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Publication numberWO2004097431 A3
Publication typeApplication
Application numberPCT/US2004/012901
Publication date23 Dec 2004
Filing date27 Apr 2004
Priority date28 Apr 2003
Also published asCN1813192A, CN1813192B, CN101701967A, CN101701967B, EP1618391A2, EP1618391A4, US6848304, US20040211258, WO2004097431A2, WO2004097431B1
Publication numberPCT/2004/12901, PCT/US/2004/012901, PCT/US/2004/12901, PCT/US/4/012901, PCT/US/4/12901, PCT/US2004/012901, PCT/US2004/12901, PCT/US2004012901, PCT/US200412901, PCT/US4/012901, PCT/US4/12901, PCT/US4012901, PCT/US412901, WO 2004/097431 A3, WO 2004097431 A3, WO 2004097431A3, WO-A3-2004097431, WO2004/097431A3, WO2004097431 A3, WO2004097431A3
InventorsJohn A Geen
ApplicantAnalog Devices Inc
Export CitationBiBTeX, EndNote, RefMan
External Links: Patentscope, Espacenet
Six degree-of-freedom micro-machined multi-sensor
WO 2004097431 A3
Abstract
A six degree-of-freedom micro-machined multi-sensor (100) that provides 3-axes of acceleration sensing, and 3-axes of angular rate sensing, in a single multi-sensor device. The six degree-of-freedom multi-sensor device includes a first multi-sensor substructure (103) providing 2-axes of acceleration sensing and 1-axis of angular rate sensing, and a second multi-sensor substructure (105) providing a third axis of acceleration sensing, and second and third axes of angular rate sensing. The first and second multi-sensor substructures are implemented on respective substrates within the six degree-of-freedom multi-sensor device.
Patent Citations
Cited PatentFiling datePublication dateApplicantTitle
US4744248 *25 Jun 198717 May 1988Litton Systems, Inc.Vibrating accelerometer-multisensor
US5377544 *19 Dec 19913 Jan 1995Motorola, Inc.Rotational vibration gyroscope
US5869760 *2 Jun 19979 Feb 1999Analog Devices, Inc.Micromachined device with rotationally vibrated masses
US5894091 *13 May 199713 Apr 1999Texas Instruments IncorporatedComposite sensor
US5992233 *31 May 199630 Nov 1999The Regents Of The University Of CaliforniaMicromachined Z-axis vibratory rate gyroscope
Non-Patent Citations
Reference
1 *See also references of EP1618391A4
Classifications
International ClassificationG01C19/5719, G01P15/18, G01P15/125, G01P15/00
Cooperative ClassificationG01C19/5719, G01P15/18, G01P15/125, G01P2015/082
European ClassificationG01C19/5719, G01P15/18, G01P15/125
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