WO2001077735A3 - Capacitive sensing scheme for digital control state detection in optical switches - Google Patents

Capacitive sensing scheme for digital control state detection in optical switches Download PDF

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Publication number
WO2001077735A3
WO2001077735A3 PCT/US2001/011047 US0111047W WO0177735A3 WO 2001077735 A3 WO2001077735 A3 WO 2001077735A3 US 0111047 W US0111047 W US 0111047W WO 0177735 A3 WO0177735 A3 WO 0177735A3
Authority
WO
WIPO (PCT)
Prior art keywords
mirrors
electrodes
positions
control state
state detection
Prior art date
Application number
PCT/US2001/011047
Other languages
French (fr)
Other versions
WO2001077735A2 (en
Inventor
Behrang Behin
Michael J Daneman
Meng-Hsiung Kiang
Kam-Yin Lau
Timothy J Beerling
Original Assignee
Onix Microsystems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Onix Microsystems Inc filed Critical Onix Microsystems Inc
Priority to AU2001268041A priority Critical patent/AU2001268041A1/en
Publication of WO2001077735A2 publication Critical patent/WO2001077735A2/en
Priority to PCT/US2002/009038 priority patent/WO2002091464A1/en
Publication of WO2001077735A3 publication Critical patent/WO2001077735A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/358—Latching of the moving element, i.e. maintaining or holding the moving element in place once operation has been performed; includes a mechanically bistable system
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3586—Control or adjustment details, e.g. calibrating
    • G02B6/359—Control or adjustment details, e.g. calibrating of the position of the moving element itself during switching, i.e. without monitoring the switched beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

Abstract

Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the 'on' or 'off' position. Embodiments of the invention have application in devices switches that employ mirrors that move between an 'on' or 'off' position, wherein they reflect light from an input fiber into an output fiber in the 'on' position, and allow the light to pass in the 'off' position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the 'on' or 'off' position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more positions in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.
PCT/US2001/011047 2000-04-10 2001-04-04 Capacitive sensing scheme for digital control state detection in optical switches WO2001077735A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2001268041A AU2001268041A1 (en) 2000-04-10 2001-04-04 Capacitive sensing scheme for digital control state detection in optical switches
PCT/US2002/009038 WO2002091464A1 (en) 2001-03-01 2002-03-01 Optical cross-connect system

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US19605500P 2000-04-10 2000-04-10
US60/196,055 2000-04-10
US09/724,948 US6788520B1 (en) 2000-04-10 2000-11-28 Capacitive sensing scheme for digital control state detection in optical switches
US09/724,948 2000-11-28

Publications (2)

Publication Number Publication Date
WO2001077735A2 WO2001077735A2 (en) 2001-10-18
WO2001077735A3 true WO2001077735A3 (en) 2002-05-16

Family

ID=26891625

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/011047 WO2001077735A2 (en) 2000-04-10 2001-04-04 Capacitive sensing scheme for digital control state detection in optical switches

Country Status (3)

Country Link
US (1) US6788520B1 (en)
AU (1) AU2001268041A1 (en)
WO (1) WO2001077735A2 (en)

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US7142346B2 (en) * 2003-12-09 2006-11-28 Idc, Llc System and method for addressing a MEMS display
US7158278B2 (en) * 2004-04-12 2007-01-02 Alexander Kastalsky Display device based on bistable electrostatic shutter
JP2006065272A (en) * 2004-07-28 2006-03-09 Sony Corp Hologram apparatus, positioning method for spatial light modulator and image pick-up device, and hologram recording material
US7551159B2 (en) * 2004-08-27 2009-06-23 Idc, Llc System and method of sensing actuation and release voltages of an interferometric modulator
US7889163B2 (en) 2004-08-27 2011-02-15 Qualcomm Mems Technologies, Inc. Drive method for MEMS devices
US7843410B2 (en) 2004-09-27 2010-11-30 Qualcomm Mems Technologies, Inc. Method and device for electrically programmable display
US8310441B2 (en) 2004-09-27 2012-11-13 Qualcomm Mems Technologies, Inc. Method and system for writing data to MEMS display elements
US8878825B2 (en) 2004-09-27 2014-11-04 Qualcomm Mems Technologies, Inc. System and method for providing a variable refresh rate of an interferometric modulator display
US7136213B2 (en) 2004-09-27 2006-11-14 Idc, Llc Interferometric modulators having charge persistence
US7679627B2 (en) * 2004-09-27 2010-03-16 Qualcomm Mems Technologies, Inc. Controller and driver features for bi-stable display
US7532195B2 (en) 2004-09-27 2009-05-12 Idc, Llc Method and system for reducing power consumption in a display
US7724993B2 (en) 2004-09-27 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US7675669B2 (en) * 2004-09-27 2010-03-09 Qualcomm Mems Technologies, Inc. Method and system for driving interferometric modulators
US7503989B2 (en) * 2004-12-17 2009-03-17 Hewlett-Packard Development Company, L.P. Methods and systems for aligning and coupling devices
US7920136B2 (en) 2005-05-05 2011-04-05 Qualcomm Mems Technologies, Inc. System and method of driving a MEMS display device
KR20080027236A (en) 2005-05-05 2008-03-26 콸콤 인코포레이티드 Dynamic driver ic and display panel configuration
US7948457B2 (en) 2005-05-05 2011-05-24 Qualcomm Mems Technologies, Inc. Systems and methods of actuating MEMS display elements
US8391630B2 (en) 2005-12-22 2013-03-05 Qualcomm Mems Technologies, Inc. System and method for power reduction when decompressing video streams for interferometric modulator displays
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US8194056B2 (en) 2006-02-09 2012-06-05 Qualcomm Mems Technologies Inc. Method and system for writing data to MEMS display elements
US8049713B2 (en) 2006-04-24 2011-11-01 Qualcomm Mems Technologies, Inc. Power consumption optimized display update
US7702192B2 (en) * 2006-06-21 2010-04-20 Qualcomm Mems Technologies, Inc. Systems and methods for driving MEMS display
US7777715B2 (en) 2006-06-29 2010-08-17 Qualcomm Mems Technologies, Inc. Passive circuits for de-multiplexing display inputs
CN103150985A (en) * 2008-02-11 2013-06-12 高通Mems科技公司 Measurement and apparatus for electrical measurement of electrical drive parameters for MEMS based display
US8736590B2 (en) 2009-03-27 2014-05-27 Qualcomm Mems Technologies, Inc. Low voltage driver scheme for interferometric modulators
US10078032B2 (en) 2016-06-21 2018-09-18 Stmicroelectronics Ltd Circuit for detection of failure of a movable MEMS mirror
US10048488B2 (en) * 2016-11-10 2018-08-14 Stmicroelectronics Ltd Circuit for detection of failure of movable MEMS mirror

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Also Published As

Publication number Publication date
WO2001077735A2 (en) 2001-10-18
US6788520B1 (en) 2004-09-07
AU2001268041A1 (en) 2001-10-23

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