WO2004097431A3 - Six degree-of-freedom micro-machined multi-sensor - Google Patents

Six degree-of-freedom micro-machined multi-sensor Download PDF

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Publication number
WO2004097431A3
WO2004097431A3 PCT/US2004/012901 US2004012901W WO2004097431A3 WO 2004097431 A3 WO2004097431 A3 WO 2004097431A3 US 2004012901 W US2004012901 W US 2004012901W WO 2004097431 A3 WO2004097431 A3 WO 2004097431A3
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WO
WIPO (PCT)
Prior art keywords
sensor
degree
axes
freedom
sensing
Prior art date
Application number
PCT/US2004/012901
Other languages
French (fr)
Other versions
WO2004097431A2 (en
WO2004097431B1 (en
Inventor
John A Geen
Original Assignee
Analog Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc filed Critical Analog Devices Inc
Priority to CN2004800182945A priority Critical patent/CN1813192B/en
Priority to EP04750700A priority patent/EP1618391A4/en
Priority to JP2006513355A priority patent/JP4688073B2/en
Publication of WO2004097431A2 publication Critical patent/WO2004097431A2/en
Publication of WO2004097431A3 publication Critical patent/WO2004097431A3/en
Publication of WO2004097431B1 publication Critical patent/WO2004097431B1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

A six degree-of-freedom micro-machined multi-sensor (100) that provides 3-axes of acceleration sensing, and 3-axes of angular rate sensing, in a single multi-sensor device. The six degree-of-freedom multi-sensor device includes a first multi-sensor substructure (103) providing 2-axes of acceleration sensing and 1-axis of angular rate sensing, and a second multi-sensor substructure (105) providing a third axis of acceleration sensing, and second and third axes of angular rate sensing. The first and second multi-sensor substructures are implemented on respective substrates within the six degree-of-freedom multi-sensor device.
PCT/US2004/012901 2003-04-28 2004-04-27 Six degree-of-freedom micro-machined multi-sensor WO2004097431A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2004800182945A CN1813192B (en) 2003-04-28 2004-04-27 Six degree-of-freedom micro-machined multi-sensor
EP04750700A EP1618391A4 (en) 2003-04-28 2004-04-27 Six degree-of-freedom micro-machined multi-sensor
JP2006513355A JP4688073B2 (en) 2003-04-28 2004-04-27 Six-degree-of-freedom micro-processing multi-sensor

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US46608303P 2003-04-28 2003-04-28
US60/466,083 2003-04-28
US10/463,653 2003-06-17
US10/463,653 US6848304B2 (en) 2003-04-28 2003-06-17 Six degree-of-freedom micro-machined multi-sensor

Publications (3)

Publication Number Publication Date
WO2004097431A2 WO2004097431A2 (en) 2004-11-11
WO2004097431A3 true WO2004097431A3 (en) 2004-12-23
WO2004097431B1 WO2004097431B1 (en) 2005-03-17

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/012901 WO2004097431A2 (en) 2003-04-28 2004-04-27 Six degree-of-freedom micro-machined multi-sensor

Country Status (5)

Country Link
US (1) US6848304B2 (en)
EP (1) EP1618391A4 (en)
JP (1) JP4688073B2 (en)
CN (2) CN101701967B (en)
WO (1) WO2004097431A2 (en)

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JP4688073B2 (en) 2011-05-25
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US20040211258A1 (en) 2004-10-28
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