WO1998037254A3 - Thin films - Google Patents

Thin films Download PDF

Info

Publication number
WO1998037254A3
WO1998037254A3 PCT/GB1998/000556 GB9800556W WO9837254A3 WO 1998037254 A3 WO1998037254 A3 WO 1998037254A3 GB 9800556 W GB9800556 W GB 9800556W WO 9837254 A3 WO9837254 A3 WO 9837254A3
Authority
WO
WIPO (PCT)
Prior art keywords
film
aluminium
depth
varies
sinusoidally
Prior art date
Application number
PCT/GB1998/000556
Other languages
French (fr)
Other versions
WO1998037254A2 (en
Inventor
Frank Placido
Original Assignee
Univ Paisley
Frank Placido
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Paisley, Frank Placido filed Critical Univ Paisley
Priority to AU63011/98A priority Critical patent/AU6301198A/en
Priority to EP98907020A priority patent/EP1000182A2/en
Publication of WO1998037254A2 publication Critical patent/WO1998037254A2/en
Publication of WO1998037254A3 publication Critical patent/WO1998037254A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements

Abstract

The invention provides a thin film comprising successive layers of aluminium oxide, aluminium oxynitride and aluminium nitride, which varies sinusoidally throughout the depth of the film. The film can be used to coat and protect tools with sharp working edges, to provide a stress free thermal protective coating for natural or man-made diamonds, as a light filter and/or as a pigment. It is made by sputtering aluminium using a suitable noble gas in a variable atmosphere of oxygen and nitrogen at room temperature. The film is transparent and has a refractive index which varies between 1.6 to 2.2, again sinusoidally with depth.
PCT/GB1998/000556 1997-02-21 1998-02-23 Thin films WO1998037254A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU63011/98A AU6301198A (en) 1997-02-21 1998-02-23 Thin films
EP98907020A EP1000182A2 (en) 1997-02-21 1998-02-23 Thin films

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9703616.4 1997-02-21
GBGB9703616.4A GB9703616D0 (en) 1997-02-21 1997-02-21 Thin films

Publications (2)

Publication Number Publication Date
WO1998037254A2 WO1998037254A2 (en) 1998-08-27
WO1998037254A3 true WO1998037254A3 (en) 1998-11-19

Family

ID=10808066

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB1998/000556 WO1998037254A2 (en) 1997-02-21 1998-02-23 Thin films

Country Status (5)

Country Link
EP (1) EP1000182A2 (en)
AU (1) AU6301198A (en)
GB (1) GB9703616D0 (en)
WO (1) WO1998037254A2 (en)
ZA (1) ZA981447B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8454805B2 (en) 2008-03-25 2013-06-04 Spts Technologies Limited Method of depositing amorphus aluminium oxynitride layer by reactive sputtering of an aluminium target in a nitrogen/oxygen atmosphere
US9110230B2 (en) 2013-05-07 2015-08-18 Corning Incorporated Scratch-resistant articles with retained optical properties
US9335444B2 (en) 2014-05-12 2016-05-10 Corning Incorporated Durable and scratch-resistant anti-reflective articles
US9359261B2 (en) 2013-05-07 2016-06-07 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US9366784B2 (en) 2013-05-07 2016-06-14 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8864958B2 (en) 2007-03-13 2014-10-21 Jds Uniphase Corporation Method and sputter-deposition system for depositing a layer composed of a mixture of materials and having a predetermined refractive index
DK1980902T3 (en) 2007-04-10 2015-07-27 Jds Uniphase Corp Twisted nematic XLCD CONTRAST COMPENSATION WITH rocked PLADEFORSINKERE
US9684097B2 (en) 2013-05-07 2017-06-20 Corning Incorporated Scratch-resistant articles with retained optical properties
US9703011B2 (en) 2013-05-07 2017-07-11 Corning Incorporated Scratch-resistant articles with a gradient layer
US9427808B2 (en) 2013-08-30 2016-08-30 Kennametal Inc. Refractory coatings for cutting tools
US10160688B2 (en) 2013-09-13 2018-12-25 Corning Incorporated Fracture-resistant layered-substrates and articles including the same
US11267973B2 (en) 2014-05-12 2022-03-08 Corning Incorporated Durable anti-reflective articles
US9790593B2 (en) 2014-08-01 2017-10-17 Corning Incorporated Scratch-resistant materials and articles including the same
EP3770649A1 (en) 2015-09-14 2021-01-27 Corning Incorporated High light transmission and scratch-resistant anti-reflective articles
EP3837223A1 (en) 2018-08-17 2021-06-23 Corning Incorporated Inorganic oxide articles with thin, durable anti-reflective structures

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5437931A (en) * 1993-10-20 1995-08-01 Industrial Technology Research Institute Optically variable multilayer film and optically variable pigment obtained therefrom

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5437931A (en) * 1993-10-20 1995-08-01 Industrial Technology Research Institute Optically variable multilayer film and optically variable pigment obtained therefrom

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PLACIDO F ET AL: "Graded-index films using aluminium oxynitrides", DEVELOPMENTS IN OPTICAL COMPONENT COATING, GLASGOW, UK, 15-16 MAY 1996, vol. 2776, ISSN 0277-786X, PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 1996, SPIE-INT. SOC. OPT. ENG, USA, pages 159 - 168, XP002067559 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8454805B2 (en) 2008-03-25 2013-06-04 Spts Technologies Limited Method of depositing amorphus aluminium oxynitride layer by reactive sputtering of an aluminium target in a nitrogen/oxygen atmosphere
US9110230B2 (en) 2013-05-07 2015-08-18 Corning Incorporated Scratch-resistant articles with retained optical properties
US9359261B2 (en) 2013-05-07 2016-06-07 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US9366784B2 (en) 2013-05-07 2016-06-14 Corning Incorporated Low-color scratch-resistant articles with a multilayer optical film
US9335444B2 (en) 2014-05-12 2016-05-10 Corning Incorporated Durable and scratch-resistant anti-reflective articles

Also Published As

Publication number Publication date
WO1998037254A2 (en) 1998-08-27
GB9703616D0 (en) 1997-04-09
ZA981447B (en) 1998-08-27
AU6301198A (en) 1998-09-09
EP1000182A2 (en) 2000-05-17

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