WO2001057577A3 - Micromechanical optical switch - Google Patents

Micromechanical optical switch Download PDF

Info

Publication number
WO2001057577A3
WO2001057577A3 PCT/US2001/003851 US0103851W WO0157577A3 WO 2001057577 A3 WO2001057577 A3 WO 2001057577A3 US 0103851 W US0103851 W US 0103851W WO 0157577 A3 WO0157577 A3 WO 0157577A3
Authority
WO
WIPO (PCT)
Prior art keywords
mirror assembly
fixed layer
optical switch
movable mirror
distance
Prior art date
Application number
PCT/US2001/003851
Other languages
French (fr)
Other versions
WO2001057577A2 (en
Inventor
Mohammed N Islam
Amos Kuditcher
Original Assignee
Celeste Optics Inc
Mohammed N Islam
Amos Kuditcher
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/631,276 external-priority patent/US6407851B1/en
Application filed by Celeste Optics Inc, Mohammed N Islam, Amos Kuditcher filed Critical Celeste Optics Inc
Priority to AU2001241455A priority Critical patent/AU2001241455A1/en
Publication of WO2001057577A2 publication Critical patent/WO2001057577A2/en
Publication of WO2001057577A3 publication Critical patent/WO2001057577A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3516—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along the beam path, e.g. controllable diffractive effects using multiple micromirrors within the beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/355—1x2 switch, i.e. one input and a selectable single output of two possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force

Abstract

An optical switch element is described, which includes a fixed layer disposed outwardly from a substrate and a movable mirror assembly disposed outwardly from the fixed layer. The moveable mirror assembly is operable to move relative to the fixed layer responsive to a voltage applied to the movable mirror assembly. In a particular embodiment, the movable mirror assembly includes an inner strip spaced apart from the fixed layer by a first distance and an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance. The optical transmission of the optical switch element changes depending on the position of the movable mirror assembly.
PCT/US2001/003851 2000-02-07 2001-02-06 Micromechanical optical switch WO2001057577A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001241455A AU2001241455A1 (en) 2000-02-07 2001-02-06 Micromechanical optical switch

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US18080700P 2000-02-07 2000-02-07
US60/180,807 2000-02-07
US09/631,276 US6407851B1 (en) 2000-08-01 2000-08-01 Micromechanical optical switch
US09/631,276 2000-08-01

Publications (2)

Publication Number Publication Date
WO2001057577A2 WO2001057577A2 (en) 2001-08-09
WO2001057577A3 true WO2001057577A3 (en) 2002-01-03

Family

ID=26876654

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/003851 WO2001057577A2 (en) 2000-02-07 2001-02-06 Micromechanical optical switch

Country Status (2)

Country Link
AU (1) AU2001241455A1 (en)
WO (1) WO2001057577A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2486197A1 (en) * 2002-05-17 2003-11-27 Arete Associates Imaging lidar with micromechanical components

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0667548A1 (en) * 1994-01-27 1995-08-16 AT&T Corp. Micromechanical modulator
EP0689078A1 (en) * 1994-06-21 1995-12-27 Matsushita Electric Industrial Co., Ltd. Diffractive optical modulator and method for producing the same
US5774252A (en) * 1994-01-07 1998-06-30 Texas Instruments Incorporated Membrane device with recessed electrodes and method of making
US5841579A (en) * 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
US5999319A (en) * 1997-05-02 1999-12-07 Interscience, Inc. Reconfigurable compound diffraction grating

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5774252A (en) * 1994-01-07 1998-06-30 Texas Instruments Incorporated Membrane device with recessed electrodes and method of making
EP0667548A1 (en) * 1994-01-27 1995-08-16 AT&T Corp. Micromechanical modulator
EP0689078A1 (en) * 1994-06-21 1995-12-27 Matsushita Electric Industrial Co., Ltd. Diffractive optical modulator and method for producing the same
US5841579A (en) * 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
US5999319A (en) * 1997-05-02 1999-12-07 Interscience, Inc. Reconfigurable compound diffraction grating

Also Published As

Publication number Publication date
WO2001057577A2 (en) 2001-08-09
AU2001241455A1 (en) 2001-08-14

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