US20080087094A1 - Pressure Sensor - Google Patents
Pressure Sensor Download PDFInfo
- Publication number
- US20080087094A1 US20080087094A1 US11/860,289 US86028907A US2008087094A1 US 20080087094 A1 US20080087094 A1 US 20080087094A1 US 86028907 A US86028907 A US 86028907A US 2008087094 A1 US2008087094 A1 US 2008087094A1
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- United States
- Prior art keywords
- diaphragm
- pressure sensor
- radiation
- pressure
- sensor
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
Abstract
A pressure sensor includes a diaphragm having a displaceable elastic inner portion, wherein the inner portion displaces in response to a pressure difference between first and second sides of the diaphragm. A radiation source may be configured to transmit first and second beams of radiation. A light receiver may be configured to receive the first beam of radiation directly from the radiation source and the second beam of radiation after it reflects from the first side of the diaphragm. A control system may be coupled to the radiation source and light receiver and adapted to determine the pressure difference from the displacement of the diaphragm.
Description
- This application is a continuation of U.S. application Ser. No. 10/812,098, filed Mar. 30, 2004, which is incorporated by reference herein in its entirety.
- 1. Field of the Invention
- The invention relates to high sensitivity, high bandwidth, low pressure sensors and, more particularly, to the application of these devices in air gauges for use in, for example, lithography devices.
- 2. Related Art
- Conventional low pressure air gauges utilize mass flow sensors, which have relatively long response times, or low bandwidths, typically in the range of a tens of Hz. The relatively low bandwidths are not suitable for higher speed operations, such as, for example, lithography scanning applications.
- What are needed therefore are high sensitivity, low pressure air gauges having higher bandwidths than are presently available.
- The present invention is directed to high sensitivity, low pressure air gauges having higher bandwidths than are presently available.
- A pressure sensor in accordance with the invention includes a diaphragm having a substantially rigid outer portion and a displaceable inner portion that displaces in response to a pressure difference between first and second sides of the diaphragm. The pressure gauge further includes a sensor located proximate to the diaphragm and adapted to sense the displacement of the diaphragm inner portion. The pressure gauge further includes a monitor and control systems coupled to the sensor (wired or wireless), and adapted to determine the pressure difference from the displacement of the diaphragm.
- The present invention provides a variety of optional sensing designs including, without limitation, optical sensing designs and capacitive sensing designs.
- For low pressure applications, such as nanometer proximity sensors used in lithography applications, the operational pressure range of the sensor is approximately 0.1 to 0.5 inches of water. The resolution of the gauge pressure sensor is preferably approx. ˜0.001 Pa, this is approx. ˜4×10−5 inches H2O. This would allow the gauge to resolve a few nanometers. Note that 1 (one) inch H2O=254 Pascals.
- The diaphragm and sensor have a relatively high bandwidth and can thus be implemented in relatively high speed applications. The invention can be implemented in, for example, lithography proximity sensing equipment and lithography topographical mapping equipment.
- Additional features and advantages of the invention will be set forth in the description that follows. Yet further features and advantages will be apparent to a person skilled in the art based on the description set forth herein or may be learned by practice of the invention. The advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
- It is to be understood that both the foregoing summary and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed.
- The present invention will be described with reference to the accompanying drawings, wherein like reference numbers indicate identical or functionally similar elements. Also, the leftmost digit(s) of the reference numbers identify the drawings in which the associated elements are first introduced.
-
FIG. 1 is a side plan view of apressure sensor 100, including adiaphragm 102 and asensor 104. -
FIG. 2A . is a front plan view of thediaphragm 102. -
FIG. 2B is a side plan view of a substantially rigidouter portion 202 of thediaphragm 102. -
FIG. 2C is a side plan view of thediaphragm 102, including the substantially rigidouter portion 202, aninner portion 204, and aproximity sensor surface 206 shown distended as if under a differential pressure condition. -
FIG. 3 is a side perspective view of thepressure sensor 100, wherein thesensor 104 and a monitor andcontrol system 106 are implemented with a white-light interferometer. -
FIG. 4 is a side plan view of thepressure sensor 100, wherein thesensor 104 and the monitor andcontrol system 106 are implemented with an optical grazing angle sensor. -
FIG. 5 is a side plan view of thepressure sensor 100, wherein thesensor 104 includes acapacitive sensor 502, and theproximity surface 206 includes agrounded plate 504. -
FIG. 6 is a side plan view of anair system 600, including afirst leg 602 and asecond leg 604, and thepressure sensor 100 positioned in a bridge therebetween. -
FIG. 7 is a side plan view of thepressure sensor 100 implemented in aproximity sensor 700 used in, for example, lithography. -
FIG. 8 is a side plan view of thepressure sensor 100 implemented in aproximity sensor 800. - I. Introduction
- The present invention is directed to low pressure air gauges having higher bandwidths than are presently available. The present invention can be used in, for example, and without limitation, lithography proximity sensing and lithography topographical mapping.
- II High Bandwidth, Low Differential Pressure Sensing
-
FIG. 1 is a side plan view of apressure sensor 100 including a flexing plate ordiaphragm 102, a diaphragm displacement sensor 104 (hereinafter “sensor” 104) located proximate to thediaphragm 102, and a monitor andcontrol system 106 electrically coupled (wired or wireless) to thesensor 104. Thesensor 104 is proximate to the diaphragm, but not necessarily in physical contact with the diaphragm. - The
diaphragm 102 and thesensor 104 are positioned within abody 108, between afirst area 110 and asecond area 112. Thepressure sensor 100 determines a pressure difference between thefirst area 110 and thesecond area 112. -
FIG. 2A is a front plan view of thediaphragm 102. Thediaphragm 102 includes a substantially rigidouter portion 202, for coupling thediaphragm 102 to an inner wall 114 (FIG. 1 ) of thebody 108.FIG. 2B is a side plan view of the substantially rigidouter portion 202. The substantially rigidouter portion 202 is made from metal, plastic, or other suitable substantially rigid material, or combinations thereof. - Referring back to
FIG. 2A , thediaphragm 102 further includes a displaceableinner portion 204 that displaces in response to a pressure difference between the first andsecond areas 110 and 112 (FIG. 1 ). - The
inner portion 204 is a flexing-plate, membrane-based portion constructed of a semi-elastic material, such as, for example and without limitation, mylar, kapton, rubber, and/or combinations thereof. Theinner portion 204 expands in the direction of low pressure. Theinner portion 204 is designed to respond to ultra low differential pressure in the range of, for example, and without limitation, approximately 0.1 to 0.5 inches of water. Alternatively, theinner portion 204 is designed to respond to other pressure differential ranges. - The
inner portion 204 is attached to the substantially rigidouter portion 202 in one or more of a variety of manners including, without limitation, glue, integrally forming, heat sealing, chemical bonding, and the like. - The
inner portion 204 optionally includes aproximity sensor surface 206, wherein the sensor 104 (FIG. 1 ) is sensitive to movement of theproximity sensor surface 206. Theproximity sensor surface 206 can be theinner portion 204 or a coating or impregnation thereof. Example coatings and impregnations are disclosed in one or more sections below. -
FIG. 2C is a side plan view of thediaphragm 102, including the substantially rigidouter portion 202, theinner portion 204, and theproximity sensor surface 206 shown distended as if under a differential pressure condition. - In the example of
FIGS. 1 and 2 A, thebody 108 has a cylindrical shape, thus theouter portion 202 has a complementary circular shape. The invention is not, however, limited to the example circular shape illustrated herein. One skilled in the relevant art(s) will understand that other shapes can be utilized as well, including, without limitation, oval, elliptical, and polygon. - The
sensor 104 and theproximity sensor surface 206 can be implemented with one or more of a variety of technologies. Example implementations of thesensor 104 and theproximity sensor surface 206 are disclosed below. The invention is not, however, limited to these example implementations. Based on the teachings herein, one skilled in the relevant art(s) will understand that thesensor 104 and theproximity sensor surface 206 can be implemented with other technologies as well, which are within the scope of the present invention. - The
pressure sensor 100 is a relatively high bandwidth device. Depending upon the materials and circuitry employed, the pressure sensor can have a bandwidth in the several thousands of Hz. The present invention is thus useful in both relatively low speed applications, such as, for example, lithography proximity sensing, and in relatively higher speed applications, such as, for example, lithography topography mapping. - III. Interferometer Based Proximity Sensing
-
FIG. 3 is a side perspective view of thepressure sensor 100, wherein thesensor 104 and the monitor andcontrol system 106 are implemented with an interferometer. The interferometer utilizes theproximity surface 206 as a reflecting target. Changes in the deflection of theproximity surface 206 result in corresponding changes to reflected light patterns received by thesensor 104. A decoder within the monitor andcontrol system 106 determines the relative deflection of theproximity surface 206. The monitor andcontrol system 106 then converts the deflection measurement of theproximity surface 206 to a pressure difference between the first andsecond areas - The interferometer can be implemented with an off-the-shelf interferometer, including, but not limited to, a white light interferometer.
- IV. Optical Grazing Angle Proximity Sensing
-
FIG. 4 is a side plan view of thepressure sensor 100, wherein thesensor 104 and the monitor andcontrol system 106 are implemented with an optical grazing angle sensor as taught in, for example, T. Qui, “Fiber Optics Focus Sensors: Theoretical Model,” MIT Report, 2000, incorporated herein by reference in its entirety. - In operation, first and second
optical paths fibers optical path 402 is between the transmittingfiber 406 and the receivingfiber 408. The secondoptical path 404 is output from the transmittingfiber 406 and reflects off theproximity surface 206 before being received by the receivingfiber 408. A first beam of light transmitted from the transmittingfiber 406 and received by the receivingfiber 408, via the firstoptical path 402, and a second beam of light transmitted from the transmittingfiber 406 and received by the receivingfiber 408, via the secondoptical path 404, form a spatial diffraction pattern. The pattern is a function of the relative position of theproximity surface 206. - When the
proximity surface 206 deflects, illustrated inFIG. 4 as “diaphragm deflection” 410, the receivingfiber 408 receives intensity-modulated light from thesecond path 404. A decoder in the monitor andcontrol system 106 decodes the modulation and determines a relative deflection of theproximity surface 206. The monitor andcontrol system 106 then converts the deflection measurement of the proximity surface 206 (i.e., diaphragm deflection” 410) to a pressure difference between the first andsecond areas - In the example of
FIG. 4 , the transmittingfiber 406 includes optics that split a light from a light source into the first andsecond paths fiber 408 constantly shifts or moves. When theproximity surface 206 is motionless, the interference pattern moves with a constant speed. When theproximity surface 206 moves, the speed of the corresponding shifting interference pattern changes. A counter in the monitor andcontrol system 106 decodes the relative deflection of the diaphragm based on the pattern changes. The monitor andcontrol system 106 then converts the deflection measurement of theproximity surface 206 to a pressure difference between the first andsecond areas - V. Capacitive Proximity Sensing
-
FIG. 5 is a side plan view of thepressure sensor 100, wherein thesensor 104 includes acapacitive sensor 502, and theproximity surface 206 includes a groundedplate 504. The groundedplate 504 is made, at least in part, from conductive material such as metal. Thecapacitive sensor 502 is optionally located approximately 300 to 500 micrometers from the groundedplate 504. Gas, such as air, acts as a dielectric between thecapacitive sensor 502 and the groundedplate 504, thus forming a capacitor. The capacitance is a function of the distance of the groundedplate 504 from thecapacitive sensor 502. Changes in the deflection of thediaphragm 102 result in changes to the capacitance. The monitor andcontrol system 106 include circuitry, such as a tank circuit, for example, which generate an oscillation or modulation corresponding to the capacitive changes. The oscillation or modulation is then converted to a relative deflection measurement for the groundedplate 504. The monitor andcontrol system 106 then converts the deflection measurement of the groundedplate 504 to a pressure difference between the first andsecond areas - Capacitive sensors are well known and commercially available, although they are not known by the present inventors to have been used in conjunction with pressure sensors.
- VI. The Pressure Gauge as an Air Gauge
- The
pressure sensor 100 is optionally implemented as an air gauge that measures pressure changes caused by air flow. Such an air gauge is useful in, for example and without limitation, proximity sensors for lithography and topographical mapping for lithography. -
FIG. 6 is a front plan view of anair system 600, including afirst leg 602 and asecond leg 604. Thepressure sensor 100 is positioned in thebody 108, which forms a bridge between the first andsecond legs bridge 108 is coupled to the first and second legs by respective T-connections. - In the example of
FIG. 6 , the T-connections are essentially right angle T-connections. The invention is not, however, limited to right angle T-connections. Based on the description herein, one skilled in the relevant art(s) will understand that other angle connections can be used. - Air flow through the first and
second legs areas leg 602 differs from the air flow inleg 604, the resulting pressure difference betweenareas diaphragm 102 to deflect toward the area of lower pressure. Based on an initial calibration, the monitor andcontrol system 106 determines relative differences in air flow between the first andsecond legs - VII. Lithography Proximity Sensing
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FIG. 7 is a front plan view of aproximity sensor 700 used in, for example, lithography. Lithography proximity sensors are described in, for example, U.S. patent application Ser. No. 10/322,768, titled, “High-Resolution Gas Gauge Proximity Sensor,” filed Dec. 19, 2002, incorporated herein by reference in its entirety. An air gauge sensor is also taught in U.S. Pat. No. 4,953,388, titled, “Air Gauge Sensor,” issued Sep. 4, 1990, to Barada, incorporated herein by reference in its entirety. - In
FIG. 7 , theproximity sensor 700 includes the first andsecond legs first leg 602 is coupled to ameasurement probe 702. Thesecond leg 604 is coupled to areference probe 708. Thefirst leg 602 is a measurement leg, and thesecond leg 604 is a reference leg. The measurement probe is adjacent to a wafer orother work surface 704, with ameasurement gap 706 therebetween. The reference probe is adjacent to areference surface 704, with areference gap 712 therebetween. - The air flow in the first and
second legs areas measurement gap 706 changes relative to thereference gap 712, the air flow in thefirst leg 602 changes relative to the air flow in thesecond leg 604, causing a corresponding pressure change inarea 110 relative to thearea 112. The pressure change is sensed by thepressure sensor 100, as described in sections above. - Alternatively, the
reference leg 604 and thereference probe 708 are replaced with a reference pressure. For example,FIG. 8 is a side plan view of aproximity sensor 800, in which thereference leg 604 is replaced with areference pressure 802. Thereference pressure 802 can be an ambient pressure or a controlled pressure. - VIII. Conclusion
- The present invention has been described above with the aid of functional building blocks illustrating the performance of specified functions and relationships thereof. The boundaries of these functional building blocks have been arbitrarily defined herein for the convenience of the description. Alternate boundaries can be defined so long as the specified functions and relationships thereof are appropriately performed. Any such alternate boundaries are thus within the scope and spirit of the claimed invention. One skilled in the art will recognize that these functional building blocks can be implemented by discrete components, application specific integrated circuits, processors executing appropriate software and the like and combinations thereof.
- While various embodiments of the present invention have been described above, it should be understood that they have been presented by way of example only, and not limitation. Thus, the breadth and scope of the present invention should not be limited by any of the above-described exemplary embodiments, but should be defined only in accordance with the following claims and their equivalents.
Claims (9)
1. A pressure sensor, comprising:
a diaphragm having a displaceable elastic inner portion, wherein the inner portion displaces in response to a pressure difference between first and second sides of the diaphragm;
a radiation source configured to transmit first and second beams of radiation;
a light receiver configured to receive the first beam of radiation directly from the radiation source and the second beam of radiation after the second beam of radiation reflects from the first side of the diaphragm; and
a control system coupled to the radiation source and light receiver and adapted to determine the pressure difference from the displacement of the diaphragm.
2. The pressure sensor of claim 1 , wherein the diaphragm includes a diffusely reflecting metal film.
3. The pressure sensor of claim 1 , wherein the pressure sensor to measure at least one of gauge, absolute, or differential pressure.
4. The pressure sensor of claim 1 , further comprising an optically reflective coating on the first side of the diaphragm.
5. The pressure sensor of claim 1 , wherein the control system calculates the displacement of the diaphragm from an interference pattern generated from the first and second beams of radiation.
6. The pressure sensor of claim 5 , wherein the radiation source comprises a transmitting fiber having an output coupled to a diffraction device that separates a source light into the first and second beams of radiation, wherein changes in the diaphragm displacement cause the interference pattern to include intensity modulated light, wherein the control system calculates the diaphragm displacement from the intensity modulated light.
7. The pressure sensor of claim 1 , wherein the elastic inner portion comprises a polyimide film.
8. The pressure sensor of claim 1 , wherein the elastic inner portion comprises a thin polyester film.
9. The pressure sensor according to claim 1 , wherein the elastic inner portion comprises rubber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US11/860,289 US20080087094A1 (en) | 2004-03-30 | 2007-09-24 | Pressure Sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US10/812,098 US7272976B2 (en) | 2004-03-30 | 2004-03-30 | Pressure sensor |
US11/860,289 US20080087094A1 (en) | 2004-03-30 | 2007-09-24 | Pressure Sensor |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US10/812,098 Continuation US7272976B2 (en) | 2004-03-30 | 2004-03-30 | Pressure sensor |
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US20080087094A1 true US20080087094A1 (en) | 2008-04-17 |
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US10/812,098 Expired - Fee Related US7272976B2 (en) | 2004-03-30 | 2004-03-30 | Pressure sensor |
US11/860,289 Abandoned US20080087094A1 (en) | 2004-03-30 | 2007-09-24 | Pressure Sensor |
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US10/812,098 Expired - Fee Related US7272976B2 (en) | 2004-03-30 | 2004-03-30 | Pressure sensor |
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US (2) | US7272976B2 (en) |
EP (1) | EP1582852A3 (en) |
JP (2) | JP2005283588A (en) |
KR (2) | KR20060044896A (en) |
CN (2) | CN101398336A (en) |
SG (2) | SG115819A1 (en) |
TW (1) | TWI276791B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102021212018B3 (en) | 2021-10-25 | 2022-11-10 | Carl Zeiss Smt Gmbh | Projection exposure system, method for operating the projection exposure system |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7272976B2 (en) * | 2004-03-30 | 2007-09-25 | Asml Holdings N.V. | Pressure sensor |
US7134321B2 (en) | 2004-07-20 | 2006-11-14 | Asml Holding N.V. | Fluid gauge proximity sensor and method of operating same using a modulated fluid flow |
US7437938B2 (en) * | 2007-03-21 | 2008-10-21 | Rosemount Inc. | Sensor with composite diaphragm containing carbon nanotubes or semiconducting nanowires |
US7775118B2 (en) * | 2008-04-24 | 2010-08-17 | Custom Sensors & Technologies, Inc. | Sensor element assembly and method |
NL2003266A1 (en) * | 2008-08-11 | 2010-02-15 | Asml Holding Nv | Multi nozzle proximity sensor employing common sensing and nozzle shaping. |
JP5349997B2 (en) * | 2009-02-10 | 2013-11-20 | 株式会社ケネック | Optical displacement meter |
JP5669841B2 (en) * | 2009-07-31 | 2015-02-18 | エーエスエムエル ホールディング エヌ.ブイ. | Detection apparatus and method, and lithography system |
US20110069291A1 (en) * | 2009-09-11 | 2011-03-24 | Sogard Michael R | Physical sensor for autofocus system |
KR101045006B1 (en) * | 2009-09-17 | 2011-06-29 | 군산대학교산학협력단 | Calibration system and calibration method of multi-hole pressure probe |
CN102062665A (en) * | 2009-11-17 | 2011-05-18 | 刘保龙 | Mirror reflection type vacuum measurement device |
CN102824274A (en) * | 2012-08-30 | 2012-12-19 | 谭和平 | Automatic drinking bottle |
EP2901121B1 (en) * | 2012-09-28 | 2017-03-29 | BioFluidix GmbH | Capacitive pressure sensor |
EP2931334B1 (en) * | 2012-12-14 | 2017-08-09 | Gambro Lundia AB | Diaphragm repositioning for pressure pod using position sensing |
NO20130884A1 (en) | 2013-06-21 | 2014-12-22 | Sinvent As | Optical offset sensor element |
CN105092110A (en) * | 2014-05-06 | 2015-11-25 | 无锡华润上华半导体有限公司 | Pressure sensor and manufacturing method thereof |
AU2017319613A1 (en) * | 2016-09-01 | 2019-01-17 | Alcon Inc. | Systems and methods for non-invasive measurement of cassette pressure |
CN109414200B (en) * | 2017-12-25 | 2019-12-24 | 深圳市得道健康管理有限公司 | Surface strain detection device and surface strain sensor thereof |
KR102039426B1 (en) * | 2018-06-22 | 2019-11-27 | 한국표준과학연구원 | Air Floating Thin Film Thickness Measuring Apparatus |
CN108663157A (en) * | 2018-08-01 | 2018-10-16 | 桂林电子科技大学 | Michelson white light interference optical fibers hydrostatic sensor and measuring system |
WO2020190635A1 (en) | 2019-03-15 | 2020-09-24 | Nxstage Medical, Inc. | Pressure measurement devices, methods, and systems |
CN110082026B (en) * | 2019-03-26 | 2021-01-01 | 中山大学 | Air pressure detection device, manufacturing method thereof and air pressure detection method |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3477276A (en) * | 1967-11-15 | 1969-11-11 | Andre Louis Fortier | Differential pneumatic measuring or servo devices |
US4158310A (en) * | 1978-01-30 | 1979-06-19 | University Of Southern California | Optical pressure transducer of randomly distributed fiber optics |
US4428239A (en) * | 1980-10-27 | 1984-01-31 | Rosemount Engineering Company Limited | Differential pressure measuring apparatus |
US4499373A (en) * | 1981-06-09 | 1985-02-12 | Rosemount Engineering Company Limited | Differential pressure sensing apparatus |
US4521683A (en) * | 1981-03-20 | 1985-06-04 | The Boeing Company | Pressure-actuated optical switch |
US4648082A (en) * | 1985-03-04 | 1987-03-03 | Western Geophysical Company Of America | Marine acoustic gradient sensor |
US5317898A (en) * | 1992-09-21 | 1994-06-07 | Scantech Electronics Inc. | Method and apparatus for detecting thickness variation in sheet material |
US7010958B2 (en) * | 2002-12-19 | 2006-03-14 | Asml Holding N.V. | High-resolution gas gauge proximity sensor |
US7272976B2 (en) * | 2004-03-30 | 2007-09-25 | Asml Holdings N.V. | Pressure sensor |
US20090173170A1 (en) * | 2006-05-22 | 2009-07-09 | Politecnico Di Milano | Elastic joint with a translating spherical hinge and force and moment sensor improved by means of the said joint |
Family Cites Families (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1129317B (en) | 1960-10-14 | 1962-05-10 | Schenck Gmbh Carl | Load cell |
FR87526E (en) * | 1964-03-06 | 1966-06-24 | Onera (Off Nat Aerospatiale) | Subminiature pressure sensor |
US3625616A (en) * | 1969-06-25 | 1971-12-07 | Bendix Corp | Interferometric pressure sensor |
GB1374775A (en) | 1971-10-11 | 1974-11-20 | Bowles Fluidics Corp | Fluidic porximity sensor |
JPS4911356A (en) * | 1972-05-31 | 1974-01-31 | ||
DE2937485A1 (en) * | 1979-09-17 | 1981-06-19 | Siemens AG, 1000 Berlin und 8000 München | OPTICAL DEVICE FOR MEASURING LOW PRESSURE DIFFERENCES BY MEANS OF LIGHT INTENSITY CHANGE |
US4270560A (en) * | 1979-11-19 | 1981-06-02 | Kearney John G | Photo-electric burst disc indicator |
DE3206720A1 (en) * | 1982-02-25 | 1983-09-01 | Philips Patentverwaltung Gmbh, 2000 Hamburg | OPTICAL SENSOR |
US4550592A (en) * | 1984-05-07 | 1985-11-05 | Dechape Michel L | Pneumatic gauging circuit |
US4665747A (en) * | 1985-04-19 | 1987-05-19 | Muscatell Ralph P | Flight instrument using light interference for pressure sensing |
US4655086A (en) * | 1985-04-30 | 1987-04-07 | Iowa State University Research Foundation, Inc. | Method and means for measuring sound intensity |
US4933545A (en) * | 1985-12-30 | 1990-06-12 | Metricor, Inc. | Optical pressure-sensing system using optical resonator cavity |
JPS62168415U (en) * | 1986-04-17 | 1987-10-26 | ||
JPS639805A (en) * | 1986-06-30 | 1988-01-16 | Hitachi Electronics Eng Co Ltd | Positioning device by liquid injection |
JPS6421330A (en) * | 1987-07-16 | 1989-01-24 | Teijin Ltd | Pressure detector |
US4869282A (en) * | 1988-12-09 | 1989-09-26 | Rosemount Inc. | Micromachined valve with polyimide film diaphragm |
US4953388A (en) * | 1989-01-25 | 1990-09-04 | The Perkin-Elmer Corporation | Air gauge sensor |
US5252826A (en) * | 1991-12-30 | 1993-10-12 | Honeywell Inc. | Differential pressure utilizing opto-reflective sensor |
US5281782A (en) * | 1992-04-28 | 1994-01-25 | Campbell Hausfeld | Diaphragm pressure switch |
US6052613A (en) * | 1993-06-18 | 2000-04-18 | Terumo Cardiovascular Systems Corporation | Blood pressure transducer |
US5570428A (en) * | 1994-09-27 | 1996-10-29 | Tibbetts Industries, Inc. | Transducer assembly |
US5880841A (en) * | 1997-09-08 | 1999-03-09 | Erim International, Inc. | Method and apparatus for three-dimensional imaging using laser illumination interferometry |
US6014239C1 (en) * | 1997-12-12 | 2002-04-09 | Brookhaven Science Ass Llc | Optical microphone |
JP2000121323A (en) * | 1998-10-14 | 2000-04-28 | Hitachi Ltd | Inspection method for surface height and inspection device therefor, and color filter substrate and inspection method therefor and manufacturing thereof |
US6105436A (en) * | 1999-07-23 | 2000-08-22 | Mks Instruments, Inc. | Capacitive pressure transducer with improved electrode support |
US6496265B1 (en) * | 2000-02-16 | 2002-12-17 | Airak, Inc. | Fiber optic sensors and methods therefor |
JP2001255225A (en) * | 2000-03-10 | 2001-09-21 | Anelva Corp | Static capacitance type vacuum sensor |
US6738145B2 (en) * | 2000-04-14 | 2004-05-18 | Shipley Company, L.L.C. | Micromachined, etalon-based optical fiber pressure sensor |
CN2475015Y (en) * | 2001-03-02 | 2002-01-30 | 段祥照 | Capacitance differential pressure/pressure sensor |
AU2002256193A1 (en) * | 2001-04-11 | 2002-10-28 | Modern Optical Technologies Llc. | Method and apparatus for measuring pressure |
US6892583B2 (en) * | 2001-10-31 | 2005-05-17 | Rheosense, Inc. | Pressure sensing device for rheometers |
CN2537970Y (en) * | 2002-05-09 | 2003-02-26 | 奥诚喜 | Optical fibre pressure sensor |
US20040099060A1 (en) * | 2002-11-23 | 2004-05-27 | Johan Kijlstra | Device and method for characterizing a capillary system |
-
2004
- 2004-03-30 US US10/812,098 patent/US7272976B2/en not_active Expired - Fee Related
-
2005
- 2005-03-23 EP EP05006428A patent/EP1582852A3/en not_active Withdrawn
- 2005-03-28 TW TW094109658A patent/TWI276791B/en not_active IP Right Cessation
- 2005-03-29 KR KR1020050025821A patent/KR20060044896A/en not_active Application Discontinuation
- 2005-03-30 SG SG200501991A patent/SG115819A1/en unknown
- 2005-03-30 CN CNA2008101609721A patent/CN101398336A/en active Pending
- 2005-03-30 JP JP2005099342A patent/JP2005283588A/en active Pending
- 2005-03-30 SG SG200806575-7A patent/SG146616A1/en unknown
- 2005-03-30 CN CNB2005100627663A patent/CN100430707C/en not_active Expired - Fee Related
-
2007
- 2007-09-24 US US11/860,289 patent/US20080087094A1/en not_active Abandoned
-
2008
- 2008-07-02 KR KR1020080063725A patent/KR20080077057A/en not_active Application Discontinuation
- 2008-12-10 JP JP2008314267A patent/JP5033780B2/en not_active Expired - Fee Related
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3477276A (en) * | 1967-11-15 | 1969-11-11 | Andre Louis Fortier | Differential pneumatic measuring or servo devices |
US4158310A (en) * | 1978-01-30 | 1979-06-19 | University Of Southern California | Optical pressure transducer of randomly distributed fiber optics |
US4428239A (en) * | 1980-10-27 | 1984-01-31 | Rosemount Engineering Company Limited | Differential pressure measuring apparatus |
US4521683A (en) * | 1981-03-20 | 1985-06-04 | The Boeing Company | Pressure-actuated optical switch |
US4499373A (en) * | 1981-06-09 | 1985-02-12 | Rosemount Engineering Company Limited | Differential pressure sensing apparatus |
US4648082A (en) * | 1985-03-04 | 1987-03-03 | Western Geophysical Company Of America | Marine acoustic gradient sensor |
US5317898A (en) * | 1992-09-21 | 1994-06-07 | Scantech Electronics Inc. | Method and apparatus for detecting thickness variation in sheet material |
US7010958B2 (en) * | 2002-12-19 | 2006-03-14 | Asml Holding N.V. | High-resolution gas gauge proximity sensor |
US7272976B2 (en) * | 2004-03-30 | 2007-09-25 | Asml Holdings N.V. | Pressure sensor |
US20090173170A1 (en) * | 2006-05-22 | 2009-07-09 | Politecnico Di Milano | Elastic joint with a translating spherical hinge and force and moment sensor improved by means of the said joint |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102021212018B3 (en) | 2021-10-25 | 2022-11-10 | Carl Zeiss Smt Gmbh | Projection exposure system, method for operating the projection exposure system |
WO2023072745A1 (en) | 2021-10-25 | 2023-05-04 | Carl Zeiss Smt Gmbh | Projection exposure apparatus, method for operating the projection exposure apparatus |
Also Published As
Publication number | Publication date |
---|---|
SG115819A1 (en) | 2005-10-28 |
KR20060044896A (en) | 2006-05-16 |
CN100430707C (en) | 2008-11-05 |
CN101398336A (en) | 2009-04-01 |
CN1680794A (en) | 2005-10-12 |
JP2009085968A (en) | 2009-04-23 |
EP1582852A2 (en) | 2005-10-05 |
EP1582852A3 (en) | 2008-02-27 |
KR20080077057A (en) | 2008-08-21 |
TWI276791B (en) | 2007-03-21 |
JP5033780B2 (en) | 2012-09-26 |
JP2005283588A (en) | 2005-10-13 |
SG146616A1 (en) | 2008-10-30 |
US7272976B2 (en) | 2007-09-25 |
TW200535406A (en) | 2005-11-01 |
US20050217384A1 (en) | 2005-10-06 |
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