WO2003046551A3 - Measuring method for measuring the surfaces of biological and/or chemical samples - Google Patents

Measuring method for measuring the surfaces of biological and/or chemical samples Download PDF

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Publication number
WO2003046551A3
WO2003046551A3 PCT/DE2002/004183 DE0204183W WO03046551A3 WO 2003046551 A3 WO2003046551 A3 WO 2003046551A3 DE 0204183 W DE0204183 W DE 0204183W WO 03046551 A3 WO03046551 A3 WO 03046551A3
Authority
WO
WIPO (PCT)
Prior art keywords
measuring
biological
chemical samples
analysed
sample
Prior art date
Application number
PCT/DE2002/004183
Other languages
German (de)
French (fr)
Other versions
WO2003046551A2 (en
Inventor
Sieglinde West
Rudolf Brugger
Franz Drobner
Christian Kassel
Anton Schick
Original Assignee
Siemens Ag
Sieglinde West
Rudolf Brugger
Franz Drobner
Christian Kassel
Anton Schick
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag, Sieglinde West, Rudolf Brugger, Franz Drobner, Christian Kassel, Anton Schick filed Critical Siemens Ag
Publication of WO2003046551A2 publication Critical patent/WO2003046551A2/en
Publication of WO2003046551A3 publication Critical patent/WO2003046551A3/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Abstract

The invention relates to a measuring method for measuring the surfaces of biological and/or chemical samples by using a distance sensor, based on the confocal optical imaging principle, whereby the surface of the sample, which is to be analysed, is measured by sequential scanning of individual surface points. According to two embodiment examples of said invention, a high numeric aperture is selected for the distance sensor and/or a sensitive detector is used, because of the generally low backscattering and reflection of surfaces of biological and/or chemical samples. The present invention also relates to different evaluation methods for determining the light intensity, which is maximally backscattered by the sample to be analysed, depending on the backscatter signal which is detected by said detector.
PCT/DE2002/004183 2001-11-21 2002-11-12 Measuring method for measuring the surfaces of biological and/or chemical samples WO2003046551A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10157050.3 2001-11-21
DE2001157050 DE10157050A1 (en) 2001-11-21 2001-11-21 Method for surface measurement of biological and chemical samples, whereby detected back-scattered light is maximized by using a sensor with high numerical aperture and high sensitivity, together with optimized signal processing

Publications (2)

Publication Number Publication Date
WO2003046551A2 WO2003046551A2 (en) 2003-06-05
WO2003046551A3 true WO2003046551A3 (en) 2003-10-16

Family

ID=7706401

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2002/004183 WO2003046551A2 (en) 2001-11-21 2002-11-12 Measuring method for measuring the surfaces of biological and/or chemical samples

Country Status (2)

Country Link
DE (1) DE10157050A1 (en)
WO (1) WO2003046551A2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19608468A1 (en) * 1996-03-01 1997-09-04 Siemens Ag Optical distance sensor for three-dimensional analysis in quality control testing of semiconductor components
US6108090A (en) * 1995-09-29 2000-08-22 Takaoka Electric Mfg. Co., Ltd. Three-dimensional shape measuring apparatus
US6313915B1 (en) * 1998-08-27 2001-11-06 Murata Manufacturing Co., Ltd. Displacement measuring method and apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6108090A (en) * 1995-09-29 2000-08-22 Takaoka Electric Mfg. Co., Ltd. Three-dimensional shape measuring apparatus
DE19608468A1 (en) * 1996-03-01 1997-09-04 Siemens Ag Optical distance sensor for three-dimensional analysis in quality control testing of semiconductor components
US6313915B1 (en) * 1998-08-27 2001-11-06 Murata Manufacturing Co., Ltd. Displacement measuring method and apparatus

Also Published As

Publication number Publication date
WO2003046551A2 (en) 2003-06-05
DE10157050A1 (en) 2003-05-28

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