WO2005076051A1 - Spatial light modulator with integrated optical structure - Google Patents

Spatial light modulator with integrated optical structure Download PDF

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Publication number
WO2005076051A1
WO2005076051A1 PCT/US2005/002986 US2005002986W WO2005076051A1 WO 2005076051 A1 WO2005076051 A1 WO 2005076051A1 US 2005002986 W US2005002986 W US 2005002986W WO 2005076051 A1 WO2005076051 A1 WO 2005076051A1
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WO
WIPO (PCT)
Prior art keywords
hght
optical compensation
spatial light
compensation structure
elements
Prior art date
Application number
PCT/US2005/002986
Other languages
French (fr)
Inventor
Clarence Chui
Jeffrey B. Sampsell
William J. Cummings
Ming-Hau Tung
Original Assignee
Idc, Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to AU2005209752A priority Critical patent/AU2005209752A1/en
Application filed by Idc, Llc filed Critical Idc, Llc
Priority to JP2006552191A priority patent/JP4723518B2/en
Priority to KR1020117018192A priority patent/KR101149860B1/en
Priority to KR1020107002289A priority patent/KR101149858B1/en
Priority to CA2554980A priority patent/CA2554980C/en
Priority to EP05712433A priority patent/EP1721204A1/en
Priority to KR1020117029841A priority patent/KR101258484B1/en
Priority to BRPI0507357-0A priority patent/BRPI0507357A/en
Priority to CN2005800038120A priority patent/CN1914538B/en
Priority to KR1020067015589A priority patent/KR101150246B1/en
Publication of WO2005076051A1 publication Critical patent/WO2005076051A1/en
Priority to IL177048A priority patent/IL177048A0/en
Priority to HK07105024.2A priority patent/HK1097604A1/en

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/21Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  by interference
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/13356Structural association of cells with optical devices, e.g. polarisers or reflectors characterised by the placement of the optical elements

Definitions

  • Spatial light modulators are display devices that contain arrays of individually addressable light modulating elements. Examples of spatial light modulators include liquid crystal displays and lnterferometric modulator arrays. The light modulating elements in such devices typically function by altering the characteristics of light reflected or transmitted through the individual elements, thus altering the appearance of the display. Summary [0004] As spatial light modulators become increasingly sophisticated, the inventor anticipates that difficulties associated with fabricating them by current manufacturing process flows will also increase. Accordingly, the inventor has developed spatial light modulators having integrated optical compensation structures and methods for making them.
  • An embodiment provides a spatial light modulator that includes a substrate; a plurality of individually addressable light-modulating elements arranged over the substrate and configured to modulate light; and an optical compensation structure; wherein the optical compensation structure is arranged between the substrate and the plurality of individually addressable light-modulating elements.
  • the optical compensation structure is a passive optical compensation structure.
  • An embodiment provides a spatial light modulator that includes a substrate; a plurality of individually addressable light-modulating elements arranged over the substrate and configured to modulate light; and an optical compensation structure; wherein the plurality of individually addressable hght-modulatmg elements is arranged between the substrate and the optical compensation structure.
  • the optical compensation structure comprises at least one of a color filter, black mask, and anti-reflective layer.
  • Another embodiment provides a method of making a spatial light modulator that includes fabricating an optical compensation structure over a transparent substrate; and fabricating a plurality of individually addressable hght-modulatmg elements over the optical compensation structure, the individually addressable hght-modulatmg elements being configured to modulate light transmitted through the transparent substrate.
  • fabricating the optical compensation structure includes fabricating a passive optical compensation structure [0008] Another embodiment provides a method of making a spatial light modulator that includes fabricating a plurality of individually addressable light-modulating elements over a substrate, and fabricating an optical compensation structure over the plurality of individually addressable light-modulating elements, the individually addressable hght-modulatmg elements being configured to modulate light transmitted through the optical compensation structure.
  • the optical compensation structure comprises at least one of a color filter, mask, and anti-reflective layer
  • a spatial light modulator that includes a transparent substrate; a plurality of individually addressable lnterferometric light-modulating elements arranged over the transparent substrate and configured to modulate light transmitted through the transparent substrate, the lnterferometric hght-modulatmg elements comprising a cavity and a movable wall; and at least one optical compensation structure arranged between the transparent substrate and the plurality of individually addressable lnterferometric light-modulating elements, the optical compensation structure comprising a color filter or diffuser [0010]
  • a spatial light modulator that includes a substrate; a means for modulating light transmitted through or reflected from the substrate; and a means for compensating the light transmitted through or reflected from the substrate; wherein the means for compensating the light is operatively arranged between the substrate and the means for modulating light transmitted through or reflected from the substrate.
  • the means for compensating the light transmitted through or reflected from the substrate is a means for passively compensating the light transmitted through or reflected from the substrate
  • a spatial light modulator that includes a substrate; a means for modulating light transmitted through or reflected from the substrate; and a means for compensating the light transmitted through or reflected from the substrate; wherein the means for modulating light transmitted through or reflected from the substrate is operatively arranged between the substrate and the means for compensating the light.
  • the means for compensating the light transmitted through or reflected from the substrate comp ⁇ ses at least one of a color filter, black mask, and anti-reflective layer.
  • Another embodiment provides a spatial light modulator made by a method that includes fabricating an optical compensation structure over a transparent substrate; and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure, the individually addressable light-modulating elements being configured to modulate light transmitted through the transparent substrate.
  • Another embodiment provides a spatial light modulator made by a method that includes fabricating a plurality of individually addressable light-modulating elements over a substrate; and fabricating an optical compensation structure over the plurality of individually addressable hght-modulatmg elements, the individually addressable light-modulating elements being configured to modulate light transmitted through the optical compensation structure.
  • the optical compensation structure comprises at least one of a color filter, black mask, and anti- reflective layer.
  • a display region comprises a black and white hght- modulating element and a color filter.
  • the black and white light-modulating element includes first and second reflective surfaces and a cavity therebetween. The second surface is movable with respect to the first surface
  • the color filter is configured to transmit colored light when illuminated with white light
  • the color filter is positioned with respect to the ght-modulatmg element such that light output from the light-modulating element is filtered by the color filter.
  • the black and white light-modulating element may comprise a black and white lnterferometric modulator.
  • a display region comprises a plurality of hght- modulating elements that includes first and second reflective surfaces and a cavity therebetween. The second surface is movable with respect to the first surface. The display region further comprises a plurality of color filter elements configured to transmit a narrower range of wavelengths when illuminated with a broader range of wavelengths.
  • the color filter elements are positioned with respect to the light-modulating elements such that light output from the hght- modulatmg elements is filtered by the color filter elements.
  • the first reflective surface is separated from the second reflective surface by a substantially equal distance for each of the plurality of light-modulating elements when the light-modulating elements output light (e.g., white light).
  • the hght-modulatmg elements may comprise black and white light-modulating elements.
  • the hght-modulatmg elements may comprise lnterferometric modulators or other types of modulators.
  • the hght-modulatmg elements may output light when in, for example, a reflective state
  • the plurality of color filter elements may include two or three or more color filter elements configured to produce different color output (e g., red, green, blue).
  • the color filter elements may comp ⁇ se material (e g , dyed material like dyed photoresist) that transmits a narrower range of wavelengths when illuminated with a broader range of wavelengths In various embodiments, this material may transmit color light when illuminated with white light.
  • a display region comprises a plurality of hght- modulating elements and a color filter array Each of the light-modulating elements includes first and second reflective surfaces and a cavity therebetween.
  • the second surface is movable with respect to the first surface.
  • the color filter array includes a plurality of color filter elements configured to transmit a narrower range of wavelengths when illuminated with a broader range of wavelengths.
  • the color filter array is positioned with respect to the light-modulating elements such that light output from the light-modulating elements is filtered by the color filter elements.
  • the first reflective surface is separated from the second reflective surface by a substantially equal distance for each of the plurality of light-modulating elements when the light-modulating elements output light (e.g., white light). At least two of the color filter elements are configured to produce different color output.
  • Another embodiment includes a method of manufacturing a display device. In this method, a black and white light-modulating element is provided.
  • the black and white ght- modulating element that is provided includes first and second optical surfaces, wherein the second optical surface is movable with respect to the first optical surface.
  • a color filter is positioned with respect to the light-modulating element so that white light output from the light-modulating element is filtered by the color filter.
  • the color filter is configured to transmit colored light when illuminated with white light.
  • the black and white light-modulating element may comprise a black and white lnterferometric modulator.
  • the black and white hght-modulatmg element may be included in an array of other light-modulating elements such as other black and white modulating elements. Additional color filters, possibly in an array, may also be included.
  • Color filters with different responses may be used for different hght-modulatmg elements to yield different colors (e g., red, green, and blue)
  • Another embodiment includes a method of manufacturing a display region.
  • a plurality of light-modulating elements each including first and second optical surfaces and a cavity therebetween are provided.
  • the first reflective surface is separated from the second reflective surface by a substantially equal distance for each of the plurality of hght- modulating elements when the hght-modulatmg elements output light.
  • Color filter elements are positioned with respect to the hght-modulatmg elements so that light output from the hght- modulating elements is filtered by respective color filter elements.
  • the color filter elements may include material configured to transmit a narrow range of wavelengths when illuminated with a broad range of wavelengths.
  • the color filter elements are included in an array.
  • the array may include at least two color filter elements configured to produce different color output.
  • the ght-modulating elements may comprise black and white light-modulating elements.
  • the hght-modulating elements may comprise lnterferometric modulators or other types of modulators.
  • the hght-modulatmg elements may output light when in, for example, a reflective state.
  • the plurality of color filter elements may include two or three or more color filter elements configured to produce different color output (e.g., red, green, blue).
  • the color filter elements may comprise material such as a dyed material like dyed photoresist
  • the material may transmit color when illuminated with white light
  • Another embodiment includes a display device comprising means for producing a modulated white light signal including first and second optical surfaces, wherein the second optical surface is movable with respect to the first optical surface
  • the display device further comprises means for filtering the modulated white light signal so as to transform the white light signal into a colored light signal.
  • Figures 1A and IB illustrate some characteristics of a typical lnterferometric modulator (see Figures 1A and IB of U S. Patent Publication No. 2002/0126364 Al).
  • Figure 2 illustrates some characteristics of a typical lnterferometric modulator
  • Figures 3A - 3F illustrate optical compensation films fabricated on the opposite surface of the substrate from which an array of light modulating elements resides (see Figure 6A - 6F of U.S. Patent Publication No. 2002/0126364 Al).
  • Figure 4 illustrates an optical compensation film (diffuser) fabricated on the opposite surface of the substrate from which a light modulating element resides.
  • Figures 5A to 5C illustrate various embodiments of spatial light modulators comprising integrated optical compensation structures.
  • Figure 6 illustrates an embodiment of a spatial light modulator comprising an integrated optical compensation structure that scatters light.
  • Figures 7A and 7B illustrate various embodiments of spatial light modulators comprising integrated optical compensation structures.
  • Figure 8 illustrates an embodiment of a manufacturing process flow diagram for making spatial light modulators comprising integrated optical compensation structures.
  • Figure 9 illustrates an embodiment of a spatial light modulator comprising an integrated optical compensation structure.
  • a preferred embodiment is an lnterferometric modulator that includes at least one integrated optical compensation structure.
  • the optical compensation structure is arranged between the substrate and the hght-modulatmg elements of the lnterferometric modulator.
  • the light-modulating elements are arranged between the substrate and the optical compensation structure.
  • Various examples of lnterferometric modulators are described in U.S. Patent
  • two lnterferometric modulator structures 114 and 116 each include a secondary mirror 102 with a corrugated pattern 104 etched into its upper (outer) surface 103, using any of a variety of known techniques. The corrugation does not extend through the membrane 106 on which the mirror is formed so that the inner surface 108 of the mirror remains smooth.
  • Figure IB reveals the pattern of etched corrugation 104 on the secondary mirror and the smooth inner surface 112 which remains after etch.
  • the corrugated pattern which can be formed in a variety of geometries (e.g., rectangular, pyramidal, conical), provides structural stiffening of the mirror, making it more immune to variations in material stresses, reducing total mass, and preventing deformation when the mirror is actuated.
  • an lnterferometric modulator which has either no voltage applied or some relatively steady state voltage, or bias voltage, applied is considered to be in a quiescent state and will reflect a particular color, a quiescent color.
  • the quiescent color is determined by the thickness of the sacrificial spacer upon which the secondary mirror is fabricated.
  • Each lnterferometric modulator 114, 116 is rectangular and connected at its four corners to four posts 118 via support arms such as 120 and 122.
  • the lnterferometric modulator array will be operated at a selected constant bias voltage. In those cases, the secondary mirror 102 will generally maintain a quiescent position which is closer to corresponding primary mirror 128 than without any bias voltage applied.
  • each lnterferometric modulator may maintain a different biased position (distance from the primary mirror) via control of the dimensions of the support arm and its resulting spring constant. The thicker the support arm is, the greater its spring constant.
  • lnterferometric modulators 114, 116 are both shown in quiescent states with the same bias voltage applied.
  • the gap spacing 126 for lnterferometric modulator 114 is larger than gap spacing 128 for lnterferometric modulator 116 by virtue of the larger dimensions of its respective support arms.
  • lnterferometric modulators are also known.
  • U.S. Patent Publication No 2002/0126364 Al also describes various passive optical compensation structures for minimizing color shift as the angle of incidence changes (a characteristic typical of lnterferometric structures) and active optical compensation structures for supplying supplemental illumination.
  • an optical compensation film may be fabricated on the opposite surface of the substrate from which the array of light modulating elements resides. Such films can be designed and fabricated in a number of ways, and may be used in conjunction with each other [0043]
  • a passive optical compensation film 600 is a volume or surface relief holographic film.
  • a volume holographic film may be produced by exposing a photosensitive polymer to the interference pattern produced by the intersection of two or more coherent light sources (e.g., lasers). Using the appropriate frequencies and beam orientations arbitrary periodic patterns of refractive indices within the film may be produced.
  • a surface relief holographic film may be produced by creating a metal master using any number of microfab ⁇ cation techniques known by those skilled in the art. The master is subsequently used to pattern the film Such films can be used to enhance the transmission and reflection of light withm a definable cone of angles, thus minimizing off-axis light The colors and brightness of a display viewed with on axis light are enhanced and color shift is diminished because brightness goes down significantly outside of the cone.
  • FIG. 3B another approach is illustrated for a device 604 in which an array of passive optical compensation structures 606 is fabricated on the substrate.
  • These structures which can be fabricated using the techniques referenced in U.S Patent Publication No. 2002/0126364 Al, can be considered photonic crystals, as described in the book "Photonic Crystals", by John D. Joannopoulos, et al. They are essentially three-dimensional lnterferometric arrays which demonstrate interference from all angles.
  • a three-layer polymeric film 610 contains suspended particles
  • the particles are actually single or multi-layer dielectric mirrors which have been fabricated in the form of microscopic plates
  • These plates may be fabricated by deposition of multilayer dielectric films onto a polymer sheet which, when dissolved, leaves a film which can "ground up” in a way which produces the plates.
  • the plates are subsequently mixed into a liquid plastic precursor.
  • the mirrors can be designed so that they only reflect at a range of grazing angles. Consequently, light is either reflected or transmitted depending on the incidence angle with respect to the mirror.
  • layer 612 is oriented to reflect light 609 of high incidence that enters the film 610 closer to the perpendicular.
  • Layer 614 reflects light 613 of lower incidence into a more perpendicular path.
  • Layer 616 modifies the even lower angle incident light 615. Because the layers minimally affect light which approaches perpendicularly, they each act as a separate "angle selective incidence filter" with the result that randomly oriented incident light couples into the substrate with a higher degree of perpendicularly. This minimizes the color shift of a display viewed through this film.
  • a passive optical compensation structure illustrated in another example of a passive optical compensation structure, illustrated in
  • micro lenses 622 are used in an array in device 620.
  • Each lens 622 may be used to enhance the fill factor of the display by effectively magnifying the active area of each pixel. This approach may be used by itself or in conjunction with the other color shift compensation films. [0047] In an example of an active optical compensation structure, illustrated in Figure
  • device 624 uses supplemental lighting in the form of a fronthghtmg array.
  • an organic light emitting material 626 for example, Alq/diamme structures and poly(phenylene vmylene)
  • the top view, Figure 3F reveals a pattern 627 which corresponds with the lnterferometric modulator array underneath. That is, the light emitting areas 626 are designed to obscure the inactive areas between the lnterferometric modulator, and allow a clear aperture in the remaining regions. Light is actively emitted into the substrate onto the lnterferometric modulator and is subsequently reflected back to the viewer.
  • a patterned emitting film may be applied to the backplate of the display and light transmitted forward through the gaps between the sub-pixels By patterning a mirror on the front of the display, this light can be reflected back upon the lnterferometric modulator array.
  • Peripherally mounted light sources in conjunction with films relying on total internal reflection are yet another approach
  • U.S. Patent No. 6,055,090 also discloses an lnterferometric modulator having an active optical compensation structure that includes a supplemental frontlightmg source.
  • Figure 4 illustrates an lnterferometric modulator 10 comprising a passive optical compensation film (a diffuser 22) fabricated on the opposite surface of the substrate from which a light modulating element resides.
  • the diffuser 22 generally compensates for the specular appearance of an uncompensated spatial light modulator array, e.g., by making the reflective array appear less like a mirror and more like paper.
  • a light modulating element 8 comprises a movable wall or element 16, a cavity 20, and a support post 18. As illustrated in Figure 4, the movable wall 16 is supported over the cavity 20 by the support post 18.
  • An optical stack 14 forms a wall of the cavity 20 opposite to the movable wall 16.
  • the optical stack 14 may be considered part of the light modulating element 8
  • the optical stack 14 is fabricated on a transparent substrate 12, and the diffuser 22 is fabricated on the opposite side of the substrate 12 from the light modulating element 8 In operation, the movable wall 16 moves through planes parallel to the front wall of the cavity 20.
  • the movable wall 16 is highly reflective and typically comprises a metal. As the movable wall 16 moves toward the optical stack 14 on the opposite side of the cavity 12, self- interference of light (typically entering through the transparent substrate 12 and the optical stack 14) within the cavity 20 occurs. The color of the reflected light that exits the cavity through the transparent substrate 12 and the optical stack 14 may be controlled by varying the distance between the optical stack 14 and the movable wall 16.
  • the surface of the transparent substrate 12 in contact with the optical stack 14 is the surface upon which the light modulating element 8 is fabricated.
  • the diffuser 22 is typically fabricated or attached to the opposite surface of the transparent substrate 12 after fabrication of the light modulating element 8. [0049] As illustrated in Figure 4 and by the disclosure of U.S. Patent Publication No.
  • passive optical compensation structures for spatial light modulators are typically fabricated on the opposite surface of the substrate from which the array of light modulating elements resides to facilitate existing manufacturing process flows
  • Manufacturing of the overall display system typically involves producing the various components separately, such as the passive optical compensation structures, the lnterferometric modulator structures, the driver electronics, the graphics control functions, etc., and then integrating them at a later stage in the manufacturing process flow. Producing the various components separately and then integrating them at a later stage simplifies the delicate task of manufacturing the light modulating elements by reducing the need for complex deposition and micro-fabrication schemes.
  • spatial light modulators become increasingly sophisticated, it is anticipated that difficulties associated with fabricating them by current manufacturing process flows will also increase.
  • An embodiment provides spatial light modulators having an integrated optical compensation structure, e.g., an optical compensation structure located between the substrate and the hght-modulating elements, or an optical compensation structure located on the opposite side of the hght-modulating elements from the substrate.
  • the optical compensation structure may be active or passive, as desired.
  • a "passive" optical compensation structure is one that does not supply a supplemental fronflighting source.
  • Figure 4 illustrates a passive optical compensation film (a diffuser 22) fabricated on the opposite surface of the substrate from which a light modulating element resides.
  • the light modulating element 8 is an lnterferometric modulator comprising the movable wall or element 16, the cavity 12, the support post 18.
  • the optical stack 14 is fabricated on the transparent substrate 12, and the diffuser 22 is fabricated on the opposite side of the substrate 12 from the light modulating element 8.
  • the optical stack 14 may be considered part of the light modulating element 8.
  • an lnterferometric modulator may modulate between a black, or absorbing state, and a reflecting state.
  • the reflecting state is a non-interference based state that appears to be white.
  • the modulating elements preferably have a structure that is similar to those embodiments of lnterferometric modulators that rely upon the interference characteristics and will be referred to as such herein.
  • lnterferometric modulators may modulate between an absorbing state and an interference state, between an absorbing state and a reflective state, between a reflective state and an interference state, or between two different interference states.
  • Figure 5A illustrates an embodiment of a spatial light modulator 40 in which a passive optical compensation structure (diffuser 41) is arranged between a substrate 42 and a hght- modulating element 44, rather than being on the opposite side of the substrate from the light modulating element as shown in Figure 4.
  • the hght- modulatmg element 44 is an lnterferometric modulator comprising a cavity 45, a movable wall 46, an optical stack 43, and a support 47
  • the optical stack 43 is on the wall of the cavity 45 that is opposite to the movable wall 46.
  • the spatial light modulator 40 further comprises a plana ⁇ zation layer 48 between the substrate 42 and the optical stack 43.
  • Both the movable wall 46 and the optical stack 43 are reflective, so that operation of spatial light modulator 40 is generally similar to that described for the spatial light modulator 10 illustrated in Figure 4.
  • the substrate 42 is at least partially transparent.
  • the hght-modulating element 44 may be configured in an array comprising a plurality of individually addressable hght-modulatmg elements arranged over a transparent substrate and configured to modulate light transmitted through the transparent substrate.
  • the diffuser 41 illustrated in Figure 5A is representative of various optical compensation structures (both active and passive) that may be arranged between the substrate and the plurality of individually addressable hght- modulating elements
  • an active optical compensation structure may supply a supplemental fronthghting source.
  • passive optical compensation structures include an anti-reflective layer, a diffractive optical element, a structure that scatters light, a black mask, a color filter, a microlens array, a holographic film (e.g., that mitigates a shift in reflected color with respect to an angle of incidence of the light transmitted through the transparent substrate), or a combination thereof.
  • Figure 5B illustrates an embodiment of a spatial light modulator 33 in which a passive optical compensation structure (black mask 32) is arranged between a transparent substrate 12 and a reflecting element 31.
  • the reflecting element may be an optical stack. Black masks such as the black mask 32 may be used to mask parts of the spatial light modulator structure that are not desirable for the viewer to see.
  • a light modulating element or elements are omitted from Figure 5B for cla ⁇ ty, but are understood to be arranged over the transparent substrate 12 and configured to modulate light transmitted through the transparent substrate 12.
  • the light modulating element of Figure 5B may comprise a plurality of individually addressable hght-modulating elements arranged over the reflecting element 31 as discussed above with respect to Figure 5A.
  • the spatial light modulator 33 may include a plana ⁇ zation layer 30, e g , between the black mask 32 and the reflecting element 31 as shown in Figure 5B
  • Figure 5C illustrates an embodiment of a spatial light modulator 37 in which a passive optical compensation structure (comprising color filter elements 34, 36, 38) is arranged between a transparent substrate 12 and a reflecting element 39
  • the reflecting element 39 may be an optical stack
  • the color filter elements 34, 36, 38 are red, green and blue, respectively, but other colors m&y be selected by those skilled in the art so that the resulting spatial light modulator produces the desired colors.
  • a light modulating element or elements are omitted from Figure 5C for clarity, but are understood to be arranged over the transparent substrate 12 and configured to modulate light transmitted through the transparent substrate 12
  • the light modulating element of Figure 5C may comprise a plurality of individually addressable hght-modulatmg elements arranged over the optical stack as discussed above with respect to Figure 5A.
  • the spatial light modulator 37 may include a plana ⁇ zation layer 30, e.g., between the color filter elements 34, 36, 38 and the optical stack 39 as shown m Figure 5C [0056] lnterferometric modulators that produce only black and white may be used in combination with color filters to produce colored light. lnterferometric modulators may be fabricated to produce various colors by varying the size of the cavity. However, varying the size of the cavity may involve varying the manufacturing process, e.g., by manufacturing a different size cavity for an lnterferometric modulator that produces green light than for an lnterferometric modulator that produces red light The use of black and white lnterferometric modulators in combination with color filters may substantially simplify the manufacturing process.
  • Figure 6 illustrates an embodiment of a spatial light modulator 100 in which a passive optical compensation structure 105 (a plana ⁇ zation layer comprising a scattering element 110) is arranged between a transparent substrate 115 and a hght-modulating element 120.
  • the hght-modulatmg element 120 is an lnterferometric modulator comprising a cavity 130, a movable wall 125, and an optical stack 135.
  • the optical stack 135 is on the wall of the cavity 130 that is opposite to the movable wall 125.
  • Both the movable wall 125 and the optical stack 135 are reflective (the optical stack 135 is partially reflective), so that operation of spatial light modulator 100 is generally similar to that described for the spatial light modulator 10 illustrated in Figure 4.
  • Light 140 passes through a slot 150 in the movable wall 125 and reflects from the scattering element 110 such that it scatters the light 140 back to the movable wall 125 (and m some cases back again to the scatte ⁇ ng element 110), ultimately passing through the transparent substrate 115 and exiting 160, 165 as shown in Figure 6.
  • the scattering element 110 is shaped such that the light 140 is scattered randomly.
  • Figures 7A and 7B illustrate embodiments of spatial light modulators comprising different combinations of integrated optical compensation structures.
  • Figure 7A illustrates an embodiment of a spatial light modulator 60 in which a passive optical compensation structure (comprising a color filter element 34 and a black mask 32) is arranged between a transparent substrate 12 and an optical stack 61.
  • Figure 7B illustrates an embodiment of a spatial light modulator 62 in which a first passive optical compensation structure (comprising a color filter element 40 and a black mask 32) and a second passive optical compensation structure (comprising diffuser 26) are arranged between a transparent substrate 12 and an optical stack 63.
  • a light modulating element or elements e.g., a plurality of individually addressable hght-modulating elements
  • Figures 7A and 7B are omitted from Figures 7A and 7B for clarity, but are understood to be arranged over the transparent substrate 12 and configured to modulate light transmitted through the transparent substrate.
  • the spatial light modulators 60, 62 may include a plana ⁇ zation layer 30 e.g., between the passive optical compensation structure (comprising the color filter element 34 and the black mask 32) and the optical stack 61 as shown in Figure 7A, or between the first and second passive optical compensation structures as shown in Figure 7B.
  • the spatial light modulator may include an additional plana ⁇ zation layer, e g., a plana ⁇ zation layer 35 as shown in Figure 7B between the first passive optical compensation structure (comprising a color filter element 40 and a black mask 32) and the optical stack 63.
  • Spatial light modulators may comprise an optical compensation structure that performs one or more functions (e.g., a color filter and a black mask as illustrated in Figure 7A), and/or the optical compensation structure may comprise multiple layers, optionally separated from each other by plana ⁇ zation layers (e g., as illustrated in Figure 7B)
  • the term "optical compensation structure” may be used to refer to a structure having a particular function (e.g., the diffuser 26), a layer having multiple functions (e g., comprising the color filter element 34 and the black mask 32), or multiple layers each having one or more functions as illustrated in Figure 7B, optionally including plana ⁇ zation layer(s).
  • spatial light modulators may comprise any combination of active and/or passive optical compensation structures, e.g., a black mask and a color filter, a black mask and a diffuser; a color filter and a diffuser; a black mask, color filter and a diffuser, etc.
  • Means for compensating the light transmitted through the transparent substrate include optical compensation structures as described herein.
  • Spatial light modulators comprising an optical compensation structure may be fabricated by integrating the fabrication of the optical compensation structure into the process for fabricating the spatial light modulator. An example of such a process is illustrated in Figure 8. The process begins with the substrate being provided at step 50. Typically, the substrate is glass, plastic or other transparent substrate.
  • transparent encompasses materials that are substantially transparent to the operational wavelength(s) of the spatial light modulator, and thus transparent substrates need not transmit all wavelengths of light and may absorb a portion of the light at the operational wavelength(s) of the spatial light modulator.
  • the transparent substrate may be tinted and/or polarized if desired for a particular application.
  • the transparency and reflectivity of the substrate may be varied, depending on the configuration and the function desired.
  • the substrate is at least partially transparent and may be substantially transparent.
  • the substrate is at least partially reflective and may be substantially reflective. It is understood that a substrate may be both partially transparent and partially reflective.
  • the process illustrated in Figure 8 continues at step 52 with the fabrication of the optical compensation structure.
  • the mate ⁇ als and methods used for its fabrication may vary.
  • a diffuser film may be fabricated by spm-coatmg the substrate using a polymer or polymer solution that contains scattering elements dispersed therein.
  • the polymer may be a polyimide and the scattering elements may be microscopic glass beads.
  • Color filters and black masks may be appropriately dyed photoresist polymers fabricated on the substrate using known photoresist deposition and masking techniques.
  • Black masks may also be inorganic materials such as chrome oxide, also known as black chrome, fabricated on the substrate using known deposition and masking techniques [0062]
  • the process illustrated in Figure 8 continues at step 54 with the deposition of a planarization layer.
  • the planarization layer or layers are typically polymers, e.g., polyimide, and may be deposited using known deposition and masking techniques
  • the deposition of a planarization layer is an optional, but is often preferred because it results in a suitable substrate for subsequent processing steps.
  • step 56 the fabrication of individually addressable hght-modulatmg elements (e.g , lnterferometric modulator elements) over the optical compensation structure and, if present, the planarization layer lnterferometric modulators are generally fabricated using thin film deposition processes, e g , as described in U.S. Patent Nos 5,835,255 and 6,055,090, and in U S. Patent Publication No 2002/0126364 Al.
  • a variation of this process, also illustrated in Figure 8, involves the fabrication of an additional planarization layer at step 58, followed by the fabrication of an additional optical compensation structure at step 59.
  • FIG. 8 illustrates an embodiment of a spatial light modulator 200 in which a light modulating element 205 is arranged between a substrate 210 and an optical compensation structure 215.
  • the hght-modulating element 205 is an lnterferometric modulator comprising a cavity 220, a movable wall 225, an optical stack 230, and supports 235.
  • the optical stack 230 is on the wall of the cavity 220 that is opposite to the movable wall 225.
  • the optical compensation structure 215 may be any of the optical compensation structures described herein, e.g., an active optical compensation structure that supplies a supplemental front ghtmg source, and/or a passive optical compensation structure, e g., an anti- reflective layer, a diffractive optical element, a structure that scatters light, a black mask, a color filter, a diffuser, a microlens array, a holographic film that mitigates a shift in reflected color with respect to an angle of incidence of the light transmitted through the substrate, or a combination thereof.
  • an active optical compensation structure that supplies a supplemental front ghtmg source
  • a passive optical compensation structure e.g., an anti- reflective layer, a diffractive optical element, a structure that scatters light, a black mask, a color filter, a diffuser, a microlens array, a holographic film that mitigates a shift in reflected color with respect to an angle of incidence of the light transmitted through the substrate, or
  • the hght-modulating element 205 comprises an lnterferometric modulator, but other spatial light modulators may also be used
  • a spatial light modulator in which a light modulating element is arranged between a substrate and an optical compensation structure may be fabricated by a process similar to that illustrated in Figure 8, except that the individually addressable hght-modulatmg elements are fabricated over the substrate, followed by fabrication of the optical compensation structure(s) over the individually addressable hght-modulating elements (e.g., step 56 in Figure 8 is conducted after step 50 and prior to step 52).
  • a planarization layer may be fabricated over the over the individually addressable hght-modulating elements, followed by fabrication of the optical compensation structure(s) over the planarization layer.

Abstract

A spatial light modulator comprises an integrated optical compensation structure, e.g., an optical compensation structure arranged between a substrate and a plurality of individually addressable light-modulating elements, or an optical compensation structure located on the opposite side of the light-modulating elements from the substrate. The individually addressable light-modulating elements are configured to modulate light transmitted through or reflected from the transparent substrate. Methods for making such spatial light modulators involve fabricating an optical compensation structure over a substrate and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure. The optical compensation structure may be a passive optical compensation structure. The optical compensation structure may include one or more of a supplemental frontlighting source, a diffuser, a black mask, a diffractive optical element, a color filter, an anti-reflective layer, a structure that scatters light, a microlens array, and a holographic film.

Description

SPATIAL LIGHT MODULATOR WITH INTEGRATED OPTICAL COMPENSATION STRUCTURE
Cross-Reference to Related Applications [0001] This application is a continuation of U.S. Patent Application No. 11/036,965, filed January 14, 2005, which claims priority to U.S. Provisional Patent Application Serial No. 60/541,607, filed February 3, 2004; U.S. Provisional Patent Application Serial No. 60/613,482, filed September 27, 2004; U S. Provisional Patent Application Serial No. 60/613,536, filed September 27, 2004, and U.S. Provisional Patent Application Serial No. 60/613,542, filed September 27, 2004. Background Field of the Invention [0002] This invention relates to improvements in the manufacturing and performance of spatial light modulators such as lnterferometric modulators. Description of the Related Art [0003] Spatial light modulators are display devices that contain arrays of individually addressable light modulating elements. Examples of spatial light modulators include liquid crystal displays and lnterferometric modulator arrays. The light modulating elements in such devices typically function by altering the characteristics of light reflected or transmitted through the individual elements, thus altering the appearance of the display. Summary [0004] As spatial light modulators become increasingly sophisticated, the inventor anticipates that difficulties associated with fabricating them by current manufacturing process flows will also increase. Accordingly, the inventor has developed spatial light modulators having integrated optical compensation structures and methods for making them. [0005] An embodiment provides a spatial light modulator that includes a substrate; a plurality of individually addressable light-modulating elements arranged over the substrate and configured to modulate light; and an optical compensation structure; wherein the optical compensation structure is arranged between the substrate and the plurality of individually addressable light-modulating elements. In certain embodiments, the optical compensation structure is a passive optical compensation structure. [0006] An embodiment provides a spatial light modulator that includes a substrate; a plurality of individually addressable light-modulating elements arranged over the substrate and configured to modulate light; and an optical compensation structure; wherein the plurality of individually addressable hght-modulatmg elements is arranged between the substrate and the optical compensation structure. The optical compensation structure comprises at least one of a color filter, black mask, and anti-reflective layer. [0007] Another embodiment provides a method of making a spatial light modulator that includes fabricating an optical compensation structure over a transparent substrate; and fabricating a plurality of individually addressable hght-modulatmg elements over the optical compensation structure, the individually addressable hght-modulatmg elements being configured to modulate light transmitted through the transparent substrate. In certain embodiments, fabricating the optical compensation structure includes fabricating a passive optical compensation structure [0008] Another embodiment provides a method of making a spatial light modulator that includes fabricating a plurality of individually addressable light-modulating elements over a substrate, and fabricating an optical compensation structure over the plurality of individually addressable light-modulating elements, the individually addressable hght-modulatmg elements being configured to modulate light transmitted through the optical compensation structure. The optical compensation structure comprises at least one of a color filter, mask, and anti-reflective layer [0009] Another embodiment provides a spatial light modulator that includes a transparent substrate; a plurality of individually addressable lnterferometric light-modulating elements arranged over the transparent substrate and configured to modulate light transmitted through the transparent substrate, the lnterferometric hght-modulatmg elements comprising a cavity and a movable wall; and at least one optical compensation structure arranged between the transparent substrate and the plurality of individually addressable lnterferometric light-modulating elements, the optical compensation structure comprising a color filter or diffuser [0010] Another embodiment provides a spatial light modulator that includes a substrate; a means for modulating light transmitted through or reflected from the substrate; and a means for compensating the light transmitted through or reflected from the substrate; wherein the means for compensating the light is operatively arranged between the substrate and the means for modulating light transmitted through or reflected from the substrate. In certain embodiments, the means for compensating the light transmitted through or reflected from the substrate is a means for passively compensating the light transmitted through or reflected from the substrate [0011] Another embodiment provides a spatial light modulator that includes a substrate; a means for modulating light transmitted through or reflected from the substrate; and a means for compensating the light transmitted through or reflected from the substrate; wherein the means for modulating light transmitted through or reflected from the substrate is operatively arranged between the substrate and the means for compensating the light. The means for compensating the light transmitted through or reflected from the substrate compπses at least one of a color filter, black mask, and anti-reflective layer. [0012] Another embodiment provides a spatial light modulator made by a method that includes fabricating an optical compensation structure over a transparent substrate; and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure, the individually addressable light-modulating elements being configured to modulate light transmitted through the transparent substrate. [0013] Another embodiment provides a spatial light modulator made by a method that includes fabricating a plurality of individually addressable light-modulating elements over a substrate; and fabricating an optical compensation structure over the plurality of individually addressable hght-modulatmg elements, the individually addressable light-modulating elements being configured to modulate light transmitted through the optical compensation structure. The optical compensation structure comprises at least one of a color filter, black mask, and anti- reflective layer. [0014] Other embodiments described herein may also provide for simplified fabrication in some cases. [0015] In another embodiment, a display region comprises a black and white hght- modulating element and a color filter. The black and white light-modulating element includes first and second reflective surfaces and a cavity therebetween. The second surface is movable with respect to the first surface The color filter is configured to transmit colored light when illuminated with white light The color filter is positioned with respect to the ght-modulatmg element such that light output from the light-modulating element is filtered by the color filter. [0016] The black and white light-modulating element may comprise a black and white lnterferometric modulator. The black and white hght-modulatmg element may be included in an array of other light-modulating elements such as other black and white modulating elements. Additional color filters, possibly in an array, may also be included. Color filters with different responses may be used for different light-modulating elements to yield different colors (e.g , red, green, and blue). [0017] In another embodiment, a display region comprises a plurality of hght- modulating elements that includes first and second reflective surfaces and a cavity therebetween. The second surface is movable with respect to the first surface. The display region further comprises a plurality of color filter elements configured to transmit a narrower range of wavelengths when illuminated with a broader range of wavelengths. The color filter elements are positioned with respect to the light-modulating elements such that light output from the hght- modulatmg elements is filtered by the color filter elements. The first reflective surface is separated from the second reflective surface by a substantially equal distance for each of the plurality of light-modulating elements when the light-modulating elements output light (e.g., white light). [0018] The hght-modulatmg elements may comprise black and white light-modulating elements. The hght-modulatmg elements may comprise lnterferometric modulators or other types of modulators. The hght-modulatmg elements may output light when in, for example, a reflective state [0019] The plurality of color filter elements may include two or three or more color filter elements configured to produce different color output (e g., red, green, blue). The color filter elements may compπse material (e g , dyed material like dyed photoresist) that transmits a narrower range of wavelengths when illuminated with a broader range of wavelengths In various embodiments, this material may transmit color light when illuminated with white light. [0020] In another embodiment, a display region comprises a plurality of hght- modulating elements and a color filter array Each of the light-modulating elements includes first and second reflective surfaces and a cavity therebetween. The second surface is movable with respect to the first surface. The color filter array includes a plurality of color filter elements configured to transmit a narrower range of wavelengths when illuminated with a broader range of wavelengths. The color filter array is positioned with respect to the light-modulating elements such that light output from the light-modulating elements is filtered by the color filter elements. The first reflective surface is separated from the second reflective surface by a substantially equal distance for each of the plurality of light-modulating elements when the light-modulating elements output light (e.g., white light). At least two of the color filter elements are configured to produce different color output. [0021] Another embodiment includes a method of manufacturing a display device. In this method, a black and white light-modulating element is provided. The black and white ght- modulating element that is provided includes first and second optical surfaces, wherein the second optical surface is movable with respect to the first optical surface. A color filter is positioned with respect to the light-modulating element so that white light output from the light-modulating element is filtered by the color filter. The color filter is configured to transmit colored light when illuminated with white light. [0022] The black and white light-modulating element may comprise a black and white lnterferometric modulator. The black and white hght-modulatmg element may be included in an array of other light-modulating elements such as other black and white modulating elements. Additional color filters, possibly in an array, may also be included. Color filters with different responses may be used for different hght-modulatmg elements to yield different colors (e g., red, green, and blue) [0023] Another embodiment includes a method of manufacturing a display region. In this method, a plurality of light-modulating elements each including first and second optical surfaces and a cavity therebetween are provided. The first reflective surface is separated from the second reflective surface by a substantially equal distance for each of the plurality of hght- modulating elements when the hght-modulatmg elements output light. Color filter elements are positioned with respect to the hght-modulatmg elements so that light output from the hght- modulating elements is filtered by respective color filter elements. In various embodiments, the color filter elements may include material configured to transmit a narrow range of wavelengths when illuminated with a broad range of wavelengths. In certain embodiments, the color filter elements are included in an array. The array may include at least two color filter elements configured to produce different color output. [0024] The ght-modulating elements may comprise black and white light-modulating elements. The hght-modulating elements may comprise lnterferometric modulators or other types of modulators. The hght-modulatmg elements may output light when in, for example, a reflective state. [0025] The plurality of color filter elements may include two or three or more color filter elements configured to produce different color output (e.g., red, green, blue). The color filter elements may comprise material such as a dyed material like dyed photoresist The material may transmit color when illuminated with white light [0026] Another embodiment includes a display device comprising means for producing a modulated white light signal including first and second optical surfaces, wherein the second optical surface is movable with respect to the first optical surface The display device further comprises means for filtering the modulated white light signal so as to transform the white light signal into a colored light signal. [0027] These and other embodiments are described in greater detail below. Brief Description of the Drawings [0028] These and other aspects of the invention will be readily apparent from the following description and from the appended drawings, which are meant to illustrate and not to limit the invention, and wherein- [0029] Figures 1A and IB illustrate some characteristics of a typical lnterferometric modulator (see Figures 1A and IB of U S. Patent Publication No. 2002/0126364 Al). [0030] Figure 2 illustrates some characteristics of a typical lnterferometric modulator
(see Figure 2 of U.S. Patent Publication No. 2002/0126364 Al) [0031] Figures 3A - 3F illustrate optical compensation films fabricated on the opposite surface of the substrate from which an array of light modulating elements resides (see Figure 6A - 6F of U.S. Patent Publication No. 2002/0126364 Al). [0032] Figure 4 illustrates an optical compensation film (diffuser) fabricated on the opposite surface of the substrate from which a light modulating element resides. [0033] Figures 5A to 5C illustrate various embodiments of spatial light modulators comprising integrated optical compensation structures. [0034] Figure 6 illustrates an embodiment of a spatial light modulator comprising an integrated optical compensation structure that scatters light. [0035] Figures 7A and 7B illustrate various embodiments of spatial light modulators comprising integrated optical compensation structures. [0036] Figure 8 illustrates an embodiment of a manufacturing process flow diagram for making spatial light modulators comprising integrated optical compensation structures. [0037] Figure 9 illustrates an embodiment of a spatial light modulator comprising an integrated optical compensation structure. Detailed Description of Preferred Embodiments [0038] A preferred embodiment is an lnterferometric modulator that includes at least one integrated optical compensation structure. In some configurations, the optical compensation structure is arranged between the substrate and the hght-modulatmg elements of the lnterferometric modulator. In other configurations, the light-modulating elements are arranged between the substrate and the optical compensation structure. [0039] Various examples of lnterferometric modulators are described in U.S. Patent
Publication No. 2002/0126364 Al . Figures 1 and 2 illustrate some characteristics of a typical lnterferometric modulator (see Figures 1 and 2 of U.S. Patent Publication No. 2002/0126364 Al and the corresponding text). Referring to Figures 1A and IB, two lnterferometric modulator structures 114 and 116 each include a secondary mirror 102 with a corrugated pattern 104 etched into its upper (outer) surface 103, using any of a variety of known techniques. The corrugation does not extend through the membrane 106 on which the mirror is formed so that the inner surface 108 of the mirror remains smooth. Figure IB reveals the pattern of etched corrugation 104 on the secondary mirror and the smooth inner surface 112 which remains after etch. The corrugated pattern, which can be formed in a variety of geometries (e.g., rectangular, pyramidal, conical), provides structural stiffening of the mirror, making it more immune to variations in material stresses, reducing total mass, and preventing deformation when the mirror is actuated. [0040] In general, an lnterferometric modulator which has either no voltage applied or some relatively steady state voltage, or bias voltage, applied is considered to be in a quiescent state and will reflect a particular color, a quiescent color. As referenced in U.S. Patent Publication No. 2002/0126364 Al, the quiescent color is determined by the thickness of the sacrificial spacer upon which the secondary mirror is fabricated. [0041] Each lnterferometric modulator 114, 116 is rectangular and connected at its four corners to four posts 118 via support arms such as 120 and 122. In some cases (see discussion in U.S. Patent Publication No. 2002/0126364 Al), the lnterferometric modulator array will be operated at a selected constant bias voltage. In those cases, the secondary mirror 102 will generally maintain a quiescent position which is closer to corresponding primary mirror 128 than without any bias voltage applied. The fabrication of lnterferometric modulators with differently sized support arms allows for the mechanical restoration force of each lnterferometric modulator to be determined by its geometry. Thus, with the same bias voltage applied to multiple lnterferometric modulators, each lnterferometric modulator may maintain a different biased position (distance from the primary mirror) via control of the dimensions of the support arm and its resulting spring constant. The thicker the support arm is, the greater its spring constant. Thus different colors (e.g , red, green, and blue) can be displayed by different lnterferometric modulators without requiring deposition of different thickness spacers Instead, a single spacer, deposited and subsequently removed during fabrication, may be used while color is determined by modifying the support arm dimensions during the single photolithographic step used to define the arms. For example, in Figure 2, lnterferometric modulators 114, 116 are both shown in quiescent states with the same bias voltage applied. However, the gap spacing 126 for lnterferometric modulator 114 is larger than gap spacing 128 for lnterferometric modulator 116 by virtue of the larger dimensions of its respective support arms. Various other examples of lnterferometric modulators are also known. [0042] U.S. Patent Publication No 2002/0126364 Al also describes various passive optical compensation structures for minimizing color shift as the angle of incidence changes (a characteristic typical of lnterferometric structures) and active optical compensation structures for supplying supplemental illumination. For example, as illustrated in Figures 3A - 3F (see Figures 6A - 6F of U.S. Patent Publication No. 2002/0126364 Al), an optical compensation film may be fabricated on the opposite surface of the substrate from which the array of light modulating elements resides. Such films can be designed and fabricated in a number of ways, and may be used in conjunction with each other [0043] In Figure 3A, a passive optical compensation film 600 is a volume or surface relief holographic film. A volume holographic film may be produced by exposing a photosensitive polymer to the interference pattern produced by the intersection of two or more coherent light sources (e.g., lasers). Using the appropriate frequencies and beam orientations arbitrary periodic patterns of refractive indices within the film may be produced. A surface relief holographic film may be produced by creating a metal master using any number of microfabπcation techniques known by those skilled in the art. The master is subsequently used to pattern the film Such films can be used to enhance the transmission and reflection of light withm a definable cone of angles, thus minimizing off-axis light The colors and brightness of a display viewed with on axis light are enhanced and color shift is diminished because brightness goes down significantly outside of the cone. [0044] In Figure 3B, another approach is illustrated for a device 604 in which an array of passive optical compensation structures 606 is fabricated on the substrate. These structures, which can be fabricated using the techniques referenced in U.S Patent Publication No. 2002/0126364 Al, can be considered photonic crystals, as described in the book "Photonic Crystals", by John D. Joannopoulos, et al. They are essentially three-dimensional lnterferometric arrays which demonstrate interference from all angles. This provides the ability to design waveguides which can perform a number of functions including channeling incident light of certain frequencies to the appropriately colored pixels, or by changing light of a certain incidence angle to a new incidence angle, or some combination of both [0045] In another example of a passive optical compensation structure, seen in Figure
3C, a three-layer polymeric film 610 contains suspended particles The particles are actually single or multi-layer dielectric mirrors which have been fabricated in the form of microscopic plates These plates, for example, may be fabricated by deposition of multilayer dielectric films onto a polymer sheet which, when dissolved, leaves a film which can "ground up" in a way which produces the plates. The plates are subsequently mixed into a liquid plastic precursor. By the application of electric fields during the cuπng process, the orientation of these plates may be fixed during manufacture. The mirrors can be designed so that they only reflect at a range of grazing angles. Consequently, light is either reflected or transmitted depending on the incidence angle with respect to the mirror. In Figure 3C, layer 612 is oriented to reflect light 609 of high incidence that enters the film 610 closer to the perpendicular. Layer 614 reflects light 613 of lower incidence into a more perpendicular path. Layer 616 modifies the even lower angle incident light 615. Because the layers minimally affect light which approaches perpendicularly, they each act as a separate "angle selective incidence filter" with the result that randomly oriented incident light couples into the substrate with a higher degree of perpendicularly. This minimizes the color shift of a display viewed through this film. [0046] In another example of a passive optical compensation structure, illustrated in
Figure 3D, micro lenses 622 are used in an array in device 620. Each lens 622 may be used to enhance the fill factor of the display by effectively magnifying the active area of each pixel. This approach may be used by itself or in conjunction with the other color shift compensation films. [0047] In an example of an active optical compensation structure, illustrated in Figure
3E, device 624 uses supplemental lighting in the form of a fronthghtmg array. In this case an organic light emitting material 626, for example, Alq/diamme structures and poly(phenylene vmylene), can be deposited and patterned on the substrate. The top view, Figure 3F, reveals a pattern 627 which corresponds with the lnterferometric modulator array underneath. That is, the light emitting areas 626 are designed to obscure the inactive areas between the lnterferometric modulator, and allow a clear aperture in the remaining regions. Light is actively emitted into the substrate onto the lnterferometric modulator and is subsequently reflected back to the viewer. Conversely, a patterned emitting film may be applied to the backplate of the display and light transmitted forward through the gaps between the sub-pixels By patterning a mirror on the front of the display, this light can be reflected back upon the lnterferometric modulator array. Peripherally mounted light sources in conjunction with films relying on total internal reflection are yet another approach U.S. Patent No. 6,055,090 also discloses an lnterferometric modulator having an active optical compensation structure that includes a supplemental frontlightmg source. [0048] Figure 4 illustrates an lnterferometric modulator 10 comprising a passive optical compensation film (a diffuser 22) fabricated on the opposite surface of the substrate from which a light modulating element resides. The diffuser 22 generally compensates for the specular appearance of an uncompensated spatial light modulator array, e.g., by making the reflective array appear less like a mirror and more like paper. In Figure 4, a light modulating element 8 comprises a movable wall or element 16, a cavity 20, and a support post 18. As illustrated in Figure 4, the movable wall 16 is supported over the cavity 20 by the support post 18. An optical stack 14 forms a wall of the cavity 20 opposite to the movable wall 16. The optical stack 14 may be considered part of the light modulating element 8 The optical stack 14 is fabricated on a transparent substrate 12, and the diffuser 22 is fabricated on the opposite side of the substrate 12 from the light modulating element 8 In operation, the movable wall 16 moves through planes parallel to the front wall of the cavity 20. The movable wall 16 is highly reflective and typically comprises a metal. As the movable wall 16 moves toward the optical stack 14 on the opposite side of the cavity 12, self- interference of light (typically entering through the transparent substrate 12 and the optical stack 14) within the cavity 20 occurs. The color of the reflected light that exits the cavity through the transparent substrate 12 and the optical stack 14 may be controlled by varying the distance between the optical stack 14 and the movable wall 16. The surface of the transparent substrate 12 in contact with the optical stack 14 is the surface upon which the light modulating element 8 is fabricated. The diffuser 22 is typically fabricated or attached to the opposite surface of the transparent substrate 12 after fabrication of the light modulating element 8. [0049] As illustrated in Figure 4 and by the disclosure of U.S. Patent Publication No.
2002/0126364 Al, passive optical compensation structures for spatial light modulators are typically fabricated on the opposite surface of the substrate from which the array of light modulating elements resides to facilitate existing manufacturing process flows Manufacturing of the overall display system typically involves producing the various components separately, such as the passive optical compensation structures, the lnterferometric modulator structures, the driver electronics, the graphics control functions, etc., and then integrating them at a later stage in the manufacturing process flow. Producing the various components separately and then integrating them at a later stage simplifies the delicate task of manufacturing the light modulating elements by reducing the need for complex deposition and micro-fabrication schemes. [0050] As spatial light modulators become increasingly sophisticated, it is anticipated that difficulties associated with fabricating them by current manufacturing process flows will also increase. Accordingly, spatial light modulators having integrated optical compensation structures and methods for making them have been developed. An embodiment provides spatial light modulators having an integrated optical compensation structure, e.g., an optical compensation structure located between the substrate and the hght-modulating elements, or an optical compensation structure located on the opposite side of the hght-modulating elements from the substrate. The optical compensation structure may be active or passive, as desired. In this context, a "passive" optical compensation structure is one that does not supply a supplemental fronflighting source. [0051] As discussed above, Figure 4 illustrates a passive optical compensation film (a diffuser 22) fabricated on the opposite surface of the substrate from which a light modulating element resides. In Figure 4, the light modulating element 8 is an lnterferometric modulator comprising the movable wall or element 16, the cavity 12, the support post 18. The optical stack 14 is fabricated on the transparent substrate 12, and the diffuser 22 is fabricated on the opposite side of the substrate 12 from the light modulating element 8. The optical stack 14 may be considered part of the light modulating element 8. Those skilled in the art appreciate that, in some embodiments, an lnterferometric modulator may modulate between a black, or absorbing state, and a reflecting state. The reflecting state is a non-interference based state that appears to be white. While the white state m these embodiments does not particularly depend on the interference characteristics of the modulator, the modulating elements preferably have a structure that is similar to those embodiments of lnterferometric modulators that rely upon the interference characteristics and will be referred to as such herein. lnterferometric modulators may modulate between an absorbing state and an interference state, between an absorbing state and a reflective state, between a reflective state and an interference state, or between two different interference states. [0052] Figure 5A illustrates an embodiment of a spatial light modulator 40 in which a passive optical compensation structure (diffuser 41) is arranged between a substrate 42 and a hght- modulating element 44, rather than being on the opposite side of the substrate from the light modulating element as shown in Figure 4. In the embodiment illustrated in Figure 5A, the hght- modulatmg element 44 is an lnterferometric modulator comprising a cavity 45, a movable wall 46, an optical stack 43, and a support 47 The optical stack 43 is on the wall of the cavity 45 that is opposite to the movable wall 46. In the illustrated embodiment, the spatial light modulator 40 further comprises a planaπzation layer 48 between the substrate 42 and the optical stack 43. Both the movable wall 46 and the optical stack 43 are reflective, so that operation of spatial light modulator 40 is generally similar to that described for the spatial light modulator 10 illustrated in Figure 4. Typically, the substrate 42 is at least partially transparent. Those skilled in the art will appreciate that the hght-modulating element 44 may be configured in an array comprising a plurality of individually addressable hght-modulatmg elements arranged over a transparent substrate and configured to modulate light transmitted through the transparent substrate. [0053] Those skilled in the art will also appreciate that the diffuser 41 illustrated in Figure 5A is representative of various optical compensation structures (both active and passive) that may be arranged between the substrate and the plurality of individually addressable hght- modulating elements For example, an active optical compensation structure may supply a supplemental fronthghting source. Non-limiting examples of passive optical compensation structures include an anti-reflective layer, a diffractive optical element, a structure that scatters light, a black mask, a color filter, a microlens array, a holographic film (e.g., that mitigates a shift in reflected color with respect to an angle of incidence of the light transmitted through the transparent substrate), or a combination thereof. In Figure 5, the hght-modulatmg element 44 compπses an lnterferometric modulator, but other spatial light modulators may also be used. [0054] Figure 5B illustrates an embodiment of a spatial light modulator 33 in which a passive optical compensation structure (black mask 32) is arranged between a transparent substrate 12 and a reflecting element 31. The reflecting element may be an optical stack. Black masks such as the black mask 32 may be used to mask parts of the spatial light modulator structure that are not desirable for the viewer to see. A light modulating element or elements (e.g., a plurality of individually addressable hght-modulatmg elements) are omitted from Figure 5B for claπty, but are understood to be arranged over the transparent substrate 12 and configured to modulate light transmitted through the transparent substrate 12. For example, the light modulating element of Figure 5B may comprise a plurality of individually addressable hght-modulating elements arranged over the reflecting element 31 as discussed above with respect to Figure 5A. The spatial light modulator 33 may include a planaπzation layer 30, e g , between the black mask 32 and the reflecting element 31 as shown in Figure 5B [0055] Figure 5C illustrates an embodiment of a spatial light modulator 37 in which a passive optical compensation structure (comprising color filter elements 34, 36, 38) is arranged between a transparent substrate 12 and a reflecting element 39 As in Figure 5B, the reflecting element 39 may be an optical stack In the illustrated embodiment, the color filter elements 34, 36, 38 are red, green and blue, respectively, but other colors m&y be selected by those skilled in the art so that the resulting spatial light modulator produces the desired colors. As in Figure 5B, a light modulating element or elements (e.g., a plurality of individually addressable hght-modulating elements) are omitted from Figure 5C for clarity, but are understood to be arranged over the transparent substrate 12 and configured to modulate light transmitted through the transparent substrate 12 For example, the light modulating element of Figure 5C may comprise a plurality of individually addressable hght-modulatmg elements arranged over the optical stack as discussed above with respect to Figure 5A. The spatial light modulator 37 may include a planaπzation layer 30, e.g., between the color filter elements 34, 36, 38 and the optical stack 39 as shown m Figure 5C [0056] lnterferometric modulators that produce only black and white may be used in combination with color filters to produce colored light. lnterferometric modulators may be fabricated to produce various colors by varying the size of the cavity. However, varying the size of the cavity may involve varying the manufacturing process, e.g., by manufacturing a different size cavity for an lnterferometric modulator that produces green light than for an lnterferometric modulator that produces red light The use of black and white lnterferometric modulators in combination with color filters may substantially simplify the manufacturing process. Other improvements in the manufacturing process are realized by integrating the color filter into the lnterferometric modulator as illustrated in Figure 5C. [0057] Figure 6 illustrates an embodiment of a spatial light modulator 100 in which a passive optical compensation structure 105 (a planaπzation layer comprising a scattering element 110) is arranged between a transparent substrate 115 and a hght-modulating element 120. In the embodiment illustrated in Figure 6, the hght-modulatmg element 120 is an lnterferometric modulator comprising a cavity 130, a movable wall 125, and an optical stack 135. The optical stack 135 is on the wall of the cavity 130 that is opposite to the movable wall 125. Both the movable wall 125 and the optical stack 135 are reflective (the optical stack 135 is partially reflective), so that operation of spatial light modulator 100 is generally similar to that described for the spatial light modulator 10 illustrated in Figure 4. Light 140 passes through a slot 150 in the movable wall 125 and reflects from the scattering element 110 such that it scatters the light 140 back to the movable wall 125 (and m some cases back again to the scatteπng element 110), ultimately passing through the transparent substrate 115 and exiting 160, 165 as shown in Figure 6. Preferably, the scattering element 110 is shaped such that the light 140 is scattered randomly. For clarity, a single scattering element 110 and a single slot 150 are illustrated in Figure 6, but it will be understood that the spatial light modulator 100 may comprise a plurality of scattering elements and slots, arranged to provide the desired amount of scattered light [0058] Figures 7A and 7B illustrate embodiments of spatial light modulators comprising different combinations of integrated optical compensation structures. Figure 7A illustrates an embodiment of a spatial light modulator 60 in which a passive optical compensation structure (comprising a color filter element 34 and a black mask 32) is arranged between a transparent substrate 12 and an optical stack 61. Figure 7B illustrates an embodiment of a spatial light modulator 62 in which a first passive optical compensation structure (comprising a color filter element 40 and a black mask 32) and a second passive optical compensation structure (comprising diffuser 26) are arranged between a transparent substrate 12 and an optical stack 63. As in Figures 5B and 5C, a light modulating element or elements (e.g., a plurality of individually addressable hght-modulating elements) are omitted from Figures 7A and 7B for clarity, but are understood to be arranged over the transparent substrate 12 and configured to modulate light transmitted through the transparent substrate. The spatial light modulators 60, 62 may include a planaπzation layer 30 e.g., between the passive optical compensation structure (comprising the color filter element 34 and the black mask 32) and the optical stack 61 as shown in Figure 7A, or between the first and second passive optical compensation structures as shown in Figure 7B. The spatial light modulator may include an additional planaπzation layer, e g., a planaπzation layer 35 as shown in Figure 7B between the first passive optical compensation structure (comprising a color filter element 40 and a black mask 32) and the optical stack 63. [0059] Spatial light modulators may comprise an optical compensation structure that performs one or more functions (e.g., a color filter and a black mask as illustrated in Figure 7A), and/or the optical compensation structure may comprise multiple layers, optionally separated from each other by planaπzation layers (e g., as illustrated in Figure 7B) Those skilled in the art will understand that the term "optical compensation structure" may be used to refer to a structure having a particular function (e.g., the diffuser 26), a layer having multiple functions (e g., comprising the color filter element 34 and the black mask 32), or multiple layers each having one or more functions as illustrated in Figure 7B, optionally including planaπzation layer(s). Thus, spatial light modulators may comprise any combination of active and/or passive optical compensation structures, e.g., a black mask and a color filter, a black mask and a diffuser; a color filter and a diffuser; a black mask, color filter and a diffuser, etc. Means for compensating the light transmitted through the transparent substrate include optical compensation structures as described herein. [0060] Spatial light modulators comprising an optical compensation structure may be fabricated by integrating the fabrication of the optical compensation structure into the process for fabricating the spatial light modulator. An example of such a process is illustrated in Figure 8. The process begins with the substrate being provided at step 50. Typically, the substrate is glass, plastic or other transparent substrate. Those skilled in the art will appreciate that the term "transparent" as used herein encompasses materials that are substantially transparent to the operational wavelength(s) of the spatial light modulator, and thus transparent substrates need not transmit all wavelengths of light and may absorb a portion of the light at the operational wavelength(s) of the spatial light modulator. For example, the transparent substrate may be tinted and/or polarized if desired for a particular application. Thus, the transparency and reflectivity of the substrate may be varied, depending on the configuration and the function desired. In some embodiments, the substrate is at least partially transparent and may be substantially transparent. In other embodiments, the substrate is at least partially reflective and may be substantially reflective. It is understood that a substrate may be both partially transparent and partially reflective. [0061] The process illustrated in Figure 8 continues at step 52 with the fabrication of the optical compensation structure. Depending on the structure, the mateπals and methods used for its fabrication may vary. For example, it is often convenient to fabricate the optical compensation structures using techniques and methods compatible with the manufacturing of the individually addressable hght-modulating elements, e.g., by spin coating and/or chemical vapor deposition techniques. For example, a diffuser film may be fabricated by spm-coatmg the substrate using a polymer or polymer solution that contains scattering elements dispersed therein. For example, the polymer may be a polyimide and the scattering elements may be microscopic glass beads. Color filters and black masks may be appropriately dyed photoresist polymers fabricated on the substrate using known photoresist deposition and masking techniques. Black masks may also be inorganic materials such as chrome oxide, also known as black chrome, fabricated on the substrate using known deposition and masking techniques [0062] The process illustrated in Figure 8 continues at step 54 with the deposition of a planarization layer. The planarization layer or layers are typically polymers, e.g., polyimide, and may be deposited using known deposition and masking techniques The deposition of a planarization layer is an optional, but is often preferred because it results in a suitable substrate for subsequent processing steps. The process illustrated in Figure 8 continues at step 56 with the fabrication of individually addressable hght-modulatmg elements (e.g , lnterferometric modulator elements) over the optical compensation structure and, if present, the planarization layer lnterferometric modulators are generally fabricated using thin film deposition processes, e g , as described in U.S. Patent Nos 5,835,255 and 6,055,090, and in U S. Patent Publication No 2002/0126364 Al. A variation of this process, also illustrated in Figure 8, involves the fabrication of an additional planarization layer at step 58, followed by the fabrication of an additional optical compensation structure at step 59. After fabrication at step 59, the fabrication process may return to steps 58, 59 for the fabrication of additional planarization layer(s) and optical compensation structure(s), or may proceed to steps 54, 56 for the fabrication of the planarization layer and individually addressable hght-modulating elements. Those skilled in the art will understand that the process illustrated in Figure 8 or variations thereof may be used to fabricate the spatial light modulators described herein, including without limitation the spatial light modulators illustrated in Figures 5-7. Means for modulating light transmitted through the transparent substrate include lnterferometric modulators and liquid crystal displays. [0063] Figure 9 illustrates an embodiment of a spatial light modulator 200 in which a light modulating element 205 is arranged between a substrate 210 and an optical compensation structure 215. In the embodiment illustrated in Figure 9, the hght-modulating element 205 is an lnterferometric modulator comprising a cavity 220, a movable wall 225, an optical stack 230, and supports 235. The optical stack 230 is on the wall of the cavity 220 that is opposite to the movable wall 225. The optical compensation structure 215 may be any of the optical compensation structures described herein, e.g., an active optical compensation structure that supplies a supplemental front ghtmg source, and/or a passive optical compensation structure, e g., an anti- reflective layer, a diffractive optical element, a structure that scatters light, a black mask, a color filter, a diffuser, a microlens array, a holographic film that mitigates a shift in reflected color with respect to an angle of incidence of the light transmitted through the substrate, or a combination thereof. In Figure 9, the hght-modulating element 205 comprises an lnterferometric modulator, but other spatial light modulators may also be used [0064] A spatial light modulator in which a light modulating element is arranged between a substrate and an optical compensation structure (such as that illustrated in Figure 9) may be fabricated by a process similar to that illustrated in Figure 8, except that the individually addressable hght-modulatmg elements are fabricated over the substrate, followed by fabrication of the optical compensation structure(s) over the individually addressable hght-modulating elements (e.g., step 56 in Figure 8 is conducted after step 50 and prior to step 52). Optionally, a planarization layer may be fabricated over the over the individually addressable hght-modulating elements, followed by fabrication of the optical compensation structure(s) over the planarization layer. [0065] While the above detailed description has shown, described, and pointed out novel features of the invention as applied to various embodiments, it will be understood that various omissions, substitutions, and changes in the form and details of the device or process illustrated may be made by those skilled in the art without departing from the spirit of the invention. As will be recognized, the present invention may be embodied within a form that does not provide all of the features and benefits set forth herein, as some features may be used or practiced separately from others.

Claims

CLAIMS WHAT IS CLAIMED IS: 1. A spatial light modulator comprising: a substrate; a plurality of individually addressable hght-modulating elements arranged over the substrate and configured to modulate light transmitted through the substrate; and an optical compensation structure; wherein the optical compensation structure is arranged between the substrate and the plurality of individually addressable hght-modulating elements. 2. The spatial light modulator of Claim 1 in which the individually addressable hght- modulating elements comprise an lnterferometric modulator. 3. The spatial light modulator of Claim 2 in which the lnterferometric modulator comprises a movable element and a cavity 4. The spatial light modulator of Claim 1 in which the optical compensation structure comprises a black mask. 5. The spatial light modulator of Claims 1 or 4 in which the optical compensation structure comprises a color filter. 6. The spatial light modulator of Claims 1 or 4 in which the optical compensation structure comprises a diffuser. 7 The spatial light modulator of Claim 1 in which the optical compensation structure comprises an anti-reflective layer 8 The spatial light modulator of Claim 1 in which the optical compensation structure comprises a plurality of scattering elements. 9. The spatial light modulator of Claim 1 in which the optical compensation structure comprises a microlens array 10 The spatial light modulator of Claim 1 in which the optical compensation structure comprises a holographic film that mitigates a shift in reflected color with respect to an angle of incidence of the light transmitted through the substrate. 11. The spatial light modulator of Claim 1 in which the optical compensation structure comprises a diffractive optical element 12. The spatial light modulator of Claim 1, wherein said optical compensation structure is disposed in front of said hght-modulating element such that light transmitted through the substrate passes through the optical compensation structure to be modulated by the hght- modulating element. 13 The spatial light modulator of Claim 1 in which the optical compensation structure comprises a planarization layer that comprises a scattering element
14. The spatial light modulator of Claim 1 in which the optical compensation structure is a passive optical compensation structure. 15. The spatial light modulator of Claim 1 further comprising a planarization layer. 16. The spatial light modulator of Claim 1 in which the substrate is partially reflective. 17. A spatial light modulator comprising: a substrate; a plurality of individually addressable hght-modulating elements arranged over the substrate and configured to modulate light; and an optical compensation structure comprising at least one of a color filter, black mask, and anti-reflective layer, wherein the plurality of individually addressable hght-modulatmg elements is arranged between the substrate and the optical compensation structure. 18. The spatial light modulator of Claim 17 in which the individually addressable hght-modulating elements compπse an lnterferometric modulator. 19. The spatial light modulator of Claim 18 in which the lnterferometric modulator comprises a movable element and a cavity. 20. The spatial light modulator of Claim 17 in which the optical compensation structure comprises a black mask. 21. The spatial light modulator of Claims 17 or 20 in which the optical compensation structure compπses a color filter. 22. The spatial light modulator of Claim 17 in which the optical compensation structure further comprises an anti-reflective layer. 23. The spatial light modulator of Claim 17 in which the optical compensation structure further comprises a planarization layer that comprises a scattering element. 24. The spatial light modulator of Claim 17 in which the optical compensation structure comprises a black mask and a diffuser. 25. The spatial light modulator of Claim 17 in which the optical compensation structure comprises a color filter and a diffuser. 26. The spatial light modulator of Claim 17 further comprising a planarization layer. 27. The spatial light modulator of Claim 17 in which the substrate is at least partially transparent such that the hght-modulating elements modulate light transmitted through the substrate. 28. The spatial light modulator of Claim 17 in which the substrate is at least partially reflective. 29. A method of making a spatial light modulator, comprising: fabricating an optical compensation sfructure over a transparent substrate; and fabricating a plurality of individually addressable light-modulating elements over the optical compensation structure, the individually addressable ght-modulating elements being configured to modulate light transmitted through the transparent subsfrate. 30 The method of Claim 29 in which fabricating the individually addressable hght- modulating elements comprises fabricating a cavity and a movable element. 31. The method of Claim 29 further comprising fabricating a second optical compensation structure over the transparent subsfrate. 32 The method of Claim 29 further comprising fabricating a planarization layer over the optical compensation sfructure. 33. The method of Claim 29 in which fabricating the optical compensation structure comprises fabricating at least one of a color filter and diffuser. 34. The method of Claim 33 in which fabricating the individually addressable hght- modulating elements comprises fabricating an interferomefric modulator. 35. The method of Claim 29, wherein said fabricating the optical compensation structure comprises depositing material over the transparent substrate such that light transmitted through the fransparent substrate passes through the material to be modulated by the hght- modulating element. 36. The method of Claim 35, wherein said material comprises dyed photoresist or spin- coated polyimide 37. The method of Claim 29 in which fabricating the optical compensation structure comprises fabricating a passive optical compensation structure. 38. A spatial light modulator made by the method of Claim 29, wherein the transparent substrate comprises at least one of plastic and glass. 39. A method of making a spatial light modulator, comprising: fabricating a plurality of individually addressable hght-modulating elements over a substrate; and fabricating an optical compensation structure over the plurality of individually addressable hght-modulatmg elements, the optical compensation structure comprising at least one of a color filter, mask, and anti-reflective layer, the individually addressable hght- modulating elements being configured to modulate light transmitted through the optical compensation structure 40 The method of Claim 39 in which fabricating the individually addressable hght- modulating elements comprises fabricating a cavity and a movable element. 41. The method of Claim 39 further comprising fabricating a second optical compensation sfructure over the plurality of individually addressable hght-modulating elements 42 The method of Claim 39 further comprising fabricating a planaπzation layer over the plurality of individually addressable ght-modulating elements. 43. The method of Claim 39 in which fabricating the individually addressable hght- modulating elements comprises fabricating an interferomefric modulator. 44. A spatial light modulator made by the method of Claim 39, wherein the substrate comprises plastic or glass. 45. A spatial light modulator comprising: a transparent substrate, a plurality of individually addressable interferomefric hght-modulatmg elements arranged over the transparent substrate and configured to modulate light transmitted through the transparent substrate, the interferomefric hght-modulating elements comprising a cavity and a movable wall; and at least one optical compensation structure arranged between the transparent subsfrate and the plurality of individually addressable interferomefric hght-modulating elements, the optical compensation structure comprising a color filter or diffuser 46. A spatial light modulator comprising: a substrate; a means for modulating light fransmitted through or reflected from the substrate; and a means for compensating the light fransmitted through or reflected from the substrate; wherein the means for compensating the light is operatively arranged between the substrate and the means for modulating light transmitted through or reflected from the substrate 47. The spatial light modulator of Claim 46 in which the means for modulating light transmitted through or reflected from the subsfrate comprises a plurality of individually addressable ght-modulating elements arranged over the subsfrate. 48 The spatial light modulator of Claim 46 in which the means for modulating light transmitted through or reflected from the subsfrate comprises a plurality of lnterferometric modulators. 49. The spatial light modulator of Claim 46 in which the means for compensating the light fransmitted through or reflected from the substrate comprises a diffractive optical element, a color filter, a diffuser, an anti-reflective layer, a plurality of scattering elements, a microlens anay, or a holographic film. 50. The spatial light modulator of Claim 46 in which the means for compensating the light transmitted through or reflected from the subsfrate compπses a a color filter or a diffuser.
51. A spatial light modulator comprising: a substrate; a means for modulating light transmitted through or reflected from the subsfrate; and a means for compensating the light transmitted through or reflected from the substrate, said means for compensating comprising at least one of a color filter, a black mask, and an anti-reflective layer; wherein the means for modulating light transmitted through or reflected from the subsfrate is operatively arranged between the substrate and the means for compensating the light. 52. The spatial light modulator of Claim 51 in which the means for modulating light transmitted through or reflected from the substrate comprises a plurality of individually addressable hght-modulating elements arranged over the substrate. 53 The spatial light modulator of Claim 52 in which the means for modulating light fransmitted through or reflected from the subsfrate comprises a plurality of interferomefric modulators 54. A spatial light modulator made by a method comprising- fabricating an optical compensation structure over a fransparent substrate; and fabricating a plurality of individually addressable hght-modulating elements over the optical compensation structure, the individually addressable hght-modulating elements being configured to modulate light transmitted through the transparent substrate. 55. The spatial light modulator of Claim 54 in which fabricating the individually addressable hght-modulatmg elements comprises fabricating a cavity and a movable element. 56. The spatial light modulator of Claim 54 in which the method further comprises fabricating a second optical compensation structure over the transparent substrate 57. The spatial light modulator of Claim 56 in which the method further compπses fabricating a planarization layer over the optical compensation structure 58. The spatial light modulator of Claim 54 in which fabricating the optical compensation structure comprises fabricating at least one of a color filter and diffuser 59. The spatial light modulator of Claim 58 in which fabricating the individually addressable hght-modulating elements comprises fabricating an interferomefric modulator. 60. The spatial light modulator of Claim 54 in which fabricating the optical compensation structure compπses fabricating a passive optical compensation structure 61. A spatial light modulator made by a method comprising- fabricating a plurality of individually addressable hght-modulating elements over a substrate; and fabricating an optical compensation structure over the plurality of individually addressable hght-modulating elements, said optical compensation structure comprising one of a color filter, an anti-reflective filter and a black mask, the individually addressable hght-modulating elements being configured to modulate light transmitted through the optical compensation structure. 62. The spatial light modulator of Claim 61 in which fabricating the individually addressable hght-modulating elements comprises fabricating a cavity and a movable element 63. The spatial light modulator of Claim 61 m which the method further comprises fabricating a second optical compensation structure over the plurality of individually addressable hght-modulating elements. 64. The spatial light modulator of Claim 61 in which the method further fabricating a planaπzation layer over the plurality of individually addressable hght-modulatmg elements. 65. The spatial light modulator of Claim 61 in which fabricating the individually addressable hght-modulating elements comprises fabricating an interferomefric modulator. 66. A display region comprising: a black and white hght-modulating element including first and second reflective surfaces and a cavity therebetween, the second surface being movable with respect to the first surface; and a color filter configured to transmit colored light when illuminated with white light, wherein the color filter is positioned with respect to said hght-modulatmg elements such that light output from the hght-modulatmg element is filtered by said color filter. 67. The display region of Claim 66, wherein said hght-modulating element comprises an interferomefric modulator. 68. The display region of Claim 66, further comprising an optical stack that forms said first surface. 69. The display region of Claim 66, wherein at least one of the first and second reflective surfaces is partially reflective 70. A display region comprising: a plurality of hght-modulating elements, each of the ght-modulating elements including first and second reflective surfaces and a cavity therebetween, the second surface being movable with respect to the first surface; and a color filter array comprising a plurality of color filter elements configured to transmit a narrower range of wavelengths when illuminated with a broader range of wavelengths, the color filter array being positioned with respect to said hght-modulating elements such that light output from the hght-modulatmg elements is filtered by said color filter elements, wherein the first reflective surface is separated from the second reflective surface by a substantially equal distance for each of the plurality of hght-modulating elements when the hght-modulating elements output light and wherein at least two of said color filter elements are configured to produce different color output. 71 The display region of Claim 70, wherein said hght-modulating elements comprise interferomefric modulators 72. The display region of Claim 70, further comprising an optical stack that forms said first surface. 73. The display region of Claim 70, wherein at least three of the color filter elements are configured to produce different color output. 74 The display region of Claim 73, wherein the plurality of color filter elements include red, green, and blue color filter elements. 75. The display region of Claim 70, wherein the plurality of color filter elements comprise material that transmits a narrower range of wavelengths when illuminated with a broader range of wavelengths. 76. The display region of Claim 75, wherein the material comprises dyed material. 77. A method of manufacturing a display device comprising: providing a black and white hght-modulating element including first and second optical surfaces, said second optical surface movable with respect to said first optical surface; and positioning a color filter with respect to the ght-modulating elements so that white light output from the hght-modulatmg element is filtered by said color filter, said color filter configured to fransmit colored light when illuminated with white light. 78. A display device fabricated by the method of Claim 77. 79 A method of manufacturing a display region comprising: providing a plurality of hght-modulating elements each including first and second optical surfaces and a cavity therebetween, the first reflective surface separated from the second reflective surface by a substantially equal distance for each of the plurality of hght- modulating elements when the ght-modulating elements output light; and positioning color filter elements with respect to the hght-modulating elements so that light output from the hght-modulating elements is filtered by respective color filter elements, said color filter elements comprising material configured to fransmit a narrow range of wavelengths when illuminated with a broad range of wavelengths
80. The method of Claim 79, wherein said providing an array of hght-modulatmg elements comprises providing an array of interferomefric modulators. 81 A display region fabricated by the method of Claim 79. 82 A display device comprising- means for producing a modulated white light signal including first and second optical surfaces, said second optical surface movable with respect to said first optical surface; and means for filtering said modulated white light signal to so as to transform said white light signal into a colored light signal. 83. The display device of Claim 82 wherein said means for providing a modulated white light signal comprises an array of hght-modulating devices wherein the first reflective surface is separated from the second reflective surface by a substantially equal distance for each of the plurality of hght-modulating elements when the hght-modulatmg elements output white light. 84. The display device of Claim 82, wherein said means for filtering said white light signal comprises a color filter array comprising at least two color elements configured to produce different color output from white light.
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KR1020117018192A KR101149860B1 (en) 2004-02-03 2005-02-02 Spatial light modulator with integrated optical structure
KR1020107002289A KR101149858B1 (en) 2004-02-03 2005-02-02 Spatial light modulator with integrated optical structure
CA2554980A CA2554980C (en) 2004-02-03 2005-02-02 Spatial light modulator with integrated optical compensation structure
AU2005209752A AU2005209752A1 (en) 2004-02-03 2005-02-02 Spatial light modulator with integrated optical structure
KR1020117029841A KR101258484B1 (en) 2004-02-03 2005-02-02 Spatial light modulator with integrated optical structure
KR1020067015589A KR101150246B1 (en) 2004-02-03 2005-02-02 Spatial light modulator with integrated optical structure
CN2005800038120A CN1914538B (en) 2004-02-03 2005-02-02 Spatial light modulator with integrated optical structure
BRPI0507357-0A BRPI0507357A (en) 2004-02-03 2005-02-02 light modulator with integrated optical structure
IL177048A IL177048A0 (en) 2004-02-03 2006-07-24 Spatial light modulator with integrated optical structure
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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009102672A2 (en) * 2008-02-12 2009-08-20 Qualcomm Mems Technologies, Inc. Integrated front light solution
US8760751B2 (en) 2012-01-26 2014-06-24 Qualcomm Mems Technologies, Inc. Analog IMOD having a color notch filter
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US8971675B2 (en) 2006-01-13 2015-03-03 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US9019183B2 (en) 2006-10-06 2015-04-28 Qualcomm Mems Technologies, Inc. Optical loss structure integrated in an illumination apparatus
US9025235B2 (en) 2002-12-25 2015-05-05 Qualcomm Mems Technologies, Inc. Optical interference type of color display having optical diffusion layer between substrate and electrode
US9110289B2 (en) 1998-04-08 2015-08-18 Qualcomm Mems Technologies, Inc. Device for modulating light with multiple electrodes
TWI627777B (en) * 2017-07-26 2018-06-21 財團法人工業技術研究院 Optical compensation structure

Families Citing this family (124)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6674562B1 (en) 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US7907319B2 (en) * 1995-11-06 2011-03-15 Qualcomm Mems Technologies, Inc. Method and device for modulating light with optical compensation
WO2003007049A1 (en) * 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US7417782B2 (en) 2005-02-23 2008-08-26 Pixtronix, Incorporated Methods and apparatus for spatial light modulation
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
US7706050B2 (en) * 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7855824B2 (en) * 2004-03-06 2010-12-21 Qualcomm Mems Technologies, Inc. Method and system for color optimization in a display
US7561323B2 (en) * 2004-09-27 2009-07-14 Idc, Llc Optical films for directing light towards active areas of displays
US8362987B2 (en) * 2004-09-27 2013-01-29 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7807488B2 (en) * 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US20060066586A1 (en) * 2004-09-27 2006-03-30 Gally Brian J Touchscreens for displays
US7710636B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Systems and methods using interferometric optical modulators and diffusers
US7750886B2 (en) 2004-09-27 2010-07-06 Qualcomm Mems Technologies, Inc. Methods and devices for lighting displays
US7508571B2 (en) * 2004-09-27 2009-03-24 Idc, Llc Optical films for controlling angular characteristics of displays
US8004504B2 (en) * 2004-09-27 2011-08-23 Qualcomm Mems Technologies, Inc. Reduced capacitance display element
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US7349141B2 (en) * 2004-09-27 2008-03-25 Idc, Llc Method and post structures for interferometric modulation
US7928928B2 (en) 2004-09-27 2011-04-19 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing perceived color shift
US7710632B2 (en) * 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Display device having an array of spatial light modulators with integrated color filters
US7911428B2 (en) * 2004-09-27 2011-03-22 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7813026B2 (en) * 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US7630123B2 (en) * 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Method and device for compensating for color shift as a function of angle of view
US7898521B2 (en) * 2004-09-27 2011-03-01 Qualcomm Mems Technologies, Inc. Device and method for wavelength filtering
US7355780B2 (en) * 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US7746529B2 (en) 2005-02-23 2010-06-29 Pixtronix, Inc. MEMS display apparatus
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US7603001B2 (en) * 2006-02-17 2009-10-13 Qualcomm Mems Technologies, Inc. Method and apparatus for providing back-lighting in an interferometric modulator display device
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
US8004743B2 (en) * 2006-04-21 2011-08-23 Qualcomm Mems Technologies, Inc. Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display
US7876489B2 (en) 2006-06-05 2011-01-25 Pixtronix, Inc. Display apparatus with optical cavities
US7766498B2 (en) 2006-06-21 2010-08-03 Qualcomm Mems Technologies, Inc. Linear solid state illuminator
US7845841B2 (en) 2006-08-28 2010-12-07 Qualcomm Mems Technologies, Inc. Angle sweeping holographic illuminator
WO2008045311A2 (en) * 2006-10-06 2008-04-17 Qualcomm Mems Technologies, Inc. Illumination device with built-in light coupler
EP1943551A2 (en) * 2006-10-06 2008-07-16 Qualcomm Mems Technologies, Inc. Light guide
US7855827B2 (en) 2006-10-06 2010-12-21 Qualcomm Mems Technologies, Inc. Internal optical isolation structure for integrated front or back lighting
EP1958010A2 (en) * 2006-10-10 2008-08-20 Qualcomm Mems Technologies, Inc Display device with diffractive optics
EP2080045A1 (en) 2006-10-20 2009-07-22 Pixtronix Inc. Light guides and backlight systems incorporating light redirectors at varying densities
US7864395B2 (en) * 2006-10-27 2011-01-04 Qualcomm Mems Technologies, Inc. Light guide including optical scattering elements and a method of manufacture
US7852546B2 (en) 2007-10-19 2010-12-14 Pixtronix, Inc. Spacers for maintaining display apparatus alignment
US9176318B2 (en) 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
US7777954B2 (en) * 2007-01-30 2010-08-17 Qualcomm Mems Technologies, Inc. Systems and methods of providing a light guiding layer
US7733439B2 (en) * 2007-04-30 2010-06-08 Qualcomm Mems Technologies, Inc. Dual film light guide for illuminating displays
US8189172B2 (en) * 2007-06-14 2012-05-29 Asml Netherlands B.V. Lithographic apparatus and method
US8692974B2 (en) * 2007-06-14 2014-04-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method using pupil filling by telecentricity control
US8929741B2 (en) * 2007-07-30 2015-01-06 Hewlett-Packard Development Company, L.P. Optical interconnect
US8072402B2 (en) * 2007-08-29 2011-12-06 Qualcomm Mems Technologies, Inc. Interferometric optical modulator with broadband reflection characteristics
US7949213B2 (en) 2007-12-07 2011-05-24 Qualcomm Mems Technologies, Inc. Light illumination of displays with front light guide and coupling elements
US8068710B2 (en) * 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
EP2232569A2 (en) 2007-12-17 2010-09-29 QUALCOMM MEMS Technologies, Inc. Photovoltaics with interferometric back side masks
US20090168459A1 (en) * 2007-12-27 2009-07-02 Qualcomm Incorporated Light guide including conjugate film
WO2009102731A2 (en) 2008-02-12 2009-08-20 Qualcomm Mems Technologies, Inc. Devices and methods for enhancing brightness of displays using angle conversion layers
EP2248188A2 (en) * 2008-02-12 2010-11-10 QUALCOMM MEMS Technologies, Inc. Dual layer thin film holographic solar concentrator/collector
WO2009102733A2 (en) * 2008-02-12 2009-08-20 Qualcomm Mems Technologies, Inc. Integrated front light diffuser for reflective displays
US8248560B2 (en) 2008-04-18 2012-08-21 Pixtronix, Inc. Light guides and backlight systems incorporating prismatic structures and light redirectors
WO2009129264A1 (en) 2008-04-15 2009-10-22 Qualcomm Mems Technologies, Inc. Light with bi-directional propagation
US20090323144A1 (en) * 2008-06-30 2009-12-31 Qualcomm Mems Technologies, Inc. Illumination device with holographic light guide
US8358266B2 (en) 2008-09-02 2013-01-22 Qualcomm Mems Technologies, Inc. Light turning device with prismatic light turning features
JP2012503221A (en) * 2008-09-18 2012-02-02 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド Increasing the angular range of light collection in solar collectors / collectors
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
SE533704C2 (en) 2008-12-05 2010-12-07 Flatfrog Lab Ab Touch sensitive apparatus and method for operating the same
US8231257B2 (en) 2009-01-13 2012-07-31 Qualcomm Mems Technologies, Inc. Large area light panel and screen
US8172417B2 (en) * 2009-03-06 2012-05-08 Qualcomm Mems Technologies, Inc. Shaped frontlight reflector for use with display
US20100195310A1 (en) * 2009-02-04 2010-08-05 Qualcomm Mems Technologies, Inc. Shaped frontlight reflector for use with display
CN202661719U (en) * 2009-03-10 2013-01-09 3M创新有限公司 User interface having projected synthetic image
US20100245370A1 (en) * 2009-03-25 2010-09-30 Qualcomm Mems Technologies, Inc. Em shielding for display devices
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
TWI407231B (en) * 2009-05-26 2013-09-01 Innolux Corp System for displaying images
US8979349B2 (en) 2009-05-29 2015-03-17 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
US20110032214A1 (en) * 2009-06-01 2011-02-10 Qualcomm Mems Technologies, Inc. Front light based optical touch screen
US8488228B2 (en) 2009-09-28 2013-07-16 Qualcomm Mems Technologies, Inc. Interferometric display with interferometric reflector
US8379392B2 (en) * 2009-10-23 2013-02-19 Qualcomm Mems Technologies, Inc. Light-based sealing and device packaging
BR112012019383A2 (en) 2010-02-02 2017-09-12 Pixtronix Inc CIRCUITS TO CONTROL DISPLAY APPARATUS
JP2013519121A (en) 2010-02-02 2013-05-23 ピクストロニックス・インコーポレーテッド Method for manufacturing a cold sealed fluid filled display device
US8102592B2 (en) * 2010-03-24 2012-01-24 Unipel Technologies, LLC Reflective display using calibration data for electrostatically maintaining parallel relationship of adjustable-depth cavity component
US8848294B2 (en) 2010-05-20 2014-09-30 Qualcomm Mems Technologies, Inc. Method and structure capable of changing color saturation
US8402647B2 (en) 2010-08-25 2013-03-26 Qualcomm Mems Technologies Inc. Methods of manufacturing illumination systems
CN102403322A (en) * 2010-09-07 2012-04-04 原相科技股份有限公司 Image detecting element
US8670171B2 (en) * 2010-10-18 2014-03-11 Qualcomm Mems Technologies, Inc. Display having an embedded microlens array
US8902484B2 (en) 2010-12-15 2014-12-02 Qualcomm Mems Technologies, Inc. Holographic brightness enhancement film
KR101832265B1 (en) 2011-11-24 2018-02-26 삼성전자주식회사 Active optical device and display apparatus including the same
US10168835B2 (en) 2012-05-23 2019-01-01 Flatfrog Laboratories Ab Spatial resolution in touch displays
WO2014017973A1 (en) 2012-07-24 2014-01-30 Flatfrog Laboratories Ab Optical coupling in touch-sensing systems using diffusively transmitting element
KR102050503B1 (en) 2012-10-16 2019-11-29 삼성전자주식회사 Optically addressed spatial light modulator divided into plurality of segments, and apparatus and method for holography 3-dimensional display
US9325948B2 (en) * 2012-11-13 2016-04-26 Qualcomm Mems Technologies, Inc. Real-time compensation for blue shift of electromechanical systems display devices
US20140153870A1 (en) * 2012-12-05 2014-06-05 MiMetrix Design Group, L.L.C. Monolithic splitter assembly
US20150324028A1 (en) 2012-12-17 2015-11-12 Flatfrog Laboratories Ab Optical coupling of light into touch-sensing systems
TWI495922B (en) * 2013-01-11 2015-08-11 Light source device
KR102067763B1 (en) * 2013-03-13 2020-01-17 삼성전자주식회사 Spatial light modulator, apparatus for holography 3-dimensional display and method for modulating spatial light
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
US10019113B2 (en) 2013-04-11 2018-07-10 Flatfrog Laboratories Ab Tomographic processing for touch detection
US9874978B2 (en) 2013-07-12 2018-01-23 Flatfrog Laboratories Ab Partial detect mode
JP6424337B2 (en) * 2013-12-27 2018-11-21 パナソニックIpマネジメント株式会社 Tunable optical filter module
WO2015108479A1 (en) 2014-01-16 2015-07-23 Flatfrog Laboratories Ab Light coupling in tir-based optical touch systems
US10126882B2 (en) 2014-01-16 2018-11-13 Flatfrog Laboratories Ab TIR-based optical touch systems of projection-type
EP3161594A4 (en) 2014-06-27 2018-01-17 FlatFrog Laboratories AB Detection of surface contamination
WO2016122385A1 (en) 2015-01-28 2016-08-04 Flatfrog Laboratories Ab Dynamic touch quarantine frames
US10318074B2 (en) 2015-01-30 2019-06-11 Flatfrog Laboratories Ab Touch-sensing OLED display with tilted emitters
WO2016130074A1 (en) 2015-02-09 2016-08-18 Flatfrog Laboratories Ab Optical touch system comprising means for projecting and detecting light beams above and inside a transmissive panel
US10401546B2 (en) 2015-03-02 2019-09-03 Flatfrog Laboratories Ab Optical component for light coupling
KR102390372B1 (en) 2015-06-01 2022-04-25 삼성전자주식회사 Spatial light modulator providing improved image quality and holographic display apparatus including the same
CN105022158B (en) * 2015-08-04 2017-07-28 深圳力策科技有限公司 A kind of adjustable infrared filter based on MEMS
EP4075246A1 (en) 2015-12-09 2022-10-19 FlatFrog Laboratories AB Stylus for optical touch system
US10600213B2 (en) * 2016-02-27 2020-03-24 Focal Sharp, Inc. Method and apparatus for color-preserving spectrum reshape
CN105866942B (en) * 2016-06-08 2018-05-01 常州创微电子机械科技有限公司 The Electromagnetic-drivmicro micro mirror of bimetal coil
EP3518019A4 (en) 2016-09-26 2020-05-06 Kazuhiro Yamamoto Display element
WO2018096430A1 (en) 2016-11-24 2018-05-31 Flatfrog Laboratories Ab Automatic optimisation of touch signal
LT3667475T (en) 2016-12-07 2022-11-10 Flatfrog Laboratories Ab A curved touch device
CN110300950B (en) 2017-02-06 2023-06-16 平蛙实验室股份公司 Optical coupling in touch sensing systems
US10481737B2 (en) 2017-03-22 2019-11-19 Flatfrog Laboratories Ab Pen differentiation for touch display
CN110663015A (en) 2017-03-28 2020-01-07 平蛙实验室股份公司 Touch sensitive device and method for assembly
US11256371B2 (en) 2017-09-01 2022-02-22 Flatfrog Laboratories Ab Optical component
RU2686576C1 (en) 2017-11-30 2019-04-29 Самсунг Электроникс Ко., Лтд. Holographic display compact device
WO2019172826A1 (en) 2018-03-05 2019-09-12 Flatfrog Laboratories Ab Improved touch-sensing apparatus
WO2021011056A1 (en) 2019-07-12 2021-01-21 Massachusetts Institute Of Technology All-optical spatial light modulators
JP2023512682A (en) 2020-02-10 2023-03-28 フラットフロッグ ラボラトリーズ アーベー Improved touch detector

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19622748A1 (en) * 1996-06-05 1997-12-11 Forschungszentrum Juelich Gmbh Interference filter based on porous silicon
US5914804A (en) * 1998-01-28 1999-06-22 Lucent Technologies Inc Double-cavity micromechanical optical modulator with plural multilayer mirrors
US6381022B1 (en) * 1992-01-22 2002-04-30 Northeastern University Light modulating device
US20020126364A1 (en) * 1994-05-05 2002-09-12 Iridigm Display Corporation, A Delaware Corporation Interferometric modulation of radiation
US20030210363A1 (en) * 2000-04-21 2003-11-13 Seiko Epson Corporation Electrooptical device, projection-type display apparatus, and method for manufacturing the electrooptical device

Family Cites Families (1062)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5816677A (en) 1905-03-01 1998-10-06 Canon Kabushiki Kaisha Backlight device for display apparatus
JP2539491Y2 (en) 1991-10-09 1997-06-25 惠和商工株式会社 Light diffusion sheet material
US2534846A (en) 1946-06-20 1950-12-19 Emi Ltd Color filter
US2518647A (en) 1948-01-07 1950-08-15 Celanese Corp Interferometer means for thickness measurements
US2677714A (en) 1951-09-21 1954-05-04 Alois Vogt Dr Optical-electrical conversion device comprising a light-permeable metal electrode
US3247392A (en) 1961-05-17 1966-04-19 Optical Coating Laboratory Inc Optical coating and assembly used as a band pass interference filter reflecting in the ultraviolet and infrared
DE1288651B (en) 1963-06-28 1969-02-06 Siemens Ag Arrangement of electrical dipoles for wavelengths below 1 mm and method for producing such an arrangement
US3448334A (en) 1966-09-30 1969-06-03 North American Rockwell Multicolored e.l. displays using external colored light sources
US3924929A (en) 1966-11-14 1975-12-09 Minnesota Mining & Mfg Retro-reflective sheet material
FR1603131A (en) 1968-07-05 1971-03-22
US3653741A (en) 1970-02-16 1972-04-04 Alvin M Marks Electro-optical dipolar material
US3813265A (en) 1970-02-16 1974-05-28 A Marks Electro-optical dipolar material
US3725868A (en) 1970-10-19 1973-04-03 Burroughs Corp Small reconfigurable processor for a variety of data processing applications
US3679313A (en) 1970-10-23 1972-07-25 Bell Telephone Labor Inc Dispersive element for optical pulse compression
JPS5610977Y2 (en) 1973-02-19 1981-03-12
DE2336930A1 (en) 1973-07-20 1975-02-06 Battelle Institut E V INFRARED MODULATOR (II.)
US3886310A (en) 1973-08-22 1975-05-27 Westinghouse Electric Corp Electrostatically deflectable light valve with improved diffraction properties
JPS5610976Y2 (en) 1975-02-20 1981-03-12
US4099854A (en) 1976-10-12 1978-07-11 The Unites States Of America As Represented By The Secretary Of The Navy Optical notch filter utilizing electric dipole resonance absorption
US4389096A (en) 1977-12-27 1983-06-21 Matsushita Electric Industrial Co., Ltd. Image display apparatus of liquid crystal valve projection type
US4287449A (en) 1978-02-03 1981-09-01 Sharp Kabushiki Kaisha Light-absorption film for rear electrodes of electroluminescent display panel
US4445050A (en) 1981-12-15 1984-04-24 Marks Alvin M Device for conversion of light power to electric power
US4663083A (en) 1978-05-26 1987-05-05 Marks Alvin M Electro-optical dipole suspension with reflective-absorptive-transmissive characteristics
US4200472A (en) 1978-06-05 1980-04-29 The Regents Of The University Of California Solar power system and high efficiency photovoltaic cells used therein
US4228437A (en) 1979-06-26 1980-10-14 The United States Of America As Represented By The Secretary Of The Navy Wideband polarization-transforming electromagnetic mirror
JPS5688111A (en) 1979-12-19 1981-07-17 Citizen Watch Co Ltd Liquid crystal display device with solar battery
NL8001281A (en) 1980-03-04 1981-10-01 Philips Nv DISPLAY DEVICE.
DE3109653A1 (en) 1980-03-31 1982-01-28 Jenoptik Jena Gmbh, Ddr 6900 Jena "RESONANCE ABSORBER"
US4421381A (en) 1980-04-04 1983-12-20 Yokogawa Hokushin Electric Corp. Mechanical vibrating element
US4377324A (en) * 1980-08-04 1983-03-22 Honeywell Inc. Graded index Fabry-Perot optical filter device
US4375312A (en) 1980-08-07 1983-03-01 Hughes Aircraft Company Graded index waveguide structure and process for forming same
US4441791A (en) 1980-09-02 1984-04-10 Texas Instruments Incorporated Deformable mirror light modulator
US4378567A (en) 1981-01-29 1983-03-29 Eastman Kodak Company Electronic imaging apparatus having means for reducing inter-pixel transmission nonuniformity
FR2506026A1 (en) 1981-05-18 1982-11-19 Radant Etudes METHOD AND DEVICE FOR ANALYZING A HYPERFREQUENCY ELECTROMAGNETIC WAVE RADIATION BEAM
NL8103377A (en) 1981-07-16 1983-02-16 Philips Nv DISPLAY DEVICE.
US4400577A (en) 1981-07-16 1983-08-23 Spear Reginald G Thin solar cells
US4863224A (en) 1981-10-06 1989-09-05 Afian Viktor V Solar concentrator and manufacturing method therefor
JPS58115781A (en) 1981-12-29 1983-07-09 松下電工株式会社 Door unit for connector
NL8200354A (en) 1982-02-01 1983-09-01 Philips Nv PASSIVE DISPLAY.
JPS5944763U (en) 1982-09-13 1984-03-24 黒崎炉工業株式会社 Walking beam furnace
US4633031A (en) 1982-09-24 1986-12-30 Todorof William J Multi-layer thin film, flexible silicon alloy photovoltaic cell
JPS60153015A (en) 1984-01-20 1985-08-12 Nippon Kogaku Kk <Nikon> Zoom lens barrel
DE3402746A1 (en) 1984-01-27 1985-08-08 Robert Bosch Gmbh, 7000 Stuttgart Liquid crystal display
US4832459A (en) 1984-02-06 1989-05-23 Rogers Corporation Backlighting for electro-optical passive displays and transflective layer useful therewith
JPS60165621A (en) 1984-02-08 1985-08-28 Nec Corp Transmission type display element
JPS60147718U (en) 1984-03-09 1985-10-01 マツダ株式会社 engine cooling system
JPS60242408A (en) 1984-05-17 1985-12-02 Seiko Epson Corp Optical system of light source for light guide
US5345322A (en) 1985-03-01 1994-09-06 Manchester R&D Limited Partnership Complementary color liquid crystal display
US4878741A (en) 1986-09-10 1989-11-07 Manchester R & D Partnership Liquid crystal color display and method
JPS629317A (en) * 1985-07-08 1987-01-17 Seiko Epson Corp Liquid crystal display
JPS6247841A (en) 1985-08-26 1987-03-02 Matsushita Electric Ind Co Ltd Storage carrier for optical information
JPS62119502A (en) 1985-11-18 1987-05-30 インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション Spectrum-filter
GB2186708B (en) 1985-11-26 1990-07-11 Sharp Kk A variable interferometric device and a process for the production of the same
US5835255A (en) 1986-04-23 1998-11-10 Etalon, Inc. Visible spectrum modulator arrays
GB8610129D0 (en) 1986-04-25 1986-05-29 Secr Defence Electro-optical device
US4850682A (en) 1986-07-14 1989-07-25 Advanced Environmental Research Group Diffraction grating structures
US4748366A (en) 1986-09-02 1988-05-31 Taylor George W Novel uses of piezoelectric materials for creating optical effects
JPS6395489A (en) 1986-10-09 1988-04-26 日本電気株式会社 Liquid crystal display with filter
US4786128A (en) 1986-12-02 1988-11-22 Quantum Diagnostics, Ltd. Device for modulating and reflecting electromagnetic radiation employing electro-optic layer having a variable index of refraction
GB2198867A (en) 1986-12-17 1988-06-22 Philips Electronic Associated A liquid crystal display illumination system
EP0278038A1 (en) 1987-02-13 1988-08-17 Battelle-Institut e.V. Active flat type display panel
US20050259302A9 (en) 1987-09-11 2005-11-24 Metz Michael H Holographic light panels and flat panel display systems and method and apparatus for making same
JPH01108501U (en) 1988-01-16 1989-07-21
US4947291A (en) 1988-06-17 1990-08-07 Mcdermott Kevin Lighting device
US4980775A (en) 1988-07-21 1990-12-25 Magnascreen Corporation Modular flat-screen television displays and modules and circuit drives therefor
JPH0268513A (en) 1988-09-05 1990-03-08 Fuji Photo Film Co Ltd Color filter
JPH0818990B1 (en) 1988-09-26 1996-02-28
US5206747A (en) 1988-09-28 1993-04-27 Taliq Corporation Polymer dispersed liquid crystal display with birefringence of the liquid crystal at least 0.23
US5042921A (en) 1988-10-25 1991-08-27 Casio Computer Co., Ltd. Liquid crystal display apparatus
JPH02151079A (en) 1988-12-01 1990-06-11 Sharp Corp Manufacture of solar cell
US4982184A (en) * 1989-01-03 1991-01-01 General Electric Company Electrocrystallochromic display and element
US5446479A (en) 1989-02-27 1995-08-29 Texas Instruments Incorporated Multi-dimensional array video processor system
US5192946A (en) * 1989-02-27 1993-03-09 Texas Instruments Incorporated Digitized color video display system
NL8900637A (en) 1989-03-16 1990-10-16 Philips Nv DISPLAY FOR COLOR RENDERING.
US4961617A (en) 1989-07-19 1990-10-09 Ferrydon Shahidi Fibre optic waveguide illuminating elements
US5022745A (en) 1989-09-07 1991-06-11 Massachusetts Institute Of Technology Electrostatically deformable single crystal dielectrically coated mirror
JP2893599B2 (en) 1989-10-05 1999-05-24 セイコーエプソン株式会社 Polarized light source and projection display
US5381253A (en) * 1991-11-14 1995-01-10 Board Of Regents Of University Of Colorado Chiral smectic liquid crystal optical modulators having variable retardation
US5124834A (en) 1989-11-16 1992-06-23 General Electric Company Transferrable, self-supporting pellicle for elastomer light valve displays and method for making the same
US5037173A (en) 1989-11-22 1991-08-06 Texas Instruments Incorporated Optical interconnection network
JPH03170911A (en) 1989-11-30 1991-07-24 Pioneer Electron Corp Liquid crystal display device
US5235437A (en) 1989-12-18 1993-08-10 Sharp Kabushiki Kaisha Analog/digital image processor apparatus with liquid crystal light modulator
EP0434041B1 (en) 1989-12-20 1996-09-11 Canon Kabushiki Kaisha Polarized illuminating device
US5038224A (en) 1989-12-22 1991-08-06 Bell Communications Research, Inc. Video imaging device in a teleconferencing system
JPH03199920A (en) 1989-12-27 1991-08-30 Tdk Corp Light-displacement transducer and sensor
US5500635A (en) * 1990-02-20 1996-03-19 Mott; Jonathan C. Products incorporating piezoelectric material
US5361190A (en) 1990-02-20 1994-11-01 K. W. Muth Co. Inc. Mirror assembly
US5164858A (en) 1990-03-07 1992-11-17 Deposition Sciences, Inc. Multi-spectral filter
JPH04230705A (en) 1990-05-18 1992-08-19 Canon Inc Polarized light conversion device, polarized light illuminating device having this polarized light conversion device and projection type display device having polarized light illuminating device
GB9012099D0 (en) 1990-05-31 1990-07-18 Kodak Ltd Optical article for multicolour imaging
US5153771A (en) 1990-07-18 1992-10-06 Northrop Corporation Coherent light modulation and detector
JPH0481816A (en) * 1990-07-25 1992-03-16 Hitachi Ltd Liquid crystal display device
FR2665270B1 (en) * 1990-07-27 1994-05-13 Etat Francais Cnet LIGHT SPACE MODULATOR DEVICE AND HIGH DYNAMIC CONOSCOPIC HOLOGRAPHY SYSTEM COMPRISING SUCH A MODULATOR DEVICE.
US5110370A (en) 1990-09-20 1992-05-05 United Solar Systems Corporation Photovoltaic device with decreased gridline shading and method for its manufacture
US5050946A (en) 1990-09-27 1991-09-24 Compaq Computer Corporation Faceted light pipe
US5044736A (en) 1990-11-06 1991-09-03 Motorola, Inc. Configurable optical filter or display
JPH04190323A (en) 1990-11-26 1992-07-08 Hitachi Ltd Liquid crystal display with solar battery cell
US5387953A (en) 1990-12-27 1995-02-07 Canon Kabushiki Kaisha Polarization illumination device and projector having the same
JPH04238321A (en) 1991-01-23 1992-08-26 Mitsubishi Electric Corp Liquid crystal display device
KR960002202B1 (en) * 1991-02-04 1996-02-13 가부시끼가이샤 한도다이 에네르기 겐뀨쇼 Method of manufacturing liquid crystal electro-optical devices
US5233459A (en) 1991-03-06 1993-08-03 Massachusetts Institute Of Technology Electric display device
US5142414A (en) 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
US5226099A (en) 1991-04-26 1993-07-06 Texas Instruments Incorporated Digital micromirror shutter device
US5555160A (en) 1991-06-27 1996-09-10 Nissen Chemitec Co., Ltd. Light-guiding panel for surface lighting and a surface lighting body
US5221982A (en) 1991-07-05 1993-06-22 Faris Sadeg M Polarizing wavelength separator
US5287215A (en) * 1991-07-17 1994-02-15 Optron Systems, Inc. Membrane light modulation systems
US5168406A (en) 1991-07-31 1992-12-01 Texas Instruments Incorporated Color deformable mirror device and method for manufacture
FR2680882B1 (en) 1991-08-06 1993-10-29 Thomson Csf ORPTIMIZED LIGHT EFFICIENCY IMAGE PROJECTOR.
US5151585A (en) 1991-08-12 1992-09-29 Hughes Danbury Optical Systems, Inc. Coherent radiation detector
IL99420A (en) 1991-09-05 2000-12-06 Elbit Systems Ltd Helmet mounted display
GB9121159D0 (en) 1991-10-04 1991-11-13 Marconi Gec Ltd Colour display system
EP0539099A3 (en) 1991-10-25 1993-05-19 Optical Coating Laboratory, Inc. Repositionable optical cover for monitors
US5515184A (en) 1991-11-12 1996-05-07 The University Of Alabama In Huntsville Waveguide hologram illuminators
US5326426A (en) 1991-11-14 1994-07-05 Tam Andrew C Undercut membrane mask for high energy photon patterning
US5233385A (en) 1991-12-18 1993-08-03 Texas Instruments Incorporated White light enhanced color field sequential projection
US5356488A (en) 1991-12-27 1994-10-18 Rudolf Hezel Solar cell and method for its manufacture
US5349503A (en) 1991-12-31 1994-09-20 At&T Bell Laboratories Illuminated transparent display with microtextured back reflector
US5231532A (en) 1992-02-05 1993-07-27 Texas Instruments Incorporated Switchable resonant filter for optical radiation
JPH05241103A (en) 1992-02-21 1993-09-21 Nec Corp Projection type liquid crystal display device
JPH05264904A (en) 1992-03-18 1993-10-15 Canon Inc Illuminating optical system and projection type image display device using the system
US6002829A (en) 1992-03-23 1999-12-14 Minnesota Mining And Manufacturing Company Luminaire device
US5528720A (en) * 1992-03-23 1996-06-18 Minnesota Mining And Manufacturing Co. Tapered multilayer luminaire devices
JPH05281479A (en) 1992-03-31 1993-10-29 Nippon Steel Corp Display device
US5312513A (en) * 1992-04-03 1994-05-17 Texas Instruments Incorporated Methods of forming multiple phase light modulators
US6088941A (en) 1992-04-06 2000-07-18 A.D.P. Adaptive Visual Perception Ltd. Transparency viewing apparatus
WO1993021663A1 (en) * 1992-04-08 1993-10-28 Georgia Tech Research Corporation Process for lift-off of thin film materials from a growth substrate
US5261970A (en) 1992-04-08 1993-11-16 Sverdrup Technology, Inc. Optoelectronic and photovoltaic devices with low-reflectance surfaces
US5311360A (en) 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
US5398170A (en) * 1992-05-18 1995-03-14 Lee; Song S. Optical-fiber display with intensive brightness
US5638084A (en) 1992-05-22 1997-06-10 Dielectric Systems International, Inc. Lighting-independent color video display
JPH06214169A (en) 1992-06-08 1994-08-05 Texas Instr Inc <Ti> Controllable optical and periodic surface filter
GB2269697A (en) * 1992-08-11 1994-02-16 Sharp Kk Display device
US5818095A (en) * 1992-08-11 1998-10-06 Texas Instruments Incorporated High-yield spatial light modulator with light blocking layer
US5293272A (en) * 1992-08-24 1994-03-08 Physical Optics Corporation High finesse holographic fabry-perot etalon and method of fabricating
JPH0695112A (en) 1992-09-16 1994-04-08 Hitachi Ltd Prism plate and information display device formed by using this plate
GB9219671D0 (en) 1992-09-17 1992-10-28 Canterbury Park Limited Ink
US5339179A (en) 1992-10-01 1994-08-16 International Business Machines Corp. Edge-lit transflective non-emissive display with angled interface means on both sides of light conducting panel
US5648860A (en) 1992-10-09 1997-07-15 Ag Technology Co., Ltd. Projection type color liquid crystal optical apparatus
US5604607A (en) 1992-10-19 1997-02-18 Eastman Kodak Company Light concentrator system
KR0168879B1 (en) 1992-12-25 1999-04-15 기따지마 요시또시 Renticular lens, surface light source and liquid crystal display apparatus
US5671314A (en) 1993-01-15 1997-09-23 Sisters Of Prividence In Oregon Illuminator devices for ultraviolet light delivery and methods of making same
EP0609812B1 (en) 1993-02-01 1998-01-07 Matsushita Electric Industrial Co., Ltd. Waveguide-type image transmission device and fingerprint identification device
JP2823470B2 (en) 1993-03-09 1998-11-11 シャープ株式会社 Optical scanning device, display device using the same, and image information input / output device
US6674562B1 (en) 1994-05-05 2004-01-06 Iridigm Display Corporation Interferometric modulation of radiation
US5418631A (en) 1993-05-14 1995-05-23 Kaiser Optical Systems, Inc. Edge-lit holographic diffusers for flat-panel displays
GB2278222A (en) 1993-05-20 1994-11-23 Sharp Kk Spatial light modulator
US5481385A (en) 1993-07-01 1996-01-02 Alliedsignal Inc. Direct view display device with array of tapered waveguide on viewer side
US5673139A (en) 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
US5365283A (en) 1993-07-19 1994-11-15 Texas Instruments Incorporated Color phase control for projection display using spatial light modulator
AU6812994A (en) 1993-07-27 1995-02-28 Physical Optics Corporation Light source destructuring and shaping device
FR2710161B1 (en) 1993-09-13 1995-11-24 Suisse Electronique Microtech Miniature array of light shutters.
JP3382683B2 (en) 1993-10-22 2003-03-04 オリンパス光学工業株式会社 Concentric optical system
CN1076125C (en) 1993-11-05 2001-12-12 时至准钟表股份有限公司 Solar battery device and its manufacture
US5398125A (en) * 1993-11-10 1995-03-14 Minnesota Mining And Manufacturing Company Liquid crystal projection panel having microlens arrays, on each side of the liquid crystal, with a focus beyond the liquid crystal
DE69418208T2 (en) 1993-11-15 1999-09-16 Allied Signal Inc OPTICAL ELEMENT FOR USE IN A MATRIX OF OPTICAL ELEMENTS IN A DISPLAY DEVICE
US5517347A (en) 1993-12-01 1996-05-14 Texas Instruments Incorporated Direct view deformable mirror device
NL9302091A (en) 1993-12-02 1995-07-03 R & S Renewable Energy Systems Photovoltaic solar panel and method for its manufacture.
BE1007993A3 (en) 1993-12-17 1995-12-05 Philips Electronics Nv LIGHTING SYSTEM FOR A COLOR IMAGE PROJECTION DEVICE AND circular polarizer SUITABLE FOR USE IN SUCH A LIGHTING SYSTEM AND COLOR IMAGE PROJECTION DEVICE CONTAINING SUCH LIGHTING SYSTEM WITH circular polarizer.
US5659410A (en) 1993-12-28 1997-08-19 Enplas Corporation Surface light source device and liquid crystal display
US5448314A (en) 1994-01-07 1995-09-05 Texas Instruments Method and apparatus for sequential color imaging
US5500761A (en) 1994-01-27 1996-03-19 At&T Corp. Micromechanical modulator
JP2765471B2 (en) 1994-02-15 1998-06-18 日本電気株式会社 Projection type liquid crystal display
TW334523B (en) 1994-03-02 1998-06-21 Toso Kk Back light
DE4407067C2 (en) * 1994-03-03 2003-06-18 Unaxis Balzers Ag Dielectric interference filter system, LCD display and CCD arrangement as well as method for producing a dielectric interference filter system
US5982540A (en) 1994-03-16 1999-11-09 Enplas Corporation Surface light source device with polarization function
US6028649A (en) 1994-04-21 2000-02-22 Reveo, Inc. Image display systems having direct and projection viewing modes
US7138984B1 (en) * 2001-06-05 2006-11-21 Idc, Llc Directly laminated touch sensitive screen
US6040937A (en) 1994-05-05 2000-03-21 Etalon, Inc. Interferometric modulation
US7123216B1 (en) 1994-05-05 2006-10-17 Idc, Llc Photonic MEMS and structures
US7460291B2 (en) * 1994-05-05 2008-12-02 Idc, Llc Separable modulator
US20010003487A1 (en) 1996-11-05 2001-06-14 Mark W. Miles Visible spectrum modulator arrays
US5805117A (en) * 1994-05-12 1998-09-08 Samsung Electronics Co., Ltd. Large area tiled modular display system
EP0765491B1 (en) 1994-06-01 2006-08-02 Koninklijke Philips Electronics N.V. High-efficiency illumination device and image projection apparatus comprising such a device
US5497172A (en) * 1994-06-13 1996-03-05 Texas Instruments Incorporated Pulse width modulation for spatial light modulator with split reset addressing
US5671994A (en) 1994-06-08 1997-09-30 Clio Technologies, Inc. Flat and transparent front-lighting system using microprisms
US5892598A (en) 1994-07-15 1999-04-06 Matsushita Electric Industrial Co., Ltd. Head up display unit, liquid crystal display panel, and method of fabricating the liquid crystal display panel
US5636052A (en) 1994-07-29 1997-06-03 Lucent Technologies Inc. Direct view display based on a micromechanical modulation
US5703710A (en) 1994-09-09 1997-12-30 Deacon Research Method for manipulating optical energy using poled structure
US5647036A (en) 1994-09-09 1997-07-08 Deacon Research Projection display with electrically-controlled waveguide routing
US5544268A (en) * 1994-09-09 1996-08-06 Deacon Research Display panel with electrically-controlled waveguide-routing
JPH10508975A (en) 1994-09-15 1998-09-02 ピックステック インコーポレイテッド Electroluminescent display device having multi-electrode structure and method of manufacturing the same
JP3219943B2 (en) * 1994-09-16 2001-10-15 株式会社東芝 Planar direct-view display device
JPH0894992A (en) 1994-09-22 1996-04-12 Casio Comput Co Ltd Liquid crystal display element
US5619059A (en) 1994-09-28 1997-04-08 National Research Council Of Canada Color deformable mirror device having optical thin film interference color coatings
US6560018B1 (en) 1994-10-27 2003-05-06 Massachusetts Institute Of Technology Illumination system for transmissive light valve displays
JPH08136910A (en) 1994-11-07 1996-05-31 Hitachi Ltd Color liquid crystal display device and its production
JP3412293B2 (en) 1994-11-17 2003-06-03 株式会社デンソー Semiconductor yaw rate sensor and method of manufacturing the same
US5474865A (en) 1994-11-21 1995-12-12 Sematech, Inc. Globally planarized binary optical mask using buried absorbers
US5815229A (en) 1994-11-21 1998-09-29 Proxima Corporation Microlens imbedded liquid crystal projection panel including thermal insulation layer
KR0164463B1 (en) 1994-11-25 1999-03-20 이헌조 Optical apparatus of liquid crystal projector
JP2916887B2 (en) 1994-11-29 1999-07-05 キヤノン株式会社 Electron emitting element, electron source, and method of manufacturing image forming apparatus
TW373116B (en) 1994-12-15 1999-11-01 Sharp Kk Lighting apparatus
US5550373A (en) 1994-12-30 1996-08-27 Honeywell Inc. Fabry-Perot micro filter-detector
JP3251452B2 (en) 1995-01-31 2002-01-28 シャープ株式会社 Backlight device for liquid crystal display device
JP3429384B2 (en) 1995-02-03 2003-07-22 株式会社エンプラス Sidelight type surface light source device
US5650865A (en) 1995-03-21 1997-07-22 Hughes Electronics Holographic backlight for flat panel displays
JPH08271874A (en) 1995-03-31 1996-10-18 Sony Corp Liquid crystal display device and its production
US5751388A (en) 1995-04-07 1998-05-12 Honeywell Inc. High efficiency polarized display
US5886688A (en) * 1995-06-02 1999-03-23 National Semiconductor Corporation Integrated solar panel and liquid crystal display for portable computer or the like
US5835256A (en) 1995-06-19 1998-11-10 Reflectivity, Inc. Reflective spatial light modulator with encapsulated micro-mechanical elements
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
DE69627490T2 (en) 1995-06-20 2004-04-08 Thomson Consumer Electronics, Inc., Indianapolis REAR LIGHTED ELECTRONIC VIEWFINDER
US6712481B2 (en) 1995-06-27 2004-03-30 Solid State Opto Limited Light emitting panel assemblies
JP3540444B2 (en) 1995-07-06 2004-07-07 三菱レイヨン株式会社 Backlight and liquid crystal display device using the same
JP3575024B2 (en) 1995-07-17 2004-10-06 セイコーエプソン株式会社 Reflective color liquid crystal device and electronic equipment using the same
US5877874A (en) * 1995-08-24 1999-03-02 Terrasun L.L.C. Device for concentrating optical radiation
JP2728041B2 (en) 1995-08-30 1998-03-18 日本電気株式会社 LCD panel
US5932309A (en) 1995-09-28 1999-08-03 Alliedsignal Inc. Colored articles and compositions and methods for their fabrication
US5739945A (en) 1995-09-29 1998-04-14 Tayebati; Parviz Electrically tunable optical filter utilizing a deformable multi-layer mirror
US6324192B1 (en) 1995-09-29 2001-11-27 Coretek, Inc. Electrically tunable fabry-perot structure utilizing a deformable multi-layer mirror and method of making the same
CN1194242C (en) 1995-11-01 2005-03-23 松下电器产业株式会社 Outgoing efficiency control device, projection type display appts. infrared sensor and non-contact thermometer
WO1997016765A1 (en) * 1995-11-02 1997-05-09 Philips Electronics N.V. Picture display device
JP4431196B2 (en) 1995-11-06 2010-03-10 アイディーシー エルエルシー Interferometric modulation
US7907319B2 (en) 1995-11-06 2011-03-15 Qualcomm Mems Technologies, Inc. Method and device for modulating light with optical compensation
JPH09160032A (en) 1995-12-12 1997-06-20 Omron Corp Illuminator, liquid crystal display device using the illuminator, portable terminal equipment, on board equipment and optical recognition device
US5933183A (en) * 1995-12-12 1999-08-03 Fuji Photo Film Co., Ltd. Color spatial light modulator and color printer using the same
JPH09182112A (en) 1995-12-22 1997-07-11 Sharp Corp Projector device using small optical system
JP3799092B2 (en) 1995-12-29 2006-07-19 アジレント・テクノロジーズ・インク Light modulation device and display device
US5771321A (en) 1996-01-04 1998-06-23 Massachusetts Institute Of Technology Micromechanical optical switch and flat panel display
GB2309609A (en) * 1996-01-26 1997-07-30 Sharp Kk Observer tracking autostereoscopic directional display
EP0786911B1 (en) 1996-01-26 2003-09-10 Sharp Kabushiki Kaisha Autostereoscopic display
CN1078335C (en) 1996-02-01 2002-01-23 三菱丽阳株式会社 Surface light source element and liquid crystal device and sign display device using same
US6166834A (en) 1996-03-15 2000-12-26 Matsushita Electric Industrial Co., Ltd. Display apparatus and method for forming hologram suitable for the display apparatus
JPH09260696A (en) 1996-03-19 1997-10-03 Daido Hoxan Inc Solar cell
US6624944B1 (en) 1996-03-29 2003-09-23 Texas Instruments Incorporated Fluorinated coating for an optical element
JP3869488B2 (en) 1996-04-17 2007-01-17 大日本印刷株式会社 Image display device using hologram color filter
JPH09288993A (en) 1996-04-19 1997-11-04 Sharp Corp Lighting system, and display device utilizing it
JPH09307140A (en) 1996-05-14 1997-11-28 Matsushita Electron Corp Semiconductor light emitting device
JP3506841B2 (en) 1996-05-17 2004-03-15 松下電器産業株式会社 Illumination device of reflective liquid crystal display device and reflective liquid crystal display device
WO1997044707A2 (en) 1996-05-24 1997-11-27 Digital D.J. Incorporated Liquid crystal display device with integrated solar power source and antenna
JP2865618B2 (en) 1996-05-31 1999-03-08 嶋田プレシジョン株式会社 Light guide plate and light guide plate assembly
US5751492A (en) 1996-06-14 1998-05-12 Eastman Kodak Company Diffractive/Refractive lenslet array incorporating a second aspheric surface
US5782993A (en) 1996-06-28 1998-07-21 Ponewash; Jackie Photovoltaic cells having micro-embossed optical enhancing structures
US5771124A (en) 1996-07-02 1998-06-23 Siliscape Compact display system with two stage magnification and immersed beam splitter
KR100213968B1 (en) 1996-07-15 1999-08-02 구자홍 Liquid crystal display device
FR2751398B1 (en) * 1996-07-16 1998-08-28 Thomson Csf LIGHTING DEVICE AND APPLICATION TO THE LIGHTING OF A TRANSMISSION SCREEN
US5710656A (en) * 1996-07-30 1998-01-20 Lucent Technologies Inc. Micromechanical optical modulator having a reduced-mass composite membrane
GB2315902A (en) 1996-08-01 1998-02-11 Sharp Kk LIquid crystal device
US5894359A (en) 1996-08-21 1999-04-13 Victor Company Of Japan, Ltd. Color filter and color display apparatus
CN1143160C (en) 1996-09-23 2004-03-24 皇家菲利浦电子有限公司 Lighting system for flat-plate picture displaying apparatus
WO1998013709A1 (en) 1996-09-24 1998-04-02 Seiko Epson Corporation Illuminating device and display using the device
JP3402138B2 (en) 1996-09-27 2003-04-28 株式会社日立製作所 Liquid crystal display
US5975703A (en) 1996-09-30 1999-11-02 Digital Optics International Image projection system
US5854872A (en) 1996-10-08 1998-12-29 Clio Technologies, Inc. Divergent angle rotator system and method for collimating light beams
JPH09189910A (en) 1996-10-28 1997-07-22 Seiko Epson Corp Color display device
WO1998019201A1 (en) 1996-10-29 1998-05-07 Xeotron Corporation Optical device utilizing optical waveguides and mechanical light-switches
US6486862B1 (en) 1996-10-31 2002-11-26 Kopin Corporation Card reader display system
US6094285A (en) 1996-12-04 2000-07-25 Trw Inc. All optical RF signal channelizer
US5868480A (en) * 1996-12-17 1999-02-09 Compaq Computer Corporation Image projection apparatus for producing an image supplied by parallel transmitted colored light
JPH10186249A (en) 1996-12-24 1998-07-14 Casio Comput Co Ltd Display device
GB2325330B (en) 1997-01-16 2001-06-20 Motorola Inc Ambient illuminated electro-optic display device
GB2321532A (en) 1997-01-22 1998-07-29 Sharp Kk Multi-colour reflector device and display
US5981112A (en) 1997-01-24 1999-11-09 Eastman Kodak Company Method of making color filter arrays
JPH10202948A (en) 1997-01-29 1998-08-04 Canon Inc Image-forming apparatus and image formation method for image-forming apparatus
US6266473B1 (en) 1997-02-07 2001-07-24 Alliedsignal Inc. Reflective display
JPH10293212A (en) 1997-02-18 1998-11-04 Dainippon Printing Co Ltd Backlight and liquid crystal display device
US5783614A (en) 1997-02-21 1998-07-21 Copytele, Inc. Polymeric-coated dielectric particles and formulation and method for preparing same
US5913594A (en) 1997-02-25 1999-06-22 Iimura; Keiji Flat panel light source device and passive display device utilizing the light source device
JPH10260405A (en) 1997-03-18 1998-09-29 Seiko Epson Corp Lighting device, liquid-crystal display device, and electronic equipment
JP3666181B2 (en) 1997-03-21 2005-06-29 ソニー株式会社 Reflective and transmissive display device
EP0867747A3 (en) 1997-03-25 1999-03-03 Sony Corporation Reflective display device
JP3573938B2 (en) 1997-03-28 2004-10-06 シャープ株式会社 Forward illumination device and reflection type liquid crystal display device having the same
JP3364592B2 (en) 1998-09-16 2003-01-08 シャープ株式会社 Reflective liquid crystal display
JP3231655B2 (en) 1997-03-28 2001-11-26 シャープ株式会社 Forward illumination device and reflection type liquid crystal display device having the same
US6879354B1 (en) 1997-03-28 2005-04-12 Sharp Kabushiki Kaisha Front-illuminating device and a reflection-type liquid crystal display using such a device
JP3706109B2 (en) 1997-03-28 2005-10-12 シャープ株式会社 Front illumination device and reflective liquid crystal display device including the same
US6791640B1 (en) 1997-04-23 2004-09-14 Sharp Kabushiki Kaisha Reflection liquid crystal display and reflection liquid crystal display provided with built-in touch panel and comprising the same
EP0879991A3 (en) 1997-05-13 1999-04-21 Matsushita Electric Industrial Co., Ltd. Illuminating system
EP0913721B1 (en) 1997-05-14 2004-04-28 Seiko Epson Corporation Display and electronic device comprising the same
GB9710062D0 (en) 1997-05-16 1997-07-09 British Tech Group Optical devices and methods of fabrication thereof
US6100952A (en) 1997-06-04 2000-08-08 Korry Electronics Co. NVG-compatible AMLCD backlight having a ridged prismatic TIR with an embedded diffuser doped with an IR absorbing dye
JPH112764A (en) 1997-06-10 1999-01-06 Sharp Corp Optical opening and closing device, display device and manufacture of optical opening and closing device
JP3787983B2 (en) 1997-06-18 2006-06-21 セイコーエプソン株式会社 Optical switching element, image display device, and projection device
US5883684A (en) 1997-06-19 1999-03-16 Three-Five Systems, Inc. Diffusively reflecting shield optically, coupled to backlit lightguide, containing LED's completely surrounded by the shield
JP3155232B2 (en) 1997-07-30 2001-04-09 セイコーインスツルメンツ株式会社 Light scattering type liquid crystal display
US6259082B1 (en) 1997-07-31 2001-07-10 Rohm Co., Ltd. Image reading apparatus
JPH1164882A (en) 1997-08-12 1999-03-05 Matsushita Electric Ind Co Ltd Reflection type liquid crystal panel and its production
US6008449A (en) 1997-08-19 1999-12-28 Cole; Eric D. Reflective concentrating solar cell assembly
JPH1164836A (en) 1997-08-21 1999-03-05 Matsushita Electron Corp Image display device
US6031653A (en) * 1997-08-28 2000-02-29 California Institute Of Technology Low-cost thin-metal-film interference filters
FR2769382B1 (en) 1997-10-03 2000-12-01 Thomson Multimedia Sa REAR LIGHTING SYSTEM FOR A TRANSMISSIBLE ELECTRO-OPTICAL MODULATOR USING THE LIGHT POLARIZATION EFFECT
US6863428B2 (en) 1997-10-24 2005-03-08 3M Innovative Properties Company Light guide illumination device appearing uniform in brightness along its length
US6273577B1 (en) 1997-10-31 2001-08-14 Sanyo Electric Co., Ltd. Light guide plate, surface light source using the light guide plate, and liquid crystal display using the surface light source
US6088102A (en) 1997-10-31 2000-07-11 Silicon Light Machines Display apparatus including grating light-valve array and interferometric optical system
US6285424B1 (en) 1997-11-07 2001-09-04 Sumitomo Chemical Company, Limited Black mask, color filter and liquid crystal display
ATE272224T1 (en) 1997-11-17 2004-08-15 Max Planck Gesellschaft CONFOCAL SPECTROSCOPY SYSTEM AND METHOD
JPH11160687A (en) 1997-11-21 1999-06-18 Sony Corp Display device and method of manufacturing optical diffusion layer
JP3808992B2 (en) 1997-11-21 2006-08-16 三菱電機株式会社 LCD panel module
US6028690A (en) * 1997-11-26 2000-02-22 Texas Instruments Incorporated Reduced micromirror mirror gaps for improved contrast ratio
JPH11167808A (en) 1997-12-04 1999-06-22 Hitachi Ltd Lighting system and liquid crystal display with back light
US6492065B2 (en) 1997-12-05 2002-12-10 Victor Company Of Japan, Limited Hologram color filter, production method of the same hologram color filter and space light modulating apparatus using the same hologram color filter
JPH11174234A (en) 1997-12-05 1999-07-02 Victor Co Of Japan Ltd Hologram color filter, manufacture of hologram color filter and spatial light modulation device using the same
JPH11184387A (en) 1997-12-24 1999-07-09 Seiko Instruments Inc Front light type lighting device and reflection type color display device with front light type lighting device
US6151089A (en) 1998-01-20 2000-11-21 Sony Corporation Reflection type display with light waveguide with inclined and planar surface sections
JPH11211999A (en) * 1998-01-28 1999-08-06 Teijin Ltd Optical modulating element and display device
US6897855B1 (en) 1998-02-17 2005-05-24 Sarnoff Corporation Tiled electronic display structure
JP3496806B2 (en) 1998-02-17 2004-02-16 株式会社エンプラス Sidelight type surface light source device and liquid crystal display device
JPH11232919A (en) 1998-02-17 1999-08-27 Fuji Xerox Co Ltd Front light lighting system and reflecting type display device
US6800378B2 (en) 1998-02-19 2004-10-05 3M Innovative Properties Company Antireflection films for use with displays
JP3831510B2 (en) 1998-02-27 2006-10-11 三洋電機株式会社 Reflective liquid crystal display
US6195196B1 (en) * 1998-03-13 2001-02-27 Fuji Photo Film Co., Ltd. Array-type exposing device and flat type display incorporating light modulator and driving method thereof
JPH11254752A (en) 1998-03-13 1999-09-21 Fuji Photo Film Co Ltd Exposing element
JP3824290B2 (en) 1998-05-07 2006-09-20 富士写真フイルム株式会社 Array type light modulation element, array type exposure element, flat display, and method for driving array type light modulation element
JPH11258558A (en) * 1998-03-13 1999-09-24 Fuji Photo Film Co Ltd Planar display device
KR19990074812A (en) 1998-03-14 1999-10-05 윤종용 Compatible optical pickup device
WO1999049522A1 (en) 1998-03-25 1999-09-30 Tdk Corporation Solar cell module
JP3279265B2 (en) 1998-03-26 2002-04-30 株式会社エム・アール・システム研究所 Image display device
US6167761B1 (en) 1998-03-31 2001-01-02 Hitachi, Ltd. And Hitachi Car Engineering Co., Ltd. Capacitance type pressure sensor with capacitive elements actuated by a diaphragm
JP2986773B2 (en) * 1998-04-01 1999-12-06 嶋田プレシジョン株式会社 Light guide plate for point light source
KR100703140B1 (en) 1998-04-08 2007-04-05 이리다임 디스플레이 코포레이션 Interferometric modulation and its manufacturing method
JP4106735B2 (en) 1998-04-13 2008-06-25 凸版印刷株式会社 Reflective display with solar cells
JP4066503B2 (en) 1998-04-15 2008-03-26 凸版印刷株式会社 Reflective display with solar cells
US6967779B2 (en) * 1998-04-15 2005-11-22 Bright View Technologies, Inc. Micro-lens array with precisely aligned aperture mask and methods of producing same
JP4520545B2 (en) 1998-04-17 2010-08-04 セイコーインスツル株式会社 Reflective liquid crystal display device and manufacturing method thereof
JP3644476B2 (en) 1998-04-30 2005-04-27 松下電器産業株式会社 Portable electronic devices
JPH11326898A (en) 1998-05-11 1999-11-26 Toshiba Corp Reflection type liquid crystal display device
JP3520494B2 (en) 1998-05-11 2004-04-19 日東電工株式会社 Reflective liquid crystal display
US6282010B1 (en) 1998-05-14 2001-08-28 Texas Instruments Incorporated Anti-reflective coatings for spatial light modulators
TW386175B (en) 1998-05-19 2000-04-01 Dainippon Printing Co Ltd Light reflective panel for reflective liquid crystal panel
KR100398755B1 (en) 1998-06-02 2003-09-19 니폰샤신인사츠가부시키가이샤 Front light-combined touch panel device
CN100390599C (en) 1998-06-05 2008-05-28 精工爱普生株式会社 Light source and display device
CA2333358A1 (en) 1998-06-22 1999-12-29 E Ink Corporation Means of addressing microencapsulated display media
EP1014161B1 (en) 1998-06-25 2001-12-19 Citizen Watch Co. Ltd. Reflective liquid crystal display
US6377535B1 (en) 1998-07-06 2002-04-23 Read-Rite Corporation High numerical aperture optical focusing device having a conical incident facet and a parabolic reflector for use in data storage systems
US6900868B2 (en) 1998-07-07 2005-05-31 Fujitsu Display Technologies Corporation Liquid crystal display device
TW523627B (en) 1998-07-14 2003-03-11 Hitachi Ltd Liquid crystal display device
GB2340281A (en) 1998-08-04 2000-02-16 Sharp Kk A reflective liquid crystal display device
JP2000056226A (en) 1998-08-04 2000-02-25 Olympus Optical Co Ltd Display/image pickup device
CA2305279C (en) 1998-08-10 2003-02-11 Sumitomo Osaka Cement Co., Ltd. An optical waveguide modulator
US6034813A (en) 1998-08-24 2000-03-07 Southwall Technologies, Inc. Wavelength selective applied films with glare control
JP2000075287A (en) 1998-09-01 2000-03-14 Toshiba Corp Reflective liquid crystal display device
JP2000075293A (en) 1998-09-02 2000-03-14 Matsushita Electric Ind Co Ltd Illuminator, touch panel with illumination and reflective liquid crystal display device
JP2000081848A (en) 1998-09-03 2000-03-21 Semiconductor Energy Lab Co Ltd Electronic equipment mounting liquid crystal display device
US6113239A (en) 1998-09-04 2000-09-05 Sharp Laboratories Of America, Inc. Projection display system for reflective light valves
WO2000016136A1 (en) 1998-09-14 2000-03-23 Digilens, Inc. Holographic illumination system and holographic projection system
JP3119846B2 (en) * 1998-09-17 2000-12-25 恵和株式会社 Light diffusion sheet and backlight unit using the same
JP3259692B2 (en) 1998-09-18 2002-02-25 株式会社日立製作所 Concentrating photovoltaic module, method of manufacturing the same, and concentrating photovoltaic system
EP0992837B1 (en) 1998-10-05 2010-06-16 Semiconductor Energy Laboratory Co, Ltd. Reflection type semiconductor display device
JP2000181367A (en) 1998-10-05 2000-06-30 Semiconductor Energy Lab Co Ltd Reflection type semiconductor display device
US6323834B1 (en) 1998-10-08 2001-11-27 International Business Machines Corporation Micromechanical displays and fabrication method
US6199989B1 (en) 1998-10-29 2001-03-13 Sumitomo Chemical Company, Limited Optical plate having reflecting function and transmitting function
US6288824B1 (en) 1998-11-03 2001-09-11 Alex Kastalsky Display device based on grating electromechanical shutter
JP2000147262A (en) 1998-11-11 2000-05-26 Nobuyuki Higuchi Converging device and photovoltaic power generation system utilizing the device
TW422346U (en) 1998-11-17 2001-02-11 Ind Tech Res Inst A reflector device with arc diffusion uint
JP3563618B2 (en) 1998-11-20 2004-09-08 コニカミノルタホールディングス株式会社 Lighting equipment
US6208466B1 (en) 1998-11-25 2001-03-27 3M Innovative Properties Company Multilayer reflector with selective transmission
CN1134607C (en) 1998-11-27 2004-01-14 夏普株式会社 Illuminator, illuminating device, front light and liquid crystal display
JP3871176B2 (en) 1998-12-14 2007-01-24 シャープ株式会社 Backlight device and liquid crystal display device
JP2000193933A (en) 1998-12-25 2000-07-14 Matsushita Electric Works Ltd Display device
US6188519B1 (en) 1999-01-05 2001-02-13 Kenneth Carlisle Johnson Bigrating light valve
JP2000214804A (en) 1999-01-20 2000-08-04 Fuji Photo Film Co Ltd Light modulation element, aligner, and planar display
TWI274204B (en) 1999-02-01 2007-02-21 Seiko Epson Corp Display device, electronic apparatus using the same, and light guider for display devices
US6322236B1 (en) 1999-02-09 2001-11-27 3M Innovative Properties Company Optical film with defect-reducing surface and method for making same
US20050024849A1 (en) 1999-02-23 2005-02-03 Parker Jeffery R. Methods of cutting or forming cavities in a substrate for use in making optical films, components or wave guides
US6827456B2 (en) 1999-02-23 2004-12-07 Solid State Opto Limited Transreflectors, transreflector systems and displays and methods of making transreflectors
CN1296604A (en) 1999-03-02 2001-05-23 松下电器产业株式会社 Illuminating device and display device provided with the device
JP4377984B2 (en) 1999-03-10 2009-12-02 キヤノン株式会社 Color filter, manufacturing method thereof, and liquid crystal element using the color filter
US6292504B1 (en) 1999-03-16 2001-09-18 Raytheon Company Dual cavity laser resonator
JP3471001B2 (en) 1999-04-16 2003-11-25 富士写真光機株式会社 Illumination optical system and projection display device using the same
JP3434465B2 (en) 1999-04-22 2003-08-11 三菱電機株式会社 Backlight for liquid crystal display
JP4237331B2 (en) 1999-04-26 2009-03-11 大日本印刷株式会社 Reflective LCD
JP3594868B2 (en) 1999-04-26 2004-12-02 日東電工株式会社 Laminated polarizing plate and liquid crystal display
JP3657143B2 (en) 1999-04-27 2005-06-08 シャープ株式会社 Solar cell and manufacturing method thereof
JP3527961B2 (en) 1999-04-30 2004-05-17 株式会社日立製作所 Front-light reflective liquid crystal display
TW477897B (en) * 1999-05-07 2002-03-01 Sharp Kk Liquid crystal display device, method and device to measure cell thickness of liquid crystal display device, and phase difference plate using the method thereof
US6323987B1 (en) 1999-05-14 2001-11-27 Agere Systems Optoelectronics Guardian Corp. Controlled multi-wavelength etalon
JP4328919B2 (en) * 1999-05-21 2009-09-09 株式会社トプコン Target device
US6428155B1 (en) 1999-05-25 2002-08-06 Silverbrook Research Pty Ltd Printer cartridge including machine readable ink
FI107085B (en) 1999-05-28 2001-05-31 Ics Intelligent Control System light Panel
JP3515426B2 (en) 1999-05-28 2004-04-05 大日本印刷株式会社 Anti-glare film and method for producing the same
US6201633B1 (en) * 1999-06-07 2001-03-13 Xerox Corporation Micro-electromechanical based bistable color display sheets
GB2350963A (en) 1999-06-09 2000-12-13 Secr Defence Holographic Displays
DE19927359A1 (en) 1999-06-16 2000-12-21 Creavis Tech & Innovation Gmbh Electrophoretic displays made of light-scattering carrier materials
US6597419B1 (en) 1999-07-02 2003-07-22 Minolta Co., Ltd. Liquid crystal display including filter means with 10-70% transmittance in the selective reflection wavelength range
JP2001021883A (en) 1999-07-06 2001-01-26 Nec Corp Reflective liquid crystal display device and electronic equipment
JP2001035222A (en) 1999-07-23 2001-02-09 Minebea Co Ltd Surface lighting system
JP2001035225A (en) 1999-07-26 2001-02-09 Minebea Co Ltd Surface lighting system
JP2001035230A (en) 1999-07-26 2001-02-09 Minebea Co Ltd Flat lighting system
JP2001052518A (en) 1999-08-16 2001-02-23 Minebea Co Ltd Plane-like lighting system
DE19939318A1 (en) 1999-08-19 2001-02-22 Bosch Gmbh Robert Procedure for production of micro-mechanical structures such as rotation sensors has extra protective layer deposition and etching steps to protect the structure during processing of the reverse side of the substrate
KR20010107934A (en) 1999-08-30 2001-12-07 마쯔시다 유키오 Surface light-emitting device and light-emitting guide device
KR20010030164A (en) 1999-08-31 2001-04-16 고지마 아끼로, 오가와 다이스께 Touch panel and display device using the same
DE19942513A1 (en) 1999-09-07 2001-03-08 Gerhard Karl Luminous body for images capable of screening
US6646772B1 (en) 1999-09-14 2003-11-11 Digilens, Inc. Holographic illumination system
US6448709B1 (en) 1999-09-15 2002-09-10 Industrial Technology Research Institute Field emission display panel having diode structure and method for fabricating
GB2354899A (en) 1999-10-02 2001-04-04 Sharp Kk Optical device for projection display
WO2003007049A1 (en) 1999-10-05 2003-01-23 Iridigm Display Corporation Photonic mems and structures
US7046905B1 (en) 1999-10-08 2006-05-16 3M Innovative Properties Company Blacklight with structured surfaces
JP3457591B2 (en) 1999-10-08 2003-10-20 インターナショナル・ビジネス・マシーンズ・コーポレーション Liquid crystal display
CN1220754C (en) 1999-10-19 2005-09-28 罗利克有限公司 Topologically structured polymer coating
US6421104B1 (en) 1999-10-22 2002-07-16 Motorola, Inc. Front illuminator for a liquid crystal display and method of making same
US6518944B1 (en) * 1999-10-25 2003-02-11 Kent Displays, Inc. Combined cholesteric liquid crystal display and solar cell assembly device
US6549338B1 (en) 1999-11-12 2003-04-15 Texas Instruments Incorporated Bandpass filter to reduce thermal impact of dichroic light shift
JP3659139B2 (en) 1999-11-29 2005-06-15 セイコーエプソン株式会社 RAM built-in driver and display unit and electronic device using the same
US6398389B1 (en) 1999-12-03 2002-06-04 Texas Instruments Incorporated Solid state light source augmentation for SLM display systems
US6717348B2 (en) 1999-12-09 2004-04-06 Fuji Photo Film Co., Ltd. Display apparatus
JP3987257B2 (en) 1999-12-10 2007-10-03 ローム株式会社 Liquid crystal display
KR100679095B1 (en) 1999-12-10 2007-02-05 엘지.필립스 엘시디 주식회사 Transparent Type Display Device Using Micro Light Modulator
LT4842B (en) * 1999-12-10 2001-09-25 Uab "Geola" Universal digital holographic printer and method
JP3524831B2 (en) 1999-12-15 2004-05-10 シャープ株式会社 Reflective and transmissive liquid crystal display
US6221687B1 (en) 1999-12-23 2001-04-24 Tower Semiconductor Ltd. Color image sensor with embedded microlens array
JP2001188230A (en) 1999-12-28 2001-07-10 Fuji Photo Film Co Ltd Liquid crystal display device
DE60033264T2 (en) 1999-12-28 2007-11-08 Fujitsu Kasei Ltd., Yokohama Lighting apparatus for display
US6466358B2 (en) 1999-12-30 2002-10-15 Texas Instruments Incorporated Analog pulse width modulation cell for digital micromechanical device
US6519073B1 (en) * 2000-01-10 2003-02-11 Lucent Technologies Inc. Micromechanical modulator and methods for fabricating the same
US6747801B2 (en) 2000-01-13 2004-06-08 Nitto Denko Corporation Optical film and liquid-crystal display device
JP2001194534A (en) 2000-01-13 2001-07-19 Nitto Denko Corp Light transmission plate and its manufacturing method
KR20010113739A (en) 2000-01-14 2001-12-28 요트.게.아. 롤페즈 Display device
JP4614400B2 (en) 2000-01-17 2011-01-19 日東電工株式会社 ORGANIC EL LIGHT EMITTING DEVICE, POLARIZING PLANE LIGHT SOURCE DEVICE, AND LIQUID CRYSTAL DISPLAY DEVICE
WO2001059402A2 (en) 2000-01-25 2001-08-16 Zygo Corporation Optical systems for measuring form and geometric dimensions of precision engineered parts
JP2001215501A (en) 2000-02-02 2001-08-10 Fuji Photo Film Co Ltd Illumining device and liquid crystal display device
JP4442836B2 (en) 2000-02-02 2010-03-31 日東電工株式会社 Optical film
JP4609962B2 (en) 2000-02-02 2011-01-12 日東電工株式会社 Optical film
DE10004972A1 (en) * 2000-02-04 2001-08-16 Bosch Gmbh Robert Display device
US6888678B2 (en) 2000-02-16 2005-05-03 Matsushita Electric Industrial Co., Ltd. Irregular-shape body, reflection sheet and reflection-type liquid crystal display element, and production method and production device therefor
JP4015342B2 (en) 2000-03-03 2007-11-28 ローム株式会社 LIGHTING DEVICE AND LIQUID CRYSTAL DISPLAY DEVICE HAVING THE SAME
JP2001267592A (en) 2000-03-14 2001-09-28 Nikon Corp Manufacturing method for semiconductor device, manufacturing method for rear incidence-type light receiving device, semiconductor device and rear incidence-type light receiving device
JP2001283622A (en) 2000-03-29 2001-10-12 Matsushita Electric Ind Co Ltd Illumination apparatus and reflector liquid crystal display
JP3301752B2 (en) 2000-03-31 2002-07-15 三菱電機株式会社 Front light, reflective liquid crystal display device and portable information terminal
JP4856805B2 (en) 2000-03-31 2012-01-18 スリーエム イノベイティブ プロパティズ カンパニー Optical laminate
JP2001297615A (en) 2000-04-12 2001-10-26 Keiwa Inc Optical sheet and backlight unit using the same
US6400738B1 (en) 2000-04-14 2002-06-04 Agilent Technologies, Inc. Tunable Fabry-Perot filters and lasers
US7133019B2 (en) 2000-04-21 2006-11-07 Matsushita Electric Industrial Co., Ltd. Illuminator, image display comprising the same, liquid crystal television, liquid crystal monitor, and liquid crystal information terminal
US6443585B1 (en) 2000-04-25 2002-09-03 Honeywell International Inc. Hollow cavity light guide for the distribution of collimated light to a liquid crystal display
JP2002014344A (en) 2000-04-28 2002-01-18 Minolta Co Ltd Liquid crystal display device
US20010055076A1 (en) 2000-04-28 2001-12-27 Keizou Ochi Reflective liquid crystal display apparatus
TWI240788B (en) 2000-05-04 2005-10-01 Koninkl Philips Electronics Nv Illumination system, light mixing chamber and display device
WO2001084228A1 (en) 2000-05-04 2001-11-08 Koninklijke Philips Electronics N.V. Image display device and method of manufacturing a light conductor for such an image display device
JP4197572B2 (en) 2000-05-12 2008-12-17 日東電工株式会社 Reflective liquid crystal display
JP4560890B2 (en) 2000-05-16 2010-10-13 東レ株式会社 Method for producing laminated light diffusing film
US6480634B1 (en) 2000-05-18 2002-11-12 Silicon Light Machines Image projector including optical fiber which couples laser illumination to light modulator
US7072544B2 (en) 2000-05-19 2006-07-04 Koninklijke Philips Electronics N.V. Polarized light-emitting waveguide plate
JP2001345458A (en) 2000-05-30 2001-12-14 Kyocera Corp Solar cell
JP2001343514A (en) 2000-05-30 2001-12-14 Victor Co Of Japan Ltd Hologram color filter
JP4439084B2 (en) 2000-06-14 2010-03-24 日東電工株式会社 Liquid crystal display
US6598987B1 (en) 2000-06-15 2003-07-29 Nokia Mobile Phones Limited Method and apparatus for distributing light to the user interface of an electronic device
JP2001356701A (en) 2000-06-15 2001-12-26 Fuji Photo Film Co Ltd Optical element, light source unit and display device
WO2001096451A1 (en) 2000-06-15 2001-12-20 Teijin Limited Biaxially oriented polyester film for light diffuser plate and light diffuser plate
KR20020001594A (en) 2000-06-26 2002-01-09 가마이 고로 Light pipe, plane light source unit and reflection type liquid-crystal display device
JP2002071965A (en) 2000-08-29 2002-03-12 Nitto Denko Corp Light guide plate, surface light source device, and reflection type liquid crystal display device
US6801270B2 (en) 2000-06-26 2004-10-05 Reveo, Inc. Backlight for a liquid crystal display having high light-recycling efficiency
US7583335B2 (en) 2000-06-27 2009-09-01 Citizen Holdings Co., Ltd. Liquid crystal display device
JP3774616B2 (en) 2000-06-29 2006-05-17 株式会社日立製作所 Lighting device and light guide plate manufacturing method
FR2811139B1 (en) 2000-06-29 2003-10-17 Centre Nat Rech Scient OPTOELECTRONIC DEVICE WITH INTEGRATED WAVELENGTH FILTERING
JP2002023155A (en) 2000-07-05 2002-01-23 Nitto Denko Corp Reflective liquid crystal display device
JP3700078B2 (en) * 2000-07-11 2005-09-28 ミネベア株式会社 Surface lighting device
JP2002025326A (en) 2000-07-13 2002-01-25 Seiko Epson Corp Light source device, lighting device, liquid crystal device, and electronic device
ATE338292T1 (en) * 2000-07-18 2006-09-15 Optaglio Ltd ACROMATIC DIFFRACTION ELEMENT
US6677709B1 (en) 2000-07-18 2004-01-13 General Electric Company Micro electromechanical system controlled organic led and pixel arrays and method of using and of manufacturing same
US6565225B2 (en) * 2000-07-19 2003-05-20 Sanyo Electric Co., Ltd. Bar-shaped light guide, beam lighting device using the bar-shaped light guide, and surface lighting device using the beam lighting device
JP3773818B2 (en) 2000-07-19 2006-05-10 三洋電機株式会社 Bar-shaped light guide, linear illumination device using the same, and planar illumination device using the linear illumination device
JP4460732B2 (en) 2000-07-21 2010-05-12 富士フイルム株式会社 Flat display device and exposure apparatus
JP2002124113A (en) 2000-07-21 2002-04-26 Hayashi Telempu Co Ltd Flat lighting device
JP2002108227A (en) 2000-07-26 2002-04-10 Bridgestone Corp Front light and liquid crystal display device
JP2002042525A (en) 2000-07-26 2002-02-08 Toyoda Gosei Co Ltd Planar light source
KR20020010322A (en) 2000-07-29 2002-02-04 구본준, 론 위라하디락사 Display device using micro electro-mechanical system
WO2002014740A1 (en) 2000-07-31 2002-02-21 Matsushita Electric Industrial Co., Ltd. Illuminator, image display, liquid crystal monitor, liquid crystal television, liquid crystal information terminal, and method for producing light guide plate
JP4467840B2 (en) 2000-07-31 2010-05-26 東芝モバイルディスプレイ株式会社 Illumination device and light guide plate manufacturing method
US6795605B1 (en) * 2000-08-01 2004-09-21 Cheetah Omni, Llc Micromechanical optical switch
JP2002062505A (en) 2000-08-14 2002-02-28 Canon Inc Projection type display deice and interference modulation element used therefor
US6570681B1 (en) * 2000-08-25 2003-05-27 Actuality Systems, Inc. System and method for dynamic optical switching using a diffractive optical element
JP2002072284A (en) 2000-08-28 2002-03-12 Canon Inc Light quantity adjusting device, lens device, and image pickup device
US6643069B2 (en) 2000-08-31 2003-11-04 Texas Instruments Incorporated SLM-base color projection display having multiple SLM's and multiple projection lenses
JP4945861B2 (en) 2000-09-05 2012-06-06 株式会社ニコン Thermal displacement element and radiation detector using the same
JP2002075037A (en) 2000-09-05 2002-03-15 Minebea Co Ltd Surface lighting equipment
JP4053220B2 (en) 2000-09-06 2008-02-27 スガツネ工業株式会社 Torque hinge with adjustable turning resistance
US6792293B1 (en) 2000-09-13 2004-09-14 Motorola, Inc. Apparatus and method for orienting an image on a display of a wireless communication device
JP3394025B2 (en) 2000-09-13 2003-04-07 嶋田プレシジョン株式会社 Front light light guide plate
US6538813B1 (en) 2000-09-19 2003-03-25 Honeywell International Inc. Display screen with metallized tapered waveguides
US6466354B1 (en) 2000-09-19 2002-10-15 Silicon Light Machines Method and apparatus for interferometric modulation of light
JP3561685B2 (en) * 2000-09-20 2004-09-02 三洋電機株式会社 Linear light source device and lighting device using the same
GB2371119A (en) 2000-09-25 2002-07-17 Marconi Caswell Ltd Micro electro-mechanical systems
CN1811549A (en) 2000-09-25 2006-08-02 三菱丽阳株式会社 Light source device
WO2002025167A1 (en) 2000-09-25 2002-03-28 Mitsubishi Rayon Co., Ltd. Light source device
US6778513B2 (en) 2000-09-29 2004-08-17 Arraycomm, Inc. Method and apparatus for separting multiple users in a shared-channel communication system
JP4570228B2 (en) 2000-10-11 2010-10-27 日東電工株式会社 Glass substrate and liquid crystal display device
US6493475B1 (en) 2000-10-19 2002-12-10 Tellium, Inc. Monolithic integration of signal-monitoring scheme in an optical switch
JP4371290B2 (en) 2000-10-19 2009-11-25 大日本印刷株式会社 Hologram light guide plate
US7072086B2 (en) * 2001-10-19 2006-07-04 Batchko Robert G Digital focus lens system
JP2002139630A (en) 2000-10-31 2002-05-17 Alps Electric Co Ltd Light transmission plate, method for manufacturing the same, surface light-emitting device and liquid crystal display
EP1202099A3 (en) 2000-10-31 2003-04-16 Kabushiki Kaisha Toshiba Electrostatic actuator and camera module using the same
JP4374482B2 (en) 2000-11-02 2009-12-02 ミネベア株式会社 Surface lighting device
US6556338B2 (en) 2000-11-03 2003-04-29 Intpax, Inc. MEMS based variable optical attenuator (MBVOA)
JP2002148615A (en) 2000-11-08 2002-05-22 Nitto Denko Corp Optical film and reflection type liquid crystal display device
US6580496B2 (en) 2000-11-09 2003-06-17 Canesta, Inc. Systems for CMOS-compatible three-dimensional image sensing using quantum efficiency modulation
US6643067B2 (en) 2000-11-22 2003-11-04 Seiko Epson Corporation Electro-optical device and electronic apparatus
US7307775B2 (en) 2000-12-07 2007-12-11 Texas Instruments Incorporated Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
JP2002174780A (en) 2000-12-08 2002-06-21 Stanley Electric Co Ltd Reflection type color display device
US7164224B2 (en) 2000-12-14 2007-01-16 Sharp Kabushiki Kaisha Backlight having discharge tube, reflector and heat conduction member contacting discharge tube
IL140318A0 (en) 2000-12-14 2002-02-10 Planop Planar Optics Ltd Compact dynamic crossbar switch by means of planar optics
JP2002184223A (en) 2000-12-14 2002-06-28 Alps Electric Co Ltd Flat light emitting device and manufacturing method thereof, and liquid crystal display device
JP4266551B2 (en) 2000-12-14 2009-05-20 三菱レイヨン株式会社 Surface light source system and light deflection element used therefor
JP3551310B2 (en) 2000-12-20 2004-08-04 ミネベア株式会社 Touch panel for display device
JP4361206B2 (en) 2000-12-21 2009-11-11 日東電工株式会社 Optical film and liquid crystal display device
KR100358181B1 (en) 2000-12-22 2002-10-25 한국전자통신연구원 Thermo-optic tunable optical attenuator
JP2002196117A (en) 2000-12-25 2002-07-10 Nitto Denko Corp Light diffusion layer, light diffusing sheet and optical element
JP2002196151A (en) 2000-12-25 2002-07-10 Citizen Electronics Co Ltd Light guide plate
CN1483150A (en) 2000-12-28 2004-03-17 ��ʿͨ��ʽ���� Light guiding plate and liquid crystal display device with the light guiding plate
US6636653B2 (en) 2001-02-02 2003-10-21 Teravicta Technologies, Inc. Integrated optical micro-electromechanical systems and methods of fabricating and operating the same
JP4074977B2 (en) 2001-02-02 2008-04-16 ミネベア株式会社 Surface lighting device
JP2002229023A (en) 2001-02-05 2002-08-14 Rohm Co Ltd Color liquid crystal display device
US6925313B2 (en) 2001-02-07 2005-08-02 Hyundai Curitel Inc. Folder-type mobile communication terminal having double-sided LCD
JP4476505B2 (en) 2001-02-09 2010-06-09 シャープ株式会社 Liquid crystal display
KR100377359B1 (en) 2001-02-14 2003-03-26 삼성전자주식회사 Illumination system for a display appratus
JP2002245835A (en) 2001-02-15 2002-08-30 Minolta Co Ltd Illumination device, display device, and electronic equipment
AU2002250271A1 (en) 2001-03-02 2002-09-19 Massachusetts Institute Of Technology Methods and apparatus for diffractive optical processing using an actuatable structure
GB0105781D0 (en) 2001-03-08 2001-04-25 Dyson Ltd Wand assembly for a vacuum cleaner
US6700695B2 (en) 2001-03-14 2004-03-02 3M Innovative Properties Company Microstructured segmented electrode film for electronic displays
EP1241514A3 (en) 2001-03-16 2003-09-10 Nitto Denko Corporation Liquid-crystal display apparatus
JP3888075B2 (en) 2001-03-23 2007-02-28 セイコーエプソン株式会社 Optical switching element, optical switching device, and image display apparatus
JP3713596B2 (en) 2001-03-26 2005-11-09 ミネベア株式会社 Surface lighting device
JP2002297044A (en) 2001-03-29 2002-10-09 Toshiba Corp Mobile display for narrow angle of view, manufacturing method for filter used in the display, and portable terminal device
US6630786B2 (en) 2001-03-30 2003-10-07 Candescent Technologies Corporation Light-emitting device having light-reflective layer formed with, or/and adjacent to, material that enhances device performance
US6592234B2 (en) 2001-04-06 2003-07-15 3M Innovative Properties Company Frontlit display
JP3686348B2 (en) 2001-04-10 2005-08-24 株式会社巴川製紙所 Optical film and manufacturing method thereof
US6678026B2 (en) 2001-04-10 2004-01-13 Seiko Epson Corporation Liquid crystal device and electronic apparatus
US6552842B2 (en) 2001-04-13 2003-04-22 Ut-Battelle, Llc Reflective coherent spatial light modulator
JP2002313121A (en) 2001-04-16 2002-10-25 Nitto Denko Corp Luminaire with touch panel and reflective liquid crystal display device
US6660997B2 (en) 2001-04-26 2003-12-09 Creo Srl Absolute position Moiré type encoder for use in a control system
JP2002328313A (en) 2001-05-01 2002-11-15 Sony Corp Optical switching element, its manufacturing method, and image display device
GB2375184A (en) 2001-05-02 2002-11-06 Marconi Caswell Ltd Wavelength selectable optical filter
JP2002333618A (en) 2001-05-07 2002-11-22 Nitto Denko Corp Reflection type liquid crystal display device
US7001058B2 (en) 2001-05-16 2006-02-21 Ben-Zion Inditsky Ultra-thin backlight
US6583876B2 (en) 2001-05-24 2003-06-24 Therma-Wave, Inc. Apparatus for optical measurements of nitrogen concentration in thin films
JP2002350840A (en) 2001-05-28 2002-12-04 Hitachi Ltd Reflective liquid crystal display device
EP1397610B1 (en) 2001-06-01 2007-12-12 Philips Lumileds Lighting Company LLC Compact illumination system and display device
JP2002357717A (en) 2001-06-01 2002-12-13 Dainippon Printing Co Ltd Wavelength selecting element and optical display device provided with the same
KR100865625B1 (en) 2001-06-01 2008-10-27 다이셀 가가꾸 고교 가부시끼가이샤 Light Diffusion Film, Surface Illuminant Device and Liquid Crystal Display Device
JP2002365438A (en) 2001-06-05 2002-12-18 Mark:Kk Linear light guiding body, display device and electronic apparatus using the same, production method for linear light guiding body
US7068948B2 (en) 2001-06-13 2006-06-27 Gazillion Bits, Inc. Generation of optical signals with return-to-zero format
US6961045B2 (en) 2001-06-16 2005-11-01 Che-Chih Tsao Pattern projection techniques for volumetric 3D displays and 2D displays
GB0114862D0 (en) 2001-06-19 2001-08-08 Secr Defence Image replication system
JP4493884B2 (en) 2001-06-25 2010-06-30 五洋紙工株式会社 Laminated light guide plate
JP2003007114A (en) 2001-06-26 2003-01-10 Sharp Corp Front light and reflection type display device using the same
US20030001985A1 (en) 2001-06-28 2003-01-02 Steve Doe Electronic display
JP4526223B2 (en) * 2001-06-29 2010-08-18 シャープ株式会社 Wiring member, solar cell module and manufacturing method thereof
WO2003004931A2 (en) 2001-06-30 2003-01-16 Samsung Electro-Mechanics Co., Ltd. Backlight using planar hologram for flat display device
US6903788B2 (en) 2001-07-05 2005-06-07 Nitto Denko Corporation Optical film and a liquid crystal display using the same
JP3760810B2 (en) 2001-07-06 2006-03-29 ソニー株式会社 Light modulation element, GLV device, and laser display
JP2003021821A (en) 2001-07-09 2003-01-24 Toshiba Corp Liquid crystal unit and its driving method
KR100799156B1 (en) 2001-07-13 2008-01-29 삼성전자주식회사 Light guided panel and method for fabricating thereof and liquid crystal display device using the same
JP3959678B2 (en) 2001-07-13 2007-08-15 ミネベア株式会社 Touch panel for display device
US6478432B1 (en) 2001-07-13 2002-11-12 Chad D. Dyner Dynamically generated interactive real imaging device
JP2003031017A (en) 2001-07-13 2003-01-31 Minebea Co Ltd Planar lighting device
US6594059B2 (en) * 2001-07-16 2003-07-15 Axsun Technologies, Inc. Tilt mirror fabry-perot filter system, fabrication process therefor, and method of operation thereof
JP3909812B2 (en) 2001-07-19 2007-04-25 富士フイルム株式会社 Display element and exposure element
US7263268B2 (en) * 2001-07-23 2007-08-28 Ben-Zion Inditsky Ultra thin radiation management and distribution systems with hybrid optical waveguide
TWI225916B (en) 2001-07-27 2005-01-01 Nissen Kagaku Kk Planar lighting device
JP4213897B2 (en) 2001-08-07 2009-01-21 株式会社日立製作所 Method of manufacturing transfer pattern of microlens array
JP2003057652A (en) 2001-08-20 2003-02-26 Japan Science & Technology Corp Picture display device, illuminator
JP2003057653A (en) 2001-08-21 2003-02-26 Citizen Watch Co Ltd Liquid crystal display device
JP2003066236A (en) 2001-08-27 2003-03-05 Nitto Denko Corp Light transmission plate, polarization surface light source device and reflective liquid crystal display device
JP2003066451A (en) 2001-08-30 2003-03-05 Matsushita Electric Ind Co Ltd Liquid crystal display
JP4671562B2 (en) 2001-08-31 2011-04-20 富士通株式会社 Illumination device and liquid crystal display device
KR100432490B1 (en) 2001-09-17 2004-05-22 (주)니트 젠 Optical fingerprint acquisition apparatus
TW574586B (en) 2001-09-19 2004-02-01 Optrex Kk Liquid crystal display element
WO2003028059A1 (en) 2001-09-21 2003-04-03 Hrl Laboratories, Llc Mems switches and methods of making same
JP3928395B2 (en) 2001-09-21 2007-06-13 オムロン株式会社 Surface light source device
JP2005504413A (en) 2001-09-26 2005-02-10 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Waveguide, edge illumination illumination device and display device having such a waveguide or device
JP4050119B2 (en) 2001-10-02 2008-02-20 シャープ株式会社 Liquid crystal display
KR20030029769A (en) 2001-10-10 2003-04-16 엘지.필립스 엘시디 주식회사 A liquid crystal display device having a light blocking metal layer
NZ514500A (en) 2001-10-11 2004-06-25 Deep Video Imaging Ltd A multiplane visual display unit with a transparent emissive layer disposed between two display planes
EP1440555A1 (en) 2001-10-16 2004-07-28 Koninklijke Philips Electronics N.V. Electronic apparatus having a removable front-face element
JP4001736B2 (en) 2001-10-23 2007-10-31 アルプス電気株式会社 Surface light emitting device and liquid crystal display device
JP2003202568A (en) 2001-10-24 2003-07-18 Sharp Corp Light guide, its manufacturing method, surface-like light source, and display device
JP2003131215A (en) 2001-10-29 2003-05-08 Optrex Corp Reflection type display device
US6870581B2 (en) 2001-10-30 2005-03-22 Sharp Laboratories Of America, Inc. Single panel color video projection display using reflective banded color falling-raster illumination
US6636285B2 (en) 2001-11-01 2003-10-21 Motorola, Inc. Reflective liquid crystal display with improved contrast
JP2003140118A (en) 2001-11-02 2003-05-14 Nec Access Technica Ltd Liquid crystal display device
JP2006502421A (en) 2001-11-06 2006-01-19 キーオティ Image projection device
CN1602451A (en) * 2001-11-07 2005-03-30 应用材料有限公司 Maskless photon-electron spot-grid array printer
KR100827962B1 (en) 2001-11-08 2008-05-08 엘지디스플레이 주식회사 liquid crystal display devices and manufacturing method of the same
JP3828402B2 (en) 2001-11-08 2006-10-04 株式会社日立製作所 BACKLIGHTING DEVICE, LIQUID CRYSTAL DISPLAY DEVICE USING SAME, AND LIGHTING METHOD FOR LIQUID CRYSTAL DISPLAY DEVICE
KR100774256B1 (en) * 2001-11-08 2007-11-08 엘지.필립스 엘시디 주식회사 liquid crystal display devices
JP2003147351A (en) 2001-11-09 2003-05-21 Taiwan Lite On Electronics Inc Manufacturing method of white light source
US7128459B2 (en) 2001-11-12 2006-10-31 Nidec Copal Corporation Light-guide plate and method for manufacturing the same
JP2003149642A (en) 2001-11-13 2003-05-21 Matsushita Electric Works Ltd Front light for liquid crystal
JP2003151331A (en) 2001-11-15 2003-05-23 Minebea Co Ltd Sheet lighting system
JP2003149643A (en) 2001-11-16 2003-05-21 Goyo Paper Working Co Ltd Front light for liquid crystal display
KR100440405B1 (en) 2001-11-19 2004-07-14 삼성전자주식회사 Device for controlling output of video data using double buffering
US20030095401A1 (en) 2001-11-20 2003-05-22 Palm, Inc. Non-visible light display illumination system and method
US6802614B2 (en) 2001-11-28 2004-10-12 Robert C. Haldiman System, method and apparatus for ambient video projection
JP3801032B2 (en) 2001-11-29 2006-07-26 日本電気株式会社 Light source and liquid crystal display device using the light source
JP2003167500A (en) 2001-11-30 2003-06-13 Art Nau:Kk Method for making hologram
JP2003167132A (en) 2001-11-30 2003-06-13 Toyota Industries Corp Wedge-shaped light guide plate for front light
JP2003173713A (en) 2001-12-04 2003-06-20 Rohm Co Ltd Illumination device and liquid crystal display device
US7253853B2 (en) 2001-12-04 2007-08-07 Rohm Co., Ltd. Liquid crystal display and lighting unit having parabolic surface
JP2003177336A (en) 2001-12-11 2003-06-27 Fuji Photo Film Co Ltd Optical modulating element, optical modulating element array, and exposure device using the same
US7872394B1 (en) 2001-12-13 2011-01-18 Joseph E Ford MEMS device with two axes comb drive actuators
JP2003186008A (en) 2001-12-14 2003-07-03 Dainippon Printing Co Ltd Sheet for front light and display device using the same
JP3683212B2 (en) 2001-12-14 2005-08-17 Necアクセステクニカ株式会社 Mobile phone
JP2006504116A (en) 2001-12-14 2006-02-02 ディジタル・オプティクス・インターナショナル・コーポレイション Uniform lighting system
EP1554623A2 (en) 2001-12-19 2005-07-20 Actuality Systems, Inc. A radiation conditioning system
US7515336B2 (en) 2001-12-21 2009-04-07 Bose Corporation Selective reflecting
JP3893421B2 (en) 2001-12-27 2007-03-14 富士フイルム株式会社 Light modulation element, light modulation element array, and exposure apparatus using the same
US6998196B2 (en) * 2001-12-28 2006-02-14 Wavefront Technology Diffractive optical element and method of manufacture
US6577429B1 (en) 2002-01-15 2003-06-10 Eastman Kodak Company Laser projection display system
US20030136759A1 (en) 2002-01-18 2003-07-24 Cabot Microelectronics Corp. Microlens array fabrication using CMP
DE60229166D1 (en) 2002-01-25 2008-11-13 Tpo Hong Kong Holding Ltd DISPLAY DEVICE
JP4039551B2 (en) 2002-01-29 2008-01-30 シチズン電子株式会社 Phosphor chromaticity correction plate
KR100944680B1 (en) 2002-02-04 2010-02-26 니치유 가부시키가이샤 Pen-input device surface member, and pen-input device
JP4162900B2 (en) 2002-02-05 2008-10-08 アルプス電気株式会社 Illumination device and liquid crystal display device
US7203002B2 (en) * 2002-02-12 2007-04-10 Nitto Denko Corporation Polarizer, polarizing plate, liquid crystal display, and image display, and a method for producing the polarizer
US6794119B2 (en) 2002-02-12 2004-09-21 Iridigm Display Corporation Method for fabricating a structure for a microelectromechanical systems (MEMS) device
JP2003248181A (en) * 2002-02-25 2003-09-05 Ricoh Co Ltd Reflective spatial light modulator
US7125121B2 (en) 2002-02-25 2006-10-24 Ricoh Company, Ltd. Image display apparatus
JP2003322824A (en) * 2002-02-26 2003-11-14 Namco Ltd Stereoscopic video display device and electronic apparatus
US6574033B1 (en) 2002-02-27 2003-06-03 Iridigm Display Corporation Microelectromechanical systems device and method for fabricating same
JP2003255338A (en) 2002-02-28 2003-09-10 Mitsubishi Electric Corp Liquid crystal display
WO2003075207A2 (en) 2002-03-01 2003-09-12 Planar Systems, Inc. Reflection resistant touch screens
US7283112B2 (en) 2002-03-01 2007-10-16 Microsoft Corporation Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system
WO2003075051A1 (en) 2002-03-05 2003-09-12 Koninklijke Philips Electronics N.V. Illumination system combining diffuse homogeneous lighting with direct spot illumination
JP2003255344A (en) 2002-03-05 2003-09-10 Citizen Electronics Co Ltd Front light for color liquid crystal display
JP3773865B2 (en) 2002-03-06 2006-05-10 三洋電機株式会社 Light guide plate and display device
US20050206802A1 (en) 2002-03-08 2005-09-22 Creemers Tijsbert M H Display device comprising a light guide
CN101261339A (en) 2002-03-14 2008-09-10 日本电气株式会社 Optical modulating/display device, production method therefor and display apparatus equipped with the optical modulating/displaying device
US7145143B2 (en) 2002-03-18 2006-12-05 Honeywell International Inc. Tunable sensor
EP1489440A4 (en) * 2002-03-18 2007-02-07 Nikon Corp Diffraction optical element and method for manufacturing the same, and optical device
US6768555B2 (en) 2002-03-21 2004-07-27 Industrial Technology Research Institute Fabry-Perot filter apparatus with enhanced optical discrimination
US6965468B2 (en) * 2003-07-03 2005-11-15 Reflectivity, Inc Micromirror array having reduced gap between adjacent micromirrors of the micromirror array
US7428367B2 (en) 2002-10-17 2008-09-23 Brilliant Film Llc Light control devices and methods of making same
JP2003295183A (en) 2002-03-29 2003-10-15 Citizen Watch Co Ltd Plane illuminator of liquid crystal display device
TW554211B (en) 2002-04-10 2003-09-21 Au Optronics Corp Light guiding plate of controlling light emission angle and its liquid crystal display apparatus
KR20030081662A (en) 2002-04-12 2003-10-22 삼성에스디아이 주식회사 Solar cell with double layer antireflection coating
JP2003315560A (en) 2002-04-23 2003-11-06 Yuka Denshi Co Ltd Light transmission body, surface light source device using the same, and liquid crystal display device
JP2003315694A (en) 2002-04-25 2003-11-06 Fuji Photo Film Co Ltd Image display element and image display device using the same
GB2388236A (en) 2002-05-01 2003-11-05 Cambridge Display Tech Ltd Display and driver circuits
US6717650B2 (en) 2002-05-01 2004-04-06 Anvik Corporation Maskless lithography with sub-pixel resolution
CN1688917A (en) 2002-05-06 2005-10-26 中佛罗里达大学 Single cell gap transflective liquid crystal display with slanted reflector above transmissive pixels
JP2003322852A (en) 2002-05-07 2003-11-14 Nitto Denko Corp Reflective liquid crystal display and optical film
DE10221301B4 (en) 2002-05-14 2004-07-29 Junghans Uhren Gmbh Device with solar cell arrangement and liquid crystal display
KR100433229B1 (en) 2002-05-17 2004-05-28 엘지.필립스 엘시디 주식회사 Liquid Crystal Display and Method of Fabricating the same
US6689949B2 (en) 2002-05-17 2004-02-10 United Innovations, Inc. Concentrating photovoltaic cavity converters for extreme solar-to-electric conversion efficiencies
JP4123415B2 (en) 2002-05-20 2008-07-23 ソニー株式会社 Solid-state imaging device
US6862141B2 (en) 2002-05-20 2005-03-01 General Electric Company Optical substrate and method of making
US7180672B2 (en) 2002-05-20 2007-02-20 General Electric Company Optical substrate and method of making
JP2003344881A (en) 2002-05-22 2003-12-03 Alps Electric Co Ltd Electrophoretic display device
US7010212B2 (en) 2002-05-28 2006-03-07 3M Innovative Properties Company Multifunctional optical assembly
JP4170677B2 (en) 2002-06-07 2008-10-22 大日本印刷株式会社 Light source device and display
JP4048844B2 (en) * 2002-06-17 2008-02-20 カシオ計算機株式会社 Surface light source and display device using the same
GB2389960A (en) 2002-06-20 2003-12-24 Suisse Electronique Microtech Four-tap demodulation pixel
US6829258B1 (en) 2002-06-26 2004-12-07 Silicon Light Machines, Inc. Rapidly tunable external cavity laser
DE10228946B4 (en) 2002-06-28 2004-08-26 Universität Bremen Optical modulator, display, use of an optical modulator and method for producing an optical modulator
JP3977169B2 (en) 2002-07-01 2007-09-19 松下電器産業株式会社 Mobile terminal device
US6741377B2 (en) * 2002-07-02 2004-05-25 Iridigm Display Corporation Device having a light-absorbing mask and a method for fabricating same
US7019734B2 (en) 2002-07-17 2006-03-28 3M Innovative Properties Company Resistive touch sensor having microstructured conductive layer
US6738194B1 (en) 2002-07-22 2004-05-18 The United States Of America As Represented By The Secretary Of The Navy Resonance tunable optical filter
KR100828531B1 (en) 2002-07-26 2008-05-13 삼성전자주식회사 Liquid crystal display
US7019876B2 (en) * 2002-07-29 2006-03-28 Hewlett-Packard Development Company, L.P. Micro-mirror with rotor structure
JP2004062099A (en) 2002-07-31 2004-02-26 Dainippon Printing Co Ltd Visibility improving sheet, display using the same and a transmission type projection screen
TWI343376B (en) 2002-07-31 2011-06-11 Du Pont Method for preparing 3-halo-4, 5-dihydro-1h-pyrazoles
WO2004015489A1 (en) 2002-08-07 2004-02-19 Koninklijke Philips Electronics N.V. Display device with light guiding substrate
TWI266106B (en) * 2002-08-09 2006-11-11 Sanyo Electric Co Display device with a plurality of display panels
JP4126210B2 (en) 2002-08-09 2008-07-30 株式会社日立製作所 Liquid crystal display
US7151532B2 (en) * 2002-08-09 2006-12-19 3M Innovative Properties Company Multifunctional multilayer optical film
JP2004078613A (en) * 2002-08-19 2004-03-11 Fujitsu Ltd Touch panel system
KR100850589B1 (en) 2002-08-19 2008-08-05 비오이 하이디스 테크놀로지 주식회사 Fringe field switching mode liquid crystal display device
JP4141766B2 (en) 2002-08-23 2008-08-27 富士通株式会社 Illumination device and liquid crystal display device
JP4076214B2 (en) 2002-08-29 2008-04-16 シチズン電子株式会社 Double-sided lighting unit
WO2004025174A1 (en) 2002-08-30 2004-03-25 Hitachi Chemical Co., Ltd. Light guide plate and backlight device
JP2004095390A (en) 2002-08-30 2004-03-25 Fujitsu Display Technologies Corp Lighting device and display device
US7106509B2 (en) 2002-09-06 2006-09-12 Colorlink, Inc. Filter for enhancing vision and/or protecting the eyes and method of making a filter
JP4057871B2 (en) 2002-09-19 2008-03-05 東芝松下ディスプレイテクノロジー株式会社 Liquid crystal display
JP4440523B2 (en) 2002-09-19 2010-03-24 大日本印刷株式会社 Organic EL display device by inkjet method, color filter manufacturing method, manufacturing device
CN1701262A (en) 2002-09-20 2005-11-23 霍尼韦尔国际公司 High efficiency viewing screen
JP2004133430A (en) 2002-09-20 2004-04-30 Sony Corp Display element, display device, and micro lens array
JP2004126196A (en) 2002-10-02 2004-04-22 Toshiba Corp Liquid crystal display device
US7406245B2 (en) 2004-07-27 2008-07-29 Lumitex, Inc. Flat optical fiber light emitters
KR100883096B1 (en) 2002-10-05 2009-02-11 삼성전자주식회사 Optical member and method for fabricating the same and liquid crystal display device using the same
TW573170B (en) 2002-10-11 2004-01-21 Toppoly Optoelectronics Corp Dual-sided display liquid crystal panel
TW557363B (en) 2002-10-15 2003-10-11 Optimax Tech Corp Anti-glare film
JP4130115B2 (en) 2002-10-16 2008-08-06 アルプス電気株式会社 Illumination device and liquid crystal display device
US6747785B2 (en) 2002-10-24 2004-06-08 Hewlett-Packard Development Company, L.P. MEMS-actuated color light modulator and methods
JP4077297B2 (en) 2002-10-25 2008-04-16 アルプス電気株式会社 Display device and portable information terminal device
US7370185B2 (en) 2003-04-30 2008-05-06 Hewlett-Packard Development Company, L.P. Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
TW200413776A (en) 2002-11-05 2004-08-01 Matsushita Electric Ind Co Ltd Display element and display using the same
CN1736111B (en) 2002-11-07 2010-10-06 索尼德国有限责任公司 Illumination arrangement for a projection system
TW547670U (en) 2002-11-08 2003-08-11 Hon Hai Prec Ind Co Ltd Backlight system and its light guide plate
US7063449B2 (en) 2002-11-21 2006-06-20 Element Labs, Inc. Light emitting diode (LED) picture element
TWI252938B (en) 2002-11-22 2006-04-11 Hon Hai Prec Ind Co Ltd Light guide plate and backlight system using the same
US6844959B2 (en) * 2002-11-26 2005-01-18 Reflectivity, Inc Spatial light modulators with light absorbing areas
JP4140499B2 (en) * 2002-11-29 2008-08-27 カシオ計算機株式会社 Communication terminal and program
US6811274B2 (en) 2002-12-04 2004-11-02 General Electric Company Polarization sensitive optical substrate
EP1575452A2 (en) 2002-12-09 2005-09-21 Oree, Advanced Illumination Solutions Inc. Flexible optical device
JP2004199006A (en) 2002-12-20 2004-07-15 Koninkl Philips Electronics Nv Light converging substrate, display device using the same and its manufacturing method
TWI289708B (en) 2002-12-25 2007-11-11 Qualcomm Mems Technologies Inc Optical interference type color display
JP3983166B2 (en) 2002-12-26 2007-09-26 日東電工株式会社 Optical element, polarization plane light source using the same, and display device using the same
JP2004212673A (en) 2002-12-27 2004-07-29 Fuji Photo Film Co Ltd Planar display device and its driving method
TW594155B (en) 2002-12-27 2004-06-21 Prime View Int Corp Ltd Optical interference type color display and optical interference modulator
KR100624408B1 (en) 2003-01-07 2006-09-18 삼성전자주식회사 Backlight unit
KR100506088B1 (en) 2003-01-14 2005-08-03 삼성전자주식회사 Liquid crystal displaying apparatus
KR20050086953A (en) 2003-01-15 2005-08-30 마이크로닉 레이저 시스템즈 에이비 A method to detect a defective pixel
JP2004219843A (en) 2003-01-16 2004-08-05 Seiko Epson Corp Optical modulator, and display device and their manufacturing methods
US6930816B2 (en) 2003-01-17 2005-08-16 Fuji Photo Film Co., Ltd. Spatial light modulator, spatial light modulator array, image forming device and flat panel display
US7042444B2 (en) 2003-01-17 2006-05-09 Eastman Kodak Company OLED display and touch screen
US6871982B2 (en) 2003-01-24 2005-03-29 Digital Optics International Corporation High-density illumination system
JP2006519410A (en) 2003-01-28 2006-08-24 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Optimal subpixel array for displays with more than 4 primary colors
TW200413810A (en) * 2003-01-29 2004-08-01 Prime View Int Co Ltd Light interference display panel and its manufacturing method
TW557395B (en) * 2003-01-29 2003-10-11 Yen Sun Technology Corp Optical interference type reflection panel and the manufacturing method thereof
TW577549U (en) 2003-01-30 2004-02-21 Toppoly Optoelectronics Corp Back light module for flat display device
KR100519238B1 (en) 2003-02-04 2005-10-07 화우테크놀러지 주식회사 A Light Guide Panel With Guided-light Parts
KR100720426B1 (en) 2003-02-18 2007-05-22 엘지.필립스 엘시디 주식회사 back light unit
JP2004253199A (en) 2003-02-19 2004-09-09 Toyota Industries Corp Planar luminescent device, its manufacturing method, and liquid crystal display device
CN101441292A (en) 2003-02-28 2009-05-27 夏普株式会社 Surface radiating conversion element, an LCD and a method for fabricating the surface radiating conversion element
TW200417806A (en) 2003-03-05 2004-09-16 Prime View Int Corp Ltd A structure of a light-incidence electrode of an optical interference display plate
CN2624220Y (en) 2003-03-08 2004-07-07 鸿富锦精密工业(深圳)有限公司 Light conducting plate, light-emitting module, light conducting module, and LCD
US6844953B2 (en) 2003-03-12 2005-01-18 Hewlett-Packard Development Company, L.P. Micro-mirror device including dielectrophoretic liquid
US7064875B2 (en) 2003-03-24 2006-06-20 Fuji Xerox Co., Ltd. Optical recording apparatus and optical recording/reproducing apparatus
US20040188150A1 (en) 2003-03-25 2004-09-30 3M Innovative Properties Company High transparency touch screen
JP4294992B2 (en) 2003-03-31 2009-07-15 シャープ株式会社 Reflective liquid crystal display
DE10314525A1 (en) 2003-03-31 2004-11-04 Osram Opto Semiconductors Gmbh Method of manufacturing a lighting device and lighting device
US20050120553A1 (en) 2003-12-08 2005-06-09 Brown Dirk D. Method for forming MEMS grid array connector
US7382360B2 (en) 2003-04-15 2008-06-03 Synaptics Incorporated Methods and systems for changing the appearance of a position sensor with a light effect
KR100506092B1 (en) 2003-04-16 2005-08-04 삼성전자주식회사 Light guide panel of edge light type backlight apparatus and edge light type backlight apparatus using the same
KR20040090667A (en) 2003-04-18 2004-10-26 삼성전기주식회사 light unit for displaying
JP3918765B2 (en) 2003-04-21 2007-05-23 セイコーエプソン株式会社 Liquid crystal display device and electronic device
TW567355B (en) * 2003-04-21 2003-12-21 Prime View Int Co Ltd An interference display cell and fabrication method thereof
TWI226504B (en) 2003-04-21 2005-01-11 Prime View Int Co Ltd A structure of an interference display cell
US7072093B2 (en) 2003-04-30 2006-07-04 Hewlett-Packard Development Company, L.P. Optical interference pixel display with charge control
JP3829819B2 (en) 2003-05-08 2006-10-04 ソニー株式会社 Holographic stereogram creation device
JP2004361914A (en) 2003-05-15 2004-12-24 Omron Corp Front light, reflective display device, and light control method in front light
AU2003304127A1 (en) 2003-05-19 2004-12-03 Itzhak Baruch Optical coordinate input device comprising few elements
US7196849B2 (en) 2003-05-22 2007-03-27 Optical Research Associates Apparatus and methods for illuminating optical systems
CN100380148C (en) 2003-05-22 2008-04-09 日立化成工业株式会社 Optical film and surface light source using it
WO2004106983A2 (en) 2003-05-22 2004-12-09 Optical Research Associates Illumination in optical systems
US6811267B1 (en) 2003-06-09 2004-11-02 Hewlett-Packard Development Company, L.P. Display system with nonvisible data projection
JP3773055B2 (en) 2003-06-13 2006-05-10 ソニー株式会社 Recording medium management method and apparatus
JP4222117B2 (en) 2003-06-17 2009-02-12 セイコーエプソン株式会社 Color filter array and manufacturing method thereof, display device, and projection display device
US7268840B2 (en) 2003-06-18 2007-09-11 Citizen Holdings Co., Ltd. Display device employing light control member and display device manufacturing method
US20050024890A1 (en) * 2003-06-19 2005-02-03 Alps Electric Co., Ltd. Light guide plate, surface light-emitting unit, and liquid crystal display device and method for manufacturing the same
US6822780B1 (en) 2003-06-23 2004-11-23 Northrop Grumman Corporation Vertically stacked spatial light modulator with multi-bit phase resolution
JP2007027150A (en) 2003-06-23 2007-02-01 Hitachi Chem Co Ltd Concentrating photovoltaic power generation system
US6917469B2 (en) 2003-06-27 2005-07-12 Japan Acryace Co., Ltd. Light diffusing laminated plate
DE10329917B4 (en) 2003-07-02 2005-12-22 Schott Ag Coated cover glass for photovoltaic modules
KR200329769Y1 (en) 2003-07-02 2003-10-17 주식회사 동방수기 Rake teeth and support angle with guide plate of carrier chain for rotary type rake
US6980347B2 (en) 2003-07-03 2005-12-27 Reflectivity, Inc Micromirror having reduced space between hinge and mirror plate of the micromirror
AU2004258513B2 (en) 2003-07-03 2009-12-24 Holotouch, Inc. Holographic human-machine interfaces
US7112885B2 (en) 2003-07-07 2006-09-26 Board Of Regents, The University Of Texas System System, method and apparatus for improved electrical-to-optical transmitters disposed within printed circuit boards
JP2005031219A (en) 2003-07-09 2005-02-03 Toppoly Optoelectronics Corp Double-sided liquid crystal display
US20070201234A1 (en) 2003-07-21 2007-08-30 Clemens Ottermann Luminous element
US7190380B2 (en) * 2003-09-26 2007-03-13 Hewlett-Packard Development Company, L.P. Generating and displaying spatially offset sub-frames
DE10336352B4 (en) * 2003-08-08 2007-02-08 Schott Ag Method for producing scattered light structures on flat light guides
JPWO2005017407A1 (en) 2003-08-13 2006-10-12 富士通株式会社 Illumination device and liquid crystal display device
TW200506479A (en) * 2003-08-15 2005-02-16 Prime View Int Co Ltd Color changeable pixel for an interference display
TWI305599B (en) * 2003-08-15 2009-01-21 Qualcomm Mems Technologies Inc Interference display panel and method thereof
TWI251712B (en) * 2003-08-15 2006-03-21 Prime View Int Corp Ltd Interference display plate
TW593127B (en) * 2003-08-18 2004-06-21 Prime View Int Co Ltd Interference display plate and manufacturing method thereof
US6880959B2 (en) 2003-08-25 2005-04-19 Timothy K. Houston Vehicle illumination guide
US20050057442A1 (en) * 2003-08-28 2005-03-17 Olan Way Adjacent display of sequential sub-images
US7025461B2 (en) 2003-08-28 2006-04-11 Brookhaven Science Associates Interactive display system having a digital micromirror imaging device
JP3979982B2 (en) 2003-08-29 2007-09-19 シャープ株式会社 Interferometric modulator and display device
WO2005022212A1 (en) 2003-09-01 2005-03-10 Dai Nippon Printing Co., Ltd. Antireflection film for plasma display
JP2005084331A (en) 2003-09-08 2005-03-31 Fuji Photo Film Co Ltd Display device, image display apparatus, and display method
JP2004086221A (en) 2003-09-12 2004-03-18 Sharp Corp Front light and display device
US20060279558A1 (en) 2003-09-22 2006-12-14 Koninklike Phillips Electronics N.V. Touc input screen using a light guide
US6982820B2 (en) * 2003-09-26 2006-01-03 Prime View International Co., Ltd. Color changeable pixel
GB0322682D0 (en) 2003-09-27 2003-10-29 Koninkl Philips Electronics Nv Backlight for 3D display device
GB0322681D0 (en) 2003-09-27 2003-10-29 Koninkl Philips Electronics Nv Multi-view display
JP2005135899A (en) 2003-10-06 2005-05-26 Omron Corp Surface light source apparatus and display apparatus
JP4577210B2 (en) 2003-10-06 2010-11-10 オムロン株式会社 Surface light source device and display device
US20050073507A1 (en) 2003-10-06 2005-04-07 Richter Paul J. Touch input sensing device
US7303645B2 (en) 2003-10-24 2007-12-04 Miradia Inc. Method and system for hermetically sealing packages for optics
US7218812B2 (en) 2003-10-27 2007-05-15 Rpo Pty Limited Planar waveguide with patterned cladding and method for producing the same
EP1538514B1 (en) 2003-12-01 2008-07-30 Asulab S.A. Transparent substrate with invisible electrodes and devices incorporating the same
TW200524236A (en) 2003-12-01 2005-07-16 Nl Nanosemiconductor Gmbh Optoelectronic device incorporating an interference filter
US7142346B2 (en) 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7161728B2 (en) * 2003-12-09 2007-01-09 Idc, Llc Area array modulation and lead reduction in interferometric modulators
US7456805B2 (en) 2003-12-18 2008-11-25 3M Innovative Properties Company Display including a solid state light device and method using same
EP1544657B1 (en) 2003-12-19 2012-04-04 Barco N.V. Broadband full white reflective display structure
US6972827B2 (en) 2003-12-19 2005-12-06 Eastman Kodak Company Transflective film and display
JP4079143B2 (en) 2003-12-22 2008-04-23 セイコーエプソン株式会社 LIGHTING DEVICE, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC DEVICE
CA2490603C (en) 2003-12-24 2012-12-11 National Research Council Of Canada Optical off-chip interconnects in multichannel planar waveguide devices
TWI388876B (en) 2003-12-26 2013-03-11 Fujifilm Corp Antireflection film, polarizing plate, method for producing them, liquid crystal display element, liquid crystal display device, and image display device
US20050271325A1 (en) 2004-01-22 2005-12-08 Anderson Michael H Liquid crystal waveguide having refractive shapes for dynamically controlling light
US6964484B2 (en) 2004-02-02 2005-11-15 Hewlett-Packard Development Company, L.P. Overfill reduction for an optical modulator
US7342705B2 (en) 2004-02-03 2008-03-11 Idc, Llc Spatial light modulator with integrated optical compensation structure
US20060110090A1 (en) 2004-02-12 2006-05-25 Panorama Flat Ltd. Apparatus, method, and computer program product for substrated/componentized waveguided goggle system
WO2005088367A1 (en) 2004-02-13 2005-09-22 Nokia Corporation Method of manufacturing a light guide
CN100434988C (en) 2004-02-16 2008-11-19 西铁城电子股份有限公司 Light guide plate
JP4386749B2 (en) 2004-02-16 2009-12-16 シチズン電子株式会社 Planar light source
JP2005235759A (en) 2004-02-17 2005-09-02 Seiko Instruments Inc Illuminator and display using the same
TWI256941B (en) 2004-02-18 2006-06-21 Qualcomm Mems Technologies Inc A micro electro mechanical system display cell and method for fabricating thereof
US20050195370A1 (en) 2004-03-02 2005-09-08 Gore Makarand P. Transmissive/reflective light engine
US7439965B2 (en) 2004-03-05 2008-10-21 Anderson Daryl E Method for driving display device
TW200530669A (en) 2004-03-05 2005-09-16 Prime View Int Co Ltd Interference display plate and manufacturing method thereof
US7706050B2 (en) 2004-03-05 2010-04-27 Qualcomm Mems Technologies, Inc. Integrated modulator illumination
US7855824B2 (en) 2004-03-06 2010-12-21 Qualcomm Mems Technologies, Inc. Method and system for color optimization in a display
JP4452528B2 (en) 2004-03-09 2010-04-21 日本Cmo株式会社 Planar light generator, image display device
US20050207016A1 (en) 2004-03-15 2005-09-22 Fuji Photo Film Co., Ltd. Antireflection film, polarizing plate and liquid crystal display
JP4195936B2 (en) 2004-03-17 2008-12-17 独立行政法人産業技術総合研究所 Reflective dimmer with a diffusive reflective surface
WO2005096045A2 (en) 2004-03-23 2005-10-13 E.I. Dupont De Nemours And Company Light guide and apparatus for using light guide
TWI293706B (en) 2004-03-24 2008-02-21 Au Optronics Corp Backlight module
WO2005098311A2 (en) 2004-03-31 2005-10-20 Schexnaider Craig J Light panel illuminated by light emitting diodes
US20050224694A1 (en) 2004-04-08 2005-10-13 Taiwan Semiconductor Manufacturing Co. Ltd. High efficiency microlens array
JP2005308871A (en) 2004-04-19 2005-11-04 Aterio Design Kk Interference color filter
JP4539160B2 (en) 2004-04-28 2010-09-08 日立化成工業株式会社 Optical element, optical element manufacturing method, and surface light source device
US7565054B2 (en) 2004-04-30 2009-07-21 Oy Modilis Ltd. Ultra thin lighting element
US7602369B2 (en) 2004-05-04 2009-10-13 Sharp Laboratories Of America, Inc. Liquid crystal display with colored backlight
EP1748305A4 (en) 2004-05-17 2009-01-14 Nikon Corp Optical element, combiner optical system, and image display unit
US6970031B1 (en) 2004-05-28 2005-11-29 Hewlett-Packard Development Company, L.P. Method and apparatus for reducing charge injection in control of MEMS electrostatic actuator array
JP4020397B2 (en) 2004-06-14 2007-12-12 惠次 飯村 Surface light source using point light source
KR101148791B1 (en) 2004-06-30 2012-05-24 엘지디스플레이 주식회사 Tiled display device
US7412119B2 (en) 2004-06-30 2008-08-12 Poa Sana Liquidating Trust Apparatus and method for making flexible waveguide substrates for use with light based touch screens
US7213958B2 (en) * 2004-06-30 2007-05-08 3M Innovative Properties Company Phosphor based illumination system having light guide and an interference reflector
KR100606549B1 (en) 2004-07-01 2006-08-01 엘지전자 주식회사 Light guide plate of surface light emitting device and method for manufacturing the same
US7256922B2 (en) * 2004-07-02 2007-08-14 Idc, Llc Interferometric modulators with thin film transistors
US7528989B2 (en) 2004-07-08 2009-05-05 Fuji Xerox Co., Ltd Image processing apparatus and image processing method
GB0415773D0 (en) 2004-07-15 2004-08-18 Koninkl Philips Electronics Nv A flexible display device
US7092163B2 (en) 2004-07-22 2006-08-15 General Electric Company Light collimating and diffusing film and system for making the film
JP2006039056A (en) 2004-07-23 2006-02-09 Hitachi Chem Co Ltd Liquid crystal display device
WO2006014929A1 (en) 2004-07-29 2006-02-09 Idc, Llc System and method for micro-electromechanical operating of an interferometric modulator
US7436389B2 (en) * 2004-07-29 2008-10-14 Eugene J Mar Method and system for controlling the output of a diffractive light device
KR20070043007A (en) 2004-08-18 2007-04-24 소니 가부시끼 가이샤 Backlight device and color liquid crystal display device
JP2006093104A (en) 2004-08-25 2006-04-06 Seiko Instruments Inc Lighting system, and display device using the same
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7499208B2 (en) 2004-08-27 2009-03-03 Udc, Llc Current mode display driver circuit realization feature
WO2006026743A1 (en) 2004-08-31 2006-03-09 Fusion Optix, Inc. Enhanced light diffusing sheet
JP4285373B2 (en) 2004-09-01 2009-06-24 セイコーエプソン株式会社 Microlens manufacturing method, microlens and microlens array, and electro-optical device and electronic apparatus
US7278775B2 (en) 2004-09-09 2007-10-09 Fusion Optix Inc. Enhanced LCD backlight
US7212345B2 (en) 2004-09-13 2007-05-01 Eastman Kodak Company Randomized patterns of individual optical elements
JP2006086075A (en) 2004-09-17 2006-03-30 Alps Electric Co Ltd Surface-emitting device, back surface-lighting system and liquid crystal display
JP4238806B2 (en) 2004-09-21 2009-03-18 セイコーエプソン株式会社 Light guide plate, lighting device, electro-optical device, and electronic device
US7355780B2 (en) 2004-09-27 2008-04-08 Idc, Llc System and method of illuminating interferometric modulators using backlighting
US7184202B2 (en) 2004-09-27 2007-02-27 Idc, Llc Method and system for packaging a MEMS device
US20060132383A1 (en) 2004-09-27 2006-06-22 Idc, Llc System and method for illuminating interferometric modulator display
US7359066B2 (en) 2004-09-27 2008-04-15 Idc, Llc Electro-optical measurement of hysteresis in interferometric modulators
US7710632B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Display device having an array of spatial light modulators with integrated color filters
US7710636B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. Systems and methods using interferometric optical modulators and diffusers
US7327510B2 (en) 2004-09-27 2008-02-05 Idc, Llc Process for modifying offset voltage characteristics of an interferometric modulator
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US7911428B2 (en) 2004-09-27 2011-03-22 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US20060077126A1 (en) 2004-09-27 2006-04-13 Manish Kothari Apparatus and method for arranging devices into an interconnected array
US7750886B2 (en) 2004-09-27 2010-07-06 Qualcomm Mems Technologies, Inc. Methods and devices for lighting displays
AU2005289445A1 (en) 2004-09-27 2006-04-06 Idc, Llc Method and device for multistate interferometric light modulation
US7561323B2 (en) 2004-09-27 2009-07-14 Idc, Llc Optical films for directing light towards active areas of displays
US20060103643A1 (en) 2004-09-27 2006-05-18 Mithran Mathew Measuring and modeling power consumption in displays
US20060176487A1 (en) 2004-09-27 2006-08-10 William Cummings Process control monitors for interferometric modulators
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7916103B2 (en) 2004-09-27 2011-03-29 Qualcomm Mems Technologies, Inc. System and method for display device with end-of-life phenomena
US7898521B2 (en) 2004-09-27 2011-03-01 Qualcomm Mems Technologies, Inc. Device and method for wavelength filtering
US7130104B2 (en) 2004-09-27 2006-10-31 Idc, Llc Methods and devices for inhibiting tilting of a mirror in an interferometric modulator
US7719500B2 (en) 2004-09-27 2010-05-18 Qualcomm Mems Technologies, Inc. Reflective display pixels arranged in non-rectangular arrays
US7679627B2 (en) 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7369294B2 (en) 2004-09-27 2008-05-06 Idc, Llc Ornamental display device
US7710629B2 (en) 2004-09-27 2010-05-04 Qualcomm Mems Technologies, Inc. System and method for display device with reinforcing substance
US7527995B2 (en) 2004-09-27 2009-05-05 Qualcomm Mems Technologies, Inc. Method of making prestructure for MEMS systems
US7317568B2 (en) 2004-09-27 2008-01-08 Idc, Llc System and method of implementation of interferometric modulators for display mirrors
US8362987B2 (en) 2004-09-27 2013-01-29 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US7417735B2 (en) 2004-09-27 2008-08-26 Idc, Llc Systems and methods for measuring color and contrast in specular reflective devices
US20060066557A1 (en) 2004-09-27 2006-03-30 Floyd Philip D Method and device for reflective display with time sequential color illumination
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US20060176241A1 (en) 2004-09-27 2006-08-10 Sampsell Jeffrey B System and method of transmitting video data
US7630123B2 (en) 2004-09-27 2009-12-08 Qualcomm Mems Technologies, Inc. Method and device for compensating for color shift as a function of angle of view
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7813026B2 (en) 2004-09-27 2010-10-12 Qualcomm Mems Technologies, Inc. System and method of reducing color shift in a display
US20060077148A1 (en) 2004-09-27 2006-04-13 Gally Brian J Method and device for manipulating color in a display
US8008736B2 (en) 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7920135B2 (en) 2004-09-27 2011-04-05 Qualcomm Mems Technologies, Inc. Method and system for driving a bi-stable display
US8102407B2 (en) 2004-09-27 2012-01-24 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US20060076631A1 (en) 2004-09-27 2006-04-13 Lauren Palmateer Method and system for providing MEMS device package with secondary seal
US7508571B2 (en) 2004-09-27 2009-03-24 Idc, Llc Optical films for controlling angular characteristics of displays
US7657242B2 (en) 2004-09-27 2010-02-02 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7535466B2 (en) 2004-09-27 2009-05-19 Idc, Llc System with server based control of client device display features
US20060066586A1 (en) 2004-09-27 2006-03-30 Gally Brian J Touchscreens for displays
US8031133B2 (en) 2004-09-27 2011-10-04 Qualcomm Mems Technologies, Inc. Method and device for manipulating color in a display
US20060076632A1 (en) 2004-09-27 2006-04-13 Lauren Palmateer System and method for display device with activated desiccant
US7807488B2 (en) 2004-09-27 2010-10-05 Qualcomm Mems Technologies, Inc. Display element having filter material diffused in a substrate of the display element
US7345805B2 (en) 2004-09-27 2008-03-18 Idc, Llc Interferometric modulator array with integrated MEMS electrical switches
US7564612B2 (en) 2004-09-27 2009-07-21 Idc, Llc Photonic MEMS and structures
US7626581B2 (en) 2004-09-27 2009-12-01 Idc, Llc Device and method for display memory using manipulation of mechanical response
US20060066596A1 (en) 2004-09-27 2006-03-30 Sampsell Jeffrey B System and method of transmitting video data
US7304784B2 (en) 2004-09-27 2007-12-04 Idc, Llc Reflective display device having viewable display on both sides
US7928928B2 (en) 2004-09-27 2011-04-19 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing perceived color shift
US7289256B2 (en) 2004-09-27 2007-10-30 Idc, Llc Electrical characterization of interferometric modulators
US7405861B2 (en) 2004-09-27 2008-07-29 Idc, Llc Method and device for protecting interferometric modulators from electrostatic discharge
US7551246B2 (en) 2004-09-27 2009-06-23 Idc, Llc. System and method for display device with integrated desiccant
US7545550B2 (en) 2004-09-27 2009-06-09 Idc, Llc Systems and methods of actuating MEMS display elements
US7417783B2 (en) 2004-09-27 2008-08-26 Idc, Llc Mirror and mirror layer for optical modulator and method
US7369296B2 (en) 2004-09-27 2008-05-06 Idc, Llc Device and method for modifying actuation voltage thresholds of a deformable membrane in an interferometric modulator
US7349141B2 (en) 2004-09-27 2008-03-25 Idc, Llc Method and post structures for interferometric modulation
US7684104B2 (en) 2004-09-27 2010-03-23 Idc, Llc MEMS using filler material and method
US7161730B2 (en) * 2004-09-27 2007-01-09 Idc, Llc System and method for providing thermal compensation for an interferometric modulator display
US7446927B2 (en) 2004-09-27 2008-11-04 Idc, Llc MEMS switch with set and latch electrodes
US7586484B2 (en) 2004-09-27 2009-09-08 Idc, Llc Controller and driver features for bi-stable display
US7492502B2 (en) 2004-09-27 2009-02-17 Idc, Llc Method of fabricating a free-standing microstructure
US7653371B2 (en) 2004-09-27 2010-01-26 Qualcomm Mems Technologies, Inc. Selectable capacitance circuit
US7310179B2 (en) 2004-09-27 2007-12-18 Idc, Llc Method and device for selective adjustment of hysteresis window
US7029944B1 (en) 2004-09-30 2006-04-18 Sharp Laboratories Of America, Inc. Methods of forming a microlens array over a substrate employing a CMP stop
TWI254821B (en) 2004-10-01 2006-05-11 Delta Electronics Inc Backlight module
KR20060030350A (en) 2004-10-05 2006-04-10 삼성전자주식회사 White light generating unit, backlight assembly having the same and liquid crystal display apparatus having the same
JP4445827B2 (en) 2004-10-07 2010-04-07 大日本印刷株式会社 Condensing sheet, surface light source device, and manufacturing method of condensing sheet
JP4728688B2 (en) 2004-10-13 2011-07-20 Nec液晶テクノロジー株式会社 Light source device, display device, terminal device, and optical unit
TWI259313B (en) 2004-10-19 2006-08-01 Ind Tech Res Inst Light-guide plate and method for manufacturing thereof
US7170697B2 (en) 2004-10-20 2007-01-30 Hewlett-Packard Development Company, L.P. Programmable waveform for lamp ballast
JP4688131B2 (en) 2004-10-21 2011-05-25 株式会社リコー Optical deflection apparatus, optical deflection array, optical system, and image projection display apparatus
JP2006120571A (en) 2004-10-25 2006-05-11 Fujikura Ltd Lighting system
WO2006055873A2 (en) 2004-11-17 2006-05-26 Fusion Optix, Inc. Enhanced electroluminescent sign
KR100735148B1 (en) 2004-11-22 2007-07-03 (주)케이디티 Backlight unit by phosphorescent diffusion sheet
US8130210B2 (en) 2004-11-30 2012-03-06 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Touch input system using light guides
JP4634129B2 (en) 2004-12-10 2011-02-16 三菱重工業株式会社 Light scattering film and optical device using the same
KR100682907B1 (en) 2004-12-14 2007-02-15 삼성전자주식회사 Illumination apparatus for a display device using light guide plate
US20060130889A1 (en) 2004-12-22 2006-06-22 Motorola, Inc. Solar panel with optical films
AU2004325939B2 (en) 2004-12-23 2010-04-08 Dolby Laboratories Licensing Corporation Wide color gamut displays
JP4420813B2 (en) 2004-12-28 2010-02-24 株式会社エンプラス Surface light source device and display device
US7339635B2 (en) 2005-01-14 2008-03-04 3M Innovative Properties Company Pre-stacked optical films with adhesive layer
JP4547276B2 (en) 2005-01-24 2010-09-22 シチズン電子株式会社 Planar light source
US20090231275A1 (en) 2005-01-30 2009-09-17 Simtrix Limited Computer mouse peripheral
WO2006081633A1 (en) 2005-02-07 2006-08-10 Rpo Pty Limited Waveguide design incorporating reflective optics
TWI263098B (en) 2005-02-16 2006-10-01 Au Optronics Corp Backlight module
US20060187676A1 (en) 2005-02-18 2006-08-24 Sharp Kabushiki Kaisha Light guide plate, light guide device, lighting device, light guide system, and drive circuit
US20060209012A1 (en) 2005-02-23 2006-09-21 Pixtronix, Incorporated Devices having MEMS displays
US7616368B2 (en) 2005-02-23 2009-11-10 Pixtronix, Inc. Light concentrating reflective display methods and apparatus
US7356231B2 (en) 2005-02-28 2008-04-08 3M Innovative Properties Company Composite polymer fibers
US7224512B2 (en) 2005-03-15 2007-05-29 Motorola, Inc. Microelectromechanical system optical apparatus and method
TWI255924B (en) 2005-03-16 2006-06-01 Au Optronics Corp Backlight module and brightness enhancement film thereof
US7352501B2 (en) 2005-03-31 2008-04-01 Xerox Corporation Electrophoretic caps prepared from encapsulated electrophoretic particles
KR100681521B1 (en) 2005-04-06 2007-02-09 (주)케이디티 Backlight unit
US20060246233A1 (en) 2005-04-28 2006-11-02 Fuji Photo Film Co., Ltd. Light diffusion film, anti-reflection film, polarizing plate and image display device
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
JP4743846B2 (en) 2005-05-10 2011-08-10 シチズン電子株式会社 Optical communication apparatus and information equipment using the same
GB2426351A (en) 2005-05-19 2006-11-22 Sharp Kk A dual view display
US20060291769A1 (en) 2005-05-27 2006-12-28 Eastman Kodak Company Light emitting source incorporating vertical cavity lasers and other MEMS devices within an electro-optical addressing architecture
TW200641422A (en) 2005-05-30 2006-12-01 Polarlite Corp Transparent type light guiding module
KR101176531B1 (en) 2005-05-31 2012-08-24 삼성전자주식회사 Backligh system and liquid crystal display apparatus employing the same
KR100647327B1 (en) 2005-06-18 2006-11-23 삼성전기주식회사 Back light unit for flat display device, and flat display apparatus having the same
US20060285356A1 (en) 2005-06-21 2006-12-21 K-Bridge Electronics Co., Ltd. Side-edge backlight module dimming pack
US20100079711A1 (en) 2005-06-23 2010-04-01 TPO Hong Holding Limited Liquid crystal display device equipped with a photovoltaic conversion function
WO2007002317A1 (en) 2005-06-23 2007-01-04 Fusion Optix, Inc. Enhanced diffusing plates, films and backlights
US7161136B1 (en) 2005-07-06 2007-01-09 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Light modulating input device for capturing user control inputs
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
US7233722B2 (en) 2005-08-15 2007-06-19 General Display, Ltd. System and method for fiber optics based direct view giant screen flat panel display
TW200712653A (en) 2005-09-28 2007-04-01 Jemitek Electronics Corp Liquid crystal having function of micro-reflection
KR100784551B1 (en) 2005-10-19 2007-12-11 엘지전자 주식회사 A prism sheet employed in backlight unit
KR100721009B1 (en) 2005-10-27 2007-05-22 엘지전자 주식회사 Backlight unit including a plurality of diffusion sheet and liquid crystal display device including the same
US7388181B2 (en) 2005-10-28 2008-06-17 Samsung Electro-Mechanics Co., Ltd. Apparatus for adjusting applied voltage in display system using diffractive optical modulator
US7630114B2 (en) 2005-10-28 2009-12-08 Idc, Llc Diffusion barrier layer for MEMS devices
US7760197B2 (en) 2005-10-31 2010-07-20 Hewlett-Packard Development Company, L.P. Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field
TWI312895B (en) 2005-11-11 2009-08-01 Chunghwa Picture Tubes Ltd Backlight module structure for led chip holder
CN101360948B (en) 2005-11-15 2011-01-19 松下电器产业株式会社 Surface illuminator and liquid crystal display using same
JP2006065360A (en) 2005-11-16 2006-03-09 Omron Corp Light guide and display apparatus
JP2007165284A (en) 2005-11-18 2007-06-28 Seiko Instruments Inc Electroluminescent device and display using same
KR100747001B1 (en) 2005-11-29 2007-08-07 한국생산기술연구원 Light guiding panel using point lights and fabricating method thereof
US20070125415A1 (en) 2005-12-05 2007-06-07 Massachusetts Institute Of Technology Light capture with patterned solar cell bus wires
US7924368B2 (en) 2005-12-08 2011-04-12 3M Innovative Properties Company Diffuse multilayer optical assembly
JP2009519495A (en) 2005-12-14 2009-05-14 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Reflective display with improved brightness and contrast
WO2007073203A1 (en) 2005-12-19 2007-06-28 Renewable Energy Corporation Asa Solar cell module
KR100761090B1 (en) 2005-12-30 2007-09-21 주식회사 두산 Integrated light guide pannel and method of manufacturing the same
US7366393B2 (en) 2006-01-13 2008-04-29 Optical Research Associates Light enhancing structures with three or more arrays of elongate features
US7545569B2 (en) 2006-01-13 2009-06-09 Avery Dennison Corporation Optical apparatus with flipped compound prism structures
CN101310351B (en) * 2006-01-20 2011-04-13 日本写真印刷株式会社 Capacitive light emitting switch and light emitting switch element used therefor
TWI345105B (en) 2006-01-26 2011-07-11 Chimei Innolux Corp Backlight module and application thereof
TW200730951A (en) 2006-02-10 2007-08-16 Wintek Corp Guide light module
JP4639337B2 (en) 2006-02-17 2011-02-23 国立大学法人長岡技術科学大学 Solar cell and solar collector
US7603001B2 (en) 2006-02-17 2009-10-13 Qualcomm Mems Technologies, Inc. Method and apparatus for providing back-lighting in an interferometric modulator display device
US20070201056A1 (en) 2006-02-24 2007-08-30 Eastman Kodak Company Light-scattering color-conversion material layer
US7684126B2 (en) 2006-02-24 2010-03-23 3M Innovative Properties Company Fresnel field lens
KR100678067B1 (en) 2006-02-28 2007-02-02 삼성전자주식회사 Touch sensor apparatus
US7450295B2 (en) 2006-03-02 2008-11-11 Qualcomm Mems Technologies, Inc. Methods for producing MEMS with protective coatings using multi-component sacrificial layers
US7766531B2 (en) 2006-03-29 2010-08-03 3M Innovative Properties Company Edge-lit optical display with fluted optical plate
JP2007271865A (en) 2006-03-31 2007-10-18 Hitachi Displays Ltd Liquid crystal display device
US7643203B2 (en) * 2006-04-10 2010-01-05 Qualcomm Mems Technologies, Inc. Interferometric optical display system with broadband characteristics
US20070241340A1 (en) 2006-04-17 2007-10-18 Pan Shaoher X Micro-mirror based display device having an improved light source
US7417784B2 (en) 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
US8004743B2 (en) * 2006-04-21 2011-08-23 Qualcomm Mems Technologies, Inc. Method and apparatus for providing brightness control in an interferometric modulator (IMOD) display
US7369292B2 (en) 2006-05-03 2008-05-06 Qualcomm Mems Technologies, Inc. Electrode and interconnect materials for MEMS devices
KR100794349B1 (en) 2006-05-11 2008-01-15 엘지전자 주식회사 Illuminating system utilizing a optical pipe
JP2007311046A (en) 2006-05-16 2007-11-29 Seiko Epson Corp Light-emitting device, method of manufacturing light-emitting device, and electronic equipment
US20080232135A1 (en) 2006-05-31 2008-09-25 3M Innovative Properties Company Light guide
US20070279935A1 (en) 2006-05-31 2007-12-06 3M Innovative Properties Company Flexible light guide
US7876489B2 (en) 2006-06-05 2011-01-25 Pixtronix, Inc. Display apparatus with optical cavities
KR100794350B1 (en) 2006-06-07 2008-01-15 엘지전자 주식회사 Illuminating system using optical guide
US7561773B2 (en) 2006-06-19 2009-07-14 Fuji Xerox Co., Ltd. Optical waveguide, method of manufacturing the same and optical communication module
US8488242B2 (en) 2006-06-20 2013-07-16 Opsec Security Group, Inc. Optically variable device with diffraction-based micro-optics, method of creating the same, and article employing the same
US7766498B2 (en) 2006-06-21 2010-08-03 Qualcomm Mems Technologies, Inc. Linear solid state illuminator
JP4695626B2 (en) 2006-06-30 2011-06-08 株式会社東芝 Illumination device and liquid crystal display device
WO2008003814A1 (en) 2006-07-03 2008-01-10 Nokia Corporation Changing graphics in an apparatus including user interface illumination
US8029628B2 (en) 2006-07-25 2011-10-04 Tanaka Kikinzoku Kogyo K.K. Noble metal alloy for spark plug and method for producing and processing the same
CN101122704B (en) 2006-08-11 2010-11-10 鸿富锦精密工业(深圳)有限公司 Optical board and the backlight module using same
US7845841B2 (en) * 2006-08-28 2010-12-07 Qualcomm Mems Technologies, Inc. Angle sweeping holographic illuminator
EP2068208B1 (en) 2006-09-27 2015-03-04 Toppan Printing Co., Ltd. Optical element, article having label attached thereon, optical kit and discriminating method
WO2008045311A2 (en) 2006-10-06 2008-04-17 Qualcomm Mems Technologies, Inc. Illumination device with built-in light coupler
US7855827B2 (en) 2006-10-06 2010-12-21 Qualcomm Mems Technologies, Inc. Internal optical isolation structure for integrated front or back lighting
EP1977275A2 (en) 2006-10-06 2008-10-08 Qualcomm Mems Technologies, Inc. Increasing collimation of light from light bar to light panel using tapering
US8107155B2 (en) 2006-10-06 2012-01-31 Qualcomm Mems Technologies, Inc. System and method for reducing visual artifacts in displays
EP1943551A2 (en) 2006-10-06 2008-07-16 Qualcomm Mems Technologies, Inc. Light guide
EP2366943B1 (en) 2006-10-06 2013-04-17 Qualcomm Mems Technologies, Inc. Optical loss structure integrated in an illumination apparatus of a display
EP2069840A1 (en) 2006-10-06 2009-06-17 Qualcomm Mems Technologies, Inc. Apparatus and method for reducing back reflection from an illumination device
KR20090094241A (en) 2006-10-06 2009-09-04 퀄컴 엠이엠스 테크놀로지스, 인크. Thin light bar and method of manufacturing
EP1958010A2 (en) 2006-10-10 2008-08-20 Qualcomm Mems Technologies, Inc Display device with diffractive optics
TWI346813B (en) 2006-10-14 2011-08-11 Au Optronics Corp Diffuser plate and backlight module using the same
EP2080045A1 (en) 2006-10-20 2009-07-22 Pixtronix Inc. Light guides and backlight systems incorporating light redirectors at varying densities
US7864395B2 (en) * 2006-10-27 2011-01-04 Qualcomm Mems Technologies, Inc. Light guide including optical scattering elements and a method of manufacture
KR100951723B1 (en) 2006-12-28 2010-04-07 제일모직주식회사 Optical sheet for back light unit
TW200830000A (en) 2007-01-15 2008-07-16 Dynascan Technology Corp LED backlight module
JP4667471B2 (en) 2007-01-18 2011-04-13 日東電工株式会社 Transparent conductive film, method for producing the same, and touch panel provided with the same
US7403180B1 (en) 2007-01-29 2008-07-22 Qualcomm Mems Technologies, Inc. Hybrid color synthesis for multistate reflective modulator displays
US7777954B2 (en) 2007-01-30 2010-08-17 Qualcomm Mems Technologies, Inc. Systems and methods of providing a light guiding layer
US8477315B2 (en) 2007-02-09 2013-07-02 Seiko Epson Corporation Volume hologram, light source device, illumination device, monitor, and image display device
US7916378B2 (en) 2007-03-08 2011-03-29 Qualcomm Mems Technologies, Inc. Method and apparatus for providing a light absorbing mask in an interferometric modulator display
US7494830B2 (en) 2007-04-06 2009-02-24 Taiwan Semiconductor Manufacturing Company Method and device for wafer backside alignment overlay accuracy
US8054421B2 (en) 2007-04-06 2011-11-08 Adrea, LLC Reflective display panel and method for manufacturing such a display panel
WO2008125130A1 (en) 2007-04-12 2008-10-23 Nokia Corporation Keypad
US7733439B2 (en) 2007-04-30 2010-06-08 Qualcomm Mems Technologies, Inc. Dual film light guide for illuminating displays
US7507012B2 (en) 2007-05-16 2009-03-24 Rohm And Haas Denmark Finance A/S LCD displays with light redirection
DE102007025092A1 (en) 2007-05-30 2008-12-04 Osram Opto Semiconductors Gmbh LED chip
JPWO2008153139A1 (en) 2007-06-15 2010-08-26 株式会社ブリヂストン Optical filter for display, display having the same, and plasma display panel
JP2010538306A (en) 2007-07-31 2010-12-09 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド Device for increasing the color shift of interferometric modulators
US7477809B1 (en) 2007-07-31 2009-01-13 Hewlett-Packard Development Company, L.P. Photonic guiding device
US8072402B2 (en) 2007-08-29 2011-12-06 Qualcomm Mems Technologies, Inc. Interferometric optical modulator with broadband reflection characteristics
WO2009036215A2 (en) 2007-09-14 2009-03-19 Qualcomm Mems Technologies, Inc. Etching processes used in mems production
CN101802678B (en) 2007-09-17 2014-03-12 高通Mems科技公司 Semi-transparent/ transflective lighted interferometric devices
JP4384214B2 (en) 2007-09-27 2009-12-16 株式会社 日立ディスプレイズ Surface light emitting device, image display device, and image display device using the same
PL2048779T3 (en) 2007-10-08 2012-05-31 Whirlpool Co Capacitive touch switch and domestic appliance provided with such switch
CN101408628A (en) 2007-10-10 2009-04-15 群康科技(深圳)有限公司 Diffusion chip and manufacturing process thereof and backlight module unit and LCD device
US8058549B2 (en) 2007-10-19 2011-11-15 Qualcomm Mems Technologies, Inc. Photovoltaic devices with integrated color interferometric film stacks
EP2212926A2 (en) 2007-10-19 2010-08-04 QUALCOMM MEMS Technologies, Inc. Display with integrated photovoltaics
WO2009055393A1 (en) 2007-10-23 2009-04-30 Qualcomm Mems Technologies, Inc. Adjustably transmissive mems-based devices
US20090293955A1 (en) 2007-11-07 2009-12-03 Qualcomm Incorporated Photovoltaics with interferometric masks
US20090126792A1 (en) 2007-11-16 2009-05-21 Qualcomm Incorporated Thin film solar concentrator/collector
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
WO2009065069A1 (en) 2007-11-16 2009-05-22 Qualcomm Mems Technologies, Inc. Thin film planar sonar concentrator/ collector and diffusor used with an active display
US8068710B2 (en) 2007-12-07 2011-11-29 Qualcomm Mems Technologies, Inc. Decoupled holographic film and diffuser
US7949213B2 (en) 2007-12-07 2011-05-24 Qualcomm Mems Technologies, Inc. Light illumination of displays with front light guide and coupling elements
EP2232569A2 (en) 2007-12-17 2010-09-29 QUALCOMM MEMS Technologies, Inc. Photovoltaics with interferometric back side masks
US20090168459A1 (en) 2007-12-27 2009-07-02 Qualcomm Incorporated Light guide including conjugate film
TWI368788B (en) 2008-02-01 2012-07-21 Au Optronics Corp Backlight module and display apparatus having the same
US8654061B2 (en) 2008-02-12 2014-02-18 Qualcomm Mems Technologies, Inc. Integrated front light solution
WO2009102733A2 (en) 2008-02-12 2009-08-20 Qualcomm Mems Technologies, Inc. Integrated front light diffuser for reflective displays
WO2009102731A2 (en) 2008-02-12 2009-08-20 Qualcomm Mems Technologies, Inc. Devices and methods for enhancing brightness of displays using angle conversion layers
EP2248188A2 (en) 2008-02-12 2010-11-10 QUALCOMM MEMS Technologies, Inc. Dual layer thin film holographic solar concentrator/collector
US7948672B2 (en) 2008-03-07 2011-05-24 Qualcomm Mems Technologies, Inc. System and methods for tiling display panels
US8408775B1 (en) 2008-03-12 2013-04-02 Fusion Optix, Inc. Light recycling directional control element and light emitting device using the same
US8851734B2 (en) 2008-03-27 2014-10-07 Skc Haas Display Films Co., Ltd. Light guiding film having light extraction features
JP2011517118A (en) 2008-04-11 2011-05-26 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド Methods for improving PV aesthetics and efficiency
WO2009129264A1 (en) 2008-04-15 2009-10-22 Qualcomm Mems Technologies, Inc. Light with bi-directional propagation
EP2291694A2 (en) 2008-05-28 2011-03-09 QUALCOMM MEMS Technologies, Inc. Light guide panel with light turning microstructure, method of fabrication thereof, and display device
US8390008B2 (en) 2008-05-29 2013-03-05 Global Oled Technology Llc LED device structure to improve light output
JP5216431B2 (en) 2008-06-17 2013-06-19 スタンレー電気株式会社 Strobe reflector for camera
US8023167B2 (en) 2008-06-25 2011-09-20 Qualcomm Mems Technologies, Inc. Backlight displays
US7768690B2 (en) 2008-06-25 2010-08-03 Qualcomm Mems Technologies, Inc. Backlight displays
US20090323144A1 (en) 2008-06-30 2009-12-31 Qualcomm Mems Technologies, Inc. Illumination device with holographic light guide
TW201007288A (en) 2008-08-11 2010-02-16 Advanced Optoelectronic Tech Edge lighting back light unit
US20100096011A1 (en) 2008-10-16 2010-04-22 Qualcomm Mems Technologies, Inc. High efficiency interferometric color filters for photovoltaic modules
US20100096006A1 (en) 2008-10-16 2010-04-22 Qualcomm Mems Technologies, Inc. Monolithic imod color enhanced photovoltaic cell
JP5232672B2 (en) 2009-01-23 2013-07-10 日東電工株式会社 Optical waveguide with light emitting element and optical touch panel
US8172417B2 (en) 2009-03-06 2012-05-08 Qualcomm Mems Technologies, Inc. Shaped frontlight reflector for use with display
US20100195310A1 (en) 2009-02-04 2010-08-05 Qualcomm Mems Technologies, Inc. Shaped frontlight reflector for use with display
US20100238529A1 (en) 2009-03-23 2010-09-23 Qualcomm Mems Technologies, Inc. Dithered holographic frontlight
US20100245370A1 (en) 2009-03-25 2010-09-30 Qualcomm Mems Technologies, Inc. Em shielding for display devices
US9256007B2 (en) 2009-04-21 2016-02-09 Svv Technology Innovations, Inc. Light collection and illumination systems employing planar waveguide
US8979349B2 (en) 2009-05-29 2015-03-17 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
JP2012528361A (en) 2009-05-29 2012-11-12 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド Lighting device for reflective display
US20110032214A1 (en) 2009-06-01 2011-02-10 Qualcomm Mems Technologies, Inc. Front light based optical touch screen
US8624853B2 (en) 2009-06-01 2014-01-07 Perceptive Pixel Inc. Structure-augmented touch sensing with frustated total internal reflection
JP2013501344A (en) * 2009-08-03 2013-01-10 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド Microstructure for light guide plate illumination
CN105278790B (en) 2009-12-29 2017-05-10 追踪有限公司 Illumination device with integrated touch sensing capability and manufacture method thereof
JP4691205B1 (en) 2010-09-03 2011-06-01 日東電工株式会社 Method for producing optical film laminate including thin high-performance polarizing film
WO2012043396A1 (en) 2010-09-27 2012-04-05 古河電気工業株式会社 Backlight panel and reflection plate for backlight panel
US20120081406A1 (en) 2010-09-30 2012-04-05 Qualcomm Mems Technologies, Inc. Integrated backlit frontlight for reflective display elements
US20130106712A1 (en) 2011-11-01 2013-05-02 Qualcomm Mems Technologies, Inc. Method of reducing glare from inner layers of a display and touch sensor stack
US20130127922A1 (en) 2011-11-18 2013-05-23 Qualcomm Mems Technologies, Inc Structures for directing incident light onto the active areas of display elements

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6381022B1 (en) * 1992-01-22 2002-04-30 Northeastern University Light modulating device
US20020126364A1 (en) * 1994-05-05 2002-09-12 Iridigm Display Corporation, A Delaware Corporation Interferometric modulation of radiation
DE19622748A1 (en) * 1996-06-05 1997-12-11 Forschungszentrum Juelich Gmbh Interference filter based on porous silicon
US5914804A (en) * 1998-01-28 1999-06-22 Lucent Technologies Inc Double-cavity micromechanical optical modulator with plural multilayer mirrors
US20030210363A1 (en) * 2000-04-21 2003-11-13 Seiko Epson Corporation Electrooptical device, projection-type display apparatus, and method for manufacturing the electrooptical device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
US9110289B2 (en) 1998-04-08 2015-08-18 Qualcomm Mems Technologies, Inc. Device for modulating light with multiple electrodes
US9025235B2 (en) 2002-12-25 2015-05-05 Qualcomm Mems Technologies, Inc. Optical interference type of color display having optical diffusion layer between substrate and electrode
US8971675B2 (en) 2006-01-13 2015-03-03 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US9019183B2 (en) 2006-10-06 2015-04-28 Qualcomm Mems Technologies, Inc. Optical loss structure integrated in an illumination apparatus
WO2009102672A2 (en) * 2008-02-12 2009-08-20 Qualcomm Mems Technologies, Inc. Integrated front light solution
WO2009102672A3 (en) * 2008-02-12 2009-11-05 Qualcomm Mems Technologies, Inc. Integrated front light solution
US8654061B2 (en) 2008-02-12 2014-02-18 Qualcomm Mems Technologies, Inc. Integrated front light solution
US8760751B2 (en) 2012-01-26 2014-06-24 Qualcomm Mems Technologies, Inc. Analog IMOD having a color notch filter
CN104081252A (en) * 2012-01-26 2014-10-01 高通Mems科技公司 Analog IMOD having a color notch filter
US8970941B2 (en) 2012-01-26 2015-03-03 Qualcomm Mems Technologies, Inc. Analog IMOD having a color notch filter
TWI627777B (en) * 2017-07-26 2018-06-21 財團法人工業技術研究院 Optical compensation structure

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