WO1994019396A1 - Polymers with intrinsic light-absorbing properties - Google Patents

Polymers with intrinsic light-absorbing properties Download PDF

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Publication number
WO1994019396A1
WO1994019396A1 PCT/US1993/001849 US9301849W WO9419396A1 WO 1994019396 A1 WO1994019396 A1 WO 1994019396A1 US 9301849 W US9301849 W US 9301849W WO 9419396 A1 WO9419396 A1 WO 9419396A1
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WIPO (PCT)
Prior art keywords
group
glycol monomethyl
monomethyl ether
methyl
hydrogen
Prior art date
Application number
PCT/US1993/001849
Other languages
French (fr)
Inventor
Tony Flaim
James Lamb, Iii
Kimberly A. Moeckli
Terry Brewer
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Brewer Science, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority to US07/835,715 priority Critical patent/US5234990A/en
Priority claimed from US07/835,715 external-priority patent/US5234990A/en
Application filed by Brewer Science, Inc. filed Critical Brewer Science, Inc.
Priority to PCT/US1993/001849 priority patent/WO1994019396A1/en
Priority to US08/055,916 priority patent/US5368989A/en
Publication of WO1994019396A1 publication Critical patent/WO1994019396A1/en

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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G75/00Macromolecular compounds obtained by reactions forming a linkage containing sulfur with or without nitrogen, oxygen, or carbon in the main chain of the macromolecule
    • C08G75/20Polysulfones
    • C08G75/23Polyethersulfones
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G18/00Polymeric products of isocyanates or isothiocyanates
    • C08G18/06Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
    • C08G18/28Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
    • C08G18/30Low-molecular-weight compounds
    • C08G18/38Low-molecular-weight compounds having heteroatoms other than oxygen
    • C08G18/3855Low-molecular-weight compounds having heteroatoms other than oxygen having sulfur
    • C08G18/3863Low-molecular-weight compounds having heteroatoms other than oxygen having sulfur containing groups having sulfur atoms between two carbon atoms, the sulfur atoms being directly linked to carbon atoms or other sulfur atoms
    • C08G18/3865Low-molecular-weight compounds having heteroatoms other than oxygen having sulfur containing groups having sulfur atoms between two carbon atoms, the sulfur atoms being directly linked to carbon atoms or other sulfur atoms containing groups having one sulfur atom between two carbon atoms
    • C08G18/3872Low-molecular-weight compounds having heteroatoms other than oxygen having sulfur containing groups having sulfur atoms between two carbon atoms, the sulfur atoms being directly linked to carbon atoms or other sulfur atoms containing groups having one sulfur atom between two carbon atoms the sulfur atom belonging to a sulfoxide or sulfone group
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G83/00Macromolecular compounds not provided for in groups C08G2/00 - C08G81/00
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J3/00Processes of treating or compounding macromolecular substances
    • C08J3/02Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques
    • C08J3/09Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids
    • C08J3/091Making solutions, dispersions, lattices or gels by other methods than by solution, emulsion or suspension polymerisation techniques in organic liquids characterised by the chemical constitution of the organic liquid
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement

Definitions

  • This invention relates generally to anti- reflective coatings for use in deep ultraviolet
  • microlithography and more particularly to forming such anti-reflective coatings from polymeric materials having intrinsic light-absorbing properties.
  • Integrated circuit production relies on the use of photolithographic processes to define the active elements and interconnecting structures within devices.
  • G-line (436 nm) photoresists have been used for the bulk of microlithographic applications.
  • titanium nitride is deposited on the
  • a third prior art technique involves using an anti-reflective layer (referred to hereafter as ARC, meaning anti-reflective coating) beneath the photoresist to inhibit the formation of standing waves and prevent their detrimental effects on photoresist resolution.
  • ARC anti-reflective coating
  • the location of the light absorbing layer between the substrate and resist means that all
  • substrates coated with the material will exhibit roughly the same reflectivity, eliminating the need for exposure dose adjustments when the substrate type changes.
  • This prior art technique offers the greatest control over standing wave effects and at the same time provides the widest photoresist processing latitude and broadest substrate compatibility.
  • ARCs have been formulated by adding dyes which absorb at the exposure wavelength to a polymer coating. While a series of prior art dye-loaded commercial products have been prepared, dye-loaded ARCs are susceptible to numerous problems. One such problem involves separation of the polymer and dye components when the ARC is spin coated. This phenomenon is evidenced by the appearance of film defects such as graininess, blotches, spots, dewetted areas, etc., and in some cases complete coating failure.
  • a third problem with dye-loaded ARCs involves dissolution or swelling of the anti-reflective coating accompanied by selective removal of the dye components. This problem is commonly referred to as dye stripping.
  • the dye stripped from the ARC remains in the photoresist and causes nonuniformities in the resist exposure
  • Dye stripping depends on the properties of the dye and polymer components as well as their relative proportions and chemical interactions.
  • Still another problem with dye-loaded ARCs is interfacial layer formation. This refers to a situation where the components of the resist and the ARC become mixed in a narrow zone between the two layers.
  • DUV photoresists contain more
  • ARC thickness of ⁇ 2000 ⁇ seriously inhibits the development of ARCs for submicron DUV microlithographic processing.
  • anisotropic dry etching plasma etching or reactive ion etching
  • the ARC must be ultra-thin ( ⁇ 1300 ⁇ ) to limit the amount of resist erosion that will occur when the ARC is dry etched and to maintain an acceptable etch bias .
  • the limits on dye concentration which are imposed by various chemical factors make the ultrathin thickness goal unattainable . For this reason, the development of dye-loaded ARCs for DUV microlithography has been severely curtailed.
  • Dye-loading is not amenable to the development of ARCs for deep ultraviolet microlithography .
  • the polymeric materials used in prior art ARCs are unsuitable for use in DUV anti- reflective coating products .
  • the table below provides several relevant examples .
  • Victrex R must be spin coated from N-methylpyrrolidone, a strong polar solvent since it is insoluble in less polar, but more volatile solvents such as ketones or esters.
  • NMP-containing materials such as a Victrex R coating and a positive DUV resist in the same work area.
  • Negative-working DUV photoresists become insolubilized upon exposure to 248 nm radiation, forming a negative-tone image. Like most negative-working
  • polymers which contain aromatic polysulfone units, aromatic polyurea units, or
  • This class of polymeric materials can be formulated into anti-reflective coatings suitable for submicron microlithography without the need for added dye components.
  • ARCs which are fully compatible with negative-working and/or positive-working DUV photoresists can be prepared from certain polymers which contain the functional units:
  • the aromatic polysulfone structures (formula I) which can be used to form compositions useful as anti- reflective coatings for deep ultraviolet microlithography include those structures having the formula:
  • R may be selected from the following groups or combinations thereof:
  • R 1, R 2 , R 3 , R 4 , and R 5 are selected from the group consisting of hydrogen and methyl;
  • R 6 is selected from the group consisting of hydrogen, methyl and phenyl;
  • X (formulas F and G) is selected from the group consisting of:
  • n >10, and the polysulfone has an average molecular weight of 10 3 to 10 6 .
  • aromatic polysulfones should be soluble in cyclohexanone at room temperature.
  • coated films should be unaffected by solvents such as EGMEA, PGMEA, ethyl lactate, and butyl acetate.
  • Udel R polysulfone
  • Bisphenol A 4,4'- isopropylidenediphenol
  • 4- chlorophenylsulfone The structure of Udel R is shown below:
  • Udel R is principally used as a molding plastic and is not used for coating applications, Udel R may be dissolved in cyclohexanone and used as a spin coatable ARC for positive-working DUV photoresists. Its high absorptivity across the 220-260 nm band allows excellent reflection control to be obtained at ARC film thicknesses as small as 500 ⁇ . it can be used on all microelectronic substrates. The ability to coat the ARC from
  • Udel R as a DUV ARC material for positive resists stems from its unique solubility properties when compared to other commercial polysulfone which normally require strong polar solvents like NMP fo spin coating. It is likely that any polysulfone which contains Bisphenol A as a principal monomeric constituen would have similar solubility properties as Udel R and could be used in the same fashion.
  • Polysulfones can also be used for microlithographic processes involving negative-working DUV resists provided their chemical structure imparts resistance to diglyme, anisole, or mixtures of these with PGMEA or other ester solvents .
  • PGMEA polysulfones
  • polyurea sulfone a polyurea sulfone
  • This material is NMP-soluble but shows no intermixing with diglyme or anisole containing photoresists.
  • An especially attractive feature of the polymer is that both the aromatic sulfone and aromatic urea linkages contribute to the strong DUV absorptivity of the coating.
  • the aromatic polyurea structures which can be used to form compositions useful as anti-reflective coatings for deep ultraviolet microlithography include those structures having the formula:
  • TYPE 2 POLYUREA where R may be selected from the following groups or combinations thereof:
  • R 1 is selected from the group consisting of CI, C ⁇ N, CH 3 , H, OCH 3 , and COOR 2 , wherein R 2 is -CH 3 or -CH 2 CH 3 ;
  • R 1 is selected from H and C ⁇ N;
  • n 10, and the polyurea has an average molecular weight of 10 3 to 10 6 .
  • the polymers set forth above are particularly effective in forming ARCs with intrinsic light absorbing properties for use in microlithography, because coatings formed with these polymers meet a variety of physical and chemical criteria, including:
  • the coatings formed with such polymers are opaque at and exhibit strong light absorption across the target band of DUV wavelengths, i.e., the polymers exhibit sufficient absorption to alleviate problems associated with reflected light such as problems
  • the band is usually centered in the vicinity of 248 nm, and typically ranges from approximately 190 nm to approximately 260 nm.
  • the absorbance (A) per 100 nm film thickness should be > 0.75.
  • the coatings are not attacked by photoresist compounds. More specifically, depending on the
  • Such coatings are thermally stable to at least 250°C in that they do not crosslink or become insoluble when exposed to temperatures in this range. Furthermore, such coatings do not become intractable when exposed to plasmas or reactive ion etching processes.
  • Such coatings are fully removable by dry etching and/or dissolution in suitable solvents after the resist and substrate have been processed appropriately.
  • Such coatings exhibit good adhesion to all microelectronic substrates.
  • Important substrates are crystalline silicon (doped and undoped), chemical vapor deposited silicon dioxide, thermally-grown silicon dioxide, polycrystalline silicon (doped and undoped which may include diffusion-doped and ion implanted types), spin-on glasses, refractory glasses (doped and undoped), titanium nitride, silicon nitride, aluminum oxide, sapphire, beryllium oxide, gallium arsenide, other polymers such as polyimides, and metals such as aluminum, aluminum-copper alloys, aluminum-silicon-copper alloys, tungsten, copper, gold, chromium, nickel, and other common metals and their alloys.
  • Such coatings provide homogeneous, defect-free films of uniform thickness when applied on wafer sizes up to 200 nm and larger. Good coating quality is maintained over device topography.
  • Such coatings do not re-emit absorbed light (fluoresce) at wavelengths to which the photoresist is sensitive.
  • Such coatings are not soluble in photoresist developers, particularly aqueous bases such as
  • the polysulfone and polyurea polymers included in the compositions of the present invention can be synthesized by any standard polymerization technique. Such techniques are well known in the prior art.
  • the polymer compositions of the present invention are prepared and used to form anti-reflective coatings in the following manner. Initially one must select ARC and resist materials which are compatible. ARC polymers which do not require N-methylpyrrolidone for coating are preferred for use with positive-working DUV photoresists. All acid-catalyzed DUV photoresists are compatible with the polymeric ARCs disclosed herein, provided they do not contain solvents which attack the ARC.
  • Solvents and cosolvents for ARCs which are compatible with both acid-catalyzed, positive-working DUV photoresists and acid-catalyzed, negative-working DUV photoresists include cyclohexanone, cyclopentanone, 2-methoxyethyl ether (diglyme), anisole, ethyl lactate, acetophenone, ethylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate (EGMEA), propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate (PGMEA), gamma butrylolactone, tetrahydrofurfuryl alcohol, and mixtures thereof.
  • solvents and cosolvents for ARCs which are compatible with both acid-catalyzed, positive-working DUV photoresists and acid-catalyzed, negative-working DUV photoresists include cyclohexanone, cyclopentanone, 2-me
  • N-methylpyrrolidone N,N-dimethylacetamide, 1,1,3,3-tetramethylurea, 1,2-dimethyl-2-imidazolidinone, mixtures thereof, as well as mixtures with the other solvents listed above.
  • the preferred solvent for use with positive-working photoresists is a mixture of
  • the preferred solvent for use with negative- working photoresists is a mixture of N-methylpyrrolidone and cyclohexanone wherein the volume ratios are within the range 20/80 - 60/40.
  • a dye may be added to improve broadband light absorption. When added, such dyes should constitute 0.5%- 50 wt. % of the total ARC solids. Examples of such dyes include 4,4'-bis(N,N-dimethylamino) benzophenone
  • Adhesion promoters may also be added to the polymer composition.
  • An adhesion promoter may constitute 0.5 - 4.0 wt. % of the total ARC solids. Examples of appropriate adhesion promoters include
  • surfactants may also be added to the polymer composition in an amount of 0.5 - 10.0 wt. % of the total ARC solids.
  • nonionic surfactants include FC-171 fluorosurfactant and FC-430 fluorinated coating additive, both available from 3M Corporation.
  • the polymer is then spincoated onto a substrate at 1000 - 6000 RPM for 15 - 90 seconds to form a coating with a thickness of 500 - 10,000 ⁇ .
  • Static or dynamic dispense may be used.
  • the polymer is
  • the preferred coating thickness is 500 -1500 ⁇ , however the thicker coatings within the 500 - 10,000 ⁇ range may be preferred for planarization applications in surface-imaging resist schemes.
  • the preferred method for determining the appropriate ARC thickness involves measuring the reflectivity of the resist when it is applied over an ARC-coated substrate. The ARC thickness is increased until reflectivity is reduced to ⁇ 20%. In most cases, this requires an ARC thickness of 500 - 1300 ⁇ . For ARCs which are compatible with positive- working DUV photoresists, the photoresist may be
  • the no-bake method is appropriate for feature sizes ⁇ 0.30 ⁇ m. This procedure reduces resists cycle time, and increases wafer throughput. If a bake is performed, it can be done at a temperature up to 250°C under a hotplate or under oven conditions. In addition, the process may include multiple bakes at sequentially higher temperatures.
  • a bake must be performed prior to application of the photoresist.
  • the bake should be done at 150°C - 250°C under a hot plate or under oven conditions. This process may also include multiple bakes at sequentially higher temperatures.
  • the pattern is preferably
  • ARC transferred into the ARC by plasma etching in oxygen or other effective gas mixtures.
  • oxygen or other effective gas mixtures examples include Cl 2 , Cl 2 /O 2 , and SF 6 .
  • anti-reflective coatings of the present invention are described herein in the context of a device having a substrate-ARC-photoresist layer
  • the ARCs of the present invention may be used along with additional layers.
  • additional layers are well known in the art.
  • additional layers include layers which function as adhesion promoter(s), planarization layer(s), absorbing layer(s), interfacial mixing barrier(s), release layer(s), or contrast enhancement layer(s).
  • Such additional layers would be placed between the substrate and the ARC.
  • a copolymer of 4,4'-isopropylidenediphenol and 4- chlorophenylsulfone [Amoco Udel R polysulfone, 2.1 wt. %] was dissolved in a mixture of cyclohexanone and diglyme containing approximately 0.2 wt. % organosilane coupling agent as adhesion promoter. It was spincoated onto an 8" silicon nitride-coated substrate at 3000 RPM for 20 seconds to form nominal 600 ⁇ thick deep ultraviolet (DUV) anti-reflective coating (ARC). The coating was uniform and defect-free.
  • DUV deep ultraviolet
  • the resist was soft baked for 60 seconds at 90°C and then exposed on a stepper operating at 248 nm with an excimer laser source. The exposure dose was 17 Mj/cm 2 .
  • the resist was post-exposure baked at 100°C for 60 seconds to change the solubility of the exposed areas in the resist.
  • the resist was developed in 0.21N metal ion-free developer at 21°C for 45 seconds to form the resist pattern. Scanning electron microscopy showed that the resist profiles were nearly vertical (85°-87°). Linewidths were very uniform even over topography.
  • the resist pattern was transferred into the silicon nitride layer and then into an underlying polysilicon layer by reactive ion etching. Linewidth analysis by scanning electron microscopy showed that the critical dimension (CD) variation across the substrate was 0.03 ⁇ m.
  • Example 1 was repeated without applying the polysulfone anti-reflective layer prior to resist coat.
  • Critical dimension variation increased to 0.17 ⁇ m.
  • Example 1 was repeated but with an added 90°C 60 second hot plate bake step between ARC apply and resist spincoat. As in Example 1, after the resist development the resist profiles were nearly vertical and the
  • Amoco Udel R polysulfone (3.4 wt. %) was dissolved in a mixture of cyclohexanone and diglyme containing approximately 0.2 wt.% organosilane coupling agent as adhesion promoter. It was spincoated onto an 8" silicon nitride-coated substrate at 3000 RPM for 20 seconds to form nominal 900 A thick DUV anti-reflective coating which was then hot plate baked at 90°C for 60 seconds and 200°C for 30 seconds. The coating was uniform and defect- free.
  • a 1 ⁇ m thickness of positive-working, acid-catalyzed DUV photoresist was applied over the ARC by spincoating at 3000 RPM for 20 seconds.
  • the resist was soft baked for 60 seconds at 90°C and then exposed on a stepper
  • the resist was post-exposure baked at 100°C for 60 seconds to change the solubility of the exposed areas in the resist.
  • the resist was developed in 0.21N metal ion-free developer at 21°C for 45 seconds to form the resist pattern. Scanning electron microscopy showed that the resist profiles were nearly vertical (88°-90°) and uniform across the substrate.
  • the resist pattern was transferred into the silicon nitride layer and then into an underlying polysilicon layer by reactive ion etching. Linewidth analysis by scanning electron microscopy showed that the critical dimension (CD) variation across the substrate was 0.01 ⁇ m.
  • Example 5 The critical dimension (CD) variation across the substrate was 0.01 ⁇ m.
  • Poly(urea sulfone) was prepared by reacting bis[4- (4-aminophenoxy)phenyl]-sulfone with methylenedi-p-phenyl diisocyanate in N-methyl pyrrolidone (NMP).
  • NMP N-methyl pyrrolidone
  • the resulting polymer varnish was diluted with NMP and cyclohexanone to form a nominal 4.5 wt. % solution which when spincoated at 5000 RPM for 60 seconds provided a 1300 A thick anti- reflective coating with an absorbance value of 1.2 at 248 nm, or 0.92 per 100nm.
  • the poly(urea sulfone) ARC was spincoated onto 6- inch, phosphorus-implanted polysilicon substrates and hot plate baked at 205°C for 60 seconds to dry the film.
  • NMP/cyclohexanone (as in Example 5) was spincoated onto planar polysilicon, silicon nitride, silicon dioxide. aluminum, and tungsten substrates at 5000 rpm for 60 seconds and hot plate baked at 205°C for 60 seconds to obtain a 140 nm thick anti-reflective coating.
  • a 600 nm film thickness of Shipley Megaposit R SNR-248 DUV resist was then applied over the ARC.
  • the wafer specimens were exposed using a GC ALS Laserstep R operating at 248 nm with an 0.35 numerical aperture to define dense 0.50 ⁇ m lines in the resist. Following a post-exposure bake, the wafers were spray developed with 0.14 N Shipley MF-312
  • NMP/cyclohexanone (as in Example 6) was spincoated onto polysilicon, silicon nitride, silicon dioxide, aluminum, and silicon substrates at 5000 rpm for 60 seconds and hot plate baked at 205°C for 60 seconds to obtain a 140 nm thick anti-reflective coating. The reflectance of each coated substrate was then compared to that of the
  • Poly(urea sulfone) ARC in NMP/cyclohexanone (as in Example 6) was spincoated at 5000 rpm for 60 seconds onto a POCl 3 -doped polysilicon substrate patterned with 250 nm vertical polysilicon steps. The substrate was then hot plate baked at 205°C for 60 seconds to dry the 140 nm thick ARC. A 600 nm film thickness of Shipley Megaposit R SNR-248 DUV resist was applied over the ARC. The wafer specimens were then exposed using a GC ALS Laserstep R operating at 248 nm with a 0.35 numerical aperture to define dense 0.50 u lines in the resist which were orthogonal to the polysilicon topography.

Abstract

A composition and a method for forming an anti-reflective layer for DUV microlithographic processes is disclosed. The compositions of the present invention includes a polymer dissolved in a suitable solvent. The polymers are polysulfone and polyurea polymers which possess inherent light absorbing properties at deep ultraviolet wavelengths. In accordance with the method of the present invention, these compositions are applied to a substrate to form an anti-reflective coating, and thereafter a photoresist material that is compatible with the anti-reflective coating is applied.

Description

POLYMERS WITH INTRINSIC LIGHT-ABSORBING
PROPERTIES
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates generally to anti- reflective coatings for use in deep ultraviolet
microlithography, and more particularly to forming such anti-reflective coatings from polymeric materials having intrinsic light-absorbing properties.
2. Description of the Prior Art
Integrated circuit production relies on the use of photolithographic processes to define the active elements and interconnecting structures within devices. Until recently, G-line (436 nm) photoresists have been used for the bulk of microlithographic applications.
There is now a strong trend toward the use of resists which are sensitive at shorter wavelengths to improve resolution at submicron feature sizes. This has led to the development of photoresist products which are
sensitive to deep ultraviolet (DUV) radiation. The majority of these new resists are designed to operate at 248 nm.
Decreasing feature size coupled with the more widespread use of monochromatic DUV exposure systems has intensified the problems associated with standing wave effects which occur when light is reflected from the substrate during exposure. The formation of standing waves reduces critical dimension control and causes large linewidth variations over device topography.
In accordance with the prior art, several techniques have been used to minimize problems associated with standing wave effects. One such technique which is discussed in C. Nolscher et al., "High Contrast Single Layer Resist and Anti-reflective Layers - An Alternative to Multilayer Resist Techniques," SPIE volume 1086
(1989). In accordance with Nolscher, a carefully
thickness of titanium nitride is deposited on the
substrate to act as an interference filter for reflected light. However, this technique is not effective for DUV microlithography because of the high reflectivity of most substrates at deep ultraviolet wavelengths.
Another prior art technique for eliminating
reflectivity problems involves applying an organic film with a low index of refraction (typically 1.4 or less) over the photoresist to damp out higher order standing waves. This method is discussed in T. Tanaka et al., J. Electrochem. Soc, volume 137, p. 3900 (1990). However, the benefits of this method have not yet been proven for DUV microlithography.
A third prior art technique involves using an anti-reflective layer (referred to hereafter as ARC, meaning anti-reflective coating) beneath the photoresist to inhibit the formation of standing waves and prevent their detrimental effects on photoresist resolution.
Numerous anti-reflective layer technologies exist today for use in microlithographic processes. The most common technique is applying a light absorbing organic polymer coating on the substrate prior to applying the
photoresist. This method is discussed in M. Listvan et al., "Multiple Layer Techniques in Optical Lithography: Applications to Fine Line MOS Production," SPIE volume 470, p. 85 (1984); U.S. Patent 4,910,122 entitled "Anti- Reflective Coating" issued to T. Brewer; and A. Jeffries et al., "Two Anti-Reflective Coatings for Use Over Highly Reflective Topography," SPIE Proceedings, Volume 539, p. 342 (1985). This method provides nearly complete
attenuation of reflected light and prevents formation of all standing waves including the primary, or first-order, standing wave. The location of the light absorbing layer between the substrate and resist means that all
substrates coated with the material will exhibit roughly the same reflectivity, eliminating the need for exposure dose adjustments when the substrate type changes. This prior art technique offers the greatest control over standing wave effects and at the same time provides the widest photoresist processing latitude and broadest substrate compatibility.
Traditionally, ARCs have been formulated by adding dyes which absorb at the exposure wavelength to a polymer coating. While a series of prior art dye-loaded commercial products have been prepared, dye-loaded ARCs are susceptible to numerous problems. One such problem involves separation of the polymer and dye components when the ARC is spin coated. This phenomenon is evidenced by the appearance of film defects such as graininess, blotches, spots, dewetted areas, etc., and in some cases complete coating failure.
Problems also result from variations in the dye content of the ARC which depend on spinning conditions. For example, we have observed that dye compounds can be removed selectively from the wet ARC as excess coating material spins off of the substrates. This problem is especially prevalent with crystalline dyes.
A third problem with dye-loaded ARCs involves dissolution or swelling of the anti-reflective coating accompanied by selective removal of the dye components. This problem is commonly referred to as dye stripping. The dye stripped from the ARC remains in the photoresist and causes nonuniformities in the resist exposure
profile. This is especially true with DUV photoresists which operate via acid catalysis and are easily poisoned by organic contaminants. At the same time, dye loss by stripping reduces the ability of the ARC to control reflections. Dye stripping depends on the properties of the dye and polymer components as well as their relative proportions and chemical interactions.
Still another problem with dye-loaded ARCs is interfacial layer formation. This refers to a situation where the components of the resist and the ARC become mixed in a narrow zone between the two layers.
Interfacial layer formation invariably leads to "resist footing" which refers to the presence of a small protrusion at the bottom of the resist feature after development. This defect complicates linewidth
determination and reduces critical dimension control.
There is also a problem with thermal diffusion of the dye component into the photoresist when the latter is baked. Dye diffusion can occur over distances as large as 50%-60% of the photoresist thickness. In such cases, photoresist contrast and sidewall profiles will be seriously degraded.
These problems are particularly prevalent with prior art dye loaded ARCs designed for DUV
microlithography. DUV photoresists contain more
aggressive solvents than conventional G-line resist systems. Such solvents enhance dye stripping and
interfacial layer formation. In some cases, complete removal of an ARC has been observed when a DUV resist is applied. Furthermore, in formulating dye loaded DUV ARCs the majority of dyes suitable for this spectral region are either 1) very soluble in photoresist solvents or 2) highly crystalline, meaning in either case that the dye concentration in the ARC must be kept relatively low. As a result, the ARC thickness must be increased to ≥ 2000 Å to obtain sufficient light absorptivity with the film.
The necessity for ARC thickness of ≥ 2000 Å seriously inhibits the development of ARCs for submicron DUV microlithographic processing. For submicron work, anisotropic dry etching (plasma etching or reactive ion etching) must be used to transfer the resist pattern into the ARC . In turn, the ARC must be ultra-thin (≤ 1300 Å) to limit the amount of resist erosion that will occur when the ARC is dry etched and to maintain an acceptable etch bias . However, the limits on dye concentration which are imposed by various chemical factors make the ultrathin thickness goal unattainable . For this reason, the development of dye-loaded ARCs for DUV microlithography has been severely curtailed.
Dye-loading is not amenable to the development of ARCs for deep ultraviolet microlithography . For some of the same reasons , the polymeric materials used in prior art ARCs are unsuitable for use in DUV anti- reflective coating products . The table below provides several relevant examples .
Limitations for
Material Use in DUV ARCs References
polymethyl methacrylate excessive interlayer mixing U.S. Patent 4,370,405 to
with resist O'Toole; and A. Yen et al,
"Fabrication of 100 nm- Period Gratings Using
Achromatic Holographic
Lithograph," Microelectronic Engineering, Vol. 11, p. 201 (1990).
polyimides - U.S. Patent 4,910,122 to T.
soluble polyimides poor solvent resistance Brewer; H. W. Legenaa et
and/or poor coating quality al, "A New Class of Bilevel and may be soluble in and Mono-level Positive photoresist developers Resist Systems Based on a
Chemically Stable Imide curable polyimides unstable solution viscosity Polymer," SPIE Proceedings
leading to poor film Volume 539, p. 250 (1985);
thickness reproducibility, and C.B. Ting and K. L.
must be refrigerated Liauw, "An improved Deep
Ultraviolet (DUV) Multilayer Resist Process for High
Resolution Lithography,"
SPIE Proceedings, Volume
469, p. 24 (1984).
polyvinylpyndine low DUV light absorption,
poor solvent resistance
tnazme resins soluble in photoresist W. Ishii, et al, "Anti- developers Reflective Coating Material
for Highly Reflective
Surfaces with Topography," SPIE volume 631, p. 295
(1986).
poly(alkene sulfones) poor solvent resistance and U.S. Patent 4,910,122 to T.
low thermal stability Brewer.
Another group of polymeric materials which have been used for microlithographic applications are the aromatic polysulfones. For example, U.S. Patent 4,835,086 describes the use of UdelR (Amoco Performance Products, Inc.) polysulfone as a barrier layer between two
radiation sensitive layers. Another polysulfone, VictrexR (ICI Americas), has been preferred for most
microlithographic applications, e.g., lift-off processes, because of its higher solvent resistance in comparison to UdelR. The structure for VictrexR polysulfone is:
Figure imgf000009_0001
VictrexR must be spin coated from N-methylpyrrolidone, a strong polar solvent since it is insoluble in less polar, but more volatile solvents such as ketones or esters.
European Patent Application number 8710976.0 (publication number 0 257 255) describes the use of VictrexR films containing dyes to retard the detrimental effects of reflected light during photoresist exposure. However, such films do not have the appropriate solubility
properties for ARC applications. This can be explained as follows.
There are two main types of DUV photoresists in use today, positive-working and negative-working. Both operate via acid catalysis. The positive-working type has extremely high contrast and is easily poisoned by small amounts of bases, especially organic amines. While N- methylpyrrolidone is only very weakly basic, it usually contains strongly basic contaminants such as methyl amine at low levels. The volatility of these contaminants and their detrimental effect on resist performance precludes the use of NMP-containing materials such as a VictrexR coating and a positive DUV resist in the same work area.
Negative-working DUV photoresists become insolubilized upon exposure to 248 nm radiation, forming a negative-tone image. Like most negative-working
systems, they are more sensitive than positive-tone systems and, consequently, are not susceptible to
poisoning by trace levels of basic compounds. However, negative-working DUV resists require more polar solvent systems than their positive-tone counterparts. Diglyme (2-methoxyethyl ether) and anisole, two chemically inert but very polar solvents, are common constituents in the resist formulations; Shipley's SNR-248R negative-tone DUV photoresist is a good example. The presence of these aggressive solvents in the resist means that the ARC must have exceptional solvent resistance to avoid interlayer mixing. VictrexR coatings do not have this degree of solvent resistance. Consequently, they cannot be used in ARC applications involving modern negative-working DUV photoresists. SUMMARY OF THE INVENTION
It is therefore an object of the present invention to provide a composition capable of forming an anti-reflective layer which reduces problems associated with standing wave effects which may occur during deep ultraviolet microlithography.
It is a further object of the present invention to provide a composition capable of forming an anti- reflective coating having increased light absorption power per unit film thickness, allowing the design of ultra-thin ARCs which can provide sufficient light absorptivity with a film thickness ≤ 1300 Å.
It is a further object of the present invention to provide a polymeric material which is intrinsically light-absorbing, and which need not be loaded with a dye in order to form an anti-reflective layer, thereby eliminating problems associated with dye stripping and dye migration during photoresist spin coating and baking.
It is a further object of the present invention to provide a composition capable of forming an anti- reflective coating having improved adhesion to microelectronic substrates, improved coating quality, and decreased interfacial layer formation.
These and other objects are met by the present invention through combining the polymeric component and the light absorbing (or chromophoric) components of an ARC into a single chemical entity, and thereby providing a polymeric anti-reflection coating with good solvent resistance and high intrinsic DUV light absorptivity for use in DUV photoresists processes. In accordance with the present invention, polymers which contain aromatic polysulfone units, aromatic polyurea units, or
combinations thereof with other common polymer connecting structures have been found to exhibit intrinsic light- absorbing properties. This class of polymeric materials can be formulated into anti-reflective coatings suitable for submicron microlithography without the need for added dye components.
DETAIL DESCRIPTION
In accordance with the present invention, ARCs which are fully compatible with negative-working and/or positive-working DUV photoresists can be prepared from certain polymers which contain the functional units:
(I)
Figure imgf000012_0001
aromatic sulfone linkage
Figure imgf000012_0002
aromatic urea linkage
or polymers prepared from combinations thereof with other common polymer connecting structures.
In particular, in accordance with the present invention, the aromatic polysulfone structures (formula I) which can be used to form compositions useful as anti- reflective coatings for deep ultraviolet microlithography include those structures having the formula:
Figure imgf000013_0001
where R may be selected from the following groups or combinations thereof:
Figure imgf000013_0002
wherein R1=R4,R2=R3; R1, R2, R3, R4, and R5 are selected from the group consisting of hydrogen and methyl; and R6 is selected from the group consisting of hydrogen, methyl and phenyl;
Figure imgf000013_0003
wherein R1=R2=R3=R4 and are selected from the group
consisting of hydrogen and methyl;
Figure imgf000014_0001
wherein R1=R2=R3=R4 and are selected from the group consisting of hydrogen and methyl;
Figure imgf000014_0002
wherein X (formulas F and G) is selected from the group consisting of:
Figure imgf000014_0003
wherein R1=R2=R3=CH3 and R4=H, or R1=R2=R4=CH3 and R3=H. In a preferred embodiment of the present invention, n>10, and the polysulfone has an average molecular weight of 103 to 106.
For compatibility with positive-working DUV resists, aromatic polysulfones should be soluble in cyclohexanone at room temperature. However, coated films should be unaffected by solvents such as EGMEA, PGMEA, ethyl lactate, and butyl acetate.
A good example of a polymer which meets these criteria is Amoco UdelR polysulfone, a copolymer of 4,4'- isopropylidenediphenol (Bisphenol A) and 4- chlorophenylsulfone. The structure of UdelR is shown below:
Figure imgf000015_0001
UDEL® POLYSULFONE
Although, UdelR is principally used as a molding plastic and is not used for coating applications, UdelR may be dissolved in cyclohexanone and used as a spin coatable ARC for positive-working DUV photoresists. Its high absorptivity across the 220-260 nm band allows excellent reflection control to be obtained at ARC film thicknesses as small as 500 Å. it can be used on all microelectronic substrates. The ability to coat the ARC from
cyclohexanone, a fast-drying solvent, makes an ARC bake step unnecessary, meaning the resist can be applied immediately after the ARC. This processing feature increases device throughput dramatically and saves considerable processing cost.
The usefulness of UdelR as a DUV ARC material for positive resists stems from its unique solubility properties when compared to other commercial polysulfone which normally require strong polar solvents like NMP fo spin coating. It is likely that any polysulfone which contains Bisphenol A as a principal monomeric constituen would have similar solubility properties as UdelR and could be used in the same fashion.
Polysulfones can also be used for microlithographic processes involving negative-working DUV resists provided their chemical structure imparts resistance to diglyme, anisole, or mixtures of these with PGMEA or other ester solvents . We have discovered that the introduction of urea linkages into the polysulfone is a preferred way of achieving the desired solvent
resistance properties. An example of such a polymeric material, termed a polyurea sulfone, is shown below:
Figure imgf000016_0001
POLYUREA SULFONE
This material is NMP-soluble but shows no intermixing with diglyme or anisole containing photoresists. An especially attractive feature of the polymer is that both the aromatic sulfone and aromatic urea linkages contribute to the strong DUV absorptivity of the coating.
The strong DUV absorptivity of the aromatic urea connecting unit as well as the solvent resistance it contributes to polymers means that a wide variety of polyureas can be designed for DUV ARC applications in systems where NMP can be tolerated. In accordance with the present invention, the aromatic polyurea structures (formula II) which can be used to form compositions useful as anti-reflective coatings for deep ultraviolet microlithography include those structures having the formula:
Figure imgf000017_0001
TYPE 2 POLYUREA where R may be selected from the following groups or combinations thereof:
Figure imgf000017_0002
wherein R1 is selected from the group consisting of CI, C≡N, CH3, H, OCH3, and COOR2, wherein R2 is -CH3 or -CH2CH3;
Figure imgf000018_0001
wherein R1 is selected from H and C≡N;
Figure imgf000019_0001
wherein R1=R2=R3=R4=H or CH3
Figure imgf000019_0002
wherein R1=R2 and are selected from consisting of H, CH3, OCH3, and R3=R4 and are selected from consisting of H and CH3;
Figure imgf000019_0003
wherein R1=R2=R3=R4=H or CH3 In a preferred embodiment of the present invention, n>10, and the polyurea has an average molecular weight of 103 to 106.
The polymers set forth above are particularly effective in forming ARCs with intrinsic light absorbing properties for use in microlithography, because coatings formed with these polymers meet a variety of physical and chemical criteria, including:
1. The coatings formed with such polymers are opaque at and exhibit strong light absorption across the target band of DUV wavelengths, i.e., the polymers exhibit sufficient absorption to alleviate problems associated with reflected light such as problems
associated with standing waves. The band is usually centered in the vicinity of 248 nm, and typically ranges from approximately 190 nm to approximately 260 nm. To maintain acceptable ARC thicknesses, the absorbance (A) per 100 nm film thickness should be > 0.75.
2. The coatings are not attacked by photoresist compounds. More specifically, depending on the
photoresist in question, the coatings formed with the polysulfones and polyureas set forth above do not
dissolve or swell in solvents such as ethylene glycol monomethyl ether acetate (EGMEA), propylene glycol monomethyl ether acetate (PGMEA), diglyme
(2-methoxyethyl ether), anisole, ethyl lactate, xylene, or butyl acetate. 3. Interfacial layer formation is avoided by using such coatings, because such coatings do not mix with the photoresist during resist spincoating or during the soft bake of the resist.
4. Such coatings are thermally stable to at least 250°C in that they do not crosslink or become insoluble when exposed to temperatures in this range. Furthermore, such coatings do not become intractable when exposed to plasmas or reactive ion etching processes.
5. Such coatings are fully removable by dry etching and/or dissolution in suitable solvents after the resist and substrate have been processed appropriately.
6. Such coatings exhibit good adhesion to all microelectronic substrates. Important substrates are crystalline silicon (doped and undoped), chemical vapor deposited silicon dioxide, thermally-grown silicon dioxide, polycrystalline silicon (doped and undoped which may include diffusion-doped and ion implanted types), spin-on glasses, refractory glasses (doped and undoped), titanium nitride, silicon nitride, aluminum oxide, sapphire, beryllium oxide, gallium arsenide, other polymers such as polyimides, and metals such as aluminum, aluminum-copper alloys, aluminum-silicon-copper alloys, tungsten, copper, gold, chromium, nickel, and other common metals and their alloys.
7. Such coatings provide homogeneous, defect-free films of uniform thickness when applied on wafer sizes up to 200 nm and larger. Good coating quality is maintained over device topography.
8. Such coatings do not re-emit absorbed light (fluoresce) at wavelengths to which the photoresist is sensitive.
9. Such coatings are not soluble in photoresist developers, particularly aqueous bases such as
tetramethylammonium hydroxide solutions.
10. Such coatings provide extremely reproducible film thickness and DUV absorptivity. This requires that the polymeric component be stable with regard to polymer molecular weight, chemical structure, and viscosity characteristics.
The polysulfone and polyurea polymers included in the compositions of the present invention can be synthesized by any standard polymerization technique. Such techniques are well known in the prior art.
The polymer compositions of the present invention are prepared and used to form anti-reflective coatings in the following manner. Initially one must select ARC and resist materials which are compatible. ARC polymers which do not require N-methylpyrrolidone for coating are preferred for use with positive-working DUV photoresists. All acid-catalyzed DUV photoresists are compatible with the polymeric ARCs disclosed herein, provided they do not contain solvents which attack the ARC.
The polymers of the present invention are first dissolved in a suitable solvent. Solvents and cosolvents for ARCs which are compatible with both acid-catalyzed, positive-working DUV photoresists and acid-catalyzed, negative-working DUV photoresists include cyclohexanone, cyclopentanone, 2-methoxyethyl ether (diglyme), anisole, ethyl lactate, acetophenone, ethylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate (EGMEA), propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate (PGMEA), gamma butrylolactone, tetrahydrofurfuryl alcohol, and mixtures thereof.
Additional solvents and cosolvents which are also
compatible with negative-working DUV photoresists, include N-methylpyrrolidone, N,N-dimethylacetamide, 1,1,3,3-tetramethylurea, 1,2-dimethyl-2-imidazolidinone, mixtures thereof, as well as mixtures with the other solvents listed above. The preferred solvent for use with positive-working photoresists is a mixture of
cyclohexanone and diglyme containing less than 20 volume % diglyme. The preferred solvent for use with negative- working photoresists is a mixture of N-methylpyrrolidone and cyclohexanone wherein the volume ratios are within the range 20/80 - 60/40.
Various additives may be added to the polymer solution. A dye may be added to improve broadband light absorption. When added, such dyes should constitute 0.5%- 50 wt. % of the total ARC solids. Examples of such dyes include 4,4'-bis(N,N-dimethylamino) benzophenone
(Michler's Ketone) and 7-diethylamino-4-methylcoumarian (coumarin 1), either alone or in combination with one another, for 365 nm (1-line), and curcumin for 436 nm (G- line). Adhesion promoters may also be added to the polymer composition. An adhesion promoter may constitute 0.5 - 4.0 wt. % of the total ARC solids. Examples of appropriate adhesion promoters include
3-aminopropyltriethoxysilane and
(3-glycidoxypropyl) trimethoxysilane. Nonionic
surfactants may also be added to the polymer composition in an amount of 0.5 - 10.0 wt. % of the total ARC solids. Examples of such nonionic surfactants include FC-171 fluorosurfactant and FC-430 fluorinated coating additive, both available from 3M Corporation.
The polymer is then spincoated onto a substrate at 1000 - 6000 RPM for 15 - 90 seconds to form a coating with a thickness of 500 - 10,000 Å. Static or dynamic dispense may be used. Preferably the polymer is
spincoated at 3000 - 5000 RPM for 60 seconds using dynamic dispense. The preferred coating thickness is 500 -1500 Å, however the thicker coatings within the 500 - 10,000 Å range may be preferred for planarization applications in surface-imaging resist schemes. The preferred method for determining the appropriate ARC thickness involves measuring the reflectivity of the resist when it is applied over an ARC-coated substrate. The ARC thickness is increased until reflectivity is reduced to ≤ 20%. In most cases, this requires an ARC thickness of 500 - 1300 Å. For ARCs which are compatible with positive- working DUV photoresists, the photoresist may be
immediately applied over the ARC or the ARC can be baked prior to the application of the photoresist. The no-bake method is appropriate for feature sizes ≥ 0.30 μm. This procedure reduces resists cycle time, and increases wafer throughput. If a bake is performed, it can be done at a temperature up to 250°C under a hotplate or under oven conditions. In addition, the process may include multiple bakes at sequentially higher temperatures.
For ARCs which are compatible with negative- working DUV photoresists, a bake must be performed prior to application of the photoresist. The bake should be done at 150°C - 250°C under a hot plate or under oven conditions. This process may also include multiple bakes at sequentially higher temperatures.
In accordance with the process of the present invention, conventional techniques are employed for application and baking of the photoresist. In addition, photoresist processing uses known techniques. After the resist has been imaged, the pattern is preferably
transferred into the ARC by plasma etching in oxygen or other effective gas mixtures. Examples of the latter include Cl2, Cl2/O2, and SF6.
Although the anti-reflective coatings of the present invention are described herein in the context of a device having a substrate-ARC-photoresist layer
configuration, the ARCs of the present invention may be used along with additional layers. The formation and use of such additional layers are well known in the art.
Examples of such additional layers include layers which function as adhesion promoter(s), planarization layer(s), absorbing layer(s), interfacial mixing barrier(s), release layer(s), or contrast enhancement layer(s).
Preferably such additional layers would be placed between the substrate and the ARC.
The manner of making and using the compositions of the present invention is illustrated in the following examples.
These examples, however, are not intended to limit the scope of the present invention.
Example 1.
A copolymer of 4,4'-isopropylidenediphenol and 4- chlorophenylsulfone [Amoco UdelR polysulfone, 2.1 wt. %] was dissolved in a mixture of cyclohexanone and diglyme containing approximately 0.2 wt. % organosilane coupling agent as adhesion promoter. It was spincoated onto an 8" silicon nitride-coated substrate at 3000 RPM for 20 seconds to form nominal 600 Å thick deep ultraviolet (DUV) anti-reflective coating (ARC). The coating was uniform and defect-free.
A 1.1 μm thickness of positive-working, acid- catalyzed DUV photoresist soluble in PGMEA was
immediately applied over the ARC by spincoating at 3000 RPM for 20 seconds. The resist was soft baked for 60 seconds at 90°C and then exposed on a stepper operating at 248 nm with an excimer laser source. The exposure dose was 17 Mj/cm2. The resist was post-exposure baked at 100°C for 60 seconds to change the solubility of the exposed areas in the resist. The resist was developed in 0.21N metal ion-free developer at 21°C for 45 seconds to form the resist pattern. Scanning electron microscopy showed that the resist profiles were nearly vertical (85°-87°). Linewidths were very uniform even over topography.
The resist pattern was transferred into the silicon nitride layer and then into an underlying polysilicon layer by reactive ion etching. Linewidth analysis by scanning electron microscopy showed that the critical dimension (CD) variation across the substrate was 0.03 μm.
Example 2.
To demonstrate the effectiveness of the ARC for reducing linewidth variation. Example 1 was repeated without applying the polysulfone anti-reflective layer prior to resist coat. Critical dimension variation increased to 0.17 μm.
Example 3.
Example 1 was repeated but with an added 90°C 60 second hot plate bake step between ARC apply and resist spincoat. As in Example 1, after the resist development the resist profiles were nearly vertical and the
linewidths were uniform, and after transfer of the pattern to the substrate the CD variation was 0.03 μm. Example 4 .
Amoco UdelR polysulfone (3.4 wt. %) was dissolved in a mixture of cyclohexanone and diglyme containing approximately 0.2 wt.% organosilane coupling agent as adhesion promoter. It was spincoated onto an 8" silicon nitride-coated substrate at 3000 RPM for 20 seconds to form nominal 900 A thick DUV anti-reflective coating which was then hot plate baked at 90°C for 60 seconds and 200°C for 30 seconds. The coating was uniform and defect- free.
A 1 μm thickness of positive-working, acid-catalyzed DUV photoresist was applied over the ARC by spincoating at 3000 RPM for 20 seconds. The resist was soft baked for 60 seconds at 90°C and then exposed on a stepper
operating at 248 nm with an excimer laser source. The exposure dose was 19 Mj/cm2. The resist was post-exposure baked at 100°C for 60 seconds to change the solubility of the exposed areas in the resist. The resist was developed in 0.21N metal ion-free developer at 21°C for 45 seconds to form the resist pattern. Scanning electron microscopy showed that the resist profiles were nearly vertical (88°-90°) and uniform across the substrate.
The resist pattern was transferred into the silicon nitride layer and then into an underlying polysilicon layer by reactive ion etching. Linewidth analysis by scanning electron microscopy showed that the critical dimension (CD) variation across the substrate was 0.01 μm. Example 5 .
Poly(urea sulfone) was prepared by reacting bis[4- (4-aminophenoxy)phenyl]-sulfone with methylenedi-p-phenyl diisocyanate in N-methyl pyrrolidone (NMP). The resulting polymer varnish was diluted with NMP and cyclohexanone to form a nominal 4.5 wt. % solution which when spincoated at 5000 RPM for 60 seconds provided a 1300 A thick anti- reflective coating with an absorbance value of 1.2 at 248 nm, or 0.92 per 100nm.
The poly(urea sulfone) ARC was spincoated onto 6- inch, phosphorus-implanted polysilicon substrates and hot plate baked at 205°C for 60 seconds to dry the film.
These substrates were then coated with various
thicknesses of Shipley MegapositR SNR-248 deep ultraviolet photoresist and soft baked. A swing curve (a plot of resist reflectance vs. resist thickness) was generated using the substrates and compared to a swing curve obtained from specimens which were not coated with ARC prior to resist application. The results showed that for substrates which did not receive ARC treatment, the reflectance varied 35% (from a high of 38% to a low of 3%) over a 350 A resist thickness range. With ARC, however, reflectance was reduced to 11 ± 3% over the same thickness range.
Example 6.
A solution of poly(urea sulfone) in
NMP/cyclohexanone (as in Example 5) was spincoated onto planar polysilicon, silicon nitride, silicon dioxide. aluminum, and tungsten substrates at 5000 rpm for 60 seconds and hot plate baked at 205°C for 60 seconds to obtain a 140 nm thick anti-reflective coating. A 600 nm film thickness of Shipley MegapositR SNR-248 DUV resist was then applied over the ARC. The wafer specimens were exposed using a GC ALS LaserstepR operating at 248 nm with an 0.35 numerical aperture to define dense 0.50 μm lines in the resist. Following a post-exposure bake, the wafers were spray developed with 0.14 N Shipley MF-312
developer. The optimum exposure dose, the exposure latitude, and CD control for each substrate type with and without ARC application, were determined by comparing linewidth values as a function of dose.
Figure imgf000030_0001
With ARC application all substrates required
approximately the same exposure dose and demonstrated similar broad exposure latitudes.
Example 7.
A solution of poly(urea sulfone) in
NMP/cyclohexanone (as in Example 6) was spincoated onto polysilicon, silicon nitride, silicon dioxide, aluminum, and silicon substrates at 5000 rpm for 60 seconds and hot plate baked at 205°C for 60 seconds to obtain a 140 nm thick anti-reflective coating. The reflectance of each coated substrate was then compared to that of the
uncoated substrate; the results are summarized below. In all cases, substrate reflectance was reduced dramatically with ARC application.
Reflectance at 248.5 nm(%)
(referenced to bare silicon wafer)
Figure imgf000031_0001
Example 8.
Poly(urea sulfone) ARC in NMP/cyclohexanone (as in Example 6) was spincoated at 5000 rpm for 60 seconds onto a POCl3-doped polysilicon substrate patterned with 250 nm vertical polysilicon steps. The substrate was then hot plate baked at 205°C for 60 seconds to dry the 140 nm thick ARC. A 600 nm film thickness of Shipley MegapositR SNR-248 DUV resist was applied over the ARC. The wafer specimens were then exposed using a GC ALS LaserstepR operating at 248 nm with a 0.35 numerical aperture to define dense 0.50 u lines in the resist which were orthogonal to the polysilicon topography. Following a post-exposure bake, the wafers were spray developed with 0.14 N Shipley MF-312 developer. Linewidth uniformity was determined at various points over the structures as a measure of the effectiveness of the ARC for reducing linewidth variation. The data was compared to an
untreated (no ARC) control specimen.
Figure imgf000032_0001

Claims

We claim:
1. A composition for forming an anti- reflective layer for DUV microlithographic processes, comprising a polymer dissolved in a suitable solvent, said polymer being opaque at deep ultraviolet wavelengths and having a functional repeat unit selected from the group consisting of:
Figure imgf000033_0001
and combinations thereof, wherein Ra is selected from the group consisting of:
Figure imgf000034_0001
wherein R1=R4; R2=R3; R1,R2, R3, R4, and R5 are selected from the group consisting of hydrogen and methyl; and R6 is selected from the group consisting of hydrogen, methyl and phenyl;
Figure imgf000034_0002
wherein R1=R2=R3= R4 and are selected from the group
consisting of hydrogen and methyl ;
Figure imgf000034_0003
wherein R1=R2=R3=R4 and are selected from the group consisting of hydrogen and methyl;
N
Figure imgf000035_0004
wherein X is selected from the group consisting of:
Figure imgf000035_0003
wherein R1=R2=R3=CH3 and R4=H, or R1=R2 R4=CH3 and R3=H; and (G) combinations thereof;
wherein Rb is selected from the group consisting of:
Figure imgf000035_0002
wherein R1 is selected from the group consisting of CI, C≡N, CH3, H, OCH3, and COOR2, wherein R2 is -CH3 or -CH2CH3;
Figure imgf000035_0001
Figure imgf000036_0001
wherein R1=R2=R3=R4=H or CH3 ;
Figure imgf000037_0002
wherein R1=R2 and are selected from consisting of H, CH3, OCH3, and R3=R4 and are selected from consisting of H and CH3;
Figure imgf000037_0001
wherein R1=R2=R3=R4=H or CH3; and
(N) combinations thereof:
wherein said suitable solvent is selected from the group consisting of cyclohexanone, cyclopentanone, 2- methoxyethyl ether, anisole, ethyl lactate, acetophenone, ethylene glycol monomethyl ether, ethylene glycol
monomethyl ether acetate (EGMEA), propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate (PGMEA), gamma butrylolactone, tetrahydrofurfuryl alcohol, N-methylpyrrolidone, N,N-dimethylacetamide, 1,1,3,3-tetramethylurea, 1,2-dimethyl-2-imidazolidinone, and mixtures thereof.
2. The composition of claim 1 wherein said
functional repeat unit is a copolymer of 4,4'- isopropylidenediphenol and 4-chlorophenylsulfone.
3. The composition of claim 1 wherein said
functional repeat unit is
Figure imgf000038_0002
4. The composition of claim 1 wherein said solvent is selected from the group consisting of cyclohexanone, 2-methoxyethyl ether, and combinations thereof, and said polymer is at least poorly soluble in at least one solvent selected from the group consisting of ethylene glycol monomethyl ether acetate, propylene glycol
monomethyl ether acetate, anisole, ethyl lactate, xylene, or butyl acetate.
5. The composition of claim 1 wherein said polymer has an average molecular weight of 103 to 106.
6. The composition of claim 1 wherein said polymer composition further includes an additive selected from the group consisting of 4,4'-bis(N,N- dimethylaminojbenzophenone, 7-diethylamino-4- methylcoumarian, curcumin, 3-aminopropyl-triethoxysilane and ( 3-glycidoxypropyl) trimethoxysilane.
7. A method of forming an anti-reflective layer for DUV microlithographic processes, comprising;
forming a polymer composition by dissolving a
polymer in a suitable solvent, said polymer having a functional repeat unit selected from the group consisting of:
Figure imgf000038_0001
Figure imgf000039_0001
and combinations thereof, wherein Ra is selected from the group consisting of :
Figure imgf000039_0002
wherein R1=R4; R2=R3; R1, R2, R3, R4, and R5 are selected from the group consisting of hydrogen and methyl; and R6 is selected from the group consisting of hydrogen, methyl and phenyl;
Figure imgf000039_0003
wherein R1=R2=R3=R4 and are selected from the group consisting of hydrogen and methyl;
Figure imgf000040_0001
wherein R1=R2=R3=R4 and are selected from the group consisting of hydrogen and methyl;
X
Figure imgf000040_0002
wherein X is selected from the group consisting of:
Figure imgf000040_0003
wherein R1=R2=R3=CH3 and R4=H, or R1=R2=R4=CH3 and R3=H; and (G) combinations thereof; wherein Rb is selected from the group consisting of:
Figure imgf000041_0002
wherein R1 is selected from the group consisting of CI, C≡N, CH3, H, OCH3 and COOR2, wherein R2 is -CH3 or -CH2CH3;
Figure imgf000041_0001
Figure imgf000042_0001
wherein R1 is selected from H and C≡N;
Figure imgf000042_0002
wherein R1=R2=R3=R4=H or CH3;
Figure imgf000042_0003
wherein R1=R2 and are selected from consisting of H, CH3,
OCH3, and R3=R4 and are selected from consisting of H and
CH3;
Figure imgf000043_0001
wherein R1=R2=R3=R4=H or CH3; and
(N) combinations thereof;
forming an anti-reflective coating by applying said polymer composition to a substrate; and thereafter applying a photoresist material compatible with said anti-reflective coating.
8. The method of claim 7 wherein said
suitable solvent is selected from the group consisting of cyclohexanone, cyclopentanone, 2-methoxyethyl ether, anisole, ethyl lactate, acetophenone, ethylene glycol monomethyl ether, ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, gamma butrylolactone, tetrahydrofurfuryl alcohol, N-methylpyrrolidone, N,N- dimethylacetamide, 1,1,3,3-tetramethylurea, 1,2-dimethyl- 2-imidazolidinone, and mixtures thereof.
9. The method of claim 7 wherein said
functional repeat unit is a copolymer of 4,4'- isopropylidenediphenol and 4-chlorophenylsulfone.
10. The method of claim 9 wherein said
suitable solvent is selected from the group consisting of cyclohexanone, 2-methoxyethyl ether, and mixtures
thereof, and where said resist is an acid catalyzed, positive working deep ultraviolet photoresist soluble in a solvent selected from the group consisting of ethylene glycol monomethyl ether acetate, propylene glycol
monomethyl ether acetate, anisole, ethyl lactate, xylene, or butyl acetate, and mixtures thereof.
11. The method of claim 7 wherein said
functional repeat unit is
Figure imgf000044_0001
12. The method of claim 11 further including the additional step of baking said anti-reflective
coating prior to applying said photoresist material; and wherein said suitable solvent is selected from the group consisting of cyclohexanone, N-methyl pyrrolidone, and mixtures thereof; and where said resist is an acid
catalyzed, negative working deep ultraviolet photoresist soluble in a solvent selected from the group consisting of ethylene glycol monomethyl ether acetate, propylene glycol monomethyl ether acetate, 2-methoxyethyl ether, anisole, ethyl lactate, xylene, butyl acetate, and
mixtures thereof.
13. The method of claim 7 wherein said polymer composition further includes an additive selected from the group consisting of 4,4'-bis (N,N- dimethylamino) benzophenone,
7-diethylamino-4-methylcoumarian, curcumin,
3-aminopropyl-triethoxysilane and (3-glycidoxypropyl)trimethoxysilane.
14. The method of claim 7 wherein said anti- reflective coating has a thickness of 500 - 10,000 Å.
15. The method of claim 7 wherein said anti- reflective coating has a thickness of 500 - 1500 Å
16. The method of claim 7 wherein said anti- reflective coating exhibits strong light absorption across the band of DUV wavelengths and the absorbance per 100nm film thickness is > 0.75.
17. The method of claim 7 wherein said anti- reflective coating is thermally stable to at least 250°C.
18. The method of claim 7 wherein said
substrate is coated with at least one additional layer prior to applying said anti-reflective coating, said additional layer acting as an adhesion promoters,
planarization layer, absorbing layer, interfacial mixing barrier, release layer, or contrast enhancement layer.
19. A photolithographable article of manufacture comprising:
a) a top layer of photoresist material;
b) an anti-reflective sublayer consisting
essentially of a polymer; and
c) a micro-electronic substrate;
said polymer having a functional repeat unit selected from the group consisting of:
Figure imgf000045_0001
Figure imgf000046_0001
and combinations thereof, wherein Ra is selected from the group consisting of:
Figure imgf000046_0002
wherein R1=R4, R2=R3, Rα, R2, R3, R4, and R5 are selected from the group consisting of hydrogen and methyl; and R6 is selected from the group consisting of hydrogen, methyl and phenyl;
Figure imgf000046_0003
wherein R1=R2=R3=R4 and are selected from the group consisting of hydrogen and methyl;
Figure imgf000047_0001
wherein R1=R2=R3=R4 and are selected from the group consisting of hydrogen and methyl;
X
Figure imgf000047_0002
wherein X is selected from the group consisting of:
Figure imgf000047_0003
wherein R1=R2=R3=CH3 and R4=H, or R1=R2=R4=CH3 and R3=H; and (G) combinations thereof;
wherein Rb is selected from the group consisting of:
Figure imgf000048_0002
wherein R2 is selected from the group consisting of Cl, C≡N, CH3, H, OCH3, and COOR2, wherein R2 is -CH3 or -CH2CH3;
Figure imgf000048_0001
T
Figure imgf000049_0002
wherein R1 is selected from H and C≡N;
Figure imgf000049_0001
wherein R1=R2=R3=R4=H or CH3;
Figure imgf000050_0002
wherein R1=R2 and are selected from consisting of H, CH3, OCH3, and R3=R4 and are selected from consisting of H and CH3;
wherein R1=R2=R3=R4=H or CH3; and
(N) combinations thereof.
PCT/US1993/001849 1992-02-12 1993-02-18 Polymers with intrinsic light-absorbing properties WO1994019396A1 (en)

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PCT/US1993/001849 WO1994019396A1 (en) 1992-02-12 1993-02-18 Polymers with intrinsic light-absorbing properties
US08/055,916 US5368989A (en) 1992-02-12 1993-04-30 Photolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating

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US6190839B1 (en) 1998-01-15 2001-02-20 Shipley Company, L.L.C. High conformality antireflective coating compositions
US6316165B1 (en) 1999-03-08 2001-11-13 Shipley Company, L.L.C. Planarizing antireflective coating compositions
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