WO2002055990A2 - Microfabrication process for electrospray ionization mass spectrometry emitters - Google Patents
Microfabrication process for electrospray ionization mass spectrometry emitters Download PDFInfo
- Publication number
- WO2002055990A2 WO2002055990A2 PCT/US2002/000705 US0200705W WO02055990A2 WO 2002055990 A2 WO2002055990 A2 WO 2002055990A2 US 0200705 W US0200705 W US 0200705W WO 02055990 A2 WO02055990 A2 WO 02055990A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrospray
- pdms
- emitter
- wafer
- layer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/62—Detectors specially adapted therefor
- G01N30/72—Mass spectrometers
- G01N30/7233—Mass spectrometers interfaced to liquid or supercritical fluid chromatograph
- G01N30/724—Nebulising, aerosol formation or ionisation
- G01N30/7266—Nebulising, aerosol formation or ionisation by electric field, e.g. electrospray
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0013—Miniaturised spectrometers, e.g. having smaller than usual scale, integrated conventional components
- H01J49/0018—Microminiaturised spectrometers, e.g. chip-integrated devices, MicroElectro-Mechanical Systems [MEMS]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
- H01J49/165—Electrospray ionisation
- H01J49/167—Capillaries and nozzles specially adapted therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6004—Construction of the column end pieces
- G01N2030/6013—Construction of the column end pieces interfaces to detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2002243506A AU2002243506A1 (en) | 2001-01-11 | 2002-01-09 | Microfabrication process for electrospray ionization mass spectrometry emitters |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US26065501P | 2001-01-11 | 2001-01-11 | |
US60/260,655 | 2001-01-11 |
Publications (4)
Publication Number | Publication Date |
---|---|
WO2002055990A2 true WO2002055990A2 (en) | 2002-07-18 |
WO2002055990A3 WO2002055990A3 (en) | 2002-11-07 |
WO2002055990A9 WO2002055990A9 (en) | 2002-12-27 |
WO2002055990A8 WO2002055990A8 (en) | 2003-02-27 |
Family
ID=22990074
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2002/000705 WO2002055990A2 (en) | 2001-01-11 | 2002-01-09 | Microfabrication process for electrospray ionization mass spectrometry emitters |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU2002243506A1 (en) |
WO (1) | WO2002055990A2 (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7105810B2 (en) | 2001-12-21 | 2006-09-12 | Cornell Research Foundation, Inc. | Electrospray emitter for microfluidic channel |
JP2007516071A (en) * | 2003-11-12 | 2007-06-21 | ユニバシテ デ シオンス エ テクノロジ ド リール | Calligraphic pen-type flat electrospray source and its manufacture |
WO2011097180A1 (en) * | 2010-02-05 | 2011-08-11 | Thermo Finnigan Llc | Multi-needle multi-parallel nanospray ionization source |
US8858815B2 (en) | 2003-09-26 | 2014-10-14 | Cornell Research Foundation, Inc. | Scanned source oriented nanofiber formation |
US9362097B2 (en) | 2008-05-06 | 2016-06-07 | Massachusetts Institute Of Technology | Method and apparatus for a porous electrospray emitter |
US9358556B2 (en) | 2013-05-28 | 2016-06-07 | Massachusetts Institute Of Technology | Electrically-driven fluid flow and related systems and methods, including electrospinning and electrospraying systems and methods |
US10125052B2 (en) | 2008-05-06 | 2018-11-13 | Massachusetts Institute Of Technology | Method of fabricating electrically conductive aerogels |
US10308377B2 (en) | 2011-05-03 | 2019-06-04 | Massachusetts Institute Of Technology | Propellant tank and loading for electrospray thruster |
US11545351B2 (en) | 2019-05-21 | 2023-01-03 | Accion Systems, Inc. | Apparatus for electrospray emission |
US11881786B2 (en) | 2017-04-12 | 2024-01-23 | Accion Systems, Inc. | System and method for power conversion |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6033202A (en) * | 1998-03-27 | 2000-03-07 | Lucent Technologies Inc. | Mold for non - photolithographic fabrication of microstructures |
US6087006A (en) * | 1994-08-31 | 2000-07-11 | Hitachi, Ltd. | Surface-protecting film and resin-sealed semiconductor device having said film |
US6319634B1 (en) * | 1999-03-12 | 2001-11-20 | Corning Incorporated | Projection lithography photomasks and methods of making |
US6394942B2 (en) * | 1998-09-17 | 2002-05-28 | Kionix, Inc. | Integrated monolithic microfabricated electrospray and liquid chromatography system and method |
-
2002
- 2002-01-09 AU AU2002243506A patent/AU2002243506A1/en not_active Abandoned
- 2002-01-09 WO PCT/US2002/000705 patent/WO2002055990A2/en not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6087006A (en) * | 1994-08-31 | 2000-07-11 | Hitachi, Ltd. | Surface-protecting film and resin-sealed semiconductor device having said film |
US6033202A (en) * | 1998-03-27 | 2000-03-07 | Lucent Technologies Inc. | Mold for non - photolithographic fabrication of microstructures |
US6322736B1 (en) * | 1998-03-27 | 2001-11-27 | Agere Systems Inc. | Method for fabricating molded microstructures on substrates |
US6394942B2 (en) * | 1998-09-17 | 2002-05-28 | Kionix, Inc. | Integrated monolithic microfabricated electrospray and liquid chromatography system and method |
US6319634B1 (en) * | 1999-03-12 | 2001-11-20 | Corning Incorporated | Projection lithography photomasks and methods of making |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7105810B2 (en) | 2001-12-21 | 2006-09-12 | Cornell Research Foundation, Inc. | Electrospray emitter for microfluidic channel |
US8858815B2 (en) | 2003-09-26 | 2014-10-14 | Cornell Research Foundation, Inc. | Scanned source oriented nanofiber formation |
JP2007516071A (en) * | 2003-11-12 | 2007-06-21 | ユニバシテ デ シオンス エ テクノロジ ド リール | Calligraphic pen-type flat electrospray source and its manufacture |
US10236154B2 (en) | 2008-05-06 | 2019-03-19 | Massachusetts Institute Of Technology | Method and apparatus for a porous electrospray emitter |
US9905392B2 (en) | 2008-05-06 | 2018-02-27 | Massachusetts Institute Of Technology | Method and apparatus for a porous electrospray emitter |
US9362097B2 (en) | 2008-05-06 | 2016-06-07 | Massachusetts Institute Of Technology | Method and apparatus for a porous electrospray emitter |
US10685808B2 (en) | 2008-05-06 | 2020-06-16 | Massachusetts Institute Of Technology | Method and apparatus for a porous electrospray emitter |
US9478403B2 (en) | 2008-05-06 | 2016-10-25 | Massachusetts Institute Of Technology | Method and apparatus for a porous electrospray emitter |
US10410821B2 (en) | 2008-05-06 | 2019-09-10 | Massachusetts Institute Of Technology | Method and apparatus for a porous electrospray emitter |
US10125052B2 (en) | 2008-05-06 | 2018-11-13 | Massachusetts Institute Of Technology | Method of fabricating electrically conductive aerogels |
US8461549B2 (en) | 2010-02-05 | 2013-06-11 | Thermo Finnigan Llc | Multi-needle multi-parallel nanospray ionization source for mass spectrometry |
WO2011097180A1 (en) * | 2010-02-05 | 2011-08-11 | Thermo Finnigan Llc | Multi-needle multi-parallel nanospray ionization source |
US10308377B2 (en) | 2011-05-03 | 2019-06-04 | Massachusetts Institute Of Technology | Propellant tank and loading for electrospray thruster |
US9895706B2 (en) | 2013-05-28 | 2018-02-20 | Massachusetts Institute Of Technology | Electrically-driven fluid flow and related systems and methods, including electrospinning and electrospraying systems and methods |
US9669416B2 (en) | 2013-05-28 | 2017-06-06 | Massachusetts Institute Of Technology | Electrospraying systems and associated methods |
US9358556B2 (en) | 2013-05-28 | 2016-06-07 | Massachusetts Institute Of Technology | Electrically-driven fluid flow and related systems and methods, including electrospinning and electrospraying systems and methods |
US11881786B2 (en) | 2017-04-12 | 2024-01-23 | Accion Systems, Inc. | System and method for power conversion |
US11545351B2 (en) | 2019-05-21 | 2023-01-03 | Accion Systems, Inc. | Apparatus for electrospray emission |
Also Published As
Publication number | Publication date |
---|---|
AU2002243506A1 (en) | 2002-07-24 |
WO2002055990A8 (en) | 2003-02-27 |
WO2002055990A9 (en) | 2002-12-27 |
WO2002055990A3 (en) | 2002-11-07 |
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