WO1994027158A1 - Sensor for articles on an end effector - Google Patents
Sensor for articles on an end effector Download PDFInfo
- Publication number
- WO1994027158A1 WO1994027158A1 PCT/US1994/004672 US9404672W WO9427158A1 WO 1994027158 A1 WO1994027158 A1 WO 1994027158A1 US 9404672 W US9404672 W US 9404672W WO 9427158 A1 WO9427158 A1 WO 9427158A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- plate
- capacitance
- oscillator
- sensor
- voltage
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/2405—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by varying dielectric
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V9/00—Prospecting or detecting by methods not provided for in groups G01V1/00 - G01V8/00
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP94915430A EP0697113A1 (en) | 1993-05-07 | 1994-04-28 | Sensor for articles on an end effector |
KR1019950704979A KR960702619A (en) | 1993-05-07 | 1994-04-28 | Detectors for wafers on the end effector |
JP52547494A JP3372254B2 (en) | 1993-05-07 | 1994-04-28 | Article sensor on end effector |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/058,421 US5539323A (en) | 1993-05-07 | 1993-05-07 | Sensor for articles such as wafers on end effector |
US08/058,421 | 1993-05-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1994027158A1 true WO1994027158A1 (en) | 1994-11-24 |
Family
ID=22016714
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1994/004672 WO1994027158A1 (en) | 1993-05-07 | 1994-04-28 | Sensor for articles on an end effector |
Country Status (6)
Country | Link |
---|---|
US (1) | US5539323A (en) |
EP (1) | EP0697113A1 (en) |
JP (1) | JP3372254B2 (en) |
KR (1) | KR960702619A (en) |
CN (1) | CN1124060A (en) |
WO (1) | WO1994027158A1 (en) |
Families Citing this family (66)
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US5876528A (en) * | 1995-02-17 | 1999-03-02 | Bently Nevada Corporation | Apparatus and method for precluding fluid wicking |
US5980194A (en) * | 1996-07-15 | 1999-11-09 | Applied Materials, Inc. | Wafer position error detection and correction system |
US5914613A (en) | 1996-08-08 | 1999-06-22 | Cascade Microtech, Inc. | Membrane probing system with local contact scrub |
JP3452456B2 (en) | 1997-01-30 | 2003-09-29 | 松下電器産業株式会社 | Connection method and connection cable between electronic devices |
US6075375A (en) * | 1997-06-11 | 2000-06-13 | Applied Materials, Inc. | Apparatus for wafer detection |
DE19725527A1 (en) * | 1997-06-17 | 1998-12-24 | Philips Patentverwaltung | Reactor for processing wafers with a protective device |
US6205870B1 (en) | 1997-10-10 | 2001-03-27 | Applied Komatsu Technology, Inc. | Automated substrate processing systems and methods |
US5948986A (en) * | 1997-12-26 | 1999-09-07 | Applied Materials, Inc. | Monitoring of wafer presence and position in semiconductor processing operations |
US6256882B1 (en) | 1998-07-14 | 2001-07-10 | Cascade Microtech, Inc. | Membrane probing system |
US6215640B1 (en) | 1998-12-10 | 2001-04-10 | Applied Materials, Inc. | Apparatus and method for actively controlling surface potential of an electrostatic chuck |
US6293005B1 (en) | 1999-03-01 | 2001-09-25 | Bently Nevada Corporation | Cable and method for precluding fluid wicking |
US6445202B1 (en) | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
US6411108B1 (en) | 1999-11-05 | 2002-06-25 | Sensor Technologies, Inc. | Noncontact signal analyzer |
JP2002062105A (en) * | 2000-08-23 | 2002-02-28 | Sunx Ltd | Head-separated-type sensor, capacitance-type sensor, and wafer detecting device |
US6965226B2 (en) | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US6914423B2 (en) | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
DE20114544U1 (en) | 2000-12-04 | 2002-02-21 | Cascade Microtech Inc | wafer probe |
US6615113B2 (en) * | 2001-07-13 | 2003-09-02 | Tru-Si Technologies, Inc. | Articles holders with sensors detecting a type of article held by the holder |
US7355420B2 (en) | 2001-08-21 | 2008-04-08 | Cascade Microtech, Inc. | Membrane probing system |
US6545483B1 (en) | 2001-08-29 | 2003-04-08 | Sensor Technologies, Inc. | Analyzer sensor |
US6822413B2 (en) * | 2002-03-20 | 2004-11-23 | Fsi International, Inc. | Systems and methods incorporating an end effector with a rotatable and/or pivotable body and/or an optical sensor having a light path that extends along a length of the end effector |
DE10234537B4 (en) * | 2002-07-30 | 2005-05-19 | Hagenuk KMT Kabelmeßtechnik GmbH | Method and device for locating cable sleeves and cable faults in laid cables |
US7005864B2 (en) * | 2002-10-21 | 2006-02-28 | Synchrony, Inc. | Capacitive position sensing system with resonant amplification |
JP3669990B2 (en) * | 2003-02-12 | 2005-07-13 | ファナック株式会社 | Inverter device grounding method and inverter device |
US7492172B2 (en) | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
US6911873B2 (en) * | 2003-06-24 | 2005-06-28 | Stmicroelectronics, Inc. | Detection circuit and method for an oscillator |
US7250626B2 (en) | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
WO2005060653A2 (en) * | 2003-12-18 | 2005-07-07 | E.I. Dupont De Nemours And Company | Inductive probe having a looped sensing element or a terminated transmission line sensing element and methods and system for using the same |
US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
WO2005065258A2 (en) | 2003-12-24 | 2005-07-21 | Cascade Microtech, Inc. | Active wafer probe |
US7256588B2 (en) * | 2004-04-16 | 2007-08-14 | General Electric Company | Capacitive sensor and method for non-contacting gap and dielectric medium measurement |
US6989679B2 (en) * | 2004-06-03 | 2006-01-24 | General Electric Company | Non-contact capacitive sensor and cable with dual layer active shield |
JP4531469B2 (en) * | 2004-07-15 | 2010-08-25 | 株式会社フジクラ | Capacitive proximity sensor |
US7538561B2 (en) | 2004-09-10 | 2009-05-26 | E. I. Du Pont De Nemours And Company | Method for detecting an interface between first and second strata of materials |
WO2006031564A2 (en) * | 2004-09-10 | 2006-03-23 | E.I. Dupont De Nemours And Company | Sensing apparatus for detecting an interface between first and second strata of materials |
JP2008512680A (en) | 2004-09-13 | 2008-04-24 | カスケード マイクロテック インコーポレイテッド | Double-sided probing structure |
US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
JP2006284198A (en) * | 2005-03-31 | 2006-10-19 | Agilent Technol Inc | Resistor, and device and method for measuring current using the same |
AU2006239263B2 (en) * | 2005-04-27 | 2013-02-21 | Roho, Inc. | Proximity sensor |
US7314997B1 (en) * | 2005-07-18 | 2008-01-01 | Yazaki North America, Inc. | High speed data communication link using triaxial cable |
DE602005009726D1 (en) * | 2005-12-02 | 2008-10-23 | Vibro Meter Ag | Eddy current sensor and sensor coil for it |
US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
US7568946B1 (en) * | 2007-01-16 | 2009-08-04 | Keithley Instruments, Inc. | Triaxial cable with a resistive inner shield |
US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
JP5643991B2 (en) * | 2008-04-17 | 2014-12-24 | シンクロニー, インコーポレイテッドSynchrony, Inc. | High-speed permanent magnet motor and generator with low loss metal rotor |
BRPI0907304A2 (en) | 2008-04-18 | 2016-06-14 | Synchrony Inc | "machine" |
KR101436608B1 (en) * | 2008-07-28 | 2014-09-01 | 삼성전자 주식회사 | Mobile terminal having touch screen and method for displaying cursor thereof |
DE202008010533U1 (en) * | 2008-08-07 | 2008-10-30 | Rosenberger Hochfrequenztechnik Gmbh & Co. Kg | Contactless loop probe |
US7888957B2 (en) | 2008-10-06 | 2011-02-15 | Cascade Microtech, Inc. | Probing apparatus with impedance optimized interface |
WO2010059247A2 (en) | 2008-11-21 | 2010-05-27 | Cascade Microtech, Inc. | Replaceable coupon for a probing apparatus |
US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
US9583991B2 (en) | 2009-06-24 | 2017-02-28 | Synchrony, Inc. | Systems, devices, and/or methods for managing magnetic bearings |
US8188754B2 (en) | 2009-07-15 | 2012-05-29 | Maxim Integrated Products, Inc. | Method and apparatus for sensing capacitance value and converting it into digital format |
US8570055B2 (en) * | 2009-12-31 | 2013-10-29 | Mapper Lithography Ip B.V. | Capacitive sensing system |
US8987959B2 (en) | 2010-06-23 | 2015-03-24 | Dresser-Rand Company | Split magnetic thrust bearing |
JP5490741B2 (en) | 2011-03-02 | 2014-05-14 | 東京エレクトロン株式会社 | Substrate transport apparatus position adjustment method and substrate processing apparatus |
EP2726822B1 (en) * | 2011-06-30 | 2016-11-09 | Mapper Lithography IP B.V. | Active shield for capacitive measurement system |
US9983228B2 (en) * | 2014-09-24 | 2018-05-29 | Keithley Instruments, Llc | Triaxial DC-AC connection system |
JP2018137189A (en) * | 2017-02-24 | 2018-08-30 | 株式会社シンテックホズミ | Proximity sensor |
US10890990B2 (en) * | 2017-09-25 | 2021-01-12 | Google Llc | Rotation input device for a capacitive sense cord |
CN108736434A (en) * | 2018-08-10 | 2018-11-02 | 中航建设集团成套装备股份有限公司 | A kind of cable T-type connect-disconnect plug |
US10950369B1 (en) * | 2020-07-20 | 2021-03-16 | Dell Products L.P. | Inverted cable design for high-speed, low loss signal transmission |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3626287A (en) * | 1969-02-10 | 1971-12-07 | C G I Corp | System for responding to changes in capacitance of a sensing capacitor |
US4918376A (en) * | 1989-03-07 | 1990-04-17 | Ade Corporation | A.C. capacitive gauging system |
US5166679A (en) * | 1991-06-06 | 1992-11-24 | The United States Of America As Represented By The Administrator Of The National Aeronautics & Space Administration | Driven shielding capacitive proximity sensor |
Family Cites Families (14)
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US3883826A (en) * | 1971-07-15 | 1975-05-13 | Ici Ltd | Adjustable frequency oscillator with regenerative feedback and a coupling unit including a differential amplifier for adjusting the feedback |
US3870948A (en) * | 1972-09-05 | 1975-03-11 | Acme Cleveland Corp | Proximity circuit with active device feedback |
US4067225A (en) * | 1977-03-21 | 1978-01-10 | Mechanical Technology Incorporated | Capacitance type non-contact displacement and vibration measuring device and method of maintaining calibration |
US4176555A (en) * | 1978-08-07 | 1979-12-04 | Mechanical Technology Incorporated | Signal amplifier system for controlled carrier signal measuring sensor/transducer of the variable impedance type |
US4347741A (en) * | 1980-07-17 | 1982-09-07 | Endress & Hauser, Inc. | Control system for a capacitive level sensor |
US4909701A (en) * | 1983-02-14 | 1990-03-20 | Brooks Automation Inc. | Articulated arm transfer device |
US4666366A (en) * | 1983-02-14 | 1987-05-19 | Canon Kabushiki Kaisha | Articulated arm transfer device |
US4763063A (en) * | 1985-07-26 | 1988-08-09 | Allied-Signal Inc. | Compact digital pressure sensor circuitry |
DE3544187A1 (en) * | 1985-12-13 | 1987-06-19 | Flowtec Ag | CAPACITY MEASURING |
US5045797A (en) * | 1986-10-14 | 1991-09-03 | Drexelbrook Controls, Inc. | Continuous condition sensing system determining liquid level by admittance measurement |
US4794320A (en) * | 1987-08-10 | 1988-12-27 | Moore Products Co. | Multi-frequency capacitance sensor |
US5021740A (en) * | 1989-03-07 | 1991-06-04 | The Boeing Company | Method and apparatus for measuring the distance between a body and a capacitance probe |
US5148126A (en) * | 1991-12-13 | 1992-09-15 | Sentech Corporation | Capacitance sensor circuit and method for measuring capacitance and small changes in capacitance |
US5363051A (en) * | 1992-11-23 | 1994-11-08 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Steering capaciflector sensor |
-
1993
- 1993-05-07 US US08/058,421 patent/US5539323A/en not_active Expired - Lifetime
-
1994
- 1994-04-28 KR KR1019950704979A patent/KR960702619A/en not_active Application Discontinuation
- 1994-04-28 WO PCT/US1994/004672 patent/WO1994027158A1/en not_active Application Discontinuation
- 1994-04-28 JP JP52547494A patent/JP3372254B2/en not_active Expired - Fee Related
- 1994-04-28 CN CN94192160A patent/CN1124060A/en active Pending
- 1994-04-28 EP EP94915430A patent/EP0697113A1/en not_active Withdrawn
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3626287A (en) * | 1969-02-10 | 1971-12-07 | C G I Corp | System for responding to changes in capacitance of a sensing capacitor |
US4918376A (en) * | 1989-03-07 | 1990-04-17 | Ade Corporation | A.C. capacitive gauging system |
US5166679A (en) * | 1991-06-06 | 1992-11-24 | The United States Of America As Represented By The Administrator Of The National Aeronautics & Space Administration | Driven shielding capacitive proximity sensor |
Also Published As
Publication number | Publication date |
---|---|
EP0697113A1 (en) | 1996-02-21 |
JP3372254B2 (en) | 2003-01-27 |
CN1124060A (en) | 1996-06-05 |
US5539323A (en) | 1996-07-23 |
KR960702619A (en) | 1996-04-27 |
JPH08510093A (en) | 1996-10-22 |
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