US8477983B2 - Multi-microphone system - Google Patents
Multi-microphone system Download PDFInfo
- Publication number
- US8477983B2 US8477983B2 US11/466,669 US46666906A US8477983B2 US 8477983 B2 US8477983 B2 US 8477983B2 US 46666906 A US46666906 A US 46666906A US 8477983 B2 US8477983 B2 US 8477983B2
- Authority
- US
- United States
- Prior art keywords
- diaphragms
- backplate
- microphone system
- microphone
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/08—Mouthpieces; Microphones; Attachments therefor
- H04R1/083—Special constructions of mouthpieces
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
- H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
- H04R1/32—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only
- H04R1/40—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by combining a number of identical transducers
- H04R1/406—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by combining a number of identical transducers microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
Abstract
Description
Claims (23)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/466,669 US8477983B2 (en) | 2005-08-23 | 2006-08-23 | Multi-microphone system |
US13/871,177 US9338538B2 (en) | 2005-08-23 | 2013-04-26 | Multi-microphone system |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US71062405P | 2005-08-23 | 2005-08-23 | |
US11/466,669 US8477983B2 (en) | 2005-08-23 | 2006-08-23 | Multi-microphone system |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/871,177 Continuation US9338538B2 (en) | 2005-08-23 | 2013-04-26 | Multi-microphone system |
Publications (2)
Publication Number | Publication Date |
---|---|
US20070047746A1 US20070047746A1 (en) | 2007-03-01 |
US8477983B2 true US8477983B2 (en) | 2013-07-02 |
Family
ID=37487600
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/466,669 Active 2031-05-07 US8477983B2 (en) | 2005-08-23 | 2006-08-23 | Multi-microphone system |
US13/871,177 Active 2027-10-01 US9338538B2 (en) | 2005-08-23 | 2013-04-26 | Multi-microphone system |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/871,177 Active 2027-10-01 US9338538B2 (en) | 2005-08-23 | 2013-04-26 | Multi-microphone system |
Country Status (2)
Country | Link |
---|---|
US (2) | US8477983B2 (en) |
WO (1) | WO2007024909A1 (en) |
Cited By (17)
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US20080144863A1 (en) * | 2006-12-15 | 2008-06-19 | Fazzio R Shane | Microcap packaging of micromachined acoustic devices |
US20130108089A1 (en) * | 2008-04-02 | 2013-05-02 | Starkey Laboratories, Inc. | Method and apparatus for microphones sharing a common acoustic volume |
US20130277771A1 (en) * | 2012-04-20 | 2013-10-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Capacitive Sensors and Methods for Forming the Same |
US20140254835A1 (en) * | 2013-03-05 | 2014-09-11 | Analog Devices, Inc. | Packaged Microphone System with a Permanent Magnet |
CN104811872A (en) * | 2014-01-29 | 2015-07-29 | 三星电子株式会社 | Electro-acoustic transducer |
US20150237423A1 (en) * | 2013-03-21 | 2015-08-20 | Bichoy BAHR | Acoustic bandgap structures for integration of mems resonators |
US9173024B2 (en) | 2013-01-31 | 2015-10-27 | Invensense, Inc. | Noise mitigating microphone system |
US9181086B1 (en) | 2012-10-01 | 2015-11-10 | The Research Foundation For The State University Of New York | Hinged MEMS diaphragm and method of manufacture therof |
US20160144402A1 (en) * | 2014-11-20 | 2016-05-26 | Canon Kabushiki Kaisha | Capacitive transducer and sample information acquisition apparatus |
US20160157038A1 (en) * | 2013-03-14 | 2016-06-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and Method for Integrated Microphone |
US9363608B2 (en) | 2011-01-07 | 2016-06-07 | Omron Corporation | Acoustic transducer |
US9380380B2 (en) | 2011-01-07 | 2016-06-28 | Stmicroelectronics S.R.L. | Acoustic transducer and interface circuit |
US9420368B2 (en) | 2013-09-24 | 2016-08-16 | Analog Devices, Inc. | Time-frequency directional processing of audio signals |
US9460732B2 (en) | 2013-02-13 | 2016-10-04 | Analog Devices, Inc. | Signal source separation |
US20180103307A1 (en) * | 2016-10-06 | 2018-04-12 | Gopro, Inc. | Waterproof Microphone Membrane for Submersible Device |
US20180115838A1 (en) * | 2016-10-25 | 2018-04-26 | AAC Technologies Pte. Ltd. | MEMS Microphone |
US11463816B2 (en) | 2018-01-24 | 2022-10-04 | Shure Acquisition Holdings, Inc. | Directional MEMS microphone with correction circuitry |
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CA2650612C (en) * | 2006-05-12 | 2012-08-07 | Nokia Corporation | An adaptive user interface |
JP5088950B2 (en) * | 2006-11-22 | 2012-12-05 | 株式会社船井電機新応用技術研究所 | Integrated circuit device, voice input device, and information processing system |
EP2101514A4 (en) * | 2006-11-22 | 2011-09-28 | Funai Eaa Tech Res Inst Inc | Voice input device, its manufacturing method and information processing system |
US20080192962A1 (en) * | 2007-02-13 | 2008-08-14 | Sonion Nederland B.V. | Microphone with dual transducers |
DE102007029911A1 (en) * | 2007-06-28 | 2009-01-02 | Robert Bosch Gmbh | Acoustic sensor element |
JP5065974B2 (en) * | 2008-04-10 | 2012-11-07 | 株式会社船井電機新応用技術研究所 | Microphone unit and manufacturing method thereof |
JP2009284111A (en) * | 2008-05-20 | 2009-12-03 | Funai Electric Advanced Applied Technology Research Institute Inc | Integrated circuit device and voice input device, and information processing system |
JP5166117B2 (en) * | 2008-05-20 | 2013-03-21 | 株式会社船井電機新応用技術研究所 | Voice input device, manufacturing method thereof, and information processing system |
US8233637B2 (en) | 2009-01-20 | 2012-07-31 | Nokia Corporation | Multi-membrane microphone for high-amplitude audio capture |
US8175293B2 (en) * | 2009-04-16 | 2012-05-08 | Nokia Corporation | Apparatus, methods and computer programs for converting sound waves to electrical signals |
FR2963099B1 (en) * | 2010-07-22 | 2013-10-04 | Commissariat Energie Atomique | DYNAMIC MEMS PRESSURE SENSOR, IN PARTICULAR FOR MICROPHONE APPLICATIONS |
US9549252B2 (en) | 2010-08-27 | 2017-01-17 | Nokia Technologies Oy | Microphone apparatus and method for removing unwanted sounds |
JP4924853B1 (en) | 2011-02-23 | 2012-04-25 | オムロン株式会社 | Acoustic sensor and microphone |
JP5338825B2 (en) | 2011-02-23 | 2013-11-13 | オムロン株式会社 | Acoustic sensor and microphone |
US8351625B2 (en) | 2011-02-23 | 2013-01-08 | Omron Corporation | Acoustic sensor and microphone |
US8804982B2 (en) * | 2011-04-02 | 2014-08-12 | Harman International Industries, Inc. | Dual cell MEMS assembly |
US9078069B2 (en) * | 2012-01-11 | 2015-07-07 | Invensense, Inc. | MEMS microphone with springs and interior support |
CN102711027A (en) * | 2012-05-25 | 2012-10-03 | 歌尔声学股份有限公司 | Mems microphone chip |
JP5928163B2 (en) | 2012-05-31 | 2016-06-01 | オムロン株式会社 | Capacitive sensor, acoustic sensor and microphone |
JP5252104B1 (en) | 2012-05-31 | 2013-07-31 | オムロン株式会社 | Capacitive sensor, acoustic sensor and microphone |
JP6028479B2 (en) | 2012-09-14 | 2016-11-16 | オムロン株式会社 | Capacitive sensor, acoustic sensor and microphone |
US9247359B2 (en) * | 2012-10-18 | 2016-01-26 | Sonion Nederland Bv | Transducer, a hearing aid comprising the transducer and a method of operating the transducer |
US9809448B2 (en) | 2013-03-13 | 2017-11-07 | Invensense, Inc. | Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same |
US8692340B1 (en) | 2013-03-13 | 2014-04-08 | Invensense, Inc. | MEMS acoustic sensor with integrated back cavity |
JP6237978B2 (en) * | 2013-03-13 | 2017-11-29 | オムロン株式会社 | Capacitive sensor, acoustic sensor and microphone |
US9516428B2 (en) | 2013-03-14 | 2016-12-06 | Infineon Technologies Ag | MEMS acoustic transducer, MEMS microphone, MEMS microspeaker, array of speakers and method for manufacturing an acoustic transducer |
US9432759B2 (en) | 2013-07-22 | 2016-08-30 | Infineon Technologies Ag | Surface mountable microphone package, a microphone arrangement, a mobile phone and a method for recording microphone signals |
US9332330B2 (en) | 2013-07-22 | 2016-05-03 | Infineon Technologies Ag | Surface mountable microphone package, a microphone arrangement, a mobile phone and a method for recording microphone signals |
JP6135387B2 (en) * | 2013-08-09 | 2017-05-31 | オムロン株式会社 | Microphone, acoustic sensor, and acoustic sensor manufacturing method |
US8934649B1 (en) | 2013-08-29 | 2015-01-13 | Solid State System Co., Ltd. | Micro electro-mechanical system (MEMS) microphone device with multi-sensitivity outputs and circuit with the MEMS device |
CN104602172A (en) * | 2013-10-30 | 2015-05-06 | 北京卓锐微技术有限公司 | Capacitive microphone and preparation method thereof |
US10589987B2 (en) | 2013-11-06 | 2020-03-17 | Infineon Technologies Ag | System and method for a MEMS transducer |
CN103686570B (en) * | 2013-12-31 | 2017-01-18 | 瑞声声学科技(深圳)有限公司 | MEMS (micro electro mechanical system) microphone |
WO2016111583A1 (en) * | 2015-01-08 | 2016-07-14 | 한국기술교육대학교 산학협력단 | Microphone |
DE102015107560A1 (en) * | 2015-05-13 | 2016-11-17 | USound GmbH | Sound transducer arrangement with MEMS sound transducer |
CN104936116B (en) * | 2015-06-01 | 2018-12-04 | 山东共达电声股份有限公司 | A kind of integrated difference silicon capacitor microphone |
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US10045126B2 (en) | 2015-07-07 | 2018-08-07 | Invensense, Inc. | Microelectromechanical microphone having a stationary inner region |
US20170048623A1 (en) * | 2015-08-10 | 2017-02-16 | Knowles Electronics, Llc | Dual band mems acoustic device |
US10250997B2 (en) * | 2016-10-25 | 2019-04-02 | Clean Energy Labs, Llc | Compact electroacoustic transducer and loudspeaker system and method of use thereof |
JP7143056B2 (en) | 2016-12-08 | 2022-09-28 | Mmiセミコンダクター株式会社 | capacitive transducer system, capacitive transducer and acoustic sensor |
JP6830527B2 (en) * | 2017-05-09 | 2021-02-17 | 富士フイルム株式会社 | Piezoelectric Microphone Chips and Piezoelectric Microphones |
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CN113132876B (en) * | 2021-03-01 | 2023-08-04 | 歌尔微电子股份有限公司 | Micro-electromechanical microphone and electronic device |
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US20070047746A1 (en) | 2007-03-01 |
WO2007024909A1 (en) | 2007-03-01 |
US20130236037A1 (en) | 2013-09-12 |
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