WO2004076127A8 - Method of manufacturing a fixed abrasive material - Google Patents

Method of manufacturing a fixed abrasive material

Info

Publication number
WO2004076127A8
WO2004076127A8 PCT/US2004/004920 US2004004920W WO2004076127A8 WO 2004076127 A8 WO2004076127 A8 WO 2004076127A8 US 2004004920 W US2004004920 W US 2004004920W WO 2004076127 A8 WO2004076127 A8 WO 2004076127A8
Authority
WO
WIPO (PCT)
Prior art keywords
abrasive material
fixed abrasive
manufacturing
froth
polymer dispersion
Prior art date
Application number
PCT/US2004/004920
Other languages
French (fr)
Other versions
WO2004076127A1 (en
Inventor
Sudhakar Balijepalli
Dale J Aldrich
Laura A Grier
Original Assignee
Dow Global Technologies Inc
Sudhakar Balijepalli
Dale J Aldrich
Laura A Grier
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Global Technologies Inc, Sudhakar Balijepalli, Dale J Aldrich, Laura A Grier filed Critical Dow Global Technologies Inc
Priority to JP2006503709A priority Critical patent/JP2006519115A/en
Priority to EP04712882A priority patent/EP1597024A1/en
Publication of WO2004076127A1 publication Critical patent/WO2004076127A1/en
Publication of WO2004076127A8 publication Critical patent/WO2004076127A8/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D13/00—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor
    • B24D13/14—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face
    • B24D13/147—Wheels having flexibly-acting working parts, e.g. buffing wheels; Mountings therefor acting by the front face comprising assemblies of felted or spongy material; comprising pads surrounded by a flexible material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
    • B24D3/28—Resins or natural or synthetic macromolecular compounds
    • B24D3/32—Resins or natural or synthetic macromolecular compounds for porous or cellular structure

Abstract

Provided is a method for manufacturing a fixed abrasive material (19) suitable for use in CMP planarization pads from an aqueous polymer dispersion that also includes abrasive particles (30) that involves frothing the polymer dispersion, applying the froth to a substrate, mold or carrier and curing the froth to form a fixed abrasive material (19) having an open cell structure containing between about 5 and 85 wt% abrasive particles and a dry density of about 350kg/m3 to 1200 kg/m3.
PCT/US2004/004920 2003-02-21 2004-02-19 Method of manufacturing a fixed abrasive material WO2004076127A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006503709A JP2006519115A (en) 2003-02-21 2004-02-19 Method for manufacturing fixed abrasive material
EP04712882A EP1597024A1 (en) 2003-02-21 2004-02-19 Method of manufacturing a fixed abrasive material

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/369,628 US7066801B2 (en) 2003-02-21 2003-02-21 Method of manufacturing a fixed abrasive material
US10/369,628 2003-02-21

Publications (2)

Publication Number Publication Date
WO2004076127A1 WO2004076127A1 (en) 2004-09-10
WO2004076127A8 true WO2004076127A8 (en) 2005-11-03

Family

ID=32868090

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/004920 WO2004076127A1 (en) 2003-02-21 2004-02-19 Method of manufacturing a fixed abrasive material

Country Status (6)

Country Link
US (1) US7066801B2 (en)
EP (1) EP1597024A1 (en)
JP (1) JP2006519115A (en)
KR (1) KR20050106026A (en)
TW (1) TW200422366A (en)
WO (1) WO2004076127A1 (en)

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Also Published As

Publication number Publication date
JP2006519115A (en) 2006-08-24
US7066801B2 (en) 2006-06-27
WO2004076127A1 (en) 2004-09-10
KR20050106026A (en) 2005-11-08
EP1597024A1 (en) 2005-11-23
US20040166790A1 (en) 2004-08-26
TW200422366A (en) 2004-11-01

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