WO2002001204A9 - Micro-optic absorption spectrometer - Google Patents
Micro-optic absorption spectrometerInfo
- Publication number
- WO2002001204A9 WO2002001204A9 PCT/US2001/020966 US0120966W WO0201204A9 WO 2002001204 A9 WO2002001204 A9 WO 2002001204A9 US 0120966 W US0120966 W US 0120966W WO 0201204 A9 WO0201204 A9 WO 0201204A9
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- optical
- microcavity
- waveguide
- spectrometer according
- infrared absoφtion
- Prior art date
Links
- 238000010521 absorption reaction Methods 0.000 title abstract description 15
- 230000003287 optical effect Effects 0.000 claims abstract description 119
- 230000008878 coupling Effects 0.000 claims abstract description 12
- 238000010168 coupling process Methods 0.000 claims abstract description 12
- 238000005859 coupling reaction Methods 0.000 claims abstract description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 239000004005 microsphere Substances 0.000 claims description 15
- 230000005855 radiation Effects 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 11
- 239000000377 silicon dioxide Substances 0.000 claims description 7
- 230000001902 propagating effect Effects 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 239000013307 optical fiber Substances 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 abstract description 10
- 239000000126 substance Substances 0.000 abstract description 10
- 230000008859 change Effects 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 abstract description 2
- 238000002310 reflectometry Methods 0.000 description 6
- 238000005253 cladding Methods 0.000 description 5
- 230000007704 transition Effects 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000004611 spectroscopical analysis Methods 0.000 description 3
- 239000003124 biologic agent Substances 0.000 description 2
- 239000013043 chemical agent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000005350 fused silica glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000010897 surface acoustic wave method Methods 0.000 description 2
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004476 mid-IR spectroscopy Methods 0.000 description 1
- 239000002078 nanoshell Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 150000003384 small molecules Chemical class 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
- G01N21/7746—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the waveguide coupled to a cavity resonator
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12002—Three-dimensional structures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N2021/7769—Measurement method of reaction-produced change in sensor
- G01N2021/7776—Index
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N2021/7769—Measurement method of reaction-produced change in sensor
- G01N2021/7779—Measurement method of reaction-produced change in sensor interferometric
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12109—Filter
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/241—Light guide terminations
Definitions
- the present invention relates to optical sensors, and in particular to a high-precision, micro-optic absorption spectrometer.
- Optical microsphere resonators can have quality factors that are several orders of magnitude better than typical surface etched optical micro-resonators, because these microcavities can be shaped by natural surface tension forces during a liquid state fabrication. These microcavities are inexpensive, simple to fabricate, and are compatible with integrated optics.
- Optical microcavity resonators have quality factors (Qs) that are higher by several orders of magnitude, as compared to other electromagnetic devices. Measured Qs as large at 10 10 have been reported. The high-Q resonances encountered in these microcavities are due to whispering- gallery-modes (WGM) that are supported within the microcavities.
- WGM whispering- gallery-modes
- microspheric cavities have the potential to provide unprecedented performance in numerous applications.
- these microspheric cavities may be useful in applications that call for ultra-narrow linewidths, long energy decay times, large energy densities, and fine sensing of environmental changes, to cite just a few examples.
- microcavities Since the ultra-high Q values of microcavities are the result of energy that is tightly bound inside the cavity, optical energy must be coupled in and out of the high Q cavities, without negatively affecting the Q. Further, the stable integration of the microcavities with the input and output light coupling media should be achieved. Also, controlling the excitation of resonant modes within these microcavities is necessary for proper device performance, but presents a challenge for conventional waveguides.
- Reflecting Waveguides are used to achieve vertical confinement and substrate isolation through a highly reflective stack of alternating high and low refractive index dielectric layers. Q-values of over 10 10 , and coupling efficiencies of over 98% have been observed.
- SPARROW waveguide chips have the potential to integrate optical microcavities into miniaturized optical sensor systems. Because of their ability to excite resonant modes having unprecedentedly high Q-values in optical microcavities, SPARROW waveguide chips have the potential for greatly increasing the resolution and dynamic range in these sensing applications.
- Chemical sensors known in the art include MEMS (microelectromechanical systems) chemical sensors, optical waveguide-based sensors, surface plasmon resonance (SPR) chemical sensors, surface acoustic wave (SAW) chemical sensors, mass spectrometers, and IR (infrared) absorption spectrometers.
- MEMS microelectromechanical systems
- SPR surface plasmon resonance
- SAW surface acoustic wave
- mass spectrometers mass spectrometers
- IR infrared absorption spectrometers.
- Miniaturized sensors, such as prior art MEMS sensors provide significant advantages. For example, they would be well adapted for in situ functioning. Also, they would be small enough to be deployed in large numbers and implemented for remote probing. It is desirable to provide chemical sensors with an improved resolution, while maintaining the compact size of MEMS sensors known in the art.
- the present invention is directed to a light absorption spectrometer, formed of a waveguide-coupled optical microcavity resonator.
- the present invention features the tuning of the optical resonance frequency of the microsphere, to coincide with a selected electronic or vibrational transition frequency, so that the light coupled into the microsphere will experience absorption in the presence of an atomic or molecular substance surrounding the microsphere.
- An infrared absorption spectrometer constructed in accordance with the present invention includes at least one optical microcavity, and an optical waveguide for coupling light into a resonant mode of the optical microcavity.
- the optical waveguide has an input end and an output end.
- the waveguide is adapted for transmitting optical radiation incident on the input end to the output end.
- the light coupled into the optical microcavity is adapted to interact with at least one an atomic or molecular species.
- the atomic or molecular species may be found in a chemical substance surrounding the microcavity, and may be a fluid, by way of example.
- the optical microcavity is configured so that the frequency of at least one resonant mode of the optical cavity matches an electronic or vibrational transition frequency of the atomic or molecular species. In this way, optical radiation coupled into the optical microcavity and having a frequency substantially equal to the frequency of the resonant mode is absorbed by the atomic or molecular species.
- the sensitivity of the infrared absorption spectrometer of the present invention is significantly increased, as compared to the prior art.
- Figure 1 is a schematic diagram of an infrared abso ⁇ tion spectrometer, constructed in accordance with the present invention.
- Figure 2 illustrates a SPARROW optical waveguide, constructed in accordance with the present invention.
- Figure 3 illustrates an optical waveguide constructed in accordance with the present invention, and having a Mach-Zeh ⁇ der interferometric configuration.
- the present invention is directed to an infrared (JR) absorption spectrometer, formed of a waveguide-coupled optical microcavity resonator.
- Optical microcavities are characterized by high Q values and correspondingly long optical path lengths, allowing a significant increase in the sensitivity of the infrared absorption spectrometer, as compared to prior art absorption spectrometers.
- FIG. 1 is a schematic diagram of an infrared absorption spectrometer 10, constructed in accordance with the present invention.
- the spectrometer 10 includes at least one optical ' microcavity resonator 12, and a waveguide 18 for evanescently coupling light from the waveguide 18 onto the microcavity 12.
- the optical resonance frequency of the microcavity is tuned to coincide with a vibrational resonance frequency of the interacting molecule, such that the light coupled into the microsphere will experience absorption in the presence of the chemical vapor surrounding the microsphere.
- An optical source 15, preferably a laser provides a beam 16 of input radiation directed to the waveguide.
- a photodetector 17 detects optical radiation transmitted through the waveguide 18.
- the optical microcavity 12 is a small spherical particle, disk, or ring, having dimensions of the order of microns to millimeters.
- the optical microcavity 12 is typically made of silica.
- the optical microcavity 12 is fabricated by surface tension shaping of the tip of freshly melted optical fiber. Melting of the tip of a silica wire or fiber may be accomplished through arcing in a fusion splicer, by means of a gas flame, or using a high-power laser (such as a C0 laser) to heat the glass.
- Microcavities, with diameters typically ranging from about 50 micrometers to about 500 micrometers are obtained by this method. In the illustrated embodiment, the optical microcavity has a diameter of about 200 micrometers, although other sizes are also within the scope of the present invention.
- the optical microcavity 12 is adapted to support WGMs (whispering-gallery-modes), and is thus characterized by extremly high Q values.
- WGMs whispering-gallery-modes
- Light incident on an input end of the waveguide and propagating therethrough is evanescently coupled onto WGM resonances supported within the optical microcavity.
- An evanescent wave appears whenever a light wave undergoes total internal reflection at a dielectric interface, such as the interface between the silica waveguide and the surrounding air.
- the evanescent portion of the waveguide mode field is the exponentially decaying portion of the waveguide mode field, outside the relatively high index region of the waveguide.
- the evanescent wave decays exponentially with the distance from the surface of the waveguide core on a length scale of the order of the optical wavelength.
- the optical waveguide is a SPARROW (stripline pedestal anti-resonant reflective optical waveguide) waveguide.
- Figure 2 illustrates a SPARROW optical waveguide, constructed in accordance with the present invention.
- the SPARROW waveguide 110 provides an efficient and robust coupling mechanism for exciting whispering-gallery-modes in an optical macOcavity 102.
- the SPARROW 110 includes a multi-layer, high-reflectivity dielectric stack 130 disposed on the substrate 120, and a waveguide core 140.
- the substrate 120 is substantially planar, and in one embodiment is made of silicon.
- the dielectric stack 130 is composed of alternating high (nn) and low (n ⁇ refractive index layers 131 and 132, made of a dielectric material. As aresult, the dielectric stack 130 functions as a high reflectivity dielectric mirror. The larger the number of layers 131 and 132, the higher the reflectivity of the stack 130 becomes. While the illustrated embodiment includes only one low index layer 132 disposed between two high index layers 131, the number of the layers 131 and 132 can be increased in order to increase the reflectivity of the stack 130.
- the alternating layers 131 and 132 forming the dielectric stack 130 provide a cladding for the SPARROW waveguide core 140, i.e. the layers forming the stack 130 may be regarded as cladding layers.
- the high reflectivity of the dielectric stack 130 permits isolation of the optical modes of the microcavity 102 and the waveguide core 140 from the waveguide cladding and the substrate. By isolating the waveguide core 140 using the high-reflectivity dielectric stack 130, the SPARROW 110 circumvents the need for obtaining low refractive index cladding materials.
- one of the high refractive index layers 131 is in contact with the substrate 120.
- the high refractive index layer 131 is made of Si (silicon), while the low refractive index layer 132 is made of SiO 2 (silica).
- the high refractive index n ⁇ is about 3.5, and the low refractive index I is about 1.45, although other refractive indices are also within the scope of the present invention.
- the refractive indices required for efficiently guiding light within the waveguide depend on the wavelength of optical radiation.
- the waveguide core 140 is disposed on top of the dielectric stack 130, and is in contact with another one of the high refractive index layers 131.
- the waveguide core 140 includes an input end 142 and an output end 144, and is adapted for transmitting optical radiation incident on the input end 142 to the output end 144.
- the waveguide core is made of silica, and is characterized by the low refractive index n L .
- Figure 3 illustrates an optical waveguide constructed in accordance with the present invention, and having a Mach-Zehnder like interferometric configuration.
- a Mach-Zehnder interferometer an incoming optical signal is split into two signals, for example at a Y-junction. Each signal enters a first and a second waveguide branch, respectively.
- the signals are recombined into an output waveguide, which provides a modulated optical output signal.
- An electric field applied to one or both of the waveguide branches causes a change in the refractive index in the applied region, corresponding to the changing amplitude of the modulating signal.
- the change in the index of refraction alters the speed of light in the region, resulting in a change in the delay time of the light passing through the region.
- the optical path length in one or both of the waveguides branches can be controlled, so that a phase difference results between the two signals when they are recombined at the output waveguide.
- the waveguide 500 has an input end 510 and an output end 512.
- the interferometric waveguide 500 includes three waveguide arms 505, 506, and 507.
- the first arm 505 forms an input channel, and is adapted to input coupling light into the microsphere.
- the second arm 506 forms a drop channel, and is adapted to out-couple light from the microcavity into the waveguide.
- the third arm 507 is used as a reference channel, which has substantially no interaction with the microcavity. At the output end 512, light from the reference channel 507 is combined or interfered with light from the drop channel, i.e. light that has interacted with the microsphere.
- the sensitivity of abso ⁇ tion-based sensors is proportional to the optical path length.
- the change in phase experienced by the resonant light and measured by the interferometer may be expressed in terms of the cavity lifetime ⁇ (d) of the microcavity, and the optical path difference (OPD) /(d).
- the cavity lifetime ⁇ (d) for resonant light can be expressed as a function of the total cavity Q:
- optical path length /(d) can be expressed as a function of the cavity lifetime
- the optical resonance frequency of the microsphere is "tuned" to coincide with a selected electronic or vibrational transition frequency such that the light coupled into the microsphere will experience abso ⁇ tion in the presence of an atomic or molecular substance surrounding the microsphere.
- the result is a change in the measured light transmittance.
- the technique of the present invention when applied to IR abso ⁇ tion spectroscopy, takes advantage of the large abso ⁇ tion coefficients of molecular vibrations in the mid-IR region of the electromagnetic spectrum, typically ranging from about 3 ⁇ m to about 20 ⁇ m. Small molecules, typically 4 atoms or less, possess strong vibrational transitions toward the lower end of the infrared spectrum.
- the fraction of light absorbed by a molecular sample is given by
- the resonant wavelength of fused silica microcavities can be shifted into the mid-infrared region, by coating the microcavities with a gold nanoshell, i.e. a layer of gold having a thickness of the order of nanometers.
- the infrared abso ⁇ tion technique described above may be implemented using methane, which has a 3.3 ⁇ m vibrational transition.
- methane which has a 3.3 ⁇ m vibrational transition.
- the methane detection sensitivity is approximately 100 ppt (parts per trillion).
- the infrared abso ⁇ tion spectrometer disclosed in the present invention provides a significantly increased sensitivity, as compared to prior art miniature infrared abso ⁇ tion spectrometer.
- the infrared abso ⁇ tion spectrometer, constructed in accordance with the present invention provides all the advantages of a compact size, in combination with its high sensitivity.
- the present invention may have wide ranging applications in the industry and the military, including but not limited to the fields of manufacturing process control, environmental monitoring, combustion bi-product monitoring, and chemical/biological agent sensing on the battlefield. While the invention has been particularly shown and described with reference to specific preferred embodiments, it should be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2001273123A AU2001273123A1 (en) | 2000-06-28 | 2001-06-28 | Micro-optic absorption spectrometer |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US21438300P | 2000-06-28 | 2000-06-28 | |
US60/214,383 | 2000-06-28 |
Publications (2)
Publication Number | Publication Date |
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WO2002001204A1 WO2002001204A1 (en) | 2002-01-03 |
WO2002001204A9 true WO2002001204A9 (en) | 2002-10-10 |
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Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/020669 WO2002001266A1 (en) | 2000-06-28 | 2001-06-28 | Optical microcavity resonator system |
PCT/US2001/020966 WO2002001204A1 (en) | 2000-06-28 | 2001-06-28 | Micro-optic absorption spectrometer |
PCT/US2001/021207 WO2002001147A1 (en) | 2000-06-28 | 2001-06-28 | Coated optical microcavity resonator chemical sensor |
PCT/US2001/020662 WO2002001146A1 (en) | 2000-06-28 | 2001-06-28 | Optical microcavity resonator sensor |
Family Applications Before (1)
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PCT/US2001/020669 WO2002001266A1 (en) | 2000-06-28 | 2001-06-28 | Optical microcavity resonator system |
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Application Number | Title | Priority Date | Filing Date |
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PCT/US2001/021207 WO2002001147A1 (en) | 2000-06-28 | 2001-06-28 | Coated optical microcavity resonator chemical sensor |
PCT/US2001/020662 WO2002001146A1 (en) | 2000-06-28 | 2001-06-28 | Optical microcavity resonator sensor |
Country Status (3)
Country | Link |
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US (3) | US6507684B2 (en) |
AU (4) | AU2001280477A1 (en) |
WO (4) | WO2002001266A1 (en) |
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- 2001-06-28 AU AU2001280477A patent/AU2001280477A1/en not_active Abandoned
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- 2001-06-28 WO PCT/US2001/020669 patent/WO2002001266A1/en active Application Filing
- 2001-06-28 AU AU2001273123A patent/AU2001273123A1/en not_active Abandoned
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Also Published As
Publication number | Publication date |
---|---|
WO2002001146A1 (en) | 2002-01-03 |
US20020079453A1 (en) | 2002-06-27 |
US20020114563A1 (en) | 2002-08-22 |
WO2002001266A1 (en) | 2002-01-03 |
AU2001273123A1 (en) | 2002-01-08 |
US6507684B2 (en) | 2003-01-14 |
AU2001280477A1 (en) | 2002-01-08 |
WO2002001147A9 (en) | 2003-01-30 |
US20020172457A1 (en) | 2002-11-21 |
US6657731B2 (en) | 2003-12-02 |
WO2002001147A1 (en) | 2002-01-03 |
US6765211B2 (en) | 2004-07-20 |
WO2002001204A1 (en) | 2002-01-03 |
WO2002001146A9 (en) | 2003-03-06 |
AU2002215616A1 (en) | 2002-01-08 |
AU2001273060A1 (en) | 2002-01-08 |
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