WO1996004525A3 - Two axis navigation grade micromachined rotation sensor system - Google Patents

Two axis navigation grade micromachined rotation sensor system Download PDF

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Publication number
WO1996004525A3
WO1996004525A3 PCT/US1995/009533 US9509533W WO9604525A3 WO 1996004525 A3 WO1996004525 A3 WO 1996004525A3 US 9509533 W US9509533 W US 9509533W WO 9604525 A3 WO9604525 A3 WO 9604525A3
Authority
WO
WIPO (PCT)
Prior art keywords
sensing
drive
central portion
drive member
axis
Prior art date
Application number
PCT/US1995/009533
Other languages
French (fr)
Other versions
WO1996004525A2 (en
Inventor
Robert E Stewart
Stanley F Wyse
Samuel H Fersht
Original Assignee
Litton Systems Inc
Robert E Stewart
Stanley F Wyse
Samuel H Fersht
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Litton Systems Inc, Robert E Stewart, Stanley F Wyse, Samuel H Fersht filed Critical Litton Systems Inc
Priority to KR1019970700586A priority Critical patent/KR100203315B1/en
Priority to JP08506629A priority patent/JP3078331B2/en
Priority to EP95934958A priority patent/EP0772762A2/en
Priority to CA002195667A priority patent/CA2195667C/en
Priority to AU37157/95A priority patent/AU3715795A/en
Publication of WO1996004525A2 publication Critical patent/WO1996004525A2/en
Publication of WO1996004525A3 publication Critical patent/WO1996004525A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Abstract

A two axis closed loop angular rate sensor which provides a digital delta theta output signal. A drive member is formed of a single, silicon wafer having a pair of oppositely-facing planar surfaces. The drive member includes a frame and a drive member central portion connected to the frame and arranged to have rotational compliance between the frame and the central portion about an axis perpendicular to the planar surfaces of the silicon wafer. Drive signals are applied to a plurality of electrodes on the central portion to cause rotational oscillation of the drive member central portion about a drive axis perpendicular to the planar surfaces of the silicon wafer. A silicon sensing member is connected to the drive member. The sensing member has a central support member connected to the drive member central portion such that rotational oscillations of the drive member central portion are transmitted to the sensing member central portion. A sensing portion is connected to the sensing member central support member to allow the sensing portion to oscillate about the drive axis and to allow an input rotation rate about an axis perpendicular to the drive axis to produce out-of-plane oscillations of the sensing portions. Signal processing apparatus is connected to the sensing portion for producing a signal indicative of the input rotational rate as a function of the amplitude of the out-of-plane oscillations of the sensing portion.
PCT/US1995/009533 1994-07-29 1995-07-28 Two axis navigation grade micromachined rotation sensor system WO1996004525A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1019970700586A KR100203315B1 (en) 1994-07-29 1995-07-28 Two axis navigation grade micromachined rotation sensor system
JP08506629A JP3078331B2 (en) 1994-07-29 1995-07-28 2-axis navigation grade micro-machined rotation sensor system
EP95934958A EP0772762A2 (en) 1994-07-29 1995-07-28 Two axis navigation grade micromachined rotation sensor system
CA002195667A CA2195667C (en) 1994-07-29 1995-07-28 Two axis navigation grade micromachined rotation sensor system
AU37157/95A AU3715795A (en) 1994-07-29 1995-10-28 Two axis navigation grade micromachined rotation sensor system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US28275794A 1994-07-29 1994-07-29
US08/282,757 1994-07-29

Publications (2)

Publication Number Publication Date
WO1996004525A2 WO1996004525A2 (en) 1996-02-15
WO1996004525A3 true WO1996004525A3 (en) 1996-05-02

Family

ID=23082991

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1995/009533 WO1996004525A2 (en) 1994-07-29 1995-07-28 Two axis navigation grade micromachined rotation sensor system

Country Status (6)

Country Link
EP (1) EP0772762A2 (en)
JP (1) JP3078331B2 (en)
KR (1) KR100203315B1 (en)
AU (1) AU3715795A (en)
CA (1) CA2195667C (en)
WO (1) WO1996004525A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5987986A (en) * 1994-07-29 1999-11-23 Litton Systems, Inc. Navigation grade micromachined rotation sensor system
US5834864A (en) * 1995-09-13 1998-11-10 Hewlett Packard Company Magnetic micro-mover
AU5241599A (en) * 1998-07-31 2000-02-21 Litton Systems, Incorporated Micromachined rotation sensor with modular sensor elements
US6817244B2 (en) * 2003-01-06 2004-11-16 Honeywell International Inc. Methods and systems for actively controlling movement within MEMS structures
US7188522B2 (en) 2003-07-04 2007-03-13 Siemens Aktiengesellschaft Method for aligning a rotation rate sensor
DE10360963B4 (en) * 2003-12-23 2007-05-16 Litef Gmbh Method for measuring rotation rates / accelerations using a yaw rate Coriolis gyro and suitable Coriolis gyro
JP5894703B2 (en) 2012-03-28 2016-03-30 コリア ベーシック サイエンス インスティテュート Demodulation device, demodulation integrated element and modulation / demodulation integrated element

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2113842A (en) * 1982-01-27 1983-08-10 Marconi Co Ltd A sensor for detecting rotational movement
US5313835A (en) * 1991-12-19 1994-05-24 Motorola, Inc. Integrated monolithic gyroscopes/accelerometers with logic circuits

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2113842A (en) * 1982-01-27 1983-08-10 Marconi Co Ltd A sensor for detecting rotational movement
US5313835A (en) * 1991-12-19 1994-05-24 Motorola, Inc. Integrated monolithic gyroscopes/accelerometers with logic circuits

Also Published As

Publication number Publication date
AU3715795A (en) 1996-03-04
KR100203315B1 (en) 1999-06-15
JP3078331B2 (en) 2000-08-21
EP0772762A2 (en) 1997-05-14
WO1996004525A2 (en) 1996-02-15
CA2195667C (en) 2001-05-29
CA2195667A1 (en) 1996-02-15

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