WO1995001590A1 - Dispositif antibasculement, notamment pour mecanismes d'entrainement comportant des paliers a gaz - Google Patents

Dispositif antibasculement, notamment pour mecanismes d'entrainement comportant des paliers a gaz Download PDF

Info

Publication number
WO1995001590A1
WO1995001590A1 PCT/EP1994/002047 EP9402047W WO9501590A1 WO 1995001590 A1 WO1995001590 A1 WO 1995001590A1 EP 9402047 W EP9402047 W EP 9402047W WO 9501590 A1 WO9501590 A1 WO 9501590A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas bearing
bearing part
parallel
carrier
sections
Prior art date
Application number
PCT/EP1994/002047
Other languages
German (de)
English (en)
Inventor
Gerd HÜBNER
Original Assignee
Jenoptik Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Gmbh filed Critical Jenoptik Gmbh
Publication of WO1995001590A1 publication Critical patent/WO1995001590A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B23Q1/385—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports in which the thickness of the fluid-layer is adjustable
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators

Definitions

  • the invention relates to a device for eliminating tilting in drives with gas bearings, in which a movable gas bearing part, which is aligned parallel to a fixed gas bearing part, is a carrier for objects to be moved.
  • Gas-lubricated bearings or guides are particularly suitable as technical solutions for achieving low-friction movements.
  • Straight guides, rotors, tables and other construction elements receive very good properties and best dynamic behavior when subjected to central forces. Design, construction, supply and operation are often superior to other solutions.
  • problems can arise when using these technical solutions for linear and planar drives, in which a stator and a rotor are magnetically designed in such a way that the magnetic forces (permanent magnet) are strengthened or weakened in individual areas by switching the winding currents on and off. This force play creates or changes forces that affect the attraction of the stator and rotor and forces that drive the rotor, a linear movement.
  • the object is achieved by a device for eliminating tilting in drives with gas bearings, in which a movable gas bearing part, which is aligned parallel to a fixed gas bearing part, is a carrier for objects to be moved, in that the movable gas bearing part consists of mutually adjacent carrier parts with mutually parallel edges exists on which the object is fastened both in sections by means of actuating means and in sections by means of joints, the axes of rotation of which are perpendicular to the direction of object movement and parallel to the fixed gas bearing part, and that the measure of a positional deviation of a carrier part from the parallel position to the fixed gas bearing part as a control variable for the actuating means serves.
  • a measured change in parallelism that is to say a tilt, produces the immediate counter-rotation of the carrier parts about their axes of rotation to the extent that the parallelism of the carrier parts with one another and against the fixed gas bearing part is maintained.
  • the actuating means are advantageously piezo elements, eccentrics or the like, which establish a fixed, variable-distance connection between the object and the sections on the carrier parts.
  • the adjusting means can also be designed as a link-based connection between the object and the carrier parts.
  • a solution is suitable for determining the positional deviation, in which at least one carrier part forms pairs of capacitors with the fixed gas bearing part, the spacing distance of which is directed perpendicular to an axis of rotation of the respective carrier part and from whose capacitance di-sequence the control variable for the actuating means is formed.
  • Fig. 1 shows a device according to the invention with a capacitively measuring control
  • Fig. 2 is a suitable bearing part for planar systems in a perspective view
  • a movable gas bearing part consisting of carrier parts 1, 2 is supported on a base plate 3 serving as a fixed gas bearing part by gas storage.
  • the object to be moved is a table 4 which is designed to be solid and which is connected to the support parts 1, 2 in adjoining edge areas of the support parts 1, 2 via an actuating element 5 and an articulated lever 6 and in edge areas without an adjacent support part via hinge joints 7, 8.
  • the hinge joints 7, 8 have axes of rotation parallel to one another and to the base plate 3.
  • the adjusting element 5 transmits both the adjustment of the support parts 1, 2 about the articulation axes of the hinge joints 7, 8 and the load on the table 4 to the support parts 1, 2.
  • At least one of the carrier parts 1, 2 has a capacitor pair C1, C2 formed from partial surfaces of the underside of the carrier part and the base plate 3, which is part of a capacitive measuring system 9, the measurement results of which are fed to a control 10 connected to the actuating element 5.
  • air gaps h g and h k formed by the gas storage between the carrier parts 1, 2 and the base plate 3 are of the same size, so that the carrier parts 1, 2 lie in a common plane parallel to the base plate 3.
  • the measuring system 9 delivers larger values for C2 than for Cl.
  • the system is in equilibrium and although the carrier part 2 takes on a greater load than the carrier part 1, the air gap limits are parallel to one another. Damage to the base plate by a corner or edge of the carrier part 2 is excluded.
  • the device suitable for planar systems in FIG. 2, in which the table, base plate and measuring and control system are not shown for reasons of clarity, consists of four support parts 11, 12, 13 and 14 with mutually parallel edges.
  • the carrier parts 11, 12, 13, 14 can thus be tilted about two axes lying perpendicular to one another and parallel to the edges of the outer corners and the base plate.
  • the piezo elements 15 establish a fixed, adjustable connection to the table arranged above, with which the distance at the location of the connection can be set via corresponding adjusting voltages Rj, S j and Tj. Distance changes to obtain a controlled variable can be determined, for example, on the basis of a solution according to FIG. 1 or by an external measurement using autocollimation.
  • the undersides of the carrier parts 11, 12, 13, 14 are parallel to one another and to the base plate in this state.

Abstract

L'invention vise à mettre au point un dispositif antibasculement pour mécanisme d'entraînement comportant des paliers à gaz, qui exclue tout contact mutuel entre deux parties de palier à gaz, dû à un basculement, sans avoir à augmenter la rigidité intérieure et extérieure. Selon l'invention, la partie mobile d'un mécanisme d'entraînement comprend deux parties-supports (1, 2) adjacentes comportant des arêtes parallèles jumelées sur lesquelles un objet (4) à faire bouger est fixé aussi bien sur certaines sections par l'intermédiaire d'éléments de réglage et sur d'autres, par l'intermédiaire de joints articulés (7, 8). Ces derniers (7, 8) comportent des axes de rotation perpendiculaires au sens de mouvement de l'objet et parallèles à la partie de palier à gaz (3) fixe. La grandeur de l'écart de parallélisme d'une partie-support (1, 2) par rapport à la partie à gaz (3) fixe sert de grandeur de réglage pour les éléments de réglage. L'invention s'utilise pour des objets déplacés sur des paliers à gaz, notamment des systèmes de table déplacés à l'aide de moteurs linéaires ou de moteurs du type planar.
PCT/EP1994/002047 1993-07-02 1994-06-22 Dispositif antibasculement, notamment pour mecanismes d'entrainement comportant des paliers a gaz WO1995001590A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4322011A DE4322011C1 (de) 1993-07-02 1993-07-02 Einrichtung zur Beseitigung von Verkippungen in Antrieben mit Gaslagern
DEP4322011.8 1993-07-02

Publications (1)

Publication Number Publication Date
WO1995001590A1 true WO1995001590A1 (fr) 1995-01-12

Family

ID=6491766

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1994/002047 WO1995001590A1 (fr) 1993-07-02 1994-06-22 Dispositif antibasculement, notamment pour mecanismes d'entrainement comportant des paliers a gaz

Country Status (2)

Country Link
DE (1) DE4322011C1 (fr)
WO (1) WO1995001590A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4370577A (en) * 1980-07-22 1983-01-25 Matsushita Electric Industrial Co., Ltd. Linear motor
US4392642A (en) * 1980-12-22 1983-07-12 Anorad Corporation Workpiece positioning table with air bearing pads
US4698575A (en) * 1986-04-29 1987-10-06 U.S. Philips Corporation Positioning device
EP0421528A1 (fr) * 1989-10-05 1991-04-10 Koninklijke Philips Electronics N.V. Dispositif de positionnement
EP0443831A2 (fr) * 1990-02-21 1991-08-28 Canon Kabushiki Kaisha Dispositif de guidage

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS614638A (ja) * 1984-06-15 1986-01-10 Omron Tateisi Electronics Co 移動台固定装置
US5228358A (en) * 1990-02-21 1993-07-20 Canon Kabushiki Kaisha Motion guiding device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4370577A (en) * 1980-07-22 1983-01-25 Matsushita Electric Industrial Co., Ltd. Linear motor
US4392642A (en) * 1980-12-22 1983-07-12 Anorad Corporation Workpiece positioning table with air bearing pads
US4698575A (en) * 1986-04-29 1987-10-06 U.S. Philips Corporation Positioning device
EP0421528A1 (fr) * 1989-10-05 1991-04-10 Koninklijke Philips Electronics N.V. Dispositif de positionnement
EP0443831A2 (fr) * 1990-02-21 1991-08-28 Canon Kabushiki Kaisha Dispositif de guidage

Also Published As

Publication number Publication date
DE4322011C1 (de) 1994-09-08

Similar Documents

Publication Publication Date Title
DE602004008534T2 (de) Mikropositioniervorrichtung sowie Verfahren zur Kompensation von Position/Orientierung eines Werkzeuges
DE2637533C2 (de) Positioniersystem für den Objektträger eines Mikroskopes
DE4107881C2 (de) Verstellbarer Tisch
EP1803964B1 (fr) Module hybride de rigidité pour isolation de vibrations
DE102015116028A1 (de) Auslenkungsdetektions-Sechs-Achsen-Kraftsensor
DE3100141A1 (de) Werkzeugmaschine mit einem beweglichen tisch fuer ein werkstueck
DE2814578A1 (de) Positioniervorrichtung fuer bauteile mit geregelter nachfuehrung
DE3602549A1 (de) Vorrichtung zum tragen von horizontal und vertikal verstellbaren informationsgeraeten
WO2003009402A2 (fr) Systeme d'actionneurs
DE112009005199T5 (de) Geführter elektromechanischer Motor
EP0143410B1 (fr) Dispositif de déplacement linéaire
DE3225255C2 (fr)
DE19742205A1 (de) Mikropositioniereinrichtung
EP2679962A1 (fr) Dispositif de mesure de position
DE4322011C1 (de) Einrichtung zur Beseitigung von Verkippungen in Antrieben mit Gaslagern
DE10236239B4 (de) Koordinaten-Messtisch
EP0431114B1 (fr) Portique fixe pour un appareil de mesure de coordonnees de haute precision
DE10125031B4 (de) Tischpositioniervorrichtung
WO2007093070A1 (fr) Machine-outil
DE10228818B4 (de) Positioniertisch
AT345042B (de) Federsatz insbesondere fuer einrichtung zur konzentrischen, federnden fuehrung oszillierend bewegter bauteile
DE102007037886A1 (de) Feldgeführter planarer Präzisionsantrieb mit einem luftgelagerten Läufer
DE102013114822B3 (de) Zweiachsige Kippvorrichtung
DE102004056367B4 (de) Lagervorrichtung für eine Vorrichtung zur Ermittlung der Unwucht und der Ungleichförmigkeit eines Rotationskörpers
DE10019226B4 (de) Elektromechanischer Linearantrieb mit Momentenkompensation

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): JP US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FR GB GR IE IT LU MC NL PT SE

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase