WO2004112077A3 - Rf current return path for a large area substrate plasma reactor - Google Patents

Rf current return path for a large area substrate plasma reactor Download PDF

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Publication number
WO2004112077A3
WO2004112077A3 PCT/US2004/017387 US2004017387W WO2004112077A3 WO 2004112077 A3 WO2004112077 A3 WO 2004112077A3 US 2004017387 W US2004017387 W US 2004017387W WO 2004112077 A3 WO2004112077 A3 WO 2004112077A3
Authority
WO
WIPO (PCT)
Prior art keywords
large area
return path
plasma reactor
area substrate
current return
Prior art date
Application number
PCT/US2004/017387
Other languages
French (fr)
Other versions
WO2004112077A2 (en
Inventor
Wendell Blonigan
Ernst Keller
Carl Sorensen
Original Assignee
Applied Materials Inc
Wendell Blonigan
Ernst Keller
Carl Sorensen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc, Wendell Blonigan, Ernst Keller, Carl Sorensen filed Critical Applied Materials Inc
Priority to CN2004800213619A priority Critical patent/CN1826679B/en
Publication of WO2004112077A2 publication Critical patent/WO2004112077A2/en
Publication of WO2004112077A3 publication Critical patent/WO2004112077A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means

Abstract

An apparatus for providing a return current path for RF current between a chamber wall and a substrate support is provided comprising a low impedance flexible curtain having a first end and a second end, the first end adapted to be electrically connected to the chamber wall and the second end adapted to be connected to the substrate support, wherein the curtain further comprises at least one fold in the curtain material, located an axial distance between the first end and the second end, and at least one perforation cut into the curtain proximate the second end.
PCT/US2004/017387 2003-06-12 2004-06-01 Rf current return path for a large area substrate plasma reactor WO2004112077A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2004800213619A CN1826679B (en) 2003-06-12 2004-06-01 RF current return path for a large area substrate plasma reactor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/460,916 2003-06-12
US10/460,916 US7083702B2 (en) 2003-06-12 2003-06-12 RF current return path for a large area substrate plasma reactor

Publications (2)

Publication Number Publication Date
WO2004112077A2 WO2004112077A2 (en) 2004-12-23
WO2004112077A3 true WO2004112077A3 (en) 2005-07-14

Family

ID=33511123

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/017387 WO2004112077A2 (en) 2003-06-12 2004-06-01 Rf current return path for a large area substrate plasma reactor

Country Status (4)

Country Link
US (2) US7083702B2 (en)
CN (1) CN1826679B (en)
TW (1) TWI313574B (en)
WO (1) WO2004112077A2 (en)

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Also Published As

Publication number Publication date
US7083702B2 (en) 2006-08-01
US8062717B2 (en) 2011-11-22
CN1826679A (en) 2006-08-30
TWI313574B (en) 2009-08-11
US20060231029A1 (en) 2006-10-19
TW200505294A (en) 2005-02-01
CN1826679B (en) 2010-05-12
US20040250955A1 (en) 2004-12-16
WO2004112077A2 (en) 2004-12-23

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