WAVE DETECTOR. |
SE468188B (en) | 1991-04-08 | 1992-11-16 | Stiftelsen Inst Foer Mikroelek | METHOD FOR CONNECTING RADIATION IN AN INFRARED DETECTOR, APPLIED DEVICE |
US5385632A (en) | 1993-06-25 | 1995-01-31 | At&T Laboratories | Method for manufacturing integrated semiconductor devices |
US5384469A (en) | 1993-07-21 | 1995-01-24 | The United States Of America As Represented By The Secretary Of The Army | Voltage-tunable, multicolor infrared detectors |
US5546209A (en) | 1994-03-11 | 1996-08-13 | University Of Southern California | One-to-many simultaneous and reconfigurable optical two-dimensional plane interconnections using multiple wavelength, vertical cavity, surface-emitting lasers and wavelength-dependent detector planes |
US5552603A (en) | 1994-09-15 | 1996-09-03 | Martin Marietta Corporation | Bias and readout for multicolor quantum well detectors |
US5539206A (en) | 1995-04-20 | 1996-07-23 | Loral Vought Systems Corporation | Enhanced quantum well infrared photodetector |
US5751830A (en) | 1995-05-24 | 1998-05-12 | Lockheed Martin Energy Systems, Inc. | Method and apparatus for coherent imaging of infrared energy |
US5568574A (en) | 1995-06-12 | 1996-10-22 | University Of Southern California | Modulator-based photonic chip-to-chip interconnections for dense three-dimensional multichip module integration |
US5909303A (en) | 1996-01-04 | 1999-06-01 | The Board Of Trustees Of The Leland Stanford Junior University | Optical modulator and optical modulator array |
US5959339A (en) | 1996-03-19 | 1999-09-28 | Raytheon Company | Simultaneous two-wavelength p-n-p-n Infrared detector |
US5818051A (en) | 1996-04-04 | 1998-10-06 | Raytheon Ti Systems, Inc. | Multiple color infrared detector |
US6211529B1 (en) | 1996-08-27 | 2001-04-03 | California Institute Of Technology | Infrared radiation-detecting device |
FR2756666B1 (en) | 1996-12-04 | 1999-02-19 | Thomson Csf | ELECTROMAGNETIC WAVE DETECTOR |
US6005262A (en) | 1997-08-20 | 1999-12-21 | Lucent Technologies Inc. | Flip-chip bonded VCSEL CMOS circuit with silicon monitor detector |
AU1090699A (en) | 1997-10-16 | 1999-05-03 | California Institute Of Technology | Dual-band quantum-well infrared sensing array |
US6531700B1 (en) | 1998-09-08 | 2003-03-11 | Lockheed Martin Corporation | Integral charge well for QWIP FPA'S |
US6104046A (en) | 1999-03-12 | 2000-08-15 | Sagi-Nahor Ltd. | Dual-band infrared sensing material array and focal plane array |
US6495830B1 (en) | 2000-09-21 | 2002-12-17 | Lockheed Martin Corporation | Programmable hyper-spectral infrared focal plane arrays |
US6561693B1 (en) | 2000-09-21 | 2003-05-13 | Lockheed Martin Corporation | Remote temperature sensing long wave length modulated focal plane array |
US6498346B1 (en) | 2000-09-21 | 2002-12-24 | Lockheed Martin Corporation | Large dynamic range focal plane array |
US6657195B1 (en) * | 2000-09-21 | 2003-12-02 | Lockheed Martin Corporation | Clutter discriminating focal plane arrays |
-
2004
- 2004-04-22 US US10/829,574 patent/US7291858B2/en not_active Expired - Lifetime
-
2005
- 2005-02-17 EP EP05723186A patent/EP1723399A4/en not_active Withdrawn
- 2005-02-17 WO PCT/US2005/005005 patent/WO2005079443A2/en active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6469358B1 (en) * | 2000-09-21 | 2002-10-22 | Lockheed Martin Corporation | Three color quantum well focal plane arrays |
US6818917B2 (en) * | 2003-03-12 | 2004-11-16 | National Taiwan University | Voltage-switchable and-tunable and environment-insensitive multi-color superlattice infrared photodetector |
Non-Patent Citations (2)
Title |
---|
ALMOGY G. ET AL: "Monolithic integration of quantum well infrared photodetector and modulator", APPL. PHYS. LETT., vol. 68, no. 15, 8 April 1996 (1996-04-08), pages 2088 - 2090, XP000585141 * |
See also references of EP1723399A4 * |
Also Published As
Publication number | Publication date |
---|---|
EP1723399A4 (en) | 2010-11-17 |
US7291858B2 (en) | 2007-11-06 |
WO2005079443A2 (en) | 2005-09-01 |
EP1723399A2 (en) | 2006-11-22 |
US20040195509A1 (en) | 2004-10-07 |
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