US20100173480A1 - Laser annealing apparatus and semiconductor device manufacturing method - Google Patents
Laser annealing apparatus and semiconductor device manufacturing method Download PDFInfo
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- US20100173480A1 US20100173480A1 US12/494,416 US49441609A US2010173480A1 US 20100173480 A1 US20100173480 A1 US 20100173480A1 US 49441609 A US49441609 A US 49441609A US 2010173480 A1 US2010173480 A1 US 2010173480A1
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
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- H01L21/02518—Deposited layers
- H01L21/02521—Materials
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02678—Beam shaping, e.g. using a mask
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02683—Continuous wave laser beam
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02686—Pulsed laser beam
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02691—Scanning of a beam
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/34—Methods of heating
Definitions
- the present invention relates to a laser annealer employing a laser beam.
- the present invention also relates to a semiconductor device manufacturing method for manufacturing a semiconductor device through steps including a step using a laser annealing method.
- the semiconductor device means herein one of a general device which can function by employing semiconductor characteristic and which involve an electro-optic device such as a liquid crystal display and a light emitting device, and an electronic device which has the electro-optic device incorporated therein as a component.
- laser crystallization the means for crystallizing a semiconductor film by using a laser beam and obtaining a crystalline semiconductor film.
- the glass substrate is cheap in price and excellent in workability as compared to the conventionally often used synthetic quartz glass substrate, having a merit to easily prepare a large-area substrate. This is the reason of the studies noted above.
- the laser is used, by preference, in crystallization because the glass substrate is low in melting point.
- the laser can deliver high energy only to the semiconductor film without substantially increasing in substrate temperature. Furthermore, throughput is by far high as compared to the heating means using an electric furnace.
- Crystalline semiconductor films are formed from many crystal grains, and therefore they are also referred to as polycrystalline semiconductor films. Because the crystalline semiconductor film formed through laser anneal has high mobility, thin film transistors (TFTs) can be formed using the crystalline semiconductor film. They are broadly utilized, e.g. in a monolithic liquid-crystal electrooptical device having pixel-driving and drive-circuit TFTs formed on one glass substrate.
- TFTs thin film transistors
- the high-output pulse laser light of an excimer laser or the like, is formed through an optical system into a square spot in several-centimeter square or a linear form having a length of 10 centimeters or longer on an irradiation plane in order to scan the laser light (or moving a laser-light irradiation position relatively to the irradiated plane), because of high producibility and industrial superiority.
- to form the laser light to linear shape means that the laser light is formed to linear shape at the irradiated plane. It means that the cross-sectional shape of laser light forms linear shape.
- the “linear shape” referred herein is not strictly means for “line” but means for the rectangular which aspect is large or oval shape. For example, the aspect ratio is 10 or more. (Preferably 100-10000).
- the use of a linear beam can realize laser irradiation over the entire irradiation surface by scanning only in the direction perpendicular to a lengthwise direction of the linear beam, differently from the case using the laser light in a spot form requiring scanning, providing high production efficiency.
- the scanning in a direction perpendicular to the lengthwise direction is carried out because the direction of scanning is the highest in efficiency. Due to the high production efficiency, the use of a linear beam formed of pulse-oscillated excimer laser light through a proper optical system in the current laser anneal process is in the mainstream of the technology to manufacture liquid crystal display devices using TFTs.
- KrF wavelength: 248 nm
- XeCl wavelength: 308 nm
- KrF wavelength: 248 nm
- XeCl wavelength: 308 nm
- KrF krypton
- XeCl xenon
- attachments such as a laser tube for laser oscillation and a gas purifier for removing unnecessary compounds generated during oscillation are required to be replaced once in two or three years. Most of these attachments are expensive, which again disadvantageously pushes up manufacturing cost.
- a laser irradiation device employing an excimer laser beam exhibits high performance.
- the laser irradiation device of this type takes much labor for maintenance and the running cost (which means herein cost entailed by the operation of the device) thereof is disadvantageously high if used as a mass-production laser irradiation device.
- a laser beam is irradiated to a semiconductor film.
- a laser beam (wavelength: 532 nm) which is modulated to a second harmonic by a nonlinear optical element is processed into a linear beam, which has a linear shape on an irradiation surface, by an optical system.
- the semiconductor film is an amorphous silicon film which has a thickness of 55 nm and which is formed on a substrate (“1737 substrate” manufactured by Corning Inc.) by a plasma CVD method.
- a concentric pattern is formed on a crystalline silicon film obtained by executing steps including a step using a laser annealing method to the amorphous silicon film.
- This pattern indicates that the material property of the crystalline silicon film in the plane is not uniform. Due to this, if a TFT is manufactured using a crystalline semiconductor on which a concentric pattern is formed, the pattern adversely influences the electrical characteristic of the TFT.
- a pattern of concentric circles is described as concentric pattern.
- the area of mother glass increases.
- demand for irradiating a laser beam to a semiconductor layer provided on the mother glass serving as a substrate at high rate rises for the laser annealing method.
- an object of the present invention to provide a laser annealing method for a laser irradiation device which requires low running cost, capable of preventing the generation of a concentric pattern or decreasing the formation thereof and to provide a semiconductor device manufacturing method including a step using the laser annealing method.
- a cause for generating the concentric pattern will be considered.
- a laser beam irradiated to an amorphous silicon film is a linear beam which has a linear shape on an irradiation surface. Due to this, even if some pattern is formed on a crystalline silicon film which is obtained after the irradiation of the laser beam, the pattern should be parallel or vertical to the linear beam as long as a semiconductor film, a substrate and a substrate stage are completely flat. However, an observed pattern is a concentric pattern. From this, it is considered that the generation of the concentric pattern is not derived from the linear beam. Namely, it can be estimated that the thickness of the semiconductor film, the laser beam absorption coefficient of the semiconductor film, the substrate or the substrate stage, or a combination thereof causes the generation of the concentric pattern.
- the laser beam absorption coefficient of the semiconductor film among the causes for generating the concentric pattern will be considered.
- the reflectance and transmittance of the amorphous silicon film (thickness: 55 nm) relative to wavelength are obtained and the results are shown in FIGS. 10A and 10B , respectively. It is noted that the amorphous silicon film is formed on the 1737 substrate by the plasma CVD method.
- FIGS. 10A and 10B show that the reflectance and transmittance of the amorphous silicon film for the second harmonic (wavelength: 532 nm) of the YAG laser are 26% and 38%, respectively. It is considered that reflected light from the surface of the amorphous silicon film interferes with the laser beam transmitted by the amorphous silicon film on a certain surface. It can be estimated that this causes the concentric pattern.
- a plurality of laser beams are condensed, the condensed laser beams are irradiated to the semiconductor film on the surface of the substrate and the semiconductor film is thereby crystallized.
- a laser annealer is a laser annealer comprising: a laser light source outputting a laser beam; and a moving mechanism for moving a substrate irradiated with the laser beam aslant, and characterized in that the moving mechanism has a function of reciprocating by a distance equal to or larger than a length of one edge of the substrate, and of moving in a direction perpendicular to the reciprocating direction by a distance equal to or smaller than a length of the laser beam in a Y axis direction in a region in which the laser beam is irradiated to the substrate,
- the laser annealer it is possible to prevent or decrease the generation of a concentric pattern, which has been disadvantageously generated by the irradiation of a laser beam and to improve the reliability of a resultant semiconductor device. It is also possible to uniformly irradiate a laser beam to even a semiconductor film on a large-sized substrate.
- a laser annealer is a laser annealer comprising: a laser light source outputting a laser beam; a nonlinear optical element modulating the laser beam; a waveguide condensing the modulated laser beam; and a moving mechanism for moving a substrate irradiated with the condensed laser beam aslant, and characterized in that the moving mechanism has a function of reciprocating by a distance equal to or larger than a length of one edge of the substrate, and of moving in a direction perpendicular to the reciprocating direction by a distance equal to or smaller than a length of the laser beam in a Y axis direction in a region in which the laser beam is irradiated to the substrate.
- the laser annealer according to the present invention it is possible to prevent or decrease the generation of a concentric pattern, which has been disadvantageously generated by the irradiation of a laser beam and to improve the reliability of a resultant semiconductor device. It is also possible to uniformly irradiate a laser beam to even a semiconductor film on a large-sized substrate.
- a semiconductor device manufacturing method is a semiconductor device manufacturing method comprising the steps of: forming a semiconductor film on a substrate; and irradiating a plurality of laser beams to the semiconductor film, and characterized in that a step of irradiating the laser beams aslant to the semiconductor film while moving the substrate at a constant rate, and a step of moving the substrate in a direction perpendicular to the moving direction by a distance equal to or smaller than a width of the laser beams are continuously repeated.
- the laser annealer according to the present invention it is possible to prevent or decrease the generation of a concentric pattern, which has been disadvantageously generated by the irradiation of a laser beam and to improve the reliability of a resultant semiconductor device. It is also possible to uniformly irradiate a laser beam to even a semiconductor film on a large-sized substrate.
- a semiconductor device manufacturing method is a semiconductor device manufacturing method comprising the steps of: forming a semiconductor film on a substrate; and irradiating a plurality of laser beams to the semiconductor film, and characterized in that a step of modulating the plurality of laser beams by a plurality of nonlinear optical elements, respectively, a step of causing the modulated laser beams to pass through a waveguide and thereby condensing the modulated laser beams, and a step of irradiating the condensed laser beams aslant to the semiconductor film while moving the substrate at a constant rate, and moving the substrate in a direction perpendicular to the moving direction by a distance equal to or smaller than the laser beam, are continuously repeated.
- the laser annealer according to the present invention it is possible to prevent or decrease the generation of a concentric pattern, which has been disadvantageously generated by the irradiation of a laser beam and to improve the reliability of a resultant semiconductor device. It is also possible to uniformly irradiate a laser beam to even a semiconductor film on a large-sized substrate.
- a semiconductor device manufacturing method is a semiconductor device manufacturing method characterized in that the constant rate falls within a range of 20 to 200 cm/s. As a result, it is possible to irradiate a laser beam to a semiconductor layer provided on a large-sized substrate at high rate.
- the laser beams employed in the present invention may be processed into elliptic shape by an optical system.
- a semiconductor device manufacturing method is a semiconductor device manufacturing method characterized in that the laser beam is incident on the semiconductor film at an aslant angle of 5 to 10° with respect to a normal line direction of a front surface of the substrate or a normal line direction of a rear surface of the substrate.
- This method has been contrived from the fact that if a step using a laser annealing method is executed while inclining the substrate, no concentric pattern appears, and characterized by irradiating a laser beam to the substrate with an angle with respect to the substrate.
- it is possible to remove or decrease the irregularity of the material property of a crystalline semiconductor film caused by the interference of the laser beam. If a TFT is manufactured using such a crystalline semiconductor film, the electrical characteristic of the TFT is improved.
- semiconductor device manufacturing method is a semiconductor device manufacturing method characterized in that crystallization of the semiconductor substrate is progressed in a direction parallel to the substrate and closer to an end face of the substrate.
- the laser beam may be irradiated to the semiconductor film from a rear surface side of the substrate (an opposite side of the surface where semiconductor film is formed).
- an ordinary known laser such as a YAG laser (which normally indicates an Nd: YAG laser), an Nd: YLF laser, an Nd: YVO 4 laser, an Nd: YAlO 3 laser, a ruby laser, a Ti: sapphire laser or a glass laser can be employed.
- the YAG laser which is excellent in coherency and pulse energy is particularly preferable.
- the YAG laser is employed, for example, it is preferable to use a second harmonic (wavelength: 532 nm). This is because the wavelength of the fundamental harmonic of the YAG laser (first harmonic) is as long as 1064 nm.
- the first harmonic can be modulated to the second, third or fourth harmonic by a wavelength modulator which includes a nonlinear element.
- the respective harmonics can be formed according to a well-known technique. In this specification, it is assumed that “a laser beam from a solid-state laser” includes not only the first harmonic but also harmonics the wavelength of which is modulated halfway.
- Q switch method Q modulation switch method
- This method is to suddenly increase the Q factor of a laser resonator from a state of a sufficiently low Q factor to thereby output a quite steep pulse laser beam with quite high energy level.
- the solid-state laser employed in the present invention can basically output a laser beam if a resonant mirror or a light source for exciting solid-state crystal is provided. Due to this, compared with the excimer laser, it does not take much labor for maintenance. That is, since the solid-state laser is far lower in running cost than the excimer laser, it is possible to greatly reduce semiconductor device manufacturing cost. In addition, if the frequency of the maintenance decreases, the operatively of a mass-production line improves and the overall throughput of the manufacturing process improves, which also greatly contributes to the reduction of the semiconductor device manufacturing cost. Besides, the area occupied by the solid-state laser is smaller than that of the excimer laser, it is advantageously effective for the design of a manufacturing line.
- the power of the laser beam is not lower than 10 W, uniform laser annealing can be performed even with a single laser beam.
- the laser beam having a power of not lower than 10 W suffices to melt the semiconductor layer in the crystallization of the semiconductor layer.
- FIG. 1 is a view which shows an example of laser beam irradiation
- FIG. 2 is a view which shows an example of a laser annealer
- FIG. 3 is a view which shows the example of the laser annealer
- FIG. 4 is an explanatory view for the X and Y directions of a processing target substrate
- FIG. 5 is a graph showing the relationship between processing target substrate moving time and rate
- FIG. 6 is a view which shows an example of a laser annealer according to the present invention.
- FIGS. 7A to 7D show semiconductor device manufacturing steps
- FIG. 8 is a view which shows a semiconductor device according to the present invention.
- FIG. 9A is a schematic diagram of a TFT of a pixel section
- FIG. 9B is a schematic diagram of a TFT of a driving circuit
- FIG. 10A is a graph showing the reflectance of an amorphous silicon film (thickness: 55 nm) relative to wavelength
- FIG. 10B is a graph showing the transmittance of the amorphous silicon film (thickness of 55 nm) relative to wavelength
- FIG. 11 is a view which shows an example of a laser annealer
- FIG. 12 is a view which shows an example of a laser annealer.
- FIGS. 13A to 13C are views which show an example of a laser annealer.
- a laser beam irradiation method in one embodiment of the present invention will first be described with reference to FIG. 1 .
- a crystalline silicon layer is formed. This crystallization is conducted in a laser annealing chamber 602 in which a transparent window 601 is provided.
- a light transmitting substrate made of barium or aluminum borosilicate glass as borosilicate glass represented by #7059 glass or #1737 glass manufactured by Corning Inc. is employed as a substrate.
- a quartz substrate or a silicon substrate may be employed as the substrate.
- a glass substrate of a size of 680 mm ⁇ 880 mm and a thickness of 1.1 mm is employed.
- a substrate on which a foundation film and a semiconductor film are formed in this order is referred to as “processing target substrate”.
- a stand 603 Inside of the laser annealing chamber 602 , a stand 603 , a stage 604 provided on the stand 603 , and a moving mechanism 605 for moving the stand 603 are disposed. Outside of the laser annealing chamber 602 , an evacuation pump 630 , a gas supply tube 607 and a gate valve 608 are disposed.
- the stand 603 is provided so that the base 603 is moved in directions at right angle (X axis direction and Y axis direction) to the normal line direction of a processing target substrate 606 by the moving mechanism 605 for moving the stand 603 to thereby irradiate a laser beam to the upper surface of the processing target substrate 606 .
- a laser beam irradiation direction is aslant with respect to the normal line direction of the processing target substrate 606 by 5 to 10°.
- a semiconductor manufacturing device which includes the stage 604 and the moving mechanism 605 is referred to as a laser annealer.
- the base 603 may be provided between the stage 604 and the moving mechanism 605 .
- the laser annealer may include a laser oscillator 609 , an optical system 610 and a mirror 611 in addition to the above-stated constituent elements.
- An amorphous silicon layer is crystallized by a combination of the laser annealing chamber 602 in which the laser annealer and the transparent window 601 are disposed, the evacuation pump 630 , the gas supply tube 607 and the gate valve 608 .
- FIG. 2 shows the laser annealer of FIG. 1 from the Y axis direction.
- the moving mechanism 605 can move by a distance equal to or larger than the length of one edge of the processing target substrate 606 in the X axis direction and can move by a distance equal to or smaller than the width of a laser beam in the Y axis direction perpendicular to the X direction. It is to be noted that the width of the laser beam is a width of the laser beam in a direction perpendicular to a moving direction by the moving mechanism.
- a laser beam 600 is emitted from the laser oscillator 609 , processed to have an elliptic cross section by the optical system 610 , reflected by the mirror 611 , caused to pass through the transparent window 601 and irradiated to the processing target substrate 606 .
- the irradiation light beam may be a rectangular light beam.
- FIG. 4 is a view which shows the processing target substrate 606 from the normal line direction.
- the processing target substrate 606 is provided so that the end portion of the processing target substrate 606 is located at a position away from a laser beam irradiated position by 100 mm.
- the moving mechanism 605 is moved while being accelerated so as to move the processing target substrate 606 in a direction of an arrow ⁇ circle around ( 1 ) ⁇ .
- the laser beam 600 is irradiated to the processing target substrate 606 at a constant rate (20 cm/s in this embodiment). If the laser beam irradiated position is outside of the processing target substrate 606 , the moving rate is decelerated ( FIG. 5 ).
- the same step as that in the arrow ⁇ circle around ( 1 ) ⁇ direction is executed in a direction of an arrow ⁇ circle around ( 2 ) ⁇ which is opposite to the arrow ⁇ circle around ( 1 ) ⁇ direction, to thereby crystallize the substrate.
- the step in the arrow ⁇ circle around ( 1 ) ⁇ direction and that in the arrow ⁇ circle around ( 2 ) ⁇ direction may be repeated, respectively. If necessary, these steps may be repeatedly executed to irradiate the entire surface of the processing target substrate 606 with the laser beam.
- the semiconductor film in the processing target substrate 606 is crystallized in a direction which is parallel to the processing target substrate 606 and which is closer to the end face of the processing target substrate 606 .
- the rate of moving the processing target substrate 606 may be set at a constant rate which falls within a range of 20 to 200 cm/s.
- the processing target substrate 606 may be disposed on the stage 604 to keep the temperature of the processing target substrate 606 to be a predetermined temperature by a heater provided in the stand 603 . If the amorphous silicon layer is crystallized at a temperature of 450° C., the grain diameter of crystals increases.
- the laser oscillator 609 a laser oscillator which oscillates a CW laser beam as the laser beam 600 is employed.
- the atmosphere of the laser annealing chamber 602 may be controlled by the evacuation pump 630 which is provided as a pressure reduction and evacuation means.
- a gas supply tube 607 a which is connected to a hydrogen gas cylinder through a valve and a gas supply tube 607 b which is connected to a nitrogen or the other gas cylinder through a valve are provided as the gas supply tube 607 which serves as a gas supply means.
- the laser beam is irradiated at ordinary temperature at ordinary pressure.
- the laser beam is irradiated to the semiconductor film on the surface of the substrate while moving the substrate at a constant rate between 20 and 200 cm/s. Due to this, a uniform laser beam can be irradiated to even the semiconductor film on a large-sized substrate.
- power is set at 10 W.
- the power is set at not lower than 10 W, uniform laser annealing can be performed even with a single laser beam.
- the laser beam having a power of not lower than 10 W suffices to melt the semiconductor layer in the crystallization of the semiconductor layer.
- a laser beam is emitted from one laser oscillator.
- a plurality of laser beams may be condensed using a plurality of laser oscillators so as to increase beam intensity. By thus condensing the laser beams, it is possible to decrease the generation of the concentric pattern and to thereby improve the reliability of a resultant semiconductor device.
- a plurality of optical systems, a plurality of mirrors, a fiber and the like may be employed.
- the laser beam is processed to have an elliptic cross section in the step using the laser annealing method to thereby improve throughput.
- a solid-state laser easy to maintain, higher throughput than that by laser annealing employing a conventional excimer laser can be attained. Consequently, it is possible to decrease the manufacturing cost of a TFT and the semiconductor device such as a display formed out of the TFT.
- a laser oscillator 201 it is desirable to use a high-power laser (a YAG laser, a YVO 4 laser or the like). Of course, a gas laser, a glass laser or the like may also be used as long as it has high power.
- the laser light generated from the laser oscillator 201 is formed into a linear beam whose irradiation plane has a linear shape, by using the optical system.
- the optical system uses, for example, a long focal length cylindrical lens 205 for enlarging a laser beam into a long beam, and a cylindrical lens 206 for converging a laser beam into a thin beam.
- the long focal length cylindrical lenses By using such long focal length cylindrical lenses, it is possible to obtain a laser beam which is reduced in aberration and is uniform in energy distribution at or near the irradiation plane.
- the long focal length cylindrical lenses are effective in restraining a remarkable difference from occurring between the beam width of a beam incident on the semiconductor film and the beam width of a beam reflected from the back surface of the substrate.
- Experiments of the present inventor showed that when a cylindrical lens having a focal length of 500 mm or more was used, the influence of aberration was able to be drastically reduced.
- a reflecting mirror 207 is provided in front of the cylindrical lens 206 so that the traveling direction of the laser beam can be changed.
- the angle at which the laser beam is made incident on the irradiation plane can be adjusted to the desired angle ⁇ by the reflecting mirror 207 . If the angle of the cylindrical lens 206 is changed according to the angle of the reflecting mirror 207 , a laser beam having far higher symmetry can be formed on the irradiation plane.
- the irradiation is carried out with a scanning overlapping ration of 0 to 80% of the laser beam (laser beam in the Y-axis direction in the present Embodiment) during the scanning. It is to be noted that in case of a pulsed laser, the irradiation can be carried out with an overlapping ratio of 50 to 98% between the successively irradiated laser beams, and alternatively with no overlapping. Since optimum conditions differ according to the states of semiconductor films or the delay periods of laser beams, it is preferable that an operator appropriately determine the optimum conditions.
- a pulsed laser (Output 20 W, frequency 30 Hz, YAG) was used as the laser oscillator 201 .
- the pulsed laser beam was modulated to a second harmonic by a non-linear optical element 202 and was then formed into a linear beam of width 130 mm and length 0.4 mm by using the optical system, and the linear beam was irradiated onto the semiconductor film. At this time, the linear beam was irradiated with an angular deviation of 5 to 10 degrees from the direction perpendicular to the substrate 204 .
- Stand 208 is provided under a stage 203 , and moving mechanism 209 is provided under the stand 208 .
- a substrate 204 can be moved in the X axis direction and Y axis direction by moving mechanism 209 .
- a ball, a barrel, a motor and the like may be provided below the moving mechanism 209 .
- the semiconductor film in the processing target substrate 204 is crystallized in a direction which is parallel to the processing target substrate 204 and witch is closer to the end face of the processing target substrate 606 .
- This embodiment describes the method of crystalline for the laser anneal device.
- a glass substrate (Corning 1737 with a glass distortion temperature of 667° C.) was prepared as a substrate 1000 .
- a protective film 1001 is formed on the substrate 1000 , and a tantalum nitride film 1002 a (50 nm thick) and tantalum film 1002 a (250 nm thick) were formed successively in the form of a multilayer configuration on the protective film 1000 by sputtering. ( FIG. 7A )
- the gate electrode 1002 having a multi layer configuration formed by photolisography, which is conventional patterning method.
- the gate insulating film and the amorphous semiconductor film 1004 were formed successively in the form of a multilayer configuration without being exposed to the atmosphere ( FIG. 7C ).
- the silicon nitride film 1003 a 50 nm in thickness
- the silicon oxide film 1003 b 125 nm in thickness
- a two layer insulating film is employed as the gate insulating film, however, the gate insulating film may be of a single layer or of a multilayer configuration with three layers or more.
- an amorphous silicon film 1004 54 nm in thickness was formed on the gate insulating film as the amorphous semiconductor film 104 by means of the plasma CVD method. Furthermore, the formation in the form of a multilayer configuration was carried out successively without exposure to the atmosphere so that each interface of the layers does not have contaminants adhered thereto from the atmosphere.
- heating treatment was carried out (at a temperature of 500° C. for one hour) in order to reduce the concentration of hydrogen, which prevents the crystallization of the semiconductor film, in the amorphous silicon film.
- the amorphous semiconductor film 1004 was irradiated with infrared light or ultraviolet light (laser annealing) to be crystallized (laser crystallization) in order to form the crystalline semiconductor film 1005 (semiconductor film including crystals) ( FIG. 7D ).
- the amorphous semiconductor film 1004 is crystallized in a direction which is parallel to the substrate 1000 and which is closer to the end face of the substrate 1000 .
- the YVO 4 CW laser beam is shaped oval and irradiated on the semiconductor film at an aslant angle of 5 to 10° with a scanning overlapping ratio of 0 to 80° A) of the laser beam (laser beam in the Y-axis direction in the present embodiment) during the scanning.
- the semiconductor film may crystallize after passing through a melting state, or the semiconductor film to crystallize in a solid phase without being melted or in an intermittent state between the solid phase and liquid phase.
- This process allows the amorphous semiconductor film 1004 to crystallize and change into the crystalline semiconductor film 1005 .
- the crystalline semiconductor film is a poly-crystalline silicon film (poly-silicon film).
- Embodiment 1 and 2 The structure of the active matrix liquid crystal display device obtained by using Embodiment 1 and 2 will be described with reference to the top view of FIGS. 8 to 9 .
- the pixel portion 811 In the top view of active matrix display device shown in FIG. 8A , the pixel portion 811 , the driver circuit (general name of gate driving circuit 805 and source driving circuit 807 ), an external input terminal 803 to which an FPC (Flexible Printed Circuit) is bonded, a wiring 804 for connecting the external input terminal 803 with input sections of the respective circuits, and the like are formed on an active matrix substrate 801 .
- the active matrix substrate 801 and an opposing substrate 802 on which a color filter and the like are formed, are bonded with each other, sandwiching an end-sealing material 809 therebetween.
- a gate driving circuit has the function to input the signal to selected gate wiring 806 .
- the gate wiring 806 is the wiring that connects to gate electrode electrically. And the selected gate wirings are selected one by one. Of course, an insulating film is provided on the gate wiring.
- a source driving circuit has the function to receive the image data signal and apply the signal to the pixel electrode, which connected to the selected gate wiring.
- the source driving circuit 807 moves with matching the timing of gate driving circuit 805 . Then, an image of active matrix type display device can be obtained by selecting the switching element (not shown) of each gate wiring and by applying the desired voltage through source wiring 808 .
- a color filter formed on the surface of the pixel portion 811 facing the counter substrate is provided so that each of red (R), green (G) and blue (B) color filters corresponds to each pixel.
- color display is realized by color filters of three colors, i.e., a red color filter, a green color filter and a blue color filter. The arrangement of color filters of these three colors is arbitrary.
- the laser annealer in this embodiment is characterized by providing a plurality of laser oscillators, a plurality of optical systems and a plurality of mirrors, condensing laser beams oscillated by the laser oscillators and processed by the optical systems, respectively and irradiating the condensed light beams to a substrate.
- laser beams 1100 a to 1100 c are emitted from laser oscillators 1109 a to 1109 c , processed by optical systems 1110 a to 1110 c , and reflected by mirrors 1111 a to 1111 c , respectively.
- the reflected laser beams are condensed and irradiated to a processing target substrate 1113 which is mounted on a stage 1104 .
- the processing target substrate 1113 can be moved in the X axis direction and the Y-axis direction.
- a ball, a barrel, a motor and the like may be provided below the moving mechanism 1105 .
- the laser annealer in this embodiment is characterized by providing a plurality of laser oscillators, a plurality of nonlinear optical elements and a waveguide, emitting laser beams from the respective laser oscillators, modulating the laser beams by the respective nonlinear optical elements, condensing the modulated laser beams by the waveguide and irradiating the condensed laser beams to a substrate.
- laser beams are emitted from laser oscillators 100 a to 100 c , the laser beams 112 a to 112 c modulated by nonlinear optical elements 101 a to 101 c are incident on a fiber array 103 and condensed by a waveguide 104 .
- the laser beams emitted from a fiber array 105 are irradiated to a processing target substrate 113 on a stage 110 .
- the fiber array 103 is a means for making the laser beams 112 a to 112 c proximate to one another.
- a stand 106 is provided below a stage 110 and a moving mechanism 107 is provided below the stand 106 .
- the processing target substrate 113 can be moved in the X axis direction and the Y axis direction (not shown).
- a ball, a barrel, a motor and the like may be disposed below the moving mechanism 107 .
- a laser annealer different from those in the first to third embodiments will be described, while particularly referring to an example of a moving mechanism for moving a stage with reference to FIG. 13 .
- a stage on which a processing target to be irradiated with a laser beam is mounted is moved along a guide rail which is provided in either the X axis direction or the Y axis direction.
- a curved object referred to as ball (bearing) is put between the guide rail and a section (slider) which fixes the stage. Therefore, a mechanism which can decrease load caused by friction and can smoothly move the stage is realized.
- reference symbol 1300 denotes a guide rail on which irregularities are formed in one direction to move the stage in a fixed direction.
- Reference symbol 1301 denotes a section, referred to as a slider, which fixes the stage.
- the slider 1301 can be moved along the guide rail 1300 .
- a plurality of sliders may be provided to be fixed at predetermined intervals.
- a reference symbol 1302 denotes a rod which penetrates a hole formed in the slider 1301 and is provided in a direction along the guide rail 1300 .
- the rod 1302 is fixed to the guide rail 1300 by an end plate 1304 .
- FIG. 13B is an enlarged view of the slider 1301 .
- a magnetic field which attracts the slider 1301 and the guide rail 1300 to each other is generated by the power supply voltage.
- a magnetic field in a direction in which the slider 1301 is away from and out of contact with the rod 1302 in the hole provided in the slider 1301 is generated by the power supply voltage.
- the slider 1301 moves in a direction indicated by an arrow.
- a force acts on the slider 1301 and the guide rail 1300 so that the slider 1301 and the guide rail 1300 are attracted to each other by this magnetic field.
- the air fed to the slider 1300 is discharged to a region between the slider 1301 and the guide rail 1300 from an air hole 1305 . Since a force acts in a direction in which the slider 1301 is away from rod 1302 by the attracting force of the magnetic field and the discharge of the air, a fixed distance is maintained between the slider 1301 and the guide rail 1300 .
- one of the guide rail 1300 and the slider 1301 may be formed out of a magnetic member and the other one of the guide rail 1300 and the slider 1301 may be formed out of a material attracted by the magnetic member to thereby generate a magnetic field.
- the guide rail 1300 and the slider 1301 may be formed out of magnetic members, respectively.
- one of the rod 1302 and the slider 1301 may be formed out of a magnetic member and the other one of the rod 1302 and the slider 1301 may be formed out of a material which tends to be away from the magnetic member to thereby generate a magnetic field.
- the rod 1302 and the slider 1301 may be formed out of magnetic members, respectively.
- stage moving mechanism shown in this embodiment, it is possible to move the stage along the guide rail in a non-contact manner, to dispense with the regular replacement of the ball (bearing) and to thereby facilitate maintenance.
- abrasion hardly occurs and the stage can be moved more smoothly than a case where a ball is employed.
- FIG. 13C shows a state in which a processing target 1311 to be irradiated with a laser beam is mounted on a stage 1310 fixed onto the slider 1301 .
- the stage moving means enables the stage to be moved more smoothly, making it possible to irradiate the laser beam to the processing target 1311 more uniformly.
- the laser annealer according to the present invention As described so far, by employing the laser annealer according to the present invention, a plurality of laser beams are condensed to one laser flux to thereby prevent or decrease the generation of a concentric pattern, which has been disadvantageously generated by the irradiation of a laser flux and to make it possible to improve the reliability of a resultant semiconductor device. If the laser annealer according to the present invention is employed, it is possible to uniformly irradiate a laser beam or laser beams to even a semiconductor film on a large-sized substrate.
- the laser beam is processed to have an elliptic cross section in the step using the laser annealing method to thereby improve throughput.
- a solid-state laser maintenance of which is easy higher throughput than that by laser annealing employing a conventional excimer laser can be attained. Consequently, it is possible to decrease the manufacturing cost of a TFT and the semiconductor device such as a display formed out of the TFT.
Abstract
This invention is intended to provide a laser annealing method by employing a laser annealer lower in running cost so as to deal with a large-sized substrate, for preventing or decreasing the generation of a concentric pattern and to provide a semiconductor device manufacturing method including a step using the laser annealing method. While moving a substrate at a constant rate between 20 and 200 cm/s, a laser beam is radiated aslant to a semiconductor film on a surface of the semiconductor substrate. Therefore, it is possible to radiate a uniform laser beam to even a semiconductor film on a large-sized substrate and to thereby manufacture a semiconductor device for which the generation of a concentric pattern is prevented or decreased. By condensing a plurality of laser beams into one flux, it is possible to prevent or decrease the generation of a concentric pattern and to thereby improve the reliability of the semiconductor device.
Description
- 1. Field of the Invention
- The present invention relates to a laser annealer employing a laser beam. The present invention also relates to a semiconductor device manufacturing method for manufacturing a semiconductor device through steps including a step using a laser annealing method. The semiconductor device means herein one of a general device which can function by employing semiconductor characteristic and which involve an electro-optic device such as a liquid crystal display and a light emitting device, and an electronic device which has the electro-optic device incorporated therein as a component.
- In recent years, study has been broadly made on the art to carry out laser anneal on a semiconductor film formed over an insulating substrate of glass or the like in order for crystallization or improving crystallinity. Such semiconductor films often use silicon. In the present description, the means for crystallizing a semiconductor film by using a laser beam and obtaining a crystalline semiconductor film is referred to as laser crystallization.
- The glass substrate is cheap in price and excellent in workability as compared to the conventionally often used synthetic quartz glass substrate, having a merit to easily prepare a large-area substrate. This is the reason of the studies noted above. Meanwhile, the laser is used, by preference, in crystallization because the glass substrate is low in melting point. The laser can deliver high energy only to the semiconductor film without substantially increasing in substrate temperature. Furthermore, throughput is by far high as compared to the heating means using an electric furnace.
- Crystalline semiconductor films are formed from many crystal grains, and therefore they are also referred to as polycrystalline semiconductor films. Because the crystalline semiconductor film formed through laser anneal has high mobility, thin film transistors (TFTs) can be formed using the crystalline semiconductor film. They are broadly utilized, e.g. in a monolithic liquid-crystal electrooptical device having pixel-driving and drive-circuit TFTs formed on one glass substrate.
- Meanwhile, there is preferential use of a method for laser anneal that the high-output pulse laser light, of an excimer laser or the like, is formed through an optical system into a square spot in several-centimeter square or a linear form having a length of 10 centimeters or longer on an irradiation plane in order to scan the laser light (or moving a laser-light irradiation position relatively to the irradiated plane), because of high producibility and industrial superiority. By the way, to form the laser light to linear shape means that the laser light is formed to linear shape at the irradiated plane. It means that the cross-sectional shape of laser light forms linear shape. Further, the “linear shape” referred herein is not strictly means for “line” but means for the rectangular which aspect is large or oval shape. For example, the aspect ratio is 10 or more. (Preferably 100-10000).
- Particularly, the use of a linear beam can realize laser irradiation over the entire irradiation surface by scanning only in the direction perpendicular to a lengthwise direction of the linear beam, differently from the case using the laser light in a spot form requiring scanning, providing high production efficiency. The scanning in a direction perpendicular to the lengthwise direction is carried out because the direction of scanning is the highest in efficiency. Due to the high production efficiency, the use of a linear beam formed of pulse-oscillated excimer laser light through a proper optical system in the current laser anneal process is in the mainstream of the technology to manufacture liquid crystal display devices using TFTs.
- 2. Related Art
- To form an excimer laser beam, KrF (wavelength: 248 nm) or XeCl (wavelength: 308 nm) is used as excitation gas. However, such gases as Kr (krypton) and Xe (xenon) are quite expensive. Due to this, if Kr or Xe is employed and gas exchange is conducted more frequently, manufacturing cost is disadvantageously pushed up.
- In addition, attachments such as a laser tube for laser oscillation and a gas purifier for removing unnecessary compounds generated during oscillation are required to be replaced once in two or three years. Most of these attachments are expensive, which again disadvantageously pushes up manufacturing cost.
- As described above, a laser irradiation device employing an excimer laser beam exhibits high performance. However, the laser irradiation device of this type takes much labor for maintenance and the running cost (which means herein cost entailed by the operation of the device) thereof is disadvantageously high if used as a mass-production laser irradiation device.
- Therefore, to realize a laser lower in running cost than the excimer laser and a laser annealing method employing the laser, there is proposed a method of using a solid-state laser (which outputs a laser beam with a crystal rod set as a resonant cavity).
- Using a YAG laser which is one of the typical solid-state lasers, a laser beam is irradiated to a semiconductor film. According to the YAG laser, a laser beam (wavelength: 532 nm) which is modulated to a second harmonic by a nonlinear optical element is processed into a linear beam, which has a linear shape on an irradiation surface, by an optical system. The semiconductor film is an amorphous silicon film which has a thickness of 55 nm and which is formed on a substrate (“1737 substrate” manufactured by Corning Inc.) by a plasma CVD method. However, on a crystalline silicon film obtained by executing steps including a step using a laser annealing method to the amorphous silicon film, a concentric pattern is formed. This pattern indicates that the material property of the crystalline silicon film in the plane is not uniform. Due to this, if a TFT is manufactured using a crystalline semiconductor on which a concentric pattern is formed, the pattern adversely influences the electrical characteristic of the TFT. Here, a pattern of concentric circles is described as concentric pattern.
- Further, as the screen of the electro-optic device is made large in size, the area of mother glass increases. Following this, demand for irradiating a laser beam to a semiconductor layer provided on the mother glass serving as a substrate at high rate rises for the laser annealing method.
- In addition, demand for compensating for the poor power of a laser beam which is employed to temporarily melt a semiconductor layer in the crystallization of the semiconductor layer rises for the laser annealing method.
- It is, therefore, an object of the present invention to provide a laser annealing method for a laser irradiation device which requires low running cost, capable of preventing the generation of a concentric pattern or decreasing the formation thereof and to provide a semiconductor device manufacturing method including a step using the laser annealing method.
- A cause for generating the concentric pattern will be considered. A laser beam irradiated to an amorphous silicon film is a linear beam which has a linear shape on an irradiation surface. Due to this, even if some pattern is formed on a crystalline silicon film which is obtained after the irradiation of the laser beam, the pattern should be parallel or vertical to the linear beam as long as a semiconductor film, a substrate and a substrate stage are completely flat. However, an observed pattern is a concentric pattern. From this, it is considered that the generation of the concentric pattern is not derived from the linear beam. Namely, it can be estimated that the thickness of the semiconductor film, the laser beam absorption coefficient of the semiconductor film, the substrate or the substrate stage, or a combination thereof causes the generation of the concentric pattern.
- The laser beam absorption coefficient of the semiconductor film among the causes for generating the concentric pattern will be considered. The reflectance and transmittance of the amorphous silicon film (thickness: 55 nm) relative to wavelength are obtained and the results are shown in
FIGS. 10A and 10B , respectively. It is noted that the amorphous silicon film is formed on the 1737 substrate by the plasma CVD method.FIGS. 10A and 10B show that the reflectance and transmittance of the amorphous silicon film for the second harmonic (wavelength: 532 nm) of the YAG laser are 26% and 38%, respectively. It is considered that reflected light from the surface of the amorphous silicon film interferes with the laser beam transmitted by the amorphous silicon film on a certain surface. It can be estimated that this causes the concentric pattern. - To prevent or decrease the generation of the concentric pattern, therefore, it is considered that it is necessary to prevent such interference. To prevent the interference, a plurality of laser beams are condensed, the condensed laser beams are irradiated to the semiconductor film on the surface of the substrate and the semiconductor film is thereby crystallized.
- Accordingly, a laser annealer according to the present invention is a laser annealer comprising: a laser light source outputting a laser beam; and a moving mechanism for moving a substrate irradiated with the laser beam aslant, and characterized in that the moving mechanism has a function of reciprocating by a distance equal to or larger than a length of one edge of the substrate, and of moving in a direction perpendicular to the reciprocating direction by a distance equal to or smaller than a length of the laser beam in a Y axis direction in a region in which the laser beam is irradiated to the substrate, As a result, by employing the laser annealer according to the present invention, it is possible to prevent or decrease the generation of a concentric pattern, which has been disadvantageously generated by the irradiation of a laser beam and to improve the reliability of a resultant semiconductor device. It is also possible to uniformly irradiate a laser beam to even a semiconductor film on a large-sized substrate.
- Further, a laser annealer according to the present invention is a laser annealer comprising: a laser light source outputting a laser beam; a nonlinear optical element modulating the laser beam; a waveguide condensing the modulated laser beam; and a moving mechanism for moving a substrate irradiated with the condensed laser beam aslant, and characterized in that the moving mechanism has a function of reciprocating by a distance equal to or larger than a length of one edge of the substrate, and of moving in a direction perpendicular to the reciprocating direction by a distance equal to or smaller than a length of the laser beam in a Y axis direction in a region in which the laser beam is irradiated to the substrate. As a result, by employing the laser annealer according to the present invention, it is possible to prevent or decrease the generation of a concentric pattern, which has been disadvantageously generated by the irradiation of a laser beam and to improve the reliability of a resultant semiconductor device. It is also possible to uniformly irradiate a laser beam to even a semiconductor film on a large-sized substrate.
- A semiconductor device manufacturing method according to the present invention is a semiconductor device manufacturing method comprising the steps of: forming a semiconductor film on a substrate; and irradiating a plurality of laser beams to the semiconductor film, and characterized in that a step of irradiating the laser beams aslant to the semiconductor film while moving the substrate at a constant rate, and a step of moving the substrate in a direction perpendicular to the moving direction by a distance equal to or smaller than a width of the laser beams are continuously repeated. As a result, by employing the laser annealer according to the present invention, it is possible to prevent or decrease the generation of a concentric pattern, which has been disadvantageously generated by the irradiation of a laser beam and to improve the reliability of a resultant semiconductor device. It is also possible to uniformly irradiate a laser beam to even a semiconductor film on a large-sized substrate.
- A semiconductor device manufacturing method according to the present invention is a semiconductor device manufacturing method comprising the steps of: forming a semiconductor film on a substrate; and irradiating a plurality of laser beams to the semiconductor film, and characterized in that a step of modulating the plurality of laser beams by a plurality of nonlinear optical elements, respectively, a step of causing the modulated laser beams to pass through a waveguide and thereby condensing the modulated laser beams, and a step of irradiating the condensed laser beams aslant to the semiconductor film while moving the substrate at a constant rate, and moving the substrate in a direction perpendicular to the moving direction by a distance equal to or smaller than the laser beam, are continuously repeated. As a result, by employing the laser annealer according to the present invention, it is possible to prevent or decrease the generation of a concentric pattern, which has been disadvantageously generated by the irradiation of a laser beam and to improve the reliability of a resultant semiconductor device. It is also possible to uniformly irradiate a laser beam to even a semiconductor film on a large-sized substrate.
- Further, a semiconductor device manufacturing method according to the present invention is a semiconductor device manufacturing method characterized in that the constant rate falls within a range of 20 to 200 cm/s. As a result, it is possible to irradiate a laser beam to a semiconductor layer provided on a large-sized substrate at high rate.
- In addition, the laser beams employed in the present invention may be processed into elliptic shape by an optical system.
- Furthermore, a semiconductor device manufacturing method according to the present invention is a semiconductor device manufacturing method characterized in that the laser beam is incident on the semiconductor film at an aslant angle of 5 to 10° with respect to a normal line direction of a front surface of the substrate or a normal line direction of a rear surface of the substrate. This method has been contrived from the fact that if a step using a laser annealing method is executed while inclining the substrate, no concentric pattern appears, and characterized by irradiating a laser beam to the substrate with an angle with respect to the substrate. By applying the present invention, it is possible to remove or decrease the irregularity of the material property of a crystalline semiconductor film caused by the interference of the laser beam. If a TFT is manufactured using such a crystalline semiconductor film, the electrical characteristic of the TFT is improved.
- Moreover, semiconductor device manufacturing method according to the present invention is a semiconductor device manufacturing method characterized in that crystallization of the semiconductor substrate is progressed in a direction parallel to the substrate and closer to an end face of the substrate. By employing the semiconductor device manufacturing method according to the present invention, it is possible to manufacture a semiconductor device in which the surface of a semiconductor layer is flat and which has high electrical mobility.
- Additionally, the laser beam may be irradiated to the semiconductor film from a rear surface side of the substrate (an opposite side of the surface where semiconductor film is formed).
- As for the laser beam, an ordinary known laser such as a YAG laser (which normally indicates an Nd: YAG laser), an Nd: YLF laser, an Nd: YVO4 laser, an Nd: YAlO3 laser, a ruby laser, a Ti: sapphire laser or a glass laser can be employed. The YAG laser which is excellent in coherency and pulse energy is particularly preferable.
- If the YAG laser is employed, for example, it is preferable to use a second harmonic (wavelength: 532 nm). This is because the wavelength of the fundamental harmonic of the YAG laser (first harmonic) is as long as 1064 nm. The first harmonic can be modulated to the second, third or fourth harmonic by a wavelength modulator which includes a nonlinear element. The respective harmonics can be formed according to a well-known technique. In this specification, it is assumed that “a laser beam from a solid-state laser” includes not only the first harmonic but also harmonics the wavelength of which is modulated halfway.
- It is also possible to employ a Q switch method (Q modulation switch method) which is well utilized for the YAG laser. This method is to suddenly increase the Q factor of a laser resonator from a state of a sufficiently low Q factor to thereby output a quite steep pulse laser beam with quite high energy level.
- The solid-state laser employed in the present invention can basically output a laser beam if a resonant mirror or a light source for exciting solid-state crystal is provided. Due to this, compared with the excimer laser, it does not take much labor for maintenance. That is, since the solid-state laser is far lower in running cost than the excimer laser, it is possible to greatly reduce semiconductor device manufacturing cost. In addition, if the frequency of the maintenance decreases, the operatively of a mass-production line improves and the overall throughput of the manufacturing process improves, which also greatly contributes to the reduction of the semiconductor device manufacturing cost. Besides, the area occupied by the solid-state laser is smaller than that of the excimer laser, it is advantageously effective for the design of a manufacturing line.
- If the power of the laser beam is not lower than 10 W, uniform laser annealing can be performed even with a single laser beam. The laser beam having a power of not lower than 10 W suffices to melt the semiconductor layer in the crystallization of the semiconductor layer.
-
FIG. 1 is a view which shows an example of laser beam irradiation; -
FIG. 2 is a view which shows an example of a laser annealer; -
FIG. 3 is a view which shows the example of the laser annealer; -
FIG. 4 is an explanatory view for the X and Y directions of a processing target substrate; -
FIG. 5 is a graph showing the relationship between processing target substrate moving time and rate; -
FIG. 6 is a view which shows an example of a laser annealer according to the present invention; -
FIGS. 7A to 7D show semiconductor device manufacturing steps; -
FIG. 8 is a view which shows a semiconductor device according to the present invention; -
FIG. 9A is a schematic diagram of a TFT of a pixel section, andFIG. 9B is a schematic diagram of a TFT of a driving circuit; -
FIG. 10A is a graph showing the reflectance of an amorphous silicon film (thickness: 55 nm) relative to wavelength, andFIG. 10B is a graph showing the transmittance of the amorphous silicon film (thickness of 55 nm) relative to wavelength; -
FIG. 11 is a view which shows an example of a laser annealer; -
FIG. 12 is a view which shows an example of a laser annealer; and -
FIGS. 13A to 13C are views which show an example of a laser annealer. - A laser beam irradiation method in one embodiment of the present invention will first be described with reference to
FIG. 1 . - Through a crystallization step by irradiating a laser beam to an amorphous silicon layer, a crystalline silicon layer is formed. This crystallization is conducted in a
laser annealing chamber 602 in which atransparent window 601 is provided. - First, a light transmitting substrate made of barium or aluminum borosilicate glass as borosilicate glass represented by #7059 glass or #1737 glass manufactured by Corning Inc. is employed as a substrate. Alternatively, a quartz substrate or a silicon substrate may be employed as the substrate. In this embodiment, a glass substrate of a size of 680 mm×880 mm and a thickness of 1.1 mm is employed. In this specification, a substrate on which a foundation film and a semiconductor film are formed in this order is referred to as “processing target substrate”.
- Inside of the
laser annealing chamber 602, astand 603, astage 604 provided on thestand 603, and a movingmechanism 605 for moving thestand 603 are disposed. Outside of thelaser annealing chamber 602, anevacuation pump 630, agas supply tube 607 and agate valve 608 are disposed. - The
stand 603 is provided so that thebase 603 is moved in directions at right angle (X axis direction and Y axis direction) to the normal line direction of aprocessing target substrate 606 by the movingmechanism 605 for moving thestand 603 to thereby irradiate a laser beam to the upper surface of theprocessing target substrate 606. A laser beam irradiation direction is aslant with respect to the normal line direction of theprocessing target substrate 606 by 5 to 10°. - In this specification, a semiconductor manufacturing device which includes the
stage 604 and the movingmechanism 605 is referred to as a laser annealer. The base 603 may be provided between thestage 604 and the movingmechanism 605. The laser annealer may include alaser oscillator 609, anoptical system 610 and amirror 611 in addition to the above-stated constituent elements. An amorphous silicon layer is crystallized by a combination of thelaser annealing chamber 602 in which the laser annealer and thetransparent window 601 are disposed, theevacuation pump 630, thegas supply tube 607 and thegate valve 608.FIG. 2 shows the laser annealer ofFIG. 1 from the Y axis direction.FIG. 3 shows the laser annealer viewed from a mirror side (upward of the processing target substrate 606). The movingmechanism 605 can move by a distance equal to or larger than the length of one edge of theprocessing target substrate 606 in the X axis direction and can move by a distance equal to or smaller than the width of a laser beam in the Y axis direction perpendicular to the X direction. It is to be noted that the width of the laser beam is a width of the laser beam in a direction perpendicular to a moving direction by the moving mechanism. - As shown in
FIG. 1 , alaser beam 600 is emitted from thelaser oscillator 609, processed to have an elliptic cross section by theoptical system 610, reflected by themirror 611, caused to pass through thetransparent window 601 and irradiated to theprocessing target substrate 606. The irradiation light beam may be a rectangular light beam. -
FIG. 4 is a view which shows theprocessing target substrate 606 from the normal line direction. Theprocessing target substrate 606 is provided so that the end portion of theprocessing target substrate 606 is located at a position away from a laser beam irradiated position by 100 mm. Next, the movingmechanism 605 is moved while being accelerated so as to move theprocessing target substrate 606 in a direction of an arrow {circle around (1)}. After 0.05 seconds, thelaser beam 600 is irradiated to theprocessing target substrate 606 at a constant rate (20 cm/s in this embodiment). If the laser beam irradiated position is outside of theprocessing target substrate 606, the moving rate is decelerated (FIG. 5 ). Next, the same step as that in the arrow {circle around (1)} direction is executed in a direction of an arrow {circle around (2)} which is opposite to the arrow {circle around (1)} direction, to thereby crystallize the substrate. To execute a step in a direction of an arrow {circle around (3)} and that in a direction of an arrow {circle around (4)}, the step in the arrow {circle around (1)} direction and that in the arrow {circle around (2)} direction may be repeated, respectively. If necessary, these steps may be repeatedly executed to irradiate the entire surface of theprocessing target substrate 606 with the laser beam. The semiconductor film in theprocessing target substrate 606 is crystallized in a direction which is parallel to theprocessing target substrate 606 and which is closer to the end face of theprocessing target substrate 606. - The rate of moving the
processing target substrate 606 may be set at a constant rate which falls within a range of 20 to 200 cm/s. - In the crystallization, the
processing target substrate 606 may be disposed on thestage 604 to keep the temperature of theprocessing target substrate 606 to be a predetermined temperature by a heater provided in thestand 603. If the amorphous silicon layer is crystallized at a temperature of 450° C., the grain diameter of crystals increases. - As the
laser oscillator 609, a laser oscillator which oscillates a CW laser beam as thelaser beam 600 is employed. - The atmosphere of the
laser annealing chamber 602 may be controlled by theevacuation pump 630 which is provided as a pressure reduction and evacuation means. Agas supply tube 607 a which is connected to a hydrogen gas cylinder through a valve and agas supply tube 607 b which is connected to a nitrogen or the other gas cylinder through a valve are provided as thegas supply tube 607 which serves as a gas supply means. In this embodiment, the laser beam is irradiated at ordinary temperature at ordinary pressure. - In this embodiment, the laser beam is irradiated to the semiconductor film on the surface of the substrate while moving the substrate at a constant rate between 20 and 200 cm/s. Due to this, a uniform laser beam can be irradiated to even the semiconductor film on a large-sized substrate.
- In this embodiment, power is set at 10 W. However, if the power is set at not lower than 10 W, uniform laser annealing can be performed even with a single laser beam. The laser beam having a power of not lower than 10 W suffices to melt the semiconductor layer in the crystallization of the semiconductor layer.
- In this embodiment, a laser beam is emitted from one laser oscillator. Alternatively, a plurality of laser beams may be condensed using a plurality of laser oscillators so as to increase beam intensity. By thus condensing the laser beams, it is possible to decrease the generation of the concentric pattern and to thereby improve the reliability of a resultant semiconductor device. If necessary, a plurality of optical systems, a plurality of mirrors, a fiber and the like may be employed.
- According to the present invention, the laser beam is processed to have an elliptic cross section in the step using the laser annealing method to thereby improve throughput. Besides, by using a solid-state laser easy to maintain, higher throughput than that by laser annealing employing a conventional excimer laser can be attained. Consequently, it is possible to decrease the manufacturing cost of a TFT and the semiconductor device such as a display formed out of the TFT.
- Moreover, by irradiating the laser beam aslant to the semiconductor film, it is possible to remove or decrease the concentric pattern generated on the semiconductor film and to thereby make the material property of the semiconductor film after the step using the laser annealing method uniform. If a semiconductor device is manufactured using such a semiconductor film, it is possible to greatly improve the performance of the semiconductor device.
- An optical system will be described below with reference to
FIG. 6 in this embodiment. - As a
laser oscillator 201, it is desirable to use a high-power laser (a YAG laser, a YVO4 laser or the like). Of course, a gas laser, a glass laser or the like may also be used as long as it has high power. The laser light generated from thelaser oscillator 201 is formed into a linear beam whose irradiation plane has a linear shape, by using the optical system. The optical system uses, for example, a long focal length cylindrical lens 205 for enlarging a laser beam into a long beam, and acylindrical lens 206 for converging a laser beam into a thin beam. By using such long focal length cylindrical lenses, it is possible to obtain a laser beam which is reduced in aberration and is uniform in energy distribution at or near the irradiation plane. In addition, the long focal length cylindrical lenses are effective in restraining a remarkable difference from occurring between the beam width of a beam incident on the semiconductor film and the beam width of a beam reflected from the back surface of the substrate. Experiments of the present inventor showed that when a cylindrical lens having a focal length of 500 mm or more was used, the influence of aberration was able to be drastically reduced. - A reflecting
mirror 207 is provided in front of thecylindrical lens 206 so that the traveling direction of the laser beam can be changed. The angle at which the laser beam is made incident on the irradiation plane can be adjusted to the desired angle θ by the reflectingmirror 207. If the angle of thecylindrical lens 206 is changed according to the angle of the reflectingmirror 207, a laser beam having far higher symmetry can be formed on the irradiation plane. - In addition, when linear beams are to be irradiated onto a semiconductor film, the irradiation is carried out with a scanning overlapping ration of 0 to 80% of the laser beam (laser beam in the Y-axis direction in the present Embodiment) during the scanning. It is to be noted that in case of a pulsed laser, the irradiation can be carried out with an overlapping ratio of 50 to 98% between the successively irradiated laser beams, and alternatively with no overlapping. Since optimum conditions differ according to the states of semiconductor films or the delay periods of laser beams, it is preferable that an operator appropriately determine the optimum conditions.
- In
Embodiment 1, a pulsed laser (Output 20 W, frequency 30 Hz, YAG) was used as thelaser oscillator 201. The pulsed laser beam was modulated to a second harmonic by a non-linearoptical element 202 and was then formed into a linear beam of width 130 mm and length 0.4 mm by using the optical system, and the linear beam was irradiated onto the semiconductor film. At this time, the linear beam was irradiated with an angular deviation of 5 to 10 degrees from the direction perpendicular to thesubstrate 204. - Stand 208 is provided under a
stage 203, and movingmechanism 209 is provided under thestand 208. Asubstrate 204 can be moved in the X axis direction and Y axis direction by movingmechanism 209. A ball, a barrel, a motor and the like may be provided below the movingmechanism 209. - The semiconductor film in the
processing target substrate 204 is crystallized in a direction which is parallel to theprocessing target substrate 204 and witch is closer to the end face of theprocessing target substrate 606. - Moreover, by irradiating the laser beam aslant to the semiconductor film of the
processing target substrate 204, it is possible to remove or decrease the concentric pattern generated on the semiconductor film and to thereby make the material property of the semiconductor film after the step using the laser annealing method uniform. If a semiconductor device is manufactured using such a semiconductor film, it is possible to greatly improve the performance of the semiconductor device. - This embodiment describes the method of crystalline for the laser anneal device.
- First, a glass substrate (Corning 1737 with a glass distortion temperature of 667° C.) was prepared as a
substrate 1000. Then, aprotective film 1001 is formed on thesubstrate 1000, and atantalum nitride film 1002 a (50 nm thick) andtantalum film 1002 a (250 nm thick) were formed successively in the form of a multilayer configuration on theprotective film 1000 by sputtering. (FIG. 7A ) Then, thegate electrode 1002 having a multi layer configuration formed by photolisography, which is conventional patterning method. - Subsequently, the gate insulating film and the
amorphous semiconductor film 1004 were formed successively in the form of a multilayer configuration without being exposed to the atmosphere (FIG. 7C ). In this embodiment, in order to prevent impurities from diffusing from the gate wiring to the semiconductor film and the gate insulating film during fabrication, thesilicon nitride film 1003 a (50 nm in thickness) and thesilicon oxide film 1003 b (125 nm in thickness) were formed in the form of a multilayer configuration by means of the plasma CVD method to allow the layer to serve as a gate insulating film of a multilayer configuration. In this embodiment, a two layer insulating film is employed as the gate insulating film, however, the gate insulating film may be of a single layer or of a multilayer configuration with three layers or more. In addition, in this embodiment, anamorphous silicon film 1004 54 nm in thickness was formed on the gate insulating film as theamorphous semiconductor film 104 by means of the plasma CVD method. Furthermore, the formation in the form of a multilayer configuration was carried out successively without exposure to the atmosphere so that each interface of the layers does not have contaminants adhered thereto from the atmosphere. - Thereafter, heating treatment was carried out (at a temperature of 500° C. for one hour) in order to reduce the concentration of hydrogen, which prevents the crystallization of the semiconductor film, in the amorphous silicon film.
- After the state shown in
FIG. 7C has been obtained, theamorphous semiconductor film 1004 was irradiated with infrared light or ultraviolet light (laser annealing) to be crystallized (laser crystallization) in order to form the crystalline semiconductor film 1005 (semiconductor film including crystals) (FIG. 7D ). Theamorphous semiconductor film 1004 is crystallized in a direction which is parallel to thesubstrate 1000 and which is closer to the end face of thesubstrate 1000. - In the case of using ultraviolet light as the crystallization technique, laser light or intensified light emitted from an ultraviolet light lamp can be used, while in the case of using infrared light, infrared laser light or an intensified light emitted from an infrared light lamp can be used. In this Embodiment, The YVO4 CW laser beam is shaped oval and irradiated on the semiconductor film at an aslant angle of 5 to 10° with a scanning overlapping ratio of 0 to 80° A) of the laser beam (laser beam in the Y-axis direction in the present embodiment) during the scanning.
- Furthermore, one can determine the conditions for laser crystallization (such as the wavelength of the laser light, the intensity of irradiation, the frequency of repetition, and the time of irradiation) as appropriate in consideration of the thickness of the
amorphous semiconductor film 1004, the temperature of the substrate and so forth. - Furthermore, some conditions for laser crystallization may cause the semiconductor film to crystallize after passing through a melting state, or the semiconductor film to crystallize in a solid phase without being melted or in an intermittent state between the solid phase and liquid phase. This process allows the
amorphous semiconductor film 1004 to crystallize and change into thecrystalline semiconductor film 1005. In this embodiment, the crystalline semiconductor film is a poly-crystalline silicon film (poly-silicon film). - The structure of the active matrix liquid crystal display device obtained by using
Embodiment FIGS. 8 to 9 . - In the top view of active matrix display device shown in
FIG. 8A , thepixel portion 811, the driver circuit (general name ofgate driving circuit 805 and source driving circuit 807), anexternal input terminal 803 to which an FPC (Flexible Printed Circuit) is bonded, awiring 804 for connecting theexternal input terminal 803 with input sections of the respective circuits, and the like are formed on anactive matrix substrate 801. Theactive matrix substrate 801 and an opposingsubstrate 802, on which a color filter and the like are formed, are bonded with each other, sandwiching an end-sealingmaterial 809 therebetween. - A gate driving circuit has the function to input the signal to selected
gate wiring 806. Thegate wiring 806 is the wiring that connects to gate electrode electrically. And the selected gate wirings are selected one by one. Of course, an insulating film is provided on the gate wiring. On the other way, a source driving circuit has the function to receive the image data signal and apply the signal to the pixel electrode, which connected to the selected gate wiring. Thesource driving circuit 807 moves with matching the timing ofgate driving circuit 805. Then, an image of active matrix type display device can be obtained by selecting the switching element (not shown) of each gate wiring and by applying the desired voltage throughsource wiring 808. - A color filter formed on the surface of the
pixel portion 811 facing the counter substrate is provided so that each of red (R), green (G) and blue (B) color filters corresponds to each pixel. For practical display, color display is realized by color filters of three colors, i.e., a red color filter, a green color filter and a blue color filter. The arrangement of color filters of these three colors is arbitrary. - When the direction of grain growth caused by the irradiation of laser light (
FIG. 8 ) is the same direction of arrow, if that direction and the flowing direction of carrier (channel direction) in asemiconductor layer 810 showed inFIG. 9A (Figure of TFT at pixel portion) are the same, electric mobility are not lowered. 806 indicate gate wiring and 811 indicates contact-hall. As the same way, if the direction of grain growth caused by the irradiation of laser light ofFIG. 8 and the direction of carrier flow insemiconductor layer 910 showed inFIG. 9B (figure of TFT at driving circuit) are the same, electric mobility are not lowered. 906 indicate gate wiring and 911 indicates contact hall. - A laser annealer different from that in the first embodiment will be described. The laser annealer in this embodiment is characterized by providing a plurality of laser oscillators, a plurality of optical systems and a plurality of mirrors, condensing laser beams oscillated by the laser oscillators and processed by the optical systems, respectively and irradiating the condensed light beams to a substrate.
- As shown in
FIG. 11 ,laser beams 1100 a to 1100 c are emitted fromlaser oscillators 1109 a to 1109 c, processed byoptical systems 1110 a to 1110 c, and reflected bymirrors 1111 a to 1111 c, respectively. The reflected laser beams are condensed and irradiated to aprocessing target substrate 1113 which is mounted on astage 1104. Using a movingmechanism 1105 which is provided below thestage 1104, theprocessing target substrate 1113 can be moved in the X axis direction and the Y-axis direction. A ball, a barrel, a motor and the like may be provided below the movingmechanism 1105. - In this embodiment, it is possible to prevent or decrease the generation of a concentric pattern which has been disadvantageously generated by the irradiation of a laser beam or laser beams. It is, therefore, possible to improve the reliability of a resultant semiconductor device.
- A laser annealer different from those in the first and second embodiments will be described. The laser annealer in this embodiment is characterized by providing a plurality of laser oscillators, a plurality of nonlinear optical elements and a waveguide, emitting laser beams from the respective laser oscillators, modulating the laser beams by the respective nonlinear optical elements, condensing the modulated laser beams by the waveguide and irradiating the condensed laser beams to a substrate.
- As shown in
FIG. 12 , laser beams are emitted fromlaser oscillators 100 a to 100 c, thelaser beams 112 a to 112 c modulated by nonlinearoptical elements 101 a to 101 c are incident on afiber array 103 and condensed by awaveguide 104. The laser beams emitted from afiber array 105 are irradiated to aprocessing target substrate 113 on astage 110. It is noted that thefiber array 103 is a means for making thelaser beams 112 a to 112 c proximate to one another. - A
stand 106 is provided below astage 110 and a movingmechanism 107 is provided below thestand 106. Using the movingmechanism 107, theprocessing target substrate 113 can be moved in the X axis direction and the Y axis direction (not shown). A ball, a barrel, a motor and the like may be disposed below the movingmechanism 107. - In this embodiment, it is possible to prevent or decrease the generation of a concentric pattern which has been disadvantageously generated by the irradiation of a laser beam. It is, therefore, possible to improve the reliability of a resultant semiconductor device.
- A laser annealer different from those in the first to third embodiments will be described, while particularly referring to an example of a moving mechanism for moving a stage with reference to
FIG. 13 . - Normally, a stage on which a processing target to be irradiated with a laser beam is mounted is moved along a guide rail which is provided in either the X axis direction or the Y axis direction. A curved object referred to as ball (bearing) is put between the guide rail and a section (slider) which fixes the stage. Therefore, a mechanism which can decrease load caused by friction and can smoothly move the stage is realized.
- Since the ball (bearing) is worn by the repetitive movement of the stage, it is necessary to replace the ball by periodical maintenance. In addition, to move the stage more smoothly, it is necessary to decrease abrasion caused by the movement of the stage.
- A moving mechanism for moving the stage in this embodiment is shown in
FIG. 13A . InFIG. 13A ,reference symbol 1300 denotes a guide rail on which irregularities are formed in one direction to move the stage in a fixed direction.Reference symbol 1301 denotes a section, referred to as a slider, which fixes the stage. Theslider 1301 can be moved along theguide rail 1300. Alternatively, a plurality of sliders may be provided to be fixed at predetermined intervals. Areference symbol 1302 denotes a rod which penetrates a hole formed in theslider 1301 and is provided in a direction along theguide rail 1300. Therod 1302 is fixed to theguide rail 1300 by anend plate 1304. - A power supply voltage and the air are fed to the
slider 1301 through acable 1303.FIG. 13B is an enlarged view of theslider 1301. A magnetic field which attracts theslider 1301 and theguide rail 1300 to each other is generated by the power supply voltage. In addition, a magnetic field in a direction in which theslider 1301 is away from and out of contact with therod 1302 in the hole provided in theslider 1301, is generated by the power supply voltage. Using the principle of a linear motor force, theslider 1301 moves in a direction indicated by an arrow. On the other hand, a force acts on theslider 1301 and theguide rail 1300 so that theslider 1301 and theguide rail 1300 are attracted to each other by this magnetic field. The air fed to theslider 1300 is discharged to a region between theslider 1301 and theguide rail 1300 from anair hole 1305. Since a force acts in a direction in which theslider 1301 is away fromrod 1302 by the attracting force of the magnetic field and the discharge of the air, a fixed distance is maintained between theslider 1301 and theguide rail 1300. - Alternatively, instead of generating magnetic field by the power supply voltage applied through the cable, one of the
guide rail 1300 and theslider 1301 may be formed out of a magnetic member and the other one of theguide rail 1300 and theslider 1301 may be formed out of a material attracted by the magnetic member to thereby generate a magnetic field. Alternatively, theguide rail 1300 and theslider 1301 may be formed out of magnetic members, respectively. - Further, instead of generating the magnetic field by the power supply voltage applied through the cable, one of the
rod 1302 and theslider 1301 may be formed out of a magnetic member and the other one of therod 1302 and theslider 1301 may be formed out of a material which tends to be away from the magnetic member to thereby generate a magnetic field. Alternatively, therod 1302 and theslider 1301 may be formed out of magnetic members, respectively. - Using the stage moving mechanism shown in this embodiment, it is possible to move the stage along the guide rail in a non-contact manner, to dispense with the regular replacement of the ball (bearing) and to thereby facilitate maintenance. In addition, because of the non-contact movement, abrasion hardly occurs and the stage can be moved more smoothly than a case where a ball is employed.
-
FIG. 13C shows a state in which aprocessing target 1311 to be irradiated with a laser beam is mounted on astage 1310 fixed onto theslider 1301. In this embodiment, the stage moving means enables the stage to be moved more smoothly, making it possible to irradiate the laser beam to theprocessing target 1311 more uniformly. - As described so far, by employing the laser annealer according to the present invention, a plurality of laser beams are condensed to one laser flux to thereby prevent or decrease the generation of a concentric pattern, which has been disadvantageously generated by the irradiation of a laser flux and to make it possible to improve the reliability of a resultant semiconductor device. If the laser annealer according to the present invention is employed, it is possible to uniformly irradiate a laser beam or laser beams to even a semiconductor film on a large-sized substrate.
- Further, according to the present invention, the laser beam is processed to have an elliptic cross section in the step using the laser annealing method to thereby improve throughput. Besides, by using a solid-state laser maintenance of which is easy, higher throughput than that by laser annealing employing a conventional excimer laser can be attained. Consequently, it is possible to decrease the manufacturing cost of a TFT and the semiconductor device such as a display formed out of the TFT.
- Moreover, by irradiating the laser beam aslant to the semiconductor film, it is possible to remove or decrease the concentric pattern generated on the semiconductor film and to thereby make the material property of the semiconductor film after the step using the laser annealing method, uniform. If a semiconductor device is manufactured using such a semiconductor film, it is possible to greatly improve the performance of the semiconductor device.
Claims (36)
1. A method of manufacturing a semiconductor device comprising:
emitting a plurality of laser beams from a plurality of oscillators;
making the plurality of laser beams pass through a fiber array;
condensing the plurality of laser beams having passed through the fiber array to form a condensed laser beam; and
irradiating a semiconductor film with the condensed laser beam in order to increase crystallinity of the semiconductor film.
2. The method of manufacturing a semiconductor device according to claim 1 , wherein the step of irradiating the semiconductor film with the condensed laser beam includes:
changing a relative position of the semiconductor film with respect to the condensed laser beam in a first direction;
changing the relative position of the semiconductor film in a second direction perpendicular to the first direction by a distance equal to or smaller than a length of the condensed laser beam in the second direction; and then
changing the relative position of the semiconductor film with respect to the condensed laser beam in a third direction parallel and opposite to the first direction.
3. The method of manufacturing a semiconductor device according to claim 2 , wherein the steps of changing the relative position includes a step of changing a position of the semiconductor film.
4. The method of manufacturing a semiconductor device according to claim 1 , wherein the semiconductor film is irradiated with the condensed laser beam aslant to the semiconductor film.
5. The method of manufacturing a semiconductor device according to claim 1 , wherein the semiconductor film is crystallized by the irradiation of the condensed laser beam.
6. The method of manufacturing a semiconductor device according to claim 1 , wherein the plurality of laser beams is condensed by a waveguide.
7. The method of manufacturing a semiconductor device according to claim 1 , wherein each of the plurality of oscillators is one selected from a group consisting of a Nd: YAG laser, an Nd: YLF laser, an Nd: YVO4 laser and an Nd: YAlO3 laser.
8. The method of manufacturing a semiconductor device according to claim 1 , wherein each of the plurality of laser beams is a CW laser beam.
9. The method of manufacturing a semiconductor device according to claim 1 , wherein each of the plurality of laser beams is a pulsed laser beam.
10. A method of manufacturing a semiconductor device comprising:
emitting a plurality of laser beams from a plurality of oscillators;
making the plurality of laser beams proximate to one another by a fiber array;
irradiating a semiconductor film with a laser beam passed through the fiber array in order to increase crystallinity of the semiconductor film while moving a laser-light irradiation position relative to the semiconductor film in a first direction;
moving the laser-light irradiation position relative to the semiconductor film in a second direction perpendicular to the first direction by a distance equal to or smaller than a length of the laser beam in the second direction;
irradiating the semiconductor film with the laser beam while moving the laser-light irradiation position relative to the semiconductor film in a third direction parallel and opposite to the first direction after moving the laser-light irradiation position relative to the semiconductor film in the second direction; and then
moving the laser-light irradiation position relative to the semiconductor film in the second direction by a distance equal to or smaller than the length of the laser beam in the second direction.
11. The method of manufacturing a semiconductor device according to claim 10 , wherein the steps of irradiating the semiconductor film with the laser beam while moving the laser-light irradiation position relative to the semiconductor film in the first direction, moving the laser-light irradiation position relative to the semiconductor film in the second direction, irradiating the semiconductor film with the laser beam while moving the laser-light irradiation position relative to the semiconductor film in the third direction, and moving the laser-light irradiation position relative to the semiconductor film in the second direction are continuously repeated.
12. The method of manufacturing a semiconductor device according to claim 10 , further comprising modulating the plurality of laser beams by a plurality of nonlinear optical elements after emitting the plurality of laser beams from the plurality of oscillators.
13. The method of manufacturing a semiconductor device according to claim 10 , wherein the semiconductor film is irradiated with the laser beam aslant to the semiconductor film.
14. The method of manufacturing a semiconductor device according to claim 10 , wherein the semiconductor film is crystallized by the irradiation of the laser beam.
15. The of manufacturing a semiconductor device according to claim 10 , wherein the plurality of laser beams is condensed by a waveguide.
16. The method of manufacturing a semiconductor device according to claim 10 , wherein each of the plurality of oscillators is one selected from a group consisting of a Nd:
YAG laser, an Nd: YLF laser, an Nd: YVO4 laser and an Nd: YAlO3 laser.
17. The method of manufacturing a semiconductor device according to claim 10 , wherein each of the plurality of laser beams is a CW laser beam.
18. The method of manufacturing a semiconductor device according to claim 10 , wherein each of the plurality of laser beams is a pulsed laser beam.
19. A method of manufacturing a semiconductor device comprising:
forming a semiconductor film over a substrate having an insulating surface;
emitting a plurality of laser beams from a plurality of oscillators;
making the plurality of laser beams proximate to one another by a fiber array;
irradiating the semiconductor film with a laser beam passed through the fiber array in order to increase crystallinity of the semiconductor film while moving a laser-light irradiation position relative to the semiconductor film in a first direction;
moving the laser-light irradiation position relative to the semiconductor film in a second direction perpendicular to the first direction by a distance equal to or smaller than a length of the laser beam in the second direction;
irradiating the semiconductor film with the laser beam while moving the laser-light irradiation position relative to the semiconductor film in a third direction parallel and opposite to the first direction after moving the laser-light irradiation position relative to the semiconductor film in the second direction; and then
moving the laser-light irradiation position relative to the semiconductor film in the second direction by a distance equal to or smaller than the length of the laser beam in the second direction.
20. The method of manufacturing a semiconductor device according to claim 19 , wherein the steps of irradiating the semiconductor film with the laser beam while moving the laser-light irradiation position relative to the semiconductor film in the first direction, moving the laser-light irradiation position relative to the semiconductor film in the second direction, irradiating the semiconductor film with the laser beam while moving the laser-light irradiation position relative to the semiconductor film in the third direction, and moving the laser-light irradiation position relative to the semiconductor film in the second direction are continuously repeated.
21. The method of manufacturing a semiconductor device according to claim 19 , further comprising modulating the plurality of laser beams by a plurality of nonlinear optical elements after emitting the plurality of laser beams from the plurality of oscillators.
22. The method of manufacturing a semiconductor device according to claim 19 , wherein the semiconductor film is irradiated with the laser beam aslant to the semiconductor film.
23. The method of manufacturing a semiconductor device according to claim 19 , wherein the semiconductor film is crystallized by the irradiation of the laser beam.
24. The method of manufacturing a semiconductor device according to claim 19 , wherein the plurality of laser beams is condensed by a waveguide.
25. The method of manufacturing a semiconductor device according to claim 19 , wherein each of the plurality of oscillators is one selected from a group consisting of a Nd: YAG laser, an Nd: YLF laser, an Nd: YVO4 laser and an Nd: YAlO3 laser.
26. The method of manufacturing a semiconductor device according to claim 19 , wherein each of the plurality of laser beams is a CW laser beam.
27. The method of manufacturing a semiconductor device according to claim 19 , wherein each of the plurality of laser beams is a pulsed laser beam.
28. A method of manufacturing a semiconductor device comprising:
emitting a plurality of laser beams from a plurality of oscillators;
making the plurality of laser beams proximate to one another by a fiber array;
irradiating a semiconductor film with a laser beam passed through the fiber array in order to increase crystallinity of the semiconductor film while moving a laser-light irradiation position relative to the semiconductor film in a first direction;
moving the laser-light irradiation position relative to the semiconductor film in a second direction perpendicular to the first direction by a distance equal to or smaller than a length of the laser beam in the second direction;
irradiating the semiconductor film with the laser beam while moving the laser-light irradiation position relative to the semiconductor film in a third direction parallel and opposite to the first direction after moving the laser-light irradiation position relative to the semiconductor film in the second direction; and then
moving the laser-light irradiation position relative to the semiconductor film in the second direction by a distance equal to or smaller than the length of the laser beam in the second direction,
wherein the laser-light irradiation position relative to the semiconductor film is moved while being accelerated before irradiating with the laser beam, and is moved at a constant rate during the irradiation, and is moved while being decelerated during the laser-light irradiation position relative to the semiconductor film being outside of the semiconductor film.
29. The method of manufacturing a semiconductor device according to claim 28 , wherein the steps of irradiating the semiconductor film with the laser beam while moving the laser-light irradiation position relative to the semiconductor film in the first direction, moving the laser-light irradiation position relative to the semiconductor film in the second direction, irradiating the semiconductor film with the laser beam while moving the laser-light irradiation position relative to the semiconductor film in the third direction, and moving the laser-light irradiation position relative to the semiconductor film in the second direction are continuously repeated.
30. The method of manufacturing a semiconductor device according to claim 28 , further comprising modulating the plurality of laser beams by a plurality of nonlinear optical elements after emitting the plurality of laser beams from the plurality of oscillators.
31. The method of manufacturing a semiconductor device according to claim 28 , wherein the semiconductor film is irradiated with the laser beam aslant to the semiconductor film.
32. The method of manufacturing a semiconductor device according to claim 28 , wherein the semiconductor film is crystallized by the irradiation of the laser beam.
33. The method of manufacturing a semiconductor device according to claim 28 , wherein the plurality of laser beams is condensed by a waveguide.
34. The method of manufacturing a semiconductor device according to claim 28 , wherein each of the plurality of oscillators is one selected from a group consisting of a Nd: YAG laser, an Nd: YLF laser, an Nd: YVO4 laser and an Nd: YAlO3 laser.
35. The method of manufacturing a semiconductor device according to claim 28 , wherein each of the plurality of laser beams is a CW laser beam.
36. The method of manufacturing a semiconductor device according to claim 28 , wherein each of the plurality of laser beams is a pulsed laser beam.
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US10/944,000 Expired - Fee Related US7863541B2 (en) | 2001-08-10 | 2004-09-20 | Laser annealing apparatus and semiconductor device manufacturing method |
US12/494,416 Abandoned US20100173480A1 (en) | 2001-08-10 | 2009-06-30 | Laser annealing apparatus and semiconductor device manufacturing method |
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US10/944,000 Expired - Fee Related US7863541B2 (en) | 2001-08-10 | 2004-09-20 | Laser annealing apparatus and semiconductor device manufacturing method |
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JP (1) | JP5058205B2 (en) |
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---|---|---|---|---|
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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Citations (65)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3585088A (en) * | 1968-10-18 | 1971-06-15 | Ibm | Methods of producing single crystals on supporting substrates |
US4330363A (en) * | 1980-08-28 | 1982-05-18 | Xerox Corporation | Thermal gradient control for enhanced laser induced crystallization of predefined semiconductor areas |
US4415794A (en) * | 1981-03-16 | 1983-11-15 | Fairchild Camera And Instrument Corporation | Laser scanning method for annealing, glass flow and related processes |
US4469551A (en) * | 1980-09-18 | 1984-09-04 | L'etat Belge, Represente Par Le Secretaire General Des Services De La Programmation De La Politique Scientifique | Method for crystallizing films |
US4755015A (en) * | 1985-07-12 | 1988-07-05 | Matsushita Electric Industrial Co., Ltd. | Monolithic integrated semiconductor device of semiconductor laser and optical waveguide |
US4806728A (en) * | 1988-02-01 | 1989-02-21 | Raytheon Company | Laser process apparatus |
US4807954A (en) * | 1985-02-16 | 1989-02-28 | Nippon Hoso Kyokai | Optical coupling device |
US5108843A (en) * | 1988-11-30 | 1992-04-28 | Ricoh Company, Ltd. | Thin film semiconductor and process for producing the same |
US5208187A (en) * | 1990-07-06 | 1993-05-04 | Tsubochi Kazuo | Metal film forming method |
US5227948A (en) * | 1990-08-30 | 1993-07-13 | U.S. Philips Corporation | Electromagnetic support with position-independent characteristics |
JPH0679487A (en) * | 1992-05-28 | 1994-03-22 | Nec Corp | Laser beam machine |
US5308998A (en) * | 1991-08-26 | 1994-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Insulated gate field effect semiconductor devices having a LDD region and an anodic oxide film of a gate electrode |
US5521107A (en) * | 1991-02-16 | 1996-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming a field-effect transistor including anodic oxidation of the gate |
US5561081A (en) * | 1993-02-04 | 1996-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming a semiconductor device by activating regions with a laser light |
US5591668A (en) * | 1994-03-14 | 1997-01-07 | Matsushita Electric Industrial Co., Ltd. | Laser annealing method for a semiconductor thin film |
US5612251A (en) * | 1993-05-27 | 1997-03-18 | Samsung Electronics Co., Ltd. | Manufacturing method and device for a polycrystalline silicon |
US5624585A (en) * | 1992-10-23 | 1997-04-29 | Mitsui Petrochemical Industries, Ltd. | Method and apparatus for welding material by laser beam |
US5633967A (en) * | 1994-04-11 | 1997-05-27 | Mitsui Petrochemical Industries, Ltd. | Waveguide fiber optical coupler |
US5643826A (en) * | 1993-10-29 | 1997-07-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
US5712191A (en) * | 1994-09-16 | 1998-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing semiconductor device |
US5854803A (en) * | 1995-01-12 | 1998-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Laser illumination system |
US5858822A (en) * | 1995-08-07 | 1999-01-12 | Semiconductor Energy Laboratory Co. | Method for producing semiconductor device |
US5923962A (en) * | 1993-10-29 | 1999-07-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
US5953597A (en) * | 1995-02-21 | 1999-09-14 | Semicondutor Energy Laboratory Co., Ltd. | Method for producing insulated gate thin film semiconductor device |
US5970368A (en) * | 1996-09-30 | 1999-10-19 | Kabushiki Kaisha Toshiba | Method for manufacturing polycrystal semiconductor film |
US5981399A (en) * | 1995-02-15 | 1999-11-09 | Hitachi, Ltd. | Method and apparatus for fabricating semiconductor devices |
US6002523A (en) * | 1997-09-30 | 1999-12-14 | Semiconductor Energy Laboratory Co., Ltd. | Laser illumination method |
US6013928A (en) * | 1991-08-23 | 2000-01-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having interlayer insulating film and method for forming the same |
US6054739A (en) * | 1994-12-16 | 2000-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having channel refractive index in first and second directions |
US6137633A (en) * | 1997-04-21 | 2000-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiating apparatus and laser irradiating method |
US6160827A (en) * | 1997-02-28 | 2000-12-12 | Semiconductor Energy Laboratory, Co., Ltd. | Laser irradiating device and laser irradiating method |
US6242289B1 (en) * | 1995-09-08 | 2001-06-05 | Semiconductor Energy Laboratories Co., Ltd. | Method for producing semiconductor device |
US20010010702A1 (en) * | 2000-02-02 | 2001-08-02 | Koichiro Tanaka | Beam homogenizer, laser irradiation apparatus, semiconductor device, and method of fabricating the semiconductor device |
US20010015441A1 (en) * | 1999-12-10 | 2001-08-23 | Ritsuko Kawasaki | Semiconductor device and a method of manufacturing the same |
US6281470B1 (en) * | 1997-04-02 | 2001-08-28 | Sharp Kabushiki Kaisha | Thin film semiconductor device uniforming characteristics of semiconductor elements and manufacturing method thereof |
US6313434B1 (en) * | 1999-05-27 | 2001-11-06 | International Business Machines Corporation | Method for creation of inclined microstructures using a scanned laser image |
US6322625B2 (en) * | 1996-05-28 | 2001-11-27 | The Trustees Of Columbia University In The City Of New York | Crystallization processing of semiconductor film regions on a substrate, and devices made therewith |
US20010055830A1 (en) * | 2000-06-19 | 2001-12-27 | Satoshi Yoshimoto | Semiconductor device and method of manufacturing the same |
US20020017685A1 (en) * | 2000-05-12 | 2002-02-14 | Kenji Kasahara | Semiconductor device and method of fabricating thereof |
US6358784B1 (en) * | 1992-03-26 | 2002-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Process for laser processing and apparatus for use in the same |
US6392810B1 (en) * | 1998-10-05 | 2002-05-21 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatus, laser irradiation method, beam homogenizer, semiconductor device, and method of manufacturing the semiconductor device |
US20020094008A1 (en) * | 2000-12-27 | 2002-07-18 | Koichiro Tanaka | Laser annealing method and semiconductor device fabricating method |
US20020094613A1 (en) * | 2001-01-18 | 2002-07-18 | Shunpei Yamazaki | Method of manufacturing semiconductor device |
US6426245B1 (en) * | 1999-07-09 | 2002-07-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
US6437284B1 (en) * | 1999-06-25 | 2002-08-20 | Mitsubishi Denki Kabushiki Kaisha | Optical system and apparatus for laser heat treatment and method for producing semiconductor devices by using the same |
US6451631B1 (en) * | 2000-08-10 | 2002-09-17 | Hitachi America, Ltd. | Thin film crystal growth by laser annealing |
US6455359B1 (en) * | 1997-02-13 | 2002-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Laser-irradiation method and laser-irradiation device |
US6489222B2 (en) * | 2000-06-02 | 2002-12-03 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
US6496248B2 (en) * | 2000-12-15 | 2002-12-17 | Nikon Corporation | Stage device and exposure apparatus and method |
US20030024905A1 (en) * | 2001-08-03 | 2003-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device |
US6556711B2 (en) * | 1994-12-28 | 2003-04-29 | Canon Kabushiki Kaisha | Image processing apparatus and method |
US20030086182A1 (en) * | 2001-09-25 | 2003-05-08 | Koichiro Tanaka | Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device |
US6563843B1 (en) * | 1999-08-13 | 2003-05-13 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation device |
US6567219B1 (en) * | 1999-08-13 | 2003-05-20 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatus |
US6599788B1 (en) * | 1999-08-18 | 2003-07-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of fabricating the same |
US20030143337A1 (en) * | 2001-11-16 | 2003-07-31 | Semiconductor Energy Laboratory Co., Ltd. | Method of irradiating a laser beam, apparatus for irradiating a laser beam and method of fabricating semiconductor devices |
US6602744B1 (en) * | 1996-06-20 | 2003-08-05 | Sony Corporation | Process for fabricating thin film semiconductor device |
US20030168437A1 (en) * | 2001-11-30 | 2003-09-11 | Koichiro Tanaka | Laser irradiation apparatus |
US6660609B2 (en) * | 2001-08-10 | 2003-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device using laser irradiation |
US6675057B2 (en) * | 2001-04-25 | 2004-01-06 | Intel Corporation | Integrated circuit annealing methods and apparatus |
US6759628B1 (en) * | 1996-06-20 | 2004-07-06 | Sony Corporation | Laser annealing apparatus |
US6781682B1 (en) * | 2000-01-17 | 2004-08-24 | Agency Of Industrial Science And Technology, Ministry Of International Trade & Industry | Optical apparatus, optical apparatus adjustment method, and storage medium recorded with a processing program that executes said adjustment method |
US6847006B2 (en) * | 2001-08-10 | 2005-01-25 | Semiconductor Energy Laboratory Co., Ltd. | Laser annealing apparatus and semiconductor device manufacturing method |
US7132375B2 (en) * | 2001-08-30 | 2006-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device by crystallization of a semiconductor region by use of a continuous wave laser beam through the substrate |
US7217605B2 (en) * | 2000-11-29 | 2007-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method and method of manufacturing a semiconductor device |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6239138A (en) | 1985-08-13 | 1987-02-20 | Omron Tateisi Electronics Co | Xy stage |
JPH0788850B2 (en) | 1986-01-14 | 1995-09-27 | 光洋精工株式会社 | Magnetic levitation slide |
JPH0763055B2 (en) | 1986-03-18 | 1995-07-05 | 富士通株式会社 | Laser annealing device |
JPH0612761B2 (en) * | 1988-06-13 | 1994-02-16 | 神奈川県 | Laser selective diffusion method |
JPH02181419A (en) | 1989-01-06 | 1990-07-16 | Hitachi Ltd | Laser anneal method |
JP2780837B2 (en) | 1990-01-24 | 1998-07-30 | 住友重機械工業株式会社 | Movable stage device |
JPH04142030A (en) * | 1990-09-12 | 1992-05-15 | Ricoh Co Ltd | Manufacture of semiconductor film |
JPH05104276A (en) | 1991-10-16 | 1993-04-27 | Toshiba Corp | Laser beam machine and machining method with laser beam |
JP2919145B2 (en) * | 1992-01-07 | 1999-07-12 | 菱電セミコンダクタシステムエンジニアリング株式会社 | Laser light irradiation device |
JPH05238548A (en) | 1992-02-27 | 1993-09-17 | Ntn Corp | Air slide device |
JPH07168040A (en) | 1993-12-14 | 1995-07-04 | Nippon Steel Corp | Semiconductor laser converging apparatus |
US5489222A (en) * | 1994-09-09 | 1996-02-06 | The Whitaker Corporation | Mini connector with anti-rotational contact |
JP3650943B2 (en) | 1995-10-05 | 2005-05-25 | 株式会社日本製鋼所 | Laser annealing equipment |
US6027960A (en) * | 1995-10-25 | 2000-02-22 | Semiconductor Energy Laboratory Co., Ltd. | Laser annealing method and laser annealing device |
JP3119803B2 (en) | 1995-11-15 | 2000-12-25 | アルプス電気株式会社 | XY table |
JPH09321311A (en) | 1996-05-24 | 1997-12-12 | Sony Corp | Manufacture of thin film semiconductor device |
KR100353321B1 (en) * | 1998-06-08 | 2002-09-18 | 가부시키가이샤 히타치세이사쿠쇼 | Optical unit and projection display device |
JP2000019362A (en) | 1998-07-07 | 2000-01-21 | Nec Corp | Optical coupling device for array type semiconductor laser and solid-state laser device using this array type semiconductor laser |
JP3504528B2 (en) | 1999-03-18 | 2004-03-08 | 株式会社日本製鋼所 | Laser light irradiation device |
JP2001102681A (en) * | 1999-09-29 | 2001-04-13 | Toshiba Corp | Laser light source device |
JP2001102323A (en) | 1999-09-30 | 2001-04-13 | Matsushita Electric Ind Co Ltd | Method for manufacturing laser-annealing apparatus and thin-film |
JP3451477B2 (en) | 1999-11-26 | 2003-09-29 | 住友重機械工業株式会社 | Laser annealing equipment |
JP2001156017A (en) * | 1999-11-29 | 2001-06-08 | Semiconductor Energy Lab Co Ltd | Laser device, method for heat treating by using laser beam and method for manufacturing semiconductor device |
JP2002231655A (en) | 2001-01-30 | 2002-08-16 | Ishikawajima Harima Heavy Ind Co Ltd | Apparatus for laser annealing |
-
2002
- 2002-08-07 US US10/212,773 patent/US6847006B2/en not_active Expired - Lifetime
- 2002-08-07 KR KR1020020046477A patent/KR100885904B1/en active IP Right Grant
- 2002-08-09 TW TW091117994A patent/TW561556B/en not_active IP Right Cessation
- 2002-08-12 CN CNB021303053A patent/CN1279591C/en not_active Expired - Fee Related
- 2002-08-12 CN CN2006101156099A patent/CN101101869B/en not_active Expired - Fee Related
-
2004
- 2004-09-20 US US10/944,000 patent/US7863541B2/en not_active Expired - Fee Related
-
2009
- 2009-04-16 JP JP2009099709A patent/JP5058205B2/en not_active Expired - Fee Related
- 2009-06-30 US US12/494,416 patent/US20100173480A1/en not_active Abandoned
Patent Citations (86)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3585088A (en) * | 1968-10-18 | 1971-06-15 | Ibm | Methods of producing single crystals on supporting substrates |
US4330363A (en) * | 1980-08-28 | 1982-05-18 | Xerox Corporation | Thermal gradient control for enhanced laser induced crystallization of predefined semiconductor areas |
US4469551A (en) * | 1980-09-18 | 1984-09-04 | L'etat Belge, Represente Par Le Secretaire General Des Services De La Programmation De La Politique Scientifique | Method for crystallizing films |
US4415794A (en) * | 1981-03-16 | 1983-11-15 | Fairchild Camera And Instrument Corporation | Laser scanning method for annealing, glass flow and related processes |
US4807954A (en) * | 1985-02-16 | 1989-02-28 | Nippon Hoso Kyokai | Optical coupling device |
US4755015A (en) * | 1985-07-12 | 1988-07-05 | Matsushita Electric Industrial Co., Ltd. | Monolithic integrated semiconductor device of semiconductor laser and optical waveguide |
US4806728A (en) * | 1988-02-01 | 1989-02-21 | Raytheon Company | Laser process apparatus |
US5108843A (en) * | 1988-11-30 | 1992-04-28 | Ricoh Company, Ltd. | Thin film semiconductor and process for producing the same |
US5208187A (en) * | 1990-07-06 | 1993-05-04 | Tsubochi Kazuo | Metal film forming method |
US5227948A (en) * | 1990-08-30 | 1993-07-13 | U.S. Philips Corporation | Electromagnetic support with position-independent characteristics |
US5521107A (en) * | 1991-02-16 | 1996-05-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming a field-effect transistor including anodic oxidation of the gate |
US5913112A (en) * | 1991-03-06 | 1999-06-15 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing an insulated gate field effect semiconductor device having an offset region and/or lightly doped region |
US6013928A (en) * | 1991-08-23 | 2000-01-11 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having interlayer insulating film and method for forming the same |
US20020024047A1 (en) * | 1991-08-26 | 2002-02-28 | Shunpei Yamazaki | Insulated gate field effect semiconductor devices and method of manufacturing the same |
US5308998A (en) * | 1991-08-26 | 1994-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Insulated gate field effect semiconductor devices having a LDD region and an anodic oxide film of a gate electrode |
US6331723B1 (en) * | 1991-08-26 | 2001-12-18 | Semiconductor Energy Laboratory Co., Ltd. | Active matrix display device having at least two transistors having LDD region in one pixel |
US5962870A (en) * | 1991-08-26 | 1999-10-05 | Semiconductor Energy Laboratory Co., Ltd. | Insulated gate field effect semiconductor devices |
US6358784B1 (en) * | 1992-03-26 | 2002-03-19 | Semiconductor Energy Laboratory Co., Ltd. | Process for laser processing and apparatus for use in the same |
JPH0679487A (en) * | 1992-05-28 | 1994-03-22 | Nec Corp | Laser beam machine |
US5624585A (en) * | 1992-10-23 | 1997-04-29 | Mitsui Petrochemical Industries, Ltd. | Method and apparatus for welding material by laser beam |
US6159777A (en) * | 1993-02-04 | 2000-12-12 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming a TFT semiconductor device |
US5561081A (en) * | 1993-02-04 | 1996-10-01 | Semiconductor Energy Laboratory Co., Ltd. | Method of forming a semiconductor device by activating regions with a laser light |
US5612251A (en) * | 1993-05-27 | 1997-03-18 | Samsung Electronics Co., Ltd. | Manufacturing method and device for a polycrystalline silicon |
US6285042B1 (en) * | 1993-10-29 | 2001-09-04 | Semiconductor Energy Laboratory Co., Ltd. | Active Matry Display |
US5923962A (en) * | 1993-10-29 | 1999-07-13 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
US5643826A (en) * | 1993-10-29 | 1997-07-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
US5591668A (en) * | 1994-03-14 | 1997-01-07 | Matsushita Electric Industrial Co., Ltd. | Laser annealing method for a semiconductor thin film |
US5633967A (en) * | 1994-04-11 | 1997-05-27 | Mitsui Petrochemical Industries, Ltd. | Waveguide fiber optical coupler |
US5937282A (en) * | 1994-09-16 | 1999-08-10 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing semiconductor device |
US5712191A (en) * | 1994-09-16 | 1998-01-27 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing semiconductor device |
US6274885B1 (en) * | 1994-12-16 | 2001-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Active matrix display device with TFTs of different refractive index |
US6054739A (en) * | 1994-12-16 | 2000-04-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having channel refractive index in first and second directions |
US6613619B2 (en) * | 1994-12-16 | 2003-09-02 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for producing the same |
US6242292B1 (en) * | 1994-12-16 | 2001-06-05 | Semiconductor Energy Laboratory Co., Ltd. | Method of producing a semiconductor device with overlapped scanned linear lasers |
US6556711B2 (en) * | 1994-12-28 | 2003-04-29 | Canon Kabushiki Kaisha | Image processing apparatus and method |
US5854803A (en) * | 1995-01-12 | 1998-12-29 | Semiconductor Energy Laboratory Co., Ltd. | Laser illumination system |
US6210996B1 (en) * | 1995-01-13 | 2001-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Laser illumination system |
US5981399A (en) * | 1995-02-15 | 1999-11-09 | Hitachi, Ltd. | Method and apparatus for fabricating semiconductor devices |
US6204099B1 (en) * | 1995-02-21 | 2001-03-20 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing insulated gate thin film semiconductor device |
US5953597A (en) * | 1995-02-21 | 1999-09-14 | Semicondutor Energy Laboratory Co., Ltd. | Method for producing insulated gate thin film semiconductor device |
US6265745B1 (en) * | 1995-02-21 | 2001-07-24 | Semiconductor Energy Laboratory Co., Ltd. | Method for producing insulated gate thin film semiconductor device |
US5858822A (en) * | 1995-08-07 | 1999-01-12 | Semiconductor Energy Laboratory Co. | Method for producing semiconductor device |
US6242289B1 (en) * | 1995-09-08 | 2001-06-05 | Semiconductor Energy Laboratories Co., Ltd. | Method for producing semiconductor device |
US6322625B2 (en) * | 1996-05-28 | 2001-11-27 | The Trustees Of Columbia University In The City Of New York | Crystallization processing of semiconductor film regions on a substrate, and devices made therewith |
US6602744B1 (en) * | 1996-06-20 | 2003-08-05 | Sony Corporation | Process for fabricating thin film semiconductor device |
US6759628B1 (en) * | 1996-06-20 | 2004-07-06 | Sony Corporation | Laser annealing apparatus |
US5970368A (en) * | 1996-09-30 | 1999-10-19 | Kabushiki Kaisha Toshiba | Method for manufacturing polycrystal semiconductor film |
US6455359B1 (en) * | 1997-02-13 | 2002-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Laser-irradiation method and laser-irradiation device |
US6160827A (en) * | 1997-02-28 | 2000-12-12 | Semiconductor Energy Laboratory, Co., Ltd. | Laser irradiating device and laser irradiating method |
US6281470B1 (en) * | 1997-04-02 | 2001-08-28 | Sharp Kabushiki Kaisha | Thin film semiconductor device uniforming characteristics of semiconductor elements and manufacturing method thereof |
US6137633A (en) * | 1997-04-21 | 2000-10-24 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiating apparatus and laser irradiating method |
US6002523A (en) * | 1997-09-30 | 1999-12-14 | Semiconductor Energy Laboratory Co., Ltd. | Laser illumination method |
US6512634B2 (en) * | 1997-09-30 | 2003-01-28 | Semiconductor Energy Laboratory Co., Ltd. | Beam homogenizer, laser illumination apparatus and method, and semiconductor device |
US6310727B1 (en) * | 1997-09-30 | 2001-10-30 | Semiconductor Energy Laboratory Co., Ltd. | Beam homogenizer, laser illumination apparatus, and semiconductor device |
US6392810B1 (en) * | 1998-10-05 | 2002-05-21 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatus, laser irradiation method, beam homogenizer, semiconductor device, and method of manufacturing the semiconductor device |
US6313434B1 (en) * | 1999-05-27 | 2001-11-06 | International Business Machines Corporation | Method for creation of inclined microstructures using a scanned laser image |
US6437284B1 (en) * | 1999-06-25 | 2002-08-20 | Mitsubishi Denki Kabushiki Kaisha | Optical system and apparatus for laser heat treatment and method for producing semiconductor devices by using the same |
US6844249B2 (en) * | 1999-07-09 | 2005-01-18 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device using laser light |
US6426245B1 (en) * | 1999-07-09 | 2002-07-30 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing a semiconductor device |
US6563843B1 (en) * | 1999-08-13 | 2003-05-13 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation device |
US7135390B2 (en) * | 1999-08-13 | 2006-11-14 | Semiconductor Energy Laboratory Co., Ltd. | Method of fabricating a semiconductor device incorporating crystallizing by laser irradiation |
US7375010B2 (en) * | 1999-08-13 | 2008-05-20 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation device |
US6567219B1 (en) * | 1999-08-13 | 2003-05-20 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation apparatus |
US6599788B1 (en) * | 1999-08-18 | 2003-07-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method of fabricating the same |
US20010015441A1 (en) * | 1999-12-10 | 2001-08-23 | Ritsuko Kawasaki | Semiconductor device and a method of manufacturing the same |
US6781682B1 (en) * | 2000-01-17 | 2004-08-24 | Agency Of Industrial Science And Technology, Ministry Of International Trade & Industry | Optical apparatus, optical apparatus adjustment method, and storage medium recorded with a processing program that executes said adjustment method |
US20010010702A1 (en) * | 2000-02-02 | 2001-08-02 | Koichiro Tanaka | Beam homogenizer, laser irradiation apparatus, semiconductor device, and method of fabricating the semiconductor device |
US20020017685A1 (en) * | 2000-05-12 | 2002-02-14 | Kenji Kasahara | Semiconductor device and method of fabricating thereof |
US6489222B2 (en) * | 2000-06-02 | 2002-12-03 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device |
US20010055830A1 (en) * | 2000-06-19 | 2001-12-27 | Satoshi Yoshimoto | Semiconductor device and method of manufacturing the same |
US6451631B1 (en) * | 2000-08-10 | 2002-09-17 | Hitachi America, Ltd. | Thin film crystal growth by laser annealing |
US7217605B2 (en) * | 2000-11-29 | 2007-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiation method and method of manufacturing a semiconductor device |
US6496248B2 (en) * | 2000-12-15 | 2002-12-17 | Nikon Corporation | Stage device and exposure apparatus and method |
US7160764B2 (en) * | 2000-12-27 | 2007-01-09 | Semiconductor Energy Laboratory Co., Ltd. | Laser annealing method and semiconductor device fabricating method |
US20020094008A1 (en) * | 2000-12-27 | 2002-07-18 | Koichiro Tanaka | Laser annealing method and semiconductor device fabricating method |
US20070254392A1 (en) * | 2000-12-27 | 2007-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Laser annealing method and semiconductor device fabricating method |
US20020094613A1 (en) * | 2001-01-18 | 2002-07-18 | Shunpei Yamazaki | Method of manufacturing semiconductor device |
US6675057B2 (en) * | 2001-04-25 | 2004-01-06 | Intel Corporation | Integrated circuit annealing methods and apparatus |
US20030024905A1 (en) * | 2001-08-03 | 2003-02-06 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device |
US20070099401A1 (en) * | 2001-08-03 | 2007-05-03 | Semiconductor Energy Laboratory Co., Ltd. | Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device |
US6847006B2 (en) * | 2001-08-10 | 2005-01-25 | Semiconductor Energy Laboratory Co., Ltd. | Laser annealing apparatus and semiconductor device manufacturing method |
US6660609B2 (en) * | 2001-08-10 | 2003-12-09 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device using laser irradiation |
US7132375B2 (en) * | 2001-08-30 | 2006-11-07 | Semiconductor Energy Laboratory Co., Ltd. | Method of manufacturing a semiconductor device by crystallization of a semiconductor region by use of a continuous wave laser beam through the substrate |
US20030086182A1 (en) * | 2001-09-25 | 2003-05-08 | Koichiro Tanaka | Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device |
US20030143337A1 (en) * | 2001-11-16 | 2003-07-31 | Semiconductor Energy Laboratory Co., Ltd. | Method of irradiating a laser beam, apparatus for irradiating a laser beam and method of fabricating semiconductor devices |
US20030168437A1 (en) * | 2001-11-30 | 2003-09-11 | Koichiro Tanaka | Laser irradiation apparatus |
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Also Published As
Publication number | Publication date |
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US20050035095A1 (en) | 2005-02-17 |
CN1279591C (en) | 2006-10-11 |
US20030038122A1 (en) | 2003-02-27 |
TW561556B (en) | 2003-11-11 |
KR100885904B1 (en) | 2009-02-26 |
CN1405862A (en) | 2003-03-26 |
JP5058205B2 (en) | 2012-10-24 |
US7863541B2 (en) | 2011-01-04 |
KR20030014609A (en) | 2003-02-19 |
US6847006B2 (en) | 2005-01-25 |
CN101101869A (en) | 2008-01-09 |
JP2009164637A (en) | 2009-07-23 |
CN101101869B (en) | 2010-12-29 |
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