WO2003062854A3 - Detektor zur erfassung von teilchenstrahlen und verfahren zur herstellung desselben - Google Patents

Detektor zur erfassung von teilchenstrahlen und verfahren zur herstellung desselben Download PDF

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Publication number
WO2003062854A3
WO2003062854A3 PCT/EP2003/000705 EP0300705W WO03062854A3 WO 2003062854 A3 WO2003062854 A3 WO 2003062854A3 EP 0300705 W EP0300705 W EP 0300705W WO 03062854 A3 WO03062854 A3 WO 03062854A3
Authority
WO
WIPO (PCT)
Prior art keywords
detector
production
plate
substrate
particle beams
Prior art date
Application number
PCT/EP2003/000705
Other languages
English (en)
French (fr)
Other versions
WO2003062854A2 (de
Inventor
Eleni Berdermann
Boer Wim De
Original Assignee
Schwerionenforsch Gmbh
Eleni Berdermann
Boer Wim De
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10212223A external-priority patent/DE10212223A1/de
Application filed by Schwerionenforsch Gmbh, Eleni Berdermann, Boer Wim De filed Critical Schwerionenforsch Gmbh
Priority to US10/502,245 priority Critical patent/US7274025B2/en
Priority to EP03702517A priority patent/EP1468309B1/de
Priority to JP2003562665A priority patent/JP2005515478A/ja
Priority to AU2003205666A priority patent/AU2003205666A1/en
Priority to DE50307871T priority patent/DE50307871D1/de
Publication of WO2003062854A2 publication Critical patent/WO2003062854A2/de
Publication of WO2003062854A3 publication Critical patent/WO2003062854A3/de
Priority to HK05110656A priority patent/HK1078936A1/xx

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01TMEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16Measuring radiation intensity
    • G01T1/26Measuring radiation intensity with resistance detectors

Abstract

Die Erfindung betrifft einen Detektor und ein Verfahren zu seiner Herstellung zur Erfassung eines hochenergetischen und hochintensiven Teilchenstrahls (2), der eine kristalline Halbeiterplatte (3) mit Metallbeschichtung (4) aufweist und auf einem Substrat (5) angeordnet ist, wobei die Halbleterplatte (3) eine Diamantplatte (6) ist, die beidseitig mit Metallstrukturen (7, 8) beschichtet ist. Die Metallstrukturen (7, 8) weisen Aluminium und/oder eine Aluminiumlegierung auf und bilden Elektroden, die mit unterschiedlichen elektrischen Potentialen über Leiterbahnen (10) auf dem Substrat (5) verbindbar sind, wobei das Substrat (5) eine Keramikplatte (11) mit einer zentralen Öffnung (24) ist, die von der Diamantplatte (6) abgedeckt wird.
PCT/EP2003/000705 2002-01-25 2003-01-23 Detektor zur erfassung von teilchenstrahlen und verfahren zur herstellung desselben WO2003062854A2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US10/502,245 US7274025B2 (en) 2002-01-25 2003-01-23 Detector for detecting particle beams and method for the production thereof
EP03702517A EP1468309B1 (de) 2002-01-25 2003-01-23 Detektor zur erfassung von teilchenstrahlen und verfahren zur herstellung desselben
JP2003562665A JP2005515478A (ja) 2002-01-25 2003-01-23 粒子ビーム検出用の検出器と該検出器の製造方法
AU2003205666A AU2003205666A1 (en) 2002-01-25 2003-01-23 Detector for detecting particle beams and method for the production thereof
DE50307871T DE50307871D1 (de) 2002-01-25 2003-01-23 Detektor zur erfassung von teilchenstrahlen und verfahren zur herstellung desselben
HK05110656A HK1078936A1 (en) 2003-01-23 2005-11-24 Detector for detecting particle beams and method for the production thereof

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE10203101.0 2002-01-25
DE10203101 2002-01-25
DE10212223A DE10212223A1 (de) 2002-03-19 2002-03-19 Detektor zur Erfassung von Teilchenstrahen und Verfahren zur Herstellung desselben
DE10212223.7 2002-03-19

Publications (2)

Publication Number Publication Date
WO2003062854A2 WO2003062854A2 (de) 2003-07-31
WO2003062854A3 true WO2003062854A3 (de) 2003-12-04

Family

ID=27614253

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2003/000705 WO2003062854A2 (de) 2002-01-25 2003-01-23 Detektor zur erfassung von teilchenstrahlen und verfahren zur herstellung desselben

Country Status (9)

Country Link
US (1) US7274025B2 (de)
EP (1) EP1468309B1 (de)
JP (1) JP2005515478A (de)
CN (1) CN1310039C (de)
AT (1) ATE369574T1 (de)
AU (1) AU2003205666A1 (de)
DE (1) DE50307871D1 (de)
ES (1) ES2289258T3 (de)
WO (1) WO2003062854A2 (de)

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Also Published As

Publication number Publication date
AU2003205666A1 (en) 2003-09-02
CN1623105A (zh) 2005-06-01
US20050116174A1 (en) 2005-06-02
JP2005515478A (ja) 2005-05-26
US7274025B2 (en) 2007-09-25
ATE369574T1 (de) 2007-08-15
EP1468309A2 (de) 2004-10-20
EP1468309B1 (de) 2007-08-08
DE50307871D1 (de) 2007-09-20
CN1310039C (zh) 2007-04-11
ES2289258T3 (es) 2008-02-01
WO2003062854A2 (de) 2003-07-31

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