WO1999051057A1 - Hearing aids with shielding from electromagnetic radiation and method for producing the same - Google Patents
Hearing aids with shielding from electromagnetic radiation and method for producing the same Download PDFInfo
- Publication number
- WO1999051057A1 WO1999051057A1 PCT/EP1999/002064 EP9902064W WO9951057A1 WO 1999051057 A1 WO1999051057 A1 WO 1999051057A1 EP 9902064 W EP9902064 W EP 9902064W WO 9951057 A1 WO9951057 A1 WO 9951057A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- metal
- hearing aid
- anode
- hearing
- plasma
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R25/00—Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception
- H04R25/60—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2225/00—Details of deaf aids covered by H04R25/00, not provided for in any of its subgroups
- H04R2225/49—Reducing the effects of electromagnetic noise on the functioning of hearing aids, by, e.g. shielding, signal processing adaptation, selective (de)activation of electronic parts in hearing aid
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2225/00—Details of deaf aids covered by H04R25/00, not provided for in any of its subgroups
- H04R2225/57—Aspects of electrical interconnection between hearing aid parts
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R25/00—Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception
- H04R25/60—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
- H04R25/607—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of earhooks
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R25/00—Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception
- H04R25/60—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
- H04R25/609—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of circuitry
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R25/00—Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception
- H04R25/65—Housing parts, e.g. shells, tips or moulds, or their manufacture
- H04R25/658—Manufacture of housing parts
Definitions
- the invention relates to hearing aids with a shield against electromagnetic radiation and a method for producing such aids
- Hearing aids in the sense of the invention are to be understood as hearing aids, amplifiers, wireless headphones, hearing glasses with integrated hearing aids
- HDO hearing devices are placed behind the ear and IDO hearing devices are worn in the ear
- Usual hearing aids generally consist of a microphone, an amplifier unit as well as a receiver and a battery.
- the housings which are worn on the head are made of plastic materials for reasons of weight
- Interference from radio telephones has a very different behavior depending on the type of telephone and the frequency range used by the telephone.
- DE-OS 43 43 702 describes a hearing aid that can be worn on the head and in which, in order to improve the immunity to interference of the hearing aid against the penetration of high-frequency electromagnetic waves, it is proposed to provide the housing with at least two electrically conductive parts that can be electrically conductively connected via a high-frequency seal .
- the housing shells are made of plastic, which is made conductive by adding electrically conductive powder, such as graphite.
- the electrically conductive layers of the abutting edges, which form the elastic high-frequency seal can consist of an electrically conductive film or else of an electrically conductive lacquer layer.
- Another high-frequency seal consists of a tubular aluminum foil jacket.
- DE-OS 19 54 345 describes a hearing aid in which, in order to improve the immunity to interference from electromagnetic radiation, it is provided that active components of the amplifier and transmission circuit of the hearing aid have electromagnetic shielding, for example in the form of a coating of conductive lacquer a metal foil sheath or a plastic coating with embedded conductive plastic. - 3 -
- DE-OS 19 45 760 relates to a digital hearing aid in which an analog to protect against electromagnetic waves.
- Digital converter is arranged in the microphone housing. This is intended to create a digital hearing aid that is largely insensitive to immissions from electromagnetic waves.
- DE-OS 196 02 453 an electrical hearing aid is described in which it is provided to improve the EMC resistance that high-frequency filters are arranged in sensitive components and / or in interference-sensitive line connections of the circuit of the hearing aid and corresponding electrical derivatives for these high-frequency currents can be switched to a potential-forming ground.
- the mass can be formed by the metal foil coating or lining of a housing made of plastic.
- DE-GM 296 08 215 describes a hearing aid in which the integrated circuit is provided with a shield which forms a radio frequency block.
- This shielding consists of a metallic cage, a metal foil sheathing, a coating of conductive varnish or a plastic sheathing with embedded conductive material.
- metal vapor from which a metal vapor plasma is generated by ionization in an arc discharge supported by the metal vapor between the cooled anode and the cooled cathode. From this plasma, the metal is deposited on the flat or flat substrate.
- the electrical decoupling of the metal vapor source and the ionization device allows the evaporation rate and the degree of ionization to be changed and optimized. It has been shown that the latter method allows a very homogeneous thin metallization on flat plastic objects.
- measures must be found to further develop the method in order to adapt the angular divergence and the degree of scatter to the specific application.
- the prior art therefore essentially describes the measures mentioned in order to shield hearing aids against electromagnetic radiation.
- This includes EMC interference suppression of the microphone by means of interference suppression capacitors, interference-proof constructions of the hearing aid amplifier, shielding the strands between the amplifier and the listener, and the microphone or shielding the housing with appropriate protective layers made of aluminum foils, conductive varnishes or conductive plastic.
- the technical object of the invention is therefore to improve the electromagnetic shielding of hearing aids so that the interference radiation into them Hearing aids, for example, of new types of cell phones and other electronic and electrical devices can be suppressed in a simple, inexpensive manner. It should be ensured that even housings and housing seals with a very complicated and versatile shape can be uniformly provided on all sides with an absolutely closed, very thin metal coating of high conductivity.
- This object of the invention is achieved by a method for producing a hearing aid shielded against electromagnetic radiation by partially or completely applying a uniformly thin metal layer on the surface of the housing frame and / or the inside of the housing parts by using a plasma vaporization method, with the implementation of the vaporization method metal vapor is generated by heating in a vacuum or vacuum, from which a metal vapor plasma is built up by separate ionization in an arc discharge supported by the metal vapor between the cooled cathode and the cooled anode, from which the metal is deposited on the surfaces.
- a thermal evaporator unit with a crucible containing at least one metal containing evaporation material is arranged above the anode, the anode encompassing the crucible at least on two sides, that the cathode is positioned at right angles above the anode in such a way that the evaporation lobe of the metal ionized in the cathodic plasma vacuum arc that forms between them extends to a rotating holder for the housing frame and / or housing side parts, that the parameters are set for a closed metal layer thickness of 20 nm to 500 nm such that a) the distance between Anode and evaporator unit between 1 cm to
- the distance between the anode and cathode is between 10 cm and 20 cm
- the distance between the evaporator unit and the holder is 20 cm to 50 cm.
- the arc power at a vacuum of 2 ⁇ 10 " * bar and less is between 0.05 and 0.5 kW, the maximum of the ion energy distribution curves being between 0.5 eV and 50 eV. - 6 -
- the measures of the invention are based on the cathodic plasma coating method, in which the material to be evaporated is thermally evaporated in an arc discharge between a cold cathode and a cold anode and ionized in the arc, very advantageously for producing very homogeneous metal coatings with preferably between 200 nm and 500 nm lying layer operation are used, which have a very high conductivity when using gold as a coating material, for example with a layer thickness of 400 nm has a surface resistance of only 0.3 to 0.4 ohm / D.
- the layers deposited using the method have a very high adhesive strength, the temperature load on the plastic substrates being very low given the layer thicknesses achieved, because of the low particle temperature near the substrate.
- a very high coating rate of approximately 40 nm / s to 50 nm / s with a relatively low arc power also contributes to this.
- the applied layers are compact and highly abrasion-resistant, which enables the housing parts coated in this way to be further processed.
- the high density of the layers also leads to better corrosion resistance of the metallization. Since hearing aids are generally worn behind the ear or in the ear and skin sweat is also present to a greater extent, there is often corrosion of the metallic components of the devices, which can affect the function but also the shielding against electromagnetic radiation . In devices with plastic housings metallized according to the invention, it was found that due to the density of the layer there is considerably better corrosion resistance.
- the density of the layer also means that less metallic material has to be used for adequate shielding, since layers of 100 nm to 1000 nm already have a very good shielding effect. This means a considerably cheaper way to shield hearing aids against electromagnetic radiation.
- metal layers selected from the group: Copper. Gold. Silver, platinum, aluminum, cobalt, nickel or alloys thereof. It is further preferred to apply a corrosion layer to the metal layer, which can consist, for example, of silicon oxide or aluminum trioxide or titanium dioxide. These layers are also preferably applied by means of the plasma vapor deposition process.
- an adhesion promoter layer made of metal such as titanium or chromium
- the metal layer is only partially applied.
- the areas not to be coated can be masked by using appropriate shapes or covers, for example silicone molds or coatings, which cover the areas not to be coated. After the coating, these covers are removed.
- Another object of the invention is a hearing aid with a shield against electromagnetic radiation, which can be obtained by partially or completely applying a metal layer to the housing frame and the inside of the housing parts, the metal layer being applied by means of the plasma vapor deposition method with a thermal metal vapor source according to the invention becomes.
- the hearing aids are hearing aids, hearing glasses with integrated hearing aids, hearing amplifiers or wireless headphones.
- Hearing amplifiers are standardized hearing aids that are not individually adapted to the wearer.
- Figure 1 is an exploded view of an HDO hearing aid for an arrangement behind the ear.
- FIG. 2 shows the exploded view of an IDO hearing device which is arranged in the ear: - 8th -
- Fig. 3 is a schematic representation of an apparatus used for the method according to the invention.
- the method according to the invention is carried out in a device according to FIG. 3 as follows.
- the housing parts to be coated 1; 8 are placed in a vacuum chamber 20, which is then evacuated.
- a plasma vacuum arc is ignited, which burns between the cathode 22 and the anode 23.
- the electrodes are traversed with cooling coils 24.
- the coating material 26 is thermally evaporated from a crucible 25 located within the vacuum chamber.
- the crucible 25 is heated via a resistance heater 27.
- the energy required for this is supplied by a power supply 28 with which the evaporation power can be controlled.
- the vaporized material in the present example gold, reaches the arc burning between cathode 22 and anode 23 and is ionized there.
- the ionized material vapor strikes the surfaces of the housing parts 1 to be coated; 8 down.
- the housing parts in the case shown the housing frame 8, are fastened on rotatable mounting disks 30, each mounting disk carrying, for example, six housing frames, which in turn are mounted on a turntable 32. This ensures that all parts pass through different positions of the vaporization lobe.
- the distance between the anode 23 and the evaporation unit 23-27 should be between 1 cm and 5 cm, the anode 23 being mounted under the crucible 25 and encompassing it at least on two sides so that it ends in or above the level of the crucible.
- the cathode 22 is at a distance of between 10 cm and 50 cm from the anode 23 and is positioned at a right angle such that the evaporation lobe of the metal ionized in the cathodic plasma vacuum arc which forms between them as far as the rotating holder 30; 32 extends for the housing frame and / or housing side parts. It is considered particularly advantageous if the distance between the evaporator unit 23-27 and the holding amg 30, 32 is approximately 20 to 50 cm and the mounting disks 30 rotate in the opposite direction to the turntable 32. In this way, the frame and / or side parts can be moved at 20 rpm to 100 rpm. In addition to the vertical arrangement shown, a horizontal hanging arrangement can also be selected, the area of the crucible cavity being able to be adapted accordingly.
- the thickness of the metal layer can be continuously monitored by layer thickness monitoring sensors during the process and can be regulated by changing the metal evaporation at the metal vapor source and / or the arc power in the vacuum system and, if appropriate, the opening angle of cover plates.
- the control of the arc power it is provided that it is between 0.05 kW and 0.5 kW at a vacuum of 2 x 10 " ⁇ bar and less, the maximum of the ion energy distribution curve should be between 0.5 eV and 50 eV.
- the control input takes place with the aid of the power supply source 29.
- the housing consists of the housing side parts 1 and a housing frame 8.
- the housing side parts are provided on the inside with a metal layer, whereas the surfaces of the housing frame 8 are almost completely metallized.
- the layer thickness of the metallization is preferably 400 nm to 500 nm, as a result of which surface resistances of 0.2 to 0.4 ohm / D can be achieved, which results in a very high shielding performance.
- 1 also shows a battery drawer 2 for receiving the battery for the hearing aid, an audio contact cover 3 and a battery axis 4a and an axis 4b for the audio contact cover.
- a microphone cover 5 and a hearing angle 6 are to be attached to the housing frame 8, in which an amplifier group 7 can be used.
- a hearing tube 9, a receiver 10, a receiver mounting 11, a silicone tube 12, a microphone tube 13, a microphone 14, a microphone mounting 15 and a silicone tube 16 are also accommodated in the housing frame.
- FIG. 2 describes the structure of an IDO hearing aid. that is worn in the ear canal.
- the hearing aid shell 41 is completely metallized on the inside.
- a hearing tube 42 is housed a receiver 43 with the receiver strands 44, which with a - 10 -
- Amplifiers 45 are connected. Microphone strands 46 lead to the microphone 47.
- a faceplate 48 is also metallized on the inside and contains battery contacts which are connected to the amplifier 45 via battery wires 49.
- the proposed measure of metallizing the housing by means of the vacuum arc process is simple, inexpensive and considerably more effective than previous measures such as the application of EMC lacquers, the use of aluminum foils, the use of metal grids or the shielding of individual switching components or the change in circuitry of the electronic components in the hearing aids.
- the usual galvanic and thermal coating processes are unsatisfactory because the parts to be coated are exposed to increased temperature loads.
- IDO hearing aid in the ear
- EMC protective lacquer in the inner shell area
- IDO device with amplifier wrapped in aluminum foil; 3- IDO device with interference suppression capacitors;
- HDO device (behind the ear) with the EMC protective lacquer in the inner shell area;
- HDO device according to the invention with an EMC protective layer of gold applied using the cathodic vacuum arc process;
- HDO device with an EMC protective layer and interference suppressors, the protective layer consisting of gold and applied by means of the cathodic vacuum arc process;
- test hearing aids were carried out with DECT radio telephones and GSM mobile telephones of a more recent design.
- the interfering effect on the test hearing aids was subjectively tested by listening to the devices with a listening fork under the influence of the radiation from the telephones.
- the radio telephones and mobile phones were moved around the test hearing aids in different positions and the interference was assessed acoustically.
- Two devices of each hearing aid variant were tested. As the results are almost identical, the individual results are not listed separately.
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP99917871A EP1092335B1 (en) | 1998-03-28 | 1999-03-26 | Method for producing hearing aids with shielding from electromagnetic radiation |
DE59903662T DE59903662D1 (en) | 1998-03-28 | 1999-03-26 | METHOD FOR PRODUCING HEARING AIDS WITH A SHIELDING AGAINST ELECTROMAGNETIC RADIATION |
AU36003/99A AU3600399A (en) | 1998-03-28 | 1999-03-26 | Hearing aids with shielding from electromagnetic radiation and method for producing the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19813904.7 | 1998-03-28 | ||
DE19813904 | 1998-03-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999051057A1 true WO1999051057A1 (en) | 1999-10-07 |
Family
ID=7862772
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1999/002064 WO1999051057A1 (en) | 1998-03-28 | 1999-03-26 | Hearing aids with shielding from electromagnetic radiation and method for producing the same |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP1092335B1 (en) |
AU (1) | AU3600399A (en) |
DE (1) | DE59903662D1 (en) |
WO (1) | WO1999051057A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010021811A3 (en) * | 2008-08-20 | 2010-04-15 | Kennametal Inc. | Equipment and method for physical vapor deposition |
US9344817B2 (en) | 2000-01-20 | 2016-05-17 | Starkey Laboratories, Inc. | Hearing aid systems |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113686850A (en) * | 2021-07-15 | 2021-11-23 | 张丽 | Anti-radiation monitoring imaging system suitable for vacuum environment |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2070890A (en) * | 1980-02-13 | 1981-09-09 | Drago D | Hearing aids |
EP0463230A1 (en) * | 1990-06-25 | 1992-01-02 | Leybold Aktiengesellschaft | Device for coating substrates |
WO1994000618A1 (en) * | 1992-06-23 | 1994-01-06 | Higher Vacuum Ind Co., Ltd. | Process for laminating metal for emi-blocking over plastic |
DE4322465A1 (en) * | 1993-07-06 | 1995-04-06 | Fraunhofer Ges Forschung | Corrosion-protected steel sheet |
DE4425221C1 (en) * | 1994-07-16 | 1995-08-24 | Dresden Vakuumtech Gmbh | Plasma-aided coating of substrates in reactive atmos. |
WO1996016198A1 (en) * | 1994-11-18 | 1996-05-30 | Surface Engineering | Apparatus for the relative vacuum deposition of a material on bulk parts |
DE19533862C1 (en) * | 1995-03-15 | 1996-07-04 | Borsi Kg F | Process for coating a transparent substrate with a uniform thin metallic film |
US5640457A (en) * | 1995-11-13 | 1997-06-17 | Gnecco; Louis Thomas | Electromagnetically shielded hearing aid |
-
1999
- 1999-03-26 EP EP99917871A patent/EP1092335B1/en not_active Expired - Lifetime
- 1999-03-26 AU AU36003/99A patent/AU3600399A/en not_active Abandoned
- 1999-03-26 WO PCT/EP1999/002064 patent/WO1999051057A1/en active IP Right Grant
- 1999-03-26 DE DE59903662T patent/DE59903662D1/en not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2070890A (en) * | 1980-02-13 | 1981-09-09 | Drago D | Hearing aids |
EP0463230A1 (en) * | 1990-06-25 | 1992-01-02 | Leybold Aktiengesellschaft | Device for coating substrates |
WO1994000618A1 (en) * | 1992-06-23 | 1994-01-06 | Higher Vacuum Ind Co., Ltd. | Process for laminating metal for emi-blocking over plastic |
DE4322465A1 (en) * | 1993-07-06 | 1995-04-06 | Fraunhofer Ges Forschung | Corrosion-protected steel sheet |
DE4425221C1 (en) * | 1994-07-16 | 1995-08-24 | Dresden Vakuumtech Gmbh | Plasma-aided coating of substrates in reactive atmos. |
WO1996016198A1 (en) * | 1994-11-18 | 1996-05-30 | Surface Engineering | Apparatus for the relative vacuum deposition of a material on bulk parts |
DE19533862C1 (en) * | 1995-03-15 | 1996-07-04 | Borsi Kg F | Process for coating a transparent substrate with a uniform thin metallic film |
US5640457A (en) * | 1995-11-13 | 1997-06-17 | Gnecco; Louis Thomas | Electromagnetically shielded hearing aid |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9344817B2 (en) | 2000-01-20 | 2016-05-17 | Starkey Laboratories, Inc. | Hearing aid systems |
US9357317B2 (en) | 2000-01-20 | 2016-05-31 | Starkey Laboratories, Inc. | Hearing aid systems |
WO2010021811A3 (en) * | 2008-08-20 | 2010-04-15 | Kennametal Inc. | Equipment and method for physical vapor deposition |
Also Published As
Publication number | Publication date |
---|---|
EP1092335B1 (en) | 2002-12-04 |
AU3600399A (en) | 1999-10-18 |
EP1092335A1 (en) | 2001-04-18 |
DE59903662D1 (en) | 2003-01-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE4343702C1 (en) | Hearing aid worn on the head | |
EP0008634B1 (en) | Method and apparatus for depositing a layer of a metal or an alloy on an electrically conductive workpiece | |
DE69930305T2 (en) | GAS DISCHARGE TUBE | |
EP0432090B1 (en) | Process for producing a coating and articles coated by the process | |
EP1092335B1 (en) | Method for producing hearing aids with shielding from electromagnetic radiation | |
DE19646700B4 (en) | Vacuum treatment chamber, vacuum sputtering and magnetron assembly | |
DE102007042590A1 (en) | Hearing aid device, particularly behind ear hearing aid device, has electromagnetic shielding or electromagnetic shielding component, in which component comprises electromagnetic shielding layer materially connected with component | |
EP0660642A1 (en) | Hearing aid to be worn on the head | |
EP1122977A2 (en) | Microphone | |
EP1867797A1 (en) | Plastic film, in particular vapor barrier film, for protecting indoor spaces against electromagnetic radiation | |
EP0464397B1 (en) | Method for securing a current collector to an electrode comprising a metallic spongeous supporting structure | |
DE4307740C2 (en) | Method for producing housings with at least one metallic shielding layer | |
WO2020016301A1 (en) | Use of powders of highly reflective metals for additive manufacture | |
DE19544345C1 (en) | Head-mounted hearing aid with electromagnetic shielding | |
DE4011515C1 (en) | Coating substrate with metal (alloy) - by magnetic sputtering, with substrate mounted on surface held at negative voltage | |
EP1270760A1 (en) | Method for coating substrates by sputtering | |
CH696828A5 (en) | Igniter. | |
CH691650A5 (en) | Electric hearing aid. | |
DE202005006225U1 (en) | Housing for electronic components or devices is made from foamed metal or a sandwich material containing one or more layers of foamed metal | |
DE2857102C2 (en) | Device for diffusing in and depositing a metal or alloy layer on an electrically conductive workpiece | |
DE2125936C3 (en) | Cathode for sputtering devices | |
DE2056573C3 (en) | Method of manufacturing an electrolytic capacitor with solid electrolyte | |
DE1765144C (en) | Arrangement and method for the production of layers by means of cathode sputtering | |
EP1912475A1 (en) | Absorption of electromagnetic radiation in hearing devices | |
DE1934327A1 (en) | Thin film prodn by ion sputtering method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AL AM AT AU AZ BA BB BG BR BY CA CH CN CU CZ DE DK EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MD MG MK MN MW MX NO NZ PL PT RO RU SD SE SG SI SK SL TJ TM TR TT UA UG US UZ VN YU ZA ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
NENP | Non-entry into the national phase |
Ref country code: KR |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1999917871 Country of ref document: EP |
|
WWP | Wipo information: published in national office |
Ref document number: 1999917871 Country of ref document: EP |
|
REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
NENP | Non-entry into the national phase |
Ref country code: CA |
|
WWG | Wipo information: grant in national office |
Ref document number: 1999917871 Country of ref document: EP |