WO2001050104A3 - Method and apparatus for a direct bonded isolated pressure sensor - Google Patents

Method and apparatus for a direct bonded isolated pressure sensor Download PDF

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Publication number
WO2001050104A3
WO2001050104A3 PCT/US2000/034648 US0034648W WO0150104A3 WO 2001050104 A3 WO2001050104 A3 WO 2001050104A3 US 0034648 W US0034648 W US 0034648W WO 0150104 A3 WO0150104 A3 WO 0150104A3
Authority
WO
WIPO (PCT)
Prior art keywords
gap
pressure
pressure sensor
stepped corner
channel
Prior art date
Application number
PCT/US2000/034648
Other languages
French (fr)
Other versions
WO2001050104A2 (en
Inventor
Mark A Lutz
Roger L Frick
Fred C Sittler
Adrian C Toy
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Priority to JP2001550004A priority Critical patent/JP2003519377A/en
Priority to AU24432/01A priority patent/AU2443201A/en
Priority to DE60018611T priority patent/DE60018611T2/en
Priority to EP00988200A priority patent/EP1244899B1/en
Publication of WO2001050104A2 publication Critical patent/WO2001050104A2/en
Publication of WO2001050104A3 publication Critical patent/WO2001050104A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Abstract

A pressure sensor (100, 222) integrally formed in the shape of a beam (102) around a central channel. The beam (102) has an integral blind end (104) that is pressurized by the fluid. The beam has an opposite end (106) that is shaped to provide a stepped corner (107) with a gap (108) opening at the base of the stepped corner (107), where the gap (108) and isolated from the fluid. A sensing film (112) in the channel adjacent the blind end (104) has an electrical parameter that varies with pressure and electrical leads (110) that extend from the channel and out the gap. A seal (115) fills the gap (108) around the leads (110) and the seal (115) fills a portion of the stepped corner (107). The sensor (100) is preferably formed by direct bonding of single crystal alumina layers (114, 116). Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.
PCT/US2000/034648 2000-01-06 2000-12-20 Method and apparatus for a direct bonded isolated pressure sensor WO2001050104A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001550004A JP2003519377A (en) 2000-01-06 2000-12-20 Method and apparatus for manufacturing a direct junction isolation pressure sensor
AU24432/01A AU2443201A (en) 2000-01-06 2000-12-20 Method and apparatus for a direct bonded isolated pressure sensor
DE60018611T DE60018611T2 (en) 2000-01-06 2000-12-20 METHOD AND DEVICE FOR A DIRECTLY BONDED INSULATED PRESSURE SENSOR
EP00988200A EP1244899B1 (en) 2000-01-06 2000-12-20 Method and apparatus for a direct bonded isolated pressure sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/478,383 2000-01-06
US09/478,383 US6520020B1 (en) 2000-01-06 2000-01-06 Method and apparatus for a direct bonded isolated pressure sensor

Publications (2)

Publication Number Publication Date
WO2001050104A2 WO2001050104A2 (en) 2001-07-12
WO2001050104A3 true WO2001050104A3 (en) 2002-05-02

Family

ID=23899711

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/034648 WO2001050104A2 (en) 2000-01-06 2000-12-20 Method and apparatus for a direct bonded isolated pressure sensor

Country Status (6)

Country Link
US (1) US6520020B1 (en)
EP (1) EP1244899B1 (en)
JP (1) JP2003519377A (en)
AU (1) AU2443201A (en)
DE (1) DE60018611T2 (en)
WO (1) WO2001050104A2 (en)

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