US20030197139A1 - Valve for use in microfluidic structures - Google Patents

Valve for use in microfluidic structures Download PDF

Info

Publication number
US20030197139A1
US20030197139A1 US10/438,257 US43825703A US2003197139A1 US 20030197139 A1 US20030197139 A1 US 20030197139A1 US 43825703 A US43825703 A US 43825703A US 2003197139 A1 US2003197139 A1 US 2003197139A1
Authority
US
United States
Prior art keywords
valve
layer
channel
flexible layer
rigid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/438,257
Inventor
Clinton Williams
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Revvity Health Sciences Inc
Original Assignee
Micronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Inc filed Critical Micronics Inc
Priority to US10/438,257 priority Critical patent/US20030197139A1/en
Publication of US20030197139A1 publication Critical patent/US20030197139A1/en
Assigned to PERKINELMER HEALTH SCIENCES, INC. reassignment PERKINELMER HEALTH SCIENCES, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MICRONICS, INC.
Abandoned legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/433—Mixing tubes wherein the shape of the tube influences the mixing, e.g. mixing tubes with varying cross-section or provided with inwardly extending profiles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B01F25/42—Static mixers in which the mixing is affected by moving the components jointly in changing directions, e.g. in tubes provided with baffles or obstructions
    • B01F25/43—Mixing tubes, e.g. wherein the material is moved in a radial or partly reversed direction
    • B01F25/433—Mixing tubes wherein the shape of the tube influences the mixing, e.g. mixing tubes with varying cross-section or provided with inwardly extending profiles
    • B01F25/4331—Mixers with bended, curved, coiled, wounded mixing tubes or comprising elements for bending the flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B01F33/3039—Micromixers with mixing achieved by diffusion between layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/45—Magnetic mixers; Mixers with magnetically driven stirrers
    • B01F33/451—Magnetic mixers; Mixers with magnetically driven stirrers wherein the mixture is directly exposed to an electromagnetic field without use of a stirrer, e.g. for material comprising ferromagnetic particles or for molten metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5023—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures with a sample being transported to, and subsequently stored in an absorbent for analysis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5025—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures for parallel transport of multiple samples
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502715—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F15C3/04—Circuit elements having moving parts using diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F15C3/06—Circuit elements having moving parts using balls or pill-shaped disks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0013—Rotary valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0017—Capillary or surface tension valves, e.g. using electro-wetting or electro-capillarity effects
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0023—Constructional types of microvalves; Details of the cutting-off member with ball-shaped valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0046—Electric operating means therefor using magnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0059—Operating means specially adapted for microvalves actuated by fluids actuated by a pilot fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
    • B01F31/44—Mixers with shaking, oscillating, or vibrating mechanisms with stirrers performing an oscillatory, vibratory or shaking movement
    • B01F31/441—Mixers with shaking, oscillating, or vibrating mechanisms with stirrers performing an oscillatory, vibratory or shaking movement performing a rectilinear reciprocating movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06—Fluid handling related problems
    • B01L2200/0636—Focussing flows, e.g. to laminate flows
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/10—Integrating sample preparation and analysis in single entity, e.g. lab-on-a-chip concept
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/06—Auxiliary integrated devices, integrated components
    • B01L2300/0627—Sensor or part of a sensor is integrated
    • B01L2300/0636—Integrated biosensor, microarrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0822—Slides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0867—Multiple inlets and one sample wells, e.g. mixing, dilution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0887—Laminated structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0406—Moving fluids with specific forces or mechanical means specific forces capillary forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0409—Moving fluids with specific forces or mechanical means specific forces centrifugal forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/043—Moving fluids with specific forces or mechanical means specific forces magnetic forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0457—Moving fluids with specific forces or mechanical means specific forces passive flow or gravitation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0633—Valves, specific forms thereof with moving parts
    • B01L2400/0655—Valves, specific forms thereof with moving parts pinch valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0688—Valves, specific forms thereof surface tension valves, capillary stop, capillary break
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N2035/00178—Special arrangements of analysers
    • G01N2035/00237—Handling microquantities of analyte, e.g. microvalves, capillary networks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N2035/00465—Separating and mixing arrangements
    • G01N2035/00534—Mixing by a special element, e.g. stirrer
    • G01N2035/00544—Mixing by a special element, e.g. stirrer using fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/0098—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor involving analyte bound to insoluble magnetic carrier, e.g. using magnetic separation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves

Definitions

  • This invention relates generally to microscale devices for performing analytical testing and, in particular, to a valve for use in laminated plastic microfluidic structures.
  • Microfluidic devices have recently become popular for performing analytical testing. Using tools developed by the semiconductor industry to miniaturize electronics, it has become possible to fabricate intricate fluid systems which can be inexpensively mass produced. Systems have been developed to perform a variety of analytical techniques for the acquisition of information for the medical field.
  • Microfluidic devices may be constructed in a multi-layer laminated structure where each layer has channels and structures fabricated from a laminate material to form microscale voids or channels where fluids flow.
  • a microscale channel is generally defined as a fluid passage which has at least one internal cross-sectional dimension that is less than 100 ⁇ m and typically between about 0.1 ⁇ m and about 500 ⁇ m. The control and pumping of fluids through these channels is affected by either external pressurized fluid forced into the laminate, or by structures located within the laminate.
  • U.S. Pat. No. 4,895,500 which issued on Jan. 23, 1990, describes a silicon micromechanical non-reverse valve which consists of a cantilever beam extending over a cavity and integrally formed with the silicon wafer such that the beam can be shifted to control flow within channels of the microfluidic structure.
  • U.S. Pat. No. 5,443,890 which issued Aug. 22, 1995 to Pharmacia Biosensor AB, describes a sealing device in a microfluidic channel assembly having first and second flat surface members which when pressed against each other define at least part of a microfluidic channel system between them.
  • U.S. Pat. No. 5,593,130 which issued on Jan. 14, 1997 to Pharmacia Biosensor AB, describes a valve for use in microfluidic structures in which the material fatigue of the flexible valve membrane and the valve seat is minimized by a two-step seat construction and the fact that both the membrane and the seat are constructed from elastic material.
  • U.S. Pat. No. 5,932,799 which issued Aug. 3, 1999 to YSI Incorporated, teaches a microfluidic analyzer module having a plurality of channel forming laminate layers which are directly bonded together without adhesives, with a valve containing layer directly adhesivelessly bonded over the channel containing layers and a flexible valve member integral with the valve layer to open and close communication between feed and sensor channels of the network.
  • U.S. Pat. No. 5,977,355 which issued on Oct. 26, 1999 to Xerox Corporation, describes a valve array system for microdevices based on microelectro mechanical systems (MEMS) technology consisting of a dielectric material forming a laminate which is embedded within multiple laminate layers.
  • MEMS microelectro mechanical systems
  • U.S. Pat. No. 6,068,751 which issued on May 30, 2000, describes a microfluidic delivery system using elongated capillaries that are enclosed along one surface by a layer of malleable material which is shifted by a valve having a electrically-powered actuator.
  • U.S. patent application Ser. No. 09/677,250, filed Oct. 2, 2000, and assigned to the assignee of the present invention describes a one way check valve for use in laminated plastic microfluidic structures. This valve allows one way flow through microfluidic channels for use in mixing, dilution, particulate suspension and other techniques necessary for flow control in analytical devices.
  • valves are commonly used for fluid management in flow systems. Flap valves, ball-in-socket valves, and tapered wedge valves are a few of the valve types existing in the macroscale domain of fluid control.
  • flow channels are often the size of a human hair (approximately 100 microns in diameter)
  • valves which are unique to microscale systems, especially microfluidic devices incorporating fluids with various concentrations of particulate in suspension.
  • Special challenges involve mixing, dilution, fluidic circuit isolation, and anti-sediment techniques when employing microscale channels within a device.
  • the incorporation of a simple compact valve within microscale devices addresses these potential problems while maintaining high density of fluidic structure within the device.
  • It is a further object of the present invention is to provide a microfluidic valve which can be integrated into a cartridge constructed of multi-layer laminates.
  • It is a further object of the present invention is to provide an array of microfluidic valves that can be integrated into a cartridge constructed of multi-layer laminates.
  • FIG. 1 is a fragmentary cross-sectional view of a microfluidic device containing a basic ball bearing valve according to the present invention
  • FIG. 2 is a fragmentary cross-sectional view of the valve of FIG. 1 shown in its activated position
  • FIG. 3 is a fragmentary cross-sectional view of another embodiment of a ball bearing valve according to the present invention.
  • FIG. 4 is a perspective view of a microfluidic array which uses a plurality of ball bearing valves according to the present invention.
  • FIG. 1 there is shown a microfluidic valve assembly, generally indicated at 10 , which contains a valve constructed according to the present invention.
  • Assembly 10 includes a spherical member or ball bearing 12 which is located within a channel 14 formed between a rigid top layer 16 and a rigid interior layer 18 within assembly 10 .
  • Layer 16 and layer 18 each contain a cutout area 20 and 22 respectively within which ball bearing 12 is contained in channel 14 .
  • Rigid layers 16 , 18 may be constructed from a material such as MYLAR.
  • Spherical member 12 may be constructed from metal, hard plastic, or any other similar material.
  • a membrane 24 constructed of a flexible material is located adjacent layer 18 opposite channel 14 .
  • Membrane 24 which is preferably made from a thin elastomeric material, completely isolates channel 14 from a channel 26 by spanning across cutout area 22 .
  • One suitable material that may be used for membrane 24 is polyvinylidene chloride (PVDC) which is the material commonly used as SARAN WRAP® film.
  • PVDC polyvinylidene chloride
  • Channel 26 is capable of carrying fluids within 10 assembly 10 , and in the present embodiment is formed by a narrow section 26 a and a wider section 26 b .
  • Channel section 26 b is formed by layer 18 along with adjacent membrane 24 , and a rigid bottom layer 28 , while section 26 a is located within membrane 24 and an additional rigid layer 30 adjacent bottom layer 28 .
  • the flow of a fluid traveling within channel 26 can be controlled within assembly 10 by spherical member 10 .
  • member 12 is shifted by a sufficient force in the direction shown by arrow A.
  • This force may be applied manually using the finger of a human operator, or by any suitable mechanical means as known in the art.
  • This movement causes flexible membrane 24 to contact bottom layer 28 , closing channel 26 to any fluid movement between channel section 26 a and section 26 b .
  • layer 18 acts to aid in centering member 12 in the process of activating valve assembly 10 , as member 12 is essentially captured within cutout area 22 of layer 18 .
  • the operating force is removed from member 12 , said member is shifted back to its unactuated position as shown in FIG. 1 by virtue of the elastomeric property of membrane 24 .
  • FIG. 3 illustrates a second embodiment of a valve assembly constructed according to the present invention. It will be understood that similar parts will be given the same index numerals.
  • a valve assembly 10 a having a spherical member 12 located within a channel 14 which is formed between a layer 18 and an elastomeric layer 16 a.
  • Elastomeric membrane 24 is located adjacent layer 18 opposite channel 14 , while spherical member 12 is situated in cutout section 22 within layer 18 and contacts member 24 at this location, as was previously shown in FIG. 1.
  • Channel 26 which consists of a narrow section 26 a and a wider section 26 b , is formed between membrane 24 and bottom layer 28 , and is capable of carrying fluids within a microfluidic circuit.
  • An upper channel 36 is formed within assembly 10 a between layer 16 a and a rigid upper layer 38 .
  • Channel 36 contains a fluid which is capable of providing a force capable of activating valve assembly 10 a .
  • fluid flowing in the direction of arrow B will flow over spherical member 12 , which is located beneath layer 16 a.
  • valve assembly 10 a To operate valve assembly 10 a , if the force generated by a fluid flowing in direction B within channel 36 , the fluid will force membrane 24 downwardly in the direction of arrow A, causing member 12 to shift and causing membrane 24 to contact layer 28 , closing channel 26 to any fluid movement between channel 26 a and 26 b .
  • member 12 When the flow of the fluid within channel 36 is reduced such that the force acting upon member 12 is less than that force exerted by membrane 24 on the lower part of member 12 , member 12 will return to the position shown in FIG. 3, and thus allowing fluid flow within channel 26 .
  • the valve assembly of the present invention can also be used to control a microfluidic array.
  • Array 50 consists of a lower array section 52 and an upper array section 54 .
  • Section 52 contains a plurality of spaced apart indentations 56 which are sized to contain a plurality of spherical members 12 as taught in FIGS. 1 - 3 .
  • a microfluidic circuit (not shown) which is constructed having channels similar to that shown in FIG. 3. This circuit may be designed to perform many functions which are familiar to those skilled in the art of microfluidic circuitry design.
  • Section 54 may be constructed similar to the valve circuitry shown in FIG. 3 in that the lower surface is constructed for a elastomeric material which is deformed by spherical members 12 when the valves are in the inactive position.
  • the control of the operation of the valves may be done using fluidic channels, similar to channel 36 in FIG. 3, or operation of the valves may also be accomplished using common electrical, magnetic, or pneumatic means, as is well known in the art.
  • Control means 60 may be a computer or programmable control or the like, or any device familiar to those skilled in the art. Or, alternatively, array 50 could be inserted as a cartridge into a separate machine which would control operation of the valves within the array.

Abstract

A valve for use in microfluidic structures. The valve uses a spherical member, such as a ball bearing, to depress an elastomeric member to selectively open and close a microfluidic channel. The valve may be operated manually or by use of an internal force generated to shift the spherical member to its activated position.

Description

    CROSS-REFERENCE TO RELATED APPLICATIONS
  • This patent application claims benefit from U.S. Provisional Patent Application Serial No. 60/213,865, filed Jun. 23, 2000, which application is incorporated herein by reference.[0001]
    • BACKGROUND OF THE INVENTION
  • 1. Field of the Invention [0002]
  • This invention relates generally to microscale devices for performing analytical testing and, in particular, to a valve for use in laminated plastic microfluidic structures. [0003]
  • 2. Description of the Prior Art [0004]
  • Microfluidic devices have recently become popular for performing analytical testing. Using tools developed by the semiconductor industry to miniaturize electronics, it has become possible to fabricate intricate fluid systems which can be inexpensively mass produced. Systems have been developed to perform a variety of analytical techniques for the acquisition of information for the medical field. [0005]
  • Microfluidic devices may be constructed in a multi-layer laminated structure where each layer has channels and structures fabricated from a laminate material to form microscale voids or channels where fluids flow. A microscale channel is generally defined as a fluid passage which has at least one internal cross-sectional dimension that is less than 100 μm and typically between about 0.1 μm and about 500 μm. The control and pumping of fluids through these channels is affected by either external pressurized fluid forced into the laminate, or by structures located within the laminate. [0006]
  • Many different types of valves for use in controlling fluids in microscale devices have been developed. U.S. Pat. No. 4,895,500, which issued on Jan. 23, 1990, describes a silicon micromechanical non-reverse valve which consists of a cantilever beam extending over a cavity and integrally formed with the silicon wafer such that the beam can be shifted to control flow within channels of the microfluidic structure. [0007]
  • U.S. Pat. No. 5,443,890, which issued Aug. 22, 1995 to Pharmacia Biosensor AB, describes a sealing device in a microfluidic channel assembly having first and second flat surface members which when pressed against each other define at least part of a microfluidic channel system between them. [0008]
  • U.S. Pat. No. 5,593,130, which issued on Jan. 14, 1997 to Pharmacia Biosensor AB, describes a valve for use in microfluidic structures in which the material fatigue of the flexible valve membrane and the valve seat is minimized by a two-step seat construction and the fact that both the membrane and the seat are constructed from elastic material. [0009]
  • U.S. Pat. No. 5,932,799, which issued Aug. 3, 1999 to YSI Incorporated, teaches a microfluidic analyzer module having a plurality of channel forming laminate layers which are directly bonded together without adhesives, with a valve containing layer directly adhesivelessly bonded over the channel containing layers and a flexible valve member integral with the valve layer to open and close communication between feed and sensor channels of the network. [0010]
  • U.S. Pat. No. 5,962,081, which issued Oct. 5, 1999 to Pharmacia Biotech AB, describes a method for the manufacturer of polymer membrane-containing microstructures such as valves by combining polymer spin deposition methods with semiconductor manufacturing techniques. [0011]
  • U.S. Pat. No. 5,977,355, which issued on Oct. 26, 1999 to Xerox Corporation, describes a valve array system for microdevices based on microelectro mechanical systems (MEMS) technology consisting of a dielectric material forming a laminate which is embedded within multiple laminate layers. [0012]
  • U.S. Pat. No. 6,068,751, which issued on May 30, 2000, describes a microfluidic delivery system using elongated capillaries that are enclosed along one surface by a layer of malleable material which is shifted by a valve having a electrically-powered actuator. [0013]
  • U.S. patent application Ser. No. 09/677,250, filed Oct. 2, 2000, and assigned to the assignee of the present invention describes a one way check valve for use in laminated plastic microfluidic structures. This valve allows one way flow through microfluidic channels for use in mixing, dilution, particulate suspension and other techniques necessary for flow control in analytical devices. [0014]
  • Several types of valves are commonly used for fluid management in flow systems. Flap valves, ball-in-socket valves, and tapered wedge valves are a few of the valve types existing in the macroscale domain of fluid control. However, in the microscale field, where flow channels are often the size of a human hair (approximately 100 microns in diameter), there are special needs and uses for valves which are unique to microscale systems, especially microfluidic devices incorporating fluids with various concentrations of particulate in suspension. Special challenges involve mixing, dilution, fluidic circuit isolation, and anti-sediment techniques when employing microscale channels within a device. The incorporation of a simple compact valve within microscale devices addresses these potential problems while maintaining high density of fluidic structure within the device. [0015]
    • SUMMARY OF THE INVENTION
  • It is therefore an object of the present invention to provide an efficient and reliable valve suitable for use in a microfluidic system. [0016]
  • It is a further object of the present invention is to provide a microfluidic valve which can be integrated into a cartridge constructed of multi-layer laminates. [0017]
  • It is a further object of the present invention is to provide an array of microfluidic valves that can be integrated into a cartridge constructed of multi-layer laminates. [0018]
  • These and other objects of the present invention will be more readily apparent in the description and drawings that follow.[0019]
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a fragmentary cross-sectional view of a microfluidic device containing a basic ball bearing valve according to the present invention; [0020]
  • FIG. 2 is a fragmentary cross-sectional view of the valve of FIG. 1 shown in its activated position; [0021]
  • FIG. 3 is a fragmentary cross-sectional view of another embodiment of a ball bearing valve according to the present invention; and [0022]
  • FIG. 4 is a perspective view of a microfluidic array which uses a plurality of ball bearing valves according to the present invention.[0023]
    • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • Referring now to FIG. 1, there is shown a microfluidic valve assembly, generally indicated at [0024] 10, which contains a valve constructed according to the present invention. Assembly 10 includes a spherical member or ball bearing 12 which is located within a channel 14 formed between a rigid top layer 16 and a rigid interior layer 18 within assembly 10. Layer 16 and layer 18 each contain a cutout area 20 and 22 respectively within which ball bearing 12 is contained in channel 14. Rigid layers 16, 18 may be constructed from a material such as MYLAR. Spherical member 12 may be constructed from metal, hard plastic, or any other similar material.
  • A [0025] membrane 24 constructed of a flexible material is located adjacent layer 18 opposite channel 14. Membrane 24, which is preferably made from a thin elastomeric material, completely isolates channel 14 from a channel 26 by spanning across cutout area 22. One suitable material that may be used for membrane 24 is polyvinylidene chloride (PVDC) which is the material commonly used as SARAN WRAP® film. Channel 26 is capable of carrying fluids within 10 assembly 10, and in the present embodiment is formed by a narrow section 26 a and a wider section 26 b. Channel section 26 b is formed by layer 18 along with adjacent membrane 24, and a rigid bottom layer 28, while section 26 a is located within membrane 24 and an additional rigid layer 30 adjacent bottom layer 28.
  • In operation, the flow of a fluid traveling within [0026] channel 26 can be controlled within assembly 10 by spherical member 10. Referring now to FIG. 2, member 12 is shifted by a sufficient force in the direction shown by arrow A. This force may be applied manually using the finger of a human operator, or by any suitable mechanical means as known in the art. This movement causes flexible membrane 24 to contact bottom layer 28, closing channel 26 to any fluid movement between channel section 26 a and section 26 b. Note that layer 18 acts to aid in centering member 12 in the process of activating valve assembly 10, as member 12 is essentially captured within cutout area 22 of layer 18. When the operating force is removed from member 12, said member is shifted back to its unactuated position as shown in FIG. 1 by virtue of the elastomeric property of membrane 24.
  • FIG. 3 illustrates a second embodiment of a valve assembly constructed according to the present invention. It will be understood that similar parts will be given the same index numerals. Referring now to FIG. 3, there is shown a [0027] valve assembly 10 a having a spherical member 12 located within a channel 14 which is formed between a layer 18 and an elastomeric layer 16 a.
  • [0028] Elastomeric membrane 24 is located adjacent layer 18 opposite channel 14, while spherical member 12 is situated in cutout section 22 within layer 18 and contacts member 24 at this location, as was previously shown in FIG. 1. Channel 26, which consists of a narrow section 26 a and a wider section 26 b, is formed between membrane 24 and bottom layer 28, and is capable of carrying fluids within a microfluidic circuit.
  • An [0029] upper channel 36 is formed within assembly 10 a between layer 16 a and a rigid upper layer 38. Channel 36 contains a fluid which is capable of providing a force capable of activating valve assembly 10 a. As can be clearly seen in FIG. 3, fluid flowing in the direction of arrow B will flow over spherical member 12, which is located beneath layer 16 a.
  • To operate [0030] valve assembly 10 a, if the force generated by a fluid flowing in direction B within channel 36, the fluid will force membrane 24 downwardly in the direction of arrow A, causing member 12 to shift and causing membrane 24 to contact layer 28, closing channel 26 to any fluid movement between channel 26 a and 26 b. When the flow of the fluid within channel 36 is reduced such that the force acting upon member 12 is less than that force exerted by membrane 24 on the lower part of member 12, member 12 will return to the position shown in FIG. 3, and thus allowing fluid flow within channel 26.
  • The valve assembly of the present invention can also be used to control a microfluidic array. Referring now to FIG. 4, there is shown a microfluidic array, generally indicated at [0031] 50. Array 50 consists of a lower array section 52 and an upper array section 54. Section 52 contains a plurality of spaced apart indentations 56 which are sized to contain a plurality of spherical members 12 as taught in FIGS. 1-3. Also within section 52, there is contained a microfluidic circuit (not shown) which is constructed having channels similar to that shown in FIG. 3. This circuit may be designed to perform many functions which are familiar to those skilled in the art of microfluidic circuitry design.
  • [0032] Section 54 may be constructed similar to the valve circuitry shown in FIG. 3 in that the lower surface is constructed for a elastomeric material which is deformed by spherical members 12 when the valves are in the inactive position. The control of the operation of the valves may be done using fluidic channels, similar to channel 36 in FIG. 3, or operation of the valves may also be accomplished using common electrical, magnetic, or pneumatic means, as is well known in the art.
  • The control of the operation of [0033] array 50 is accomplished by use of external control means 60 which is coupled to section 54 via a cable 62. Control means 60 may be a computer or programmable control or the like, or any device familiar to those skilled in the art. Or, alternatively, array 50 could be inserted as a cartridge into a separate machine which would control operation of the valves within the array.
  • While the present invention has been shown and described in terms of several preferred embodiments thereof, it will be understood that this invention is not limited to these particular embodiments and that many changes and modifications may be made without departing from the true spirit and scope of the invention as defined in the appended claims. [0034]

Claims (13)

What is claimed is:
1. A valve for use in a microfluidic structure, comprising:
a first rigid layer;
a first flexible layer;
a first channel, formed between said first rigid layer and said first flexible layer, said channel having an inlet and an outlet and capable of fluid flow from said inlet to said outlet;
a spherical actuator located adjacent said flexible layer on the side opposite said rigid layer;
and means for shifting said actuator to an actuating position such that a portion of said flexible layer is shifted toward said rigid layer, restricting fluid flow within said first channel.
2. The valve of claim 1, wherein said first flexible layer is constructed from an elastomeric material.
3. The valve of claim 1, wherein said first flexible layer is constructed from polyvinylidene chloride.
4. The valve of claim 1, wherein said spherical actuator comprises a metal ball bearing.
5. The valve of claim 1, wherein said shifting means comprises a finger of a human operator.
6. The valve of claim 1, wherein said shifting means comprises mechanical operating means.
7. The valve of claim 1, further comprising:
a second rigid layer, located adjacent said first flexible layer on the side opposite said first channel;
a second flexible layer;
a second channel, formed between said second rigid layer and said second flexible layer, for containing said spherical actuator;
a third rigid layer;
a first aperture, located in said second rigid layer, for positioning said spherical actuator within said second channel during actuation;
a third channel, formed between said second flexible layer and said third rigid layer, for containing said shifting means.
8. The valve of claim 7, wherein said shifting means comprises a fluid flowing within said third channel.
9. The valve of claim 7, wherein said second flexible layer comprises an elastomeric material.
10. The valve of claim 7, wherein all of said rigid layers are constructed from MYLAR.
11. A microfluidic control system, comprising:
a plurality of valves, with each valve comprising
a first rigid layer;
a first flexible layer;
a first channel, formed between said first rigid layer and said first flexible layer, said channel having an inlet and an outlet and capable of fluid flow from said inlet to said outlet;
a spherical actuator located adjacent said flexible layer on the side opposite said rigid layer;
and means for shifting said actuator to an actuating position such that a portion of said flexible layer is shifted toward said rigid layer, restricting fluid flow within said first channel;
and means for controlling the operation of said plurality of valves.
12. The system of claim 11, wherein said controlling means comprises a computer.
13. The system of claim 11, wherein said controlling means comprises a programmable controller.
US10/438,257 2000-06-23 2003-05-13 Valve for use in microfluidic structures Abandoned US20030197139A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/438,257 US20030197139A1 (en) 2000-06-23 2003-05-13 Valve for use in microfluidic structures

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US21386500P 2000-06-23 2000-06-23
US09/887,820 US6581899B2 (en) 2000-06-23 2001-06-22 Valve for use in microfluidic structures
US10/438,257 US20030197139A1 (en) 2000-06-23 2003-05-13 Valve for use in microfluidic structures

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US09/887,820 Continuation US6581899B2 (en) 2000-06-23 2001-06-22 Valve for use in microfluidic structures

Publications (1)

Publication Number Publication Date
US20030197139A1 true US20030197139A1 (en) 2003-10-23

Family

ID=22796813

Family Applications (4)

Application Number Title Priority Date Filing Date
US09/887,886 Abandoned US20020015959A1 (en) 2000-06-23 2001-06-22 Fluid mixing in microfluidic structures
US09/887,820 Expired - Lifetime US6581899B2 (en) 2000-06-23 2001-06-22 Valve for use in microfluidic structures
US09/888,754 Abandoned US20020008032A1 (en) 2000-06-23 2001-06-25 Feedback control for microfluidic cartridges
US10/438,257 Abandoned US20030197139A1 (en) 2000-06-23 2003-05-13 Valve for use in microfluidic structures

Family Applications Before (3)

Application Number Title Priority Date Filing Date
US09/887,886 Abandoned US20020015959A1 (en) 2000-06-23 2001-06-22 Fluid mixing in microfluidic structures
US09/887,820 Expired - Lifetime US6581899B2 (en) 2000-06-23 2001-06-22 Valve for use in microfluidic structures
US09/888,754 Abandoned US20020008032A1 (en) 2000-06-23 2001-06-25 Feedback control for microfluidic cartridges

Country Status (2)

Country Link
US (4) US20020015959A1 (en)
WO (3) WO2002001184A1 (en)

Cited By (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070193653A1 (en) * 2005-12-15 2007-08-23 Thomas Gagliano Beverage dispenser
US20080142115A1 (en) * 2006-12-15 2008-06-19 Niagara Dispensing Technologies, Inc. Beverage dispensing
US20080277615A1 (en) * 2002-05-08 2008-11-13 Cytonome, Inc. On chip dilution system
US20080276729A1 (en) * 2007-05-09 2008-11-13 Samsung Electro-Mechanics Co., Ltd. Apparatus for analyzing sample using centrifugal force and inertia
US7823411B2 (en) 2006-12-15 2010-11-02 Niagara Dispensing Technologies, Inc. Beverage cooling system
US7861740B2 (en) 2005-12-15 2011-01-04 Niagara Dispensing Technologies, Inc. Digital flow control
US20110020182A1 (en) * 2007-12-14 2011-01-27 Yunhua Gao Microfluidic cartridge with solution reservoir-pump chamber
US20130149216A1 (en) * 2011-12-07 2013-06-13 Electronics And Telecommunications Research Institute Device for storing reagent and method of discharging reagent thereof
US8833405B2 (en) 2005-12-15 2014-09-16 DD Operations Ltd. Beverage dispensing
US9222623B2 (en) 2013-03-15 2015-12-29 Genmark Diagnostics, Inc. Devices and methods for manipulating deformable fluid vessels
WO2016065073A1 (en) 2014-10-22 2016-04-28 Integenx Inc. Systems and methods for sample preparation, processing and analysis
US9498778B2 (en) 2014-11-11 2016-11-22 Genmark Diagnostics, Inc. Instrument for processing cartridge for performing assays in a closed sample preparation and reaction system
WO2016205428A1 (en) 2015-06-19 2016-12-22 Integenx Inc. Valved cartridge and system
US9598722B2 (en) 2014-11-11 2017-03-21 Genmark Diagnostics, Inc. Cartridge for performing assays in a closed sample preparation and reaction system
US9731266B2 (en) 2010-08-20 2017-08-15 Integenx Inc. Linear valve arrays
US9752185B2 (en) 2004-09-15 2017-09-05 Integenx Inc. Microfluidic devices
US9957553B2 (en) 2012-10-24 2018-05-01 Genmark Diagnostics, Inc. Integrated multiplex target analysis
US10005080B2 (en) 2014-11-11 2018-06-26 Genmark Diagnostics, Inc. Instrument and cartridge for performing assays in a closed sample preparation and reaction system employing electrowetting fluid manipulation
US10191071B2 (en) 2013-11-18 2019-01-29 IntegenX, Inc. Cartridges and instruments for sample analysis
US10208332B2 (en) 2014-05-21 2019-02-19 Integenx Inc. Fluidic cartridge with valve mechanism
US10495656B2 (en) 2012-10-24 2019-12-03 Genmark Diagnostics, Inc. Integrated multiplex target analysis
US10525467B2 (en) 2011-10-21 2020-01-07 Integenx Inc. Sample preparation, processing and analysis systems
USD881409S1 (en) 2013-10-24 2020-04-14 Genmark Diagnostics, Inc. Biochip cartridge
US10865440B2 (en) 2011-10-21 2020-12-15 IntegenX, Inc. Sample preparation, processing and analysis systems

Families Citing this family (105)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020112961A1 (en) * 1999-12-02 2002-08-22 Nanostream, Inc. Multi-layer microfluidic device fabrication
JP4606543B2 (en) * 2000-04-13 2011-01-05 パナソニック株式会社 Method for confirming amount of solution to be measured and measuring system control method in optical property measuring apparatus
US8329118B2 (en) * 2004-09-02 2012-12-11 Honeywell International Inc. Method and apparatus for determining one or more operating parameters for a microfluidic circuit
US8518328B2 (en) * 2005-12-27 2013-08-27 Honeywell International Inc. Fluid sensing and control in a fluidic analyzer
US7027683B2 (en) * 2000-08-15 2006-04-11 Nanostream, Inc. Optical devices with fluidic systems
US7314718B1 (en) 2001-04-03 2008-01-01 Bioarray Solutions Ltd. Method and apparatus for maintaining multiple planar fluid flows
US7318912B2 (en) 2001-06-07 2008-01-15 Nanostream, Inc. Microfluidic systems and methods for combining discrete fluid volumes
US20020187557A1 (en) * 2001-06-07 2002-12-12 Hobbs Steven E. Systems and methods for introducing samples into microfluidic devices
JP2003248008A (en) * 2001-12-18 2003-09-05 Inst Of Physical & Chemical Res Method of stirring reaction liquid
US6739576B2 (en) 2001-12-20 2004-05-25 Nanostream, Inc. Microfluidic flow control device with floating element
US20040109793A1 (en) * 2002-02-07 2004-06-10 Mcneely Michael R Three-dimensional microfluidics incorporating passive fluid control structures
GB0203653D0 (en) * 2002-02-15 2002-04-03 Syrris Ltd A microreactor
GB0203661D0 (en) * 2002-02-15 2002-04-03 Syrris Ltd A microreactor
EP1346770A1 (en) * 2002-03-13 2003-09-24 Corning Incorporated Microvolume biochemical reaction chamber
US9943847B2 (en) 2002-04-17 2018-04-17 Cytonome/St, Llc Microfluidic system including a bubble valve for regulating fluid flow through a microchannel
US6976590B2 (en) * 2002-06-24 2005-12-20 Cytonome, Inc. Method and apparatus for sorting particles
US6939450B2 (en) * 2002-10-08 2005-09-06 Abbott Laboratories Device having a flow channel
JP3746756B2 (en) * 2002-10-22 2006-02-15 株式会社日立製作所 Solution stirring device, solution stirring method
US6936167B2 (en) * 2002-10-31 2005-08-30 Nanostream, Inc. System and method for performing multiple parallel chromatographic separations
US20040101870A1 (en) * 2002-11-26 2004-05-27 Caubet Bruno S. Microvolume biochemical reaction chamber
CN101158447B (en) 2002-12-04 2012-12-26 斯宾克斯公司 Devices and methods for programmable microscale manipulation of fluids
US7125711B2 (en) * 2002-12-19 2006-10-24 Bayer Healthcare Llc Method and apparatus for splitting of specimens into multiple channels of a microfluidic device
US7094354B2 (en) * 2002-12-19 2006-08-22 Bayer Healthcare Llc Method and apparatus for separation of particles in a microfluidic device
US7419638B2 (en) * 2003-01-14 2008-09-02 Micronics, Inc. Microfluidic devices for fluid manipulation and analysis
KR20050118668A (en) * 2003-01-21 2005-12-19 마이크로닉스 인코포레이티드. Method and system for microfluidic manipulation, amplification and analysis of fluids, for example, bacteria assays and antiglobulin testing
US7147955B2 (en) 2003-01-31 2006-12-12 Societe Bic Fuel cartridge for fuel cells
GB0307999D0 (en) * 2003-04-07 2003-05-14 Glaxo Group Ltd A system
US7435381B2 (en) * 2003-05-29 2008-10-14 Siemens Healthcare Diagnostics Inc. Packaging of microfluidic devices
US20040265171A1 (en) * 2003-06-27 2004-12-30 Pugia Michael J. Method for uniform application of fluid into a reactive reagent area
US20080257754A1 (en) * 2003-06-27 2008-10-23 Pugia Michael J Method and apparatus for entry of specimens into a microfluidic device
US20040265172A1 (en) * 2003-06-27 2004-12-30 Pugia Michael J. Method and apparatus for entry and storage of specimens into a microfluidic device
US7347617B2 (en) * 2003-08-19 2008-03-25 Siemens Healthcare Diagnostics Inc. Mixing in microfluidic devices
US7396677B2 (en) * 2003-11-07 2008-07-08 Nanosphere, Inc. Method of preparing nucleic acids for detection
US20050170401A1 (en) * 2004-01-29 2005-08-04 Canon Kabushiki Kaisha Hybridization apparatus and method
US20050176135A1 (en) * 2004-02-06 2005-08-11 Brian Jones Cassette for isolation, amplification and identification of DNA or protein and method of use
CN102759466A (en) 2004-09-15 2012-10-31 英特基因有限公司 Microfluidic devices
US9260693B2 (en) 2004-12-03 2016-02-16 Cytonome/St, Llc Actuation of parallel microfluidic arrays
US7168675B2 (en) * 2004-12-21 2007-01-30 Honeywell International Inc. Media isolated electrostatically actuated valve
WO2006076567A2 (en) * 2005-01-13 2006-07-20 Micronics, Inc. Microfluidic rare cell detection device
US8985547B2 (en) * 2005-01-31 2015-03-24 President And Fellows Of Harvard College Valves and reservoirs for microfluidic systems
US7618391B2 (en) * 2005-04-20 2009-11-17 Children's Medical Center Corporation Waveform sensing and regulating fluid flow valve
US20060245933A1 (en) * 2005-05-02 2006-11-02 General Electric Company Valve and pump for microfluidic systems and methods for fabrication
WO2007005365A2 (en) 2005-06-29 2007-01-11 Cascade Microtech, Inc. A fluid dispensing system
EP1924855A1 (en) * 2005-08-30 2008-05-28 Bayer Healthcare, LLC A test sensor with a fluid chamber opening
US9056291B2 (en) 2005-11-30 2015-06-16 Micronics, Inc. Microfluidic reactor system
US7763453B2 (en) 2005-11-30 2010-07-27 Micronics, Inc. Microfluidic mixing and analytic apparatus
US8182767B2 (en) * 2005-12-27 2012-05-22 Honeywell International Inc. Needle-septum interface for a fluidic analyzer
US7485153B2 (en) * 2005-12-27 2009-02-03 Honeywell International Inc. Fluid free interface for a fluidic analyzer
WO2007084392A2 (en) * 2006-01-13 2007-07-26 Micronics, Inc. Electromagnetically actuated valves for use in microfluidic structures
US8084270B2 (en) * 2006-01-25 2011-12-27 Koninklijke Philips Electronics N.V. Device for analyzing fluids
US11906988B2 (en) 2006-03-06 2024-02-20 Deka Products Limited Partnership Product dispensing system
US9146564B2 (en) 2006-03-06 2015-09-29 Deka Products Limited Partnership Product dispensing system
EP2007905B1 (en) * 2006-03-15 2012-08-22 Micronics, Inc. Integrated nucleic acid assays
US7569789B2 (en) * 2006-03-16 2009-08-04 Visiongate, Inc. Cantilevered coaxial flow injector apparatus and method for sorting particles
AU2007265628B2 (en) * 2006-06-23 2012-12-06 Perkinelmer Health Sciences, Inc. Methods and devices for microfluidic point-of-care immunoassays
KR100813266B1 (en) * 2006-09-19 2008-03-13 삼성전자주식회사 Method for removing air bubbles from hybridization solution of a microarray-cover slip assembly and a microarray kit for the same
WO2008147382A1 (en) * 2006-09-27 2008-12-04 Micronics, Inc. Integrated microfluidic assay devices and methods
JP2008128706A (en) * 2006-11-17 2008-06-05 Konica Minolta Medical & Graphic Inc Microchip inspection system and program used for the microchip inspection system
JP2008128869A (en) * 2006-11-22 2008-06-05 Konica Minolta Medical & Graphic Inc Microchip inspection system and program used for the microchip inspection system
WO2008115626A2 (en) 2007-02-05 2008-09-25 Microchip Biotechnologies, Inc. Microfluidic and nanofluidic devices, systems, and applications
US20080202148A1 (en) * 2007-02-27 2008-08-28 Thomas Gagliano Beverage cooler
US20080312104A1 (en) * 2007-06-15 2008-12-18 Yasuhiko Sasaki Biological material preparation chip and preparation chip system
JP5852781B2 (en) * 2007-07-31 2016-02-03 マイクロニクス， インコーポレイテッド Hygienic swab collection system, microfluidic assay device and method for diagnostic assays
US10562757B2 (en) 2007-09-06 2020-02-18 Deka Products Limited Partnership Product dispensing system
US10859072B2 (en) 2007-09-06 2020-12-08 Deka Products Limited Partnership Product dispensing system
US8087303B2 (en) 2007-09-06 2012-01-03 Deka Products Limited Partnership Product dispensing system
US11634311B2 (en) 2007-09-06 2023-04-25 Deka Products Limited Partnership Product dispensing system
WO2009108260A2 (en) 2008-01-22 2009-09-03 Microchip Biotechnologies, Inc. Universal sample preparation system and use in an integrated analysis system
US8961902B2 (en) * 2008-04-23 2015-02-24 Bioscale, Inc. Method and apparatus for analyte processing
EP2337981A1 (en) * 2008-09-17 2011-06-29 Koninklijke Philips Electronics N.V. Microfluidic device
US8318439B2 (en) 2008-10-03 2012-11-27 Micronics, Inc. Microfluidic apparatus and methods for performing blood typing and crossmatching
WO2010077322A1 (en) * 2008-12-31 2010-07-08 Microchip Biotechnologies, Inc. Instrument with microfluidic chip
CN102459565A (en) * 2009-06-02 2012-05-16 尹特根埃克斯有限公司 Fluidic devices with diaphragm valves
KR20120031218A (en) 2009-06-05 2012-03-30 인터젠엑스 인크. Universal sample preparation system and use in an integrated analysis system
KR101274113B1 (en) * 2009-09-01 2013-06-13 한국전자통신연구원 Magnetic microvalve using metal ball and manufacturing method thereof
US8584703B2 (en) 2009-12-01 2013-11-19 Integenx Inc. Device with diaphragm valve
JP5791634B2 (en) 2010-01-29 2015-10-07 マイクロニクス， インコーポレイテッド Sample-response microfluidic cartridge
US8512538B2 (en) 2010-05-28 2013-08-20 Integenx Inc. Capillary electrophoresis device
US8763642B2 (en) 2010-08-20 2014-07-01 Integenx Inc. Microfluidic devices with mechanically-sealed diaphragm valves
GB2487353B (en) * 2011-01-11 2016-11-30 Ffei Ltd Micro-capillary method and apparatus
GB201119002D0 (en) * 2011-11-03 2011-12-14 Givaudan Sa Valve
KR102090934B1 (en) 2012-01-09 2020-03-19 퍼킨엘머 헬스 사이언시즈, 아이엔씨. Microfluidic reactor system
WO2013152361A1 (en) * 2012-04-06 2013-10-10 Corsolutions Llc Apparatus, system, & method providing fluid flow for cell growth
GB2529293B (en) * 2012-12-10 2019-12-04 Harvard College Membrane-based fluid-flow control devices
US10065186B2 (en) 2012-12-21 2018-09-04 Micronics, Inc. Fluidic circuits and related manufacturing methods
EP2934751B1 (en) 2012-12-21 2019-05-29 Micronics, Inc. Low elasticity films for microfluidic use
CN104919035B (en) 2012-12-21 2017-08-11 精密公司 Portable fluorescence detecting system and micro- determination box
WO2014182847A1 (en) 2013-05-07 2014-11-13 Micronics, Inc. Device for preparation and analysis of nucleic acids
WO2014182844A1 (en) 2013-05-07 2014-11-13 Micronics, Inc. Microfluidic devices and methods for performing serum separation and blood cross-matching
CA2911303C (en) 2013-05-07 2021-02-16 Micronics, Inc. Methods for preparation of nucleic acid-containing samples using clay minerals and alkaline solutions
FR3006207A1 (en) * 2013-05-30 2014-12-05 Commissariat Energie Atomique FLUID CARD COMPRISING A FLUIDIC CHANNEL HAVING A REFERMABLE OPENING BY A FLEXIBLE FILM
CN104280278A (en) * 2014-09-18 2015-01-14 大连理工大学 Displacement representation method for preparing nanochannel fracture appearance sample
IL239691A0 (en) 2015-06-28 2015-08-31 Technion Res & Dev Foundation System and emthod for measuring flow
GB2541202B (en) 2015-08-11 2021-06-23 Agilent Technologies Inc Stacked layer-type member with integrated functional component
WO2017132630A1 (en) 2016-01-29 2017-08-03 Purigen Biosystems, Inc. Isotachophoresis for purification of nucleic acids
US10400915B2 (en) * 2016-04-14 2019-09-03 Triad National Security, Llc Magnetically controlled valve and pump devices and methods of using the same
US11135345B2 (en) 2017-05-10 2021-10-05 Fresenius Medical Care Holdings, Inc. On demand dialysate mixing using concentrates
CA3071816A1 (en) 2017-08-02 2019-02-07 Purigen Biosystems, Inc. Systems, devices, and methods for isotachophoresis
US11311879B2 (en) * 2018-02-05 2022-04-26 miDiagnostics NV Microfluidic device, system, and method for reversing a flow through a microfluidic channel
EP3758844B1 (en) * 2018-06-11 2023-03-29 Hewlett-Packard Development Company, L.P. Microfluidic valves
CN108679301B (en) * 2018-09-06 2019-01-08 湖南乐准智芯生物科技有限公司 Shielding system, control method and biochip between a kind of micro-valve and liquid
US11504458B2 (en) 2018-10-17 2022-11-22 Fresenius Medical Care Holdings, Inc. Ultrasonic authentication for dialysis
GB2583059B (en) * 2019-01-30 2024-01-31 Cn Bio Innovations Ltd A microvalve, and a multi-directional valve apparatus
US11259106B1 (en) * 2020-11-06 2022-02-22 Fortemedia, Inc. Mems device with dynamic valve layer
JP2023063027A (en) * 2021-10-22 2023-05-09 株式会社エンプラス Fluid handling device and fluid handling system including the same

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2660395A (en) * 1949-11-21 1953-11-24 Cement Gun Company Inc Compressible tube valve
US3572735A (en) * 1969-11-17 1971-03-30 North American Rockwell Captive plastic seal
US4099700A (en) * 1977-02-16 1978-07-11 Wen Young Flow control device for fluids flowing in a closed conduit
US4341098A (en) * 1979-10-18 1982-07-27 Otting Machine Company, Inc. Jet pattern dyeing of material, particularly carpet
EP0213825A3 (en) * 1985-08-22 1989-04-26 Molecular Devices Corporation Multiple chemically modulated capacitance
SE8801299L (en) 1988-04-08 1989-10-09 Bertil Hoeoek MICROMECHANICAL ONE-WAY VALVE
US4899783A (en) * 1988-09-30 1990-02-13 Whitey Co. Pinch valve
US5595707A (en) * 1990-03-02 1997-01-21 Ventana Medical Systems, Inc. Automated biological reaction apparatus
DE4019889C2 (en) * 1990-06-22 1996-09-26 Joachim Mogler Pinch cock
SE9100392D0 (en) 1991-02-08 1991-02-08 Pharmacia Biosensor Ab A METHOD OF PRODUCING A SEALING MEANS IN A MICROFLUIDIC STRUCTURE AND A MICROFLUIDIC STRUCTURE COMPRISING SUCH SEALING MEANS
US5486335A (en) * 1992-05-01 1996-01-23 Trustees Of The University Of Pennsylvania Analysis based on flow restriction
US5330625A (en) * 1992-10-23 1994-07-19 Eastman Kodak Company Round potentiometric slide elements and method of using the same
US5670329A (en) * 1993-05-28 1997-09-23 Cardiovascular Diagnostics, Inc. Method and analytical system for performing fibrinogen assays accurately, rapidly and simply using a rotating magnetic field
SE501713C2 (en) 1993-09-06 1995-05-02 Pharmacia Biosensor Ab Diaphragm-type valve, especially for liquid handling blocks with micro-flow channels
AUPN038995A0 (en) * 1995-01-05 1995-01-27 Australian Biomedical Corporation Limited Method and apparatus for human or animal cell sample treatment
SE9502258D0 (en) 1995-06-21 1995-06-21 Pharmacia Biotech Ab Method for the manufacture of a membrane-containing microstructure
US6068751A (en) 1995-12-18 2000-05-30 Neukermans; Armand P. Microfluidic valve and integrated microfluidic system
US5863502A (en) 1996-01-24 1999-01-26 Sarnoff Corporation Parallel reaction cassette and associated devices
US5660370A (en) * 1996-03-07 1997-08-26 Integrated Fludics, Inc. Valve with flexible sheet member and two port non-flexing backer member
US5851004A (en) * 1996-10-16 1998-12-22 Parker-Hannifin Corporation High pressure actuated metal seated diaphragm valve
US5971355A (en) 1996-11-27 1999-10-26 Xerox Corporation Microdevice valve structures to fluid control
US5932799A (en) 1997-07-21 1999-08-03 Ysi Incorporated Microfluidic analyzer module
US5989402A (en) * 1997-08-29 1999-11-23 Caliper Technologies Corp. Controller/detector interfaces for microfluidic systems
AU746098B2 (en) * 1997-09-02 2002-04-18 Caliper Life Sciences, Inc. Microfluidic system with electrofluidic and electrothermal controls
US6431212B1 (en) 2000-05-24 2002-08-13 Jon W. Hayenga Valve for use in microfluidic structures

Cited By (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080277615A1 (en) * 2002-05-08 2008-11-13 Cytonome, Inc. On chip dilution system
US9752185B2 (en) 2004-09-15 2017-09-05 Integenx Inc. Microfluidic devices
US8833405B2 (en) 2005-12-15 2014-09-16 DD Operations Ltd. Beverage dispensing
US7861740B2 (en) 2005-12-15 2011-01-04 Niagara Dispensing Technologies, Inc. Digital flow control
US20070193653A1 (en) * 2005-12-15 2007-08-23 Thomas Gagliano Beverage dispenser
US20080142115A1 (en) * 2006-12-15 2008-06-19 Niagara Dispensing Technologies, Inc. Beverage dispensing
US7823411B2 (en) 2006-12-15 2010-11-02 Niagara Dispensing Technologies, Inc. Beverage cooling system
US20080276729A1 (en) * 2007-05-09 2008-11-13 Samsung Electro-Mechanics Co., Ltd. Apparatus for analyzing sample using centrifugal force and inertia
US7861576B2 (en) * 2007-05-09 2011-01-04 Samsung Electro-Mechanics Co., Ltd. Apparatus for analyzing sample using centrifugal force and inertia
US8323573B2 (en) * 2007-12-14 2012-12-04 Xizeng Shi Microfluidic cartridge with solution reservoir-pump chamber
US20110020182A1 (en) * 2007-12-14 2011-01-27 Yunhua Gao Microfluidic cartridge with solution reservoir-pump chamber
US9731266B2 (en) 2010-08-20 2017-08-15 Integenx Inc. Linear valve arrays
US10865440B2 (en) 2011-10-21 2020-12-15 IntegenX, Inc. Sample preparation, processing and analysis systems
US10525467B2 (en) 2011-10-21 2020-01-07 Integenx Inc. Sample preparation, processing and analysis systems
US11684918B2 (en) 2011-10-21 2023-06-27 IntegenX, Inc. Sample preparation, processing and analysis systems
US20130149216A1 (en) * 2011-12-07 2013-06-13 Electronics And Telecommunications Research Institute Device for storing reagent and method of discharging reagent thereof
US8834811B2 (en) * 2011-12-07 2014-09-16 Electronics And Telecommunications Research Institute Device for storing reagent and method of discharging reagent thereof
US11952618B2 (en) 2012-10-24 2024-04-09 Roche Molecular Systems, Inc. Integrated multiplex target analysis
US10495656B2 (en) 2012-10-24 2019-12-03 Genmark Diagnostics, Inc. Integrated multiplex target analysis
USD900330S1 (en) 2012-10-24 2020-10-27 Genmark Diagnostics, Inc. Instrument
US9957553B2 (en) 2012-10-24 2018-05-01 Genmark Diagnostics, Inc. Integrated multiplex target analysis
US9453613B2 (en) 2013-03-15 2016-09-27 Genmark Diagnostics, Inc. Apparatus, devices, and methods for manipulating deformable fluid vessels
US9410663B2 (en) 2013-03-15 2016-08-09 Genmark Diagnostics, Inc. Apparatus and methods for manipulating deformable fluid vessels
US10807090B2 (en) 2013-03-15 2020-10-20 Genmark Diagnostics, Inc. Apparatus, devices, and methods for manipulating deformable fluid vessels
US9222623B2 (en) 2013-03-15 2015-12-29 Genmark Diagnostics, Inc. Devices and methods for manipulating deformable fluid vessels
US10391489B2 (en) 2013-03-15 2019-08-27 Genmark Diagnostics, Inc. Apparatus and methods for manipulating deformable fluid vessels
USD881409S1 (en) 2013-10-24 2020-04-14 Genmark Diagnostics, Inc. Biochip cartridge
US10191071B2 (en) 2013-11-18 2019-01-29 IntegenX, Inc. Cartridges and instruments for sample analysis
US10989723B2 (en) 2013-11-18 2021-04-27 IntegenX, Inc. Cartridges and instruments for sample analysis
US10961561B2 (en) 2014-05-21 2021-03-30 IntegenX, Inc. Fluidic cartridge with valve mechanism
US11891650B2 (en) 2014-05-21 2024-02-06 IntegenX, Inc. Fluid cartridge with valve mechanism
US10208332B2 (en) 2014-05-21 2019-02-19 Integenx Inc. Fluidic cartridge with valve mechanism
WO2016065073A1 (en) 2014-10-22 2016-04-28 Integenx Inc. Systems and methods for sample preparation, processing and analysis
EP3552690A1 (en) 2014-10-22 2019-10-16 IntegenX Inc. Systems and methods for sample preparation, processing and analysis
US10690627B2 (en) 2014-10-22 2020-06-23 IntegenX, Inc. Systems and methods for sample preparation, processing and analysis
US10005080B2 (en) 2014-11-11 2018-06-26 Genmark Diagnostics, Inc. Instrument and cartridge for performing assays in a closed sample preparation and reaction system employing electrowetting fluid manipulation
US10864522B2 (en) 2014-11-11 2020-12-15 Genmark Diagnostics, Inc. Processing cartridge and method for detecting a pathogen in a sample
US9598722B2 (en) 2014-11-11 2017-03-21 Genmark Diagnostics, Inc. Cartridge for performing assays in a closed sample preparation and reaction system
US9498778B2 (en) 2014-11-11 2016-11-22 Genmark Diagnostics, Inc. Instrument for processing cartridge for performing assays in a closed sample preparation and reaction system
US10767225B2 (en) 2015-06-19 2020-09-08 IntegenX, Inc. Valved cartridge and system
EP3524973A1 (en) 2015-06-19 2019-08-14 IntegenX Inc. Valved cartridge and system
US10233491B2 (en) 2015-06-19 2019-03-19 IntegenX, Inc. Valved cartridge and system
US11649496B2 (en) 2015-06-19 2023-05-16 IntegenX, Inc. Valved cartridge and system
WO2016205428A1 (en) 2015-06-19 2016-12-22 Integenx Inc. Valved cartridge and system

Also Published As

Publication number Publication date
WO2002001163A2 (en) 2002-01-03
WO2002001163A3 (en) 2002-05-30
US20010054702A1 (en) 2001-12-27
WO2002001081A3 (en) 2002-05-16
WO2002001081A2 (en) 2002-01-03
US6581899B2 (en) 2003-06-24
WO2002001184A1 (en) 2002-01-03
US20020015959A1 (en) 2002-02-07
WO2002001184A8 (en) 2002-02-07
US20020008032A1 (en) 2002-01-24

Similar Documents

Publication Publication Date Title
US6581899B2 (en) Valve for use in microfluidic structures
US6431212B1 (en) Valve for use in microfluidic structures
US20020148992A1 (en) Pneumatic valve interface for use in microfluidic structures
US7357898B2 (en) Microfluidics packages and methods of using same
US6644944B2 (en) Uni-directional flow microfluidic components
US6619311B2 (en) Microfluidic regulating device
US8388908B2 (en) Fluidic devices with diaphragm valves
Hosokawa et al. A pneumatically-actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer technique
US6527003B1 (en) Micro valve actuator
US20060245933A1 (en) Valve and pump for microfluidic systems and methods for fabrication
US20120181460A1 (en) Valves with Hydraulic Actuation System
US20020155010A1 (en) Microfluidic valve with partially restrained element
KR101922627B1 (en) Multiplexor for control of flow in microfluidics chip and microfluidics chip assembly
JP2008537063A (en) Valves and reservoirs for microfluidic systems
WO2011123801A1 (en) Fluidic article fabricated in one piece
US20110049401A1 (en) Magnetic microvalve using metal ball and method of manufacturing the same
KR20060024500A (en) An apparatus for making a fluid flow, and a disposable chip having the same
KR20050104348A (en) Microfluidic devices for fluid manipulation and analysis
US20010048088A1 (en) Microchip-based precision fluid handling system
US20140311336A1 (en) Microhydraulic System, in particular for use in Planar Microfluidic Laboratories
Hua et al. A compact chemical-resistant microvalve array using Parylene membrane and pneumatic actuation
Pérez-Castillejos et al. Smart Passive Microfluidic Systems Based on Ferrofluids for μTAS Applications

Legal Events

Date Code Title Description
STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION

AS Assignment

Owner name: PERKINELMER HEALTH SCIENCES, INC., MASSACHUSETTS

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:MICRONICS, INC.;REEL/FRAME:050702/0305

Effective date: 20180928