WO1999059186A1

WO1999059186A1 - Electronic tube

Info

Publication number: WO1999059186A1
Application number: PCT/JP1999/002451
Authority: WO
Inventors: Yutaka Hasegawa; Tomohiro Ishizu
Original assignee: Hamamatsu Photonics K. K.
Priority date: 1998-05-13
Filing date: 1999-05-12
Publication date: 1999-11-18
Also published as: JPH11329338A; JP4128654B2; AU3729299A

Abstract

A small-sized electronic tube in which a photoelectric surface is efficiently cooled while preventing the formation of dew. A housing (20) has an airtight structure that encloses a case (21) and a socket (23). A photomultiplier tube (10) is fixed and maintained by stem pins (15) in the socket. A Peltier element (30) for cooling the photomultiplier tube and a photoelectric surface (12) is placed in the housing and held by the pressure of the socket (23) and the photomultiplier tube (10) against the case (21). This structure minimizes the thermal contact with the outside of the photomultiplier so as to cool the photoelectric surface efficiently. Moreover, the simplified structure realizes miniaturization of the device and reduces manufacturing costs.

Description

Details

Technical field

The present invention relates to an electron tube device including an electron tube from which electrons are emitted from a photocathode in response to incident light, and a Peltier device for cooling the photocathode of the electron tube. Background art

The photomultiplier tube has a light-receiving surface plate on which light is incident from the outside. The photoelectric surface formed on the inner surface of the light-receiving surface plate photoelectrically converts incident light to emit electrons, and emits electrons emitted from the photoelectric surface. An electron tube that multiplies by secondary electron emission in the electron multiplier section, takes out the multiplied secondary electron flow by the anode electrode, and outputs it as an electric signal corresponding to the incident light.

In such a photomultiplier tube, the photocathode emits thermoelectrons even in the absence of incident light, and generates a 喑 current pulse caused by these thermoelectrons as an output. Such a 喑 current pulse poses a serious problem, for example, when measuring at room temperature, particularly in the measurement of weak light. In order to suppress the emission of thermoelectrons by the photocathode and reduce the dark current pulse, a cooling device that cools the photocathode is required. The necessity of cooling the photocathode to suppress the emission of thermoelectrons is the same for electron tubes other than photomultiplier tubes, for example, image tubes. In addition, the image tube means that the incident optical image is converted into a photoelectron image by photoelectric conversion on the photoelectric surface, and the photoelectron image is accelerated and imaged by an electron lens system, multiplied by an electron multiplier, An electron tube that is incident on a surface and reproduced as an optical image. In conventional cooling means, a photomultiplier tube, a Peltier element as a cooling element, and a heat conduction device necessary for cooling and heat dissipation are installed inside the housing, and the outer surface of the side wall of the photomultiplier tube near the photocathode is installed. A Peltier element is arranged between the photomultiplier tube side and the housing side as a heat absorbing portion and the housing side as a heat radiating portion between the Peltier element and the inner surface of the side wall of the housing, whereby the photocathode is cooled.

In such an apparatus, there is a problem that dew condensation occurs on an entrance window surface provided in the nozzle due to a temperature difference generated by cooling. As a means to solve this problem, there are methods such as heating the required parts by heating and blowing dry air, but when these additional devices are used, the devices are It is complicated, large, and expensive. As a cooling means for a photomultiplier tube in which dew condensation is prevented without using an additional device, a device as shown in FIG. 5 is known (Japanese Patent Laid-Open No. Hei 6-88747). In this device, the photomultiplier tube 10 and the Peltier element 30 are housed in a box 62, and the space in the box 62 (shaded area in the figure) is filled with urethane foam 63 as a heat insulating material. Is filled. The cooling block 61 is in contact with the heat absorbing portion 30 a of the Peltier element 30, and the photocathode 12 is cooled from the side of the photomultiplier tube 10 via the cooling block 61. In addition, the entrance window surface 22 a is part of the heat from the radiating portion 30 b of the Peltier device 30 through the box 62 from the radiating plate 34 in contact with the radiating portion 30 b of the Peltier device 30. To prevent dew formation without the use of additional equipment.

An apparatus for an image tube as shown in Fig. 6 is also known (Japanese Patent Laid-Open No. 6-103939). In this image tube device, a plurality of Peltier elements 30 are arranged on the periphery of the light receiving surface plate 51 of the image tube 50, and the radiating portion 30 b of the Peltier element 30 is incident on the housing 20. The heat absorption part 30 a of the Peltier element 30 is fixed on the periphery of the window 22. The tube 50 is fixed near the photocathode 52. Thereby, the cooling of the photoelectric surface 52 and the prevention of dew condensation on the entrance window surface 22a and the housing exit window 56 can be efficiently performed. Further, in this cooling means, since the image tube 50 is held only in the vacuum in the housing 20 by the Peltier element 30, the external thermal influence can be minimized. Both of the above two conventional techniques can cool the photocathode and prevent dew condensation on the entrance window surface and the like without using an additional device. However, in the photomultiplier tube device shown in FIG. 5, the Peltier element 30 is arranged on the side wall surface, so that the cooling of the photoelectric surface 12 and the heating of the entrance window surface 22 a are performed. There is a problem in efficiency.

On the other hand, in the image tube device shown in FIG. 6, since a plurality of Peltier elements 30 are fixed, the assembly is complicated, and the number of parts is increased, so that workability at the time of assembly is reduced. Also, the cooling means shown in Fig. 6 cannot be directly applied to a photomultiplier tube. The photomultiplier tube applies a predetermined voltage to each electrode installed inside the photomultiplier tube to the stem that forms the base of the photomultiplier tube, or a plurality of signals for extracting signals from the photomultiplier tube. Therefore, a cooling device having a different form from the above-mentioned image tube device for an image tube without a stem pin is required. The same applies to an electron tube such as an image tube having a stem pin.

The present invention has been made in view of the above problems, and in an electron tube having a plurality of stem pins, such as a photomultiplier tube, the cooling device has been made more efficient and smaller, thereby reducing the number of components. An object of the present invention is to provide an electron tube device which improves workability at the time of assembly. Disclosure of the invention

In order to achieve such an object, the electron tube device according to the present invention has A light-receiving surface plate having a surface and an inner surface; a photoelectric surface formed inside the light-receiving surface plate; a stem that forms a base; a plurality of stem pins fixed to the stem; An electron tube having an interposed side tube, a housing in which the electron tube is installed and an entrance window is arranged at a position facing the light-receiving surface plate of the electron tube;

A Peltier element installed inside the housing to cool the photocathode of the electron tube;

An electron tube device comprising: a radiator for radiating heat generated by the Peltier element;

The housing has an airtight structure including a case having an entrance window at one end and an open end at the other end, and a socket for sealing the open end side of the case. Is fixed to the socket via a stem pin, and the Peltier element is arranged so that the heat-absorbing part is located on the light-receiving surface plate side of the electron tube and the heat-dissipating part is located on the inner surface of one end of the case. , The socket and the electron tube press against the case.

In such an electron tube device, the heat absorbing portion of the Peltier element is located near the light receiving surface plate of the electron tube and is in thermal contact with the light receiving surface plate. By arranging the Peltier element so as to be in thermal contact with the case, the photocathode of the electron tube can be efficiently cooled, and dew condensation on the entrance window of the housing can be prevented.

In addition, the socket part to which the stem pin of the electron tube is fixed and connected to an external voltage terminal etc. also constitutes a part of the housing, and the Peltier element is held only by pressing the socket part and the case through the electron tube. By doing so, the structure of the device is simplified, the number of components is reduced, the workability during assembly is improved, and the size and price of the device can be reduced. Also, Haji Since the electron tube is held against the housing by fixing the stem pin to the socket, external thermal effects due to contact between the electron tube and the housing can be minimized.

The Peltier device is a single device having an opening in the center, and is arranged so that the entrance window of the housing faces the light receiving surface plate of the electron tube via the opening. As described above, by using a single Peltier element, the holding and assembling method by pressing the Peltier element can be further simplified, and the Peltier element holding structure near the light receiving face plate can be obtained. Generation of electrical noise can be suppressed.

The heat-absorbing part of the Peltier element is thermally connected to a part of the light-receiving surface plate, usually to the outer periphery of the light-receiving surface plate. This effectively cools the photocathode of the electron tube without impairing the primary function of the light receiving surface plate.

The socket section includes a socket pin to which the stem pin of the electron tube is connected and fixed, a socket to which the socket pin is fixed, and a socket holder to which the socket pin and the socket are fixed and connected to the case. It is composed of As described above, by dividing the socket portion into the socket and the socket holder, the socket of the existing electron tube can be used, whereby the application of the present invention to a conventionally known type of electron tube can be achieved. It can be easily done. In this case, it is preferable that the socket be fastened to the case with a holding screw, and such a structure facilitates assembly.

The heat absorbing portion of the Peltier element is connected to the light receiving surface plate via the heat absorbing side sheet, and the heat radiating portion is connected to the inner surface of one end of the case via the heat radiating side sheet. By using sheet parts with good thermal conductivity for joining the Peltier elements, the sheet parts absorb the unevenness of the surface where the case, Peltier element and light-receiving face plate are joined, and improve the efficiency of heat conduction. But it can. Alternatively, the heat absorbing portion of the Peltier element may be joined to the light receiving face plate via a member having high thermal conductivity, and the heat radiating portion may be joined directly to the inner surface of one end of the case.

For heat dissipation, it is preferable to use a metal case and attach a heat radiating means such as a fan to the metal case.

Examples of the electron tube include a photomultiplier tube having a light receiving surface plate and an electron multiplier section provided in an internal space defined by a side tube and a stem. Also, by using a photomultiplier tube having a metal side tube having good thermal conductivity, the time required for the temperature of the entire photomultiplier tube to stabilize can be reduced. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a cross-sectional view of an electron tube device according to a first embodiment of the present invention. FIG. 2 is an exploded view of the photomultiplier tube device shown in FIG. FIG.

FIG. 3 is a partial cross-sectional view of an electron tube device according to a second embodiment of the present invention.

FIG. 4 is a graph showing changes over time in the temperature of the photocathode and the case in the example.

FIG. 5 is a cross-sectional view of a conventional photomultiplier tube device.

FIG. 6 is a sectional view of an image tube device according to a conventional example. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, preferred embodiments of an electron tube device according to the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same elements will be denoted by the same reference symbols, without redundant description. Also, the dimensional ratios in the drawings are for explanation. Does not always match.

FIG. 1 shows a cross-sectional view of the configuration of an embodiment of a photomultiplier tube device of the electron tube device according to the present invention. FIG. 2 is a perspective view showing the photomultiplier tube device shown in FIG. 1 in a broken state and each part excluding the fan is developed. In the figure, reference numeral 10 denotes a photomultiplier tube. The outer surface of the photomultiplier tube 10 includes a circular light receiving surface plate 11 for receiving incident light, a cylindrical metal side tube 13, and a circular stem 14 serving as a base. A photoelectric surface 12 is formed inside the light receiving surface plate 11. A plurality of stem pins 15 are fixed to the stem 14.

The housing 20 is made up of a case 21 made of metal having good thermal conductivity, preferably aluminum, and a socket portion 23 made of synthetic resin having good electrical insulation and good heat insulation.

The outer shape of the case 21 is a rectangular parallelepiped, and has a cylindrical cavity formed therein. As shown in FIG. 2, the hollow portion is composed of a receiving portion 21a and a socket fixing portion 21b, and an inner diameter of the receiving portion 21a is a socket fixing portion 21. It is formed smaller than the inner diameter of b. At one end of the case 21 (the left side in FIGS. 1 and 2), a circular entrance opening 21 c having a smaller inside diameter than the housing portion 21 a inside the case is provided at the center. The other end (the right side in FIGS. 1 and 2) is an open end 2Id. An entrance window 22 for transmitting incident light, preferably a glass entrance window 22, is attached to the entrance window fixing portion 21 e formed outside the entrance opening 21 c. The photomultiplier tube 10 is housed in the housing portion 21 a in the case 21, and is arranged so that the entrance window 22 faces the light receiving surface plate 11 of the photomultiplier tube 10. In addition, the case 21 having good heat conductivity also has a function of a heat sink, and as shown in FIG. 1, a fan 3 for air cooling is provided on one outer surface of the case 21. 3 is attached. The socket part 23 is composed of a socket 23a, a plurality of socket bins 23b penetrating and fixed to the socket 23a, and a socket holder 23c. The socket bin 23b penetrates and is fixed to the socket holder 23c, so that the socket 23a and the socket holder 23c are fixed via the socket pin 23b. Each stem pin 15 of the photomultiplier tube 10 is connected and fixed to a corresponding socket bin 23b, and is connected to an external voltage terminal or a signal readout line via the socket pin 23b.

The socket 23 for sealing the open end 21 d of the housing 20 is inserted from the open end 2 Id of the case 21, and the housing 21 a and the socket 21 of the case 21 are inserted. And fixed to a step 21 f provided with a screw hole at the boundary of the fixing part 21 b. Thus, the photomultiplier tube 10 fixed to the socket portion 23 is fixed and held in the housing 20.

The case 21 and the entrance window 22 are fixed by bonding, and the case 21 and the socket portion 23 are fixed by a holding screw 25 via a fixing ring 24. The fixing ring 24 is made of silicone rubber and also has a function as a seal for airtightness, and therefore, the housing 20 has an airtight structure. Dry gas, preferably xenon gas, which has good insulation and is safe to handle, is enclosed inside the housing 20, thereby minimizing external thermal effects on the photomultiplier tube 10. Further, the occurrence of dew condensation on the metal side tube 13 or the stem 14 of the photomultiplier tube 10 is prevented.

In the configuration of the photomultiplier tube 10, the case 21, the entrance window 22, and the socket section 23 as described above, the light-receiving surface plate 11 of the photomultiplier tube 10 passes through the entrance window 22 of the housing 20. When light enters, electrons are emitted from the photoelectric surface 12 inside the light-receiving surface plate 11 by photoelectric conversion, and the electrons are photomultiplied. It is multiplied by an electron multiplying unit installed in the tube 10 and is taken out as an electric signal by the anode electrode. This electric signal is output via a predetermined stem pin 15 of the photomultiplier tube 10 and a socket pin 23b connected thereto.

The Peltier element 30 for cooling is a single element having an opening at the center, and the photomultiplier tube 10 and the case inside the housing 20 are arranged such that the opening faces the light receiving face plate 11. 2 1, heat absorbing section 30 a is located on the periphery of light receiving face plate 11, and heat radiating section 3 Ob is located on Peltier element holding section 2 1 g inside case 21 Is done. Thereby, the photocathode 12 is cooled by the heat absorbing portion 30a, and the incident window surface 22a is heated by the heat radiating portion 30b.

The Peltier element 30 is held inside the housing 20 by being pressed against the case 21 via the socket section 23 and the photomultiplier tube 10 by the holding screw 25. At this time, the fixing ring 24 functions to buffer and adjust the pressing pressure.

As described above, a single Peltier element 30 having an opening is used, and the Peltier element 30 is held only by pressing, and the photomultiplier tube 10 is connected to the socket section 23 of the stem pin 15. By using a structure that is fixed only by fixing the parts, the number of parts is greatly reduced, and workability during assembly is improved. As a result, the size and cost of the device can be reduced.

In such a holding structure, the heat absorbing portion 30 a of the Peltier element 30 is joined to the peripheral portion of the light receiving surface plate 11 of the photomultiplier tube 10 by the heat absorbing side sheet 31, and the heat radiating portion 30 b is joined to the Peltier element holding portion 21 g inside the case 21 by the heat radiation side sheet 32. These heat-absorbing sheet 31 and heat-dissipating sheet 32 use sheet parts with good thermal conductivity. By pressing them with the holding screws 25, the irregularities on the outer surface of the Peltier element holder 21g, the Peltier element 30 and the light receiving surface plate 11 are absorbed. As a result, heat can be conducted more efficiently, and the time from the start of cooling the photocathode until the photomultiplier tube reaches a usable stable temperature state can be shortened.

The heat-absorbing side sheet 31 is preferably a sheet part having good electrical conductivity, more preferably a sheet part mainly composed of aluminum, and is a metal side tube having the same potential as the photoelectric surface 12. 1 3 is in contact. As a result, the outer surface of the light receiving surface plate 11 on which the heat absorbing side sheet 31 is arranged and the inner surface of the light receiving surface plate 11 on which the photoelectric surface 12 is formed can be maintained at the same potential. Electrical noise generated near the face plate 11 can be suppressed. On the other hand, as the heat radiation side sheet 32, a sheet component having good electric insulation is preferably used. Thereby, a leak current or the like from the photomultiplier tube to the outside can be suppressed.

FIG. 4 shows the temperature change of the photocathode of the photomultiplier tube and the case of the housing according to the example having the configuration shown in the above embodiment. In this embodiment, a GaAs semiconductor photocathode is used as the photocathode. A semiconductor photocathode such as G a As has a larger dark current than a photocathode such as Sb-vial power, and is a photocathode that is particularly effective for cooling. After 5 minutes from the start of cooling, the temperature of the photocathode cools down to about 3 ° C, and the temperature reaches a stable state where the photomultiplier tube can be used for measurement. This is much faster than the conventional photomultiplier tube cooling device, which took about two hours to reach a usable temperature state. In addition, the temperature of the case was suppressed to about 30 by air cooling by a fan. At this time, the number of dark current pulses of the photomultiplier tube was measured while keeping the conditions other than temperature change due to cooling constant. In contrast, the cooling current has been reduced to 58 counts per second after cooling.

The present invention is not limited to the above embodiment, but can be applied to electron tubes such as photomultiplier tubes and image tubes in various forms.

In the embodiment shown in FIGS. 1 and 2, the socket portion is fixed to the step on the inner surface of the case.For example, the socket is fixed directly to the open end of the case, or is fixed to the inner surface of the side wall of the case. A variety of shapes and cases and sockets, and methods for fixing them are possible. The socket portion itself may be formed integrally without being divided into the socket and the socket holder. Regarding the method of holding the Peltier element, if there is not enough area for holding the Peltier element at the periphery of the light-receiving surface plate of the electron tube, a flange with good heat conductivity at the periphery, such as a metal flange, is used. The Peltier element may be brought into contact with the light-receiving surface plate and pressed against the case using the flange. In addition, direct joining may be performed without using sheet parts for joining. Specifically, as shown in FIG. 3, the heat-absorbing sheet 31 and the heat-dissipating sheet 32 are removed, and the Peltier element 30 is connected to the light-receiving face plate 11 via a holding member 36 having good thermal conductivity. The Peltier device 30 is held between the holding member 36 and the Peltier device holding portion 21 g inside the case 21 while being in contact with the peripheral portion. The holding member 36 includes a cylindrical portion 36 a having an inner diameter slightly larger than the outer diameter of the metal side tube 13 of the photomultiplier tube 10, and a flange portion extending outward from one end of the cylindrical portion 36 a. 36b and a flange 36c extending inward from the other end of the cylindrical portion 36a are integrally formed. The cylindrical portion 36a and the flange portion 36b serve as a holding portion for the Peltier element 30. Further, the cylindrical portion 36a and the flange portion 36c serve as engagement members for the light receiving face plate 11 and the metal side tube 13. I have.

When the present invention is used for a photomultiplier tube for X-ray detection, the entrance window is not limited to glass, but may be made of, for example, beryllium having a good X-ray transmittance. Further, in the above embodiment, the dry gas is sealed in the housing, but may be evacuated.

In the above embodiment, the radiator of the Peltier element is air-cooled by a fan. However, other radiator such as water-cooling may be used depending on the use state of the photomultiplier tube device. When it is necessary to keep the temperature of the photocathode particularly constant, a control device that detects the temperature of the photocathode and controls the Peltier element based on the detected value is provided. The temperature of the photocathode can be controlled.

For example, in a photomultiplier tube (HPD) using an avalanche photodiode as the anode, the side tube is made of ceramic instead of metal. For example, a photomultiplier tube having such a ceramic side tube is used. The same operation and effect can be obtained for a photomultiplier tube having a side tube other than metal.

In addition, an image tube using an electron-implanted CCD (EB-CCD) as a phosphor screen has a stem pin on the bottom surface like a photomultiplier tube, so that the structure of the cooling device according to the present invention can be applied. it can.

As described in detail above, the electron tube device according to the present invention has the following effects. In other words, the heat absorption part of the Peltier element thermally contacts the light receiving surface plate of the electron tube, and the heat radiation part of the Peltier element thermally contacts the inner surface of the end of the housing case having the entrance window. A cooling device for an electron tube can be realized that efficiently cools the surface and prevents the occurrence of dew condensation on the entrance window surface of the housing without using an additional device.

In addition, a part of the housing is constituted by a socket part to which the stem pin of the electron tube is fixed, and a Peltier element is formed by the socket part and the case formed by the electron tube. By holding the device by pressing it, the structure of the device can be simplified, the number of parts can be reduced, and the workability at the time of assembly can be improved, and the size and cost of the device can be reduced. In particular, by using a single element having an opening in the center as a Peltier element, the holding / assembling method can be further simplified. In addition, by dividing the socket portion into a socket and a socket holder, the present invention can be easily applied to an existing electron tube using an existing socket.

Furthermore, by holding the electron tube in the housing only by fixing the stem pin to the socket, thermal effects from outside due to contact between the electron tube and the housing are minimized, and heat is applied to the joint of the Peltier element. More efficient cooling of the photocathode can be realized by using sheet parts having good conductivity. Further, by using the electron tube having the metal side tube, the time until the temperature becomes stable can be shortened. Industrial applicability

The electron tube device according to the present invention can be widely used in medical devices, analytical devices, industrial measuring devices, and the like as optical analyzers for analyzing various substances using absorption, reflection, and polarization of specific wavelengths.

Claims

The scope of the claims

1. A light receiving surface plate (11) having an outer surface and an inner surface, a photoelectric surface (12) formed inside the light receiving surface plate (11), and a stem (14) constituting a base portion A plurality of stem pins (15) fixed to the stem (14); and a side tube (13) interposed between the light receiving face plate (11) and the stem (14). Electron tube (10)

A housing (20) in which the electron tube (10) is installed, and an entrance window (22) is arranged at a position of the electron tube (10) facing the light receiving face plate (11);

A Peltier element (30) installed inside the housing (20) to cool the photoelectric surface (12) of the electron tube (10);

A heat radiation means (32, 21, 33) for radiating the heat generated by the Peltier element (30);

The housing (20) has the entrance window (22) at one end, a case (21) having the other end as an open end, and the open end of the case (21). And a socket part (23) that seals the part side to form an airtight structure.

The electron tube (10) is fixed to the socket portion (23) via the stem pin (15),

In the Peltier element (30), a heat absorbing portion (30a) is located on the light receiving surface plate (11) side of the electron tube (10), and an inner surface of the one end of the case (21) is provided. The heat radiating portion (30b) is disposed on the side of the housing, and the heat radiating portion (30b) is held by being pressed against the case (21) by the socket portion (23) and the electron tube (10). Electron tube device.

2. The electron tube device according to claim 1,

The Peltier device (30) is a single device having an opening at the center. And

An electron tube device, wherein the entrance window (22) of the housing (20) faces the light receiving surface plate (11) of the electron tube (10) via the opening. .

3. In the electron tube device according to claim 1 or 2,

An electron tube device, wherein a heat absorbing portion (30a) of the Peltier element (30) is thermally connected to a part of the light receiving face plate (11).

4. The electron tube device according to any one of claims 1 to 3,

The socket part (23) is fixed to the socket pin (23b) to which the stem pin (15) of the electron tube (10) is connected and fixed and the socket pin (23b). A socket (23c) to which the socket (23a), the socket pin (23b) and the socket (23a) are fixed and which is connected and fixed to the case (21). An electron tube device characterized by comprising:

5. In the electron tube device according to claim 4,

An electron tube device, wherein the socket (23a) is fastened to the case (21) by a holding screw (25).

6. The electron tube device according to any one of claims 1 to 5, wherein the heat absorbing portion (30a) of the Peltier element (30) is provided with the light receiving surface plate via a heat absorbing side sheet (31). (11), wherein the heat radiating portion (30b) is bonded to the inner surface of the one end of the case (21) via a heat radiating sheet (32). Electron tube device.

7. The electron tube device according to any one of claims 1 to 5, wherein the heat absorbing portion (30a) of the Peltier element (30) is connected to the light receiving face plate via a heat conducting member (36). (11), wherein the heat radiating portion (30b) is directly bonded to the inner surface of the one end of the case (21). Electron tube device.

8. The electron tube device according to any one of claims 1 to 7, wherein the case (21) is made of metal.

9. The electron tube device according to claim 8,

An electron tube device, wherein the heat radiating means (32, 21, 33) has a fan (33) attached to the case (21).

10. In the electron tube device according to any one of claims 1 to 10,

The electron tube (10) has the light receiving face plate (11) and an electron multiplier disposed in an internal space defined by the side tube (13) and the stem (14). Electron tube device.

1 1. In the electron tube device according to any one of claims 1 to 10,

An electron tube device, wherein the side tube (13) is made of metal.