WO2003076951A3 - A microelectromechanical device having an analog system for positioning sensing - Google Patents

A microelectromechanical device having an analog system for positioning sensing Download PDF

Info

Publication number
WO2003076951A3
WO2003076951A3 PCT/IL2003/000204 IL0300204W WO03076951A3 WO 2003076951 A3 WO2003076951 A3 WO 2003076951A3 IL 0300204 W IL0300204 W IL 0300204W WO 03076951 A3 WO03076951 A3 WO 03076951A3
Authority
WO
WIPO (PCT)
Prior art keywords
analog system
microelectromechanical device
positioning sensing
mems
sensing
Prior art date
Application number
PCT/IL2003/000204
Other languages
French (fr)
Other versions
WO2003076951A2 (en
Inventor
Slava Krylov
Original Assignee
Memlink Ltd
Slava Krylov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Memlink Ltd, Slava Krylov filed Critical Memlink Ltd
Priority to AU2003212636A priority Critical patent/AU2003212636A1/en
Publication of WO2003076951A2 publication Critical patent/WO2003076951A2/en
Publication of WO2003076951A3 publication Critical patent/WO2003076951A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
    • G01D5/165—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance by relative movement of a point of contact or actuation and a resistive track

Abstract

A microelectromechanical (MEMS) device having an anlog system for sensing the position of the moving element of the MEMS device (100). The present invention senses the movement and/or the position of the moving element (106) by generating analog signals in a way that the signal has a certain value acording to the position of an actuator of the MEMS device.
PCT/IL2003/000204 2002-03-14 2003-03-12 A microelectromechanical device having an analog system for positioning sensing WO2003076951A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003212636A AU2003212636A1 (en) 2002-03-14 2003-03-12 A microelectromechanical device having an analog system for positioning sensing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US36390502P 2002-03-14 2002-03-14
US60/363,905 2002-03-14

Publications (2)

Publication Number Publication Date
WO2003076951A2 WO2003076951A2 (en) 2003-09-18
WO2003076951A3 true WO2003076951A3 (en) 2003-12-04

Family

ID=27805296

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2003/000204 WO2003076951A2 (en) 2002-03-14 2003-03-12 A microelectromechanical device having an analog system for positioning sensing

Country Status (2)

Country Link
AU (1) AU2003212636A1 (en)
WO (1) WO2003076951A2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8804910B1 (en) 2011-01-24 2014-08-12 Moxtek, Inc. Reduced power consumption X-ray source
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
US8948345B2 (en) 2010-09-24 2015-02-03 Moxtek, Inc. X-ray tube high voltage sensing resistor
US8964943B2 (en) 2010-10-07 2015-02-24 Moxtek, Inc. Polymer layer on X-ray window
US8989354B2 (en) 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
US9174412B2 (en) 2011-05-16 2015-11-03 Brigham Young University High strength carbon fiber composite wafers for microfabrication
US9173623B2 (en) 2013-04-19 2015-11-03 Samuel Soonho Lee X-ray tube and receiver inside mouth
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4552227B2 (en) 2005-01-24 2010-09-29 ヤマハ株式会社 Position detection device
AU2008275064A1 (en) 2007-07-09 2009-01-15 Brigham Young University Methods and devices for charged molecule manipulation
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5721162A (en) * 1995-11-03 1998-02-24 Delco Electronics Corporation All-silicon monolithic motion sensor with integrated conditioning circuit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5721162A (en) * 1995-11-03 1998-02-24 Delco Electronics Corporation All-silicon monolithic motion sensor with integrated conditioning circuit

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
US8948345B2 (en) 2010-09-24 2015-02-03 Moxtek, Inc. X-ray tube high voltage sensing resistor
US8964943B2 (en) 2010-10-07 2015-02-24 Moxtek, Inc. Polymer layer on X-ray window
US8804910B1 (en) 2011-01-24 2014-08-12 Moxtek, Inc. Reduced power consumption X-ray source
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
US8989354B2 (en) 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
US9174412B2 (en) 2011-05-16 2015-11-03 Brigham Young University High strength carbon fiber composite wafers for microfabrication
US9173623B2 (en) 2013-04-19 2015-11-03 Samuel Soonho Lee X-ray tube and receiver inside mouth

Also Published As

Publication number Publication date
AU2003212636A1 (en) 2003-09-22
WO2003076951A2 (en) 2003-09-18
AU2003212636A8 (en) 2003-09-22

Similar Documents

Publication Publication Date Title
WO2002091025A3 (en) Method and apparatus for detecting and latching the position of a mems moving member
MXPA03001443A (en) Method and device for measuring a path that has been covered.
WO2001091042A3 (en) Positioning unit
WO2003076951A3 (en) A microelectromechanical device having an analog system for positioning sensing
WO2004038354A3 (en) Resonant sensor and sensing system
WO2006020486A3 (en) Motion responsive toy
AU2001253159A1 (en) Mechanical landing pad formed on the underside of a mems device
WO2003069358A3 (en) Method and apparatus for providing information from a speed and direction sensor
AU2002322102A1 (en) Systems and methods for sensing an acoustic signal using microelectromechanical systems technology
WO2003012557A3 (en) Control wheel with haptic feedback
DE59605295D1 (en) Micromechanical acceleration sensor
WO2004052046A3 (en) Thin membrane transducer
AU2001237430A1 (en) Device for detecting the position and/or movement of objects and/or living things
AU2003257134A1 (en) Triaxial acceleration sensor
EP1333245A4 (en) Fine displacement detection device by sound or the like
WO2008027818A3 (en) Cable control apparatus
WO2005020434A3 (en) Shell type actuator
AU8921501A (en) Thin film mems sensors employing electrical sensing and force feedback
DE69823208D1 (en) Force transducer for an accelerometer or speed sensor
ATE368863T1 (en) MICROELECTROMECHANICAL SYSTEM
WO2002103620A3 (en) Data input tablet
WO2003049016A3 (en) Method, and use of a finger scanner, for providing input to an electronic unit and such a unit comprising a finger scanner
GB2376585B (en) System for determining the position and/or speed of a moving object
WO1998009446A3 (en) A browsing system and method for computer information
WO2001006543A3 (en) Microelectromechanical device with moving element

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SI SK SL TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP