WO1998055238A1 - High purity composite useful as a susceptor - Google Patents
High purity composite useful as a susceptor Download PDFInfo
- Publication number
- WO1998055238A1 WO1998055238A1 PCT/US1998/009015 US9809015W WO9855238A1 WO 1998055238 A1 WO1998055238 A1 WO 1998055238A1 US 9809015 W US9809015 W US 9809015W WO 9855238 A1 WO9855238 A1 WO 9855238A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- crucible
- susceptor
- high purity
- carbon
- silicon
- Prior art date
Links
- 239000002131 composite material Substances 0.000 title claims abstract description 84
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 172
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 111
- 239000013078 crystal Substances 0.000 claims abstract description 88
- 239000004065 semiconductor Substances 0.000 claims abstract description 48
- 238000000034 method Methods 0.000 claims abstract description 37
- 230000008569 process Effects 0.000 claims abstract description 32
- 239000000463 material Substances 0.000 claims abstract description 31
- 229910052751 metal Inorganic materials 0.000 claims abstract description 27
- 239000002184 metal Substances 0.000 claims abstract description 26
- 239000012535 impurity Substances 0.000 claims abstract description 23
- 239000011159 matrix material Substances 0.000 claims abstract description 15
- 229920000049 Carbon (fiber) Polymers 0.000 claims abstract description 13
- 239000004917 carbon fiber Substances 0.000 claims abstract description 13
- 238000009616 inductively coupled plasma Methods 0.000 claims abstract description 13
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims abstract description 13
- 150000002739 metals Chemical class 0.000 claims abstract description 12
- 238000004611 spectroscopical analysis Methods 0.000 claims abstract description 10
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 8
- 229910052700 potassium Inorganic materials 0.000 claims abstract description 8
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 7
- 229910052790 beryllium Inorganic materials 0.000 claims abstract description 7
- 229910052793 cadmium Inorganic materials 0.000 claims abstract description 7
- 229910052791 calcium Inorganic materials 0.000 claims abstract description 7
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 7
- 229910052802 copper Inorganic materials 0.000 claims abstract description 7
- 238000001514 detection method Methods 0.000 claims abstract description 7
- 239000004744 fabric Substances 0.000 claims abstract description 7
- 229910052745 lead Inorganic materials 0.000 claims abstract description 7
- 229910052749 magnesium Inorganic materials 0.000 claims abstract description 7
- 229910052748 manganese Inorganic materials 0.000 claims abstract description 7
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 7
- 229910052712 strontium Inorganic materials 0.000 claims abstract description 7
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 7
- 229910052788 barium Inorganic materials 0.000 claims abstract description 6
- 229910052709 silver Inorganic materials 0.000 claims abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 46
- 229910052710 silicon Inorganic materials 0.000 claims description 43
- 239000010703 silicon Substances 0.000 claims description 43
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 19
- 235000012431 wafers Nutrition 0.000 claims description 19
- 239000010453 quartz Substances 0.000 claims description 17
- 238000000576 coating method Methods 0.000 claims description 7
- 230000015556 catabolic process Effects 0.000 claims description 6
- 239000011701 zinc Substances 0.000 claims description 6
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 5
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 5
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 229910052582 BN Inorganic materials 0.000 claims description 3
- QWUZMTJBRUASOW-UHFFFAOYSA-N cadmium tellanylidenezinc Chemical compound [Zn].[Cd].[Te] QWUZMTJBRUASOW-UHFFFAOYSA-N 0.000 claims description 3
- 150000001247 metal acetylides Chemical class 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 3
- -1 borides Chemical class 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 229910052720 vanadium Inorganic materials 0.000 claims 1
- 238000002231 Czochralski process Methods 0.000 abstract description 3
- 229910002804 graphite Inorganic materials 0.000 description 54
- 239000010439 graphite Substances 0.000 description 54
- 238000004519 manufacturing process Methods 0.000 description 22
- 150000001721 carbon Chemical class 0.000 description 20
- 238000012545 processing Methods 0.000 description 16
- 230000002787 reinforcement Effects 0.000 description 14
- 230000006872 improvement Effects 0.000 description 9
- 239000000835 fiber Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- 230000009467 reduction Effects 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 230000008901 benefit Effects 0.000 description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 7
- 229920005591 polysilicon Polymers 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000011109 contamination Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 238000005470 impregnation Methods 0.000 description 5
- 239000002243 precursor Substances 0.000 description 5
- 239000012298 atmosphere Substances 0.000 description 4
- 238000003763 carbonization Methods 0.000 description 4
- 239000000155 melt Substances 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- YVPYQUNUQOZFHG-UHFFFAOYSA-N amidotrizoic acid Chemical compound CC(=O)NC1=C(I)C(NC(C)=O)=C(I)C(C(O)=O)=C1I YVPYQUNUQOZFHG-UHFFFAOYSA-N 0.000 description 3
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000012300 argon atmosphere Substances 0.000 description 2
- 238000001479 atomic absorption spectroscopy Methods 0.000 description 2
- 239000003575 carbonaceous material Substances 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005087 graphitization Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920001568 phenolic resin Polymers 0.000 description 2
- 229920002239 polyacrylonitrile Polymers 0.000 description 2
- 235000013824 polyphenols Nutrition 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- KJLPSBMDOIVXSN-UHFFFAOYSA-N 4-[4-[2-[4-(3,4-dicarboxyphenoxy)phenyl]propan-2-yl]phenoxy]phthalic acid Chemical compound C=1C=C(OC=2C=C(C(C(O)=O)=CC=2)C(O)=O)C=CC=1C(C)(C)C(C=C1)=CC=C1OC1=CC=C(C(O)=O)C(C(O)=O)=C1 KJLPSBMDOIVXSN-UHFFFAOYSA-N 0.000 description 1
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- 229920004449 Halon® Polymers 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229920000297 Rayon Polymers 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 230000003698 anagen phase Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- VWZIXVXBCBBRGP-UHFFFAOYSA-N boron;zirconium Chemical compound B#[Zr]#B VWZIXVXBCBBRGP-UHFFFAOYSA-N 0.000 description 1
- 238000009954 braiding Methods 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009734 composite fabrication Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000013213 extrapolation Methods 0.000 description 1
- 230000012010 growth Effects 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 238000002386 leaching Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012074 organic phase Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 238000005381 potential energy Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002964 rayon Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000009941 weaving Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/71—Ceramic products containing macroscopic reinforcing agents
- C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
- C04B35/80—Fibres, filaments, whiskers, platelets, or the like
- C04B35/83—Carbon fibres in a carbon matrix
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F11/00—Chemical after-treatment of artificial filaments or the like during manufacture
- D01F11/10—Chemical after-treatment of artificial filaments or the like during manufacture of carbon
- D01F11/12—Chemical after-treatment of artificial filaments or the like during manufacture of carbon with inorganic substances ; Intercalation
- D01F11/125—Carbon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
- Y10T442/20—Coated or impregnated woven, knit, or nonwoven fabric which is not [a] associated with another preformed layer or fiber layer or, [b] with respect to woven and knit, characterized, respectively, by a particular or differential weave or knit, wherein the coating or impregnation is neither a foamed material nor a free metal or alloy layer
- Y10T442/2926—Coated or impregnated inorganic fiber fabric
- Y10T442/2984—Coated or impregnated carbon or carbonaceous fiber fabric
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98920187A EP1007225A4 (en) | 1997-06-03 | 1998-05-08 | High purity composite useful as a susceptor |
JP50241899A JP3454516B2 (en) | 1997-06-03 | 1998-05-08 | High purity complex and crystal growth method useful as susceptor |
IL13259198A IL132591A (en) | 1997-06-03 | 1998-05-08 | Crucible susceptor from high purity composite for crystal growing process |
DE1998920187 DE1007225T1 (en) | 1997-06-03 | 1998-05-08 | HIGHLY PURE COMPOSITE MATERIAL FOR USE AS A SUSPECTOR |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/868,211 US5858486A (en) | 1995-02-27 | 1997-06-03 | High purity carbon/carbon composite useful as a crucible susceptor |
US08/868,211 | 1997-06-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1998055238A1 true WO1998055238A1 (en) | 1998-12-10 |
Family
ID=25351242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1998/009015 WO1998055238A1 (en) | 1997-06-03 | 1998-05-08 | High purity composite useful as a susceptor |
Country Status (9)
Country | Link |
---|---|
US (1) | US5858486A (en) |
EP (1) | EP1007225A4 (en) |
JP (1) | JP3454516B2 (en) |
KR (1) | KR100388835B1 (en) |
DE (1) | DE1007225T1 (en) |
IL (1) | IL132591A (en) |
MY (1) | MY116744A (en) |
TW (1) | TW495563B (en) |
WO (1) | WO1998055238A1 (en) |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001038625A2 (en) * | 1999-11-24 | 2001-05-31 | Snecma Moteurs | Method for making a bowl in thermostructural composite material, resulting bowl and use of same as crucible support |
FR2812889A1 (en) * | 2000-08-11 | 2002-02-15 | Snecma Moteurs | Production of single-piece bowl, used as crucible support in monocrystalline silicon manufacture, comprises stacking deformable fibrous reinforcement strata on form corresponding to bowl, followed by densification |
FR2819803A1 (en) * | 2001-01-24 | 2002-07-26 | Eads Launch Vehicles | PROCESS FOR MANUFACTURING A CARBON / CARBON CRUCIBLE HOLDER AND OBTAINED CRUCIBLE HOLDER |
WO2002072926A1 (en) * | 2001-03-08 | 2002-09-19 | Hitco Carbon Composites, Inc. | Hybrid crucible susceptor |
WO2007063562A1 (en) * | 2005-12-02 | 2007-06-07 | Brembo Ceramic Brake Systems S.P.A. | Induction furnace |
JP2007297275A (en) * | 1996-06-27 | 2007-11-15 | Toyo Tanso Kk | Crucible for pulling single crystal |
JP2007297276A (en) * | 1996-06-27 | 2007-11-15 | Toyo Tanso Kk | Crucible for pulling single crystal |
JP2007314421A (en) * | 1996-06-27 | 2007-12-06 | Toyo Tanso Kk | Crucible for pulling single crystal |
JP2007314422A (en) * | 1996-06-27 | 2007-12-06 | Toyo Tanso Kk | Method of manufacturing crucible for pulling single crystal |
JP2007314420A (en) * | 1996-06-27 | 2007-12-06 | Toyo Tanso Kk | Crucible for pulling single crystal |
US20090211518A1 (en) * | 2008-02-26 | 2009-08-27 | Ibiden Co., Ltd. | Crucible holding member and method for producing the same |
US20090288592A1 (en) * | 2008-05-21 | 2009-11-26 | Ibiden Co., Ltd. | Crucible holding member and method for producing the same |
EP2284122A1 (en) * | 2002-06-17 | 2011-02-16 | Toyo Tanso Co., Ltd. | Low nitrogen concentration carbonaceous material and manufacturing method thereof |
EP2510569A1 (en) * | 2009-12-11 | 2012-10-17 | Energ2 Technologies, Inc. | Carbon materials comprising an electrochemical modifier |
US8797717B2 (en) | 2006-11-15 | 2014-08-05 | University Of Washington | Electrodes and electric double layer capacitance devices comprising an activated carbon cryogel |
US9409777B2 (en) | 2012-02-09 | 2016-08-09 | Basf Se | Preparation of polymeric resins and carbon materials |
US10454103B2 (en) | 2013-03-14 | 2019-10-22 | Group14 Technologies, Inc. | Composite carbon materials comprising lithium alloying electrochemical modifiers |
WO2024054398A1 (en) * | 2022-09-07 | 2024-03-14 | Globalwafers Co., Ltd. | Single crystal growth susceptor assembly with sacrifice ring |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69739830D1 (en) * | 1996-06-27 | 2010-05-20 | Toyo Tanso Co | CRYSTAL DRAWING MIRROR AND METHOD FOR THE PRODUCTION THEREOF |
US6100587A (en) * | 1999-08-26 | 2000-08-08 | Lucent Technologies Inc. | Silicon carbide barrier layers for porous low dielectric constant materials |
FR2801304B1 (en) * | 1999-11-24 | 2002-02-15 | Snecma | PROCESS FOR PRODUCING A BOWL OF THERMOSTRUCTURAL COMPOSITE MATERIAL, IN PARTICULAR FOR A SINGLE CRYSTAL SILICON PRODUCTION INSTALLATION |
US6348870B1 (en) * | 2000-12-28 | 2002-02-19 | Seh America, Inc. | Melt spill indicator device |
AU2002349317A1 (en) * | 2001-10-08 | 2003-04-22 | Timcal Ag | Electrochemical cell |
WO2003031130A1 (en) * | 2001-10-09 | 2003-04-17 | Dean Jurik | Textured masonry block mold and method |
US20030113488A1 (en) * | 2001-12-19 | 2003-06-19 | Wacker Siltronic Ag | Device for holding a molten semiconductor material |
US20030209326A1 (en) * | 2002-05-07 | 2003-11-13 | Mattson Technology, Inc. | Process and system for heating semiconductor substrates in a processing chamber containing a susceptor |
WO2004044275A2 (en) * | 2002-11-12 | 2004-05-27 | Memc Electronic Materials, Inc. | Process for removing metallic impurities from silicon carbide coated components of a silicon single crystal pulling apparatus |
US7691199B2 (en) * | 2004-06-18 | 2010-04-06 | Memc Electronic Materials, Inc. | Melter assembly and method for charging a crystal forming apparatus with molten source material |
US7465351B2 (en) * | 2004-06-18 | 2008-12-16 | Memc Electronic Materials, Inc. | Melter assembly and method for charging a crystal forming apparatus with molten source material |
US7723262B2 (en) * | 2005-11-21 | 2010-05-25 | Energ2, Llc | Activated carbon cryogels and related methods |
US8303916B2 (en) * | 2008-02-01 | 2012-11-06 | Oscura, Inc. | Gaseous transfer in multiple metal bath reactors |
WO2010027504A1 (en) * | 2008-09-08 | 2010-03-11 | Materials And Electrochemical Research (Mer) Corporation | Machinable metal/diamond metal matrix composite compound structure and method of making same |
US8293818B2 (en) | 2009-04-08 | 2012-10-23 | Energ2 Technologies, Inc. | Manufacturing methods for the production of carbon materials |
BRPI1012996A2 (en) * | 2009-06-10 | 2018-01-16 | Mitsubishi Rayon Co | carbon fiber beam that develops high mechanical performance |
WO2011003033A1 (en) * | 2009-07-01 | 2011-01-06 | Energ2, Inc. | Ultrapure synthetic carbon materials |
JP4815003B2 (en) * | 2010-03-09 | 2011-11-16 | 佑吉 堀岡 | Crucible for silicon crystal growth, crucible manufacturing method for silicon crystal growth, and silicon crystal growth method |
US8916296B2 (en) | 2010-03-12 | 2014-12-23 | Energ2 Technologies, Inc. | Mesoporous carbon materials comprising bifunctional catalysts |
WO2012045002A1 (en) | 2010-09-30 | 2012-04-05 | Energ2 Technologies, Inc. | Enhanced packing of energy storage particles |
WO2012092210A1 (en) | 2010-12-28 | 2012-07-05 | Energ2 Technologies, Inc. | Carbon materials comprising enhanced electrochemical properties |
US20120262127A1 (en) | 2011-04-15 | 2012-10-18 | Energ2 Technologies, Inc. | Flow ultracapacitor |
US10522836B2 (en) | 2011-06-03 | 2019-12-31 | Basf Se | Carbon-lead blends for use in hybrid energy storage devices |
KR101444525B1 (en) | 2012-07-19 | 2014-09-24 | 주식회사 엘지실트론 | Crucible for growing large diameter silicon single crystal and manufacturing method therof |
US10195583B2 (en) | 2013-11-05 | 2019-02-05 | Group 14 Technologies, Inc. | Carbon-based compositions with highly efficient volumetric gas sorption |
KR102347131B1 (en) | 2014-03-14 | 2022-01-04 | 그룹14 테크놀로지스, 인코포레이티드 | Novel methods for sol-gel polymerization in absence of solvent and creation of tunable carbon structure from same |
CN204455392U (en) * | 2015-02-12 | 2015-07-08 | 新永裕应用科技材料股份有限公司 | The production system of vapor deposition graphite fiber composition |
US20190097222A1 (en) | 2015-08-14 | 2019-03-28 | Energ2 Technologies, Inc. | Composites of porous nano-featured silicon materials and carbon materials |
WO2017040299A1 (en) | 2015-08-28 | 2017-03-09 | Energ2 Technologies, Inc. | Novel materials with extremely durable intercalation of lithium and manufacturing methods thereof |
US10407769B2 (en) * | 2016-03-18 | 2019-09-10 | Goodrich Corporation | Method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces |
WO2017198506A1 (en) * | 2016-05-18 | 2017-11-23 | Basf Se | Open vessels and their use |
EP3593369A4 (en) | 2017-03-09 | 2021-03-03 | Group14 Technologies, Inc. | Decomposition of silicon-containing precursors on porous scaffold materials |
US11639292B2 (en) | 2020-08-18 | 2023-05-02 | Group14 Technologies, Inc. | Particulate composite materials |
US11335903B2 (en) | 2020-08-18 | 2022-05-17 | Group14 Technologies, Inc. | Highly efficient manufacturing of silicon-carbon composites materials comprising ultra low z |
US11174167B1 (en) | 2020-08-18 | 2021-11-16 | Group14 Technologies, Inc. | Silicon carbon composites comprising ultra low Z |
CN112457027B (en) * | 2020-11-26 | 2022-10-11 | 西安鑫垚陶瓷复合材料有限公司 | Large-size circular-section ceramic matrix composite component melting siliconizing tool and method |
CN114703466B (en) * | 2022-02-07 | 2024-04-09 | 常州第六元素半导体有限公司 | Continuous CVD film manufacturing apparatus and method |
WO2023235285A1 (en) * | 2022-06-01 | 2023-12-07 | Globalwafers Co., Ltd. | Methods for forming single crystal silicon ingots with reduced carbon contamination and susceptors for use in such methods |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4894286A (en) * | 1988-11-07 | 1990-01-16 | Rohr Industries, Inc. | Oxidation resistant refractory coated carbon-carbon composites |
US5132145A (en) * | 1987-04-27 | 1992-07-21 | Societe Anonyme | Method of making composite material crucible for use in a device for making single crystals |
Family Cites Families (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3174895A (en) * | 1960-09-07 | 1965-03-23 | Union Carbide Corp | Graphite cloth laminates |
US3462289A (en) * | 1965-08-05 | 1969-08-19 | Carborundum Co | Process for producing reinforced carbon and graphite bodies |
US3672936A (en) * | 1968-04-18 | 1972-06-27 | Carborundum Co | Reinforced carbon and graphite articles |
DE2240884A1 (en) * | 1972-08-19 | 1974-02-28 | Sigri Elektrographit Gmbh | Space between blast furnace wall and lining - filled with compacted graphite expandate |
US4178413A (en) * | 1977-10-03 | 1979-12-11 | The Carborundum Company | Fiber reinforced carbon and graphite articles and a method of producing said articles |
US4397901A (en) * | 1979-07-31 | 1983-08-09 | Warren James W | Composite article and method of making same |
US4275095A (en) * | 1979-07-31 | 1981-06-23 | Warren Consultants, Inc. | Composite article and method of making same |
US4585675A (en) * | 1981-04-07 | 1986-04-29 | Ltv Aerospace And Defense Company | Alumina silicon carbide, and silicon primary protective coatings for carbon-carbon substrates |
US4465777A (en) * | 1981-04-08 | 1984-08-14 | Vought Corporation | Composition and method for forming a protective coating on carbon-carbon substrates |
US4500602A (en) * | 1981-08-10 | 1985-02-19 | Ltv Aerospace And Defense Co. | Composite protective coating for carbon-carbon substrates |
US4487799A (en) * | 1982-06-24 | 1984-12-11 | United Technologies Corporation | Pyrolytic graphite pretreatment for carbon-carbon composites |
US4472476A (en) * | 1982-06-24 | 1984-09-18 | United Technologies Corporation | Composite silicon carbide/silicon nitride coatings for carbon-carbon materials |
US4476164A (en) * | 1982-06-24 | 1984-10-09 | United Technologies Corporation | Deposition of improved SiC coatings on carbon-base materials |
US4425407A (en) * | 1982-06-24 | 1984-01-10 | United Technologies Corporation | CVD SiC pretreatment for carbon-carbon composites |
US4476178A (en) * | 1982-06-24 | 1984-10-09 | United Technologies Corporation | Composite silicon carbide coatings for carbon-carbon materials |
US4515860A (en) * | 1982-09-10 | 1985-05-07 | Dart Industries Inc. | Self protecting carbon bodies and method for making same |
US4599256A (en) * | 1982-09-29 | 1986-07-08 | Avco Corporation | Self-healing oxidation-resistant carbon structure |
US4507272A (en) * | 1983-05-09 | 1985-03-26 | Hitco | Method of purifying partially carbonized pan material prior to carbonization |
DE3327659A1 (en) * | 1983-07-30 | 1985-02-14 | MTU Motoren- und Turbinen-Union München GmbH, 8000 München | METHOD FOR PRODUCING A COMPOSITE BODY FROM CERAMIC OR FIBER-REINFORCED CERAMIC, AND A SANDWICH PRODUCTION PRODUCED BY THIS METHOD |
DE3328313A1 (en) * | 1983-08-05 | 1985-02-14 | Sigri Elektrographit Gmbh, 8901 Meitingen | Wall element for slag tap furnace |
US4833030A (en) * | 1984-05-18 | 1989-05-23 | Hitco | Polymer impregnated and carbonized carbon/carbon composite |
CA1287711C (en) * | 1984-11-30 | 1991-08-20 | Paul E. Gray | Oxidation-inhibited carbon-carbon composites |
US4671997A (en) * | 1985-04-08 | 1987-06-09 | United Technologies Corporation | Gas turbine composite parts |
US4684021A (en) * | 1986-06-23 | 1987-08-04 | Fluoroware, Inc. | Bottom loading wafer carrier box |
JPH0343250Y2 (en) * | 1986-06-27 | 1991-09-10 | ||
JPS63112464A (en) * | 1986-10-31 | 1988-05-17 | 住友金属工業株式会社 | Manufacture of carbon fiber reinforced carbon material |
GB8627819D0 (en) * | 1986-11-20 | 1986-12-17 | Dunlop Ltd | Panels |
US5207992A (en) * | 1986-12-26 | 1993-05-04 | Toshiba Ceramics Co., Ltd. | Silicon single crystal pulling-up apparatus |
FR2611198B1 (en) * | 1987-02-25 | 1991-12-06 | Aerospatiale | COMPOSITE MATERIAL WITH MATRIX AND CARBON REINFORCING FIBERS AND METHOD FOR MANUFACTURING THE SAME |
US4868056A (en) * | 1988-02-01 | 1989-09-19 | Avco Corporation | Oxygen protection system for carbon |
JPH0678193B2 (en) * | 1988-03-18 | 1994-10-05 | 東洋炭素株式会社 | Carbon fiber reinforced carbon composite material excellent in thermal shock resistance and method for producing the same |
US4998879A (en) * | 1988-04-29 | 1991-03-12 | Norton Company | High purity diffusion furnace components |
DE3820714A1 (en) * | 1988-06-18 | 1989-12-21 | Sigri Gmbh | Crucible for molten silicon |
CA2082819C (en) * | 1990-05-18 | 2001-10-02 | Bp Chemicals (Hitco) Inc. | Materials for chemical vapor deposition processes |
DE4325522C1 (en) * | 1993-07-30 | 1994-11-17 | Schunk Kohlenstofftechnik Gmbh | Crucible, in particular support crucible |
JPH0789789A (en) * | 1993-09-20 | 1995-04-04 | Fujitsu Ltd | Si crystal, method for growing crystal and device therefor |
US5616175A (en) * | 1994-07-22 | 1997-04-01 | Herecules Incorporated | 3-D carbon-carbon composites for crystal pulling furnace hardware |
US5683281A (en) * | 1995-02-27 | 1997-11-04 | Hitco Technologies, Inc | High purity composite useful as furnace components |
JPH10130067A (en) * | 1996-10-23 | 1998-05-19 | Toyo Tanso Kk | Production of c/c crucible for pulling up signal crystal |
JP3101224B2 (en) * | 1997-02-06 | 2000-10-23 | 日本カーボン株式会社 | Carbon fiber reinforced carbon crucible for pulling silicon single crystal |
JPH10273369A (en) * | 1997-03-28 | 1998-10-13 | Nissan Motor Co Ltd | Production of c/c-composite material excellent in silicon attack resistance and crucible made of c/c |
-
1997
- 1997-06-03 US US08/868,211 patent/US5858486A/en not_active Expired - Fee Related
-
1998
- 1998-01-14 TW TW87100441A patent/TW495563B/en not_active IP Right Cessation
- 1998-05-08 IL IL13259198A patent/IL132591A/en not_active IP Right Cessation
- 1998-05-08 JP JP50241899A patent/JP3454516B2/en not_active Expired - Fee Related
- 1998-05-08 DE DE1998920187 patent/DE1007225T1/en active Pending
- 1998-05-08 WO PCT/US1998/009015 patent/WO1998055238A1/en not_active Application Discontinuation
- 1998-05-08 KR KR10-1999-7010422A patent/KR100388835B1/en not_active IP Right Cessation
- 1998-05-08 EP EP98920187A patent/EP1007225A4/en not_active Withdrawn
- 1998-05-29 MY MYPI98002412A patent/MY116744A/en unknown
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5132145A (en) * | 1987-04-27 | 1992-07-21 | Societe Anonyme | Method of making composite material crucible for use in a device for making single crystals |
US4894286A (en) * | 1988-11-07 | 1990-01-16 | Rohr Industries, Inc. | Oxidation resistant refractory coated carbon-carbon composites |
Non-Patent Citations (1)
Title |
---|
See also references of EP1007225A4 * |
Cited By (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007297275A (en) * | 1996-06-27 | 2007-11-15 | Toyo Tanso Kk | Crucible for pulling single crystal |
JP4634419B2 (en) * | 1996-06-27 | 2011-02-16 | 東洋炭素株式会社 | Single crystal pulling crucible |
JP2007314420A (en) * | 1996-06-27 | 2007-12-06 | Toyo Tanso Kk | Crucible for pulling single crystal |
JP2007314422A (en) * | 1996-06-27 | 2007-12-06 | Toyo Tanso Kk | Method of manufacturing crucible for pulling single crystal |
JP2007314421A (en) * | 1996-06-27 | 2007-12-06 | Toyo Tanso Kk | Crucible for pulling single crystal |
JP4686509B2 (en) * | 1996-06-27 | 2011-05-25 | 東洋炭素株式会社 | Single crystal pulling crucible |
JP2007297276A (en) * | 1996-06-27 | 2007-11-15 | Toyo Tanso Kk | Crucible for pulling single crystal |
JP4686508B2 (en) * | 1996-06-27 | 2011-05-25 | 東洋炭素株式会社 | Single crystal pulling crucible |
JP4634420B2 (en) * | 1996-06-27 | 2011-02-16 | 東洋炭素株式会社 | Method for producing crucible for pulling single crystal |
KR100761580B1 (en) * | 1999-11-24 | 2007-10-04 | 에스엔이씨엠에이 | Method for making a bowl in thermostructural composite material, resulting bowl and use of same as crucible support |
US6837952B1 (en) | 1999-11-24 | 2005-01-04 | Snecma Moteurs | Method for making a bowl in thermostructural composite material |
WO2001038625A2 (en) * | 1999-11-24 | 2001-05-31 | Snecma Moteurs | Method for making a bowl in thermostructural composite material, resulting bowl and use of same as crucible support |
WO2001038625A3 (en) * | 1999-11-24 | 2001-12-20 | Snecma Moteurs | Method for making a bowl in thermostructural composite material, resulting bowl and use of same as crucible support |
FR2812889A1 (en) * | 2000-08-11 | 2002-02-15 | Snecma Moteurs | Production of single-piece bowl, used as crucible support in monocrystalline silicon manufacture, comprises stacking deformable fibrous reinforcement strata on form corresponding to bowl, followed by densification |
WO2002059061A1 (en) * | 2001-01-24 | 2002-08-01 | Eads Launch Vehicles | Method for making a carbon/carbon crucible holder and resulting crucible stand |
FR2819803A1 (en) * | 2001-01-24 | 2002-07-26 | Eads Launch Vehicles | PROCESS FOR MANUFACTURING A CARBON / CARBON CRUCIBLE HOLDER AND OBTAINED CRUCIBLE HOLDER |
WO2002072926A1 (en) * | 2001-03-08 | 2002-09-19 | Hitco Carbon Composites, Inc. | Hybrid crucible susceptor |
EP2284122A1 (en) * | 2002-06-17 | 2011-02-16 | Toyo Tanso Co., Ltd. | Low nitrogen concentration carbonaceous material and manufacturing method thereof |
WO2007063562A1 (en) * | 2005-12-02 | 2007-06-07 | Brembo Ceramic Brake Systems S.P.A. | Induction furnace |
US10600581B2 (en) | 2006-11-15 | 2020-03-24 | Basf Se | Electric double layer capacitance device |
US8797717B2 (en) | 2006-11-15 | 2014-08-05 | University Of Washington | Electrodes and electric double layer capacitance devices comprising an activated carbon cryogel |
US10141122B2 (en) | 2006-11-15 | 2018-11-27 | Energ2, Inc. | Electric double layer capacitance device |
US20090211518A1 (en) * | 2008-02-26 | 2009-08-27 | Ibiden Co., Ltd. | Crucible holding member and method for producing the same |
US20090288592A1 (en) * | 2008-05-21 | 2009-11-26 | Ibiden Co., Ltd. | Crucible holding member and method for producing the same |
EP2510569A4 (en) * | 2009-12-11 | 2014-01-08 | Energ2 Technologies Inc | Carbon materials comprising an electrochemical modifier |
EP2510569A1 (en) * | 2009-12-11 | 2012-10-17 | Energ2 Technologies, Inc. | Carbon materials comprising an electrochemical modifier |
US9409777B2 (en) | 2012-02-09 | 2016-08-09 | Basf Se | Preparation of polymeric resins and carbon materials |
US10454103B2 (en) | 2013-03-14 | 2019-10-22 | Group14 Technologies, Inc. | Composite carbon materials comprising lithium alloying electrochemical modifiers |
US10714744B2 (en) | 2013-03-14 | 2020-07-14 | Group14 Technologies, Inc. | Composite carbon materials comprising lithium alloying electrochemical modifiers |
WO2024054398A1 (en) * | 2022-09-07 | 2024-03-14 | Globalwafers Co., Ltd. | Single crystal growth susceptor assembly with sacrifice ring |
Also Published As
Publication number | Publication date |
---|---|
IL132591A (en) | 2003-02-12 |
JP2000513702A (en) | 2000-10-17 |
KR100388835B1 (en) | 2003-06-25 |
EP1007225A1 (en) | 2000-06-14 |
EP1007225A4 (en) | 2000-08-09 |
KR20010020451A (en) | 2001-03-15 |
TW495563B (en) | 2002-07-21 |
DE1007225T1 (en) | 2001-03-01 |
JP3454516B2 (en) | 2003-10-06 |
IL132591A0 (en) | 2001-03-19 |
US5858486A (en) | 1999-01-12 |
MY116744A (en) | 2004-03-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5858486A (en) | High purity carbon/carbon composite useful as a crucible susceptor | |
US5800924A (en) | High purity composite useful as furnace components | |
US20020166503A1 (en) | Hybrid crucible susceptor | |
CA1332698C (en) | High purity diffusion furnace components | |
US5616175A (en) | 3-D carbon-carbon composites for crystal pulling furnace hardware | |
US6455160B1 (en) | High purity C/C composite and manufacturing method thereof | |
EP0229322B1 (en) | Method and apparatus for czochralski single crystal growing | |
JP4514846B2 (en) | High purity carbon fiber reinforced carbon composite material and method for producing the same | |
JP2002226292A (en) | Method for fitting carbonaceous crucible into bowl and fabricated apparatus for metallurgy using the method | |
Ishikawa et al. | Structural control aiming for high-performance SiC polycrystalline fiber | |
JP2001261481A (en) | Sheet for protecting inner surface of carbonaceous crucible | |
KR100694913B1 (en) | A method of manufacturing a thermostructural composite material bowl, in particular for an installation that produces silicon single crystals | |
Istomina et al. | Preparation of a SiC Fiber textile material | |
EP1120484B1 (en) | Carbon fiber reinforced carbon composite and useful as components for pulling single crystal apparatus | |
JP2000351689A (en) | Carbon fiber-reinforced carbon composite material coated with pyrolyzed carbon and part for single crystal-pulling device | |
US6395203B1 (en) | Process for producing low impurity level ceramic | |
US4775565A (en) | Vessel for refractory use having multi-layered wall | |
EP2147991A1 (en) | Expandable graphite sheet, method for protecting carbonaceous crucible using the expandable graphite sheet, and single crystal pulling apparatus | |
McHugh et al. | Synthesis and analysis of alpha silicon carbide components for encapsulation of fuel rods and pellets | |
Bhatt et al. | Strength‐Degrading Mechanisms for Chemically‐Vapor‐Deposited SCS‐6 Silicon Carbide Fibers in an Argon Environment | |
EP0339573B1 (en) | Component for use in a diffusion furnace | |
JP2000290093A (en) | Carbon crucible for single crystal pulling-up | |
Leatherbarrow et al. | The Nature of Silicon Carbide Phases Developed from Different Carbonaceous Sources and its Impact on the Microstructure of Cf/C‐SiC Composites | |
JP2001302256A (en) | Core shaft for producing quartz glass | |
Mullin | Synthesis of single crystal silicon carbide fibers |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 132591 Country of ref document: IL |
|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): IL JP KR |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 1998920187 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1019997010422 Country of ref document: KR |
|
ENP | Entry into the national phase |
Ref country code: JP Ref document number: 1999 502418 Kind code of ref document: A Format of ref document f/p: F |
|
WWP | Wipo information: published in national office |
Ref document number: 1998920187 Country of ref document: EP |
|
WWP | Wipo information: published in national office |
Ref document number: 1019997010422 Country of ref document: KR |
|
WWR | Wipo information: refused in national office |
Ref document number: 1019997010422 Country of ref document: KR |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: 1998920187 Country of ref document: EP |