WO2005071455A3 - Silicon optical device - Google Patents

Silicon optical device Download PDF

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Publication number
WO2005071455A3
WO2005071455A3 PCT/US2005/001117 US2005001117W WO2005071455A3 WO 2005071455 A3 WO2005071455 A3 WO 2005071455A3 US 2005001117 W US2005001117 W US 2005001117W WO 2005071455 A3 WO2005071455 A3 WO 2005071455A3
Authority
WO
WIPO (PCT)
Prior art keywords
optical device
silicon
silicon optical
rib
poly
Prior art date
Application number
PCT/US2005/001117
Other languages
French (fr)
Other versions
WO2005071455A2 (en
Inventor
Thomas R Keyser
Original Assignee
Honeywell Int Inc
Thomas R Keyser
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Int Inc, Thomas R Keyser filed Critical Honeywell Int Inc
Priority to JP2006549600A priority Critical patent/JP2007519041A/en
Priority to DE602005013349T priority patent/DE602005013349D1/en
Priority to EP05711427A priority patent/EP1704433B1/en
Publication of WO2005071455A2 publication Critical patent/WO2005071455A2/en
Publication of WO2005071455A3 publication Critical patent/WO2005071455A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12173—Masking

Abstract

An optical device can be fabricated by forming a silicon rib, such as a poly-silicon rib, on a SOI substrate so that a portion of the SOI substrate is exposed, and by forming silicon spacers, such as amorphous or poly-silicon spacers, that round off corners of the silicon rib.
PCT/US2005/001117 2004-01-12 2005-01-11 Silicon optical device WO2005071455A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006549600A JP2007519041A (en) 2004-01-12 2005-01-11 Silicon optical device
DE602005013349T DE602005013349D1 (en) 2004-01-12 2005-01-11 OPTICAL SILICON COMPONENT
EP05711427A EP1704433B1 (en) 2004-01-12 2005-01-11 Silicon optical device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/755,212 2004-01-12
US10/755,212 US7672558B2 (en) 2004-01-12 2004-01-12 Silicon optical device

Publications (2)

Publication Number Publication Date
WO2005071455A2 WO2005071455A2 (en) 2005-08-04
WO2005071455A3 true WO2005071455A3 (en) 2005-10-06

Family

ID=34739536

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/001117 WO2005071455A2 (en) 2004-01-12 2005-01-11 Silicon optical device

Country Status (6)

Country Link
US (1) US7672558B2 (en)
EP (1) EP1704433B1 (en)
JP (1) JP2007519041A (en)
DE (1) DE602005013349D1 (en)
TW (1) TW200537144A (en)
WO (1) WO2005071455A2 (en)

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US7177489B2 (en) * 2004-03-18 2007-02-13 Honeywell International, Inc. Silicon-insulator-silicon thin-film structures for optical modulators and methods of manufacture
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US7550382B2 (en) * 2005-05-31 2009-06-23 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of semiconductor device, evaluation method of semiconductor device, and semiconductor device
US20070101927A1 (en) * 2005-11-10 2007-05-10 Honeywell International Inc. Silicon based optical waveguide structures and methods of manufacture
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US20070274655A1 (en) * 2006-04-26 2007-11-29 Honeywell International Inc. Low-loss optical device structure
US20080101744A1 (en) * 2006-10-31 2008-05-01 Honeywell International Inc. Optical Waveguide Sensor Devices and Methods For Making and Using Them
US8290325B2 (en) * 2008-06-30 2012-10-16 Intel Corporation Waveguide photodetector device and manufacturing method thereof
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US8000565B2 (en) * 2008-12-31 2011-08-16 Intel Corporation Buried dual taper waveguide for passive alignment and photonic integration
EP2549311B1 (en) 2011-07-19 2014-09-03 Huawei Technologies Co., Ltd. Deep-shallow optical radiation filters
CN105103292A (en) * 2012-10-01 2015-11-25 贾斯汀·佩恩 Method of monolithically integrated optoelectrics
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US10191213B2 (en) 2014-01-09 2019-01-29 Globalfoundries Inc. Shielding structures between optical waveguides
US11105974B2 (en) 2015-06-30 2021-08-31 Massachusetts Institute Of Technology Waveguide-coupled silicon-germanium photodetectors and fabrication methods for same
WO2017058319A2 (en) * 2015-06-30 2017-04-06 Massachusetts Institute Of Technology Waveguide-coupled silicon-germanium photodetectors and fabrication methods for same
US10620371B2 (en) * 2016-03-05 2020-04-14 Huawei Technologies Canada Co., Ltd. Waveguide crossing having rib waveguides
US9798166B1 (en) * 2017-01-24 2017-10-24 Mellanox Technologies Silicon Photonics Inc. Attenuator with improved fabrication consistency
US11860417B2 (en) * 2019-09-09 2024-01-02 Cisco Technology, Inc. Precision spacing control for optical waveguides

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Also Published As

Publication number Publication date
EP1704433B1 (en) 2009-03-18
TW200537144A (en) 2005-11-16
WO2005071455A2 (en) 2005-08-04
JP2007519041A (en) 2007-07-12
DE602005013349D1 (en) 2009-04-30
EP1704433A2 (en) 2006-09-27
US7672558B2 (en) 2010-03-02
US20050152658A1 (en) 2005-07-14

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