WO2004038362A3 - Method and device for the polarimetric analysis of the three-dimensional infrared scattering from an object using a parabolic mirror assembly - Google Patents

Method and device for the polarimetric analysis of the three-dimensional infrared scattering from an object using a parabolic mirror assembly Download PDF

Info

Publication number
WO2004038362A3
WO2004038362A3 PCT/FR2003/050100 FR0350100W WO2004038362A3 WO 2004038362 A3 WO2004038362 A3 WO 2004038362A3 FR 0350100 W FR0350100 W FR 0350100W WO 2004038362 A3 WO2004038362 A3 WO 2004038362A3
Authority
WO
WIPO (PCT)
Prior art keywords
radiation
angle
scattering
scattered
dimensional infrared
Prior art date
Application number
PCT/FR2003/050100
Other languages
French (fr)
Other versions
WO2004038362A2 (en
Inventor
Stephane Mainguy
Thomas Lanternier
Original Assignee
Commissariat Energie Atomique
Stephane Mainguy
Thomas Lanternier
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique, Stephane Mainguy, Thomas Lanternier filed Critical Commissariat Energie Atomique
Publication of WO2004038362A2 publication Critical patent/WO2004038362A2/en
Publication of WO2004038362A3 publication Critical patent/WO2004038362A3/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47Scattering, i.e. diffuse reflection
    • G01N21/4738Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties

Abstract

The invention relates to a method and a device for the polarimetric analysis of the three-dimensional infrared scattering from an object using a parabolic mirror assembly. The object (2) is illuminated by incident infrared radiation (32) by means of the mirror (30) using a determined angle of incidence. The mirror reflects the radiation towards the object as well as the radiation (36) scattered by said object. The inventive method consists in measuring the radiation scattered along a determined scattering angle and varying the scattering angle and, optionally, the angle of incidence. According to the invention, the incident radiation and scattered radiation are polarised and, in order to analyse the three-dimensional infrared scattering from the object, the polarisations are also varied. The scattered radiation is measured according to the values of the incident radiation polarisation, the scattered radiation polarisation, the scattering angle and, optionally, the angle of incidence, and the measurements are processed in order to obtain the desired properties of the object. The invention is particularly suitable for characterising materials.
PCT/FR2003/050100 2002-10-23 2003-10-21 Method and device for the polarimetric analysis of the three-dimensional infrared scattering from an object using a parabolic mirror assembly WO2004038362A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR02/13224 2002-10-23
FR0213224A FR2846417B1 (en) 2002-10-23 2002-10-23 METHOD AND APPARATUS FOR POLARIMETRIC ANALYSIS OF THREE-DIMENSIONAL INFRARED DIFFUSION OF AN OBJECT USING A PARABOLIC MIRROR MOUNT

Publications (2)

Publication Number Publication Date
WO2004038362A2 WO2004038362A2 (en) 2004-05-06
WO2004038362A3 true WO2004038362A3 (en) 2004-06-17

Family

ID=32088199

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2003/050100 WO2004038362A2 (en) 2002-10-23 2003-10-21 Method and device for the polarimetric analysis of the three-dimensional infrared scattering from an object using a parabolic mirror assembly

Country Status (2)

Country Link
FR (1) FR2846417B1 (en)
WO (1) WO2004038362A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104266968B (en) * 2014-09-05 2017-07-11 中国地质大学(武汉) High accuracy polarization two is to reflection automatic measuring instrument
CN112924480B (en) * 2021-01-27 2023-04-07 中国科学院上海高等研究院 Measuring device for synchronous radiation X-ray and asynchronous infrared light combined use

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5426506A (en) * 1993-03-22 1995-06-20 The University Of Chicago Optical method and apparatus for detection of surface and near-subsurface defects in dense ceramics
US6433877B2 (en) * 1998-04-03 2002-08-13 Advantest Corporation Surface inspection using the ratio of intensities of s- and p-polarized light components of a laser beam reflected a rough surface

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5426506A (en) * 1993-03-22 1995-06-20 The University Of Chicago Optical method and apparatus for detection of surface and near-subsurface defects in dense ceramics
US6433877B2 (en) * 1998-04-03 2002-08-13 Advantest Corporation Surface inspection using the ratio of intensities of s- and p-polarized light components of a laser beam reflected a rough surface

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
BJUGGREN M, ET AL: "QUALITY ASSESSMENT OF ENGINEERING SURFACES BY INFRARED SCATTERING", SPIE CONFERENCE ON OPTICAL MANUFACTURING AND TESTING, vol. 2536, 1995, San Diego, pages 327 - 336, XP009007623 *
MAINGUY S ET AL: "DESCRIPTION AND CALIBRATION OF A FULLY AUTOMATED INFRARED SCATTEROMETER", SPIE CONFERENCE ON OPTICAL SCATTER: APPLICATIONS, MEASUREMENT AND THEORY, vol. 1530, 1991, pages 269 - 282, XP009007577 *
MAINGUY S ET POULIGNY B: "COHERENT AND INCOHERENT SCATTERING FROM ROUGH SURFACES: INFLUENCE OF THE ANGLE OF INCIDENCE", SPIE CONFERENCE ON SCATTERING AND SURFACE ROUGHNESS, vol. 3784, 1999, pages 249 - 260, XP009007175 *
PERSSON U: "MEASUREMENT OF SURFACE ROUGHNESS USING INFRARED SCATTERING", MEASUREMENT, INSTITUTE OF MEASUREMENT AND CONTROL. LONDON, GB, vol. 18, no. 2, 1 June 1996 (1996-06-01), pages 109 - 116, XP000635666, ISSN: 0263-2241 *

Also Published As

Publication number Publication date
FR2846417B1 (en) 2005-10-21
WO2004038362A2 (en) 2004-05-06
FR2846417A1 (en) 2004-04-30

Similar Documents

Publication Publication Date Title
WO2006062952A3 (en) Multiple angle of incidence spectroscopic scatterometer system
Berntsson et al. Estimation of effective sample size when analysing powders with diffuse reflectance near-infrared spectrometry
EP1568963A3 (en) Interferometric apparatus for measuring shapes
RU2008116849A (en) DEVICE AND METHOD FOR SPECTROPHOTOMETRIC ANALYSIS
CA2304616A1 (en) Method of and apparatus for nonobtrusively obtaining on-line measurements of a process control device parameter
Winge et al. Spectroscopy monitoring of active galactic nuclei from CTIO. I. NGC 3227
CN207515999U (en) The device that a kind of large-area metal dielectric gratings diffraction efficiency measures
CA2244473A1 (en) Spectrophotometric analysis
WO2004038362A3 (en) Method and device for the polarimetric analysis of the three-dimensional infrared scattering from an object using a parabolic mirror assembly
WO2005008214A3 (en) Apparatus and method for ellipsometric measurements with high spatial resolution
EP0737856A3 (en) Polarisation monitoring methods and apparatus
EP1376107A3 (en) Method of evaluation ion-exchange films and organic samples and x-ray measuring apparatus
DE69126918D1 (en) Method of measuring the angle of incidence of a light beam, device for carrying out the method and its use for distance measurement
WO2000043761A3 (en) Energy dispersion x-ray fluorescence analysis of chemical substances
Herodowicz Influence of the distance between a reflectance sensor and soil samples with different roughness on their spectra
WO2003048747A3 (en) Method and device for detecting a property of a cigarette paper
Preissler et al. Extraction of soil properties from laboratory and imaging spectrometry data
WO2007135484A3 (en) Determining capability of an on-line sensor
Cheng et al. Measurement and simulation of bi‐directional reflectance on three zonal soils in the south‐east of China
RU2003104868A (en) METHOD FOR DETERMINING THE RADIATIVE CAPABILITY COEFFICIENTS OF INSIDE SURFACES OF AN INHOMOGENEOUS HEATED CAVITY AND A DEVICE FOR ITS IMPLEMENTATION
Walton et al. Transmission‐function correction for XPS spectrum imaging
Yang et al. Reflectance and polarization characteristics of different coating materials
Liu et al. Prediction of Soil pH Hyperspectral Spectrum in Guanzhong Area of Shaanxi Province Based on PLS
Long et al. A simple formula for determining Globally Clear Skies
CA2260396A1 (en) Wavelength-variable light source apparatus

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): US

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR

121 Ep: the epo has been informed by wipo that ep was designated in this application
DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
122 Ep: pct application non-entry in european phase