US20110141545A1 - Tri wavelength interference modulator and a method for modulation - Google Patents
Tri wavelength interference modulator and a method for modulation Download PDFInfo
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- US20110141545A1 US20110141545A1 US12/965,009 US96500910A US2011141545A1 US 20110141545 A1 US20110141545 A1 US 20110141545A1 US 96500910 A US96500910 A US 96500910A US 2011141545 A1 US2011141545 A1 US 2011141545A1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
Definitions
- the present invention relates to a tri wavelength interference modulator (TWIM) and a method of tri wavelength interference modulation, which belongs to the technology field of optical modulation device.
- TWIM tri wavelength interference modulator
- Optional modulators are solid state micro devices, which are widely used for microdisplay projection and other optical signal processing systems.
- Optional modulators can control or modulate an incident beam of light in a defined spatial pattern.
- the defined spatial pattern is correlated to a series of electrical inputs of image to the devices, through which the incident light beam can be modulated in intensity, phase, polarization or direction.
- MEMS microelectromechanical system
- DMD Digital Micromirror Device
- GLV Grating Light Valve
- the DMD has been recognized with certain shortcomings, such as high power consumption per pixel, particularly for high resolution microdisplay projection applications in cellphone and handheld devices.
- the GLV array devices based in fine reflective metal grids are also recognized with significant appeal in etendue, analog grey-scaling, optical efficiency, modulation speed and particularly, power consumption per pixel.
- the wavelength dependency under a digitalized control algorithm and incident angle sensitivity due to diffraction are evident on the GLV devices disclosed in the prior art.
- digitalized spatial modulation is desired for modulating illumination of wide incident angle over visible spectrum and in particular, in association with time sequential or spatial mosaic pattern color management schemes.
- the present invention provides a tri wavelength interference modulator and method of tri wavelength interference modulation, so that the modulating process is suitable to a projection system.
- One aspect of the present invention provides a tri wavelength interference modulator, including:
- a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection electrically connected onto the stationary substrate;
- a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection electrically connected onto the stationary substrate;
- the stationary substrate further comprises a driving circuitry built inside the stationary substrate, the driving circuitry is adapted to provide electrical charge to the bottom electrode, the first electrode plate and the second electrode plate respectively, so as to remain a relax distance, a pull-close distance and a pull-apart distance between the first suspended beam and the second suspended beam respectively within different time durations;
- the pull-close distance is adapted to make illumination of a first wavelength in incident illumination passing through the second electrode plate form selectively destructive interference
- the relax distance is adapted to make illumination of a second wavelength in incident illumination form selectively destructive interference
- the pull-apart distance is adapted to make illumination of a third wavelength in incident illumination form selectively destructive interference.
- Another aspect of the present invention provides a method of tri wavelength interference modulation, including:
- the inference modulator and the method for inference modulation in the present invention described above achieve the pulse width modulation (PWM) to the incident illumination by using selectively destructive inference, which benefits the integration of digitalized control algorithm and modulated composite wave, and achieves effective modulation for illumination of wide incident angle. Therefore, the inference modulator and the method for inference modulation are suitable to projection system.
- PWM pulse width modulation
- FIG. 1 a is a cross sectional view of a tri wavelength interference modulator in one embodiment of the present invention, illustrating a first suspended beam remains a relax distance 22 to a second suspended beam.
- FIG. 1 b is a cross sectional view of a tri wavelength interference modulator in one embodiment of the present invention, illustrating a first suspended beam remains a pull-apart distance 23 to a second suspended beam.
- FIG. 1 c is a cross sectional view of a tri wavelength interference modulator in one embodiment of the present invention, illustrating a first suspended beam remains a pull-close distance 21 to a second suspended beam.
- FIG. 2 a is a schematic diagram showing a method of tri wavelength interference modulation in one embodiment of the present invention, illustrating the distribution of illustration intensity before modulating incident illumination 10 .
- FIG. 2 b is a schematic diagram showing a method of tri wavelength interference modulation in one embodiment of the present invention, illustrating the relations of the distance between a first suspended beam and a second suspended beam in the modulating process and the illumination intensity.
- the tri wavelength interference modulator (TWIM) in this embodiment comprises a stationary substrate 200 , a first electrode plate 110 and a second electrode plate 120 .
- a bottom electrode plate 210 is formed on a top of the stationary substrate 200 ;
- the first electrode plate 110 comprises a first suspended beam suspended in parallel to and above the stationary substrate 200 and a first connection electrically connected onto the stationary substrate 200 ;
- the second electrode plate 120 comprises a second suspended beam suspended in parallel above the stationary substrate 200 and a second connection electrically connected onto the stationary substrate 200 .
- the second electrode 120 can transmit incident illustration 10 .
- the stationary substrate 200 further comprises a driving circuitry 220 , the driving circuitry 220 is built inside the stationary substrate 200 and provides electrical charge individually to the bottom electrode 210 , the first electrode plate 110 and the second electrode plate 120 , so as to keep a relax distance 22 , a pull-close distance 21 , and a pull-apart distance 23 between the first suspended beam and the second suspended beam respectively within different time durations.
- the driving circuitry 220 is built inside the stationary substrate 200 and provides electrical charge individually to the bottom electrode 210 , the first electrode plate 110 and the second electrode plate 120 , so as to keep a relax distance 22 , a pull-close distance 21 , and a pull-apart distance 23 between the first suspended beam and the second suspended beam respectively within different time durations.
- the first suspended beam of the first electrode plate 110 remains a relax distance 22 to the second suspended beam of the second electrode plate 120 .
- the relax distance 22 between the first suspended beam and the second suspended beam can also be kept when the electrostatic forces caused by electrical charge on the bottom electrode plate 210 , the first electrode plate 110 and the second electrode plate 120 remains equilibrium.
- a first spacing limiter 131 is configured on a bottom of the first electrode plate 110 protruding toward the bottom electrode plate 210 , or on a top of the bottom electrode plate 210 protruding toward the first electrode plate 110 .
- the first suspended beam of the first electrode plate 110 keeps the pull-apart distance 23 from the second suspended beam of the second electrode plate 120 by the spacing limitation of the first spacing limiter 131 .
- the first spacing limiter 131 is mounted on a bottom of the first electrode plate 110 or is integrated with the first electrode plate 110 , or is configured directly on a top of the bottom electrode plate 210 .
- a second spacing limiter 132 is configured on a bottom of the second electrode plate 120 or a top of the first electrode plate 110 .
- the first suspended beam of the first electrode plate 110 keeps the pull-close distance 21 from the second suspended beam of the second electrode plate 120 by the spacing limitation of the second spacing limiter 132 .
- the second spacing limiter 132 is mounted on a bottom of the second electrode plate 120 or is integrated with the second electrode plate 120 , or is configured directly on a top of the first electrode plate 110 .
- the first suspended beam of the first electrode plate 110 keeps a relax distance 22 , a pull-close distance 21 , or a pull-apart distance 23 from the second suspended beam of the second electrode plate 120 respectively within different time durations.
- the pull-close distance 21 is used for making illumination of a first wavelength 91 in incident illumination 10 passing through the second electrode plate 120 form selectively destructive interference
- the relax distance 22 is used for making illumination of a second wavelength 92 in incident illumination 10 form selectively destructive interference
- the pull-apart distance 23 is used for making illumination of a third wavelength 93 in incident illumination 10 form selectively destructive interference.
- the first wavelength 91 preferably corresponds to a chosen blue wavelength from 450 to 495 nm
- the second wavelength 92 preferably corresponds to a chosen green wavelength from 495 to 570 nm
- the third wavelength preferably corresponds to a chosen red wavelength from 620 to 750 nm
- the second electrode plate 120 further comprises a band-pass filter 127 , the band-pass filter 127 transmits the incident illumination 10 and makes illumination passing through the second electrode plate 120 merely comprise illumination of the first wavelength 91 , illumination of the second wavelength 92 and illumination of the third wavelength 93 .
- the bottom electrode plate 210 is made from any or combination of silver, aluminum, copper, titanium, platinum, gold, nickel and cobalt, or other metal material.
- the first suspended beam further comprises a first dielectric layer 116 and a first reflecting layer 115 formed on a top of the first dielectric layer 116 , the first reflecting layer 115 is used for reflecting illumination that does not form selectively destructive interference and transmitting the illumination out of the second electrode plate 120 .
- the first dielectric layer 16 and the first reflecting layer 115 can form a composite plate.
- the first dielectric layer 116 is made from any one or combination of silicon oxide, nitride and carbide
- the first reflecting layer 115 is made from any or combination of silver, aluminum, copper, titanium, platinum, gold, nickel and cobalt.
- the second suspended beam of the second electrode plate 120 further comprises a thin conductive layer 125 and a second dielectric layer 126 .
- the second dielectric layer 126 is made from any one or combination of silicon oxide, nitride and carbide
- the thin conductive layer 125 is made from any or combination of silver, aluminum, copper, titanium, platinum, gold, nickel and cobalt.
- a method of tri wavelength interference modulation in some embodiments of the present invention will be introduced in the following description.
- the incident illumination 10 in the present embodiment consists of illumination of the first wavelength 91 lasting for a first duration 11 , illumination of the second wavelength 92 lasting for a second duration 12 , and illumination of the third wavelength 93 lasting for a third duration 13 .
- the illumination of the first wavelength 91 , the illumination of the second wavelength 92 , and the illumination of the third wavelength 93 can have different illumination intensity.
- the method comprises the following steps:
- Step 111 dividing the first duration 11 into a first off duration 11 f and a first on duration 11 n;
- Step 112 driving the first electrode plate 110 and the second electrode plate 120 by a driving circuitry 220 of the tri wavelength inference modulator 100 to form a relative movement, and remain a pull-close distance 21 between a first suspended beam of the first electrode plate 110 and a second suspended beam of the second electrode plate 120 during the first off duration 11 f so that the illumination of the first wavelength 91 forms selectively destructive inference, but not remain the pull-close distance 21 between the first suspended beam and the second suspended beam so that the illumination of the first wavelength 91 forms reflection during the first on duration 11 n.
- the illumination of the first wavelength 91 is reflected by the first reflecting layer 115 of a top of the first electrode plate 110 and transmits out of the second electrode plate 120 .
- Step 121 dividing the second duration 12 into a second off duration 12 f and a second on duration 12 n;
- Step 122 driving the first electrode plate 110 and the second electrode plate 120 by the driving circuitry 220 of the tri wavelength inference modulator 100 to form a relative movement, and remain a relax distance 22 between the first suspended beam and the second suspended beam during the second off duration 12 f so that the illumination of the second wavelength 92 forms selectively destructive inference, but not remain the relax distance 22 between the first suspended beam and the second suspended beam so that the illumination of the second wavelength 92 forms reflection during the second on duration 12 n.
- the illumination of the second wavelength 92 is reflected by the first reflecting layer 115 of a top of the first electrode plate 110 and transmits out of the second electrode plate 120 .
- Step 131 dividing the third duration 13 into a third off duration 13 f and a third on duration 13 n;
- Step 132 driving the first electrode plate 110 and the second electrode plate 120 by the driving circuitry 220 of the tri wavelength inference modulator 100 to form a relative movement, and remain a pull-apart distance 23 between the first suspended beam and the second suspended beam during the second off duration 13 f so that the illumination of the third wavelength 93 forms selectively destructive inference, but not remain the pull-apart distance 23 between the first suspended beam and the second suspended beam so that the illumination of the third wavelength 93 forms reflection during the third on duration 13 n.
- the illumination of the third wavelength 93 is reflected by the first reflecting layer 115 of a top of the first electrode plate 110 and transmits out of the second electrode plate 120 .
- the inference modulator and the method for inference modulation in the embodiments of the present invention described above achieve the pulse width modulation (PWM) to the incident illumination 10 by using selectively destructive inference, which benefits the integration of digitalized control algorithm and modulated composite wave, and achieves effective modulation for illumination of wide incident angle. Therefore, the inference modulator and the method for inference modulation are suitable to projection system.
- PWM pulse width modulation
Abstract
Description
- This application claims priority of provisional application No. 61/285,497, filed on Dec. 10, 2009, entitled “TRI WAVELENGTH INTERFERENCE MODULATOR AND METHOD OF OPERATING THE SAME”, which is incorporated herein by reference in its entirety.
- The present invention relates to a tri wavelength interference modulator (TWIM) and a method of tri wavelength interference modulation, which belongs to the technology field of optical modulation device.
- Optional modulators are solid state micro devices, which are widely used for microdisplay projection and other optical signal processing systems. Optional modulators can control or modulate an incident beam of light in a defined spatial pattern. The defined spatial pattern is correlated to a series of electrical inputs of image to the devices, through which the incident light beam can be modulated in intensity, phase, polarization or direction.
- Two of the most commonly used classes of optical and particularly, spatial light modulators employ microelectromechanical system (MEMS) devices in a two dimensional array configured to provide two-dimensional modulation of incident light: Digital Micromirror Device (DMD) from Texas Instruments and the Grating Light Valve (GLV) device from Silicon Light Machines.
- The appeal of the DMD has been evidenced in the widespread adoption, given its high optical efficiency, large etendue, wide bandwidth, high modulation speed and digitalized control algorithm for time sequential color combination and management. Despite its success in projection display applications, however, the DMD has been recognized with certain shortcomings, such as high power consumption per pixel, particularly for high resolution microdisplay projection applications in cellphone and handheld devices.
- The GLV array devices based in fine reflective metal grids are also recognized with significant appeal in etendue, analog grey-scaling, optical efficiency, modulation speed and particularly, power consumption per pixel. However, the wavelength dependency under a digitalized control algorithm and incident angle sensitivity due to diffraction are evident on the GLV devices disclosed in the prior art. Particularly for microdisplay projection applications, digitalized spatial modulation is desired for modulating illumination of wide incident angle over visible spectrum and in particular, in association with time sequential or spatial mosaic pattern color management schemes.
- The present invention provides a tri wavelength interference modulator and method of tri wavelength interference modulation, so that the modulating process is suitable to a projection system.
- One aspect of the present invention provides a tri wavelength interference modulator, including:
- a stationary substrate with a bottom electrode plate formed on top of the stationary substrate;
- a first electrode plate comprising a first suspended beam suspended in parallel above the stationary substrate and a first connection electrically connected onto the stationary substrate; and
- a second electrode plate comprising a second suspended beam suspended in parallel above the first electrode plate and a second connection electrically connected onto the stationary substrate;
- wherein the stationary substrate further comprises a driving circuitry built inside the stationary substrate, the driving circuitry is adapted to provide electrical charge to the bottom electrode, the first electrode plate and the second electrode plate respectively, so as to remain a relax distance, a pull-close distance and a pull-apart distance between the first suspended beam and the second suspended beam respectively within different time durations;
- the pull-close distance is adapted to make illumination of a first wavelength in incident illumination passing through the second electrode plate form selectively destructive interference, the relax distance is adapted to make illumination of a second wavelength in incident illumination form selectively destructive interference, and the pull-apart distance is adapted to make illumination of a third wavelength in incident illumination form selectively destructive interference.
- Another aspect of the present invention provides a method of tri wavelength interference modulation, including:
- dividing the first duration into a first off duration and a first on duration;
- driving the first electrode plate and the second electrode plate by the driving circuitry of the tri wavelength inference modulator to form a relative movement, and remain a relax distance between the first suspended beam and the second suspended beam during the second off duration so that the illumination of the second wavelength forms selectively destructive inference, but not remain the relax distance between the first suspended beam and the second suspended beam so that the illumination of the second wavelength forms reflection during reflection during the first on duration;
- dividing the second duration into a second off duration and a second on duration;
- driving the first electrode plate and the second electrode plate by the driving circuitry of the tri wavelength inference modulator to form a relative movement, and remain a relax distance between the first suspended beam and the second suspended beam during the second off duration so that the illumination of the second wavelength forms selectively destructive inference, but not remain the relax distance between the first suspended beam and the second suspended beam so that the illumination of the second wavelength forms reflection during the second on duration;
- dividing the third duration into a third off duration and a third on duration;
- driving the first electrode plate and the second electrode plate by the driving circuitry of the tri wavelength inference modulator to form a relative movement, and remain a pull-apart distance between the first suspended beam and the second suspended beam during the second off duration so that the illumination of the third wavelength forms selectively destructive inference, but not remain the pull-apart distance between the first suspended beam and the second suspended beam so that the illumination of the third wavelength forms reflection during the third on duration.
- The inference modulator and the method for inference modulation in the present invention described above achieve the pulse width modulation (PWM) to the incident illumination by using selectively destructive inference, which benefits the integration of digitalized control algorithm and modulated composite wave, and achieves effective modulation for illumination of wide incident angle. Therefore, the inference modulator and the method for inference modulation are suitable to projection system.
- The drawings are not necessarily to scale, emphasis instead being placed upon illustrating the framework and principles of the disclosed invention.
-
FIG. 1 a is a cross sectional view of a tri wavelength interference modulator in one embodiment of the present invention, illustrating a first suspended beam remains arelax distance 22 to a second suspended beam. -
FIG. 1 b is a cross sectional view of a tri wavelength interference modulator in one embodiment of the present invention, illustrating a first suspended beam remains a pull-apart distance 23 to a second suspended beam. -
FIG. 1 c is a cross sectional view of a tri wavelength interference modulator in one embodiment of the present invention, illustrating a first suspended beam remains a pull-close distance 21 to a second suspended beam. -
FIG. 2 a is a schematic diagram showing a method of tri wavelength interference modulation in one embodiment of the present invention, illustrating the distribution of illustration intensity before modulatingincident illumination 10. -
FIG. 2 b is a schematic diagram showing a method of tri wavelength interference modulation in one embodiment of the present invention, illustrating the relations of the distance between a first suspended beam and a second suspended beam in the modulating process and the illumination intensity. - In order to make the objects, technical solutions and merits of the present invention clearer, a further detailed description of embodiments of the present invention is given by reference to accompanying drawings. Furthermore, for purposes of clarity, part of the extended detail of those novel devices, that are widely known and are not relevant to the present invention, have been omitted from the following description.
- As shown in
FIGS. 1 a-1 c, the tri wavelength interference modulator (TWIM) in this embodiment comprises astationary substrate 200, afirst electrode plate 110 and asecond electrode plate 120. - A
bottom electrode plate 210 is formed on a top of thestationary substrate 200; thefirst electrode plate 110 comprises a first suspended beam suspended in parallel to and above thestationary substrate 200 and a first connection electrically connected onto thestationary substrate 200; thesecond electrode plate 120 comprises a second suspended beam suspended in parallel above thestationary substrate 200 and a second connection electrically connected onto thestationary substrate 200. Thesecond electrode 120 can transmitincident illustration 10. Thestationary substrate 200 further comprises adriving circuitry 220, thedriving circuitry 220 is built inside thestationary substrate 200 and provides electrical charge individually to thebottom electrode 210, thefirst electrode plate 110 and thesecond electrode plate 120, so as to keep arelax distance 22, a pull-close distance 21, and a pull-apart distance 23 between the first suspended beam and the second suspended beam respectively within different time durations. - Specifically, as is shown in
FIG. 1 a, when electrical charge provided by thedriving circuitry 220 is zero, the first suspended beam of thefirst electrode plate 110 remains arelax distance 22 to the second suspended beam of thesecond electrode plate 120. In addition, optionally, therelax distance 22 between the first suspended beam and the second suspended beam can also be kept when the electrostatic forces caused by electrical charge on thebottom electrode plate 210, thefirst electrode plate 110 and thesecond electrode plate 120 remains equilibrium. - As is shown in
FIG. 1 b, when thedriving circuitry 220 provides opposite electrical charge to thefirst electrode plate 110 and thebottom electrode plate 210, thefirst electrode plate 110 moves to thebottom electrode plate 210 along adeparting direction 51. Afirst spacing limiter 131 is configured on a bottom of thefirst electrode plate 110 protruding toward thebottom electrode plate 210, or on a top of thebottom electrode plate 210 protruding toward thefirst electrode plate 110. When thefirst electrode plate 110 moves to thebottom electrode plate 210, the first suspended beam of thefirst electrode plate 110 keeps the pull-apart distance 23 from the second suspended beam of thesecond electrode plate 120 by the spacing limitation of thefirst spacing limiter 131. - Optionally, the
first spacing limiter 131 is mounted on a bottom of thefirst electrode plate 110 or is integrated with thefirst electrode plate 110, or is configured directly on a top of thebottom electrode plate 210. - As is shown in
FIG. 1 c, when thedriving circuitry 220 provides opposite electrical charge to thefirst electrode plate 110 and thebottom electrode plate 210, the first electrode moves to thesecond electrode plate 120 along aclosing direction 52. Asecond spacing limiter 132 is configured on a bottom of thesecond electrode plate 120 or a top of thefirst electrode plate 110. When thefirst electrode plate 110 moves to thesecond electrode plate 120, the first suspended beam of thefirst electrode plate 110 keeps the pull-close distance 21 from the second suspended beam of thesecond electrode plate 120 by the spacing limitation of thesecond spacing limiter 132. - Optionally, the
second spacing limiter 132 is mounted on a bottom of thesecond electrode plate 120 or is integrated with thesecond electrode plate 120, or is configured directly on a top of thefirst electrode plate 110. - For achieving desired grey-scale control in a binary mode of pulse width modulation (PWM), the first suspended beam of the
first electrode plate 110 keeps arelax distance 22, a pull-close distance 21, or a pull-apart distance 23 from the second suspended beam of thesecond electrode plate 120 respectively within different time durations. The pull-close distance 21 is used for making illumination of afirst wavelength 91 inincident illumination 10 passing through thesecond electrode plate 120 form selectively destructive interference, therelax distance 22 is used for making illumination of asecond wavelength 92 inincident illumination 10 form selectively destructive interference, and the pull-apart distance 23 is used for making illumination of athird wavelength 93 inincident illumination 10 form selectively destructive interference. - On the visible spectrum, the
first wavelength 91 preferably corresponds to a chosen blue wavelength from 450 to 495 nm, thesecond wavelength 92 preferably corresponds to a chosen green wavelength from 495 to 570 nm, and the third wavelength preferably corresponds to a chosen red wavelength from 620 to 750 nm - Specifically, the
second electrode plate 120 further comprises a band-pass filter 127, the band-pass filter 127 transmits theincident illumination 10 and makes illumination passing through thesecond electrode plate 120 merely comprise illumination of thefirst wavelength 91, illumination of thesecond wavelength 92 and illumination of thethird wavelength 93. - Optionally, the
bottom electrode plate 210 is made from any or combination of silver, aluminum, copper, titanium, platinum, gold, nickel and cobalt, or other metal material. - Optionally, the first suspended beam further comprises a first
dielectric layer 116 and a first reflectinglayer 115 formed on a top of the firstdielectric layer 116, the first reflectinglayer 115 is used for reflecting illumination that does not form selectively destructive interference and transmitting the illumination out of thesecond electrode plate 120. The first dielectric layer 16 and the first reflectinglayer 115 can form a composite plate. The firstdielectric layer 116 is made from any one or combination of silicon oxide, nitride and carbide, the first reflectinglayer 115 is made from any or combination of silver, aluminum, copper, titanium, platinum, gold, nickel and cobalt. - Optionally, the second suspended beam of the
second electrode plate 120 further comprises a thinconductive layer 125 and a seconddielectric layer 126. The seconddielectric layer 126 is made from any one or combination of silicon oxide, nitride and carbide, the thinconductive layer 125 is made from any or combination of silver, aluminum, copper, titanium, platinum, gold, nickel and cobalt. - A method of tri wavelength interference modulation in some embodiments of the present invention will be introduced in the following description.
- As is shown in
FIG. 2 a, theincident illumination 10 in the present embodiment consists of illumination of thefirst wavelength 91 lasting for afirst duration 11, illumination of thesecond wavelength 92 lasting for asecond duration 12, and illumination of thethird wavelength 93 lasting for athird duration 13. As is shown inFIG. 2 a, the illumination of thefirst wavelength 91, the illumination of thesecond wavelength 92, and the illumination of thethird wavelength 93 can have different illumination intensity. - As is shown in
FIG. 2 b, the method comprises the following steps: - Step 111, dividing the
first duration 11 into afirst off duration 11 f and a first onduration 11 n; - Step 112, driving the
first electrode plate 110 and thesecond electrode plate 120 by a drivingcircuitry 220 of the tri wavelength inference modulator 100 to form a relative movement, and remain a pull-close distance 21 between a first suspended beam of thefirst electrode plate 110 and a second suspended beam of thesecond electrode plate 120 during thefirst off duration 11 f so that the illumination of thefirst wavelength 91 forms selectively destructive inference, but not remain the pull-close distance 21 between the first suspended beam and the second suspended beam so that the illumination of thefirst wavelength 91 forms reflection during the first onduration 11 n. - Specifically, the illumination of the
first wavelength 91 is reflected by the first reflectinglayer 115 of a top of thefirst electrode plate 110 and transmits out of thesecond electrode plate 120. - Step 121, dividing the
second duration 12 into asecond off duration 12 f and a second onduration 12 n; - Step 122, driving the
first electrode plate 110 and thesecond electrode plate 120 by the drivingcircuitry 220 of the tri wavelength inference modulator 100 to form a relative movement, and remain arelax distance 22 between the first suspended beam and the second suspended beam during thesecond off duration 12 f so that the illumination of thesecond wavelength 92 forms selectively destructive inference, but not remain therelax distance 22 between the first suspended beam and the second suspended beam so that the illumination of thesecond wavelength 92 forms reflection during the second onduration 12 n. - Specifically, the illumination of the
second wavelength 92 is reflected by the first reflectinglayer 115 of a top of thefirst electrode plate 110 and transmits out of thesecond electrode plate 120. -
Step 131, dividing thethird duration 13 into athird off duration 13 f and a third onduration 13 n; -
Step 132, driving thefirst electrode plate 110 and thesecond electrode plate 120 by the drivingcircuitry 220 of the tri wavelength inference modulator 100 to form a relative movement, and remain a pull-apartdistance 23 between the first suspended beam and the second suspended beam during thesecond off duration 13 f so that the illumination of thethird wavelength 93 forms selectively destructive inference, but not remain the pull-apartdistance 23 between the first suspended beam and the second suspended beam so that the illumination of thethird wavelength 93 forms reflection during the third onduration 13 n. - Specifically, the illumination of the
third wavelength 93 is reflected by the first reflectinglayer 115 of a top of thefirst electrode plate 110 and transmits out of thesecond electrode plate 120. - The inference modulator and the method for inference modulation in the embodiments of the present invention described above achieve the pulse width modulation (PWM) to the
incident illumination 10 by using selectively destructive inference, which benefits the integration of digitalized control algorithm and modulated composite wave, and achieves effective modulation for illumination of wide incident angle. Therefore, the inference modulator and the method for inference modulation are suitable to projection system. - The present disclosure should not be considered limited to the particular examples described above, but rather should be understood to cover all aspects of the invention as fairly set out in the attached claims. Various modifications, equivalent processes, as well as numerous structures to which the present disclosure may be applicable will be readily apparent to those of skill in the art to which the present disclosure is directed upon review of the instant specification.
Claims (14)
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JP2015505986A (en) * | 2011-11-29 | 2015-02-26 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | Interferometric modulator using a double absorption layer. |
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US8498039B2 (en) | 2009-12-10 | 2013-07-30 | Shanghai Lexvu Opto Microelectronics Technology Co., Ltd. | Tri wavelength interference modulator and a method for modulation |
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US8498039B2 (en) | 2013-07-30 |
CN102096265B (en) | 2012-12-12 |
CN102096265A (en) | 2011-06-15 |
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