US7283112B2 - Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system - Google Patents
Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system Download PDFInfo
- Publication number
- US7283112B2 US7283112B2 US10/086,397 US8639702A US7283112B2 US 7283112 B2 US7283112 B2 US 7283112B2 US 8639702 A US8639702 A US 8639702A US 7283112 B2 US7283112 B2 US 7283112B2
- Authority
- US
- United States
- Prior art keywords
- display engine
- illumination light
- microelectrical mechanical
- arm
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related, expires
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/904—Micromirror
Abstract
Description
-
- Vse=storage electrode voltage
- Ry=mirror arm voltage for Row-y
- Cx=actuation electrode voltage for Column-x
A xy =|R y −C x|=actuation potential difference for mirror RxCy
H xy =|R y −V se|=hold potential difference via storage electrode for mirrors on Ry
A xy>114 volts.
A xy<53 volts and H xy<25 volts
A xy>53 volts or H xy>25 volts if state=actuated
A xy<114 volts if state=released
-
- Vse=Ry=Cx=0 volts (for all x and y).
-
- Vse=+60 volts.
Step 254 applies +60 volts tostorage electrodes 240 so any activatedactuator 170 is held in its activated, display ON state until released. This step does not affect actuators in the relaxed, display OFF because the activation ofstorage electrodes 240 is insufficient to activate anactuator 170 in the relaxed state.
- Vse=+60 volts.
-
- Set “i”=1.
-
- Set Ry=i=+60 volts,
- Cx=data states for Ry=iC1, Ry=iC2, . . . , Ry=iC50.
To activateactuators 170 within Row-i (Ry=i=+60 volts), set Cx=−60 volts, giving an activation differential: - (Ax,y=i=|60−(−60)|=120 volts=>mirror is actuated).
To releaseactuators 170 within Row-I, (Ry=i =+60 volts), set Cx=+60 volts, giving a release differential:
-
- All Ry=0 volts and all Cx=0 volts
- Hxy=60 volts
Claims (23)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/086,397 US7283112B2 (en) | 2002-03-01 | 2002-03-01 | Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system |
EP03002121A EP1341025B1 (en) | 2002-03-01 | 2003-01-30 | Reflective microelectrical mechanical structure (mems) optical modulator and optical display system |
DE60316488T DE60316488T2 (en) | 2002-03-01 | 2003-01-30 | MEMS optical reflection modulator and optical display system |
AT03002121T ATE374383T1 (en) | 2002-03-01 | 2003-01-30 | MEMS OPTICAL REFLECTION MODULATOR AND OPTICAL DISPLAY SYSTEM |
JP2003056327A JP4316260B2 (en) | 2002-03-01 | 2003-03-03 | Optical display system and optical display engine |
US10/959,496 US7006276B2 (en) | 2002-03-01 | 2004-10-05 | Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system |
US11/154,113 US20050248827A1 (en) | 2002-03-01 | 2005-06-15 | Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/086,397 US7283112B2 (en) | 2002-03-01 | 2002-03-01 | Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/959,496 Division US7006276B2 (en) | 2002-03-01 | 2004-10-05 | Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system |
Publications (2)
Publication Number | Publication Date |
---|---|
US20030164814A1 US20030164814A1 (en) | 2003-09-04 |
US7283112B2 true US7283112B2 (en) | 2007-10-16 |
Family
ID=27733413
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/086,397 Expired - Fee Related US7283112B2 (en) | 2002-03-01 | 2002-03-01 | Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system |
US10/959,496 Expired - Lifetime US7006276B2 (en) | 2002-03-01 | 2004-10-05 | Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system |
US11/154,113 Abandoned US20050248827A1 (en) | 2002-03-01 | 2005-06-15 | Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/959,496 Expired - Lifetime US7006276B2 (en) | 2002-03-01 | 2004-10-05 | Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system |
US11/154,113 Abandoned US20050248827A1 (en) | 2002-03-01 | 2005-06-15 | Reflective microelectrical mechanical structure (MEMS) optical modulator and optical display system |
Country Status (5)
Country | Link |
---|---|
US (3) | US7283112B2 (en) |
EP (1) | EP1341025B1 (en) |
JP (1) | JP4316260B2 (en) |
AT (1) | ATE374383T1 (en) |
DE (1) | DE60316488T2 (en) |
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2003
- 2003-01-30 EP EP03002121A patent/EP1341025B1/en not_active Expired - Lifetime
- 2003-01-30 AT AT03002121T patent/ATE374383T1/en not_active IP Right Cessation
- 2003-01-30 DE DE60316488T patent/DE60316488T2/en not_active Expired - Lifetime
- 2003-03-03 JP JP2003056327A patent/JP4316260B2/en not_active Expired - Fee Related
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2004
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2005
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US20060018048A1 (en) * | 2002-07-04 | 2006-01-26 | Peter Duerr | Method and apparatus for controlling deformable actuators |
US7626581B2 (en) * | 2004-09-27 | 2009-12-01 | Idc, Llc | Device and method for display memory using manipulation of mechanical response |
US20080158647A1 (en) * | 2004-09-27 | 2008-07-03 | Idc, Llc | Interferometric modulator array with integrated mems electrical switches |
US8223424B2 (en) | 2004-09-27 | 2012-07-17 | Qualcomm Mems Technologies, Inc. | Interferometric modulator array with integrated MEMS electrical switches |
US7859739B2 (en) | 2004-09-27 | 2010-12-28 | Qualcomm Mems Technologies, Inc. | Interferometric modulator array with integrated MEMS electrical switches |
US20110095973A1 (en) * | 2004-09-27 | 2011-04-28 | Qualcomm Mems Technologies, Inc. | Interferometric modulator array with integrated mems electrical switches |
US8437071B2 (en) | 2004-09-27 | 2013-05-07 | Qualcomm Mems Technologies, Inc. | Interferometric modulator array with integrated MEMS electrical switches |
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US8194056B2 (en) * | 2006-02-09 | 2012-06-05 | Qualcomm Mems Technologies Inc. | Method and system for writing data to MEMS display elements |
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US8508447B2 (en) | 2007-11-19 | 2013-08-13 | Microsoft Corporation | Display device and pixel therefor |
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US20100202040A1 (en) * | 2009-02-06 | 2010-08-12 | U.S. Government As Represented By The Secretary Of The Army | Dynamic imaging and/or identification apparatus and method thereof |
US20130208328A1 (en) * | 2012-02-15 | 2013-08-15 | Electronics And Telecommunications Research Institute | Holographic display apparatus capable of steering view window |
US8995037B2 (en) * | 2012-02-15 | 2015-03-31 | Electronics And Telecommunications Research Institute | Holographic display apparatus capable of steering view window |
US20140368897A1 (en) * | 2013-06-17 | 2014-12-18 | Hon Hai Precision Industry Co., Ltd. | Mems-based rapidscan device and projector having same |
US9459449B2 (en) * | 2013-06-17 | 2016-10-04 | Hon Hai Precision Industry Co., Ltd. | MEMS-based rapidscan device and projector having same |
Also Published As
Publication number | Publication date |
---|---|
US20030164814A1 (en) | 2003-09-04 |
US20050057793A1 (en) | 2005-03-17 |
DE60316488T2 (en) | 2008-07-03 |
JP2003270589A (en) | 2003-09-25 |
ATE374383T1 (en) | 2007-10-15 |
DE60316488D1 (en) | 2007-11-08 |
US7006276B2 (en) | 2006-02-28 |
EP1341025A1 (en) | 2003-09-03 |
US20050248827A1 (en) | 2005-11-10 |
JP4316260B2 (en) | 2009-08-19 |
EP1341025B1 (en) | 2007-09-26 |
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