WO2003009349A3 - Methods and compositions for chemical mechanical polishing substrates covered with at least two dielectric materials - Google Patents

Methods and compositions for chemical mechanical polishing substrates covered with at least two dielectric materials Download PDF

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Publication number
WO2003009349A3
WO2003009349A3 PCT/US2002/022587 US0222587W WO03009349A3 WO 2003009349 A3 WO2003009349 A3 WO 2003009349A3 US 0222587 W US0222587 W US 0222587W WO 03009349 A3 WO03009349 A3 WO 03009349A3
Authority
WO
WIPO (PCT)
Prior art keywords
compositions
methods
mechanical polishing
chemical mechanical
dielectric materials
Prior art date
Application number
PCT/US2002/022587
Other languages
French (fr)
Other versions
WO2003009349A2 (en
Inventor
Benjamin A Bonner
Anand N Iyer
Deepak N Kumar
Thomas H Osterheld
Wei-Yung Hsu
Yong-Sik R Kim
Christopher W Smith
Huanbo Zhang
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of WO2003009349A2 publication Critical patent/WO2003009349A2/en
Publication of WO2003009349A3 publication Critical patent/WO2003009349A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
    • H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H01L21/76229—Concurrent filling of a plurality of trenches having a different trench shape or dimension, e.g. rectangular and V-shaped trenches, wide and narrow trenches, shallow and deep trenches

Abstract

Methods and compositions are provided for planarizing a substrate surface with reduced or minimal defects in surface topography. In one aspect, a method is provided for processing a substrate including positioning a substrate comprising at least first dielectric material and second dielectric material disposed thereon in a polishing apparatus, polishing the substrate with a first polishing composition having a first selectivity, and polishing the substrate with a second polishing composition having a second selectivity greater than the first selectivity.
PCT/US2002/022587 2001-07-16 2002-07-16 Methods and compositions for chemical mechanical polishing substrates covered with at least two dielectric materials WO2003009349A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US30572101P 2001-07-16 2001-07-16
US60/305,721 2001-07-16
US32506301P 2001-09-26 2001-09-26
US60/325,063 2001-09-26

Publications (2)

Publication Number Publication Date
WO2003009349A2 WO2003009349A2 (en) 2003-01-30
WO2003009349A3 true WO2003009349A3 (en) 2003-10-16

Family

ID=26974747

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/022587 WO2003009349A2 (en) 2001-07-16 2002-07-16 Methods and compositions for chemical mechanical polishing substrates covered with at least two dielectric materials

Country Status (3)

Country Link
US (1) US6811470B2 (en)
TW (1) TWI241228B (en)
WO (1) WO2003009349A2 (en)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7104869B2 (en) * 2001-07-13 2006-09-12 Applied Materials, Inc. Barrier removal at low polish pressure
US7008554B2 (en) * 2001-07-13 2006-03-07 Applied Materials, Inc. Dual reduced agents for barrier removal in chemical mechanical polishing
US6821881B2 (en) * 2001-07-25 2004-11-23 Applied Materials, Inc. Method for chemical mechanical polishing of semiconductor substrates
US7199056B2 (en) * 2002-02-08 2007-04-03 Applied Materials, Inc. Low cost and low dishing slurry for polysilicon CMP
US6884144B2 (en) * 2002-08-16 2005-04-26 Micron Technology, Inc. Methods and systems for planarizing microelectronic devices with Ge-Se-Ag layers
TWI295950B (en) 2002-10-03 2008-04-21 Applied Materials Inc Method for reducing delamination during chemical mechanical polishing
US7063597B2 (en) * 2002-10-25 2006-06-20 Applied Materials Polishing processes for shallow trench isolation substrates
US7300601B2 (en) * 2002-12-10 2007-11-27 Advanced Technology Materials, Inc. Passivative chemical mechanical polishing composition for copper film planarization
JP4707311B2 (en) * 2003-08-08 2011-06-22 花王株式会社 Magnetic disk substrate
US20050054277A1 (en) * 2003-09-04 2005-03-10 Teng-Chun Tsai Polishing pad and method of polishing wafer
US7040965B2 (en) * 2003-09-18 2006-05-09 Micron Technology, Inc. Methods for removing doped silicon material from microfeature workpieces
US6997788B2 (en) * 2003-10-01 2006-02-14 Mosel Vitelic, Inc. Multi-tool, multi-slurry chemical mechanical polishing
USPP17182P3 (en) * 2003-10-02 2006-11-07 Plantas De Navarra S.A. Peach tree plant named ‘Plawhite 5’
US7314578B2 (en) * 2003-12-12 2008-01-01 Samsung Electronics Co., Ltd. Slurry compositions and CMP methods using the same
KR100640600B1 (en) * 2003-12-12 2006-11-01 삼성전자주식회사 Slurry compositions, and fabrication method of semiconductor device including CMPchemical mechanical polishing process using the same
US20050148289A1 (en) * 2004-01-06 2005-07-07 Cabot Microelectronics Corp. Micromachining by chemical mechanical polishing
US20060021974A1 (en) * 2004-01-29 2006-02-02 Applied Materials, Inc. Method and composition for polishing a substrate
US7390744B2 (en) * 2004-01-29 2008-06-24 Applied Materials, Inc. Method and composition for polishing a substrate
US7390748B2 (en) * 2004-08-05 2008-06-24 International Business Machines Corporation Method of forming a polishing inhibiting layer using a slurry having an additive
US20060088976A1 (en) * 2004-10-22 2006-04-27 Applied Materials, Inc. Methods and compositions for chemical mechanical polishing substrates
US20060097219A1 (en) * 2004-11-08 2006-05-11 Applied Materials, Inc. High selectivity slurry compositions for chemical mechanical polishing
US20060157450A1 (en) * 2005-01-20 2006-07-20 Hsin-Kun Chu Method for improving hss cmp performance
US20060169674A1 (en) * 2005-01-28 2006-08-03 Daxin Mao Method and composition for polishing a substrate
US20060196778A1 (en) * 2005-01-28 2006-09-07 Renhe Jia Tungsten electroprocessing
TWI421931B (en) * 2005-04-28 2014-01-01 Advanced Tech Materials Method of passivating chemical mechanical polishing compositions for copper film planarization processes
US20060252267A1 (en) * 2005-05-06 2006-11-09 Wang Wai S Topology-selective oxide CMP
US7264539B2 (en) * 2005-07-13 2007-09-04 Micron Technology, Inc. Systems and methods for removing microfeature workpiece surface defects
TW200720017A (en) * 2005-09-19 2007-06-01 Rohm & Haas Elect Mat Water-based polishing pads having improved adhesion properties and methods of manufacture
KR100693789B1 (en) * 2005-10-18 2007-03-12 주식회사 하이닉스반도체 Method for manufacturing semiconductor device
US7544618B2 (en) * 2006-05-18 2009-06-09 Macronix International Co., Ltd. Two-step chemical mechanical polishing process
KR100835406B1 (en) * 2006-11-09 2008-06-04 동부일렉트로닉스 주식회사 Method for manufacturing iso layer of semiconductor device
WO2008095078A1 (en) * 2007-01-31 2008-08-07 Advanced Technology Materials, Inc. Stabilization of polymer-silica dispersions for chemical mechanical polishing slurry applications
US20080242198A1 (en) * 2007-03-26 2008-10-02 United Microelectronics Corp. Multi-step planarizing and polishing method
TWI446425B (en) * 2007-08-29 2014-07-21 Applied Materials Inc High throughput low topography copper cmp process
US9583359B2 (en) * 2014-04-04 2017-02-28 Fujifilm Planar Solutions, LLC Polishing compositions and methods for selectively polishing silicon nitride over silicon oxide films

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5395801A (en) * 1993-09-29 1995-03-07 Micron Semiconductor, Inc. Chemical-mechanical polishing processes of planarizing insulating layers
WO1999046081A1 (en) * 1998-03-11 1999-09-16 Strasbaugh Multi-step chemical mechanical polishing process and device
US5981394A (en) * 1996-09-30 1999-11-09 Kabushiki Kaisha Toshiba Chemical mechanical polishing method, polisher used in chemical mechanical polishing and method of manufacturing semiconductor device
WO2000002235A1 (en) * 1998-07-06 2000-01-13 Strasbaugh Method of planarizing integrated circuits
JP2000068371A (en) * 1998-08-26 2000-03-03 Mitsubishi Electric Corp Manufacture of semiconductor device
JP2000156360A (en) * 1998-06-30 2000-06-06 Fujitsu Ltd Manufacture of semiconductor device
US6114249A (en) * 1998-03-10 2000-09-05 International Business Machines Corporation Chemical mechanical polishing of multiple material substrates and slurry having improved selectivity
EP1061111A1 (en) * 1998-02-24 2000-12-20 Showa Denko Kabushiki Kaisha Abrasive composition for polishing semiconductor device and process for producing semiconductor device with the same
EP1068928A2 (en) * 1999-02-11 2001-01-17 Applied Materials, Inc. Chemical mechanical polishing processes and components
US20010036738A1 (en) * 1998-06-30 2001-11-01 Masanobu Hatanaka Semiconductor device manufacturing method

Family Cites Families (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4169337A (en) 1978-03-30 1979-10-02 Nalco Chemical Company Process for polishing semi-conductor materials
US4588421A (en) 1984-10-15 1986-05-13 Nalco Chemical Company Aqueous silica compositions for polishing silicon wafers
US4752628A (en) 1987-05-15 1988-06-21 Nalco Chemical Company Concentrated lapping slurries
US5152917B1 (en) 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5378251A (en) 1991-02-06 1995-01-03 Minnesota Mining And Manufacturing Company Abrasive articles and methods of making and using same
US5244534A (en) 1992-01-24 1993-09-14 Micron Technology, Inc. Two-step chemical mechanical polishing process for producing flush and protruding tungsten plugs
JP3649442B2 (en) 1992-12-17 2005-05-18 ミネソタ・マイニング・アンド・マニュファクチュアリング・カンパニー Reduced viscosity slurry, abrasive article made therefrom, and method for producing the article
US5342419A (en) 1992-12-31 1994-08-30 Minnesota Mining And Manufacturing Company Abrasive composites having a controlled rate of erosion, articles incorporating same, and methods of making and using same
US5656097A (en) 1993-10-20 1997-08-12 Verteq, Inc. Semiconductor wafer cleaning system
US5453312A (en) 1993-10-29 1995-09-26 Minnesota Mining And Manufacturing Company Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface
US5340370A (en) 1993-11-03 1994-08-23 Intel Corporation Slurries for chemical mechanical polishing
US5795495A (en) * 1994-04-25 1998-08-18 Micron Technology, Inc. Method of chemical mechanical polishing for dielectric layers
JP3397501B2 (en) 1994-07-12 2003-04-14 株式会社東芝 Abrasive and polishing method
TW274625B (en) 1994-09-30 1996-04-21 Hitachi Seisakusyo Kk
US5996594A (en) 1994-11-30 1999-12-07 Texas Instruments Incorporated Post-chemical mechanical planarization clean-up process using post-polish scrubbing
US5614444A (en) 1995-06-06 1997-03-25 Sematech, Inc. Method of using additives with silica-based slurries to enhance selectivity in metal CMP
JP3311203B2 (en) 1995-06-13 2002-08-05 株式会社東芝 Semiconductor device manufacturing method, semiconductor manufacturing apparatus, and chemical mechanical polishing method for semiconductor wafer
US5958794A (en) 1995-09-22 1999-09-28 Minnesota Mining And Manufacturing Company Method of modifying an exposed surface of a semiconductor wafer
US5738574A (en) 1995-10-27 1998-04-14 Applied Materials, Inc. Continuous processing system for chemical mechanical polishing
US5769689A (en) 1996-02-28 1998-06-23 Rodel, Inc. Compositions and methods for polishing silica, silicates, and silicon nitride
US5893754A (en) 1996-05-21 1999-04-13 Micron Technology, Inc. Method for chemical-mechanical planarization of stop-on-feature semiconductor wafers
US5827781A (en) 1996-07-17 1998-10-27 Micron Technology, Inc. Planarization slurry including a dispersant and method of using same
US5916819A (en) 1996-07-17 1999-06-29 Micron Technology, Inc. Planarization fluid composition chelating agents and planarization method using same
US5692950A (en) 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
US5932486A (en) 1996-08-16 1999-08-03 Rodel, Inc. Apparatus and methods for recirculating chemical-mechanical polishing of semiconductor wafers
US6039891A (en) 1996-09-24 2000-03-21 Cabot Corporation Multi-oxidizer precursor for chemical mechanical polishing
US5738800A (en) 1996-09-27 1998-04-14 Rodel, Inc. Composition and method for polishing a composite of silica and silicon nitride
AU4323197A (en) 1996-09-30 1998-04-24 Hitachi Chemical Company, Ltd. Cerium oxide abrasive and method of abrading substrates
US5968239A (en) 1996-11-12 1999-10-19 Kabushiki Kaisha Toshiba Polishing slurry
US5759917A (en) 1996-12-30 1998-06-02 Cabot Corporation Composition for oxide CMP
TW426556B (en) 1997-01-24 2001-03-21 United Microelectronics Corp Method of cleaning slurry remnants left on a chemical-mechanical polish machine
JPH10213959A (en) 1997-01-30 1998-08-11 Konica Corp Developer replenishment device and image forming device
US5922136A (en) 1997-03-28 1999-07-13 Taiwan Semiconductor Manufacturing Company, Ltd. Post-CMP cleaner apparatus and method
US5817567A (en) 1997-04-07 1998-10-06 Taiwan Semiconductor Manufacturing Company Ltd. Shallow trench isolation method
JP3359535B2 (en) 1997-04-25 2002-12-24 三井金属鉱業株式会社 Method for manufacturing semiconductor device
ATE445230T1 (en) 1997-04-30 2009-10-15 Minnesota Mining & Mfg METHOD FOR PLANARIZING THE SURFACE OF A SEMICONDUCTOR WAFER
US6062952A (en) * 1997-06-05 2000-05-16 Robinson; Karl M. Planarization process with abrasive polishing slurry that is selective to a planarized surface
US6099604A (en) 1997-08-21 2000-08-08 Micron Technology, Inc. Slurry with chelating agent for chemical-mechanical polishing of a semiconductor wafer and methods related thereto
JPH11111656A (en) 1997-09-30 1999-04-23 Nec Corp Manufacture of semiconductor device
US6294105B1 (en) 1997-12-23 2001-09-25 International Business Machines Corporation Chemical mechanical polishing slurry and method for polishing metal/oxide layers
US6019806A (en) 1998-01-08 2000-02-01 Sees; Jennifer A. High selectivity slurry for shallow trench isolation processing
US6143663A (en) 1998-01-22 2000-11-07 Cypress Semiconductor Corporation Employing deionized water and an abrasive surface to polish a semiconductor topography
US6054379A (en) 1998-02-11 2000-04-25 Applied Materials, Inc. Method of depositing a low k dielectric with organo silane
US6091131A (en) 1998-04-28 2000-07-18 International Business Machines Corporation Integrated circuit having crack stop for interlevel dielectric layers
US6271047B1 (en) * 1998-05-21 2001-08-07 Nikon Corporation Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same
US6162368A (en) 1998-06-13 2000-12-19 Applied Materials, Inc. Technique for chemical mechanical polishing silicon
JP3998813B2 (en) 1998-06-15 2007-10-31 株式会社フジミインコーポレーテッド Polishing composition
US6063306A (en) 1998-06-26 2000-05-16 Cabot Corporation Chemical mechanical polishing slurry useful for copper/tantalum substrate
JP2000080350A (en) 1998-09-07 2000-03-21 Speedfam-Ipec Co Ltd Abrasive composition and polishing method using same
US6149830A (en) 1998-09-17 2000-11-21 Siemens Aktiengesellschaft Composition and method for reducing dishing in patterned metal during CMP process
US6206756B1 (en) 1998-11-10 2001-03-27 Micron Technology, Inc. Tungsten chemical-mechanical polishing process using a fixed abrasive polishing pad and a tungsten layer chemical-mechanical polishing solution specifically adapted for chemical-mechanical polishing with a fixed abrasive pad
US6276996B1 (en) 1998-11-10 2001-08-21 Micron Technology, Inc. Copper chemical-mechanical polishing process using a fixed abrasive polishing pad and a copper layer chemical-mechanical polishing solution specifically adapted for chemical-mechanical polishing with a fixed abrasive pad
JP2002530861A (en) 1998-11-18 2002-09-17 ロデール ホールディングス インコーポレイテッド Method for reducing dishing speed during CMP in metal semiconductor structure
US6046112A (en) 1998-12-14 2000-04-04 Taiwan Semiconductor Manufacturing Company Chemical mechanical polishing slurry
WO2000036037A1 (en) 1998-12-17 2000-06-22 Rodel Holdings, Inc. Compositions and methods for polishing semiconductor wafers
GB9903880D0 (en) 1999-02-19 1999-04-14 Univ Southampton Optical device
WO2000056391A1 (en) 1999-03-25 2000-09-28 Arteria Medical Science, Inc. Device and method of guide wire balloon inflation and deflation to prevent cerebral embolization during carotid stenting
US6234875B1 (en) 1999-06-09 2001-05-22 3M Innovative Properties Company Method of modifying a surface
US6468910B1 (en) 1999-12-08 2002-10-22 Ramanathan Srinivasan Slurry for chemical mechanical polishing silicon dioxide
US6258721B1 (en) 1999-12-27 2001-07-10 General Electric Company Diamond slurry for chemical-mechanical planarization of semiconductor wafers
US6783432B2 (en) * 2001-06-04 2004-08-31 Applied Materials Inc. Additives for pressure sensitive polishing compositions

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5395801A (en) * 1993-09-29 1995-03-07 Micron Semiconductor, Inc. Chemical-mechanical polishing processes of planarizing insulating layers
US5981394A (en) * 1996-09-30 1999-11-09 Kabushiki Kaisha Toshiba Chemical mechanical polishing method, polisher used in chemical mechanical polishing and method of manufacturing semiconductor device
EP1061111A1 (en) * 1998-02-24 2000-12-20 Showa Denko Kabushiki Kaisha Abrasive composition for polishing semiconductor device and process for producing semiconductor device with the same
US6114249A (en) * 1998-03-10 2000-09-05 International Business Machines Corporation Chemical mechanical polishing of multiple material substrates and slurry having improved selectivity
WO1999046081A1 (en) * 1998-03-11 1999-09-16 Strasbaugh Multi-step chemical mechanical polishing process and device
JP2000156360A (en) * 1998-06-30 2000-06-06 Fujitsu Ltd Manufacture of semiconductor device
US20010036738A1 (en) * 1998-06-30 2001-11-01 Masanobu Hatanaka Semiconductor device manufacturing method
WO2000002235A1 (en) * 1998-07-06 2000-01-13 Strasbaugh Method of planarizing integrated circuits
JP2000068371A (en) * 1998-08-26 2000-03-03 Mitsubishi Electric Corp Manufacture of semiconductor device
EP1068928A2 (en) * 1999-02-11 2001-01-17 Applied Materials, Inc. Chemical mechanical polishing processes and components

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 06 22 September 2000 (2000-09-22) *
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 09 13 October 2000 (2000-10-13) *

Also Published As

Publication number Publication date
TWI241228B (en) 2005-10-11
US6811470B2 (en) 2004-11-02
WO2003009349A2 (en) 2003-01-30
US20030036339A1 (en) 2003-02-20

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