WO2005017975A3 - Anchors for microelectromechanical systems having an soi substrate, and method of fabricating same - Google Patents

Anchors for microelectromechanical systems having an soi substrate, and method of fabricating same Download PDF

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Publication number
WO2005017975A3
WO2005017975A3 PCT/US2004/009773 US2004009773W WO2005017975A3 WO 2005017975 A3 WO2005017975 A3 WO 2005017975A3 US 2004009773 W US2004009773 W US 2004009773W WO 2005017975 A3 WO2005017975 A3 WO 2005017975A3
Authority
WO
WIPO (PCT)
Prior art keywords
anchors
mechanical structures
soi substrate
substrate
microelectromechanical systems
Prior art date
Application number
PCT/US2004/009773
Other languages
French (fr)
Other versions
WO2005017975A2 (en
Inventor
Markus Lutz
Aaron Partridge
Silvia Kronmueller
Original Assignee
Bosch Gmbh Robert
Markus Lutz
Aaron Partridge
Silvia Kronmueller
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert, Markus Lutz, Aaron Partridge, Silvia Kronmueller filed Critical Bosch Gmbh Robert
Priority to JP2006521049A priority Critical patent/JP5027505B2/en
Priority to EP04801839.4A priority patent/EP1652219B1/en
Publication of WO2005017975A2 publication Critical patent/WO2005017975A2/en
Publication of WO2005017975A3 publication Critical patent/WO2005017975A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0054—For holding or placing an element in a given position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00126—Static structures not provided for in groups B81C1/00031 - B81C1/00119
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0307—Anchors

Abstract

The present invention is directed to a MEMS device (12) and technique of fabricating or manufacturing the MEMS device (12) having mechanical structures (20a, 20b, 20c) and anchors (30a, 30b, 30c) to secure the mechanical structures (20a, 20b, 20c) to the substrate (14). The anchors (30a, 30b, 30c) of the present invention are comprised of a material that is relatively unaffected by the release processes of the mechanical structures (20a, 20b, 20c). In this regard, the etch release process is selective or preferential to the material(s) securing the mechanical structures (20a, 20b, 20c) in relation to the material comprising the anchors (30a, 30b, 30c). Moreover, the anchors (30a, 30b, 30c) of the present invention are secured to the substrate (14) in such a manner that removal of the insulation layer has little to no affect on the anchoring of the mechanical structures (20a, 20b, 20c) to the substrate (14).
PCT/US2004/009773 2003-07-25 2004-03-31 Anchors for microelectromechanical systems having an soi substrate, and method of fabricating same WO2005017975A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006521049A JP5027505B2 (en) 2003-07-25 2004-03-31 Anchor for micro electro mechanical system having SOI substrate and method for manufacturing the same
EP04801839.4A EP1652219B1 (en) 2003-07-25 2004-03-31 Anchors for microelectromechanical systems having an soi substrate, and method of fabricating same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/627,237 2003-07-25
US10/627,237 US6952041B2 (en) 2003-07-25 2003-07-25 Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same

Publications (2)

Publication Number Publication Date
WO2005017975A2 WO2005017975A2 (en) 2005-02-24
WO2005017975A3 true WO2005017975A3 (en) 2005-05-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/009773 WO2005017975A2 (en) 2003-07-25 2004-03-31 Anchors for microelectromechanical systems having an soi substrate, and method of fabricating same

Country Status (5)

Country Link
US (3) US6952041B2 (en)
EP (1) EP1652219B1 (en)
JP (2) JP5027505B2 (en)
CN (1) CN100394539C (en)
WO (1) WO2005017975A2 (en)

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US7317233B2 (en) 2008-01-08
US20080108165A1 (en) 2008-05-08
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US20050253209A1 (en) 2005-11-17
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CN1826682A (en) 2006-08-30
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US20050019974A1 (en) 2005-01-27
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US7579206B2 (en) 2009-08-25
US6952041B2 (en) 2005-10-04

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