|Publication number||US5506171 A|
|Application number||US 08/485,201|
|Publication date||9 Apr 1996|
|Filing date||7 Jun 1995|
|Priority date||16 Dec 1992|
|Also published as||EP0602633A2, EP0602633A3|
|Publication number||08485201, 485201, US 5506171 A, US 5506171A, US-A-5506171, US5506171 A, US5506171A|
|Inventors||Jerry L. Leonard, Brynne K. Bohannon|
|Original Assignee||Texas Instruments Incorporated|
|Export Citation||BiBTeX, EndNote, RefMan|
|Patent Citations (9), Referenced by (35), Classifications (16), Legal Events (3)|
|External Links: USPTO, USPTO Assignment, Espacenet|
This is a division of application Ser. No. 08/342,674, filed Nov. 21, 1994 which is a continuation of application Ser. No. 07/991,229, filed Dec. 16, 1992 now abandoned.
This invention relates to fabrication of integrated circuits, and more particularly to an improved method of fabricating a patterned metal layer over a spacer layer, and subsequently etching away the spacer layer.
DMDs are a type of spatial light modulator, characterized by array of micro-mechanical pixel elements having reflective surfaces. The pixel elements are electronically addressable, such that each can be selectively positioned to direct light in either an "on" or "off" position. An addressed array of pixel elements represents an image frame, with the image being formed as a result of which pixel elements direct light to an image plane. The image can be captured by means of opto-electrical devices and used to generate a display or printed copy.
Typically, the pixel elements of a DMD have associated memory cells for storing the binary signal that will drive the pixel element to its on or off position. An advantage of many DMD designs is that the pixel array, as well as the memory cells and addressing circuits can be fabricated with integrated circuit techniques.
In general, DMD pixel architectures may be distinguished by type of deformation modes, namely torsion beam or cantilever beam. Torsion beam pixels consist of a thick reflective beam suspended over an air gap and connected between two supports by two thin torsion hinges that are under tension. When an address electrode, underlying one half of the torsion beam, is energized, the torsion hinges are twisted and the beam rotates about the axis of the hinges. Cantilever beam pixels consist of a thick reflective beam suspended over an air gap, connected by a thin cantilever hinge to a support. When an underlying address electrode is energized, the cantilever hinge bends and the beam tip is deflected toward the address electrode.
Fabrication of both torsion beam and cantilever beam pixels is typically on top of an address circuit already fabricated on a semiconductor wafer. Once the address circuit is formed, a planarizing spacer layer is placed on the wafer. This spacer layer provides a smooth surface on which to form the hinges and beams. A metal layer is then patterned in the desired shape of the hinges and beams. Finally, the spacer layer is removed from under the beams by an isotropic plasma etch to form the air gap between the beams and address electrodes.
In many fabrication processes, it is desirable to perform the metal patterning at the wafer level. Then, a protective coating is placed over the entire wafer, the wafer is sawed into chips, and the protective coating is removed. Then, the plasma etch is performed to remove the spacer, such that undercutting of the metal pattern occurs to form air gaps. Thus, the spacer removal is at the chip level.
A problem with existing fabrication processes is that the patterning of the metal layer results in a contaminating layer on top of the spacer. This contaminating layer is a mixture of materials that is not easily etched.
FIG. 1 illustrates a chip 10 having this contaminating layer 11 over the spacer layer 12. Chip 10 is one of many chips whose various layers have been fabricated in wafer form, with the wafer then being sawed into the chips. Before sawing, a protective coating 18 was deposited over the entire wafer. FIG. 1 also shows the address circuitry 13, mirror beam 14, hinge 15, support post 16 formed in prior fabrication steps, as well as an oxide layer 17 used for metal patterning, which has not yet been removed. When the time comes for removal of the spacer layer 12, the contaminating layer 11 interferes with this removal. Incomplete removal results in "webbing" between the mirror beams 14 and limits their performance.
Previous efforts to remove the contaminating layer 11 have been performed "as needed". Thus, because spacer layer 12 is not removed until after the wafer is cut into chips, removal of the contaminating layer 11 is also performed at the chip level. However, this is unnecessarily time consuming. A need exists for a fabrication method that avoids the need for a chip level cleanup of contaminants left by metal patterning.
One aspect of the invention is a method for patterning metal from a metal layer deposited over a photoresist layer of a semiconductor wafer. The relevant steps begin with depositing a metal layer over a photoresist layer on the semiconductor wafer. Portions of the metal layer are etched away to form a desired metal pattern. Byproducts of the metal etching step are removed with an anhydrous hydrofluoric vapor etch of the surface of said wafer. This vapor etch is performed in an etching chamber and is the result of a reaction of water vapor and hydrofluoric acid gas. The vapor etch is followed by a rinse of the surface of the wafer with water.
A technical advantage of the invention is that the contaminants resulting from metal etching are removed in one step at the wafer level, rather than on a chip-by-chip basis. No pre-undercut clean-up is needed at the chip level. Complete undercutting of a spacer layer under a metal pattern may be accomplished without affecting the metal pattern.
When the method of the invention is used to make specific devices, such as DMDs, the manufacturing process is shortened and the operation of the devices themselves is improved.
FIG. 1 illustrates a semiconductor chip having a contaminating layer over a spacer layer, resulting from an etch of a metal layer.
FIGS. 2A-2F illustrate a process of fabricating a metal pattern on a wafer that eliminates the contaminating layer of FIG. 1 at the wafer level.
FIGS. 2A-2F illustrate a process of fabricating a metal pattern on a wafer 20, which eliminates contaminating layer 11 at the wafer level. Wafer 20 will eventually be cut into chips to make DMDs. Only a cross sectional view of a single pixel element is shown. An actual wafer 20 would have thousands of such pixel elements.
The various layer-by-layer process steps relevant to patterning a metal layer 21 over a spacer layer 12 are shown. DMDs are an example of an integrated circuit device fabricated by patterning a metal pattern over a spacer layer, with the latter being subsequently removed to form air gaps under the metal elements.
The method of the invention would be useful for any other type of product, made in wafer form with integrated circuit fabrication techniques, in which a metal layer is to be patterned. However, the invention is especially useful for products, such as DMDs, where the contaminating layer 11 interferes with subsequent process steps. In the case of DMDs, contaminating layer 11 interferes with undercutting of a spacer layer 11 under a metal pattern.
In FIG. 2A, a spacer layer 12 has been placed over the address circuit 13 of the wafer 20. In the example of this description, spacer layer 12 is made from photoresist material, but could be any etchable substance. Spacer layer 12 has been etched to create vias, over which a metal layer 21 is conformally deposited everywhere. Then, an oxide layer 22 is conformally deposited everywhere over metal layer 21. As explained below, metal layer 21 will become beam 14 and support post 16. Oxide layer 17 is for etching purposes and will eventually be removed. It is assumed that previous patterning steps have already formed hinge 15.
The DMD illustrated in FIG. 2A is a cantilever beam DMD with a support post 16. The process described herein could be applied to other types of DMDs, such as those that only partially undercut spacer layer 12 to leave portions of spacer layer 12 as support posts.
In FIG. 2B, a photoresist layer has been deposited and patterned over oxide layer 22 to form a photoresist mask 24. This mask 24 will protect oxide layer 22 from being etched away during the next step, which is an etching step. Mask 24 corresponds to areas in which it is desired for metal layer 21 to remain after etching, resulting in beams 14. Photoresist mask 24 is formed by using conventional photoresist patterning and exposure techniques.
FIG. 2C illustrates a beam oxide mask 17, which corresponds to areas in which beams 14 will be formed. The beam oxide mask 17 is what remains after those areas of oxide layer 22 not protected by photoresist mask 24 have been etched away. After this oxide etch, photoresist mask 24 is removed using conventional techniques.
FIG. 2D illustrates wafer 20 after etching of metal layer 21 to form beam 14. Oxide mask 17 protects those areas of metal layer 21 that are not to be etched away. The etch is a plasma etch, and removes unprotected portions of metal layer 21 down to the surface of spacer layer 12. As a result of the metal etch, a contaminating layer 11 remains on the surface of photoresist layer 12.
FIG. 2E illustrates the removal of contaminating layer 11 by means of a hydrofluoric (HF) acid vapor cleanup in accordance with the invention. Essentially, the clean-up process combines a dry anhydrous HF etch with a wet rinse. In a two-phase clean-up process, contaminating layer 11 is removed by the HF etching, which results in water soluble by-products that are removed during the wet rinse.
The process for removing contaminating layer 11 is performed while wafer 20 is placed in a chamber. The basic steps of the clean-up process are:
0) Introducing a high purge nitrogen into the chamber to remove atmospheric gases and to reduce the background water levels.
1) Reducing the nitrogen flow to a selected flow rate, such that it serves as a carrier gas for the reactants. The pressure may be stabilized at a slight positive pressure to promote uniform gas distribution.
2) Adding water-laden nitrogen at a predetermined flow rate to allow a thin layer of water to condense on the surface of wafer 20. This is essentially a water vapor "pretreatment".
3) Adding anhydrous HF at a predetermined flow rate. The nitrogen flow rates for the carrier gas and the water vapor are also adjusted to a predetermined level. This results in etching of the surface of wafer 20, using nitrogen, water vapor, and HF gas constituents. The result is an HF vapor, which etches the surface of wafer 20. The etch is continued for a predetermined period of time. During this etch, contaminating layer 11 is removed.
4) Rinsing with a high flow nitrogen purge to remove the etch reactants.
5) Rinsing with deionized rinse water to remove etch byproducts.
6) Discontinue water rinse and allowing water on wafer 20 to be removed before ramping up to dry spin speed.
7) Spin drying the wafer with nitrogen to prevent oxide regrowth.
The temperature and pressure conditions for the above steps are ambient, except as noted.
The above clean-up processing may be performed with commercially available vapor phase etching equipment. An example of such equipment is the Excalibur equipment, manufactured by FSI International. That equipment and its operation are described in U.S. Pat. No. 4,749,440, entitled "Gaseous Process and Apparatus for Removing Films from Substrates", incorporated by reference herein. In a vapor phase etcher, wafers are etched in a sealed etch chamber and then transported to a rinse chamber. A specific example of a vapor clean/wet rinse "recipe", which could be used with the Excalibur equipment is set out in the table below. The step numbers of the table correspond to the numbers of the steps discussed above. Reactants are measured in liters per minute (lpm) and cubic centimeters per minute (ccm). The wafer 20 is rotated on a platform within the chamber at speeds measured in revolutions per minute (rpm).
______________________________________Step Time N2 A Vapor HF N2 B H2 O V# (Sec) (1 pm) (1 pm) (sccm) (1 pm) (0/1) (rpm)______________________________________0 5 30.0 1.0 0 201 5 12.0 1.0 0 202 10 12.0 2.0 1.0 0 203 10 16.0 10.0 180 1.0 0 204 15 22.0 2.0 1.0 0 205 10 6.0 1.0 1 10006 1 6.0 1.0 0 10007 15 30.0 1.0 0 3000______________________________________
In the above table, the entries under N2 A are the primary nitrogen flow. The entries under N2 B are a low range "backside" flow, specific to the type of vapor phase equipment.
An advantage of the vapor clean-up is that it is selective, i.e., it removes only contaminating layer 11 without attacking beam 14 or spacer layer 12. Spacer layer 12 remains intact during the sawing phases until it is desired to be removed at the chip level.
FIG. 2F illustrates wafer 20, after contaminating layer 11 has been removed. The next steps will be application of a protective coating and sawing into chips. As compared to FIG. 1, as a result of the process described herein, contaminating layer 11 of prior art methods will not be present at the chip level.
An experimental test has indicated that, for a particular wafer sample, contaminating layer 11 includes an oxygen concentration of 12.9% in the form of silicon dioxide, organic material, a fluoro-polymer (H4 C5 O3 F6), and aluminum oxide. The concentrations of aluminum oxide and silicon dioxide were 6.1% and 1.6%, respectively. This analysis of the nature of the contaminants in layer 11 suggests the specific cause of the "webbing" during removal of spacer layer 12. After the vapor clean-up, the concentration of these oxygen-bearing elements was reduced to 8.1%. Concentrations of silicon dioxide and aluminum oxide were reduced to nominal amounts.
Although the invention has been described with reference to specific embodiments, this description is not meant to be construed in a limiting sense. Various modifications of the disclosed embodiments, as well as alternative embodiments, will be apparent to persons skilled in the art. It is, therefore, contemplated that the appended claims will cover all modifications that fall within the true scope of the invention.
|Cited Patent||Filing date||Publication date||Applicant||Title|
|US4445966 *||20 Jun 1983||1 May 1984||Honeywell Inc.||Method of plasma etching of films containing chromium|
|US4595433 *||15 Feb 1985||17 Jun 1986||Gerrard Industries Limited||Apparatus for heat sealing thermoplastics straps|
|US4690728 *||23 Oct 1986||1 Sep 1987||Intel Corporation||Pattern delineation of vertical load resistor|
|US4749440 *||12 May 1987||7 Jun 1988||Fsi Corporation||Gaseous process and apparatus for removing films from substrates|
|US4857481 *||14 Mar 1989||15 Aug 1989||Motorola, Inc.||Method of fabricating airbridge metal interconnects|
|US4897154 *||3 Jul 1986||30 Jan 1990||International Business Machines Corporation||Post dry-etch cleaning method for restoring wafer properties|
|US4923828 *||7 Aug 1989||8 May 1990||Eastman Kodak Company||Gaseous cleaning method for silicon devices|
|US5167761 *||23 Sep 1991||1 Dec 1992||Asm International N.V.||Method for halide etching in the presence of water of semi-conductor substrates|
|US5352327 *||10 Jul 1992||4 Oct 1994||Harris Corporation||Reduced temperature suppression of volatilization of photoexcited halogen reaction products from surface of silicon wafer|
|Citing Patent||Filing date||Publication date||Applicant||Title|
|US5646768 *||7 Jun 1995||8 Jul 1997||Texas Instruments Incorporated||Support posts for micro-mechanical devices|
|US5808797||26 Apr 1996||15 Sep 1998||Silicon Light Machines||Method and apparatus for modulating a light beam|
|US5841579||7 Jun 1995||24 Nov 1998||Silicon Light Machines||Flat diffraction grating light valve|
|US5982553||20 Mar 1997||9 Nov 1999||Silicon Light Machines||Display device incorporating one-dimensional grating light-valve array|
|US6088102||31 Oct 1997||11 Jul 2000||Silicon Light Machines||Display apparatus including grating light-valve array and interferometric optical system|
|US6101036||23 Jun 1998||8 Aug 2000||Silicon Light Machines||Embossed diffraction grating alone and in combination with changeable image display|
|US6130770||23 Jun 1998||10 Oct 2000||Silicon Light Machines||Electron gun activated grating light valve|
|US6215579||24 Jun 1998||10 Apr 2001||Silicon Light Machines||Method and apparatus for modulating an incident light beam for forming a two-dimensional image|
|US6271808||5 Jun 1998||7 Aug 2001||Silicon Light Machines||Stereo head mounted display using a single display device|
|US6377233 *||30 Jul 2001||23 Apr 2002||International Business Machines Corporation||Micromechanical display and fabrication method|
|US6399552||1 Dec 1999||4 Jun 2002||Samsung Electronics Co., Ltd.||Aqueous cleaning solution for removing contaminants surface of circuit substrate cleaning method using the same|
|US6465346 *||28 Feb 2001||15 Oct 2002||Samsung Electronics Co., Ltd.||Conducting line of semiconductor device and manufacturing method thereof using aluminum oxide layer as hard mask|
|US6707591||15 Aug 2001||16 Mar 2004||Silicon Light Machines||Angled illumination for a single order light modulator based projection system|
|US6712480||27 Sep 2002||30 Mar 2004||Silicon Light Machines||Controlled curvature of stressed micro-structures|
|US6714337||28 Jun 2002||30 Mar 2004||Silicon Light Machines||Method and device for modulating a light beam and having an improved gamma response|
|US6728023||28 May 2002||27 Apr 2004||Silicon Light Machines||Optical device arrays with optimized image resolution|
|US6747781||2 Jul 2001||8 Jun 2004||Silicon Light Machines, Inc.||Method, apparatus, and diffuser for reducing laser speckle|
|US6764875||24 May 2001||20 Jul 2004||Silicon Light Machines||Method of and apparatus for sealing an hermetic lid to a semiconductor die|
|US6767751||28 May 2002||27 Jul 2004||Silicon Light Machines, Inc.||Integrated driver process flow|
|US6782205||15 Jan 2002||24 Aug 2004||Silicon Light Machines||Method and apparatus for dynamic equalization in wavelength division multiplexing|
|US6800238||15 Jan 2002||5 Oct 2004||Silicon Light Machines, Inc.||Method for domain patterning in low coercive field ferroelectrics|
|US6801354||20 Aug 2002||5 Oct 2004||Silicon Light Machines, Inc.||2-D diffraction grating for substantially eliminating polarization dependent losses|
|US6806997||28 Feb 2003||19 Oct 2004||Silicon Light Machines, Inc.||Patterned diffractive light modulator ribbon for PDL reduction|
|US6813059||28 Jun 2002||2 Nov 2004||Silicon Light Machines, Inc.||Reduced formation of asperities in contact micro-structures|
|US6822797||31 May 2002||23 Nov 2004||Silicon Light Machines, Inc.||Light modulator structure for producing high-contrast operation using zero-order light|
|US6829077||28 Feb 2003||7 Dec 2004||Silicon Light Machines, Inc.||Diffractive light modulator with dynamically rotatable diffraction plane|
|US6829092||15 Aug 2001||7 Dec 2004||Silicon Light Machines, Inc.||Blazed grating light valve|
|US6829258||26 Jun 2002||7 Dec 2004||Silicon Light Machines, Inc.||Rapidly tunable external cavity laser|
|US7153443 *||18 Mar 2004||26 Dec 2006||Texas Instruments Incorporated||Microelectromechanical structure and a method for making the same|
|US7262900||10 May 2005||28 Aug 2007||Texas Instruments Incorporated||Utilizing a protective plug to maintain the integrity of the FTP shrink hinge|
|US7871931 *||20 Sep 2005||18 Jan 2011||Texas Instruments Incorporated||Method for chemical mechanical planarization of a metal layer located over a photoresist layer and a method for manufacturing a micro pixel array using the same|
|US9410915||14 Jul 2014||9 Aug 2016||Roche Operations Ltd.||System and method for quality assurance of a biosensor test strip|
|US20060255424 *||10 May 2005||16 Nov 2006||Dicarlo Anthony||Utilizing a protective plug to maintain the integrity of the FTP shrink hinge|
|US20060266730 *||18 Mar 2004||30 Nov 2006||Jonathan Doan||Microelectromechanical structure and a method for making the same|
|US20070066063 *||20 Sep 2005||22 Mar 2007||Texas Instruments Inc.||Method for chemical mechanical planarization of a metal layer located over a photoresist layer and a method for manufacturing a micro pixel array using the same|
|U.S. Classification||216/2, 257/E21.3, 216/24, 438/704, 216/57, 216/14, 438/669|
|International Classification||H01L21/304, H01L21/302, H01L21/3065, H01L21/321, G02B26/08|
|Cooperative Classification||G02B26/0841, H01L21/321|
|European Classification||G02B26/08M4E, H01L21/321|
|24 Sep 1999||FPAY||Fee payment|
Year of fee payment: 4
|26 Sep 2003||FPAY||Fee payment|
Year of fee payment: 8
|14 Sep 2007||FPAY||Fee payment|
Year of fee payment: 12