WO1998014804A1 - Electrically adjustable optical filter - Google Patents
Electrically adjustable optical filter Download PDFInfo
- Publication number
- WO1998014804A1 WO1998014804A1 PCT/FI1997/000600 FI9700600W WO9814804A1 WO 1998014804 A1 WO1998014804 A1 WO 1998014804A1 FI 9700600 W FI9700600 W FI 9700600W WO 9814804 A1 WO9814804 A1 WO 9814804A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- filter
- optical
- mirror element
- mirror
- silicon
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Spectrometry And Color Measurement (AREA)
- Optical Filters (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51626898A JP2001525075A (en) | 1996-10-03 | 1997-10-03 | Electrically adjustable optical filters |
EP97942986A EP0929830A1 (en) | 1996-10-03 | 1997-10-03 | Electrically adjustable optical filter |
AU44626/97A AU4462697A (en) | 1996-10-03 | 1997-10-03 | Electrically adjustable optical filter |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI963976 | 1996-10-03 | ||
FI963976A FI108581B (en) | 1996-10-03 | 1996-10-03 | Electrically adjustable optical filter |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1998014804A1 true WO1998014804A1 (en) | 1998-04-09 |
Family
ID=8546805
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FI1997/000600 WO1998014804A1 (en) | 1996-10-03 | 1997-10-03 | Electrically adjustable optical filter |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0929830A1 (en) |
JP (1) | JP2001525075A (en) |
AU (1) | AU4462697A (en) |
FI (1) | FI108581B (en) |
WO (1) | WO1998014804A1 (en) |
Cited By (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2119712A1 (en) * | 1996-12-17 | 1998-10-01 | Consejo Superior Investigacion | Procedure and microfabricated optical device for detecting absorption/emission bands in the infrared. |
WO1999067692A1 (en) * | 1998-06-24 | 1999-12-29 | Valtion Teknillinen Tutkimuskeskus | Method and system for electrically controlling the spacing between micromechanical electrodes |
JP2002350751A (en) * | 2001-05-30 | 2002-12-04 | Sony Corp | Optical multi-layer structure and its manufacturing method, optical switching element, and image display device |
WO2003001251A1 (en) * | 2001-06-25 | 2003-01-03 | Massachusetts Institute Of Technology | Air gaps for optical applications |
JP2003075733A (en) * | 2001-09-05 | 2003-03-12 | Sony Corp | Thin film optical device |
WO2003056367A1 (en) * | 2001-12-21 | 2003-07-10 | Nokia Corporation | Reflective flat panel display |
CN101228093A (en) * | 2005-07-22 | 2008-07-23 | 高通股份有限公司 | MEMS devices having support structures and methods of fabricating the same |
EP1364190B1 (en) * | 2001-02-05 | 2008-09-17 | Centre National De La Recherche Scientifique | Optoelectronic device with wavelength filtering by cavity coupling |
DE102008040613A1 (en) | 2007-07-23 | 2009-01-29 | Carl Zeiss Smt Ag | Optical system of a microlithographic projection exposure apparatus |
DE102008045504A1 (en) | 2008-09-03 | 2010-03-04 | Gottfried Wilhelm Leibniz Universität Hannover | Optical sensor for scanning images comprises a photoelectric image scanning sensor unit with semiconductor layers impinged with a variably adjusted blocking voltage |
US7957004B2 (en) | 2005-04-15 | 2011-06-07 | Sinvent As | Interference filter |
US8693084B2 (en) | 2008-03-07 | 2014-04-08 | Qualcomm Mems Technologies, Inc. | Interferometric modulator in transmission mode |
US8736939B2 (en) | 2011-11-04 | 2014-05-27 | Qualcomm Mems Technologies, Inc. | Matching layer thin-films for an electromechanical systems reflective display device |
US8885244B2 (en) | 2004-09-27 | 2014-11-11 | Qualcomm Mems Technologies, Inc. | Display device |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
US8941631B2 (en) | 2007-11-16 | 2015-01-27 | Qualcomm Mems Technologies, Inc. | Simultaneous light collection and illumination on an active display |
US8964280B2 (en) | 2006-06-30 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Method of manufacturing MEMS devices providing air gap control |
US8963159B2 (en) | 2011-04-04 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US8970939B2 (en) | 2004-09-27 | 2015-03-03 | Qualcomm Mems Technologies, Inc. | Method and device for multistate interferometric light modulation |
US8971675B2 (en) | 2006-01-13 | 2015-03-03 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
US8979349B2 (en) | 2009-05-29 | 2015-03-17 | Qualcomm Mems Technologies, Inc. | Illumination devices and methods of fabrication thereof |
US8995043B2 (en) | 2011-11-29 | 2015-03-31 | Qualcomm Mems Technologies, Inc. | Interferometric modulator with dual absorbing layers |
US9001412B2 (en) | 2004-09-27 | 2015-04-07 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
US9041751B2 (en) | 2012-11-01 | 2015-05-26 | Qualcomm Mems Technologies, Inc. | Electromechanical systems display device including a movable absorber and a movable reflector assembly |
CN104656176A (en) * | 2013-11-19 | 2015-05-27 | 精工爱普生株式会社 | Optical filter device, optical module and electronic device |
US9057872B2 (en) | 2010-08-31 | 2015-06-16 | Qualcomm Mems Technologies, Inc. | Dielectric enhanced mirror for IMOD display |
US9086564B2 (en) | 2004-09-27 | 2015-07-21 | Qualcomm Mems Technologies, Inc. | Conductive bus structure for interferometric modulator array |
US9097885B2 (en) | 2004-09-27 | 2015-08-04 | Qualcomm Mems Technologies, Inc. | Device having a conductive light absorbing mask and method for fabricating same |
US9110289B2 (en) | 1998-04-08 | 2015-08-18 | Qualcomm Mems Technologies, Inc. | Device for modulating light with multiple electrodes |
US9134527B2 (en) | 2011-04-04 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
CN107240647A (en) * | 2017-06-05 | 2017-10-10 | 京东方科技集团股份有限公司 | A kind of organic light emitting diode device, light fixture |
DE102004013851B4 (en) * | 2004-03-20 | 2021-06-17 | Robert Bosch Gmbh | Process for the production of an interference filter from alternating air-semiconductor layer systems as well as an infrared filter produced with the process |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7370185B2 (en) * | 2003-04-30 | 2008-05-06 | Hewlett-Packard Development Company, L.P. | Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers |
JP4383194B2 (en) * | 2004-02-03 | 2009-12-16 | 古河電気工業株式会社 | Dielectric multilayer filter having predetermined wavelength optical characteristics, design method thereof, design program thereof, and optical add / drop system using the dielectric multilayer filter |
EP2495212A3 (en) * | 2005-07-22 | 2012-10-31 | QUALCOMM MEMS Technologies, Inc. | Mems devices having support structures and methods of fabricating the same |
JP5625614B2 (en) | 2010-08-20 | 2014-11-19 | セイコーエプソン株式会社 | Optical filter, optical filter module, spectrophotometer and optical instrument |
JP7200658B2 (en) * | 2018-09-27 | 2023-01-10 | セイコーエプソン株式会社 | optical devices and electronic devices |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5345328A (en) * | 1992-08-12 | 1994-09-06 | Sandia Corporation | Tandem resonator reflectance modulator |
US5561523A (en) * | 1994-02-17 | 1996-10-01 | Vaisala Oy | Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical material analysis |
-
1996
- 1996-10-03 FI FI963976A patent/FI108581B/en active
-
1997
- 1997-10-03 EP EP97942986A patent/EP0929830A1/en not_active Withdrawn
- 1997-10-03 AU AU44626/97A patent/AU4462697A/en not_active Abandoned
- 1997-10-03 WO PCT/FI1997/000600 patent/WO1998014804A1/en not_active Application Discontinuation
- 1997-10-03 JP JP51626898A patent/JP2001525075A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5345328A (en) * | 1992-08-12 | 1994-09-06 | Sandia Corporation | Tandem resonator reflectance modulator |
US5561523A (en) * | 1994-02-17 | 1996-10-01 | Vaisala Oy | Electrically tunable fabry-perot interferometer produced by surface micromechanical techniques for use in optical material analysis |
Non-Patent Citations (1)
Title |
---|
TECHNICAL DISCLOSURE BULLETIN, Volume 14, No. 8, January 1972, D. GRISCHKOWSKY et al., "Double Fabry-Perot Filter". * |
Cited By (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2119712A1 (en) * | 1996-12-17 | 1998-10-01 | Consejo Superior Investigacion | Procedure and microfabricated optical device for detecting absorption/emission bands in the infrared. |
US9110289B2 (en) | 1998-04-08 | 2015-08-18 | Qualcomm Mems Technologies, Inc. | Device for modulating light with multiple electrodes |
US8928967B2 (en) | 1998-04-08 | 2015-01-06 | Qualcomm Mems Technologies, Inc. | Method and device for modulating light |
WO1999067692A1 (en) * | 1998-06-24 | 1999-12-29 | Valtion Teknillinen Tutkimuskeskus | Method and system for electrically controlling the spacing between micromechanical electrodes |
US6630657B1 (en) | 1998-06-24 | 2003-10-07 | Valtion Teknillinen Tutkimuskeskus | Method and system for electrically controlling the spacing between micromechanical electrodes |
EP1364190B1 (en) * | 2001-02-05 | 2008-09-17 | Centre National De La Recherche Scientifique | Optoelectronic device with wavelength filtering by cavity coupling |
JP2002350751A (en) * | 2001-05-30 | 2002-12-04 | Sony Corp | Optical multi-layer structure and its manufacturing method, optical switching element, and image display device |
JP4720022B2 (en) * | 2001-05-30 | 2011-07-13 | ソニー株式会社 | OPTICAL MULTILAYER STRUCTURE, ITS MANUFACTURING METHOD, OPTICAL SWITCHING DEVICE, AND IMAGE DISPLAY DEVICE |
US7227678B2 (en) | 2001-06-25 | 2007-06-05 | Massachusetts Institute Of Technology | Air gaps for optical applications |
WO2003001251A1 (en) * | 2001-06-25 | 2003-01-03 | Massachusetts Institute Of Technology | Air gaps for optical applications |
JP4736282B2 (en) * | 2001-09-05 | 2011-07-27 | ソニー株式会社 | Thin film optical device |
JP2003075733A (en) * | 2001-09-05 | 2003-03-12 | Sony Corp | Thin film optical device |
WO2003056367A1 (en) * | 2001-12-21 | 2003-07-10 | Nokia Corporation | Reflective flat panel display |
DE102004013851B4 (en) * | 2004-03-20 | 2021-06-17 | Robert Bosch Gmbh | Process for the production of an interference filter from alternating air-semiconductor layer systems as well as an infrared filter produced with the process |
US9097885B2 (en) | 2004-09-27 | 2015-08-04 | Qualcomm Mems Technologies, Inc. | Device having a conductive light absorbing mask and method for fabricating same |
US9001412B2 (en) | 2004-09-27 | 2015-04-07 | Qualcomm Mems Technologies, Inc. | Electromechanical device with optical function separated from mechanical and electrical function |
US8970939B2 (en) | 2004-09-27 | 2015-03-03 | Qualcomm Mems Technologies, Inc. | Method and device for multistate interferometric light modulation |
US8885244B2 (en) | 2004-09-27 | 2014-11-11 | Qualcomm Mems Technologies, Inc. | Display device |
US9086564B2 (en) | 2004-09-27 | 2015-07-21 | Qualcomm Mems Technologies, Inc. | Conductive bus structure for interferometric modulator array |
US7957004B2 (en) | 2005-04-15 | 2011-06-07 | Sinvent As | Interference filter |
US8120125B2 (en) | 2005-07-22 | 2012-02-21 | Qualcomm Mems Technologies, Inc. | MEMS devices having overlying support structures |
US8344470B2 (en) | 2005-07-22 | 2013-01-01 | Qualcomm Mems Technologies, Inc. | Electromechanical devices having support structures |
CN101228093A (en) * | 2005-07-22 | 2008-07-23 | 高通股份有限公司 | MEMS devices having support structures and methods of fabricating the same |
US8971675B2 (en) | 2006-01-13 | 2015-03-03 | Qualcomm Mems Technologies, Inc. | Interconnect structure for MEMS device |
US8964280B2 (en) | 2006-06-30 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Method of manufacturing MEMS devices providing air gap control |
DE102008040613A1 (en) | 2007-07-23 | 2009-01-29 | Carl Zeiss Smt Ag | Optical system of a microlithographic projection exposure apparatus |
US8294991B2 (en) | 2007-07-23 | 2012-10-23 | Carl Zeiss Smt Gmbh | Interference systems for microlithgraphic projection exposure systems |
US8941631B2 (en) | 2007-11-16 | 2015-01-27 | Qualcomm Mems Technologies, Inc. | Simultaneous light collection and illumination on an active display |
US8693084B2 (en) | 2008-03-07 | 2014-04-08 | Qualcomm Mems Technologies, Inc. | Interferometric modulator in transmission mode |
DE102008045504A1 (en) | 2008-09-03 | 2010-03-04 | Gottfried Wilhelm Leibniz Universität Hannover | Optical sensor for scanning images comprises a photoelectric image scanning sensor unit with semiconductor layers impinged with a variably adjusted blocking voltage |
US8979349B2 (en) | 2009-05-29 | 2015-03-17 | Qualcomm Mems Technologies, Inc. | Illumination devices and methods of fabrication thereof |
US9121979B2 (en) | 2009-05-29 | 2015-09-01 | Qualcomm Mems Technologies, Inc. | Illumination devices and methods of fabrication thereof |
US9057872B2 (en) | 2010-08-31 | 2015-06-16 | Qualcomm Mems Technologies, Inc. | Dielectric enhanced mirror for IMOD display |
US8963159B2 (en) | 2011-04-04 | 2015-02-24 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US9134527B2 (en) | 2011-04-04 | 2015-09-15 | Qualcomm Mems Technologies, Inc. | Pixel via and methods of forming the same |
US9081188B2 (en) | 2011-11-04 | 2015-07-14 | Qualcomm Mems Technologies, Inc. | Matching layer thin-films for an electromechanical systems reflective display device |
US8736939B2 (en) | 2011-11-04 | 2014-05-27 | Qualcomm Mems Technologies, Inc. | Matching layer thin-films for an electromechanical systems reflective display device |
US8995043B2 (en) | 2011-11-29 | 2015-03-31 | Qualcomm Mems Technologies, Inc. | Interferometric modulator with dual absorbing layers |
US9041751B2 (en) | 2012-11-01 | 2015-05-26 | Qualcomm Mems Technologies, Inc. | Electromechanical systems display device including a movable absorber and a movable reflector assembly |
EP2873954A3 (en) * | 2013-11-19 | 2015-06-03 | Seiko Epson Corporation | Optical filter device, optical module, and electronic apparatus |
CN104656176A (en) * | 2013-11-19 | 2015-05-27 | 精工爱普生株式会社 | Optical filter device, optical module and electronic device |
US9939629B2 (en) | 2013-11-19 | 2018-04-10 | Seiko Epson Corporation | Optical filter device, optical module, and electronic apparatus |
CN107240647A (en) * | 2017-06-05 | 2017-10-10 | 京东方科技集团股份有限公司 | A kind of organic light emitting diode device, light fixture |
CN107240647B (en) * | 2017-06-05 | 2018-10-23 | 京东方科技集团股份有限公司 | A kind of organic light emitting diode device, lamps and lanterns |
Also Published As
Publication number | Publication date |
---|---|
FI963976A0 (en) | 1996-10-03 |
AU4462697A (en) | 1998-04-24 |
EP0929830A1 (en) | 1999-07-21 |
JP2001525075A (en) | 2001-12-04 |
FI963976A (en) | 1998-04-04 |
FI108581B (en) | 2002-02-15 |
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