WO2004049017A3 - Spatial light modulators with light absorbing areas - Google Patents

Spatial light modulators with light absorbing areas Download PDF

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Publication number
WO2004049017A3
WO2004049017A3 PCT/US2003/037941 US0337941W WO2004049017A3 WO 2004049017 A3 WO2004049017 A3 WO 2004049017A3 US 0337941 W US0337941 W US 0337941W WO 2004049017 A3 WO2004049017 A3 WO 2004049017A3
Authority
WO
WIPO (PCT)
Prior art keywords
spatial light
substrate
absorbing areas
light
light absorbing
Prior art date
Application number
PCT/US2003/037941
Other languages
French (fr)
Other versions
WO2004049017A2 (en
Inventor
Andrew G Huibers
Satyadev R Patel
Robert M Duboc
Original Assignee
Reflectivity Inc
Andrew G Huibers
Satyadev R Patel
Robert M Duboc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reflectivity Inc, Andrew G Huibers, Satyadev R Patel, Robert M Duboc filed Critical Reflectivity Inc
Priority to AU2003295983A priority Critical patent/AU2003295983A1/en
Publication of WO2004049017A2 publication Critical patent/WO2004049017A2/en
Publication of WO2004049017A3 publication Critical patent/WO2004049017A3/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.
PCT/US2003/037941 2002-11-26 2003-11-25 Spatial light modulators with light absorbing areas WO2004049017A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003295983A AU2003295983A1 (en) 2002-11-26 2003-11-25 Spatial light modulators with light absorbing areas

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/305,509 US6844959B2 (en) 2002-11-26 2002-11-26 Spatial light modulators with light absorbing areas
US10/305,509 2002-11-26

Publications (2)

Publication Number Publication Date
WO2004049017A2 WO2004049017A2 (en) 2004-06-10
WO2004049017A3 true WO2004049017A3 (en) 2004-08-26

Family

ID=32325440

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/037941 WO2004049017A2 (en) 2002-11-26 2003-11-25 Spatial light modulators with light absorbing areas

Country Status (3)

Country Link
US (1) US6844959B2 (en)
AU (1) AU2003295983A1 (en)
WO (1) WO2004049017A2 (en)

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US20040100680A1 (en) 2004-05-27
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US6844959B2 (en) 2005-01-18
AU2003295983A1 (en) 2004-06-18

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