WO2002059704A3 - Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool - Google Patents
Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool Download PDFInfo
- Publication number
- WO2002059704A3 WO2002059704A3 PCT/US2002/002378 US0202378W WO02059704A3 WO 2002059704 A3 WO2002059704 A3 WO 2002059704A3 US 0202378 W US0202378 W US 0202378W WO 02059704 A3 WO02059704 A3 WO 02059704A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- wafer processing
- wafer
- schedules
- tool
- semiconductor wafer
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 239000013598 vector Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
- G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/771,254 US6725114B1 (en) | 1997-06-09 | 2001-01-26 | Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool |
US09/771,254 | 2001-01-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002059704A2 WO2002059704A2 (en) | 2002-08-01 |
WO2002059704A3 true WO2002059704A3 (en) | 2003-05-08 |
Family
ID=25091218
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/002378 WO2002059704A2 (en) | 2001-01-26 | 2002-01-28 | Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool |
Country Status (2)
Country | Link |
---|---|
TW (1) | TW526530B (en) |
WO (1) | WO2002059704A2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1826645A1 (en) * | 2006-02-25 | 2007-08-29 | MTU Aero Engines GmbH | Method for generating process chains |
TWI426459B (en) * | 2007-10-26 | 2014-02-11 | Hon Hai Prec Ind Co Ltd | System and method for judging inputting and outputting operations of a mold automatically |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5444632A (en) * | 1994-04-28 | 1995-08-22 | Texas Instruments Incorporated | Apparatus and method for controlling and scheduling processing machines |
US6074443A (en) * | 1996-10-21 | 2000-06-13 | Applied Materials, Inc. | Method and apparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot |
EP1058172A2 (en) * | 1999-06-01 | 2000-12-06 | Applied Materials, Inc. | Semiconductor processing techniques |
WO2000079355A1 (en) * | 1999-06-22 | 2000-12-28 | Brooks Automation, Inc. | Run-to-run controller for use in microelectronic fabrication |
-
2002
- 2002-01-28 WO PCT/US2002/002378 patent/WO2002059704A2/en not_active Application Discontinuation
- 2002-01-28 TW TW091101415A patent/TW526530B/en not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5444632A (en) * | 1994-04-28 | 1995-08-22 | Texas Instruments Incorporated | Apparatus and method for controlling and scheduling processing machines |
US6074443A (en) * | 1996-10-21 | 2000-06-13 | Applied Materials, Inc. | Method and apparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot |
EP1058172A2 (en) * | 1999-06-01 | 2000-12-06 | Applied Materials, Inc. | Semiconductor processing techniques |
WO2000079355A1 (en) * | 1999-06-22 | 2000-12-28 | Brooks Automation, Inc. | Run-to-run controller for use in microelectronic fabrication |
Also Published As
Publication number | Publication date |
---|---|
WO2002059704A2 (en) | 2002-08-01 |
TW526530B (en) | 2003-04-01 |
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