US20060086114A1

US20060086114A1 - Constant-temperature fluid supply system

Info

Publication number: US20060086114A1
Application number: US11/256,079
Authority: US
Inventors: Tetsuro Nishiyama; Takkaki Honda; Hideo Saito; Satoshi Yasuda; Hideki Takekuma
Original assignee: Nuflare Technology Inc
Current assignee: Nuflare Technology Inc
Priority date: 2004-10-25
Filing date: 2005-10-24
Publication date: 2006-04-27
Also published as: JP2006153429A

Abstract

A constant-temperature fluid supply system is provided with a first constant-temperature fluid supply apparatus and a second constant-temperature fluid supply apparatus. The first constant-temperature fluid supply apparatus has an input side to which a cooling fluid not controlled in temperature is supplied, and an output side from which a first constant-temperature fluid having a stable temperature is supplied. The second constant-temperature fluid supply apparatus has an input side to which the first constant-temperature fluid is supplied, and an output side from which a second constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority from prior Japanese Patent Applications No. 2004-309705, filed Oct. 25, 2004; and No. 2005-299606, filed Oct. 14, 2005 the entire contents of both of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention
The present invention relates to a constant-temperature fluid supply system adapted for use in a semiconductor manufacturing apparatus and configured to control the temperature of a target device with a high degree of accuracy.
2. Description of the Related Art
Devices that have to be kept at constant temperatures are provided with an internal fluid passage for constant-temperature water. By circulation of the constant-temperature water supplied from constant-temperature fluid supply sources, the devices can be kept in the constant-temperature state. In other words, the temperatures of the devices can be kept at a stable value by maintaining the thermal equilibrium between the devices and the constant-temperature water. As can be seen from this, in order to stabilize the temperatures of the devices with a high degree of accuracy, it is necessary to control the temperature of the constant-temperature water with a high degree of accuracy (Jpn. UM Appln. KOKAI Publication No 5-25190).
To control the temperature of the constant-temperature water with a high degree of accuracy, it is necessary to suppress the heat acting as external disturbances. Among the external disturbances, temperature variations of cooling water are a factor that may vary the temperature of the constant-temperature water. Normally, the water provided by the municipal water department (hereinafter referred to as tap water for the sake of simplicity) and the circulation water in plants are used as the cooling water. Those kinds of water are not controlled in temperature, and their temperatures inevitably vary. Due to the temperature variations of the cooling water, the constant-temperature water may also vary in temperature even if the setting temperature is constant.
This problem is marked in the case of the cooling water for use in a chiller unit. The tap water and the circulation water in plants are very likely vary in temperature due to changes in the ambient temperature. In some cases, they may undergo a temperature variation of about 10° C. in a day. Since this results in a change in the temperature of the constant-temperature water, the target devices cannot be controlled with a high degree of accuracy.
As discussed above, the conventional constant-temperature fluid supply apparatus has problems in that the temperature of the constant-temperature fluid varies due to temperature variations of the externally-provided cooling water.

BRIEF SUMMARY OF THE INVENTION

According to one aspect of the present invention, there is provided a constant-temperature fluid supply system comprising:
a first constant-temperature fluid supply apparatus having an input side to which a cooling fluid not controlled in temperature is supplied, and an output side from which a first constant-temperature fluid having a stable temperature is supplied; and
a second constant-temperature fluid supply apparatus having an input side to which the first constant-temperature fluid is supplied, and an output side from which a second constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied.
According to another aspect of the present invention, there is provided a constant-temperature fluid supply system configured to keep a first portion and a second portion of an object at predetermined temperatures, the constant-temperature fluid supply system comprising:
a first constant-temperature fluid supply apparatus having an input side to which a cooling fluid not controlled in temperature is supplied, and an output side from which a first constant-temperature fluid having a stable temperature is supplied, part of the first constant-temperature fluid being supplied to the first portion of the object; and
a second constant-temperature fluid supply apparatus having an input side to which remaining part of the first constant-temperature fluid is supplied, and an output side from which a second constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied.
According to still another aspect of the present invention, there is provided a constant-temperature fluid supply system configured to keep a first portion and a second portion of an object at predetermined temperatures, the constant-temperature fluid supply system comprising:
a first constant-temperature fluid supply apparatus having an input side to which a cooling fluid not controlled in temperature is supplied, and an output side from which a first constant-temperature fluid having a stable temperature is supplied; and
a second constant-temperature fluid supply apparatus having an input side to which the first constant-temperature fluid is supplied, and an output side from which a second constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied.
a third constant-temperature fluid supply apparatus having an input side to which the first constant-temperature fluid is supplied, and an output side from which a third constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied to the second portion of the object.
Additional objects and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objects and advantages of the invention may be realized and obtained by means of the instrumentalities and combinations particularly pointed out hereinafter.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention, and together with the general description given above and the detailed description of the embodiments given below, serve to explain the principles of the invention.
FIG. 1 is a schematic diagram showing a constant-temperature fluid supply system according to the first embodiment.
FIG. 2 shows a specific structure of the first constant-temperature fluid supply apparatus employed in the constant-temperature fluid supply system of the first embodiment.
FIG. 3 shows a specific structure of the second constant-temperature fluid supply apparatus employed in the constant-temperature fluid supply system of the first embodiment.
FIG. 4 shows another specific structure of the first constant-temperature fluid supply apparatus employed in the constant-temperature fluid supply system of the first embodiment.
FIG. 5 is a schematic diagram showing a constant-temperature fluid supply system according to the second embodiment.
FIG. 6 is a schematic diagram showing a constant-temperature fluid supply system according to the third embodiment.
FIG. 7 shows an example of an object whose temperature is to be kept constant by the constant-temperature fluid supply systems of the second and third embodiments.
FIG. 8 is a schematic diagram showing a constant-temperature fluid supply system according to the fourth embodiment.

DETAILED DESCRIPTION OF THE INVENTION

The present invention will now be described in detail, referring to the embodiments shown in the accompanying drawings.

First Embodiment

In FIG. 1, reference numeral 10 denotes a first constant-temperature fluid supply apparatus. Cooling water 101 (i.e., cooling fluid), which is tap water or circulation water in plants, is supplied to the input side of the apparatus 10. First constant-temperature water 102 (i.e., a first constant-temperature fluid) is output from the output side of the apparatus 10. Reference numeral 20 denotes a second constant-temperature fluid supply apparatus. First constant-temperature water 102 is supplied to the input side of the apparatus 20 as cooling water. Second constant-temperature water 103 (i.e., a second constant-temperature fluid) is output from the output side of the apparatus 20. The second constant-temperature water 103 is supplied to an external apparatus 30 (i.e., an apparatus whose temperature is to be kept constant), for maintaining its constant temperature.
The first and second constant-temperature fluid supply apparatuses 10 and 20 are connected together by means of a flexible connection hose and can be separated, if necessary. The second constant-temperature fluid supply apparatuses 20 and the external apparatus 30 are connected together by means of a flexible connection hose and can be separated, if necessary. The first constant-temperature water 102 circulates between the first and second constant-temperature fluid supply apparatuses 10 and 20. The second constant-temperature water 103 circulates between the second constant-temperature fluid supply apparatus 20 and the external apparatus 30.
The passage for the second constant-temperature water 103, i.e., the hose between the second constant-temperature fluid supply apparatus 20 and the external apparatus 30, is covered with a heat insulating material to prevent external thermal effects. The external apparatus 30 is installed in a temperature-controlled room.
As shown in FIG. 2, the first constant-temperature fluid supply apparatus 10 is provided with an evaporator and a condenser and utilizes heat exchange for maintaining a constant temperature. The constant-fluid supply apparatus 10 comprises a condenser 11, an evaporator 12, a compressor 13, an electromagnetic valve 15, a thermometer 16, a controller 17 and a pump 18.
The cooling water 101 supplied to the constant-temperature fluid supply apparatus 10 is used for cooling the condenser 11. After being cooled and adjusted in temperature by the evaporator 12, the constant-temperature water 102 is supplied to the constant-temperature fluid supply apparatus 20. The thermometer 16 is in the constant-temperature water passage and located on the output side of the evaporator 12. The setting temperature of the constant-temperature water 102 is entered to the controller 17, and a detection temperature which the thermometer 16 detects with respect to the constant-temperature water 102 is also supplied to the controller 17. Based on the difference between the setting temperature and the detection temperature, the controller 17 controls the openings of electromagnetic valves 14 and 15, thereby controlling the output of the evaporator 12. In this manner, the constant-temperature water 102 is kept at the setting temperature.
As shown in FIG. 3, the second constant-temperature fluid supply apparatus 20 employs a Peltier element 21 for maintaining the constant temperature with a high degree of accuracy. A passage 22 for permitting constant-temperature water 102 to flow is connected to the heat-waste side (input side) of the Peltier element 21, and a passage 23 for permitting constant-temperature water 103 to flow is connected to the heat-absorbent side (output side) of the Peltier element 21. With this structure, the Peltier element 21 is cooled by the constant-temperature water 102 having a comparatively stable temperature, and the Peltier element 21 cools the constant-temperature water 103 so that the water 103 has a very stable temperature.
Although not illustrated, the temperature of the water 102 on the heat-waste side of the Peltier element 21 is stable, and the water 103 on the heat-absorbent side can be kept constant by controlling the current supply. For strict control of the constancy, a temperature sensor 24 may be provided in the passage 23 at a position downstream of the Peltier element 21. In this case, the output of the temperature sensor 24 is fed back to the power supply 25 of the Peltier element 21, and the current supply to the Peltier element 21 is controlled in accordance with the temperature detected by the temperature sensor 24.
In addition to the temperature sensor 24 described above, another temperature sensor may be provided at the position where the external apparatus under temperature control is located. In accordance with the temperatures detected by these two temperature sensors, the current supply to the Peltier element 21 may be controlled.
In the first embodiment, the first constant-temperature fluid supply apparatus 10 uses is either tap water or circulation water in plants as the cooling water 101. Since this type of water undergoes a temperature variation of about 10° C., the temperature variation of water 102 may not be reduced to be less than 1/10° C. but can be 1/10° C. Since the first constant-temperature fluid supply apparatus 10 keeps the temperature of water 102 constant to a certain extent (to be less than 1/10° C.), and the water 102 whose temperature is controlled in this manner is used as the cooling water of the second constant-temperature fluid supply apparatus 20. Hence, the temperature of water 103 can be kept constant in a fully satisfactory manner. As a result, the temperature variation of water 103 can be reduced to be less than 1/100° C.
In the case where the processing capacity of the first constant-temperature fluid supply apparatus 10 was set at 400 W and 5 l/min, water 102 could be controlled to be 25° C±0.1° C. In addition to this, where the processing capacity of the second constant-temperature fluid supply apparatus 20 was set at 100 W and 5 l/min, water 103 could be controlled to be 25° C.±0.01° C.
Even an external apparatus 30 requiring highly accurate temperature control, such as the vacuum chamber of an electron beam exposure apparatus, can be stably kept at a constant temperature, without being adversely affected by the temperature variations of cooling water 101. In addition to this, since the second constant-temperature fluid supply apparatus 20 employs the Peltier element 21, it is small in size and enables very high temperature constancy. A plurality of Peltier elements 21 may be used. In this case, different portions of the external apparatus 30 can be independently controlled to have different temperatures.
The first and second constant-temperature fluid supply apparatuses 10 and 20 are connected together by means of a hose, and if one of them does not operate normally, it is merely replaced with a new or normally-operating apparatus. The time and cost required for restoration can be reduced, accordingly. Furthermore, the first and second constant-temperature fluid supply apparatuses 10 and 20 may be apparatuses having the same function.
The first constant-temperature fluid supply apparatus 10 may use an ordinary type of heat exchange, as shown in FIG. 4. In FIG. 4, reference numeral 43 denotes a heat exchanger, reference numeral 46 denotes a thermometer, reference numeral 47 denotes a controller, and reference numeral 48 denotes a pump. In the case of the apparatus shown in FIG. 4, the controller 47 controls the flow rate of cooling water 101 in accordance with the temperature the thermometer 46 measures, and the temperature of water 102 can be controlled, accordingly.

Second Embodiment

FIG. 5 is a schematic diagram showing a constant-temperature fluid supply system according to the second embodiment. In FIG. 5, similar or corresponding structural elements are denoted by the same reference numerals as used in FIG. 1, and a detailed description of such structural elements will be omitted herein.
The second embodiment differs from the first embodiment in that the first constant-temperature water 102 from the first constant-temperature fluid supply apparatus 10 is supplied to not only to the second constant-temperature fluid supply apparatus 20 but also to an external apparatus 301. In other words, part of the first constant-temperature water 102 is circulated between the first fluid supply apparatus 10 and the external apparatus 301. With this structure, the temperature of external apparatus 301 can be kept at a constant value to a certain extent (the temperature of external apparatus 301 cannot be so accurately controlled as the temperature of external apparatus 30).
It is comparatively easy to improve the cooling performance of the first constant-temperature fluid supply apparatus 10. This is why the passage of the constant-temperature water 102 can be branched into sections connected to different apparatuses, without causing any problems. External apparatuses 30 and 301 may be different positions of the same electron beam drawing apparatus. For example, external apparatus 30 may be a sample chamber or an electronic lens barrel. External apparatus 301 is, for example, an apparatus portion that generates much heat but does not require highly-controlled temperature accuracy.

Third Embodiment

FIG. 6 is a schematic diagram showing a constant-temperature fluid supply system according to the third embodiment. In FIG. 6, similar or corresponding structural elements are denoted by the same reference numerals as used in FIG. 1, and a detailed description of such structural elements will be omitted herein.
The third embodiment differs from the first embodiment in that second constant-temperature fluid supply apparatuses 201 and 202 are provided in addition to the second constant-temperature fluid supply apparatus 20. In other words, three second constant-temperature fluid supply apparatuses 20, 201 and 202 are employed to keep the temperatures of external apparatuses 30, 301 and 302 at constant values.
In the third embodiment, the first constant-temperature water 102 is supplied to three apparatuses, namely constant-temperature fluid supply apparatus 20, constant-temperature fluid supply apparatus 201 and constant-temperature fluid supply apparatus 202. As in the first embodiment, each of the constant-temperature fluid supply apparatuses 20, 201 and 202 comprises a Peltier element.
The second constant-temperature water 103 supplied from the output side of constant-temperature fluid supply apparatus 20 flows to external apparatus 30 and keeps this external apparatus at a constant temperature. The second constant-temperature water 104 supplied from the output side of constant-temperature fluid supply apparatus 201 flows to external apparatus 301 and keeps this external apparatus at a constant temperature. The second constant-temperature water 105 supplied from the output side of constant-temperature fluid supply apparatus 202 flows to the external apparatus 302 and keeps this external apparatus at a constant temperature.
FIG. 7 is a diagram schematically showing an electron beam exposure apparatus whose temperature is to be kept constant. In FIG. 7, reference numeral 71 denotes a sample chamber, reference numeral 72 denotes an electronic lens barrel, reference numeral 73 denotes a Z sensor configured to detect the height level of the sample surface, reference numeral 74 denotes a deflection amplifier used for driving a deflector provided inside the electronic lens barrel, and reference numeral 75 denotes an external power supply. By using the constant-temperature fluid supply system shown in FIG. 5 or 6, the temperatures at portions of the electron beam exposure apparatus can be controlled independently of one another.
For example, the constant-temperature water 103 which the constant-temperature fluid supply apparatus 20 supplies to the sample chamber 71 is controlled at 25° C.±0.01° C. The constant-temperature water 104 which the constant-temperature fluid supply apparatus 201 supplies to the electronic lens barrel 72 and Z sensor 73 is controlled at 24° C.±0.01° C. The constant-temperature water 105 which the constant-temperature fluid supply apparatus 202 supplies to the deflection amplifier 74 is controlled to be in the range of 20° C. to 30° C.±0.01° C. The constant-temperature water 102 which the first constant-temperature fluid supply apparatus 10 supplies to the power supply 75 is controlled to be in the range of 20° C. to 30° C.±0.1° C.
The constant-temperature fluid supplied to the electronic lens barrel 72 and Z sensor 73 is set at a temperature slightly lower than that of the constant-temperature fluid supplied to the sample chamber 71, because the electronic lens barrel 72 and Z sensor 73 have a heat generating section. The temperature of the differential amplifier 74 has to be controlled with high accuracy, but the temperature itself need not limited to a specific value. The temperature of the external power supply 75 need not be controlled with high accuracy. Since the external power supply 75 merely needs to be cooled to some extent, the supply of water 102 is sufficient.
As described above, a plurality of constant-temperature fluid supply apparatuses are selectively used to control the temperatures of portions of an object in accordance with the heat the object portions may generate and the temperature control range the object portions may require. The use of a plurality of constant-temperature fluid supply apparatuses enables efficient temperature control.

Fourth Embodiment

FIG. 8 is a schematic diagram showing a constant-temperature fluid supply system according to the fourth embodiment. In FIG. 8, similar or corresponding structural elements are denoted by the same reference numerals as used in FIG. 1, and a detailed description of such structural elements will be omitted herein.
The fourth embodiment differs from the first embodiment in that the first constant-temperature fluid supply apparatus 10 and the second constant-temperature fluid supply apparatus 20 are connected directly to each other and are integrally assembled together. To be more specific, the first and second constant-temperature fluid supply apparatuses are fixed to the same base 50, and the output side of fluid supply apparatus 10 and the input side of fluid supply apparatus 20 are coupled together.
With this structure, the fourth embodiment produces similar advantages to those of the first embodiment. In addition to this, the entire system can be small in size because the first and second constant-temperature fluid supply apparatuses 10 and 20 are integrally assembled as one body.

Modification

The present invention is not limited to the embodiments described above. In the embodiments described above, the first constant-temperature fluid supply apparatus is provided with either (i) a cooling mechanism including the evaporator and condenser shown in FIG. 2, or (ii) a cooling mechanism including the heat exchanger shown in FIG. 4. The present invention is not limited to these configurations and may be varied as needed. The first constant-temperature fluid supply apparatus does not require such high precision as needed by the second constant-temperature fluid supply apparatus, so that the former apparatus is preferably made of a low-cost apparatus. The second constant-temperature fluid supply apparatus employs a Peltier element, but may be of any type as long as highly accurate control is ensured.
The constant-temperature fluid is not limited to water but may be another kind of liquid. In addition, the cooling water used with the first constant-temperature fluid supply apparatus may be replaced with a gas. To be more specific, the heat-waste side of the first constant-temperature fluid supply apparatus may be cooled by the air by providing a cooling fan.
Additional advantages and modifications will readily occur to those skilled in the art. Therefore, the invention in its broader aspects is not limited to the specific details and representative embodiments shown and described herein. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

Claims

1. A constant-temperature fluid supply system comprising:

a first constant-temperature fluid supply apparatus having an input side to which a cooling fluid not controlled in temperature is supplied, and an output side from which a first constant-temperature fluid having a stable temperature is supplied; and

a second constant-temperature fluid supply apparatus having an input side to which the first constant-temperature fluid is supplied, and an output side from which a second constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied.

2. The constant-temperature fluid supply system according to claim 1, wherein the first constant-temperature fluid supply apparatus comprises a cooling mechanism including an evaporator and a condenser, the cooling fluid and the first constant-temperature fluid exchange heat, the input side of the first constant-temperature fluid is a heat-waste side where a passage of the cooling fluid is formed, and the output side of the first constant-temperature fluid is a cooling side where a passage of the first constant-temperature fluid is formed.

3. The constant-temperature fluid supply system according to claim 1, wherein the second constant-temperature fluid supply apparatus includes a Peltier element having input and output sides, the input side of the Peltier element is a heat-waste side where a passage of the first constant-temperature fluid is formed, and the output side of the Peltier element is a heat-absorbent side where a passage of the second constant-temperature fluid is formed.

4. The constant-temperature fluid supply system according to claim 3, wherein the second constant-temperature fluid supply apparatus further includes at least one Peltier element in addition to said Peltier element, and the second constant-temperature fluid supply apparatus supplies second constant-temperature fluids of different temperatures.

5. The constant-temperature fluid supply system according to claim 1, wherein the first constant-temperature fluid is controlled such that the temperature thereof is ±0.1° C. of a setting temperature, and the second constant-temperature fluid is controlled such that the temperature thereof is ±0.01° C. of a setting temperature.

6. The constant-temperature fluid supply system according to claim 1, wherein the second constant-temperature fluid is supplied to an object whose temperature is to be controlled, and a passage between the second constant-temperature fluid supply apparatus and the object is thermally insulated by a heat insulator.

7. A constant-temperature fluid supply system configured to keep a first portion and a second portion of an object at predetermined temperatures, said constant-temperature fluid supply system comprising:

a first constant-temperature fluid supply apparatus having an input side to which a cooling fluid not controlled in temperature is supplied, and an output side from which a first constant-temperature fluid having a stable temperature is supplied, part of the first constant-temperature fluid being supplied to the first portion of the object; and

a second constant-temperature fluid supply apparatus having an input side to which remaining part of the first constant-temperature fluid is supplied, and an output side from which a second constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied.

8. The constant-temperature fluid supply system according to claim 7, wherein the first constant-temperature fluid supply apparatus comprises a cooling mechanism including an evaporator and a condenser, the cooling fluid and the first constant-temperature fluid exchange heat, the input side of the first constant-temperature fluid is a heat-waste side where a passage of the cooling fluid is formed, and the output side of the first constant-temperature fluid is a cooling side where a passage of the first constant-temperature fluid is formed.

9. The constant-temperature fluid supply system according to claim 7, wherein the second constant-temperature fluid supply apparatus includes a Peltier element having input and output sides, the input side of the Peltier element is a heat-waste side where a passage of the first constant-temperature fluid is formed, and the output side of the Peltier element is a heat-absorbent side where a passage of the second constant-temperature fluid is formed.

10. The constant-temperature fluid supply system according to claim 9, wherein the second constant-temperature fluid supply apparatus further includes at least one Peltier element in addition to said Peltier element, and the second constant-temperature fluid supply apparatus supplies second constant-temperature fluids of different temperatures.

11. The constant-temperature fluid supply system according to claim 7, wherein the first constant-temperature fluid is controlled such that the temperature thereof is ±0.1° C. of a setting temperature, and the second constant-temperature fluid is controlled such that the temperature thereof is ±0.01° C. of a setting temperature.

12. The constant-temperature fluid supply system according to claim 7, wherein a passage between the second constant-temperature fluid supply apparatus and the object is thermally insulated by a heat insulator.

13. A constant-temperature fluid supply system configured to keep a first portion and a second portion of an object at predetermined temperatures, said constant-temperature fluid supply system comprising:

a third constant-temperature fluid supply apparatus having an input side to which the first constant-temperature fluid is supplied, and an output side from which a third constant-temperature fluid having a more stable temperature than that of the first constant-temperature fluid is supplied to the second portion of the object.

14. The constant-temperature fluid supply system according to claim 13, wherein the second constant-temperature fluid supplied from the second fluid constant-temperature fluid supply apparatus and the third constant-temperature fluid supplied from the third constant-temperature fluid supply apparatus are set at different temperatures.

15. The constant-temperature fluid supply system according to claim 13, wherein the first constant-temperature fluid supply apparatus comprises a cooling mechanism including an evaporator and a condenser, the cooling fluid and the first constant-temperature fluid exchange heat, the input side of the first constant-temperature fluid is a heat-waste side where a passage of the cooling fluid is formed, and the output side of the first constant-temperature fluid is a cooling side where a passage of the first constant-temperature fluid is formed.

16. The constant-temperature fluid supply system according to claim 13, wherein each of the second and third constant-temperature fluid supply apparatuses includes a Peltier element having input and output sides, the input side of the Peltier element is a heat-waste side where a passage of the first constant-temperature fluid is formed, and the output side of the Peltier element is a heat-absorbent side where a passage of the second constant-temperature fluid is formed.

17. The constant-temperature fluid supply system according to claim 13, wherein the first constant-temperature fluid is controlled such that the temperature thereof is ±0.1° C. of a setting temperature, and the second and third constant-temperature fluids are controlled such that the temperatures thereof are ±0.01° C. of setting temperatures.

18. The constant-temperature fluid supply system according to claim 13, wherein a passage between the second constant-temperature fluid supply apparatus and the object and a passage between the third constant-temperature fluid supply apparatus and the object are thermally insulated by a heat insulator.