WO2003008984A3 - Test head docking system and method - Google Patents
Test head docking system and method Download PDFInfo
- Publication number
- WO2003008984A3 WO2003008984A3 PCT/US2002/022193 US0222193W WO03008984A3 WO 2003008984 A3 WO2003008984 A3 WO 2003008984A3 US 0222193 W US0222193 W US 0222193W WO 03008984 A3 WO03008984 A3 WO 03008984A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- test head
- docking system
- handling apparatus
- head docking
- electronic test
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
Abstract
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003514271A JP4084301B2 (en) | 2001-07-16 | 2002-07-12 | System for docking an electronic test head with a handling device and method for docking an electronic test head with a handling device |
KR10-2004-7000629A KR20040028925A (en) | 2001-07-16 | 2002-07-12 | Test head docking system and method |
EP02752302A EP1410048B1 (en) | 2001-07-16 | 2002-07-12 | Test head docking system and method |
AT02752302T ATE493665T1 (en) | 2001-07-16 | 2002-07-12 | SYSTEM AND METHOD FOR COUPLING A TEST HEAD |
DE60238767T DE60238767D1 (en) | 2001-07-16 | 2002-07-12 | SYSTEM AND METHOD FOR COUPLING A TEST HEAD |
US10/484,014 US7109733B2 (en) | 2001-07-16 | 2002-07-12 | Test head docking system and method |
AU2002355083A AU2002355083A1 (en) | 2001-07-16 | 2002-07-12 | Test head docking system and method |
HK05101465A HK1068954A1 (en) | 2001-07-16 | 2005-02-22 | Test head docking system and method |
US11/503,226 US7466122B2 (en) | 2001-07-16 | 2006-08-11 | Test head docking system and method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US30563301P | 2001-07-16 | 2001-07-16 | |
US60/305,633 | 2001-07-16 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10484014 A-371-Of-International | 2002-07-12 | ||
US11/503,226 Division US7466122B2 (en) | 2001-07-16 | 2006-08-11 | Test head docking system and method |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003008984A2 WO2003008984A2 (en) | 2003-01-30 |
WO2003008984A3 true WO2003008984A3 (en) | 2003-10-02 |
Family
ID=23181633
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/022193 WO2003008984A2 (en) | 2001-07-16 | 2002-07-12 | Test head docking system and method |
Country Status (12)
Country | Link |
---|---|
US (2) | US7109733B2 (en) |
EP (1) | EP1410048B1 (en) |
JP (1) | JP4084301B2 (en) |
KR (1) | KR20040028925A (en) |
CN (1) | CN1280635C (en) |
AT (1) | ATE493665T1 (en) |
AU (1) | AU2002355083A1 (en) |
DE (1) | DE60238767D1 (en) |
HK (1) | HK1068954A1 (en) |
MY (2) | MY140532A (en) |
TW (1) | TWI223074B (en) |
WO (1) | WO2003008984A2 (en) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6408500B1 (en) * | 2000-09-15 | 2002-06-25 | James Orsillo | Method of retrofitting a probe station |
US7598725B2 (en) * | 2005-12-30 | 2009-10-06 | Teradyne, Inc. | Alignment receptacle of a sensor adapted to interact with a pin to generate position data along at least two transverse axes for docking a test head |
WO2008137182A2 (en) * | 2007-05-07 | 2008-11-13 | Intest Corporation | Cradle and cable handler for a test head manipulator |
US7847570B2 (en) | 2007-10-19 | 2010-12-07 | Teradyne, Inc. | Laser targeting mechanism |
US7733081B2 (en) * | 2007-10-19 | 2010-06-08 | Teradyne, Inc. | Automated test equipment interface |
DE102007050920B3 (en) * | 2007-10-23 | 2008-12-04 | Miele & Cie. Kg | Dosing device for fluid or semi-fluid curing agent e.g. washing agent, of washing machine, has pump provoking predetermined stable amount of curing agent per hub as partial quantity of amount to be dosed from cartridge |
US8424594B2 (en) * | 2007-12-10 | 2013-04-23 | Presto Engineering, Inc. | Apparatus for thermal control in the analysis of electronic devices |
SG192466A1 (en) * | 2008-07-14 | 2013-08-30 | Intest Corp | Test head docking system and method |
DE102011014148B4 (en) * | 2011-03-16 | 2016-06-09 | Esmo Ag | Docking device |
US9134357B1 (en) | 2011-03-25 | 2015-09-15 | Maxim Integrated, Inc. | Universal direct docking at probe test |
EP2732298A1 (en) * | 2011-07-12 | 2014-05-21 | Intest Corporation | Method and apparatus for docking a test head with a peripheral |
DE102012014812A1 (en) * | 2012-07-26 | 2014-01-30 | Etel S.A. | Apparatus for testing wafers |
MY179046A (en) * | 2013-09-30 | 2020-10-26 | Intest Corp | Method and apparatus for docking a test head with a peripheral |
CN105372511A (en) * | 2014-08-25 | 2016-03-02 | 研祥智能科技股份有限公司 | Automatic connection device and machine vision detection system |
KR101882209B1 (en) * | 2016-03-23 | 2018-07-27 | 리노공업주식회사 | Coaxial Test Socket Assembly |
CN108656442A (en) * | 2017-03-31 | 2018-10-16 | 佛吉亚(中国)投资有限公司 | A kind of injection molding molding machine and its application method for air bag passage |
TWI667484B (en) * | 2018-08-03 | 2019-08-01 | 矽品精密工業股份有限公司 | Testing device |
KR102033560B1 (en) * | 2018-11-26 | 2019-10-17 | (주)케미텍 | A Test Device Of Semi-Conductor |
KR102179191B1 (en) | 2019-04-24 | 2020-11-18 | 티비에스테스트테크놀러지스코리아 주식회사 | Universal-type Semiconductor Device Test Apparatus |
TWI726555B (en) * | 2019-12-27 | 2021-05-01 | 致茂電子股份有限公司 | Locking mechanism for a press head and electronic device testing apparatus comprising the same |
TWI750984B (en) * | 2020-12-30 | 2021-12-21 | 致茂電子股份有限公司 | An automated test system using bridge connection |
KR102520852B1 (en) * | 2022-10-14 | 2023-04-13 | 주식회사 유니밴스 | Top Reinforcement Plate for Probe Card |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5600285A (en) * | 1994-11-18 | 1997-02-04 | Unisys Corporation | Monolithic stripline crossover coupler having a pyramidal grounding structure |
US6043667A (en) * | 1997-04-17 | 2000-03-28 | International Business Machines Corporation | Substrate tester location clamping, sensing, and contacting method and apparatus |
WO2002039127A2 (en) * | 2000-11-07 | 2002-05-16 | Teradyne, Inc. | Test head actuation system with positioning and compliant modes |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4527942A (en) * | 1982-08-25 | 1985-07-09 | Intest Corporation | Electronic test head positioner for test systems |
US4705447A (en) * | 1983-08-11 | 1987-11-10 | Intest Corporation | Electronic test head positioner for test systems |
US4715574A (en) * | 1985-11-12 | 1987-12-29 | Intest Corporation | Safety lock for materials handling system |
US4893074A (en) * | 1988-05-13 | 1990-01-09 | Intest Corporation | Electronic device testing system |
US5030869A (en) * | 1990-07-25 | 1991-07-09 | Intest Corporation | Device testing system with cable pivot |
US5241870A (en) * | 1991-07-22 | 1993-09-07 | Intest Corporation | Test head manipulator |
US5600258A (en) | 1993-09-15 | 1997-02-04 | Intest Corporation | Method and apparatus for automated docking of a test head to a device handler |
US5440943A (en) * | 1993-09-15 | 1995-08-15 | Intest Corporation | Electronic test head manipulator |
US6057695A (en) * | 1993-09-15 | 2000-05-02 | Intest Corporation | Method and apparatus for automated docking of a test head to a device handler |
US5744974A (en) * | 1993-09-17 | 1998-04-28 | Xilinx, Inc. | Test head interface with vacuum-activated interconnection components |
TW273635B (en) | 1994-09-01 | 1996-04-01 | Aesop | |
US5982182A (en) * | 1994-09-01 | 1999-11-09 | Chiu; Michael A. | Interface apparatus for automatic test equipment with positioning modules incorporating kinematic surfaces |
ATE205303T1 (en) * | 1995-02-23 | 2001-09-15 | Aesop Inc | MANIPULATOR FOR A TEST HEAD OF AN AUTOMATIC TEST SYSTEM |
US5608334A (en) * | 1995-04-20 | 1997-03-04 | Intest Corporation | Device testing system with cable pivot and method of installation |
US5670891A (en) * | 1995-06-07 | 1997-09-23 | Advanced Micro Devices, Inc. | Structures to extract defect size information of poly and source-drain semiconductor devices and method for making the same |
US5654631A (en) * | 1995-11-15 | 1997-08-05 | Xilinx, Inc. | Vacuum lock handler and tester interface for semiconductor devices |
US5678944A (en) * | 1995-12-07 | 1997-10-21 | Aesop, Inc. | Flexural mount kinematic couplings and method |
US5900736A (en) * | 1997-07-28 | 1999-05-04 | Transtech Systems, Inc. | Paving material density indicator and method using capacitance |
US5949002A (en) * | 1997-11-12 | 1999-09-07 | Teradyne, Inc. | Manipulator for automatic test equipment with active compliance |
US6407541B1 (en) * | 1999-07-30 | 2002-06-18 | Credence Systems Corporation | Docking mechanism for semiconductor tester |
US6617867B2 (en) * | 2000-11-29 | 2003-09-09 | Teradyne, Inc. | Mechanism for clamping device interface board to peripheral |
US6897645B2 (en) * | 2001-12-29 | 2005-05-24 | Vincent Hing Chung So | Docking system and method for docking in automated testing systems |
-
2002
- 2002-07-12 KR KR10-2004-7000629A patent/KR20040028925A/en not_active Application Discontinuation
- 2002-07-12 DE DE60238767T patent/DE60238767D1/en not_active Expired - Lifetime
- 2002-07-12 JP JP2003514271A patent/JP4084301B2/en not_active Expired - Fee Related
- 2002-07-12 US US10/484,014 patent/US7109733B2/en not_active Expired - Lifetime
- 2002-07-12 WO PCT/US2002/022193 patent/WO2003008984A2/en active Application Filing
- 2002-07-12 AT AT02752302T patent/ATE493665T1/en not_active IP Right Cessation
- 2002-07-12 EP EP02752302A patent/EP1410048B1/en not_active Expired - Lifetime
- 2002-07-12 AU AU2002355083A patent/AU2002355083A1/en not_active Abandoned
- 2002-07-12 CN CNB028153995A patent/CN1280635C/en not_active Expired - Fee Related
- 2002-07-15 MY MYPI20081803A patent/MY140532A/en unknown
- 2002-07-15 MY MYPI20022680A patent/MY135759A/en unknown
- 2002-07-16 TW TW091115832A patent/TWI223074B/en not_active IP Right Cessation
-
2005
- 2005-02-22 HK HK05101465A patent/HK1068954A1/en not_active IP Right Cessation
-
2006
- 2006-08-11 US US11/503,226 patent/US7466122B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5600285A (en) * | 1994-11-18 | 1997-02-04 | Unisys Corporation | Monolithic stripline crossover coupler having a pyramidal grounding structure |
US6043667A (en) * | 1997-04-17 | 2000-03-28 | International Business Machines Corporation | Substrate tester location clamping, sensing, and contacting method and apparatus |
WO2002039127A2 (en) * | 2000-11-07 | 2002-05-16 | Teradyne, Inc. | Test head actuation system with positioning and compliant modes |
Also Published As
Publication number | Publication date |
---|---|
EP1410048A2 (en) | 2004-04-21 |
US7466122B2 (en) | 2008-12-16 |
JP4084301B2 (en) | 2008-04-30 |
AU2002355083A1 (en) | 2003-03-03 |
MY140532A (en) | 2009-12-31 |
WO2003008984A2 (en) | 2003-01-30 |
MY135759A (en) | 2008-06-30 |
EP1410048B1 (en) | 2010-12-29 |
KR20040028925A (en) | 2004-04-03 |
JP2004536311A (en) | 2004-12-02 |
US20070013405A1 (en) | 2007-01-18 |
CN1539083A (en) | 2004-10-20 |
US20040239353A1 (en) | 2004-12-02 |
HK1068954A1 (en) | 2005-05-06 |
DE60238767D1 (en) | 2011-02-10 |
ATE493665T1 (en) | 2011-01-15 |
CN1280635C (en) | 2006-10-18 |
TWI223074B (en) | 2004-11-01 |
US7109733B2 (en) | 2006-09-19 |
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