WO2002063657A3 - Microelectronic mechanical system (mems) switch and method of fabrication - Google Patents

Microelectronic mechanical system (mems) switch and method of fabrication Download PDF

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Publication number
WO2002063657A3
WO2002063657A3 PCT/US2001/050731 US0150731W WO02063657A3 WO 2002063657 A3 WO2002063657 A3 WO 2002063657A3 US 0150731 W US0150731 W US 0150731W WO 02063657 A3 WO02063657 A3 WO 02063657A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems
vane
switch
mechanical system
pull
Prior art date
Application number
PCT/US2001/050731
Other languages
French (fr)
Other versions
WO2002063657A2 (en
WO2002063657A8 (en
WO2002063657A9 (en
Inventor
Daniel Bechtle
Gordon C Taylor
Ayre Rosen
Original Assignee
Sarnoff Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sarnoff Corp filed Critical Sarnoff Corp
Publication of WO2002063657A2 publication Critical patent/WO2002063657A2/en
Publication of WO2002063657A8 publication Critical patent/WO2002063657A8/en
Publication of WO2002063657A9 publication Critical patent/WO2002063657A9/en
Publication of WO2002063657A3 publication Critical patent/WO2002063657A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0008—Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P9/00—Delay lines of the waveguide type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Abstract

A microelectronic mechanical system (MEMS) switch includes a vane (122) formed over a substrate for electrically coupling an input line (102) to an output line (104) formed on the substrate. The vane includes flexible hinges (126), which support the vane from the input line and allow the vane to rotate about a pivot axis. The substrate includes pull-down (112) and pull-back (110) electrodes to actuate the MEMS switch. The pull-back electrode allows the present invention to overcome stiction effects.
PCT/US2001/050731 2000-11-07 2001-11-07 Microelectronic mechanical system (mems) switch and method of fabrication WO2002063657A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US24634000P 2000-11-07 2000-11-07
US60/246,340 2000-11-07
US09/993,095 US6535091B2 (en) 2000-11-07 2001-11-06 Microelectronic mechanical systems (MEMS) switch and method of fabrication
US09/993,095 2001-11-06

Publications (4)

Publication Number Publication Date
WO2002063657A2 WO2002063657A2 (en) 2002-08-15
WO2002063657A8 WO2002063657A8 (en) 2002-09-12
WO2002063657A9 WO2002063657A9 (en) 2002-10-17
WO2002063657A3 true WO2002063657A3 (en) 2003-05-15

Family

ID=26937906

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/050731 WO2002063657A2 (en) 2000-11-07 2001-11-07 Microelectronic mechanical system (mems) switch and method of fabrication

Country Status (2)

Country Link
US (1) US6535091B2 (en)
WO (1) WO2002063657A2 (en)

Families Citing this family (32)

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US7358579B2 (en) * 2001-08-30 2008-04-15 Intel Corporation Reducing the actuation voltage of microelectromechanical system switches
US6919784B2 (en) * 2001-10-18 2005-07-19 The Board Of Trustees Of The University Of Illinois High cycle MEMS device
US6856068B2 (en) * 2002-02-28 2005-02-15 Pts Corporation Systems and methods for overcoming stiction
JP3818176B2 (en) * 2002-03-06 2006-09-06 株式会社村田製作所 RFMEMS element
WO2004013898A2 (en) * 2002-08-03 2004-02-12 Siverta, Inc. Sealed integral mems switch
US20040121505A1 (en) * 2002-09-30 2004-06-24 Magfusion, Inc. Method for fabricating a gold contact on a microswitch
US6876283B1 (en) * 2003-07-11 2005-04-05 Iowa State University Research Foundation, Inc. Tapered-width micro-cantilevers and micro-bridges
CN100520687C (en) * 2003-07-21 2009-07-29 皇家飞利浦电子股份有限公司 Touch sensitive display for a portable device and the portable device
US20050062565A1 (en) * 2003-09-18 2005-03-24 Chia-Shing Chou Method of using a metal platform for making a highly reliable and reproducible metal contact micro-relay MEMS switch
US7388459B2 (en) * 2003-10-28 2008-06-17 Medtronic, Inc. MEMs switching circuit and method for an implantable medical device
GB0330010D0 (en) 2003-12-24 2004-01-28 Cavendish Kinetics Ltd Method for containing a device and a corresponding device
US7816999B2 (en) * 2004-04-12 2010-10-19 Siverta, Inc. Single-pole double-throw MEMS switch
US7381583B1 (en) * 2004-05-24 2008-06-03 The United States Of America As Represented By The Secretary Of The Air Force MEMS RF switch integrated process
GB0413341D0 (en) 2004-06-15 2004-07-21 Cavendish Kinetics B V Arrangement and method for controlling a micromechanical element
US7088153B2 (en) * 2004-08-05 2006-08-08 International Business Machines Corporation Data storage latch structure with micro-electromechanical switch
US20060092583A1 (en) * 2004-10-01 2006-05-04 Alahmad Mahmoud A Switch array and power management system for batteries and other energy storage elements
KR100619110B1 (en) * 2004-10-21 2006-09-04 한국전자통신연구원 Micro-electro mechanical systems switch and a method of fabricating the same
US7820470B2 (en) * 2005-07-15 2010-10-26 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method of micro-electro-mechanical device
GB0523715D0 (en) * 2005-11-22 2005-12-28 Cavendish Kinetics Ltd Method of minimising contact area
KR100744543B1 (en) * 2005-12-08 2007-08-01 한국전자통신연구원 Micro-electro mechanical systems switch and method of fabricating the same switch
US8695266B2 (en) * 2005-12-22 2014-04-15 Larry Moore Reference beam generating apparatus
US7662698B2 (en) * 2006-11-07 2010-02-16 Raytheon Company Transistor having field plate
DE102007013102A1 (en) * 2007-03-14 2008-09-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Micromechanical switch device with mechanical power amplification
US7989262B2 (en) 2008-02-22 2011-08-02 Cavendish Kinetics, Ltd. Method of sealing a cavity
US7993950B2 (en) 2008-04-30 2011-08-09 Cavendish Kinetics, Ltd. System and method of encapsulation
US8289674B2 (en) * 2009-03-17 2012-10-16 Cavendish Kinetics, Ltd. Moving a free-standing structure between high and low adhesion states
US9758366B2 (en) 2015-12-15 2017-09-12 International Business Machines Corporation Small wafer area MEMS switch
US10594030B2 (en) 2017-02-01 2020-03-17 General Electric Company True time delay module and beam former having plural delay lines selectively connected by plural switching elements including one or more intermediate switching element
US10211902B1 (en) 2017-10-13 2019-02-19 General Electric Company True time delay beam former and method of operation
US10784576B2 (en) 2017-10-13 2020-09-22 General Electric Company True time delay beam former module and method of making the same
US10326200B2 (en) 2017-10-18 2019-06-18 General Electric Company High impedance RF MEMS transmission devices and method of making the same
WO2022245797A1 (en) * 2021-05-18 2022-11-24 Analog Devices International Unlimited Company Improved mems switch for rf applications

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US5619061A (en) * 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
US5661591A (en) * 1995-09-29 1997-08-26 Texas Instruments Incorporated Optical switch having an analog beam for steering light
US5880921A (en) * 1997-04-28 1999-03-09 Rockwell Science Center, Llc Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology
US6069540A (en) * 1999-04-23 2000-05-30 Trw Inc. Micro-electro system (MEMS) switch
US6307452B1 (en) * 1999-09-16 2001-10-23 Motorola, Inc. Folded spring based micro electromechanical (MEM) RF switch

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US5552924A (en) 1994-11-14 1996-09-03 Texas Instruments Incorporated Micromechanical device having an improved beam
US5579151A (en) 1995-02-17 1996-11-26 Texas Instruments Incorporated Spatial light modulator
US5578976A (en) 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch
US5844238A (en) 1996-03-27 1998-12-01 David Sarnoff Research Center, Inc. Infrared imager using room temperature capacitance sensor
US6140646A (en) 1998-12-17 2000-10-31 Sarnoff Corporation Direct view infrared MEMS structure
US6218911B1 (en) 1999-07-13 2001-04-17 Trw Inc. Planar airbridge RF terminal MEMS switch
US6230566B1 (en) 1999-10-01 2001-05-15 The Regents Of The University Of California Micromachined low frequency rocking accelerometer with capacitive pickoff

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US5619061A (en) * 1993-07-27 1997-04-08 Texas Instruments Incorporated Micromechanical microwave switching
US5661591A (en) * 1995-09-29 1997-08-26 Texas Instruments Incorporated Optical switch having an analog beam for steering light
US5880921A (en) * 1997-04-28 1999-03-09 Rockwell Science Center, Llc Monolithically integrated switched capacitor bank using micro electro mechanical system (MEMS) technology
US6069540A (en) * 1999-04-23 2000-05-30 Trw Inc. Micro-electro system (MEMS) switch
US6307452B1 (en) * 1999-09-16 2001-10-23 Motorola, Inc. Folded spring based micro electromechanical (MEM) RF switch

Also Published As

Publication number Publication date
WO2002063657A2 (en) 2002-08-15
WO2002063657A8 (en) 2002-09-12
US20020075094A1 (en) 2002-06-20
US6535091B2 (en) 2003-03-18
WO2002063657A9 (en) 2002-10-17

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