WO2003062854A3 - Detektor zur erfassung von teilchenstrahlen und verfahren zur herstellung desselben - Google Patents
Detektor zur erfassung von teilchenstrahlen und verfahren zur herstellung desselben Download PDFInfo
- Publication number
- WO2003062854A3 WO2003062854A3 PCT/EP2003/000705 EP0300705W WO03062854A3 WO 2003062854 A3 WO2003062854 A3 WO 2003062854A3 EP 0300705 W EP0300705 W EP 0300705W WO 03062854 A3 WO03062854 A3 WO 03062854A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- detector
- production
- plate
- substrate
- particle beams
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/26—Measuring radiation intensity with resistance detectors
Abstract
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/502,245 US7274025B2 (en) | 2002-01-25 | 2003-01-23 | Detector for detecting particle beams and method for the production thereof |
EP03702517A EP1468309B1 (de) | 2002-01-25 | 2003-01-23 | Detektor zur erfassung von teilchenstrahlen und verfahren zur herstellung desselben |
JP2003562665A JP2005515478A (ja) | 2002-01-25 | 2003-01-23 | 粒子ビーム検出用の検出器と該検出器の製造方法 |
AU2003205666A AU2003205666A1 (en) | 2002-01-25 | 2003-01-23 | Detector for detecting particle beams and method for the production thereof |
DE50307871T DE50307871D1 (de) | 2002-01-25 | 2003-01-23 | Detektor zur erfassung von teilchenstrahlen und verfahren zur herstellung desselben |
HK05110656A HK1078936A1 (en) | 2003-01-23 | 2005-11-24 | Detector for detecting particle beams and method for the production thereof |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10203101.0 | 2002-01-25 | ||
DE10203101 | 2002-01-25 | ||
DE10212223A DE10212223A1 (de) | 2002-03-19 | 2002-03-19 | Detektor zur Erfassung von Teilchenstrahen und Verfahren zur Herstellung desselben |
DE10212223.7 | 2002-03-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003062854A2 WO2003062854A2 (de) | 2003-07-31 |
WO2003062854A3 true WO2003062854A3 (de) | 2003-12-04 |
Family
ID=27614253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2003/000705 WO2003062854A2 (de) | 2002-01-25 | 2003-01-23 | Detektor zur erfassung von teilchenstrahlen und verfahren zur herstellung desselben |
Country Status (9)
Country | Link |
---|---|
US (1) | US7274025B2 (de) |
EP (1) | EP1468309B1 (de) |
JP (1) | JP2005515478A (de) |
CN (1) | CN1310039C (de) |
AT (1) | ATE369574T1 (de) |
AU (1) | AU2003205666A1 (de) |
DE (1) | DE50307871D1 (de) |
ES (1) | ES2289258T3 (de) |
WO (1) | WO2003062854A2 (de) |
Families Citing this family (101)
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JP5818542B2 (ja) * | 2010-07-29 | 2015-11-18 | 浜松ホトニクス株式会社 | イオン検出装置 |
CN102636805B (zh) * | 2011-02-15 | 2013-04-24 | 西北核技术研究所 | 半导体探测器γ/X射线电荷收集效率的测量方法及系统 |
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WO2016024564A1 (ja) * | 2014-08-11 | 2016-02-18 | 住友電気工業株式会社 | ダイヤモンド複合体、基板、ダイヤモンド、ダイヤモンドを備える工具およびダイヤモンドの製造方法 |
US9427599B1 (en) * | 2015-02-26 | 2016-08-30 | Pyramid Technical Consultants Inc. | Multi-resolution detectors for measuring and controlling a charged particle pencil beam |
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US10037863B2 (en) | 2016-05-27 | 2018-07-31 | Mark R. Amato | Continuous ion beam kinetic energy dissipater apparatus and method of use thereof |
KR102466332B1 (ko) * | 2018-01-02 | 2022-11-15 | 삼성전자주식회사 | 가스 센서 패키지 |
CN111613679B (zh) * | 2020-06-01 | 2022-03-29 | 清华大学 | 一种电子成像探测器及其制备方法和电子显微成像系统 |
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US5773830A (en) * | 1993-07-20 | 1998-06-30 | Saint-Gobain/Norton Industrial Ceramics Corp. | CVD diamond radiation detector |
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US5397428A (en) * | 1991-12-20 | 1995-03-14 | The University Of North Carolina At Chapel Hill | Nucleation enhancement for chemical vapor deposition of diamond |
JP3194820B2 (ja) * | 1992-09-03 | 2001-08-06 | 株式会社神戸製鋼所 | 配向性ダイヤモンド膜の形成方法 |
US5298749A (en) * | 1992-09-29 | 1994-03-29 | Semiconductor Energy Laboratory Co., Ltd. | Infrared detector utilizing diamond film |
JPH07113870A (ja) * | 1993-10-18 | 1995-05-02 | Kobe Steel Ltd | ダイヤモンド放射線検出素子 |
EP0736780B1 (de) * | 1995-04-07 | 2002-07-24 | Rikagaku Kenkyusho | Monitor und Verfahren zur Bestimmung der Lage eines Röntgenstrahls |
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2003
- 2003-01-23 AT AT03702517T patent/ATE369574T1/de not_active IP Right Cessation
- 2003-01-23 WO PCT/EP2003/000705 patent/WO2003062854A2/de active IP Right Grant
- 2003-01-23 ES ES03702517T patent/ES2289258T3/es not_active Expired - Lifetime
- 2003-01-23 JP JP2003562665A patent/JP2005515478A/ja active Pending
- 2003-01-23 CN CNB038027321A patent/CN1310039C/zh not_active Expired - Fee Related
- 2003-01-23 DE DE50307871T patent/DE50307871D1/de not_active Expired - Lifetime
- 2003-01-23 AU AU2003205666A patent/AU2003205666A1/en not_active Abandoned
- 2003-01-23 EP EP03702517A patent/EP1468309B1/de not_active Expired - Lifetime
- 2003-01-23 US US10/502,245 patent/US7274025B2/en not_active Expired - Fee Related
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US5773830A (en) * | 1993-07-20 | 1998-06-30 | Saint-Gobain/Norton Industrial Ceramics Corp. | CVD diamond radiation detector |
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BAUER C ET AL: "Recent results on chemical-vapor-deposited diamond microstrip detectors", NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, SECTION - A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, NORTH-HOLLAND PUBLISHING COMPANY. AMSTERDAM, NL, vol. 380, no. 1-2, 1 October 1996 (1996-10-01), pages 183 - 185, XP004206410, ISSN: 0168-9002 * |
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Also Published As
Publication number | Publication date |
---|---|
AU2003205666A1 (en) | 2003-09-02 |
CN1623105A (zh) | 2005-06-01 |
US20050116174A1 (en) | 2005-06-02 |
JP2005515478A (ja) | 2005-05-26 |
US7274025B2 (en) | 2007-09-25 |
ATE369574T1 (de) | 2007-08-15 |
EP1468309A2 (de) | 2004-10-20 |
EP1468309B1 (de) | 2007-08-08 |
DE50307871D1 (de) | 2007-09-20 |
CN1310039C (zh) | 2007-04-11 |
ES2289258T3 (es) | 2008-02-01 |
WO2003062854A2 (de) | 2003-07-31 |
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