US5575929A - Method for making circular tubular channels with two silicon wafers - Google Patents
Method for making circular tubular channels with two silicon wafers Download PDFInfo
- Publication number
- US5575929A US5575929A US08/464,020 US46402095A US5575929A US 5575929 A US5575929 A US 5575929A US 46402095 A US46402095 A US 46402095A US 5575929 A US5575929 A US 5575929A
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- silicon
- silicon wafer
- etching
- silicon wafers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6052—Construction of the column body
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/464,020 US5575929A (en) | 1995-06-05 | 1995-06-05 | Method for making circular tubular channels with two silicon wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/464,020 US5575929A (en) | 1995-06-05 | 1995-06-05 | Method for making circular tubular channels with two silicon wafers |
Publications (1)
Publication Number | Publication Date |
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US5575929A true US5575929A (en) | 1996-11-19 |
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/464,020 Expired - Lifetime US5575929A (en) | 1995-06-05 | 1995-06-05 | Method for making circular tubular channels with two silicon wafers |
Country Status (1)
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US (1) | US5575929A (en) |
Cited By (61)
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---|---|---|---|---|
US5783452A (en) * | 1996-02-02 | 1998-07-21 | University Of Washington | Covered microchannels and the microfabrication thereof |
WO2000000853A2 (en) * | 1998-06-11 | 2000-01-06 | Litton Systems, Inc. | Night viewer with fine-resolution image intensifier |
US6068780A (en) * | 1995-06-05 | 2000-05-30 | The Regents Of The University Of California | Micro-miniature gas chromatograph column disposed in silicon wafers |
US6194321B1 (en) * | 1998-08-19 | 2001-02-27 | Micron Technology, Inc. | Semiconductor processing methods utilizing boron and nitrogen, and semiconductor wafers comprising boron and nitrogen |
WO2001085602A1 (en) * | 2000-05-12 | 2001-11-15 | Åmic AB | Micro channel in a substrate |
WO2002047913A1 (en) * | 2000-12-12 | 2002-06-20 | Gyros Ab | Microscale nozzle and method for manufacturing the same |
DE10104326A1 (en) * | 2001-01-24 | 2002-08-01 | Siemens Ag | Making extended and rounded recess in component for e.g. micro-fluidic flow, employs anisotropic, then isotropic etching through groove-forming mask |
DE10104323A1 (en) * | 2001-01-24 | 2002-08-01 | Siemens Ag | Etching locally-constricted groove in e.g. micro-fluidic component surface uses combined mask assembly to etch constriction, passivation layer and wider groove sections |
US6437551B1 (en) | 1999-11-02 | 2002-08-20 | The Regents Of The University Of California | Microfabricated AC impedance sensor |
US6454840B1 (en) | 1998-08-20 | 2002-09-24 | Siemens Aktiengesellschaft | Separation-column unit for a gas-chromatograph and method for making the same |
US6491233B2 (en) | 2000-12-22 | 2002-12-10 | Chrysalis Technologies Incorporated | Vapor driven aerosol generator and method of use thereof |
US6501052B2 (en) | 2000-12-22 | 2002-12-31 | Chrysalis Technologies Incorporated | Aerosol generator having multiple heating zones and methods of use thereof |
US6516796B1 (en) | 1998-10-14 | 2003-02-11 | Chrysalis Technologies Incorporated | Aerosol generator and methods of making and using an aerosol generator |
US6568390B2 (en) | 2001-09-21 | 2003-05-27 | Chrysalis Technologies Incorporated | Dual capillary fluid vaporizing device |
US6606251B1 (en) | 2002-02-07 | 2003-08-12 | Cooligy Inc. | Power conditioning module |
US6640050B2 (en) | 2001-09-21 | 2003-10-28 | Chrysalis Technologies Incorporated | Fluid vaporizing device having controlled temperature profile heater/capillary tube |
US6649078B2 (en) * | 2000-12-06 | 2003-11-18 | The Regents Of The University Of California | Thin film capillary process and apparatus |
US6681769B2 (en) | 2001-12-06 | 2004-01-27 | Crysalis Technologies Incorporated | Aerosol generator having a multiple path heater arrangement and method of use thereof |
US6681998B2 (en) | 2000-12-22 | 2004-01-27 | Chrysalis Technologies Incorporated | Aerosol generator having inductive heater and method of use thereof |
US6701921B2 (en) | 2000-12-22 | 2004-03-09 | Chrysalis Technologies Incorporated | Aerosol generator having heater in multilayered composite and method of use thereof |
US6701922B2 (en) | 2001-12-20 | 2004-03-09 | Chrysalis Technologies Incorporated | Mouthpiece entrainment airflow control for aerosol generators |
US20040101421A1 (en) * | 2002-09-23 | 2004-05-27 | Kenny Thomas W. | Micro-fabricated electrokinetic pump with on-frit electrode |
US20040104012A1 (en) * | 2002-10-22 | 2004-06-03 | Cooligy, Inc. | Vapor escape microchannel heat exchanger |
US20040104022A1 (en) * | 2002-11-01 | 2004-06-03 | Cooligy, Inc. | Method and apparatus for flexible fluid delivery for cooling desired hot spots in a heat producing device |
US20040112585A1 (en) * | 2002-11-01 | 2004-06-17 | Cooligy Inc. | Method and apparatus for achieving temperature uniformity and hot spot cooling in a heat producing device |
US20040134546A1 (en) * | 2001-05-25 | 2004-07-15 | Schick Hans G. | Methods and apparatus for micro-fluidic analytical chemistry |
US20040182560A1 (en) * | 2003-03-17 | 2004-09-23 | Cooligy Inc. | Apparatus and method of forming channels in a heat-exchanging device |
US20040182548A1 (en) * | 2003-03-17 | 2004-09-23 | Cooligy, Inc. | Multi-level microchannel heat exchangers |
US20040188065A1 (en) * | 2003-01-31 | 2004-09-30 | Cooligy, Inc. | Decoupled spring-loaded mounting apparatus and method of manufacturing thereof |
US6799572B2 (en) | 2000-12-22 | 2004-10-05 | Chrysalis Technologies Incorporated | Disposable aerosol generator system and methods for administering the aerosol |
US6804458B2 (en) | 2001-12-06 | 2004-10-12 | Chrysalis Technologies Incorporated | Aerosol generator having heater arranged to vaporize fluid in fluid passage between bonded layers of laminate |
US20040206477A1 (en) * | 2002-11-01 | 2004-10-21 | Cooligy, Inc. | Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device |
US20040244950A1 (en) * | 2003-01-31 | 2004-12-09 | Cooligy, Inc. | Optimized multiple heat pipe blocks for electronics cooling |
US20040265519A1 (en) * | 2003-06-27 | 2004-12-30 | Pellizzari Roberto O. | Fabrication of fluid delivery components |
US6942018B2 (en) | 2001-09-28 | 2005-09-13 | The Board Of Trustees Of The Leland Stanford Junior University | Electroosmotic microchannel cooling system |
US20050269061A1 (en) * | 2004-06-04 | 2005-12-08 | Cooligy, Inc. | Apparatus and method of efficient fluid delivery for cooling a heat producing device |
US6986382B2 (en) | 2002-11-01 | 2006-01-17 | Cooligy Inc. | Interwoven manifolds for pressure drop reduction in microchannel heat exchangers |
US7134486B2 (en) | 2001-09-28 | 2006-11-14 | The Board Of Trustees Of The Leeland Stanford Junior University | Control of electrolysis gases in electroosmotic pump systems |
US7201012B2 (en) | 2003-01-31 | 2007-04-10 | Cooligy, Inc. | Remedies to prevent cracking in a liquid system |
US7293423B2 (en) | 2004-06-04 | 2007-11-13 | Cooligy Inc. | Method and apparatus for controlling freezing nucleation and propagation |
US7539020B2 (en) | 2006-02-16 | 2009-05-26 | Cooligy Inc. | Liquid cooling loops for server applications |
US7715194B2 (en) | 2006-04-11 | 2010-05-11 | Cooligy Inc. | Methodology of cooling multiple heat sources in a personal computer through the use of multiple fluid-based heat exchanging loops coupled via modular bus-type heat exchangers |
US7746634B2 (en) | 2007-08-07 | 2010-06-29 | Cooligy Inc. | Internal access mechanism for a server rack |
US7806168B2 (en) | 2002-11-01 | 2010-10-05 | Cooligy Inc | Optimal spreader system, device and method for fluid cooled micro-scaled heat exchange |
US7836597B2 (en) | 2002-11-01 | 2010-11-23 | Cooligy Inc. | Method of fabricating high surface to volume ratio structures and their integration in microheat exchangers for liquid cooling system |
US7913719B2 (en) | 2006-01-30 | 2011-03-29 | Cooligy Inc. | Tape-wrapped multilayer tubing and methods for making the same |
US20110291533A1 (en) * | 2010-05-25 | 2011-12-01 | Mammoth, Inc. | Cabinet for an air handling system |
US8157001B2 (en) | 2006-03-30 | 2012-04-17 | Cooligy Inc. | Integrated liquid to air conduction module |
CN102507419A (en) * | 2011-10-27 | 2012-06-20 | 江苏苏净集团有限公司 | Sample tank for liquid particle counter and production method of sample tank |
US8254422B2 (en) | 2008-08-05 | 2012-08-28 | Cooligy Inc. | Microheat exchanger for laser diode cooling |
US8250877B2 (en) | 2008-03-10 | 2012-08-28 | Cooligy Inc. | Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door |
US8464781B2 (en) | 2002-11-01 | 2013-06-18 | Cooligy Inc. | Cooling systems incorporating heat exchangers and thermoelectric layers |
US8700121B2 (en) | 2011-12-14 | 2014-04-15 | Intersection Medical, Inc. | Devices for determining the relative spatial change in subsurface resistivities across frequencies in tissue |
US9297571B1 (en) | 2008-03-10 | 2016-03-29 | Liebert Corporation | Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door |
US9585593B2 (en) | 2009-11-18 | 2017-03-07 | Chung Shing Fan | Signal distribution for patient-electrode measurements |
US9615767B2 (en) | 2009-10-26 | 2017-04-11 | Impedimed Limited | Fluid level indicator determination |
US9724012B2 (en) | 2005-10-11 | 2017-08-08 | Impedimed Limited | Hydration status monitoring |
US10070800B2 (en) | 2007-08-09 | 2018-09-11 | Impedimed Limited | Impedance measurement process |
US10307074B2 (en) | 2007-04-20 | 2019-06-04 | Impedimed Limited | Monitoring system and probe |
US11660013B2 (en) | 2005-07-01 | 2023-05-30 | Impedimed Limited | Monitoring system |
US11737678B2 (en) | 2005-07-01 | 2023-08-29 | Impedimed Limited | Monitoring system |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3977925A (en) * | 1973-11-29 | 1976-08-31 | Siemens Aktiengesellschaft | Method of localized etching of Si crystals |
US4115793A (en) * | 1976-11-30 | 1978-09-19 | Zaidan Hojin Handotai Kenkyu Shinkokai | Field effect transistor with reduced series resistance |
US4326771A (en) * | 1979-10-05 | 1982-04-27 | Thomson-Csf | Method of coupling between an optical fiber and an optoelectronic diode, and a transmitting or receiving head fabricated by means of said method |
JPS6283661A (en) * | 1985-10-09 | 1987-04-17 | Sord Comput Corp | Preparation of silicon wafer capillary column |
JPS62108156A (en) * | 1985-11-07 | 1987-05-19 | Sord Comput Corp | Silicon wafer capillary column |
JPH03263001A (en) * | 1990-03-14 | 1991-11-22 | Terumo Corp | Production of microlens for focusing infrared ray and infrared ray sensor with microlens |
US5223086A (en) * | 1991-03-11 | 1993-06-29 | Nippondenso Co., Ltd. | Method of producing an acceleration sensor of a semiconductor |
US5255376A (en) * | 1992-01-14 | 1993-10-19 | Sun Microsystems, Inc. | Method and apparatus for supporting a dual bit length protocol for data transfers |
JPH0684731A (en) * | 1992-09-07 | 1994-03-25 | Nec Kyushu Ltd | Semiconductor wafer |
-
1995
- 1995-06-05 US US08/464,020 patent/US5575929A/en not_active Expired - Lifetime
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3977925A (en) * | 1973-11-29 | 1976-08-31 | Siemens Aktiengesellschaft | Method of localized etching of Si crystals |
US4115793A (en) * | 1976-11-30 | 1978-09-19 | Zaidan Hojin Handotai Kenkyu Shinkokai | Field effect transistor with reduced series resistance |
US4326771A (en) * | 1979-10-05 | 1982-04-27 | Thomson-Csf | Method of coupling between an optical fiber and an optoelectronic diode, and a transmitting or receiving head fabricated by means of said method |
JPS6283661A (en) * | 1985-10-09 | 1987-04-17 | Sord Comput Corp | Preparation of silicon wafer capillary column |
JPS62108156A (en) * | 1985-11-07 | 1987-05-19 | Sord Comput Corp | Silicon wafer capillary column |
JPH03263001A (en) * | 1990-03-14 | 1991-11-22 | Terumo Corp | Production of microlens for focusing infrared ray and infrared ray sensor with microlens |
US5223086A (en) * | 1991-03-11 | 1993-06-29 | Nippondenso Co., Ltd. | Method of producing an acceleration sensor of a semiconductor |
US5255376A (en) * | 1992-01-14 | 1993-10-19 | Sun Microsystems, Inc. | Method and apparatus for supporting a dual bit length protocol for data transfers |
JPH0684731A (en) * | 1992-09-07 | 1994-03-25 | Nec Kyushu Ltd | Semiconductor wafer |
Non-Patent Citations (4)
Title |
---|
"Chemical Isotropic Etching of Single-Crystal Silicon For Acoustic Lens of Scanning Acoustic Microscope", Jpn. J. Appl. Phys. vol. 32 (May 1993), Pt. 1, No. 5B, Hashimoto et al.; pp. 2543-2546. |
"Integrated Circuit Fabrication Technology"; Elliot; ©1992; McGraw-Hill; NY, NY. |
Chemical Isotropic Etching of Single Crystal Silicon For Acoustic Lens of Scanning Acoustic Microscope , Jpn. J. Appl. Phys. vol. 32 (May 1993), Pt. 1, No. 5B, Hashimoto et al.; pp. 2543 2546. * |
Integrated Circuit Fabrication Technology ; Elliot; 1992; McGraw Hill; NY, NY. * |
Cited By (94)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6068780A (en) * | 1995-06-05 | 2000-05-30 | The Regents Of The University Of California | Micro-miniature gas chromatograph column disposed in silicon wafers |
US5783452A (en) * | 1996-02-02 | 1998-07-21 | University Of Washington | Covered microchannels and the microfabrication thereof |
WO2000000853A2 (en) * | 1998-06-11 | 2000-01-06 | Litton Systems, Inc. | Night viewer with fine-resolution image intensifier |
WO2000000853A3 (en) * | 1998-06-11 | 2000-02-17 | Litton Systems Inc | Night viewer with fine-resolution image intensifier |
US6194321B1 (en) * | 1998-08-19 | 2001-02-27 | Micron Technology, Inc. | Semiconductor processing methods utilizing boron and nitrogen, and semiconductor wafers comprising boron and nitrogen |
US6454840B1 (en) | 1998-08-20 | 2002-09-24 | Siemens Aktiengesellschaft | Separation-column unit for a gas-chromatograph and method for making the same |
US6557552B1 (en) | 1998-10-14 | 2003-05-06 | Chrysalis Technologies Incorporated | Aerosol generator and methods of making and using an aerosol generator |
US6516796B1 (en) | 1998-10-14 | 2003-02-11 | Chrysalis Technologies Incorporated | Aerosol generator and methods of making and using an aerosol generator |
US7117867B2 (en) | 1998-10-14 | 2006-10-10 | Philip Morris Usa | Aerosol generator and methods of making and using an aerosol generator |
US6437551B1 (en) | 1999-11-02 | 2002-08-20 | The Regents Of The University Of California | Microfabricated AC impedance sensor |
US20070059216A1 (en) * | 2000-05-12 | 2007-03-15 | Gyros Patent Ab | Hydrophobic Barriers |
US20030173650A1 (en) * | 2000-05-12 | 2003-09-18 | Olle Larsson | Micro channel in a substrate |
WO2001085602A1 (en) * | 2000-05-12 | 2001-11-15 | Åmic AB | Micro channel in a substrate |
US6649078B2 (en) * | 2000-12-06 | 2003-11-18 | The Regents Of The University Of California | Thin film capillary process and apparatus |
US7213339B2 (en) | 2000-12-12 | 2007-05-08 | Gyros Ab | Method of manufacturing a microscale nozzle |
WO2002047913A1 (en) * | 2000-12-12 | 2002-06-20 | Gyros Ab | Microscale nozzle and method for manufacturing the same |
US20040055136A1 (en) * | 2000-12-12 | 2004-03-25 | Ohman Per Ove | Microscale nozzle method for manufacturing the same |
US6491233B2 (en) | 2000-12-22 | 2002-12-10 | Chrysalis Technologies Incorporated | Vapor driven aerosol generator and method of use thereof |
US6799572B2 (en) | 2000-12-22 | 2004-10-05 | Chrysalis Technologies Incorporated | Disposable aerosol generator system and methods for administering the aerosol |
US6501052B2 (en) | 2000-12-22 | 2002-12-31 | Chrysalis Technologies Incorporated | Aerosol generator having multiple heating zones and methods of use thereof |
US6681998B2 (en) | 2000-12-22 | 2004-01-27 | Chrysalis Technologies Incorporated | Aerosol generator having inductive heater and method of use thereof |
US6701921B2 (en) | 2000-12-22 | 2004-03-09 | Chrysalis Technologies Incorporated | Aerosol generator having heater in multilayered composite and method of use thereof |
DE10104323A1 (en) * | 2001-01-24 | 2002-08-01 | Siemens Ag | Etching locally-constricted groove in e.g. micro-fluidic component surface uses combined mask assembly to etch constriction, passivation layer and wider groove sections |
DE10104326A1 (en) * | 2001-01-24 | 2002-08-01 | Siemens Ag | Making extended and rounded recess in component for e.g. micro-fluidic flow, employs anisotropic, then isotropic etching through groove-forming mask |
US20040134546A1 (en) * | 2001-05-25 | 2004-07-15 | Schick Hans G. | Methods and apparatus for micro-fluidic analytical chemistry |
US6910503B2 (en) * | 2001-05-25 | 2005-06-28 | Upchurch Scientific, Inc. | Methods and apparatus for micro-fluidic analytical chemistry |
US6640050B2 (en) | 2001-09-21 | 2003-10-28 | Chrysalis Technologies Incorporated | Fluid vaporizing device having controlled temperature profile heater/capillary tube |
US6568390B2 (en) | 2001-09-21 | 2003-05-27 | Chrysalis Technologies Incorporated | Dual capillary fluid vaporizing device |
US6715487B2 (en) | 2001-09-21 | 2004-04-06 | Chrysalis Technologies Incorporated | Dual capillary fluid vaporizing device |
US7334630B2 (en) | 2001-09-28 | 2008-02-26 | The Board Of Trustees Of The Leland Stanford Junior University | Closed-loop microchannel cooling system |
US6942018B2 (en) | 2001-09-28 | 2005-09-13 | The Board Of Trustees Of The Leland Stanford Junior University | Electroosmotic microchannel cooling system |
US6991024B2 (en) | 2001-09-28 | 2006-01-31 | The Board Of Trustees Of The Leland Stanford Junior University | Electroosmotic microchannel cooling system |
US7134486B2 (en) | 2001-09-28 | 2006-11-14 | The Board Of Trustees Of The Leeland Stanford Junior University | Control of electrolysis gases in electroosmotic pump systems |
US7131486B2 (en) | 2001-09-28 | 2006-11-07 | The Board Of Trustees Of The Leland Stanford Junior Universty | Electroosmotic microchannel cooling system |
US6804458B2 (en) | 2001-12-06 | 2004-10-12 | Chrysalis Technologies Incorporated | Aerosol generator having heater arranged to vaporize fluid in fluid passage between bonded layers of laminate |
US6681769B2 (en) | 2001-12-06 | 2004-01-27 | Crysalis Technologies Incorporated | Aerosol generator having a multiple path heater arrangement and method of use thereof |
US6701922B2 (en) | 2001-12-20 | 2004-03-09 | Chrysalis Technologies Incorporated | Mouthpiece entrainment airflow control for aerosol generators |
US20040240245A1 (en) * | 2002-02-07 | 2004-12-02 | Cooligy, Inc. | Power conditioning module |
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US7050308B2 (en) | 2002-02-07 | 2006-05-23 | Cooligy, Inc. | Power conditioning module |
US20030173942A1 (en) * | 2002-02-07 | 2003-09-18 | Cooligy, Inc. | Apparatus for conditioning power and managing thermal energy in an electronic device |
US6678168B2 (en) | 2002-02-07 | 2004-01-13 | Cooligy, Inc. | System including power conditioning modules |
US6606251B1 (en) | 2002-02-07 | 2003-08-12 | Cooligy Inc. | Power conditioning module |
US20040101421A1 (en) * | 2002-09-23 | 2004-05-27 | Kenny Thomas W. | Micro-fabricated electrokinetic pump with on-frit electrode |
US20040104012A1 (en) * | 2002-10-22 | 2004-06-03 | Cooligy, Inc. | Vapor escape microchannel heat exchanger |
US6994151B2 (en) | 2002-10-22 | 2006-02-07 | Cooligy, Inc. | Vapor escape microchannel heat exchanger |
US6988534B2 (en) | 2002-11-01 | 2006-01-24 | Cooligy, Inc. | Method and apparatus for flexible fluid delivery for cooling desired hot spots in a heat producing device |
US7104312B2 (en) | 2002-11-01 | 2006-09-12 | Cooligy, Inc. | Method and apparatus for achieving temperature uniformity and hot spot cooling in a heat producing device |
US7836597B2 (en) | 2002-11-01 | 2010-11-23 | Cooligy Inc. | Method of fabricating high surface to volume ratio structures and their integration in microheat exchangers for liquid cooling system |
US20040104022A1 (en) * | 2002-11-01 | 2004-06-03 | Cooligy, Inc. | Method and apparatus for flexible fluid delivery for cooling desired hot spots in a heat producing device |
US7000684B2 (en) | 2002-11-01 | 2006-02-21 | Cooligy, Inc. | Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device |
US7806168B2 (en) | 2002-11-01 | 2010-10-05 | Cooligy Inc | Optimal spreader system, device and method for fluid cooled micro-scaled heat exchange |
US6986382B2 (en) | 2002-11-01 | 2006-01-17 | Cooligy Inc. | Interwoven manifolds for pressure drop reduction in microchannel heat exchangers |
US20040112585A1 (en) * | 2002-11-01 | 2004-06-17 | Cooligy Inc. | Method and apparatus for achieving temperature uniformity and hot spot cooling in a heat producing device |
US8464781B2 (en) | 2002-11-01 | 2013-06-18 | Cooligy Inc. | Cooling systems incorporating heat exchangers and thermoelectric layers |
US20040206477A1 (en) * | 2002-11-01 | 2004-10-21 | Cooligy, Inc. | Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device |
US7044196B2 (en) | 2003-01-31 | 2006-05-16 | Cooligy,Inc | Decoupled spring-loaded mounting apparatus and method of manufacturing thereof |
US7090001B2 (en) | 2003-01-31 | 2006-08-15 | Cooligy, Inc. | Optimized multiple heat pipe blocks for electronics cooling |
US20040188065A1 (en) * | 2003-01-31 | 2004-09-30 | Cooligy, Inc. | Decoupled spring-loaded mounting apparatus and method of manufacturing thereof |
US20040244950A1 (en) * | 2003-01-31 | 2004-12-09 | Cooligy, Inc. | Optimized multiple heat pipe blocks for electronics cooling |
US7201012B2 (en) | 2003-01-31 | 2007-04-10 | Cooligy, Inc. | Remedies to prevent cracking in a liquid system |
US7201214B2 (en) | 2003-01-31 | 2007-04-10 | Cooligy, Inc. | Remedies to prevent cracking in a liquid system |
US20040182548A1 (en) * | 2003-03-17 | 2004-09-23 | Cooligy, Inc. | Multi-level microchannel heat exchangers |
US7156159B2 (en) | 2003-03-17 | 2007-01-02 | Cooligy, Inc. | Multi-level microchannel heat exchangers |
US20040182560A1 (en) * | 2003-03-17 | 2004-09-23 | Cooligy Inc. | Apparatus and method of forming channels in a heat-exchanging device |
US7017654B2 (en) | 2003-03-17 | 2006-03-28 | Cooligy, Inc. | Apparatus and method of forming channels in a heat-exchanging device |
US20040265519A1 (en) * | 2003-06-27 | 2004-12-30 | Pellizzari Roberto O. | Fabrication of fluid delivery components |
WO2005011865A3 (en) * | 2003-07-28 | 2005-04-21 | Upchurch Scient Inc | Improved methods and apparatus for micro-fludic analytical chemistry |
US7188662B2 (en) | 2004-06-04 | 2007-03-13 | Cooligy, Inc. | Apparatus and method of efficient fluid delivery for cooling a heat producing device |
US7293423B2 (en) | 2004-06-04 | 2007-11-13 | Cooligy Inc. | Method and apparatus for controlling freezing nucleation and propagation |
US20050269061A1 (en) * | 2004-06-04 | 2005-12-08 | Cooligy, Inc. | Apparatus and method of efficient fluid delivery for cooling a heat producing device |
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