US20030047546A1 - Laser energy delivery system employing a beam splitter outputting a selectable number of sub-beams - Google Patents
Laser energy delivery system employing a beam splitter outputting a selectable number of sub-beams Download PDFInfo
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- US20030047546A1 US20030047546A1 US10/265,425 US26542502A US2003047546A1 US 20030047546 A1 US20030047546 A1 US 20030047546A1 US 26542502 A US26542502 A US 26542502A US 2003047546 A1 US2003047546 A1 US 2003047546A1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
- B23K26/0676—Dividing the beam into multiple beams, e.g. multifocusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/145—Beam splitting or combining systems operating by reflection only having sequential partially reflecting surfaces
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/42—Printed circuits
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/30—Organic material
- B23K2103/42—Plastics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
Definitions
- the present invention generally relates to multiple laser beam positioning and energy deliver systems, and more particularly to laser micro-machining systems employed to form holes in electrical circuit substrates.
- Various laser machining devices are used to micro-machine patterns in substrates. Such systems typically are used in the manufacture of electrical circuit boards. Electrical circuit board manufacture comprises depositing conductive elements, such as conductive lines and pads, on a non-conductive, typically dielectric, substrate. Several such substrates are adhered together to form an electrical circuit board. In order to provide electrical interconnection between the various layers of an electrical circuit board, holes, called vias, are drilled through selected substrate layers and plated with a conductor. Electrical circuit boards typically include tens of thousands of vias, and as many as several hundred thousand vias.
- the present invention seeks to provide an improved laser micro-machining apparatus, such apparatus being particularly useful to form vias in electrical circuit boards.
- the present invention still further seeks to provide an improved laser beam positioning system operative to provide generally simultaneous independent positioning of a plurality of laser beams.
- the present invention still further seeks to provide laser micro-machining apparatus employing a laser beam positioning system operative to provide simultaneous independent positioning of a plurality of laser beams.
- the present invention still further seeks to provide laser micro-machining system operative to independently position a plurality of pulsed laser beams, with a minimal loss in laser energy.
- the present invention still further seeks to provide laser micro-machining apparatus that efficiently utilizes laser energy supplied by a pulsed laser, such as a solid state Q-switched laser, to generate vias in electrical circuit substrates.
- a pulsed laser such as a solid state Q-switched laser
- the present invention still further seeks to provide laser micro-machining apparatus that controls an energy property of a laser beam by splitting an input laser beam into at least one output beams that are used to micro-machine a substrate.
- the at least one output beams may be a single beam or a plurality of beams.
- the present invention still further seeks to provide a dynamic beam splitter operative to split an input laser beam into a selectable number of output sub-beams.
- the present invention still further seeks to provide a dynamic beam splitter operative to selectably split an input laser beam into a plurality of sub-beams having a generally uniform energy property.
- the present invention still further seeks to provide a system for selectably deflecting a pulsed beam to a selectably positionable beam reflector pre-positioned in an orientation to suitable for delivering energy to a selectably location on a substrate.
- Deflection of the beam may be performed at a duty cycle which is at least as fast as a pulse repetition of the laser beam.
- Positioning of the reflector is performed at a duty cycle which is slower than the pulse repetition rate.
- the present invention still further seeks to provide a dynamic beam splitter operative to split an input laser beam into a plurality of output laser beams, each of which is directed in a selectable direction.
- each of the output laser beams is emitted from a different spatial section of the beam splitter.
- the present invention still further seeks to provide a laser beam diverter operative to receive a plurality of laser beams generally propagating in a common plane, and to divert each of the laser beams to a location in a two-dimensional array of locations outside the plane.
- a laser beam positioning system useful for example, to micro-machine substrates, is operative to provide a plurality of sub-beams which are dynamically deflected in a selectable direction.
- Each sub-beam is deflected so as to impinge on a deflector, located in an array of independently positionable deflector, whereat the sub-beams are further deflected by the deflectors to impinge on a substrate at a selectable location.
- the plurality of sub-beams is generated from a single input beam by a dynamically controllable beam splitter.
- a system for delivering energy to a substrate includes a dynamically directable source of radiant energy providing a plurality of beams of radiation, propagating in a dynamically selectable direction.
- Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.
- a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation, a beam splitter operative to split the beam into a plurality of sub-beams, each sub-beam propagating in a selectable direction, and a plurality of independently positionable beam steering elements, some of which receive the plurality of sub-beams and direct them to selectable locations on the substrate.
- a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation and a dynamically configurable beam splitter disposed between the source of radiant energy and the substrate.
- a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation and an opto-electronic multiple beam generator disposed between the source of radiant energy and the substrate.
- the multiple beam generator is operative to generate at least two sub-beams from the beam and to select an energy density characteristic of each sub-beam.
- a system for delivering energy to a substrate comprises at least one source of pulsed radiant energy providing a pulsed beam of radiation along an optical axis, the pulsed beam including multiple pulses separated by a temporal pulse separation, and a multiple beam, selectable and changeable angle output beam splitter disposed between the source of radiant energy and the substrate.
- the selectable and changeable angle output beam splitter is operative to output a plurality of sub-beams at a selected angle relative to the optical axis. The angle is changeable in an amount of time that is less than the temporal pulse separation.
- a system for delivering energy to a substrate comprises at least one source of pulsed radiant energy providing a pulsed beam of radiation, the pulsed beam including multiple pulses separated by a temporal pulse separation, a beam splitter disposed between the source of radiant energy and a substrate, the beam splitter being operative to output a plurality of sub-beams at selectable angles which are changeable, and a plurality of selectable spatial orientation deflectors.
- the deflectors are operative to change a spatial orientation in an amount of time that is greater than the temporal pulse separation.
- Some of the spatial orientation deflectors are arranged to receive the sub-beams and to direct the sub-beams to the substrate.
- a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation, a beam splitter operative to split the beam into a selectable number of output beams, the output beams having an energy property functionally related to the selectable number, a beam steering element receiving an output beam and directing the output beam to micro-machine a portion of a substrate.
- a system for delivering energy to a substrate comprises at least one source of radiant energy providing a plurality of beams of radiation propagating in a plane and a plurality of deflectors receiving the plurality of beams and deflecting at least some of the beams to predetermined locations outside the plane.
- a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation, a beam splitter operative to receive the beam and to output a plurality of sub-beams propagating in a plane, and a plurality of deflectors receiving the plurality of sub-beams and deflecting at least some of the plurality of sub-beams to predetermined locations outside the plane.
- a method for delivering energy to a substrate comprises directing a first plurality of beams of radiation onto a first plurality of selectably positionable deflectors during a first time interval for directing the first plurality of beams onto a first plurality of locations, during the first time interval, selectably positioning a second plurality of selectably positionable deflectors, and during a second time interval, directing the first plurality of beams of radiation onto the second plurality of selectable positionable deflectors for directing the first plurality of beams onto a second plurality of locations.
- a system for delivering energy to a substrate comprises at least one radiant beam source providing at least one beam of radiation and at least first and second deflectors disposed to receive the at least one beam to deliver the beam to respective at least first and second at least partially overlapping locations on the substrate.
- a laser micro-machining apparatus includes at least one radiant beam source providing a plurality of radiation beams, a plurality of independently positionable deflectors disposed between the at least one radiant beam source and a substrate to be micro-machined, the plurality of independently positionable deflectors being operative to independently deliver the at least one radiation beam to selectable locations on the substrate, and a focusing lens disposed between the at least one radiant beam source and the substrate, the focusing lens receiving the plurality of radiation beams and being operative to simultaneously focus the beams onto the selectable locations on the substrate.
- an acousto-optical device includes an optical element receiving a beam of radiation along an optical axis, and a transducer associated with the optical element, the transducer forming in the optical element an acoustic wave simultaneously having different acoustic frequencies, the optical element operative to output a plurality of sub-beams at different angles with respect to the optical axis.
- a method for micro-machining a substrate includes providing a laser beam to a beam splitter device, splitting the laser beam into a first number of output beams and directing the first number of output beams to form at least one opening in a first layer of a multi-layered substrate, and then splitting the laser beam into a second number of output beams and directing ones of the second number of output beams to remove selected portions of a second layer of the multi-layered substrate via the at least one opening.
- the source of radiant energy comprises a pulsed source of radiant energy outputting a plurality of beams each defined by pulses of radiant energy.
- the pulsed source of radiant energy comprises at least one Q-switched laser.
- a dynamically directable source of radiant energy comprises a beam splitter operative to receive a beam of radiant energy and splitting the beam into a selectable number of sub-beams.
- a dynamically directable source of radiant energy comprises a beam splitter operative to receive a beam of radiant energy, to split the beam into a plurality of sub-beams and to direct the sub-beams each selectable directions.
- the beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.
- the beam splitter comprises an acousto-optical deflector having an acoustic wave generator controlled by a control signal, the acoustic wave generator generating an acoustic wave which determines the number of sub-beams output by the acousto-optical deflector.
- the beam splitter comprises acousto-optical deflector having an acoustic wave generator controlled by a control signal, the acoustic wave generator generating an acoustic wave which determines the selectable directions of the sub-beams.
- the acoustic wave in the acousto-optical deflector includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of the control signal having a distinct frequency.
- Each spatially distinct acoustic wave segment in the acoustic wave determines a corresponding spatially distinct direction of a corresponding sub-beam, which is a function of the frequency of the portion of the control signal corresponding to the acoustic wave segment.
- the number of spatially distinct acoustic wave segments determines the number of corresponding sub-beams.
- the dynamically directable source of radiant energy comprises a dynamically configurable beam splitter receiving a beam of radiant energy and splitting the beam into a selectable number of sub-beams.
- the dynamically configurable beam splitter is capable of changing at least one of the number and direction of the sub-beams within a reconfiguration time duration, and the pulses of radiant energy are separated from each other in time by a time separation which is greater than the reconfiguration time duration.
- the plurality of independently positionable beam steering elements is capable of changing the direction of the sub-beams within a redirection time duration, and the pulses of radiant energy are separated from each other in time by a time separation which is less than the redirection time duration.
- Each of the beam steering elements includes a reflector mounted on at least one selectably tilting actuator.
- the actuator comprises a piezoelectric device or a MEMs device.
- the number of beam steering devices exceeds the number of sub-beams included in the plurality of sub-beams. At least some of the plurality of sub-beams are directed to at least some of the plurality of beam steering devices while others of the plurality of the beam steering devices are being repositioned.
- the selectable number of sub-beams all lie in a plane, a two dimensional array of beam steering elements lies outside the plane, and an array of fixed deflectors optically interposed between the at least one dynamically directable source of radiant energy and the plurality of independently positionable beam steering elements is operative direct the beams lying in a plane to locations outside the plane.
- FIG. 1A is a simplified partially pictorial, partially block diagram illustration of a system and functionality for fabricating an electrical circuit constructed and operative in accordance with a preferred embodiment of the present invention
- FIG. 1B is a timing graph of laser pulses output by a laser used in the system and functionality of FIG. 1;
- FIG. 2 is a somewhat more detailed partially pictorial, partially block diagram illustration of part of an apparatus for micro-machining electrical substrates in the system and functionality of FIG. 1A;
- FIG. 3 is a somewhat more detailed partially pictorial, partially block diagram illustration of an aspect of operation of part of the system and functionality of FIG. 2;
- FIG. 4 is a flow diagram of a method for manufacturing electrical circuits in accordance with an embodiment of the invention.
- FIG. 5 is an illustration showing the result of varying the number and angle of laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2;
- FIG. 6 is an illustration showing the result of varying the angle of multiple laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2;
- FIG. 7 is an illustration showing the result of varying the angles of multiple at least partially superimposed laser beams produced by a dynamic beam splitter produced by modulation control signals including multiple at least partially superimposed different frequency components in the system and functionality of FIGS. 1A and 2;
- FIG. 8 is an illustration showing the result of varying the energy distribution among multiple laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2;
- FIGS. 9A and 9B are illustrations showing the result of varying the number of uniform diameter laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2;
- FIGS. 10A and 10B are illustrations showing the result of varying the number of uniform diameter laser beams produced by a dynamic beam splitter as shown in FIGS. 9A and 9B in accordance with a preferred embodiment of the present invention.
- FIG. 1A is a simplified partially pictorial, partially block diagram, illustration of a system and functionality for fabricating an electrical circuit, constructed and operative in accordance with a preferred embodiment of the present invention
- FIG. 1B is a timing graph of laser pulses output by a laser used in the system and functionality of FIG. 1A.
- the system seen in FIG. 1A includes laser micro-machining apparatus 10 , which also includes the functionality of delivering energy to a substrate.
- Apparatus 10 is particularly useful in the context of micro-machining holes, such as vias 12 , in printed circuit board substrates 14 , during the fabrication of printed circuit boards. Apparatus 10 may also be used in other suitable fabrication processes employing micro-machining, including without limitation, the selective annealing of amorphous silicon in flat panel displays and the removal of solder masks on electrical circuits. Accordingly, although the invention is described in the context of micro-machining printed circuit boards, the scope of the invention should not be limited solely to this application..
- Printed circuit board substrates such as a substrate 14
- a substrate 14 which are suitable to be micro-machined using systems and methods described hereinbelow, typically include dielectric substrates, for example epoxy glass, having one or more electrical circuit layers, each electrical circuit layer having selectively formed thereon a conductor pattern 16 .
- the substrates may be formed of a single layer or of a laminate formed of several substrate layers adhered together.
- the outermost layer of the substrate 14 may comprise the conductor pattern 16 formed thereon, as seen in FIG. 1A.
- the outermost layer of substrate 14 may comprise, for example, a metal foil substantially overlaying a continuous portion of the outer surface of the substrate 14 , for example as shown by the region indicated by reference numeral 17 .
- laser micro-machining apparatus 10 includes a pulsed laser 20 outputting a pulsed laser beam 22 .
- Pulsed laser beam 22 is defined by a stream of light pulses, schematically indicated by peaks 24 in laser pulse graph 26 (FIG. 1B).
- pulsed laser 20 is a frequency tripled Q-switched YAG laser providing a pulsed a UV laser beam 22 at a pulse repetition rate of between 10-50 KHz, and preferably at about 10-20 KHz.
- Suitable Q-switched lasers are presently available, for example, from Spectra Physics, Lightwave Electronics and Coherent, Inc. all of California, U.S.A.
- Other commercially available pulsed lasers, that suitably interact with typical materials employed to manufacture printed circuit boards, may also be used.
- pulsed laser 20 Another laser suitable for use as pulsed laser 20 , operative to output a pulsed UV laser beam particularly suitable for micro-machining substrates containing glass, is described in the present Applicants' copending U.S. patent application No. ______, filed concurrently herewith and claiming the benefit of U.S. provisional patent application 60/362,084, the disclosures of which are incorporated by reference in their entirety.
- pulsed laser beam 22 impinges on a first lens 28 , which preferably is a cylindrical lens operative to flatten beam 22 at an image plane (not seen) in a first variable deflector assembly, such as an acousto-optical deflector (AOD) 30 .
- AOD 30 includes a transducer element 32 and a translucent crystal member 34 formed of quartz or other suitable crystalline material.
- Transducer 32 receives a control signal 36 and generates an acoustic wave 38 that propagates through crystal member 34 of AOD 30 .
- Control signal 36 preferably is an RF signal provided by an RF modulator 40 , preferably driven by a direct digital synthesizer (DDS) 42 , or other suitable signal generator, for example a voltage controlled oscillator (VCO).
- DDS direct digital synthesizer
- VCO voltage controlled oscillator
- a system controller 44 in operative communication with DDS 42 and a laser driver 47 , is provided to coordinate between generation of the control signal 36 and laser pulses 24 defining pulsed laser beam 22 so that portions of substrate 14 are removed, e.g. by ablation, in accordance with a desired design pattern of an electrical circuit to be manufactured.
- Such design pattern may be provided, for example, by a CAM data file 46 or other suitable computer file representation of an electrical circuit to be manufactured.
- ⁇ n ⁇ n ⁇ 0 ;
- ⁇ wavelength of beam 22 ;
- ⁇ s speed of sound in the crystal 34 of AOD 30 .
- n is an integer representing the index number of a laser sub-beam, as described hereinbelow.
- AOD 30 is operative to function as a dynamic beam splitter and which governs at least one of a number segments into which beam 22 is split and its angle of deflection.
- Signal 36 may be selectably provided so as to cause acoustic wave 38 to propagate at a uniform frequency through crystal member 34 .
- signal 36 may be selectably provided so as to cause the acoustic wave 38 to propagate at different frequencies through the crystal member 34 .
- AOD 30 as a dynamic beam splitter
- FIGS. 5 - 7 Various aspects of the structure, function and operation of AOD 30 as a dynamic beam splitter are described hereinbelow with reference to FIGS. 5 - 7 .
- the structure and operation of another type of AOD, configured and arranged to function as a dynamic beam splitter and deflector is described in the present Applicants' copending provisional patent application No. ______, filed concurrently herewith, entitled: “Dynamic Multi-Pass, Acousto-Optic Beam Splitter and Deflector”.
- signal 36 causes the acoustic wave 38 to be generated in AOD 30 with different frequencies such that at a moment in time the acoustic wave 38 interacts with the laser pulse 24 , the acoustic wave 38 comprises at least two different frequencies.
- beam 22 is split into more than one segment.
- the different frequencies are spatially separated in AOD 30 at the time at which a laser pulse impinges thereon.
- the different frequencies are superimposed in a complex waveform.
- the beam 22 is segmented into several beam segments 50 , or sub-beams. Each of the segments is deflected at an angle ⁇ n which is a function of an acoustic wave frequency, or frequencies, of the acoustic wave 38 in crystal member 34 at the time the laser beam 22 , represented by peak 24 (FIG. 1B), impinges thereon.
- AOD 30 operates at a duty cycle, which is less than the pulse repetition rate of laser beam 22 .
- the time required to reconfigure the acoustic wave 38 in AOD 30 to comprise a different composition of frequencies when impinged upon by a laser pulse 24 , so as to change at least one of the number of sub-beams 50 and the respective directions thereof at the output from AOD 30 is less than the time separation between sequential pulses 24 in beam 22 .
- Each one of beam segments 50 is directed towards a second variable deflector assembly 52 .
- the second variable deflector assembly 52 is formed of a plurality of independently tiltable beam steering reflector elements 54 .
- second variable deflector assembly 52 comprises an optical MEMs device, or is formed as an array of mirrors tiltable by suitable piezo-electric motors, or is formed as an array of galvanometers, or comprises any other suitable array of independently tiltable reflector devices.
- a 6 ⁇ 6 array of reflector elements 54 elements is provided in the configuration of second variable deflector assembly 52 seen in FIG. 1A. Any other suitable quantity of independently tiltable reflector elements 54 may be used.
- a suitable optical MEMs device providing an array of independently controllable digital light switches is employs technologies used in a Digital Micromirror Device (DMDTM) available from Texas Instruments of Dallas, U.S.A.
- DMDTM Digital Micromirror Device
- a suitable array of reflector elements 54 may be constructed in accordance with fabrication principles of the DMDTM described in detail in Mignardi et. al., The Digital Micromirror Device—a Micro-Optical Electromechanical Device for Display Applications, presented in MEMS and MOEMS Technology and Applications (Rai-Choudhury, editor), SPIE Press, 2000, the disclosures of which are incorporated herein by reference.
- Each of the reflector elements 54 is operative to separately and independently steer a beam segment 50 impinging thereon to impinge on the substrate 14 at a selectable location in a target region 55 so as to micro-machine, drill or otherwise remove a portion of substrate 14 at the required location.
- operation of reflector elements 54 may be controlled, for example, by a servo controller 57 in operative communication with system controller 44 to ensure that reflector elements 54 suitably direct beam segments 50 to impinge on substrate 14 at a required location, in accordance with a desired design pattern of an electrical circuit to be manufactured.
- a desired design pattern may be provided, for example, by the CAM data file 46 or other suitable computer file representation of an electrical circuit to be manufactured.
- Each of the reflector elements 54 is configured so that a beam impinging thereon may be steered to a selectable location in a corresponding region of coverage.
- the regions of coverage, corresponding to at least some of the reflector elements 54 at least partially mutually overlap.
- the number of reflector elements 54 in the second variable deflector assembly 52 exceeds the maximum number of beam segments 50 output by AOD 30 .
- Reflector elements 54 typically operate at a duty cycle which is slower than the pulse repetition rate of laser beam 22 .
- the time required to redirect a given reflector element 54 so that a beam segment 50 impinging thereon may be redirected to a new location on substrate 14 is greater than the time separation between sequential pulses 24 in beam 22 .
- reflector elements 54 Because of the redundancy in reflector elements 54 , for any given pulse 24 in beam 22 , beam segments 50 are impinging on only some of the reflector elements 54 ., but not on others. Thus, reflector elements 54 , which are not receiving a sub-beam 50 , may be repositioned to a new spatial orientation, in preparation for receiving a sub-beam 50 from a subsequent laser pulse 24 , while at generally the same time other reflector elements 54 are directing beam segments 50 to impinge on substrate 14 .
- a folding mirror 62 As seen in FIG. 1A, a folding mirror 62 , a focusing lens 63 and a telecentric imaging lens 64 are interposed between second variable deflector assembly 52 and substrate 14 to deliver beam segments 50 to the surface of substrate 14 . It is appreciated that the optical design of lenses 63 and 64 should accommodate beam segments 50 which propagate along optical axes extending in mutually different directions.
- system 10 may include a zoom lens (not shown) operative to govern a cross sectional dimension of one or more beam segments 50 , for example in order to form holes and vias on substrate 14 having different diameters.
- zoom optics may be employed to accommodate and make uniform a diameter of beam-segments 50 which may be output by AOD with different diameters..
- the angles ⁇ n at which beam segments 50 are deflected by AOD 30 relative to the optical axis of the incoming beam 22 typically are very small, in the order of 10 ⁇ 2 radians.
- a beam angle expander such as a telescoping optical element, schematically represented by lens 56 , operative to increase the mutual angular divergence of beam segments 50 , preferably is provided downstream of AOD 30 .
- AOD 30 generally is operative to deflect sub-beams 50 so that the optical axes of beam segments 50 generally lie in a plane.
- second variable deflector assembly 52 comprises a two dimensional array that lies outside the plane of the optical axes of beam segments 50 .
- a linear to 2-dimensional mapping assembly 58 is located between AOD 30 and the second variable deflector assembly 52 .
- Mapping assembly 58 receives beam segments 50 , propagating in the same plane, and redirects the beam segments 50 to a two dimensional array of locations outside the plane of the sub-beams 50 .
- mapping assembly 58 comprises a plurality of mapped sections 60 each of which are positioned in a suitable spatial orientation so that a beam segment 50 output by AOD 30 which impinges on a given mapped section 60 is directed to a reflector element 54 , to which it is mapped.
- the acoustic wave is 38 is generated in crystal 34 in synchronization with the pulses 24 of beam 22 such that a desired acoustic wave structure is present in crystal member 34 at the time a first laser beam pulse impinges thereupon.
- the acoustic wave 38 may have a uniform frequency throughout crystal 34 , which produces a single beam segment 50 .
- acoustic wave may have several different frequencies. Typically, the different frequencies may be, for example, at various spatial segments along the length of acoustic wave 38 to produce several somewhat spaced apart beam segments 50 .
- the duty cycle of AOD 30 is sufficiently fast such that it can be dynamically reconfigured to selectably and differently split or deflect each pulse 24 in a beam 22 .
- dynamic reconfiguration of the beam splitter is accomplished by forming acoustic waves having mutually different structures in AOD 30 at the moment each pulse 24 defining beam 22 impinges on AOD 30 .
- each beam segment 50 causes each beam segment 50 to be deflected at a selectable angle ⁇ n to impinge on a selected mapped section 60 of mapping assembly 58 , preferably after passing through beam expander lens 56 .
- Each beam segment 50 is directed by an appropriate mapped section 60 to a corresponding location on one of reflector elements 54 at second variable deflector assembly 52 .
- the reflector element 54 is suitably tilted so that the beam segment 50 is subsequently further directed to a location on substrate 14 for micro-machining or drilling a required location of the substrate 14 .
- AOD 30 operates at a duty cycle which generally is faster than the pulse repetition rate of laser beam 22 , the deflection that it provides is relatively limited in that it deflects beam segments 50 by relatively small angles of deflection.
- the beam segments 50 typically all lie in the same plane.
- the time required to position individual reflector elements 54 in second variable deflector assembly 52 typically is greater than the time separation between subsequent pulses defining laser beam 22 .
- each reflector element 54 may be tilted over a relatively large range of angles, preferable in at least 2-dimensions, a laser sub-beam 50 impinging on the reflector element 54 may be delivered to cover a relatively large spatial region.
- each of reflector elements 54 is suitably tiltable so as that adjacent reflector elements 54 are operable to deliver beam segments 50 to cover mutually overlapping regions on the surface of substrate 14 .
- the reflector elements 54 in second variable deflector assembly 52 are able to deliver beam segments 50 to substantially any location in the field of view 68 of the lenses 63 and 64 .
- substrate 14 and apparatus 10 are mutually displaced relative to system 10 so that the field of view 68 covers a different portion of the substrate 14 .
- the number of reflector elements 54 in assembly 52 typically exceeds the number of beam segments 50 into which laser beam 22 is split by AOD 30 .
- beam segments 50 impinge on a first plurality of the reflector elements 54 , but not on other reflector elements 54 .
- the initial time interval is used to reposition the other reflector elements 54 which do not receive a beam segment 50 , as described hereinbelow.
- beam segments 50 are deflected by AOD 30 to impinge on at least some of the reflector elements 54 which did not receive beam segments 50 during the previous time interval.
- the reflector elements 54 employed in the second time interval are now suitably repositioned to deflect the sub-beam 50 to the substrate 14 .
- At least some of the reflector elements that are not impinged on by a beam segment 50 possibly including reflector elements that were used in the first time interval, are repositioned for use in a subsequent time interval. This process of repositioning reflector elements 54 that are not used during a given time interval is repeated.
- the time required to position a single reflector element 54 is in the order of between 1-10 milliseconds, corresponding to about between 20-200 pulses of a 20 KHz Q-switched laser.
- the length of time, which exceeds the duty cycle of the laser pulses 24 , used to position reflectors 54 ensures stabilized beam pointing accuracy.
- the use of multiple reflectors 54 ensures a redundancy which minimizes the loss of pulses while repositioning reflector 54 following micromachining of a location on substrate 14 .
- each beam segment 50 it may be necessary for more than one beam segment 50 to simultaneously impinge on the surface of substrate 14 at the same location.
- multiple beam segments 50 are each individually deflected to impinge on separate reflectors 54 , which are each oriented to direct the sub-beams 50 to impinge on substrate 14 at the same location.
- FIG. 2 is a somewhat more detailed partially pictorial, partially block diagram illustration of part of an apparatus 110 for micro-machining electrical circuits in the system and functionality of FIG. 1.
- laser machining apparatus 110 may be thought of as a system for delivering energy to a substrate.
- laser micro-machining apparatus 110 includes a pulsed laser 120 outputting a pulsed laser beam 122 .
- Pulsed laser beam 122 is defined by a stream of light pulses.
- pulsed laser 20 is a frequency tripled Q-switched YAG laser providing a pulsed a UV light beam 122 at a pulse repetition rate of between 10-50 KHz, and preferably between about 10-20 KHz.
- Suitable Q-switched lasers are presently available, for example, from Spectra Physics, Lightwave Electronics and Coherent, Inc. all of California, U.S.A.
- Other commercially available pulsed lasers, that suitably interact with typical materials employed to manufacture printed circuit boards, may also be used.
- pulsed laser 120 Another laser suitable for use as pulsed laser 120 , operative to output a pulsed UV laser beam particularly suitable for micro-machining substrates containing glass, is described in the present Applicants' copending U.S. patent application No. ______, filed concurrently herewith and claiming the benefit of U.S. provisional patent application 60/362,084, the disclosures of which are incorporated by reference in their entirety.
- a pulsed laser beam 122 impinges on a first lens 128 , which preferably is a cylindrical lens operative to flatten beam 122 at an image plane (not seen) on a first variable deflector assembly, such as an acousto-optical deflector (AOD) 130 .
- AOD 130 includes a transducer element 132 and a translucent crystal member 134 formed of quartz or any other suitable crystalline material.
- Transducer 132 is controlled by a control signal (not shown), corresponding to control signal 36 in FIG. 1A, and is operative to generate acoustic waves 138 that propagate through crystal member 134 of AOD 130 , similarly as described with reference to FIG. 1A.
- the acoustic waves 138 are operative to interact with laser beam 122 in crystal member 134 to dynamically and selectably split and deflect pulses in laser beam 122 , to output beam segments 150 or sub-beams 150 .
- AOD 130 is thus operative to function as a dynamic beam splitter which controls, by forming a suitable acoustic wave 138 having a selectable wave configuration, at least one of a number segments 150 into which beam 122 is split and a direction at which the resulting beam segments are directed.
- AOD 130 as a dynamic beam splitter
- FIGS. 5 - 7 Various aspects of the structure, function and operation of AOD 130 as a dynamic beam splitter are described hereinbelow with reference to FIGS. 5 - 7 .
- the structure and operation of another type of AOD configured and arrange to function as a dynamic beam splitter is described in the present Applicants' copending provisional patent application No. ______, filed concurrently herewith, entitled: “Dynamic Multi-Pass, Acousto-Optic Beam Splitter and Deflector”.
- acoustic wave 138 may be formed in AOD 30 with several different frequencies such that at a moment in time at which the acoustic wave 138 interacts with the laser beam 122 , the acoustic wave 138 comprises at least two different frequencies.
- beam 122 is split into more than one segments 150 .
- the different frequencies may be spatially separated in AOD 130 at the time at which a laser pulse impinges thereupon. Alternatively, the different frequencies may be superimposed in a complex waveform.
- beam 122 may be segmented into several beam segments 150 , or sub-beams.
- Each of the beam segments 150 is deflected at an angle ⁇ n which is a function of an acoustic wave frequency, or frequencies, of acoustic wave 138 in crystal member 134 at the time a laser pulse in laser beam 122 impinges thereon.
- AOD 30 operates at a duty cycle which is shorter than the pulse repetition rate of laser beam 122 .
- the time required to reconfigure an acoustic wave 138 in AOD 130 to comprise a different composition of frequencies when interacting with a laser pulse in laser beam 122 , so as to change at least one of the number and respective directions of sub-beams 150 is less than the time separation between sequential pulses in laser beam 122 .
- Each one of beam segments 150 is directed to a first selectable target located at a second variable deflector assembly 152 .
- the second variable deflector assembly 152 is formed of a plurality of independently tiltable beam steering reflector elements 154 .
- Each of the reflector elements 154 also operates to further separately and independently steer a beam segment 150 , impinging thereon, to impinge on substrate 14 , as described with reference to FIG. 1A, and subsequently to micro-machine, drill or otherwise remove a portion of substrate 14 at such location.
- each reflector element 154 comprises a mirror 240 , or another suitable reflective element, mounted on a positioner assembly 242 comprising a base 244 , a mirror support 246 , at least one selectable actuator 248 , 3 actuators are shown assembled in a starlike arrangement, and a biasing spring (not shown).
- Each of the selectable actuators 248 is, for example, a piezoelectric actuator, such as a TORQUE-BLOCKTM actuator available from Marco System analyses und Anlagen GmbH of Germany, independently providing an up and down positioning as indicated by arrows 249 so as to selectively tilt mirror 240 into a desired spatial orientation for receiving a beam segment 150 and subsequently to direct the beam segment 150 to impinge on a desired location on the surface of substrate 14 .
- a piezoelectric actuator such as a TORQUE-BLOCKTM actuator available from Marco System analyses und Anlagen GmbH of Germany
- each of the actuators 248 is operatively connected to a servo controller 57 which in turn is operatively connected to and controlled by system controller 44 as described hereinabove with respect to FIG. 1A.
- the relative spatial orientation, or tilt, of reflector elements 154 is independently controlled in synchronization with the laser pulses defining beam 122 and with the generation of control signal controlling the operation of AOD 130 to dynamically split and deflect laser beam 122 .
- a beam segment 150 is deflected to a desired reflector element 154 , which in turn is suitably oriented so that the beam segment 150 ultimately impinges on substrate 14 at a desired location.
- each of the reflector elements 154 is configured so that a sub-beam 150 may be steered to a selectable location in a corresponding region of coverage on substrate 14 .
- the regions of coverage corresponding to at least some of the reflector elements 154 at least partially mutually overlap.
- the number of reflector elements 154 in second variable deflector assembly 152 typically exceeds the maximum number of beam segments 150 output by AOD 130 .
- second variable deflector assembly includes 36 reflector elements, while 6 sub-beams 150 are output by AOD 130 .
- Reflector elements 154 typically operate at a duty cycle which is less than the pulse repetition rate of laser beam 122 .
- the time required to mechanically reposition a reflector element 154 , so that a beam segment 150 impinging thereupon may be redirected to a new location on substrate 14 is greater than the time separation between sequential pulses defining beam 122 .
- the angles ⁇ n at which beam segments 150 are deflected by AOD 130 relative to the optical axis of the incoming beam 122 typically are very small, in the order of 10 ⁇ 2 radians.
- a beam angle expander such as a telescoping optical element, schematically represented by lens 156 , operates to increase the mutual angular divergence of beam segments 150 , preferably is provided downstream of AOD 130 .
- AOD 130 generally is operative to deflect beams 50 so that the optical axes of beam segments 150 generally lie in the same plane, while second variable deflector assembly 152 , comprising a two dimensional array that lies outside the plane of the optical axes of beam segments 150 .
- a 2-dimensional mapping assembly 180 is interposed between AOD 130 and the second variable deflector assembly 152 .
- Mapping assembly 180 receives beam segments 150 , all generally propagating in a plane, and redirects the beam segments 150 to a two dimensional array of locations outside the plane of the sub-beams 150 .
- mapping assembly 180 comprises an array of support members 182 which comprise a plurality of optically transmissive portions 184 , through which beam segments 150 can pass, and a plurality of reflective portions 186 operative to reflect beam segments 150 , which impinge thereupon.
- the reflective portions 186 generally are spaced apart on each support member 182 , and the respective locations of reflective portions 186 are preferably mutually laterally staggered among support members 182 .
- Each reflective portion 186 is generally mapped to a corresponding reflector element 154 . Consequently, each beam segment 150 entering assembly 180 is received by the respective reflective portion 186 on a first support member 187 , or passes through one or more support members until it is received by a reflective portion 186 on one of the other support members 182 .
- Assembly 180 thus provides a means for redirecting beam segments 150 , which propagate along optical axes lying in a plane of beam propagation, to impinge on a two dimensional array of locations lying outside the plane of propagation.
- AOD 130 selectively deflects a beam segment 150 to impinge on one of the reflective portions 186 formed on one of the support members 182 in assembly 180 . Because reflective portions 186 intersect the plane of propagation at mutually staggered locations, along both an X axis and a Y axis in the plane of propagation, the angle at which a beam segment 150 is selectably deflected by AOD 130 determines the reflective portion 186 on which it impinges. Thus, a location in a two dimensional array of selectable locations, such as at second variable deflector assembly 152 , lies outside the plane of propagation.
- FIG. 3 is a somewhat more detailed partially pictorial, partially block diagram illustration of an aspect of operation of part of the system and functionality of FIG. 2.
- Laser pulses 224 in a laser pulse timing graph 226 are designated 234 , 236 and 238 respectively.
- Laser 122 typically comprises laser pulses 224 which are spaced time.
- Control signals 244 , 246 and 248 are shown below laser pulses 234 , 236 and 238 respectively.
- the control signals 244 - 248 for controlling the generation of the pulse 138 are shown being fed into a transducer 252 associated with an AOD 260 .
- AOD 260 typically corresponds to AOD 130 in FIG. 2.
- Acoustic wave, corresponding to control signals 264 - 268 are shown in AOD 260 .
- Acoustic wave 264 corresponds to control signal 244
- acoustic wave 266 corresponds to control signal 246
- acoustic wave 268 corresponds to control signal 244 .
- only a part of AOD 260 is shown for each of laser pulses 224 .
- an input laser beam 270 impinges on the AOD 260 .
- the acoustic waves 264 - 268 respectively cause laser beam 270 to be segmented into beam segments, generally designated 250 , each of which is deflected at an angle of deflection which is functionally related to corresponding frequencies in acoustic waves 264 - 268 .
- a beam segment 250 is deflected to impinge on one of the reflector elements 280 , 282 and 284 .
- FIG. 3 also shows with particularity the timing relationship between laser pulses 224 , operation of AOD 260 as a dynamic beam deflector having a duty cycle which is faster than the pulse repetition rate represented by pulses 224 , and operation of reflector elements 280 , 282 and 284 ., having a duty cycle which is slower than the pulse repetition rate
- the reconfiguration time required to introduce a different acoustic wave into AOD 260 is less than the time separation between pulses 234 .
- the respective waveforms of control signals 244 - 248 , and the respective waveforms of acoustic waves 264 - 268 are each different thereby resulting in the selectable deflection of beam segments 250 for each of pulses 224 .
- the frequency in a first spatial wave segment 290 changes, while the frequency in a second spatial wave segment 292 remains unchanged.
- a first beam segment 294 corresponding to the second spatial wave segment 292 , impinges on third reflector element 284 .
- Reflector element 284 is held stationary to receive the first beam segment 294 for each of pulses 234 and 236 respectively.
- a second beam segment 296 is deflected in a first direction by first spatial segment 290 of acoustic wave 264 , while a third beam segment 298 is deflected in a different direction by first spatial segment 290 in acoustic wave 266 .
- pulses 234 and 236 neither of the beam segments 250 impinge on first and second deflector elements 280 and 282 respectively, but rather are directed to other deflector elements which are not shown.
- the time interval between pulses 234 and 236 is utilized to spatially reposition the first and second reflector elements 280 and 282 .
- a new wave form of acoustic wave 268 is formed in AOD 260 to selectably split and deflect beam 270 at pulse 238 . As seen below pulse 238 , none of the beam segments 250 impinge on first reflector element 280 or third reflector element 284 .
- a fourth beam segment 300 impinges on deflector element 282 .
- Beam segment 300 is deflected in a direction that is functionally related to the frequency of acoustic wave 268 in second spatial segment 292 . It is noted that the frequency in the second spatial segment 292 of acoustic wave 268 has been changed relative to the acoustic waves 264 and 266 .
- a fifth beam segment 302 is deflected in a direction that is functionally related to the frequency of acoustic wave 268 in first spatial segment 290 .
- the repositioning time of reflector elements 280 - 284 is slower than a time separation between pulses 224 .
- the reconfiguration time of dynamic beam splitter is less than the time separation between pulses, any redundant reflector elements can be repositioned over a time interval greater than the separation between pulses.
- a reflector element that is in a suitable position can then be selected in a time interval that is less than the time separation between pulses.
- FIG. 4 is a flow diagram 320 of a methodology for manufacturing electrical circuits in accordance with an embodiment of the invention.
- the methodology is described in the context of a process for forming micro vias in a multi layered printed circuit board substrate having a metal foil layer overlaying a dielectric substrate.
- the presently described methodology for manufacturing electrical circuits employs at least one dynamically directable source of radiant energy providing a plurality of beams of radiation, each beam propagating in a dynamically selectable direction.
- the beams are selectably directed to a plurality of independently positionable beam steering elements. Some of the beam steering elements receive the beams and direct them to selectable locations on a printed circuit board substrate to be micro-machined.
- Suitable apparatus for generating a plurality of beams propagating in dynamically selectable directions is the laser micro-machining apparatus 10 is described with reference to FIG. 1A, and laser micro-machining apparatus 110 described with reference to FIG. 2.
- beams propagating in dynamically selectable directions may be produced, for example, by passing one or more beams output by at least one Q-switched laser through at least one dynamic beam splitting and deflecting device.
- several separately generated beams may be treated separately or in combination.
- the dynamic deflector device is operable to selectably provide at least one metal machining beam-segment.
- a beam splitting functionality is provided by the dynamic deflector, although a separate beam splitting device providing a selectable beam splitting function may be provided.
- the metal-machining beam-segment has an energy density that is suitable to remove a portion of the metal foil layer, for example by burning or by ablation.
- Each metal machining beam segment is dynamically deflected to impinge on a beam steering device, such as a tiltable reflector element 154 in FIG. 2.
- the beam steering device is suitably positioned so that the metal machining beam segment is steered to a selectable location on a PCB substrate whereat a portion of the metal foil is removed to expose the underlying dielectric substrate.
- each subsequent pulse may be deflected by the dynamic beam deflector to impinge on an already positioned beam steering device.
- the dynamic deflector device is provide at least one dielectric machining beam-segment having an energy property that is different from the metal machining beam-segment.
- a beam splitting functionality may be provided, for example by the dynamic deflector or by a suitable beam splitter device.
- dielectric machining beam segment has a lower energy density than a metal machining beam-segment.
- the energy property of the dielectric machining beam segment is suitable to remove a portion of the dielectric layer, for example by burning or by ablation, but is not suitable to remove a portion of the metal foil.
- the respective energy densities of beam segments 50 and 150 are controlled by splitting laser beam 22 and 122 into a selectable number of beam segments 50 and 150 , and by maintaining the diameter of the resulting beam segment 150 irrespective of the number of beam segments.
- Each dielectric machining beam segment is dynamically deflected to impinge on a beam steering device, such as a tiltable reflector element 154 in FIG. 2.
- the beam steering device is suitably positioned so that each dielectric machining beam segment is steered to a selectable location whereat a portion of the metal foil has already been removed, to expose of the dielectric layer, and a desired portion of the dielectric is removed.
- each subsequent pulse may be deflected by the dynamic beam deflector to impinge on an already positioned beam steering device. It is appreciated that because a reduced energy density is required to remove dielectric, beam 122 may be divided into a greater number of dielectric machining beam segments, resulting in a greater system throughput for removing dielectric as compared to removing metal foil.
- Removal of dielectric continues at selectable locations until the dielectric is removed for substantially all of the locations at which metal foil was previously removed. Once this operation is completed, a substrate can be repositioned for micro-machining of a subsequent portion thereof.
- an AOD is configured and operative to dynamically and selectably split an incoming beam of radiation into a selectable number of beam segments, each of which is dynamically directed in a selectable direction.
- FIG. 5 is an illustration of varying the number and angle of laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1 and 2.
- Laser pulses 424 in a laser pulse timing graph 426 are designated 434 , 436 and 438 respectively.
- Laser pulses 424 define, for example, beam 122 in FIG. 2 and are mutually separated in time.
- Control signals 444 , 446 and 448 are shown above laser pulse timing graph 426 , corresponding to pulses 434 , 436 and 438 respectively.
- the control signals 444 - 448 are shown being fed into a transducer 452 associated with an AOD 460 , corresponding to AOD 130 in FIG. 2.
- Acoustic waves, 464 , 466 and 468 , corresponding to control signals 444 - 448 are shown in AOD 460 .
- Acoustic wave 464 corresponds to control signal 444
- acoustic wave 466 corresponds to control signal 446
- acoustic wave 468 corresponds to control signal 448 .
- an input laser beam 470 impinges on the on AOD 460 .
- the acoustic waves 464 - 468 respectively cause laser beam 470 to be segmented into a selectable number of beam segments, generally designated 450 .
- Each of the beam segments 450 is deflected at an angle of deflection which is functionally related to a corresponding frequency in a portion of acoustic waves 464 - 468 .
- FIG. 5 shows with particularity the timing relationship between laser pulses 424 and operation of AOD 460 as a dynamic beam splitter which is operative to split an input beam 470 into a selectable number of beam segments 450 at a duty cycle which is less than the pulse repetition rate represented by pulses 424 .
- a control signal 444 having a generally uniform frequency generates an acoustic wave 464 in AOD 460 also having a generally uniform frequency.
- a single beam-segment 480 is output. It is noted that a part of beam 470 may not be deflected. This is ignored for the purposes of simplicity of illustration.
- Each of the spatially distinct segments 502 - 512 respectively has a generally uniform acoustic frequency and an acoustic frequency which is different from a neighboring segment.
- Each of the spatially distinct segments 562 and 564 respectively has a generally uniform acoustic frequency and an acoustic frequency which is different from its neighboring segment.
- the division of a beam 470 into different numbers of beam-segments 450 results in beam segments 450 each having different a different width.
- FIG. 6 is an illustration of varying the angle of multiple laser beams produced by a dynamic beam deflector in the system and functionality of FIGS. 1A and 2.
- Laser pulses 624 in a laser pulse timing graph 626 are designated 634 and 636 respectively.
- Laser pulses 624 define, for example, beam 22 in FIG. 1 and beam 122 in FIG. 2, and are mutually separated in time.
- Control signals 644 and 646 are shown above laser pulse timing graph 626 , corresponding to pulses 634 and 636 respectively.
- the control signals 644 and 646 are shown being fed into a transducer 652 associated with an AOD 660 , corresponding to AOD 30 in FIG. 1 and AOD 130 in FIG. 2.
- Acoustic waves, corresponding to control signals 644 and 646 are shown in AOD 660 .
- Acoustic wave 664 corresponds to control signal 644
- acoustic wave 666 corresponds to control signal 646 .
- an input laser beam 670 impinges on the on AOD 660 .
- the acoustic waves 664 and 666 respectively cause laser beam 670 to be segmented into a selectable number of beam segments, generally designated 650 , as described with reference to FIG. 5.
- Each of the beam segments 650 is deflected at an angle of deflection which is functionally related to a corresponding frequency in a portion of acoustic waves 664 - 666 .
- FIG. 6 shows with particularity the timing relationship between laser pulses 634 and operation of AOD 660 as a dynamic beam splitter which is operative to split the input beam 670 into a selectable number of beam segments 650 , and to separately deflect the beam segments 650 at distinct angles of deflection, all at a duty cycle which is less than the pulse repetition rate represented by pulses 624 .
- Each of the spatially distinct segments 702 - 712 respectively has a generally uniform acoustic frequency and an acoustic frequency which is different from a neighboring segment.
- Each of the spatially distinct segments 762 - 772 respectively has a generally uniform acoustic frequency and an acoustic frequency which is different from a neighboring segment.
- beam-segments 782 - 790 are output, in which beam-segment 782 corresponds to acoustic wave segment 762 , beam-segment 784 corresponds to acoustic wave segment 764 , beam-segment 786 corresponds to acoustic wave segment 766 , beam-segment 788 corresponds to acoustic wave segment 768 , beam-segment 790 corresponds to acoustic wave segment 770 , and beam-segment 792 corresponds to acoustic wave segment 792 .
- FIG. 7 is an illustration of varying the angles of multiple at least partially superimposed laser beams produced by a dynamic beam splitter, by modulating, for example control signals 36 , including multiple at least partially superimposed different frequency components, in the system and functionality of FIGS. 1A and 2.
- a control signal 844 is shown being fed into a transducer 852 associated with an AOD 860 , corresponding to AOD 30 in FIG. 1 and AOD 130 in FIG. 2.
- An acoustic wave 864 corresponding to control signal 844 is shown in AOD 860 .
- Control signal 844 corresponds to a mutual superimposition of three control signals (not shown) each having a different frequency. It is noted that a greater or lesser number of control signals may be superimposed, and that superimposition of three control signals is chosen merely for the purposes of simplicity of illustration.
- an input laser beam 870 impinges on the on AOD 860 and is split into three beam segments 880 , 882 and 884 .
- Each of the beam segments 880 - 884 has a generally uniform width generally related to the width of acoustic wave 864 in AOD 860 .
- Each of the beam segments 880 , 882 and 884 is deflected at an angle functionally related to one of the frequency components is acoustic wave 864 , and at least partially mutually overlap.
- FIG. 8 is an illustration of varying the energy distribution among multiple laser beam segments produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2.
- a uniform spatial splitting of the beam results in beam segments, such as beam segments 150 in FIG. 2, which do not have a uniform energy property.
- a beam shaping element located upstream of the dynamic beam splitter, may be provided to form a beam, such as beam 22 or 122 , which has a non-Gaussian, preferably top-hat shaped energy profile.
- sub-beams having a generally uniform energy characteristic that is formed without using an external beam shaping element. Additionally, an energy characteristic of the sub beams may be changed in a time which is less than a separation time between pulses in a pulsed laser.
- laser pulses 924 in a laser pulse timing graph 926 are designated 934 and 936 respectively.
- Laser pulses 924 define, for example, beam 122 in FIG. 2 and are mutually separated in time.
- An input energy graph 940 indicates a typical Gaussian energy characteristic, in one dimension, of a laser beam such as beam 122 .
- Control signals 944 and 946 are shown above laser pulse timing graph 926 , and correspond to pulses 934 and 936 respectively.
- the control signals 944 and 946 are shown being fed into a transducer 952 associated with an AOD 960 , corresponding to AOD 30 in FIG. 1 and AOD 130 in FIG. 2.
- Acoustic waves, corresponding to control signals 944 and 946 are shown in AOD 960 .
- Acoustic wave 964 corresponds to control signal 944 and acoustic wave 966 corresponds to control signal 946 .
- an input laser beam 970 impinges on the AOD 960 .
- the acoustic waves 964 and 966 respectively cause laser beam 970 to be segmented into a selectable number of beam segments, generally designated 950 .
- Each of the beam segments 950 is deflected at an angle of deflection which is functionally related to a corresponding distinct frequency in a portion of acoustic waves 964 and 966 , and the width of beam segments is related to the width of a portion of acoustic waves 964 and 966 which has a distinct frequency.
- signal 944 is divided into six segments 945 which are not of equal width.
- the resulting acoustic wave 964 thus is likewise formed of six segments which are not of equal width. Moreover, the respective widths of the resulting beam segments 972 - 982 are also not equal.
- the respective widths of segments 945 can be dynamically arranged and modified to produce beam segments, which, although having different spatial widths, have a generally uniform energy characteristic.
- the selectable division of acoustic wave 964 into non-uniform segments 945 produces a selectable energy characteristic of each beam 972 - 982 , indicated by the area under output energy graph 984 .
- the dynamic splitting of beam 970 can be such that a relatively small spatial section of a high energy portion of beam 970 is used to produce beam segments 976 and 978 , a relatively large spatial section of a low energy portion of beam 970 is used to produce beam segments 972 and 982 , and an intermediate size spatial portion of beam 970 is used to produce beam segments 974 and 980 .
- Energy uniformity is seen in histogram 990 .
- energy uniformity of output beam segments may be controlled and made generally uniform by distributing energy among beam segments 972 - 982 , generally without attenuating the energy of input beam 970 .
- energy uniformity may be controlled independently of the number of beam segments 984 into which beam 970 is split, or the direction of deflection of respective beam segments.
- suitable optics (not shown) are provided downstream of AOD 960 in order to accommodate and control the respective diameters of beam-segments 972 - 982 , each of which have a different width, but generally uniform energy distribution.
- FIG. 8 it is also seen that the energy distribution among beam segments 972 - 982 may be varied between pulses 924 .
- segments 1005 of control signal 946 have been made generally uniform.
- the spatial width of each of the beam segments 950 resulting from acoustic wave 966 is generally uniform, however the energy distribution among the beam segments resulting from interaction of acoustic wave 966 and beam 970 is not uniform, as shown by histogram 1010 .
- Uniformity of an energy characteristic among beam segments formed by an acoustic wave 966 may be improved, for example by providing a beam shaping element (not shown) external to AOD 960 and operative to shape the energy profile of input beam 970 .
- the power of acoustic wave 966 at various segments 1015 may be varied. In generally an increase power of acoustic wave 966 results in a higher transmissivity through an AOD, namely a relatively greater portion of energy passes through AOD 960 .
- an energy characteristic of beam segments which are formed from a spatial portion of 970 having a relatively high energy level may be attenuated by reducing thereat the power of acoustic wave 966 .
- FIGS. 9A and 9B are illustrations of varying the number of uniform diameter laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1 and 2.
- a beam size modifier 1120 is provided to selectably change the size of an input beam 1170 impinging on an AOD 1130 .
- the beam size modifier may be, for example, a beam expander, zoom lens or cylindrical telescope.
- a modified size beam 1172 is output from beam size modifier 1120 .
- the modified size beam 1172 impinges on only a portion of AOD 1130 , thereby reducing an operative portion of AOD 1130 .
- a control signal 1136 is provided to form an acoustic wave 1138 in AOD 1130 , which in turn is operative to selectably split modified size beam 1172 into two beam segments 1150 each having, for example, a standardized modular size.
- a modified size beam 1182 is output from beam size modifier 1120 .
- the size of beam 1182 is different from beam 1172 , is substantially not modified respective of beam 1170 and impinges on substantially and entire operative portion of AOD 1130 .
- a control signal 1146 is provided to form an acoustic wave 1148 in AOD 1130 , which in turn is operative to selectably split beam 1182 into six beam segments 1190 .
- Each of beam segments have, for example, a standardized modular size corresponding to the size of beam segments 1150 .
- FIGS. 10A and 10B are an illustration of varying the number of uniform diameter laser beams produced by a dynamic beam splitter as shown in FIG. 9 in accordance with a preferred embodiment of the present invention.
- An array 1200 of partially transmissive beam splitter elements 1202 - 1212 is provided in cascade to produce a plurality of separated beam segments, which are provided to a dynamic beam deflector 1230 .
- each beam splitter element is determined as a function of its location relative to a last beam splitter element in the array.
- a first beam splitter element 1202 deflects 16.7% of the input beam
- a second beam splitter element 1204 deflects 20% of the input beam reaching it
- a third beam splitter element 1206 deflects 25% of the input beam reaching it
- a fourth beam splitter element 1208 deflects 33.3% of the input beam reaching it
- a fifth beam splitter element 1210 deflects 50% of the input beam reaching it
- a sixth and last beam splitter element 1212 deflects 100% of the input beam reaching it.
- all of the beam splitter elements 1202 - 1212 are positioned in line to receive a laser input beam 1222 , and a plurality of six distinct beam segments 1224 , each having about 16.7% of the total energy in input beam 1222 , are output to impinge on a dynamic beam deflector 1230 .
- a spatially sectioned acoustic wave 1238 is formed in AOD 1230 and is operative to dynamically deflect each of beam segments 1222 , generally as described hereinabove.
- beam splitter elements 1202 - 1208 are out of the optical path of laser input beam 1222 , such that beam 1222 first impinges on beam splitter element 1210 . Only two distinct beam segments 1226 , each having about 50% of the total energy in input beam 1222 , are output to impinge on a dynamic beam deflector 1230 .
- a spatially sectioned acoustic wave 1238 is formed in AOD 1230 and is operative to dynamically deflect each of beam segments 1222 , generally as described hereinabove.
- an a dynamic deflector comprises an AOD and is operative to perform at least on of the following functionalities: selectably split an input beam into a selectable number of output beams, to select an energy characteristic of the output beams, and to direct the output beams each at a selectable angle.
Abstract
A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.
Description
- This application claims the benefit of U.S. Provisional Patent Application No. 60/297,453, filed Jun. 13, 2001, the disclosure of which is incorporated by reference in its entirety.
- The present invention generally relates to multiple laser beam positioning and energy deliver systems, and more particularly to laser micro-machining systems employed to form holes in electrical circuit substrates.
- Various laser machining devices are used to micro-machine patterns in substrates. Such systems typically are used in the manufacture of electrical circuit boards. Electrical circuit board manufacture comprises depositing conductive elements, such as conductive lines and pads, on a non-conductive, typically dielectric, substrate. Several such substrates are adhered together to form an electrical circuit board. In order to provide electrical interconnection between the various layers of an electrical circuit board, holes, called vias, are drilled through selected substrate layers and plated with a conductor. Electrical circuit boards typically include tens of thousands of vias, and as many as several hundred thousand vias.
- The present invention seeks to provide an improved laser micro-machining apparatus, such apparatus being particularly useful to form vias in electrical circuit boards.
- The present invention still further seeks to provide an improved laser beam positioning system operative to provide generally simultaneous independent positioning of a plurality of laser beams.
- The present invention still further seeks to provide laser micro-machining apparatus employing a laser beam positioning system operative to provide simultaneous independent positioning of a plurality of laser beams.
- The present invention still further seeks to provide laser micro-machining system operative to independently position a plurality of pulsed laser beams, with a minimal loss in laser energy.
- The present invention still further seeks to provide laser micro-machining apparatus that efficiently utilizes laser energy supplied by a pulsed laser, such as a solid state Q-switched laser, to generate vias in electrical circuit substrates.
- The present invention still further seeks to provide laser micro-machining apparatus that controls an energy property of a laser beam by splitting an input laser beam into at least one output beams that are used to micro-machine a substrate. The at least one output beams may be a single beam or a plurality of beams.
- The present invention still further seeks to provide a dynamic beam splitter operative to split an input laser beam into a selectable number of output sub-beams.
- The present invention still further seeks to provide a dynamic beam splitter operative to selectably split an input laser beam into a plurality of sub-beams having a generally uniform energy property.
- The present invention still further seeks to provide a system for selectably deflecting a pulsed beam to a selectably positionable beam reflector pre-positioned in an orientation to suitable for delivering energy to a selectably location on a substrate. Deflection of the beam may be performed at a duty cycle which is at least as fast as a pulse repetition of the laser beam. Positioning of the reflector is performed at a duty cycle which is slower than the pulse repetition rate.
- The present invention still further seeks to provide a dynamic beam splitter operative to split an input laser beam into a plurality of output laser beams, each of which is directed in a selectable direction. In accordance with an embodiment of the invention, each of the output laser beams is emitted from a different spatial section of the beam splitter.
- The present invention still further seeks to provide a laser beam diverter operative to receive a plurality of laser beams generally propagating in a common plane, and to divert each of the laser beams to a location in a two-dimensional array of locations outside the plane.
- In accordance with a general aspect of an embodiment of the present invention, a laser beam positioning system, useful for example, to micro-machine substrates, is operative to provide a plurality of sub-beams which are dynamically deflected in a selectable direction. Each sub-beam is deflected so as to impinge on a deflector, located in an array of independently positionable deflector, whereat the sub-beams are further deflected by the deflectors to impinge on a substrate at a selectable location. In accordance with an embodiment of the invention, the plurality of sub-beams is generated from a single input beam by a dynamically controllable beam splitter.
- In accordance with a general aspect of an embodiment of the invention, a system for delivering energy to a substrate, includes a dynamically directable source of radiant energy providing a plurality of beams of radiation, propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.
- In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation, a beam splitter operative to split the beam into a plurality of sub-beams, each sub-beam propagating in a selectable direction, and a plurality of independently positionable beam steering elements, some of which receive the plurality of sub-beams and direct them to selectable locations on the substrate.
- In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation and a dynamically configurable beam splitter disposed between the source of radiant energy and the substrate.
- In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation and an opto-electronic multiple beam generator disposed between the source of radiant energy and the substrate. The multiple beam generator is operative to generate at least two sub-beams from the beam and to select an energy density characteristic of each sub-beam.
- In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of pulsed radiant energy providing a pulsed beam of radiation along an optical axis, the pulsed beam including multiple pulses separated by a temporal pulse separation, and a multiple beam, selectable and changeable angle output beam splitter disposed between the source of radiant energy and the substrate. The selectable and changeable angle output beam splitter is operative to output a plurality of sub-beams at a selected angle relative to the optical axis. The angle is changeable in an amount of time that is less than the temporal pulse separation.
- In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of pulsed radiant energy providing a pulsed beam of radiation, the pulsed beam including multiple pulses separated by a temporal pulse separation, a beam splitter disposed between the source of radiant energy and a substrate, the beam splitter being operative to output a plurality of sub-beams at selectable angles which are changeable, and a plurality of selectable spatial orientation deflectors. The deflectors are operative to change a spatial orientation in an amount of time that is greater than the temporal pulse separation. Some of the spatial orientation deflectors are arranged to receive the sub-beams and to direct the sub-beams to the substrate.
- In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation, a beam splitter operative to split the beam into a selectable number of output beams, the output beams having an energy property functionally related to the selectable number, a beam steering element receiving an output beam and directing the output beam to micro-machine a portion of a substrate.
- In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of radiant energy providing a plurality of beams of radiation propagating in a plane and a plurality of deflectors receiving the plurality of beams and deflecting at least some of the beams to predetermined locations outside the plane.
- In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one source of radiant energy providing a beam of radiation, a beam splitter operative to receive the beam and to output a plurality of sub-beams propagating in a plane, and a plurality of deflectors receiving the plurality of sub-beams and deflecting at least some of the plurality of sub-beams to predetermined locations outside the plane.
- In accordance with another general aspect of an embodiment of the invention a method for delivering energy to a substrate comprises directing a first plurality of beams of radiation onto a first plurality of selectably positionable deflectors during a first time interval for directing the first plurality of beams onto a first plurality of locations, during the first time interval, selectably positioning a second plurality of selectably positionable deflectors, and during a second time interval, directing the first plurality of beams of radiation onto the second plurality of selectable positionable deflectors for directing the first plurality of beams onto a second plurality of locations.
- In accordance with another general aspect of an embodiment of the invention a system for delivering energy to a substrate comprises at least one radiant beam source providing at least one beam of radiation and at least first and second deflectors disposed to receive the at least one beam to deliver the beam to respective at least first and second at least partially overlapping locations on the substrate.
- In accordance with another general aspect of an embodiment of the invention a laser micro-machining apparatus includes at least one radiant beam source providing a plurality of radiation beams, a plurality of independently positionable deflectors disposed between the at least one radiant beam source and a substrate to be micro-machined, the plurality of independently positionable deflectors being operative to independently deliver the at least one radiation beam to selectable locations on the substrate, and a focusing lens disposed between the at least one radiant beam source and the substrate, the focusing lens receiving the plurality of radiation beams and being operative to simultaneously focus the beams onto the selectable locations on the substrate.
- In accordance with another general aspect of an embodiment of the invention an acousto-optical device includes an optical element receiving a beam of radiation along an optical axis, and a transducer associated with the optical element, the transducer forming in the optical element an acoustic wave simultaneously having different acoustic frequencies, the optical element operative to output a plurality of sub-beams at different angles with respect to the optical axis.
- In accordance with another general aspect of an embodiment of the invention a method for micro-machining a substrate includes providing a laser beam to a beam splitter device, splitting the laser beam into a first number of output beams and directing the first number of output beams to form at least one opening in a first layer of a multi-layered substrate, and then splitting the laser beam into a second number of output beams and directing ones of the second number of output beams to remove selected portions of a second layer of the multi-layered substrate via the at least one opening.
- Additional features and aspects of the invention include various combinations of one or more of the following:
- The source of radiant energy comprises a pulsed source of radiant energy outputting a plurality of beams each defined by pulses of radiant energy.
- The pulsed source of radiant energy comprises at least one Q-switched laser.
- A dynamically directable source of radiant energy comprises a beam splitter operative to receive a beam of radiant energy and splitting the beam into a selectable number of sub-beams.
- A dynamically directable source of radiant energy comprises a beam splitter operative to receive a beam of radiant energy, to split the beam into a plurality of sub-beams and to direct the sub-beams each selectable directions.
- The beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.
- The beam splitter comprises an acousto-optical deflector having an acoustic wave generator controlled by a control signal, the acoustic wave generator generating an acoustic wave which determines the number of sub-beams output by the acousto-optical deflector.
- The beam splitter comprises acousto-optical deflector having an acoustic wave generator controlled by a control signal, the acoustic wave generator generating an acoustic wave which determines the selectable directions of the sub-beams.
- The acoustic wave in the acousto-optical deflector includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of the control signal having a distinct frequency.
- Each spatially distinct acoustic wave segment in the acoustic wave determines a corresponding spatially distinct direction of a corresponding sub-beam, which is a function of the frequency of the portion of the control signal corresponding to the acoustic wave segment.
- The number of spatially distinct acoustic wave segments determines the number of corresponding sub-beams.
- The dynamically directable source of radiant energy comprises a dynamically configurable beam splitter receiving a beam of radiant energy and splitting the beam into a selectable number of sub-beams. The dynamically configurable beam splitter is capable of changing at least one of the number and direction of the sub-beams within a reconfiguration time duration, and the pulses of radiant energy are separated from each other in time by a time separation which is greater than the reconfiguration time duration.
- The plurality of independently positionable beam steering elements is capable of changing the direction of the sub-beams within a redirection time duration, and the pulses of radiant energy are separated from each other in time by a time separation which is less than the redirection time duration.
- Each of the beam steering elements includes a reflector mounted on at least one selectably tilting actuator. The actuator comprises a piezoelectric device or a MEMs device.
- The number of beam steering devices exceeds the number of sub-beams included in the plurality of sub-beams. At least some of the plurality of sub-beams are directed to at least some of the plurality of beam steering devices while others of the plurality of the beam steering devices are being repositioned.
- The selectable number of sub-beams all lie in a plane, a two dimensional array of beam steering elements lies outside the plane, and an array of fixed deflectors optically interposed between the at least one dynamically directable source of radiant energy and the plurality of independently positionable beam steering elements is operative direct the beams lying in a plane to locations outside the plane.
- The present invention will be understood and appreciated more fully from the following detailed description, taken in conjunction with the drawings in which:
- FIG. 1A is a simplified partially pictorial, partially block diagram illustration of a system and functionality for fabricating an electrical circuit constructed and operative in accordance with a preferred embodiment of the present invention;
- FIG. 1B is a timing graph of laser pulses output by a laser used in the system and functionality of FIG. 1;
- FIG. 2 is a somewhat more detailed partially pictorial, partially block diagram illustration of part of an apparatus for micro-machining electrical substrates in the system and functionality of FIG. 1A;
- FIG. 3 is a somewhat more detailed partially pictorial, partially block diagram illustration of an aspect of operation of part of the system and functionality of FIG. 2;
- FIG. 4 is a flow diagram of a method for manufacturing electrical circuits in accordance with an embodiment of the invention;
- FIG. 5 is an illustration showing the result of varying the number and angle of laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2;
- FIG. 6 is an illustration showing the result of varying the angle of multiple laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2;
- FIG. 7 is an illustration showing the result of varying the angles of multiple at least partially superimposed laser beams produced by a dynamic beam splitter produced by modulation control signals including multiple at least partially superimposed different frequency components in the system and functionality of FIGS. 1A and 2;
- FIG. 8 is an illustration showing the result of varying the energy distribution among multiple laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2;
- FIGS. 9A and 9B are illustrations showing the result of varying the number of uniform diameter laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2; and
- FIGS. 10A and 10B are illustrations showing the result of varying the number of uniform diameter laser beams produced by a dynamic beam splitter as shown in FIGS. 9A and 9B in accordance with a preferred embodiment of the present invention.
- Reference is now made to FIG. 1A, which is a simplified partially pictorial, partially block diagram, illustration of a system and functionality for fabricating an electrical circuit, constructed and operative in accordance with a preferred embodiment of the present invention, and to FIG. 1B which is a timing graph of laser pulses output by a laser used in the system and functionality of FIG. 1A. The system seen in FIG. 1A includes laser
micro-machining apparatus 10, which also includes the functionality of delivering energy to a substrate. -
Apparatus 10 is particularly useful in the context of micro-machining holes, such asvias 12, in printedcircuit board substrates 14, during the fabrication of printed circuit boards.Apparatus 10 may also be used in other suitable fabrication processes employing micro-machining, including without limitation, the selective annealing of amorphous silicon in flat panel displays and the removal of solder masks on electrical circuits. Accordingly, although the invention is described in the context of micro-machining printed circuit boards, the scope of the invention should not be limited solely to this application.. - Printed circuit board substrates, such as a
substrate 14, which are suitable to be micro-machined using systems and methods described hereinbelow, typically include dielectric substrates, for example epoxy glass, having one or more electrical circuit layers, each electrical circuit layer having selectively formed thereon aconductor pattern 16. The substrates may be formed of a single layer or of a laminate formed of several substrate layers adhered together. Additionally, the outermost layer of thesubstrate 14 may comprise theconductor pattern 16 formed thereon, as seen in FIG. 1A. Alternatively, the outermost layer ofsubstrate 14 may comprise, for example, a metal foil substantially overlaying a continuous portion of the outer surface of thesubstrate 14, for example as shown by the region indicated byreference numeral 17. - In an embodiment of the invention, as seen in FIG. 1A,
laser micro-machining apparatus 10 includes apulsed laser 20 outputting apulsed laser beam 22.Pulsed laser beam 22 is defined by a stream of light pulses, schematically indicated bypeaks 24 in laser pulse graph 26 (FIG. 1B). In accordance with an embodiment of the invention pulsedlaser 20 is a frequency tripled Q-switched YAG laser providing a pulsed aUV laser beam 22 at a pulse repetition rate of between 10-50 KHz, and preferably at about 10-20 KHz. Suitable Q-switched lasers are presently available, for example, from Spectra Physics, Lightwave Electronics and Coherent, Inc. all of California, U.S.A. Other commercially available pulsed lasers, that suitably interact with typical materials employed to manufacture printed circuit boards, may also be used. - Another laser suitable for use as
pulsed laser 20, operative to output a pulsed UV laser beam particularly suitable for micro-machining substrates containing glass, is described in the present Applicants' copending U.S. patent application No. ______, filed concurrently herewith and claiming the benefit of U.S.provisional patent application 60/362,084, the disclosures of which are incorporated by reference in their entirety. - In the embodiment seen in FIG. 1A, which is a highly simplified schematic representation of laser
micro-machining apparatus 10, pulsedlaser beam 22 impinges on afirst lens 28, which preferably is a cylindrical lens operative to flattenbeam 22 at an image plane (not seen) in a first variable deflector assembly, such as an acousto-optical deflector (AOD) 30. PreferablyAOD 30 includes atransducer element 32 and a translucent crystal member 34 formed of quartz or other suitable crystalline material. -
Transducer 32 receives acontrol signal 36 and generates anacoustic wave 38 that propagates through crystal member 34 ofAOD 30.Control signal 36 preferably is an RF signal provided by anRF modulator 40, preferably driven by a direct digital synthesizer (DDS) 42, or other suitable signal generator, for example a voltage controlled oscillator (VCO). Asystem controller 44, in operative communication withDDS 42 and alaser driver 47, is provided to coordinate between generation of thecontrol signal 36 andlaser pulses 24 definingpulsed laser beam 22 so that portions ofsubstrate 14 are removed, e.g. by ablation, in accordance with a desired design pattern of an electrical circuit to be manufactured. Such design pattern may be provided, for example, by a CAM data file 46 or other suitable computer file representation of an electrical circuit to be manufactured. -
- Where:
- Δƒn=ƒn−ƒ0;
- λ=wavelength of
beam 22; - υs=speed of sound in the crystal 34 of
AOD 30, and - n is an integer representing the index number of a laser sub-beam, as described hereinbelow.
- In accordance with an embodiment of the invention,
AOD 30 is operative to function as a dynamic beam splitter and which governs at least one of a number segments into whichbeam 22 is split and its angle of deflection.Signal 36 may be selectably provided so as to causeacoustic wave 38 to propagate at a uniform frequency through crystal member 34. Alternatively, signal 36 may be selectably provided so as to cause theacoustic wave 38 to propagate at different frequencies through the crystal member 34. - Various aspects of the structure, function and operation of
AOD 30 as a dynamic beam splitter are described hereinbelow with reference to FIGS. 5-7. The structure and operation of another type of AOD, configured and arranged to function as a dynamic beam splitter and deflector is described in the present Applicants' copending provisional patent application No. ______, filed concurrently herewith, entitled: “Dynamic Multi-Pass, Acousto-Optic Beam Splitter and Deflector”. - In accordance with an embodiment of the invention, signal36 causes the
acoustic wave 38 to be generated inAOD 30 with different frequencies such that at a moment in time theacoustic wave 38 interacts with thelaser pulse 24, theacoustic wave 38 comprises at least two different frequencies. By generating anacoustic wave 38 with more than one frequency,beam 22 is split into more than one segment. Typically, the different frequencies are spatially separated inAOD 30 at the time at which a laser pulse impinges thereon. Alternatively, the different frequencies are superimposed in a complex waveform. - Thus, when the
acoustic wave 38 is propagated throughcrystal member 32 in a non-uniform waveform and interacts with thelaser beam 22, thebeam 22 is segmented intoseveral beam segments 50, or sub-beams. Each of the segments is deflected at an angle θn which is a function of an acoustic wave frequency, or frequencies, of theacoustic wave 38 in crystal member 34 at the time thelaser beam 22, represented by peak 24 (FIG. 1B), impinges thereon. - In accordance with an embodiment of the invention,
AOD 30 operates at a duty cycle, which is less than the pulse repetition rate oflaser beam 22. In other words, the time required to reconfigure theacoustic wave 38 inAOD 30 to comprise a different composition of frequencies when impinged upon by alaser pulse 24, so as to change at least one of the number ofsub-beams 50 and the respective directions thereof at the output fromAOD 30, is less than the time separation betweensequential pulses 24 inbeam 22. - Each one of
beam segments 50, whether a single segment provided e.g. by a uniform acoustic wave, or several segments as seen in FIG. 1, is directed towards a secondvariable deflector assembly 52. The secondvariable deflector assembly 52 is formed of a plurality of independently tiltable beam steeringreflector elements 54. - In accordance with an embodiment of the invention, second
variable deflector assembly 52 comprises an optical MEMs device, or is formed as an array of mirrors tiltable by suitable piezo-electric motors, or is formed as an array of galvanometers, or comprises any other suitable array of independently tiltable reflector devices. In the configuration of secondvariable deflector assembly 52 seen in FIG. 1A, a 6×6 array ofreflector elements 54 elements is provided. Any other suitable quantity of independentlytiltable reflector elements 54 may be used. - A suitable optical MEMs device providing an array of independently controllable digital light switches is employs technologies used in a Digital Micromirror Device (DMD™) available from Texas Instruments of Dallas, U.S.A. Alternatively, a suitable array of
reflector elements 54 may be constructed in accordance with fabrication principles of the DMD™ described in detail in Mignardi et. al., The Digital Micromirror Device—a Micro-Optical Electromechanical Device for Display Applications, presented in MEMS and MOEMS Technology and Applications (Rai-Choudhury, editor), SPIE Press, 2000, the disclosures of which are incorporated herein by reference. - Each of the
reflector elements 54 is operative to separately and independently steer abeam segment 50 impinging thereon to impinge on thesubstrate 14 at a selectable location in atarget region 55 so as to micro-machine, drill or otherwise remove a portion ofsubstrate 14 at the required location. - As seen in FIG. 1A, operation of
reflector elements 54 may be controlled, for example, by aservo controller 57 in operative communication withsystem controller 44 to ensure thatreflector elements 54 suitablydirect beam segments 50 to impinge onsubstrate 14 at a required location, in accordance with a desired design pattern of an electrical circuit to be manufactured. Such design pattern may be provided, for example, by the CAM data file 46 or other suitable computer file representation of an electrical circuit to be manufactured. - Each of the
reflector elements 54 is configured so that a beam impinging thereon may be steered to a selectable location in a corresponding region of coverage. In accordance with an embodiment of the invention, the regions of coverage, corresponding to at least some of thereflector elements 54, at least partially mutually overlap. - In accordance with an embodiment of the invention, the number of
reflector elements 54 in the secondvariable deflector assembly 52 exceeds the maximum number ofbeam segments 50 output byAOD 30.Reflector elements 54 typically operate at a duty cycle which is slower than the pulse repetition rate oflaser beam 22. In other words, the time required to redirect a givenreflector element 54 so that abeam segment 50 impinging thereon may be redirected to a new location onsubstrate 14, is greater than the time separation betweensequential pulses 24 inbeam 22. - Because of the redundancy in
reflector elements 54, for any givenpulse 24 inbeam 22,beam segments 50 are impinging on only some of the reflector elements 54., but not on others. Thus,reflector elements 54, which are not receiving a sub-beam 50, may be repositioned to a new spatial orientation, in preparation for receiving a sub-beam 50 from asubsequent laser pulse 24, while at generally the same timeother reflector elements 54 are directingbeam segments 50 to impinge onsubstrate 14. - As seen in FIG. 1A, a
folding mirror 62, a focusinglens 63 and atelecentric imaging lens 64 are interposed between secondvariable deflector assembly 52 andsubstrate 14 to deliverbeam segments 50 to the surface ofsubstrate 14. It is appreciated that the optical design oflenses beam segments 50 which propagate along optical axes extending in mutually different directions. - It is further appreciated that as a function of system geometry and engineering design, a
single folding mirror 62, no folding mirror or multiple folding mirrors may be provided. Additionally focusinglens 63 andtelecentric lens 64 may be combined into a single optical element, or alternatively each oflenses system 10 may include a zoom lens (not shown) operative to govern a cross sectional dimension of one ormore beam segments 50, for example in order to form holes and vias onsubstrate 14 having different diameters. Alternatively zoom optics may be employed to accommodate and make uniform a diameter of beam-segments 50 which may be output by AOD with different diameters.. - In accordance with an embodiment of the invention, the angles θn at which
beam segments 50 are deflected byAOD 30 relative to the optical axis of theincoming beam 22 typically are very small, in the order of 10−2 radians. In order to provide for a more compact system, a beam angle expander, such as a telescoping optical element, schematically represented bylens 56, operative to increase the mutual angular divergence ofbeam segments 50, preferably is provided downstream ofAOD 30. -
AOD 30 generally is operative to deflect sub-beams 50 so that the optical axes ofbeam segments 50 generally lie in a plane. As seen in FIG. 1A, secondvariable deflector assembly 52 comprises a two dimensional array that lies outside the plane of the optical axes ofbeam segments 50. As seen in FIG. 1A, a linear to 2-dimensional mapping assembly 58 is located betweenAOD 30 and the secondvariable deflector assembly 52.Mapping assembly 58 receivesbeam segments 50, propagating in the same plane, and redirects thebeam segments 50 to a two dimensional array of locations outside the plane of the sub-beams 50. - In accordance with an embodiment of the invention,
mapping assembly 58 comprises a plurality of mappedsections 60 each of which are positioned in a suitable spatial orientation so that abeam segment 50 output byAOD 30 which impinges on a given mappedsection 60 is directed to areflector element 54, to which it is mapped. - The following is a simplified general description of the operation and functionality of system10: The acoustic wave is 38 is generated in crystal 34 in synchronization with the
pulses 24 ofbeam 22 such that a desired acoustic wave structure is present in crystal member 34 at the time a first laser beam pulse impinges thereupon. Theacoustic wave 38 may have a uniform frequency throughout crystal 34, which produces asingle beam segment 50. Alternatively, acoustic wave may have several different frequencies. Typically, the different frequencies may be, for example, at various spatial segments along the length ofacoustic wave 38 to produce several somewhat spaced apartbeam segments 50. In accordance with an embodiment of the invention, the duty cycle ofAOD 30 is sufficiently fast such that it can be dynamically reconfigured to selectably and differently split or deflect eachpulse 24 in abeam 22. In a preferred embodiment of the invention, dynamic reconfiguration of the beam splitter is accomplished by forming acoustic waves having mutually different structures inAOD 30 at the moment eachpulse 24 definingbeam 22 impinges onAOD 30. - The different frequencies in
acoustic wave 38 cause eachbeam segment 50 to be deflected at a selectable angle θn to impinge on a selected mappedsection 60 ofmapping assembly 58, preferably after passing throughbeam expander lens 56. Eachbeam segment 50 is directed by an appropriate mappedsection 60 to a corresponding location on one ofreflector elements 54 at secondvariable deflector assembly 52. Thereflector element 54 is suitably tilted so that thebeam segment 50 is subsequently further directed to a location onsubstrate 14 for micro-machining or drilling a required location of thesubstrate 14. - In accordance with an embodiment of the invention, although
AOD 30 operates at a duty cycle which generally is faster than the pulse repetition rate oflaser beam 22, the deflection that it provides is relatively limited in that it deflectsbeam segments 50 by relatively small angles of deflection. Thebeam segments 50 typically all lie in the same plane. - Conversely, the time required to position
individual reflector elements 54 in secondvariable deflector assembly 52 typically is greater than the time separation between subsequent pulses defininglaser beam 22. However, since eachreflector element 54 may be tilted over a relatively large range of angles, preferable in at least 2-dimensions, alaser sub-beam 50 impinging on thereflector element 54 may be delivered to cover a relatively large spatial region. - In accordance with an embodiment of the invention, each of
reflector elements 54 is suitably tiltable so as thatadjacent reflector elements 54 are operable to deliverbeam segments 50 to cover mutually overlapping regions on the surface ofsubstrate 14. Moreover, thereflector elements 54 in secondvariable deflector assembly 52 are able to deliverbeam segments 50 to substantially any location in the field ofview 68 of thelenses - After micromachining the desired
portions 55 in the field ofview 68,substrate 14 andapparatus 10 are mutually displaced relative tosystem 10 so that the field ofview 68 covers a different portion of thesubstrate 14. - In accordance with an embodiment of the invention, the number of
reflector elements 54 inassembly 52 typically exceeds the number ofbeam segments 50 into whichlaser beam 22 is split byAOD 30. During an initial time interval,beam segments 50 impinge on a first plurality of thereflector elements 54, but not onother reflector elements 54. The initial time interval is used to reposition theother reflector elements 54 which do not receive abeam segment 50, as described hereinbelow. - During a subsequent second time interval,
beam segments 50 are deflected byAOD 30 to impinge on at least some of thereflector elements 54 which did not receivebeam segments 50 during the previous time interval. Thereflector elements 54 employed in the second time interval are now suitably repositioned to deflect the sub-beam 50 to thesubstrate 14. During the second time interval at least some of the reflector elements that are not impinged on by abeam segment 50, possibly including reflector elements that were used in the first time interval, are repositioned for use in a subsequent time interval. This process of repositioningreflector elements 54 that are not used during a given time interval is repeated. - Stated generally, it may be said that concurrent to
beam segments 50 from a first laser pulse impinging on selectedreflector elements 54, other reflectors are concurrently repositioned to receivebeam segments 50 from subsequent beam pulses. - Typically the time required to position a
single reflector element 54 is in the order of between 1-10 milliseconds, corresponding to about between 20-200 pulses of a 20 KHz Q-switched laser. The length of time, which exceeds the duty cycle of thelaser pulses 24, used to positionreflectors 54, ensures stabilized beam pointing accuracy. Additionally, the use ofmultiple reflectors 54 ensures a redundancy which minimizes the loss of pulses while repositioningreflector 54 following micromachining of a location onsubstrate 14. It is appreciated that in order to the increase the speed of theapparatus 10, and to provide a controlled dosage of energy in eachbeam segment 50, it may be necessary for more than onebeam segment 50 to simultaneously impinge on the surface ofsubstrate 14 at the same location. In such an arrangement,multiple beam segments 50 are each individually deflected to impinge onseparate reflectors 54, which are each oriented to direct the sub-beams 50 to impinge onsubstrate 14 at the same location. - Reference is now made to FIG. 2 which is a somewhat more detailed partially pictorial, partially block diagram illustration of part of an
apparatus 110 for micro-machining electrical circuits in the system and functionality of FIG. 1. In general,laser machining apparatus 110, may be thought of as a system for delivering energy to a substrate. - In an embodiment of the invention, as seen in FIG. 1,
laser micro-machining apparatus 110 includes apulsed laser 120 outputting apulsed laser beam 122.Pulsed laser beam 122 is defined by a stream of light pulses. In accordance with an embodiment of the invention pulsedlaser 20 is a frequency tripled Q-switched YAG laser providing a pulsed aUV light beam 122 at a pulse repetition rate of between 10-50 KHz, and preferably between about 10-20 KHz. Suitable Q-switched lasers are presently available, for example, from Spectra Physics, Lightwave Electronics and Coherent, Inc. all of California, U.S.A. Other commercially available pulsed lasers, that suitably interact with typical materials employed to manufacture printed circuit boards, may also be used. - Another laser suitable for use as
pulsed laser 120, operative to output a pulsed UV laser beam particularly suitable for micro-machining substrates containing glass, is described in the present Applicants' copending U.S. patent application No. ______, filed concurrently herewith and claiming the benefit of U.S.provisional patent application 60/362,084, the disclosures of which are incorporated by reference in their entirety. - In the embodiment seen in FIG. 2, which is a highly simplified schematic representation a preferred embodiment of laser
micro-machining apparatus 110, apulsed laser beam 122 impinges on afirst lens 128, which preferably is a cylindrical lens operative to flattenbeam 122 at an image plane (not seen) on a first variable deflector assembly, such as an acousto-optical deflector (AOD) 130. PreferablyAOD 130 includes atransducer element 132 and atranslucent crystal member 134 formed of quartz or any other suitable crystalline material. -
Transducer 132 is controlled by a control signal (not shown), corresponding to controlsignal 36 in FIG. 1A, and is operative to generateacoustic waves 138 that propagate throughcrystal member 134 ofAOD 130, similarly as described with reference to FIG. 1A. Theacoustic waves 138 are operative to interact withlaser beam 122 incrystal member 134 to dynamically and selectably split and deflect pulses inlaser beam 122, tooutput beam segments 150 orsub-beams 150. -
AOD 130 is thus operative to function as a dynamic beam splitter which controls, by forming a suitableacoustic wave 138 having a selectable wave configuration, at least one of anumber segments 150 into whichbeam 122 is split and a direction at which the resulting beam segments are directed. - Various aspects of the structure, function and operation of
AOD 130 as a dynamic beam splitter are described hereinbelow with reference to FIGS. 5-7. The structure and operation of another type of AOD configured and arrange to function as a dynamic beam splitter is described in the present Applicants' copending provisional patent application No. ______, filed concurrently herewith, entitled: “Dynamic Multi-Pass, Acousto-Optic Beam Splitter and Deflector”. - In accordance with an embodiment of the invention,
acoustic wave 138 may be formed inAOD 30 with several different frequencies such that at a moment in time at which theacoustic wave 138 interacts with thelaser beam 122, theacoustic wave 138 comprises at least two different frequencies. By forming anacoustic wave 138 with more than one frequency,beam 122 is split into more than onesegments 150. The different frequencies may be spatially separated inAOD 130 at the time at which a laser pulse impinges thereupon. Alternatively, the different frequencies may be superimposed in a complex waveform. - Thus when
acoustic wave 138 is propagated throughcrystal member 132 in a non-uniform waveform,beam 122 may be segmented intoseveral beam segments 150, or sub-beams. Each of thebeam segments 150 is deflected at an angle θn which is a function of an acoustic wave frequency, or frequencies, ofacoustic wave 138 incrystal member 134 at the time a laser pulse inlaser beam 122 impinges thereon. - In accordance with an embodiment of the invention,
AOD 30 operates at a duty cycle which is shorter than the pulse repetition rate oflaser beam 122. Thus, the time required to reconfigure anacoustic wave 138 inAOD 130 to comprise a different composition of frequencies when interacting with a laser pulse inlaser beam 122, so as to change at least one of the number and respective directions ofsub-beams 150, is less than the time separation between sequential pulses inlaser beam 122. - Each one of
beam segments 150, whether a single segment provided e.g. by a uniform acoustic wave, or several segments as seen in FIG. 2, is directed to a first selectable target located at a secondvariable deflector assembly 152. The secondvariable deflector assembly 152 is formed of a plurality of independently tiltable beam steeringreflector elements 154. - Each of the
reflector elements 154 also operates to further separately and independently steer abeam segment 150, impinging thereon, to impinge onsubstrate 14, as described with reference to FIG. 1A, and subsequently to micro-machine, drill or otherwise remove a portion ofsubstrate 14 at such location. - In accordance with an embodiment of the invention, each
reflector element 154 comprises amirror 240, or another suitable reflective element, mounted on apositioner assembly 242 comprising abase 244, amirror support 246, at least oneselectable actuator 248, 3 actuators are shown assembled in a starlike arrangement, and a biasing spring (not shown). Each of theselectable actuators 248 is, for example, a piezoelectric actuator, such as a TORQUE-BLOCK™ actuator available from Marco Systemanalyse und Entwicklung GmbH of Germany, independently providing an up and down positioning as indicated byarrows 249 so as to selectively tiltmirror 240 into a desired spatial orientation for receiving abeam segment 150 and subsequently to direct thebeam segment 150 to impinge on a desired location on the surface ofsubstrate 14. - As appreciated from FIG. 2, considered along with FIG. 1A, each of the
actuators 248 is operatively connected to aservo controller 57 which in turn is operatively connected to and controlled bysystem controller 44 as described hereinabove with respect to FIG. 1A. Thus, it is appreciated that in correspondence to the a pattern design, for example of a pattern of vias in an printed circuit board, contained in CAM data file 46, the relative spatial orientation, or tilt, ofreflector elements 154 is independently controlled in synchronization with the laserpulses defining beam 122 and with the generation of control signal controlling the operation ofAOD 130 to dynamically split and deflectlaser beam 122. Abeam segment 150 is deflected to a desiredreflector element 154, which in turn is suitably oriented so that thebeam segment 150 ultimately impinges onsubstrate 14 at a desired location. - In accordance with an embodiment of the invention, each of the
reflector elements 154 is configured so that a sub-beam 150 may be steered to a selectable location in a corresponding region of coverage onsubstrate 14. The regions of coverage corresponding to at least some of thereflector elements 154 at least partially mutually overlap. - The number of
reflector elements 154 in secondvariable deflector assembly 152 typically exceeds the maximum number ofbeam segments 150 output byAOD 130. Thus as seen in FIG. 2, second variable deflector assembly includes 36 reflector elements, while 6sub-beams 150 are output byAOD 130.Reflector elements 154 typically operate at a duty cycle which is less than the pulse repetition rate oflaser beam 122. Thus, the time required to mechanically reposition areflector element 154, so that abeam segment 150 impinging thereupon may be redirected to a new location onsubstrate 14 is greater than the time separation between sequentialpulses defining beam 122. - Because of the redundancy in
reflector elements 154 over the respective ofbeam segments 150, for any given pulse inbeam 122,beam segments 150 are deflected to impinge on somereflector elements 154, but not on otherreflective elements 154. Thus, somereflector elements 170 which are not receiving abeam segment 150 may be repositioned to a new spatial orientation, in preparation for receiving asubsequent laser pulse 24, while at the same timeother reflector elements 172, which are receiving abeam segment 150, are directing thebeam segments 150 to impinge downstream, onsubstrate 14. - In accordance with an embodiment of the invention, the angles θn at which
beam segments 150 are deflected byAOD 130 relative to the optical axis of theincoming beam 122 typically are very small, in the order of 10−2 radians. In order to provide for a more compact system, a beam angle expander, such as a telescoping optical element, schematically represented bylens 156, operates to increase the mutual angular divergence ofbeam segments 150, preferably is provided downstream ofAOD 130. -
AOD 130 generally is operative to deflectbeams 50 so that the optical axes ofbeam segments 150 generally lie in the same plane, while secondvariable deflector assembly 152, comprising a two dimensional array that lies outside the plane of the optical axes ofbeam segments 150. - A 2-
dimensional mapping assembly 180 is interposed betweenAOD 130 and the secondvariable deflector assembly 152.Mapping assembly 180 receivesbeam segments 150, all generally propagating in a plane, and redirects thebeam segments 150 to a two dimensional array of locations outside the plane of the sub-beams 150. - In accordance with an embodiment of the invention,
mapping assembly 180 comprises an array ofsupport members 182 which comprise a plurality of opticallytransmissive portions 184, through whichbeam segments 150 can pass, and a plurality ofreflective portions 186 operative to reflectbeam segments 150, which impinge thereupon. - As seen in FIG. 2, the
reflective portions 186 generally are spaced apart on eachsupport member 182, and the respective locations ofreflective portions 186 are preferably mutually laterally staggered amongsupport members 182. Eachreflective portion 186 is generally mapped to acorresponding reflector element 154. Consequently, eachbeam segment 150 enteringassembly 180 is received by the respectivereflective portion 186 on afirst support member 187, or passes through one or more support members until it is received by areflective portion 186 on one of theother support members 182. -
Assembly 180 thus provides a means for redirectingbeam segments 150, which propagate along optical axes lying in a plane of beam propagation, to impinge on a two dimensional array of locations lying outside the plane of propagation.AOD 130 selectively deflects abeam segment 150 to impinge on one of thereflective portions 186 formed on one of thesupport members 182 inassembly 180. Becausereflective portions 186 intersect the plane of propagation at mutually staggered locations, along both an X axis and a Y axis in the plane of propagation, the angle at which abeam segment 150 is selectably deflected byAOD 130 determines thereflective portion 186 on which it impinges. Thus, a location in a two dimensional array of selectable locations, such as at secondvariable deflector assembly 152, lies outside the plane of propagation. - Reference is now made to FIG. 3 which is a somewhat more detailed partially pictorial, partially block diagram illustration of an aspect of operation of part of the system and functionality of FIG. 2.
Laser pulses 224 in a laser pulse timing graph 226 are designated 234, 236 and 238 respectively.Laser 122 typically compriseslaser pulses 224 which are spaced time. Control signals 244, 246 and 248 are shown belowlaser pulses pulse 138 are shown being fed into atransducer 252 associated with anAOD 260.AOD 260 typically corresponds toAOD 130 in FIG. 2. Acoustic wave, corresponding to control signals 264-268 are shown inAOD 260.Acoustic wave 264 corresponds to controlsignal 244,acoustic wave 266 corresponds to controlsignal 246 andacoustic wave 268 corresponds to controlsignal 244. For the purposes of simplicity of illustration, only a part ofAOD 260 is shown for each oflaser pulses 224. - At a moment in time, corresponding to the emission of a
laser pulse 224, aninput laser beam 270 impinges on theAOD 260. The acoustic waves 264-268 respectively causelaser beam 270 to be segmented into beam segments, generally designated 250, each of which is deflected at an angle of deflection which is functionally related to corresponding frequencies in acoustic waves 264-268. - First, second and third reflector elements,280, 282 and 284 respectively, corresponding to beam steering
reflector elements 154 in FIG. 2, are shown below each of theAODs 260. At a time corresponding to eachlaser pulse 224, abeam segment 250 is deflected to impinge on one of thereflector elements - FIG. 3 also shows with particularity the timing relationship between
laser pulses 224, operation ofAOD 260 as a dynamic beam deflector having a duty cycle which is faster than the pulse repetition rate represented bypulses 224, and operation ofreflector elements - As previously noted, the reconfiguration time required to introduce a different acoustic wave into
AOD 260 is less than the time separation betweenpulses 234. Thus, the respective waveforms of control signals 244-248, and the respective waveforms of acoustic waves 264-268 are each different thereby resulting in the selectable deflection ofbeam segments 250 for each ofpulses 224. It is noted however, that in the sequentially providedcontrol signals acoustic waves spatial wave segment 290 changes, while the frequency in a secondspatial wave segment 292 remains unchanged. - For both
pulses first beam segment 294, corresponding to the secondspatial wave segment 292, impinges onthird reflector element 284.Reflector element 284 is held stationary to receive thefirst beam segment 294 for each ofpulses - A
second beam segment 296 is deflected in a first direction by firstspatial segment 290 ofacoustic wave 264, while athird beam segment 298 is deflected in a different direction by firstspatial segment 290 inacoustic wave 266. - Moreover, for
pulses beam segments 250 impinge on first andsecond deflector elements pulses second reflector elements - A new wave form of
acoustic wave 268 is formed inAOD 260 to selectably split and deflectbeam 270 atpulse 238. As seen belowpulse 238, none of thebeam segments 250 impinge onfirst reflector element 280 orthird reflector element 284. - A
fourth beam segment 300 impinges ondeflector element 282.Beam segment 300 is deflected in a direction that is functionally related to the frequency ofacoustic wave 268 in secondspatial segment 292. It is noted that the frequency in the secondspatial segment 292 ofacoustic wave 268 has been changed relative to theacoustic waves fifth beam segment 302 is deflected in a direction that is functionally related to the frequency ofacoustic wave 268 in firstspatial segment 290. - It is thus noted from the foregoing that the repositioning time of reflector elements280-284, such as beam steering
reflector elements 154, is slower than a time separation betweenpulses 224. Nevertheless, because the reconfiguration time of dynamic beam splitter is less than the time separation between pulses, any redundant reflector elements can be repositioned over a time interval greater than the separation between pulses. A reflector element that is in a suitable position can then be selected in a time interval that is less than the time separation between pulses. - Reference is now made to FIG. 4 which is a flow diagram320 of a methodology for manufacturing electrical circuits in accordance with an embodiment of the invention. The methodology is described in the context of a process for forming micro vias in a multi layered printed circuit board substrate having a metal foil layer overlaying a dielectric substrate.
- The presently described methodology for manufacturing electrical circuits employs at least one dynamically directable source of radiant energy providing a plurality of beams of radiation, each beam propagating in a dynamically selectable direction. The beams are selectably directed to a plurality of independently positionable beam steering elements. Some of the beam steering elements receive the beams and direct them to selectable locations on a printed circuit board substrate to be micro-machined.
- Suitable apparatus for generating a plurality of beams propagating in dynamically selectable directions is the
laser micro-machining apparatus 10 is described with reference to FIG. 1A, and lasermicro-machining apparatus 110 described with reference to FIG. 2. Thus beams propagating in dynamically selectable directions may be produced, for example, by passing one or more beams output by at least one Q-switched laser through at least one dynamic beam splitting and deflecting device. Optionally, several separately generated beams may be treated separately or in combination. - In accordance with an embodiment of the invention, the dynamic deflector device is operable to selectably provide at least one metal machining beam-segment. In an embodiment of the invention, a beam splitting functionality is provided by the dynamic deflector, although a separate beam splitting device providing a selectable beam splitting function may be provided. The metal-machining beam-segment has an energy density that is suitable to remove a portion of the metal foil layer, for example by burning or by ablation.
- Each metal machining beam segment is dynamically deflected to impinge on a beam steering device, such as a
tiltable reflector element 154 in FIG. 2. The beam steering device is suitably positioned so that the metal machining beam segment is steered to a selectable location on a PCB substrate whereat a portion of the metal foil is removed to expose the underlying dielectric substrate. - While a metal machining beam is removing a portion of the metal foil at a first location, beam steering devices which are not being presently used may be suitably repositioned for removal of metal foil at other selectable locations. Thus, each subsequent pulse may be deflected by the dynamic beam deflector to impinge on an already positioned beam steering device.
- Removal of portions of the metal foil continues at selectable locations until metal foil is removed for a desired plurality of locations.
- In a subsequent operation, the dynamic deflector device is provide at least one dielectric machining beam-segment having an energy property that is different from the metal machining beam-segment. A beam splitting functionality may be provided, for example by the dynamic deflector or by a suitable beam splitter device. For example, dielectric machining beam segment has a lower energy density than a metal machining beam-segment. The energy property of the dielectric machining beam segment is suitable to remove a portion of the dielectric layer, for example by burning or by ablation, but is not suitable to remove a portion of the metal foil.
- In accordance with an embodiment of the invention, the respective energy densities of
beam segments laser beam beam segments beam segment 150 irrespective of the number of beam segments. - Each dielectric machining beam segment is dynamically deflected to impinge on a beam steering device, such as a
tiltable reflector element 154 in FIG. 2. The beam steering device is suitably positioned so that each dielectric machining beam segment is steered to a selectable location whereat a portion of the metal foil has already been removed, to expose of the dielectric layer, and a desired portion of the dielectric is removed. - While a dielectric machining beam is removing a portion of the dielectric at a first set of locations, beam steering devices which are not being presently used may be suitably repositioned for removal of dielectric at other selectable locations. Thus, each subsequent pulse may be deflected by the dynamic beam deflector to impinge on an already positioned beam steering device. It is appreciated that because a reduced energy density is required to remove dielectric,
beam 122 may be divided into a greater number of dielectric machining beam segments, resulting in a greater system throughput for removing dielectric as compared to removing metal foil. - Removal of dielectric continues at selectable locations until the dielectric is removed for substantially all of the locations at which metal foil was previously removed. Once this operation is completed, a substrate can be repositioned for micro-machining of a subsequent portion thereof.
- As noted above, in accordance with an embodiment of the present invention, an AOD is configured and operative to dynamically and selectably split an incoming beam of radiation into a selectable number of beam segments, each of which is dynamically directed in a selectable direction.
- Reference is now made to FIG. 5, which is an illustration of varying the number and angle of laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1 and 2.
Laser pulses 424 in a laserpulse timing graph 426 are designated 434, 436 and 438 respectively.Laser pulses 424 define, for example,beam 122 in FIG. 2 and are mutually separated in time. - Control signals444, 446 and 448 are shown above laser
pulse timing graph 426, corresponding topulses transducer 452 associated with anAOD 460, corresponding toAOD 130 in FIG. 2. Acoustic waves, 464, 466 and 468, corresponding to control signals 444-448 are shown inAOD 460.Acoustic wave 464 corresponds to controlsignal 444,acoustic wave 466 corresponds to controlsignal 446 andacoustic wave 468 corresponds to controlsignal 448. - At a moment in time corresponding to the emission of a
laser pulse 424, aninput laser beam 470 impinges on the onAOD 460. The acoustic waves 464-468 respectively causelaser beam 470 to be segmented into a selectable number of beam segments, generally designated 450. Each of thebeam segments 450 is deflected at an angle of deflection which is functionally related to a corresponding frequency in a portion of acoustic waves 464-468. - FIG. 5 shows with particularity the timing relationship between
laser pulses 424 and operation ofAOD 460 as a dynamic beam splitter which is operative to split aninput beam 470 into a selectable number ofbeam segments 450 at a duty cycle which is less than the pulse repetition rate represented bypulses 424. - A
control signal 444 having a generally uniform frequency generates anacoustic wave 464 inAOD 460 also having a generally uniform frequency. When thebeam 470 associated withpulse 434 impinges onAOD 460, a single beam-segment 480 is output. It is noted that a part ofbeam 470 may not be deflected. This is ignored for the purposes of simplicity of illustration. - A
control signal 446 having a six spatially distinct segments 482-492, each segment having a generally uniform frequency and a frequency which is different from a neighboring segment, generates anacoustic wave 466 inAOD 460 also having six spatiallydistinct segments beam 470 associated withpulse 436 impinges onAOD 460, six distinct beam-segments 522-532 are output. It is noted that a part ofbeam 470 may not be deflected. This is ignored for the purposes of simplicity of illustration. - A
control signal 448 having a two spatiallydistinct segments acoustic wave 468 inAOD 460 also having two spatiallydistinct segments distinct segments beam 470 associated withpulse 438 impinges onAOD 460, two distinct beam-segments beam 470 may not be deflected. This is ignored for the purposes of simplicity of illustration. - In the embodiment seen in FIG. 5, the division of a
beam 470 into different numbers of beam-segments 450 results inbeam segments 450 each having different a different width. In such embodiment it may be desirable to provide suitable optics downstream ofAOD 460 in order to control the size of a spot impinging on asubstrate 14, resulting from each different number of beam-segments 450, for example to ensure a uniform diameter. - Reference is now made to FIG. 6, which is an illustration of varying the angle of multiple laser beams produced by a dynamic beam deflector in the system and functionality of FIGS. 1A and 2.
Laser pulses 624 in a laserpulse timing graph 626 are designated 634 and 636 respectively.Laser pulses 624 define, for example,beam 22 in FIG. 1 andbeam 122 in FIG. 2, and are mutually separated in time. - Control signals644 and 646 are shown above laser
pulse timing graph 626, corresponding topulses transducer 652 associated with anAOD 660, corresponding toAOD 30 in FIG. 1 andAOD 130 in FIG. 2. Acoustic waves, corresponding to controlsignals AOD 660.Acoustic wave 664 corresponds to controlsignal 644, andacoustic wave 666 corresponds to controlsignal 646. - At a moment in time corresponding to the emission of a
laser pulse 624, aninput laser beam 670 impinges on the onAOD 660. Theacoustic waves laser beam 670 to be segmented into a selectable number of beam segments, generally designated 650, as described with reference to FIG. 5. Each of thebeam segments 650 is deflected at an angle of deflection which is functionally related to a corresponding frequency in a portion of acoustic waves 664-666. - FIG. 6 shows with particularity the timing relationship between
laser pulses 634 and operation ofAOD 660 as a dynamic beam splitter which is operative to split theinput beam 670 into a selectable number ofbeam segments 650, and to separately deflect thebeam segments 650 at distinct angles of deflection, all at a duty cycle which is less than the pulse repetition rate represented bypulses 624. - A
control signal 644 having a six spatially distinct segments 682-692, each segment having a generally uniform frequency and a frequency which is different from a neighboring segment, generates anacoustic wave 664 inAOD 660 also having six spatiallydistinct segments beam 670 associated withpulse 634 impinges onAOD 660, six distinct beam-segments 722-732 are output. It is noted that the respective frequencies in each of segments 702-712 progressively increases, relative to the previous segment, and as a result the angle at which beams 722-732 are deflected increases in a corresponding manner. - A
control signal 646 having a six spatially distinct segments 742-752, each segment having a generally uniform frequency and a frequency which is different from a neighboring segment, generates anacoustic wave 666 inAOD 660 also having six spatiallydistinct segments beam 670 associated withpulse 636 impinges onAOD 660, six distinct beam-segments 782-790 are output, in which beam-segment 782 corresponds toacoustic wave segment 762, beam-segment 784 corresponds toacoustic wave segment 764, beam-segment 786 corresponds toacoustic wave segment 766, beam-segment 788 corresponds toacoustic wave segment 768, beam-segment 790 corresponds toacoustic wave segment 770, and beam-segment 792 corresponds to acoustic wave segment 792. - It is seen that the arrangement of respective frequencies in each of acoustic wave segments762-772 does not change in an orderly manner. As a result some of beams 782-790 overlap. This enables beams 782-790 to be selectably deflected to impinge, for example on a mapping element 60 (FIG. 1). It is further noted that the change in angles occurring in beams 782-792, relative to beams 722-732 results from the reconfiguration of the acoustic wave in
AOD 660. Accordingly, the change in configuration of the acoustic wave, fromacoustic wave 664 toacoustic wave 666, is carried out in a period of time that is less than the time separation betweenpulses - Reference is now made to FIG. 7 which is an illustration of varying the angles of multiple at least partially superimposed laser beams produced by a dynamic beam splitter, by modulating, for example control signals36, including multiple at least partially superimposed different frequency components, in the system and functionality of FIGS. 1A and 2. A
control signal 844 is shown being fed into atransducer 852 associated with anAOD 860, corresponding toAOD 30 in FIG. 1 andAOD 130 in FIG. 2. Anacoustic wave 864, corresponding to controlsignal 844 is shown inAOD 860. -
Control signal 844 corresponds to a mutual superimposition of three control signals (not shown) each having a different frequency. It is noted that a greater or lesser number of control signals may be superimposed, and that superimposition of three control signals is chosen merely for the purposes of simplicity of illustration. - At a moment in time corresponding to the emission of a laser pulse in a
pulsed laser beam input laser beam 870 impinges on the onAOD 860 and is split into threebeam segments acoustic wave 864 inAOD 860. Each of thebeam segments acoustic wave 864, and at least partially mutually overlap. - Reference is now made to FIG. 8 which is an illustration of varying the energy distribution among multiple laser beam segments produced by a dynamic beam splitter in the system and functionality of FIGS. 1A and 2. Typically, due to the Gaussian energy profile of typical laser beams, a uniform spatial splitting of the beam results in beam segments, such as
beam segments 150 in FIG. 2, which do not have a uniform energy property. It is appreciated, that a beam shaping element, located upstream of the dynamic beam splitter, may be provided to form a beam, such asbeam - In FIG. 8,
laser pulses 924 in a laserpulse timing graph 926 are designated 934 and 936 respectively.Laser pulses 924 define, for example,beam 122 in FIG. 2 and are mutually separated in time. Aninput energy graph 940 indicates a typical Gaussian energy characteristic, in one dimension, of a laser beam such asbeam 122. - Control signals944 and 946 are shown above laser
pulse timing graph 926, and correspond topulses transducer 952 associated with anAOD 960, corresponding toAOD 30 in FIG. 1 andAOD 130 in FIG. 2. Acoustic waves, corresponding to controlsignals AOD 960.Acoustic wave 964 corresponds to controlsignal 944 andacoustic wave 966 corresponds to controlsignal 946. - At a moment in time corresponding to the emission of a
laser pulse 924, aninput laser beam 970 impinges on theAOD 960. Theacoustic waves laser beam 970 to be segmented into a selectable number of beam segments, generally designated 950. Each of thebeam segments 950 is deflected at an angle of deflection which is functionally related to a corresponding distinct frequency in a portion ofacoustic waves acoustic waves - It is seen in FIG. 8 that signal944 is divided into six
segments 945 which are not of equal width. The resultingacoustic wave 964 thus is likewise formed of six segments which are not of equal width. Moreover, the respective widths of the resulting beam segments 972-982 are also not equal. - It is appreciated that the respective widths of
segments 945, can be dynamically arranged and modified to produce beam segments, which, although having different spatial widths, have a generally uniform energy characteristic. Thus the selectable division ofacoustic wave 964 intonon-uniform segments 945 produces a selectable energy characteristic of each beam 972-982, indicated by the area underoutput energy graph 984. For example, the dynamic splitting ofbeam 970 can be such that a relatively small spatial section of a high energy portion ofbeam 970 is used to producebeam segments beam 970 is used to producebeam segments beam 970 is used to producebeam segments histogram 990. - Thus, energy uniformity of output beam segments may be controlled and made generally uniform by distributing energy among beam segments972-982, generally without attenuating the energy of
input beam 970. Moreover, energy uniformity may be controlled independently of the number ofbeam segments 984 into whichbeam 970 is split, or the direction of deflection of respective beam segments. In accordance with an embodiment of the invention, suitable optics (not shown) are provided downstream ofAOD 960 in order to accommodate and control the respective diameters of beam-segments 972-982, each of which have a different width, but generally uniform energy distribution. - In FIG. 8 it is also seen that the energy distribution among beam segments972-982 may be varied between
pulses 924. Thus in the graphs associated withpulse 936,segments 1005 ofcontrol signal 946 have been made generally uniform. As a result, the spatial width of each of thebeam segments 950 resulting fromacoustic wave 966 is generally uniform, however the energy distribution among the beam segments resulting from interaction ofacoustic wave 966 andbeam 970 is not uniform, as shown byhistogram 1010. - Uniformity of an energy characteristic among beam segments formed by an
acoustic wave 966 may be improved, for example by providing a beam shaping element (not shown) external toAOD 960 and operative to shape the energy profile ofinput beam 970. Alternatively, the power ofacoustic wave 966 atvarious segments 1015, represented by convention as an amplitude, may be varied. In generally an increase power ofacoustic wave 966 results in a higher transmissivity through an AOD, namely a relatively greater portion of energy passes throughAOD 960. Thus in order to providesub-beams 950, and 972-982 having a generally uniform energy characteristic, an energy characteristic of beam segments which are formed from a spatial portion of 970 having a relatively high energy level may be attenuated by reducing thereat the power ofacoustic wave 966. - FIGS. 9A and 9B are illustrations of varying the number of uniform diameter laser beams produced by a dynamic beam splitter in the system and functionality of FIGS. 1 and 2. As seen in FIGS. 9A and 9B a
beam size modifier 1120 is provided to selectably change the size of aninput beam 1170 impinging on anAOD 1130. The beam size modifier may be, for example, a beam expander, zoom lens or cylindrical telescope. - As seen in FIG. 9A, a modified
size beam 1172 is output frombeam size modifier 1120. In the example seen in FIG. 9A, the modifiedsize beam 1172 impinges on only a portion ofAOD 1130, thereby reducing an operative portion ofAOD 1130. Acontrol signal 1136 is provided to form anacoustic wave 1138 inAOD 1130, which in turn is operative to selectably split modifiedsize beam 1172 into twobeam segments 1150 each having, for example, a standardized modular size. - As seen in FIG. 9B, a modified
size beam 1182 is output frombeam size modifier 1120. In the example seen in FIG. 9B, the size ofbeam 1182 is different frombeam 1172, is substantially not modified respective ofbeam 1170 and impinges on substantially and entire operative portion ofAOD 1130. Acontrol signal 1146 is provided to form anacoustic wave 1148 inAOD 1130, which in turn is operative to selectably splitbeam 1182 into sixbeam segments 1190. Each of beam segments have, for example, a standardized modular size corresponding to the size ofbeam segments 1150. - FIGS. 10A and 10B are an illustration of varying the number of uniform diameter laser beams produced by a dynamic beam splitter as shown in FIG. 9 in accordance with a preferred embodiment of the present invention. An
array 1200 of partially transmissive beam splitter elements 1202-1212 is provided in cascade to produce a plurality of separated beam segments, which are provided to adynamic beam deflector 1230. - The transmissivity of each beam splitter element is determined as a function of its location relative to a last beam splitter element in the array. Thus, as seen in FIGS. 10A and 10B, a first
beam splitter element 1202 deflects 16.7% of the input beam , a secondbeam splitter element 1204 deflects 20% of the input beam reaching it, a thirdbeam splitter element 1206 deflects 25% of the input beam reaching it, a fourthbeam splitter element 1208 deflects 33.3% of the input beam reaching it, a fifthbeam splitter element 1210 deflects 50% of the input beam reaching it, and a sixth and lastbeam splitter element 1212 deflects 100% of the input beam reaching it. - As seen in FIG. 10A, all of the beam splitter elements1202-1212 are positioned in line to receive a
laser input beam 1222, and a plurality of sixdistinct beam segments 1224, each having about 16.7% of the total energy ininput beam 1222, are output to impinge on adynamic beam deflector 1230. A spatially sectioned acoustic wave 1238 is formed inAOD 1230 and is operative to dynamically deflect each ofbeam segments 1222, generally as described hereinabove. - As seen in FIG. 10B, beam splitter elements1202-1208 are out of the optical path of
laser input beam 1222, such thatbeam 1222 first impinges onbeam splitter element 1210. Only twodistinct beam segments 1226, each having about 50% of the total energy ininput beam 1222, are output to impinge on adynamic beam deflector 1230. A spatially sectioned acoustic wave 1238 is formed inAOD 1230 and is operative to dynamically deflect each ofbeam segments 1222, generally as described hereinabove. - It is noted, from the foregoing description with respect to FIGS.5-10B, that an a dynamic deflector comprises an AOD and is operative to perform at least on of the following functionalities: selectably split an input beam into a selectable number of output beams, to select an energy characteristic of the output beams, and to direct the output beams each at a selectable angle.
- It is appreciated by persons skilled in the art that the present invention is not limited by what has been particularly shown and described hereinabove. Rather the present invention includes modifications and variations thereof which would occur to a person of skill in the art upon reading the foregoing description and which are not in the prior art.
Claims (728)
1. A system for delivering energy to a substrate, comprising:
at least one dynamically directable source of radiant energy providing a plurality of beams of radiation, each beam propagating in a dynamically selectable direction; and
a plurality of independently positionable beam steering elements, some of said beam steering elements receiving said plurality of beams and directing them to selectable locations on said substrate.
2. The system claimed in claim 1 and wherein said at least one dynamically directable source of radiant energy comprises a pulsed source of radiant energy outputting a plurality of beams each defined by pulses of radiant energy.
3. The system claimed in claim 1 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said plurality of beams of radiation include at least one pulsed laser beam.
4. The system claimed in claim 3 and wherein said at least one pulsed laser is a Q-switched laser.
5. The system claimed in claim 1 and wherein said at least one dynamically directable source of radiant energy comprises a Q-switched laser.
6. The system claimed in claim 1 and wherein said at least one dynamically directable source of radiant energy comprises a beam splitter receiving a beam of radiant energy and splitting said beam into a selectable number of sub-beams.
7. The system claimed in claim 1 and wherein said at least one dynamically directable source of radiant energy comprises a beam splitter receiving a beam of radiant energy, splitting said beam into a plurality of sub-beams and directing said sub-beams each selectable directions.
8. The system claimed in claim 6 and wherein said beam splitter is operative to direct said sub-beams in selectable directions.
9. The system claimed in claim 8 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.
10. The system claimed in claim 9 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.
11. The system claimed in claim 9 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said sub-beams.
12. The system claimed in claim 10 and wherein said acoustic wave also determines said selectable directions of said sub-beams.
13. The system claimed in claim 12 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
14. The system claimed in claim 13 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
15. The system claimed in claim 13 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.
16. The system claimed in claim 2 and wherein:
said at least one dynamically directable source of radiant energy comprises a dynamically configurable beam splitter receiving a beam of radiant energy and splitting said beam into a selectable number of sub-beams, said dynamically configurable beam splitter being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.
17. The system claimed in claim 2 and wherein:
said plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
18. The system claimed in claim 16 and wherein:
said plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
19. The system claimed in claim 3 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.
20. The system claimed in claim 18 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.
21. The system claimed in claim 19 and wherein said at least one actuator comprises a piezoelectric device.
22. The system claimed in claim 19 and wherein said at least one actuator comprises a MEMs device.
23. The system claimed in claim 18 and wherein said plurality of beam steering elements includes a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of beam steering elements while others of said plurality of said beam steering elements are being repositioned.
24. The system claimed in claim 6 and wherein said selectable number of sub-beams all lie in a plane.
25. The system claimed in claim 1 and wherein said plurality of independently positionable beam steering elements comprises a two dimensional array of beam steering elements.
26. The system claimed in claim 25 and further comprising an array of fixed deflectors optically interposed between said at least one dynamically directable source of radiant energy and said plurality of independently positionable beam steering elements.
27. The system claimed in claim 1 wherein said independently positionable beam steering elements are operative to direct said beams of radiation to remove a portion of said substrate at said locations.
28. A system for delivering energy to a substrate, comprising:
at least one source of radiant energy providing a beam of radiation;
a beam splitter operative to split said beam into a plurality of sub-beams, each sub-beam propagating in a selectable direction; and
a plurality of independently positionable beam steering elements, some of said steering elements receiving said plurality of sub-beams and directing them to selectable locations on said substrate.
29. The system claimed in claim 28 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and said beam is defined by pulses of radiant energy.
30. The system claimed in claim 28 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said beam of radiation includes a pulsed laser beam.
31. The system claimed in claim 30 and wherein said at least one pulsed laser is a Q-switched laser.
32. The system claimed in claim 28 and wherein said at least one source of radiant energy comprises a Q-switched laser.
33. The system claimed in claim 28 and wherein said plurality of sub-beams comprises a selectable number of sub-beams.
34. The system claimed in claim 33 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.
35. The system claimed in claim 34 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.
36. The system claimed in claim 34 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said sub-beams.
37. The system claimed in claim 35 and wherein said acoustic wave also determines said selectable directions of said sub-beams.
38. The system claimed in claim 37 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
39. The system claimed in claim 38 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
40. The system claimed in claim 38 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.
41. The system claimed in claim 29 and wherein:
said beam splitter comprises a dynamically configurable beam splitter receiving said beam;
said plurality of sub-beams is a selectable number of sub-beams;
said dynamically configurable beam splitter being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.
42. The system claimed in claim 29 and wherein:
said plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
43. The system claimed in claim 41 and wherein:
said plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
44. The system claimed in claim 30 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.
45. The system claimed in claim 43 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.
46. The system claimed in claim 44 and wherein said at least one actuator comprises a piezoelectric device.
47. The system claimed in claim 44 and wherein said at least one actuator comprises a MEMs device.
48. The system claimed in claim 43 and wherein said plurality of beam steering elements includes a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of beam steering elements while others of said plurality of said beam steering elements are being repositioned.
49. The system claimed in claim 33 and wherein said selectable number of sub-beams all lie in a plane.
50. The system claimed in claim 28 and wherein said plurality of independently positionable beam steering elements comprises a two dimensional array of beam steering elements.
51. The system claimed in claim 50 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of independently positionable beam steering elements.
52. The system claimed in claim 28 wherein said independently positionable beam steering elements are operative to direct said beams of radiation to remove a portion of said substrate at said locations.
53. A system for delivering energy to a substrate, comprising:
at least one source of radiant energy providing a beam of radiation; and
a beam splitter disposed between said source of radiant energy and said substrate, said beam splitter operative to split said beam into a selectable plurality of sub-beams.
54. The system claimed in claim 53 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and said beam is defined by pulses of radiant energy.
55. The system claimed in claim 53 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said beam of radiation includes a pulsed laser beam.
56. The system claimed in claim 55 and wherein said at least one pulsed laser is a Q-switched laser.
57. The system claimed in claim 53 and wherein said at least one source of radiant energy comprises a Q-switched laser.
58. The system claimed in claim 53 and wherein said beam splitter is operative to direct each of said plurality of sub-beams in a selectable direction.
59. The system claimed in claim 58 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.
60. The system claimed in claim 59 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines the number of said plurality of sub-beams.
61. The system claimed in claim 59 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said sub-beams.
62. The system claimed in claim 60 and wherein said acoustic wave also determines said selectable directions of said sub-beams.
63. The system claimed in claim 62 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
64. The system claimed in claim 63 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
65. The system claimed in claim 63 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.
66. The system claimed in claim 54 and wherein:
said beam splitter comprises a dynamically configurable beam splitter receiving said beam;
said beam splitter being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.
67. The system claimed in claim 54 and also comprising:
a plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration, and wherein:
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
68. The system claimed in claim 66 and also comprising:
a plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration, and wherein:
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
69. The system claimed in claim 55 and also comprising:
a plurality of beam steering elements, each comprising a reflector mounted on at least one selectably tilting actuator.
70. The system claimed in claim 68 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.
71. The system claimed in claim 69 and wherein said at least one actuator comprises a piezoelectric device.
72. The system claimed in claim 69 and wherein said at least one actuator comprises a MEMs device.
73. The system claimed in claim 68 and wherein said plurality of beam steering elements includes a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of beam steering elements while others of said plurality of said beam steering elements are being repositioned.
74. The system claimed in claim 60 and wherein said selectable number of sub-beams all lie in a plane.
75. The system claimed in claim 67 and wherein said plurality of independently positionable beam steering elements comprises a two dimensional array of beam steering elements.
76. The system claimed in claim 75 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of independently positionable beam steering elements.
77. The system claimed in claim 67 wherein said independently positionable beam steering elements are operative to direct said beams of radiation to remove a portion of said substrate at specific locations.
78. A system for delivering energy to a substrate, comprising:
at least one source of radiant energy providing a beam of radiation; and
an opto-electronic multiple beam generator disposed between said source of radiant energy and said substrate and being operative to generate at least two sub-beams from said beam and to select an energy density characteristic of each sub-beam.
79. The system claimed in claim 78 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and said beam is defined by pulses of radiant energy.
80. The system claimed in claim 78 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said beam of radiation includes a pulsed laser beam.
81. The system claimed in claim 80 and wherein said at least one pulsed laser is a Q-switched laser.
82. The system claimed in claim 78 and wherein said at least one source of radiant energy comprises a Q-switched laser.
83. The system claimed in claim 78 and wherein said opto-electronic multiple beam generator is operative to generate a selectable number of sub-beams.
84. The system claimed in claim 78 and wherein said opto-electronic multiple beam generator is operative to generate a plurality of sub-beams and to direct each of said sub-beams in a selectable direction.
85. The system claimed in claim 83 and wherein said opto-electronic multiple beam generator is operative to direct each of said sub-beams in a selectable direction.
86. The system claimed in claim 85 and wherein said opto-electronic multiple beam generator comprises an acousto-optical deflector whose operation is governed by a control signal.
87. The system claimed in claim 86 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.
88. The system claimed in claim 86 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said sub-beams.
89. The system claimed in claim 87 and wherein said acoustic wave also determines said selectable directions of said sub-beams.
90. The system claimed in claim 89 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
91. The system claimed in claim 90 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
92. The system claimed in claim 90 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.
93. The system claimed in claim 79 and wherein:
said opto-electronic multiple beam generator comprises a dynamically configurable opto-electronic multiple beam generator generating a selectable number of sub-beams,
said dynamically configurable opto-electronic multiple beam generator being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.
94. The system claimed in claim 79 and also comprising:
a plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration, and wherein
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
95. The system claimed in claim 93 and also comprising:
a plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration, and wherein
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
96. The system claimed in claim 80 and also comprising:
a plurality of beam steering elements, each comprising a reflector mounted on at least one selectably tilting actuator.
97. The system claimed in claim 95 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.
98. The system claimed in claim 96 and wherein said at least one actuator comprises a piezoelectric device.
99. The system claimed in claim 96 and wherein said at least one actuator comprises a MEMs device.
100. The system claimed in claim 95 and wherein said plurality of beam steering elements includes a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of beam steering elements while others of said plurality of said beam steering elements are being repositioned.
101. The system claimed in claim 83 and wherein said selectable number of sub-beams all lie in a plane.
102. The system claimed in claim 94 and wherein said plurality of independently positionable beam steering elements comprises a two dimensional array of beam steering elements.
103. The system claimed in claim 102 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of independently positionable beam steering elements.
104. The system claimed in claim 94 wherein said independently positionable beam steering elements are operative to direct said beams of radiation to remove a portion of said substrate at specific locations.
105. A system for micromachining a substrate, comprising:
at least one source of pulsed radiant energy providing a pulsed beam of radiation along an optical axis, said pulsed beam including multiple pulses separated by a temporal pulse separation; and
a multiple beam, selectable and changeable angle output beam splitter disposed between said source of radiant energy and said substrate and being operative to output a plurality of sub-beams at a selected angle relative to said optical axis which angle is changeable in an amount of time that is less than said temporal pulse separation.
106. The system claimed in claim 105 and wherein said at least one source of pulsed radiant energy comprises at least one pulsed laser and wherein said pulsed beam of radiation includes a pulsed laser beam.
107. The system claimed in claim 106 and wherein said at least one pulsed laser is a Q-switched laser.
108. The system claimed in claim 105 and wherein said at least one source of pulsed radiant energy comprises a Q-switched laser.
109. The system claimed in claim 105 and wherein said plurality of sub-beams includes a selectable number of sub-beams.
110. The system claimed in claim 105 and wherein said beam splitter is operative to direct each of said plurality of sub-beams in a selectable direction.
111. The system claimed in claim 109 and wherein said beam splitter is operative to direct said sub-beams in selectable directions.
112. The system claimed in claim 111 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.
113. The system claimed in claim 112 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.
114. The system claimed in claim 112 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said sub-beams.
115. The system claimed in claim 113 and wherein said acoustic wave also determines said selectable directions of said sub-beams.
116. The system claimed in claim 115 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
117. The system claimed in claim 116 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
118. The system claimed in claim 116 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.
119. The system claimed in claim 105 and wherein:
said beam splitter comprises a dynamically configurable beam splitter receiving said pulsed beam of radiation and splitting said beam into a selectable number of sub-beams, said dynamically configurable beam splitter being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
said temporal pulse separation is greater than said reconfiguration time duration.
120. The system claimed in claim 105 and also comprising:
a plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration; and wherein:
said temporal pulse separation is less than said redirection time duration.
121. The system claimed in claim 119 and also comprising:
a plurality of independently positionable beam steering elements being capable of changing the direction of said sub-beams within a redirection time duration; and wherein:
said temporal pulse separation is less than said redirection time duration.
122. The system claimed in claim 106 and also comprising:
a plurality of beam steering elements, each comprising a reflector mounted on at least one selectably tilting actuator.
123. The system claimed in claim 121 and wherein each of said plurality of beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.
124. The system claimed in claim 122 and wherein said at least one actuator comprises a piezoelectric device.
125. The system claimed in claim 122 and wherein said at least one actuator comprises a MEMs device.
126. The system claimed in claim 121 and wherein said plurality of beam steering elements includes a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of beam steering elements while others of said plurality of said beam steering elements are being repositioned.
127. The system claimed in claim 109 and wherein said selectable number of sub-beams all lie in a plane.
128. The system claimed in claim 120 and wherein said plurality of independently positionable beam steering elements comprises a two dimensional array of beam steering elements.
129. The system claimed in claim 128 and further comprising an array of fixed deflectors optically interposed between said at least one source of pulsed radiant energy and said plurality of independently positionable beam steering elements.
130. The system claimed in claim 120 wherein said independently positionable beam steering elements are operative to direct said beams of radiation to remove a portion of said substrate at specific locations.
131. A system for micromachining a substrate, comprising:
at least one source of pulsed radiant energy providing a pulsed beam of radiation said pulsed beam including multiple pulses separated by a temporal pulse separation;
a beam splitter disposed between said source of radiant energy and a substrate and being operative to output a plurality of sub-beams at selectable angles which are changeable; and
a plurality of selectable spatial orientation deflectors, ones of said selectable spatial orientation deflectors being operative to change a spatial orientation in an amount of time that is greater than said temporal pulse separation, some of said spatial orientation deflectors being arranged to receive said sub-beams and to direct said sub-beams to said substrate.
132. The system claimed in claim 131 and wherein said at least one source of pulsed radiant energy comprises at least one pulsed laser and wherein said pulsed beam of radiation includes at least one pulsed laser beam.
133. The system claimed in claim 132 and wherein said at least one pulsed laser is a Q-switched laser.
134. The system claimed in claim 131 and wherein said at least one source of pulsed radiant energy comprises a Q-switched laser.
135. The system claimed in claim 131 and wherein said plurality of sub-beams comprises a selectable number of sub-beams.
136. The system claimed in claim 131 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.
137. The system claimed in claim 136 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.
138. The system claimed in claim 136 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable angles of said sub-beams.
139. The system claimed in claim 137 and wherein said acoustic wave also determines said selectable angles of said sub-beams.
140. The system claimed in claim 139 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
141. The system claimed in claim 140 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
142. The system claimed in claim 140 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.
143. The system claimed in claim 131 and wherein:
said beam splitter comprises a dynamically configurable beam splitter receiving said pulsed beam of radiation and splitting said pulsed beam into a selectable number of sub-beams, said dynamically configurable beam splitter being capable of changing at least one of the number and angle of said sub-beams within a reconfiguration time duration; and
said temporal pulse separation is greater than said reconfiguration time duration.
144. The system claimed in claim 131 and also comprising:
said plurality of selectable spatial orientation deflectors being capable of changing the angle of said sub-beams within a redirection time duration; and
said temporal pulse separation is less than said redirection time duration.
145. The system claimed in claim 143 and wherein:
said plurality of selectable spatial orientation deflectors being capable of changing the angle of said sub-beams within a redirection time duration; and
said temporal pulse separation is less than said redirection time duration.
146. The system claimed in claim 132 and wherein each of said plurality of selectable spatial orientation deflectors comprises a reflector mounted on at least one selectably tilting actuator.
147. The system claimed in claim 145 and wherein each of said plurality of selectable spatial orientation deflectors comprises a reflector mounted on at least one selectably tilting actuator.
148. The system claimed in claim 146 and wherein said at least one actuator comprises a piezoelectric device.
149. The system claimed in claim 146 and wherein said at least one actuator comprises a MEMs device.
150. The system claimed in claim 145 and wherein said plurality of selectable spatial orientation deflectors includes a number of selectable spatial orientation deflectors which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of selectable spatial orientation deflectors while others of said plurality of said selectable spatial orientation deflectors are being repositioned.
151. The system claimed in claim 135 and wherein said selectable number of sub-beams all lie in a plane.
152. The system claimed in claim 131 and wherein said plurality of selectable spatial orientation deflectors comprises a two dimensional array of selectable spatial orientation deflectors.
153. The system claimed in claim 152 and further comprising an array of fixed deflectors optically interposed between said at least one source of pulsed radiant energy and said plurality of selectable spatial orientation deflectors.
154. The system claimed in claim 131 wherein said selectable spatial orientation deflectors are operative to direct said sub-beams of radiation to remove a portion of said substrate at said locations.
155. A system for micromachining a substrate, comprising:
at least one source of radiant energy providing a beam of radiation;
a beam splitter operative to split said beam into a selectable number of output beams, said output beams having an energy property functionally related to said selectable number; and
at least one beam steering element receiving at least one output beam and directing said at least one output beam to micro-machine a portion of said substrate.
156. The system claimed in claim 155 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and each of said output beams is defined by pulses of radiant energy.
157. The system claimed in claim 155 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said beam of radiation includes a pulsed laser beam.
158. The system claimed in claim 157 and wherein said at least one pulsed laser is a Q-switched laser.
159. The system claimed in claim 155 and wherein said at least one source of radiant energy comprises a Q-switched laser.
160. The system claimed in claim 155 and wherein said beam splitter is operative to direct each of said output beams in a selectable direction.
161. The system claimed in claim 160 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.
162. The system claimed in claim 161 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of output beams.
163. The system claimed in claim 161 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said output beams.
164. The system claimed in claim 162 and wherein said acoustic wave also determines said selectable directions of said output beams.
165. The system claimed in claim 164 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
166. The system claimed in claim 165 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding output beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
167. The system claimed in claim 165 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding output beams.
168. The system claimed in claim 156 and wherein:
said beam splitter comprises a dynamically configurable beam splitter capable of changing at least one of the number and direction of said output beams within a reconfiguration time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.
169. The system claimed in claim 156 and wherein:
said at least one beam steering element is capable of changing the direction of said output beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
170. The system claimed in claim 168 and wherein:
said at least one beam steering element is capable of changing the direction of said output beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
171. The system claimed in claim 157 and wherein each of said at least one beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.
172. The system claimed in claim 170 and wherein each of said at least one beam steering elements comprises a reflector mounted on at least one selectably tilting actuator.
173. The system claimed in claim 171 and wherein said at least one actuator comprises a piezoelectric device.
174. The system claimed in claim 171 and wherein said at least one actuator comprises a MEMs device.
175. The system claimed in claim 170 and wherein said at least one beam steering element includes a number of beam steering elements which exceeds the number of output beams included in said selectable number of output beams and wherein at least some of said selectable number of output beams are directed to at least some of said at least one beam steering elements while others of said at least one beam steering elements are being repositioned.
176. The system claimed in claim 155 and wherein said selectable number of output beams all lie in a plane.
177. The system claimed in claim 155 and wherein said at least one beam steering element comprises a two dimensional array of beam steering elements.
178. The system claimed in claim 177 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said at least one beam steering element.
179. The system claimed in claim 155 wherein said at least one beam steering element is operative to direct said output beams to remove said portion of said substrate.
180. A system for delivering energy to a substrate, comprising:
at least one source of radiant energy providing a plurality of beams of radiation propagating in a plane; and
a plurality of deflectors receiving said plurality of beams and deflecting at least some of said beams to predetermined locations outside said plane.
181. The system claimed in claim 180 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and each of said plurality of beams is defined by pulses of radiant energy.
182. The system claimed in claim 180 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said plurality of beams of radiation include at least one pulsed laser beam.
183. The system claimed in claim 182 and wherein said at least one pulsed laser is a Q-switched laser.
184. The system claimed in claim 180 and wherein said at least one source of radiant energy comprises a Q-switched laser.
185. The system claimed in claim 180 and wherein said plurality of beams comprises a selectable number of beams.
186. The system claimed in claim 180 and wherein said at least one source of radiant energy is operative to direct each of said plurality of beams in a selectable direction.
187. The system claimed in claim 185 and wherein said at least one source of radiant energy is operative to direct each of said plurality of beams in a selectable direction.
188. The system claimed in claim 187 and wherein at least one of said plurality of deflectors comprises an acousto-optical deflector whose operation is governed by a control signal.
189. The system claimed in claim 188 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of beams.
190. The system claimed in claim 188 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said beams.
191. The system claimed in claim 189 and wherein said acoustic wave also determines said selectable directions of said beams.
192. The system claimed in claim 191 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
193. The system claimed in claim 192 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
194. The system claimed in claim 192 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding beams.
195. The system claimed in claim 181 and wherein:
said at least one source of radiant energy being capable of changing at least one of the number and direction of said plurality of beams within a reconfiguration time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.
196. The system claimed in claim 181 and wherein:
said plurality of deflectors being capable of changing the direction of said plurality of beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
197. The system claimed in claim 195 and wherein:
said plurality of deflectors being capable of changing the direction of said plurality of beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
198. The system claimed in claim 182 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.
199. The system claimed in claim 197 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.
200. The system claimed in claim 198 and wherein said at least one actuator comprises a piezoelectric device.
201. The system claimed in claim 198 and wherein said at least one actuator comprises a MEMs device.
202. The system claimed in claim 197 and wherein said plurality of deflectors includes a number of deflectors which exceeds the number of beams included in said plurality of beams and wherein at least some of said plurality of beams are directed to at least some of said plurality of deflectors while others of said plurality of said deflectors are being repositioned.
203. The system claimed in claim 185 and wherein said selectable number of beams all lie in a plane.
204. The system claimed in claim 180 and wherein said plurality of deflectors comprises a two dimensional array of deflectors.
205. The system claimed in claim 204 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of deflectors.
206. The system claimed in claim 180 wherein said deflectors are operative to direct each of said plurality of beams of radiation to remove a portion of said substrate at said locations.
207. A system for delivering energy to a substrate, comprising:
at least one source of radiant energy providing a beam of radiation;
a beam splitter operative to receive said beam and to output a plurality of sub-beams propagating in a plane; and
a plurality of deflectors receiving said plurality of sub-beams and deflecting at least some of said plurality of sub-beams to predetermined locations outside said plane.
208. The system claimed in claim 207 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and each of said sub-beams is defined by pulses of radiant energy.
209. The system claimed in claim 207 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said beam of radiation includes a pulsed laser beam.
210. The system claimed in claim 209 and wherein said at least one pulsed laser is a Q-switched laser.
211. The system claimed in claim 207 and wherein said at least one source of radiant energy comprises a Q-switched laser.
212. The system claimed in claim 207 and wherein said plurality of sub-beams comprises a selectable number of sub-beams.
213. The system claimed in claim 207 and wherein said beam splitter is operative to direct each of said plurality of sub-beams in a selectable direction.
214. The system claimed in claim 212 and wherein said beam splitter is operative to direct each of said plurality of sub-beams in a selectable direction.
215. The system claimed in claim 214 and wherein said beam splitter comprises an acousto-optical deflector whose operation is governed by a control signal.
216. The system claimed in claim 215 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.
217. The system claimed in claim 215 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said sub-beams.
218. The system claimed in claim 216 and wherein said acoustic wave also determines said selectable directions of said sub-beams.
219. The system claimed in claim 218 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
220. The system claimed in claim 219 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
221. The system claimed in claim 219 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.
222. The system claimed in claim 208 and wherein:
said plurality of sub-beams is a selectable number of sub-beams;
said beam splitter comprises a dynamically configurable beam splitter being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.
223. The system claimed in claim 208 and wherein:
said plurality of deflectors being capable of changing the direction of said sub-beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
224. The system claimed in claim 222 and wherein:
said plurality of deflectors being capable of changing the direction of said sub-beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
225. The system claimed in claim 209 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.
226. The system claimed in claim 224 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.
227. The system claimed in claim 225 and wherein said at least one actuator comprises a piezoelectric device.
228. The system claimed in claim 225 and wherein said at least one actuator comprises a MEMs device.
229. The system claimed in claim 224 and wherein said plurality of deflectors includes a number of deflectors which exceeds the number of sub-beams included in said plurality of sub-beams and wherein at least some of said plurality of sub-beams are directed to at least some of said plurality of deflectors while others of said plurality of said deflectors are being repositioned.
230. The system claimed in claim 212 and wherein said selectable number of sub-beams all lie in a plane.
231. The system claimed in claim 207 and wherein said plurality of deflectors comprises a two dimensional array of deflectors.
232. The system claimed in claim 231 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of deflectors.
233. The system claimed in claim 207 wherein said deflectors are operative to direct said plurality of sub-beams to remove a portion of said substrate at said locations.
234. A system for delivering energy to a substrate, comprising:
at least one source of radiant energy providing a plurality of beams of radiation;
a first plurality of selectably positionable deflectors; and
a second plurality of selectably positionable deflectors,
said first plurality of beams being directed onto said first plurality of selectably positionable deflectors during a first time interval for directing said plurality of beams onto a first plurality of locations;
said second plurality of selectably positionable deflectors being selectably positioned during said first time interval; and
said first plurality of beams of radiation being directed onto said second plurality of selectable positionable deflectors during a second time interval for directing said plurality of beams onto a second plurality of locations.
235. The system claimed in claim 234 and wherein said at least one source of radiant energy comprises a pulsed source of radiant energy and each of said plurality of beams is defined by pulses of radiant energy.
236. The system claimed in claim 234 and wherein said at least one source of radiant energy comprises at least one pulsed laser and wherein said plurality of beams of radiation include at least one pulsed laser beam.
237. The system claimed in claim 236 and wherein said at least one pulsed laser is a Q-switched laser.
238. The system claimed in claim 234 and wherein said at least one source of radiant energy comprises a Q-switched laser.
239. The system claimed in claim 234 and wherein said plurality of beams comprises a selectable number of beams.
240. The system claimed in claim 234 and wherein each of said plurality of beams is directed in a selectable direction.
241. The system claimed in claim 239 and wherein each of said plurality of beams is directed in a selectable direction.
242. The system claimed in claim 241 and wherein at least one of said first plurality of deflectors comprises an acousto-optical deflector whose operation is governed by a control signal.
243. The system claimed in claim 242 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of beams.
244. The system claimed in claim 242 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said beams.
245. The system claimed in claim 243 and wherein said acoustic wave also determines said selectable directions of said beams.
246. The system claimed in claim 245 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
247. The system claimed in claim 246 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
248. The system claimed in claim 246 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding beams.
249. The system claimed in claim 235 and wherein:
said plurality of beams comprises a selectable number of beams;
said at least one source of radiant energy being capable of changing at least one of the number and direction of said beams within a reconfiguration time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.
250. The system claimed in claim 235 and wherein:
said first plurality of selectably positionable deflectors being capable of changing the direction of said beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
251. The system claimed in claim 249 and wherein:
said first plurality of selectably positionable deflectors being capable of changing the direction of said beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
252. The system claimed in claim 236 and wherein each of said plurality of selectably positionable deflectors comprises a reflector mounted on at least one selectably tilting actuator.
253. The system claimed in claim 251 and wherein each of said plurality of selectably positionable deflectors comprises a reflector mounted on at least one selectably tilting actuator.
254. The system claimed in claim 252 and wherein said at least one actuator comprises a piezoelectric device.
255. The system claimed in claim 252 and wherein said at least one actuator comprises a MEMs device.
256. The system claimed in claim 251 and wherein said first plurality of selectably positionable deflectors includes a number of selectably positionable deflectors which exceeds the number of beams included in said plurality of beams and wherein at least some of said plurality of beams are directed to at least some of said plurality of selectably positionable deflectors while others of said plurality of said selectably positionable deflectors are being repositioned.
257. The system claimed in claim 239 and wherein said selectable number of beams all lie in a plane.
258. The system claimed in claim 234 and wherein said first plurality of selectably positionable deflectors comprises a two dimensional array of selectably positionable deflectors.
259. The system claimed in claim 258 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of selectably positionable deflectors.
260. The system claimed in claim 234 wherein said second plurality of selectably positionable deflectors are operative to direct said plurality of beams of radiation to remove a portion of said substrate at said second plurality of locations.
261. A system for delivering energy to a substrate, comprising:
at least one radiant beam source providing at least one beam of radiation;
at least first and second deflectors disposed to receive said at least one beam to deliver said beam to respective at least first and second at least partially overlapping locations on said substrate.
262. The system claimed in claim 261 and comprising:
a deflector positioner associated with each deflector, each deflector positioner being operative to position the deflector associated therewith in a spatial orientation such that a beam impinging on the deflector is delivered to said substrate within a region which is at least partially overlapping with a corresponding region to which a beam impinging on a different deflector is delivered.
263. The system claimed in claim 262 and wherein said at least one radiant beam source comprises a pulsed radiant beam source and said at least one beam is defined by pulses of radiant energy.
264. The system claimed in claim 262 and wherein said at least one radiant beam source comprises at least one pulsed laser and wherein said at least one beam of radiation includes at least one pulsed laser beam.
265. The system claimed in claim 264 and wherein said at least one pulsed laser is a O-switched laser.
266. The system claimed in claim 262 and wherein said at least one radiant beam source comprises a Q-switched laser.
267. The system claimed in claim 262 and wherein said at least one beam comprises a selectable number of beams.
268. The system claimed in claim 262 and wherein said at least one radiant beam source is operative to direct said at least one beam in a selectable direction.
269. The system claimed in claim 267 and wherein said at least one radiant beam source is operative to direct said at least one beam in a selectable direction.
270. The system claimed in claim 269 and wherein at least one of said at least first and second deflectors comprises an acousto-optical deflector whose operation is governed by a control signal.
271. The system claimed in claim 270 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of beams.
272. The system claimed in claim 270 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said beams.
273. The system claimed in claim 271 and wherein said acoustic wave also determines said selectable directions of said beams.
274. The system claimed in claim 273 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
275. The system claimed in claim 274 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
276. The system claimed in claim 274 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding beams.
277. The system claimed in claim 263 and wherein:
said at least one beam comprises a selectable number of beams;
said radiant beam source being capable of changing at least one of the number and direction of said beams within a reconfiguration time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.
278. The system claimed in claim 263 and wherein:
said at least first and second deflectors being capable of changing the direction of said beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
279. The system claimed in claim 277 and wherein:
said at least first and second deflectors being capable of changing the direction of said beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
280. The system claimed in claim 264 and wherein each of said at least first and second deflectors comprises a reflector mounted on at least one selectably tilting actuator.
281. The system claimed in claim 279 and wherein each of said at least first and second deflectors comprises a reflector mounted on at least one selectably tilting actuator.
282. The system claimed in claim 280 and wherein said at least one actuator comprises a piezoelectric device.
283. The system claimed in claim 280 and wherein said at least one actuator comprises a MEMs device.
284. The system claimed in claim 267 and wherein said selectable number of beams all lie in a plane.
285. The system claimed in claim 262 and wherein said at least first and second deflectors comprise a two dimensional array of deflectors.
286. The system claimed in claim 285 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said at least first and second deflectors.
287. The system claimed in claim 262 wherein said at least first and second deflectors are operative to direct said at least one beam of radiation to remove a portion of said substrate at said partially overlapping locations.
288. Laser micro-machining apparatus, comprising:
at least one radiant beam source providing a plurality of radiation beams;
a plurality of independently positionable deflectors arranged to be disposed between said at least one radiant beam source and a substrate to be micro-machined, said plurality of independently positionable deflectors being operative to independently deliver said at least one radiation beam to selectable locations on said substrate; and
a focusing lens disposed between said at least one radiant beam source and said substrate, said focusing lens receiving said plurality of radiation beams and being operative to simultaneously focus said beams onto said selectable locations on said substrate.
289. The apparatus claimed in claim 288 and wherein said at least one radiant beam source comprises a pulsed radiant beam source and each of said plurality of beams is defined by pulses of radiant energy.
290. The apparatus claimed in claim 288 and wherein said at least one radiant beam source comprises at least one pulsed laser and wherein said plurality of radiation beams include at least one pulsed laser beam.
291. The apparatus claimed in claim 290 and wherein said at least one pulsed laser is a Q-switched laser.
292. The apparatus claimed in claim 288 and wherein said at least one radiant beam source comprises a Q-switched laser.
293. The apparatus claimed in claim 288 and wherein said plurality of beams comprises a selectable number of beams.
294. The apparatus claimed in claim 288 and wherein said at least one radiant beam source is operative to direct each of said plurality of beams in a selectable direction.
295. The apparatus claimed in claim 293 and wherein said at least one radiant beam source is operative to direct each of said plurality of beams in a selectable direction.
296. The apparatus claimed in claim 295 and wherein at least one of said independently positionable deflectors comprises an acousto-optical deflector whose operation is governed by a control signal.
297. The apparatus claimed in claim 296 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of beams.
298. The apparatus claimed in claim 296 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said beams.
299. The apparatus claimed in claim 297 and wherein said acoustic wave also determines said selectable directions of said beams.
300. The apparatus claimed in claim 299 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
301. The apparatus claimed in claim 300 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
302. The apparatus claimed in claim 300 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding beams.
303. The apparatus claimed in claim 289 and wherein:
said plurality of beams comprises a selectable number of beams;
said at least one radiant beam source being capable of changing at least one of the number and direction of said beams within a reconfiguration time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.
304. The apparatus claimed in claim 289 and wherein:
said plurality of independently positionable deflectors being capable of changing the direction of said beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
305. The apparatus claimed in claim 303 and wherein:
said plurality of independently positionable deflectors being capable of changing the direction of said beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
306. The apparatus claimed in claim 290 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.
307. The apparatus claimed in claim 305 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.
308. The apparatus claimed in claim 306 and wherein said at least one actuator comprises a piezoelectric device.
309. The apparatus claimed in claim 306 and wherein said at least one actuator comprises a MEMs device.
310. The apparatus claimed in claim 305 and wherein said plurality of deflectors includes a number of deflectors which exceeds the number of beams included in said plurality of beams and wherein at least some of said plurality of beams are directed to at least some of said plurality of deflectors while others of said plurality of said deflectors are being repositioned.
311. The apparatus claimed in claim 293 and wherein said selectable number of beams all lie in a plane.
312. The apparatus claimed in claim 288 and wherein said plurality of deflectors comprises a two dimensional array of deflectors.
313. The apparatus claimed in claim 312 and further comprising an array of fixed deflectors optically interposed between said at least one source of radiant energy and said plurality of independently positionable deflectors.
314. The apparatus claimed in claim 288 wherein said independently positionable deflectors are operative to direct said beams of radiation to remove a portion of said substrate at said locations.
315. An acousto-optic device, comprising:
a source of radiant energy providing a beam of radiation along an optical axis;
an optical element receiving said beam; and
a transducer associated with said optical element, said transducer forming in said optical element an acoustic wave simultaneously having different acoustic frequencies, said optical element operative to output a plurality of sub-beams at different angles with respect to said optical axis.
316. The device claimed in claim 315 and wherein said source of radiant energy comprises a pulsed source of radiant energy and said beam is defined by pulses of radiant energy.
317. The device claimed in claim 315 and wherein said source of radiant energy comprises at least one pulsed laser and wherein said beam of radiation includes a pulsed laser beam.
318. The device claimed in claim 317 and wherein said at least one pulsed laser is a Q-switched laser.
319. The device claimed in claim 315 and wherein said source of radiant energy comprises a Q-switched laser.
320. The device claimed in claim 315 and wherein said plurality of sub-beams comprises a selectable number of sub-beams.
321. The device claimed in claim 315 and wherein said different angles comprise selectable angles.
322. The device claimed in claim 320 and wherein said different angles comprise selectable angles.
323. The device claimed in claim 322 and wherein said transducer comprises an acousto-optical deflector whose operation is governed by a control signal.
324. The device claimed in claim 323 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of sub-beams.
325. The device claimed in claim 324 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
326. The device claimed in claim 325 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding sub-beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
327. The device claimed in claim 325 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding sub-beams.
328. The device claimed in claim 316 and wherein:
said plurality of sub-beams comprises a selectable number of sub-beams;
said transducer being capable of changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.
329. The device claimed in claim 316 and wherein:
said transducer being capable of changing the direction of said sub-beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
330. The device claimed in claim 328 and wherein:
said transducer being capable of changing the direction of said sub-beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
331. The device claimed in claim 317 and wherein said transducer comprises a reflector mounted on at least one selectably tilting actuator.
332. The device claimed in claim 330 and wherein said transducer comprises a reflector mounted on at least one selectably tilting actuator.
333. The device claimed in claim 331 and wherein said at least one actuator comprises a piezoelectric device.
334. The device claimed in claim 331 and wherein said at least one actuator comprises a MEMs device.
335. The device claimed in claim 320 and wherein said selectable number of sub-beams all lie in a plane.
336. The device claimed in claim 315 and further comprising an array of fixed deflectors optically interposed between said source of radiant energy and said optical element.
337. The device claimed in claim 315 wherein said transducer is operative to direct said sub-beams to remove a portion of a substrate at specific locations.
338. A system for micro-machining a substrate, comprising:
a laser beam generator providing a laser beam;
a beam splitter receiving said laser beam and splitting said laser beam into a first number of output beams and a second number of output beams;
a first plurality of beam steering elements directing said first number of output beams to form at least one opening in a first layer of a multi-layered substrate; and
a second plurality of beam steering elements directing ones of said second number of output beams to remove selected portions of a second layer of said multi-layered substrate via said at least one opening.
339. The system claimed in claim 338 and wherein said laser beam generator is a Q-switched laser.
340. The system claimed in claim 338 and wherein said first number of output beams comprises a selectable number of output beams.
341. The system claimed in claim 338 and wherein said second number of output beams comprises a selectable number of output beams.
342. The system claimed in claim 338 and wherein said first plurality of beam steering devices direct each of said first number of output beams in a selectable direction.
343. The system claimed in claim 338 and wherein said second plurality of beam steering devices direct each of said second number of output beams in a selectable direction.
344. The system claimed in claim 340 and wherein said first plurality of beam steering devices direct each of said first number of output beams in a selectable direction.
345. The system claimed in claim 341 and wherein said second plurality of beam steering devices direct each of said second number of output beams in a selectable direction.
346. The system claimed in claim 344 and wherein at least one of said first plurality of beam steering devices comprises an acousto-optical deflector whose operation is governed by a control signal.
347. The system claimed in claim 346 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said number of output beams.
348. The system claimed in claim 346 and wherein said acousto-optical deflector comprises an acoustic wave generator controlled by said control signal, said acoustic wave generator generating an acoustic wave which determines said selectable directions of said output beams.
349. The system claimed in claim 347 and wherein said acoustic wave also determines said selectable directions of said output beams.
350. The system claimed in claim 349 and wherein said acoustic wave includes a plurality of spatially distinct acoustic wave segments, each spatially distinct acoustic wave segment being defined by a portion of said control signal having a distinct frequency.
351. The system claimed in claim 350 and wherein said each spatially distinct acoustic wave segment determines a corresponding spatially distinct direction of a corresponding output beam, said direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
352. The system claimed in claim 350 and wherein the number of said spatially distinct acoustic wave segments determines the number of corresponding beams.
353. The system claimed in claim 338 and wherein:
said first number of output beams comprises a selectable number of output beams;
said second number of output beams comprises a selectable number of output beams;
said beam splitter comprises a dynamically configurable beam splitter being capable of changing at least one of the number and direction of said output beams within a reconfiguration time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is greater than said reconfiguration time duration.
354. The system claimed in claim 338 and wherein:
said first plurality of beam steering devices being capable of changing the direction of said first number of output beams within a redirection time duration;
said second plurality of beam steering devices being capable of changing the direction of said second number of output beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
355. The system claimed in claim 353 and wherein:
said first plurality of beam steering devices being capable of changing the direction of said first number of output beams within a redirection time duration;
said second plurality of beam steering devices being capable of changing the direction of said second number of output beams within a redirection time duration; and
said pulses of radiant energy are separated from each other in time by a time separation which is less than said redirection time duration.
356. The system claimed in claim 338 and wherein each of said first and second pluralities of beam steering devices comprises a reflector mounted on at least one selectably tilting actuator.
357. The system claimed in claim 355 and wherein each of said first and second pluralities of beam steering devices comprises a reflector mounted on at least one selectably tilting actuator.
358. The system claimed in claim 356 and wherein said at least one actuator comprises a piezoelectric device.
359. The system claimed in claim 356 and wherein said at least one actuator comprises a MEMs device.
360. The system claimed in claim 355 and wherein said first plurality of beam steering elements includes a number of beam steering elements which exceeds the number of output beams included in said first plurality of output beams and wherein at least some of said first plurality of output beams are directed to at least some of said first plurality of beam steering elements while others of said first plurality of said beam steering elements are being repositioned.
361. The system claimed in claim 355 and wherein said second plurality of beam steering elements includes a number of beam steering elements which exceeds the number of output beams included in said second plurality of output beams and wherein at least some of said second plurality of output beams are directed to at least some of said second plurality of beam steering elements while others of said second plurality of said beam steering elements are being repositioned.
362. The system claimed in claim 340 and wherein said selectable number of first output beams all lie in a plane.
363. The system claimed in claim 341 and wherein said selectable number of second output beams all lie in a plane.
364. The system claimed in claim 338 and wherein said first plurality of beam steering elements comprises a two dimensional array of beam steering elements.
365. The system claimed in claim 338 and wherein said second plurality of beam steering elements comprises a two dimensional array of beam steering elements.
366. The system claimed in claim 364 and further comprising an array of fixed deflectors optically interposed between said laser beam generator and said first plurality of beam steering elements.
367. The system claimed in claim 365 and further comprising an array of fixed deflectors optically interposed between said first plurality of beam steering elements and said second plurality of beam steering elements.
368. A method for delivering energy to a substrate, comprising:
providing a plurality of beams of radiation;
propagating each of said plurality of beams in a dynamically selectable direction; and
directing said plurality of beams to selectable locations on said substrate.
369. The method claimed in claim 368 and wherein said providing comprises generating a plurality of beams each defined by pulses of radiant energy.
370. The method claimed in claim 368 and wherein said providing comprises generating said plurality of beams, said plurality of beams of radiation including at least one pulsed laser beam, using at least one pulsed laser.
371. The method claimed in claim 370 and wherein said at least one pulsed laser is a Q-switched laser.
372. The method claimed in claim 368 and wherein said providing comprises generating said plurality of beams using a Q-switched laser.
373. The method claimed in claim 368 and wherein said providing comprises:
generating a beam of radiant energy; and
splitting said beam into a selectable number of sub-beams.
374. The method claimed in claim 368 and wherein said providing comprises:
generating a beam of radiant energy;
splitting said beam into a plurality of sub-beams; and
directing each of said sub-beams in a selectable direction.
375. The method claimed in claim 373 and also comprising:
directing each of said sub-beams in a selectable direction.
376. The method claimed in claim 375 and wherein said splitting comprises:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
377. The method claimed in claim 376 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of sub-beams.
378. The method claimed in claim 376 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of said sub-beams.
379. The method claimed in claim 377 and wherein said controlling also comprises:
determining said selectable directions of said sub-beams.
380. The method claimed in claim 379 and wherein said generating an acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
381. The method claimed in claim 380 and also comprising:
determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
382. The method claimed in claim 380 and also comprising:
determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.
383. The method claimed in claim 369 and wherein said providing comprises:
generating a beam of radiant energy;
splitting said beam into a selectable number of sub-beams;
changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
384. The method claimed in claim 369 and also comprising:
changing the direction of said sub-beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
385. The method claimed in claim 383 and also comprising:
changing the direction of said sub-beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
386. The method claimed in claim 370 and wherein said directing also comprises:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
387. The method claimed in claim 385 and wherein said directing also comprises:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
388. The method claimed in claim 386 and wherein said at least one actuator comprises a piezoelectric device.
389. The method claimed in claim 386 and wherein said at least one actuator comprises a MEMs device.
390. The method claimed in claim 385 and wherein said directing comprises:
providing a plurality of beam steering elements, including a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams;
directing at least some of said plurality of sub-beams to at least some of said plurality of beam steering elements; and
simultaneously repositioning others of said plurality of said beam steering elements.
391. The method claimed in claim 373 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.
392. The method claimed in claim 390 and wherein said providing a plurality of beam steering elements comprises providing a two dimensional array of beam steering elements.
393. The method claimed in claim 392 and also comprising:
deflecting said plurality of beams, an array of fixed deflectors, prior to directing said plurality of beams to said selectable locations.
394. The method claimed in claim 368 and also comprising:
removing a portion of said substrate at said locations.
395. A method for delivering energy to a substrate, comprising:
providing a beam of radiation;
splitting said beam into a plurality of sub-beams;
propagating each of said plurality of sub-beams in a selectable direction; and
directing said plurality of sub-beams to selectable locations on said substrate.
396. The method claimed in claim 395 and wherein said providing comprises:
generating a beam defined by pulses of radiant energy.
397. The method claimed in claim 395 and wherein said providing comprises generating said beam using at least one pulsed laser and wherein said beam includes a pulsed laser beam.
398. The method claimed in claim 397 and wherein said at least one pulsed laser is a Q-switched laser.
399. The method claimed in claim 395 and wherein said providing comprises generating said beam using a Q-switched laser.
400. The method claimed in claim 395 and wherein said splitting comprises:
splitting said beam into a selectable number of sub-beams.
401. The method claimed in claim 400 and wherein said splitting comprises:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
402. The method claimed in claim 401 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of sub-beams.
403. The method claimed in claim 401 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of said sub-beams.
404. The method claimed in claim 402 and wherein said controlling also comprises:
determining said selectable directions of said sub-beams.
405. The method claimed in claim 404 and wherein said generating an acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
406. The method claimed in claim 405 and also comprising:
determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
407. The method claimed in claim 405 and also comprising:
determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.
408. The method claimed in claim 396 and wherein said splitting comprises:
splitting said beam into a selectable number of sub-beams;
changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
409. The method claimed in claim 396 and also comprising:
changing the direction of said sub-beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
410. The method claimed in claim 408 and also comprising:
changing the direction of said sub-beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
411. The method claimed in claim 397 and wherein said directing also comprises:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
412. The method claimed in claim 410 and wherein said directing also comprises:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
413. The method claimed in claim 411 and wherein said at least one actuator comprises a piezoelectric device.
414. The method claimed in claim 411 and wherein said at least one actuator comprises a MEMs device.
415. The method claimed in claim 410 and wherein said directing comprises:
providing a plurality of beam steering elements, including a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams;
directing at least some of said plurality of sub-beams to at least some of said plurality of beam steering elements; and
simultaneously repositioning others of said plurality of said beam steering elements.
416. The method claimed in claim 400 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.
417. The method claimed in claim 415 and wherein said providing a plurality of beam steering elements comprises providing a two dimensional array of beam steering elements.
418. The method claimed in claim 417 and also comprising:
deflecting said plurality of beams, an array of fixed deflectors, prior to directing said plurality of sub-beams to said selectable locations.
419. The method claimed in claim 395 and also comprising:
removing a portion of said substrate at said locations.
420. A method for delivering energy to a substrate, comprising:
providing a beam of radiation;
splitting said beam into a plurality of sub-beams,
said plurality of sub-beams comprised of a selectable number of sub-beams.
421. The method claimed in claim 420 and wherein said providing comprises:
generating a beam defined by pulses of radiant energy.
422. The method claimed in claim 420 and wherein said providing comprises generating said beam using at least one pulsed laser and wherein said beam includes a pulsed laser beam.
423. The method claimed in claim 422 and wherein said at least one pulsed laser is a Q-switched laser.
424. The method claimed in claim 420 and wherein said providing comprises generating said beam using a Q-switched laser.
425. The method claimed in claim 420 and wherein said splitting also comprises:
directing each of said plurality of sub-beams in a selectable direction.
426. The method claimed in claim 425 and wherein said splitting also comprises:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
427. The method claimed in claim 426 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of sub-beams.
428. The method claimed in claim 426 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of sub-beams.
429. The method claimed in claim 427 and wherein said controlling also comprises:
determining said selectable directions of sub-beams.
430. The method claimed in claim 429 and wherein generating said acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
431. The method claimed in claim 430 and also comprising:
determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
432. The method claimed in claim 430 and also comprising:
determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.
433. The method claimed in claim 421 and wherein said splitting comprises:
changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
434. The method claimed in claim 421 and also comprising:
changing the direction of said sub-beams within a redirection time duration, and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
435. The method claimed in claim 433 and also comprising:
changing the direction of said sub-beams within a redirection time duration, and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
436. The method claimed in claim 422 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
437. The method claimed in claim 435 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
438. The method claimed in claim 436 and wherein said at least one actuator comprises a piezoelectric device.
439. The method claimed in claim 436 and wherein said at least one actuator comprises a MEMs device.
440. The method claimed in claim 435 and also comprising:
providing a plurality of beam steering elements, including a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams;
directing at least some of said plurality of sub-beams to at least some of said plurality of beam steering elements; and
simultaneously repositioning others of said plurality of said beam steering elements.
441. The method claimed in claim 427 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.
442. The method claimed in claim 440 and wherein said providing a plurality of beam steering elements comprises providing a two dimensional array of beam steering elements.
443. The method claimed in claim 442 and also comprising:
deflecting said plurality of sub-beams, an array of fixed deflectors.
444. The method claimed in claim 434 and also comprising:
removing a portion of said substrate at specific locations.
445. A method for delivering energy to a substrate, comprising:
providing a beam of radiation using at least one source of radiant energy;
disposing an opto-electronic multiple beam generator between said at least one source of radiant energy and said substrate;
generating at least two sub-beams from said beam; and
selecting an energy density characteristic of each sub-beam.
446. The method claimed in claim 445 and wherein said providing comprises generating said beam defined by pulses of radiant energy using a pulsed source of radiant energy.
447. The method claimed in claim 445 and wherein said providing comprises generating said beam of radiation, said beam of radiation including a pulsed laser beam, using at least one pulsed laser.
448. The method claimed in claim 447 and wherein said at least one pulsed laser is a Q-switched laser.
449. The method claimed in claim 445 and wherein said providing comprises generating said beam using a Q-switched laser.
450. The method claimed in claim 445 and wherein generating comprises generating a selectable number of sub-beams.
451. The method claimed in claim 445 and also comprising:
directing each of said sub-beams in a selectable direction.
452. The method claimed in claim 450 and also comprising:
directing each of said sub-beams in a selectable direction.
453. The method claimed in claim 452 and also comprising:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
454. The method claimed in claim 453 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of sub-beams.
455. The method claimed in claim 453 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of sub-beams.
456. The method claimed in claim 454 and wherein said controlling also comprises:
determining said selectable directions of sub-beams.
457. The method claimed in claim 456 and wherein generating said acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
458. The method claimed in claim 457 and also comprising:
determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
459. The method claimed in claim 457 and also comprising:
determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.
460. The method claimed in claim 446 and wherein said generating comprises:
generating a selectable number of sub-beams,
changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
461. The method claimed in claim 446 and also comprising:
changing the direction of said sub-beams within a redirection time duration, and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
462. The method claimed in claim 460 and also comprising:
changing the direction of said sub-beams within a redirection time duration, and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
463. The method claimed in claim 447 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
464. The method claimed in claim 462 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
465. The method claimed in claim 463 and wherein said at least one actuator comprises a piezoelectric device.
466. The method claimed in claim 463 and wherein said at least one actuator comprises a MEMs device.
467. The method claimed in claim 462 and also comprising:
providing a plurality of beam steering elements, including a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams;
directing at least some of said plurality of sub-beams to at least some of said plurality of beam steering elements; and
simultaneously repositioning others of said plurality of said beam steering elements.
468. The method claimed in claim 450 and wherein said generating said selectable number of sub-beams comprises generating said selectable number of sub-beams all lying in a plane.
469. The method claimed in claim 467 and wherein said providing a plurality of beam steering elements comprises providing a two dimensional array of beam steering elements.
470. The method claimed in claim 469 and also comprising:
deflecting said plurality of sub-beams, an array of fixed deflectors.
471. The method claimed in claim 445 and also comprising:
removing a portion of said substrate at specific locations.
472. A method for micromachining a substrate, comprising:
providing a pulsed beam of radiation along an optical axis, said pulsed beam including multiple pulses separated by a temporal pulse separation; and
splitting said beam into a plurality of sub-beams; and
outputting said plurality of sub-beams at a selected angle relative to said optical axis which angle is changeable in an amount of time that is less than said temporal pulse separation.
473. The method claimed in claim 472 and wherein said providing comprises generating said pulsed beam of radiation, said pulsed beam including a pulsed laser beam, using at least one pulsed laser.
474. The method claimed in claim 473 and wherein said at least one pulsed laser is a Q-switched laser.
475. The method claimed in claim 472 and wherein said providing comprises generating said beam using a Q-switched laser.
476. The method claimed in claim 472 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams.
477. The method claimed in claim 472 and wherein said splitting also comprises:
directing each of said plurality of sub-beams in a selectable direction.
478. The method claimed in claim 476 and wherein said splitting also comprises:
directing each of said plurality of sub-beams in a selectable direction.
479. The method claimed in claim 478 and wherein said splitting also comprises:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
480. The method claimed in claim 479 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of sub-beams.
481. The method claimed in claim 479 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of sub-beams.
482. The method claimed in claim 480 and wherein said controlling also comprises:
determining said selectable directions of sub-beams.
483. The method claimed in claim 482 and wherein generating said acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
484. The method claimed in claim 483 and also comprising:
determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
485. The method claimed in claim 483 and also comprising:
determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.
486. The method claimed in claim 472 and wherein said splitting also comprises:
splitting said beam into a selectable number of sub-beams,
and the method also comprising:
changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and wherein
said temporal pulse separation is greater than said reconfiguration time duration.
487. The method claimed in claim 472 and also comprising:
changing the direction of said sub-beams within a redirection time duration, wherein said temporal pulse separation is less than said redirection time duration.
488. The method claimed in claim 486 and also comprising:
changing the direction of said sub-beams within a redirection time duration, wherein said temporal pulse separation is less than said redirection time duration.
489. The method claimed in claim 473 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
490. The method claimed in claim 488 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
491. The method claimed in claim 489 and wherein said at least one actuator comprises a piezoelectric device.
492. The method claimed in claim 489 and wherein said at least one actuator comprises a MEMs device.
493. The method claimed in claim 488 and also comprising:
providing a plurality of beam steering elements, including a number of beam steering elements which exceeds the number of sub-beams included in said plurality of sub-beams;
directing at least some of said plurality of sub-beams to at least some of said plurality of beam steering elements; and
simultaneously repositioning others of said plurality of said beam steering elements.
494. The method claimed in claim 476 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.
495. The method claimed in claim 493 and wherein said providing a plurality of beam steering elements comprises providing a two dimensional array of beam steering elements.
496. The method claimed in claim 495 and also comprising:
deflecting said plurality of sub-beams, an array of fixed deflectors.
497. The method claimed in claim 472 and also comprising:
removing a portion of said substrate at specific locations.
498. A method for micromachining a substrate, comprising:
providing a pulsed beam of radiation, said pulsed beam including multiple pulses separated by a temporal pulse separation;
splitting said beam into a plurality of sub-beams;
outputting said plurality of sub-beams at selectable angles which are changeable; and
receiving said sub-beams, a plurality of selectable spatial orientation deflectors;
changing a spatial orientation in an amount of time that is greater than said temporal pulse separation, ones of said selectable spatial orientation deflectors; and
directing said sub-beams to said substrate, some of said spatial orientation deflectors.
499. The method claimed in claim 498 and wherein said providing comprises generating said pulsed beam of radiation, said pulsed beam including a pulsed laser beam, using at least one pulsed laser.
500. The method claimed in claim 499 and wherein said at least one pulsed laser is a Q-switched laser.
501. The method claimed in claim 498 and wherein said providing comprises generating said beam using a Q-switched laser.
502. The method claimed in claim 498 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams.
503. The method claimed in claim 498 and wherein said splitting also comprises:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
504. The method claimed in claim 503 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of sub-beams.
505. The method claimed in claim 503 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable angles of sub-beams.
506. The method claimed in claim 504 and wherein said controlling also comprises:
determining said selectable angles of sub-beams.
507. The method claimed in claim 506 and wherein generating said acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
508. The method claimed in claim 507 and also comprising:
determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
509. The method claimed in claim 507 and also comprising:
determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.
510. The method claimed in claim 498 and wherein said splitting also comprises:
splitting said beam into a selectable number of sub-beams,
and the method also comprising:
changing at least one of the number and angle of said sub-beams within a reconfiguration time duration; and wherein
said temporal pulse separation is greater than said reconfiguration time duration.
511. The method claimed in claim 498 and also comprising:
changing the angle of said sub-beams within a redirection time duration, wherein said temporal pulse separation is less than said redirection time duration.
512. The method claimed in claim 510 and also comprising:
changing the angle of said sub-beams within a redirection time duration, wherein said temporal pulse separation is less than said redirection time duration.
513. The method claimed in claim 499 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
514. The method claimed in claim 512 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
515. The method claimed in claim 513 and wherein said at least one actuator comprises a piezoelectric device.
516. The method claimed in claim 513 and wherein said at least one actuator comprises a MEMs device.
517. The method claimed in claim 512 and also comprising:
providing a plurality of selectable spatial orientation deflectors, including a number of selectable spatial orientation deflectors which exceeds the number of sub-beams included in said plurality of sub-beams;
directing at least some of said plurality of sub-beams to at least some of said plurality of selectable spatial orientation deflectors; and
simultaneously repositioning others of said plurality of said selectable spatial orientation deflectors.
518. The method claimed in claim 502 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.
519. The method claimed in claim 517 and wherein said providing a plurality of selectable spatial orientation deflectors comprises providing a two dimensional array of selectable spatial orientation deflectors.
520. The method claimed in claim 519 and also comprising:
deflecting said plurality of sub-beams, an array of fixed deflectors.
521. The method claimed in claim 498 and also comprising:
removing a portion of said substrate at specific locations.
522. A method for micromachining a substrate, comprising:
providing a beam of radiation;
splitting said beam into a selectable number of output beams, said output beams having an energy property functionally related to said selectable number;
receiving at least one of said output beams, at least one beam steering element; and
directing said at least one of said output beams to micro-machine a portion of said substrate.
523. The method claimed in claim 522 and wherein said providing comprises generating said beam defined by pulses of radiant energy.
524. The method claimed in claim 522 and wherein said providing comprises generating said beam, said beam including a pulsed laser beam, using at least one pulsed laser.
525. The method claimed in claim 524 and wherein said at least one pulsed laser is a Q-switched laser.
526. The method claimed in claim 522 and wherein said providing comprises generating said beam using a Q-switched laser.
527. The method claimed in claim 522 and also comprising:
directing each of said output beams in a selectable direction.
528. The method claimed in claim 527 and wherein said splitting comprises:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
529. The method claimed in claim 528 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of output beams.
530. The method claimed in claim 529 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of said output beams.
531. The method claimed in claim 529 and wherein said controlling also comprises:
determining said selectable directions of said output beams.
532. The method claimed in claim 531 and wherein said generating an acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
533. The method claimed in claim 532 and also comprising:
determining a corresponding spatially distinct direction of a corresponding output beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
534. The method claimed in claim 532 and also comprising:
determining the number of corresponding output beams from the number of said spatially distinct acoustic wave segments.
535. The method claimed in claim 523 and also comprising:
changing at least one of the number and direction of said output beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
536. The method claimed in claim 523 and also comprising:
changing the direction of said output beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
537. The method claimed in claim 535 and also comprising:
changing the direction of said output beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
538. The method claimed in claim 524 and wherein said directing also comprises:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
539. The method claimed in claim 537 and wherein said directing also comprises:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
540. The method claimed in claim 538 and wherein said at least one actuator comprises a piezoelectric device.
541. The method claimed in claim 538 and wherein said at least one actuator comprises a MEMs device.
542. The method claimed in claim 537 and wherein said receiving comprises:
receiving said at least one of said output beams, said at least one beam steering element of a plurality of beam steering elements, said plurality of beam steering elements including a number of beam steering elements which exceeds the number of output beams included in said plurality of output beams;
and said directing comprises:
directing at least some of said plurality of output beams to at least some of said plurality of beam steering elements; and
simultaneously repositioning others of said plurality of said beam steering elements.
543. The method claimed in claim 522 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.
544. The method claimed in claim 542 and wherein said plurality of beam steering elements comprises a two dimensional array of beam steering elements.
545. The method claimed in claim 544 and also comprising:
deflecting said plurality of beams, an array of fixed deflectors, prior to directing said plurality of beams to said selectable locations.
546. The method claimed in claim 522 and also comprising:
removing said portion of said substrate.
547. A method for delivering energy to a substrate, comprising:
providing a plurality of beams of radiation propagating in a plane;
receiving said plurality of beams, a plurality of deflectors; and
deflecting at least some of said beams to predetermined locations outside said plane.
548. The method claimed in claim 547 and wherein said providing comprises generating a plurality of beams each defined by pulses of radiant energy.
549. The method claimed in claim 547 and wherein said providing comprises generating said plurality of beams, said plurality of beams of radiation including at least one pulsed laser beam, using at least one pulsed laser.
550. The method claimed in claim 549 and wherein said at least one pulsed laser is a Q-switched laser.
551. The method claimed in claim 547 and wherein said providing comprises generating said plurality of beams using a Q-switched laser.
552. The method claimed in claim 547 and wherein said providing comprises:
providing a selectable number of beams of radiant energy.
553. The method claimed in claim 547 and also comprising:
directing each of said plurality of beams in a selectable direction.
554. The method claimed in claim 552 and also comprising:
directing each of said plurality of beams in a selectable direction.
555. The method claimed in claim 554 and wherein said deflecting comprises:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
556. The method claimed in claim 555 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of beams.
557. The method claimed in claim 555 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of said beams.
558. The method claimed in claim 556 and wherein said controlling also comprises:
determining said selectable directions of said beams.
559. The method claimed in claim 558 and wherein said generating an acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
560. The method claimed in claim 559 and also comprising:
determining a corresponding spatially distinct direction of a corresponding beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
561. The method claimed in claim 559 and also comprising:
determining the number of corresponding beams from the number of said spatially distinct acoustic wave segments.
562. The method claimed in claim 548 and wherein said providing comprises:
providing a selectable number of beams;
and the method also comprises:
changing at least one of the number and direction of said beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
563. The method claimed in claim 548 and also comprising:
changing the direction of said beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
564. The method claimed in claim 562 and also comprising:
changing the direction of said beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
565. The method claimed in claim 549 and wherein each of said plurality of deflectors comprises reflector mounted on at least one selectably tilting actuator.
566. The method claimed in claim 564 and wherein each of said plurality of deflectors comprises reflector mounted on at least one selectably tilting actuator.
567. The method claimed in claim 565 and wherein said at least one actuator comprises a piezoelectric device.
568. The method claimed in claim 565 and wherein said at least one actuator comprises a MEMs device.
569. The method claimed in claim 564 and wherein said receiving comprises:
receiving said plurality of beams, said plurality of deflectors, said plurality of deflectors including a number of deflectors which exceeds the number of beams included in said plurality of beams;
and said deflecting comprises:
directing at least some of said plurality of output beams to at least some of said plurality of deflectors; and
simultaneously repositioning others of said plurality of said deflectors.
570. The method claimed in claim 552 and wherein said providing a selectable number of beams comprises providing a selectable number of beams all lying in a plane.
571. The method claimed in claim 547 and wherein said plurality of deflectors comprises a two dimensional array of deflectors.
572. The method claimed in claim 571 and also comprising:
deflecting said plurality of beams, an array of fixed deflectors, prior to said deflecting said at least some of said beams to said predetermined locations.
573. The method claimed in claim 547 and also comprising:
removing a portion of said substrate at said predetermined locations.
574. A method for delivering energy to a substrate, comprising:
providing a beam of radiation;
splitting said beam into a plurality of sub-beams propagating in a plane;
receiving said plurality of sub-beams, a plurality of deflectors; and
deflecting at least some of said plurality of sub-beams to predetermined locations outside said plane.
575. The method claimed in claim 574 and wherein said providing comprises:
generating a beam defined by pulses of radiant energy.
576. The method claimed in claim 574 and wherein said providing comprises:
generating said beam, said beam including at least one pulsed laser beam, using at least one pulsed laser.
577. The method claimed in claim 576 and wherein said at least one pulsed laser is a Q-switched laser.
578. The method claimed in claim 574 and wherein said providing comprises:
generating said beam using a Q-switched laser.
579. The method claimed in claim 574 and wherein said splitting comprises:
splitting said beam into a selectable number of sub-beams.
580. The method claimed in claim 574 and wherein also comprising:
directing each of said sub-beams in a selectable direction.
581. The method claimed in claim 579 and also comprising:
directing each of said sub-beams in a selectable direction.
582. The method claimed in claim 581 and also comprising:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
583. The method claimed in claim 582 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of sub-beams.
584. The method claimed in claim 582 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of said sub-beams.
585. The method claimed in claim 583 and wherein said controlling also comprises:
determining said selectable directions of said sub-beams.
586. The method claimed in claim 585 and wherein said generating an acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
587. The method claimed in claim 586 and also comprising:
determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
588. The method claimed in claim 586 and also comprising:
determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.
589. The method claimed in claim 575 and wherein said splitting comprises:
splitting said beam into a selectable number of sub-beams;
and the method also comprises:
changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
590. The method claimed in claim 575 and also comprising:
changing the direction of said sub-beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
591. The method claimed in claim 589 and also comprising:
changing the direction of said sub-beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
592. The method claimed in claim 576 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.
593. The method claimed in claim 591 and wherein each of said plurality of deflectors comprises a reflector mounted on at least one selectably tilting actuator.
594. The method claimed in claim 592 and wherein said at least one actuator comprises a piezoelectric device.
595. The method claimed in claim 592 and wherein said at least one actuator comprises a MEMs device.
596. The method claimed in claim 591 and wherein said receiving comprises:
receiving said plurality of sub-beams, said plurality of deflectors, said plurality of deflectors including a number of deflectors which exceeds the number of sub-beams included in said plurality of sub-beams;
and said deflecting comprises:
directing at least some of said plurality of sub-beams to at least some of said plurality of deflectors; and
simultaneously repositioning others of said plurality of said deflectors.
597. The method claimed in claim 579 and wherein said splitting comprises splitting said beam into a selectable number of sub-beams all lying in a plane.
598. The method claimed in claim 574 and wherein said plurality of deflectors comprises a two dimensional array of deflectors.
599. The method claimed in claim 598 and also comprising:
deflecting said plurality of sub-beams, an array of fixed deflectors, prior to receiving said plurality of sub-beams.
600. The method claimed in claim 574 and also comprising:
removing a portion of said substrate at said predetermined locations.
601. A method for delivering energy to a substrate, comprising:
directing a plurality of beams of radiation onto a first plurality of selectably positionable deflectors during a first time interval for directing said plurality of beams onto a first plurality of locations;
during said first time interval, selectably positioning a second plurality of selectably positionable deflectors; and
during a second time interval, directing said plurality of beams of radiation onto said second plurality of selectably positionable deflectors for directing said plurality of beams onto a second plurality of locations.
602. The method claimed in claim 601 and also comprising:
defining each of said plurality of beams by pulses of radiant energy.
603. The method claimed in claim 601 and also comprising:
generating said plurality of beams, including at least one pulsed laser beam, using at least one pulsed laser.
604. The method claimed in claim 603 and wherein said at least one pulsed laser is a Q-switched laser.
605. The method claimed in claim 601 and also comprising:
generating said plurality of beams using a Q-switched laser.
606. The method claimed in claim 601 and wherein said plurality of beams comprises a selectable number of beams.
607. The method claimed in claim 601 and wherein said directing comprises:
directing each of said beams in a selectable direction.
608. The method claimed in claim 606 and also comprising:
directing each of said beams in a selectable direction.
609. The method claimed in claim 608 and also comprising:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
610. The method claimed in claim 609 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of beams.
611. The method claimed in claim 609 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of said beams.
612. The method claimed in claim 610 and wherein said controlling also comprises:
determining said selectable directions of said beams.
613. The method claimed in claim 612 and wherein said generating an acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
614. The method claimed in claim 613 and also comprising:
determining a corresponding spatially distinct direction of a corresponding beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
615. The method claimed in claim 613 and also comprising:
determining the number of corresponding beams from the number of said spatially distinct acoustic wave segments.
616. The method claimed in claim 602 and wherein said plurality of beams comprises a selectable number of beams;
and the method also comprises:
changing at least one of the number and direction of said beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
617. The method claimed in claim 602 and also comprising:
changing the direction of said beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
618. The method claimed in claim 616 and also comprising:
changing the direction of said beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
619. The method claimed in claim 603 and wherein each of said first and second pluralities of selectably positionable deflectors comprises a reflector mounted on at least one selectably tilting actuator.
620. The method claimed in claim 618 and wherein each of said first and second pluralities of selectably positionable deflectors comprises a reflector mounted on at least one selectably tilting actuator.
621. The method claimed in claim 619 and wherein said at least one actuator comprises a piezoelectric device.
622. The method claimed in claim 619 and wherein said at least one actuator comprises a MEMs device.
623. The method claimed in claim 618 and wherein said first plurality of selectably positionable deflectors includes a number of selectably positionable deflectors which exceeds the number of beams included in said plurality of beams and wherein at least some of said plurality of beams are directed to at least some of said plurality of selectably positionable deflectors while others of said plurality of said selectably positionable deflectors are being repositioned.
624. The method claimed in claim 606 and wherein said selectable number of beams all lie in a plane.
625. The method claimed in claim 601 and wherein said first plurality of selectably positionable deflectors comprises a two dimensional array of selectably positionable deflectors.
626. The method claimed in claim 625 and also comprising:
deflecting said plurality of beams, an array of fixed deflectors.
627. The method claimed in claim 601 and also comprising:
removing a portion of said substrate at said second plurality of locations.
628. A method for delivering energy to a substrate, comprising:
providing at least one beam of radiation;
receiving said at least one beam, at least one first deflector and at least one second deflector;
disposing said at least one first deflector and said at least one second deflector to deliver said beam to respective at least first and second at least partially overlapping locations on said substrate.
629. The method claimed in claim 628 and also comprising:
associating a deflector positioner with each deflector; and
positioning each deflector, said deflector positioner associated therewith, in a spatial orientation such that a beam impinging on the deflector is delivered to said substrate within a region which is at least partially overlapping with a corresponding region to which a beam impinging on a different deflector is delivered.
630. The method claimed in claim 629 and wherein said providing comprises generating said at least one beam defined by pulses of radiant energy.
631. The method claimed in claim 629 and wherein said providing comprises generating said at least one beam, said at least one beam including at least one pulsed laser beam, using at least one pulsed laser.
632. The method claimed in claim 631 and wherein said at least one pulsed laser is a Q-switched laser.
633. The method claimed in claim 629 and wherein said providing comprises generating said at least one beam using a Q-switched laser.
634. The method claimed in claim 629 and wherein said providing comprises:
generating a selectable number of beams.
635. The method claimed in claim 629 and also comprising:
directing each of said at least one beams in a selectable direction.
636. The method claimed in claim 634 and also comprising:
directing each of said at least one beams in a selectable direction.
637. The method claimed in claim 636 and also comprising:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
638. The method claimed in claim 637 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of beams.
639. The method claimed in claim 637 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of said beams.
640. The method claimed in claim 638 and wherein said controlling also comprises:
determining said selectable directions of said beams.
641. The method claimed in claim 640 and wherein said generating an acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
642. The method claimed in claim 641 and also comprising:
determining a corresponding spatially distinct direction of a corresponding beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
643. The method claimed in claim 641 and also comprising:
determining the number of corresponding beams from the number of said spatially distinct acoustic wave segments.
644. The method claimed in claim 630 and wherein said providing comprises:
generating a selectable number of beams;
and the method also comprises:
changing at least one of the number and direction of said beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
645. The method claimed in claim 630 and also comprising:
changing the direction of said beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
646. The method claimed in claim 644 and also comprising:
changing the direction of said beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
647. The method claimed in claim 631 and wherein each of said at least one first deflector and each of said at least one second deflector comprise a reflector mounted on at least one selectably tilting actuator.
648. The method claimed in claim 646 and wherein each of said at least one first deflector and each of said at least one second deflector comprise a reflector mounted on at least one selectably tilting actuator.
649. The method claimed in claim 647 and wherein said at least one actuator comprises a piezoelectric device.
650. The method claimed in claim 647 and wherein said at least one actuator comprises a MEMs device.
651. The method claimed in claim 634 and wherein said selectable number of beams all lie in a plane.
652. The method claimed in claim 629 and wherein said at least one first deflector and said at least one second deflector comprise a two dimensional array of deflectors.
653. The method claimed in claim 652 and also comprising:
deflecting said at least one beam, an array of fixed deflectors, prior to said receiving.
654. The method claimed in claim 628 and also comprising:
removing a portion of said substrate at said overlapping locations.
655. A method for laser micro-machining comprising:
providing a plurality of radiation beams;
independently deflecting each of said plurality of beams to selectable locations on a substrate to be micro-machined; and
focusing said plurality of beams onto said selectable locations on said substrate.
656. The method claimed in claim 655 and wherein said providing comprises generating a plurality of beams each defined by pulses of radiant energy.
657. The method claimed in claim 655 and wherein said providing comprises generating said plurality of beams, said plurality of beams including at least one pulsed laser beam, using at least one pulsed laser.
658. The method claimed in claim 657 and wherein said at least one pulsed laser is a Q-switched laser.
659. The method claimed in claim 655 and wherein said providing comprises generating said plurality of beams using a Q-switched laser.
660. The method claimed in claim 655 and wherein said providing comprises:
generating a selectable number of beams.
661. The method claimed in claim 655 and also comprising:
directing each of said plurality of beams in a selectable direction.
662. The method claimed in claim 660 and also comprising:
directing each of said plurality of beams in a selectable direction.
663. The method claimed in claim 662 and also comprising:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
664. The method claimed in claim 663 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of beams.
665. The method claimed in claim 663 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of said beams.
666. The method claimed in claim 664 and wherein said controlling also comprises:
determining said selectable directions of said beams.
667. The method claimed in claim 666 and wherein said generating an acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
668. The method claimed in claim 667 and also comprising:
determining a corresponding spatially distinct direction of a corresponding beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
669. The method claimed in claim 667 and also comprising:
determining the number of corresponding beams from the number of said spatially distinct acoustic wave segments.
670. The method claimed in claim 656 and wherein said providing comprises:
generating a selectable number of beams;
and the method also comprises:
changing at least one of the number and direction of said beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
671. The method claimed in claim 656 and also comprising:
changing the direction of said beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
672. The method claimed in claim 670 and also comprising:
changing the direction of said beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
673. The method claimed in claim 657 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
674. The method claimed in claim 672 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
675. The method claimed in claim 673 and wherein said at least one actuator comprises a piezoelectric device.
676. The method claimed in claim 673 and wherein said at least one actuator comprises a MEMs device.
677. The method claimed in claim 672 and wherein said deflecting comprises:
providing a plurality of deflectors, including a number of deflectors which exceeds the number of beams included in said plurality of beams;
directing at least some of said plurality of beams to at least some of said plurality of deflectors; and
simultaneously repositioning others of said plurality of said deflectors.
678. The method claimed in claim 660 and wherein said generating comprises generating said selectable number of beams all lying in a plane.
679. The method claimed in claim 677 and wherein said providing a plurality of deflectors comprises providing a two dimensional array of deflectors.
680. The method claimed in claim 679 and also comprising:
deflecting said plurality of beams, an array of fixed deflectors.
681. The method claimed in claim 655 and also comprising:
removing a portion of said substrate at said selectable locations.
682. An acousto-optic method comprising:
providing a beam of radiation along an optical axis;
receiving said beam, an optical element;
associating a transducer with said optical element;
forming in said optical element an acoustic wave simultaneously having different acoustic frequencies; and
outputting a plurality of sub-beams at different angles with respect to said optical axis.
683. The method claimed in claim 682 and wherein said providing comprises generating said beam defined by pulses of radiant energy.
684. The method claimed in claim 682 and wherein said providing comprises generating said beam, said beam including at least one pulsed laser beam, using at least one pulsed laser.
685. The method claimed in claim 684 and wherein said at least one pulsed laser is a Q-switched laser.
686. The method claimed in claim 682 and wherein said providing comprises generating said beam using a Q-switched laser.
687. The method claimed in claim 682 and wherein said outputting comprises:
outputting a selectable number of sub-beams.
688. The method claimed in claim 682 and wherein said different angles comprise selectable angles.
689. The method claimed in claim 687 and wherein said different angles comprise selectable angles.
690. The method claimed in claim 689 and also comprising:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
691. The method claimed in claim 690 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable number of sub-beams.
692. The method claimed in claim 691 and wherein said generating an acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
693. The method claimed in claim 692 and also comprising:
determining a corresponding spatially distinct direction of a corresponding sub-beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
694. The method claimed in claim 692 and also comprising:
determining the number of corresponding sub-beams from the number of said spatially distinct acoustic wave segments.
695. The method claimed in claim 683 and wherein said outputting comprises:
generating a selectable number of sub-beams;
and the method also comprises:
changing at least one of the number and direction of said sub-beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
696. The method claimed in claim 683 and also comprising:
changing the direction of said sub-beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
697. The method claimed in claim 695 and also comprising:
changing the direction of said sub-beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
698. The method claimed in claim 684 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
699. The method claimed in claim 697 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
700. The method claimed in claim 698 and wherein said at least one actuator comprises a piezoelectric device.
701. The method claimed in claim 698 and wherein said at least one actuator comprises a MEMs device.
702. The method claimed in claim 687 and wherein said outputting comprises:
outputting a selectable number of sub-beams all lying in a plane.
703. The method claimed in claim 682 and also comprising:
deflecting said plurality of beams, an array of fixed deflectors.
704. The method claimed in claim 682 and also comprising:
removing a portion of a substrate at specific locations.
705. A method for micro-machining a substrate, comprising:
providing a laser beam to a beam splitter device;
splitting said laser beam into a first number of output beams and directing said first number of output beams to form at least one opening in a first layer of a multi-layered substrate; and then
splitting said laser beam into a second number of output beams and directing ones of said second number of output beams to remove selected portions of a second layer of said multi-layered substrate via said at least one opening.
706. The method claimed in claim 705 and wherein said providing comprises generating said laser beam using a Q-switched laser.
707. The method claimed in claim 705 and wherein said splitting said laser beam into a first number of output beams comprises:
splitting said laser beam into a selectable first number of output beams.
708. The method claimed in claim 705 and wherein said splitting said laser beam into a second number of output beams comprises:
splitting said laser beam into a selectable second number of output beams.
709. The method claimed in claim 705 and wherein said directing said first number of output beams comprises:
directing each of said first number of output beams in a selectable direction.
710. The method claimed in claim 705 and wherein said directing ones of said second number of output beams comprises:
directing ones of said second number of output beams in a selectable direction.
711. The method claimed in claim 707 and wherein said directing said first number of output beams comprises:
directing each of said first number of output beams in a selectable direction.
712. The method claimed in claim 708 and wherein said directing ones of said second number of output beams comprises:
directing ones of said second number of output beams in a selectable direction.
713. The method claimed in claim 711 and also comprising:
providing an acousto-optical deflector; and
controlling said acousto-optical deflector.
714. The method claimed in claim 713 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable first number of output beams.
715. The method claimed in claim 713 and wherein said controlling comprises:
generating an acoustic wave; and
determining said selectable directions of said first number of output beams.
716. The method claimed in claim 714 and wherein said controlling also comprises:
determining said selectable directions of said first number of output beams.
717. The method claimed in claim 716 and wherein said generating an acoustic wave comprises:
generating a plurality of spatially distinct acoustic wave segments; and
defining each spatially distinct acoustic wave segment by a portion of a control signal having a distinct frequency.
718. The method claimed in claim 717 and also comprising:
determining a corresponding spatially distinct direction of a corresponding output beam from said each spatially distinct acoustic wave segment,
said distinct direction being a function of the frequency of the portion of the control signal corresponding to said acoustic wave segment.
719. The method claimed in claim 717 and also comprising:
determining the number of corresponding output beams from the number of said spatially distinct acoustic wave segments.
720. The method claimed in claim 705 and wherein:
said first number of output beams comprises a selectable number of output beams;
said second number of output beams comprises a selectable number of output beams;
and the method also comprises:
changing at least one of the number and direction of said output beams within a reconfiguration time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is greater than said reconfiguration time duration.
721. The method claimed in claim 705 and also comprising:
changing the direction of said first number of output beams within a redirection time duration;
changing the direction of said second number of output beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
722. The method claimed in claim 720 and also comprising:
changing the direction of said first number of output beams within a redirection time duration;
changing the direction of said second number of output beams within a redirection time duration; and
separating said pulses of radiant energy from each other in time by a time separation which is less than said redirection time duration.
723. The method claimed in claim 705 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
724. The method claimed in claim 722 and also comprising:
providing a plurality of reflectors, each mounted on at least one selectably tilting actuator.
725. The method claimed in claim 723 and wherein said at least one actuator comprises a piezoelectric device.
726. The method claimed in claim 723 and wherein said at least one actuator comprises a MEMs device.
727. The method claimed in claim 707 and wherein said selectable number of first output beams all lie in a plane.
728. The method claimed in claim 708 and wherein said selectable number of second output beams all lie in a plane.
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US10/265,425 US20030047546A1 (en) | 2001-06-13 | 2002-10-07 | Laser energy delivery system employing a beam splitter outputting a selectable number of sub-beams |
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US10/265,420 Expired - Fee Related US7633036B2 (en) | 2001-06-13 | 2002-10-07 | Micro-machining system employing a two stage beam steering mechanism |
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US10/265,335 Expired - Lifetime US6809290B2 (en) | 2001-06-13 | 2002-10-07 | Laser energy delivery system outputting beams having a selectable energy |
US10/652,688 Expired - Lifetime US7629555B2 (en) | 2001-06-13 | 2003-09-02 | Multiple beam micro-machining system and method |
US11/276,356 Abandoned US20060146395A1 (en) | 2001-06-13 | 2006-02-24 | Micro-machining system employing a two stage beam steering mechanism |
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US10/265,420 Expired - Fee Related US7633036B2 (en) | 2001-06-13 | 2002-10-07 | Micro-machining system employing a two stage beam steering mechanism |
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US11/276,356 Abandoned US20060146395A1 (en) | 2001-06-13 | 2006-02-24 | Micro-machining system employing a two stage beam steering mechanism |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10339472A1 (en) * | 2003-08-27 | 2005-03-24 | Ralph Schmid | Process and facility to label data media has mirror matrix deflecting the laser beam |
US20130193618A1 (en) * | 2009-12-30 | 2013-08-01 | Resonetics Llc | Laser Machining System and Method for Machining Three-Dimensional Objects from a Plurality of Directions |
US20130286390A1 (en) * | 2012-04-30 | 2013-10-31 | Agilent Technologies, Inc. | Optical emission system including dichroic beam combiner |
US20150029490A1 (en) * | 2013-07-25 | 2015-01-29 | Funai Electric Co., Ltd. | Laser scanning device |
WO2020178813A1 (en) * | 2019-03-06 | 2020-09-10 | Orbotech Ltd. | High-speed dynamic beam shaping |
Families Citing this family (87)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7723642B2 (en) | 1999-12-28 | 2010-05-25 | Gsi Group Corporation | Laser-based system for memory link processing with picosecond lasers |
US7838794B2 (en) | 1999-12-28 | 2010-11-23 | Gsi Group Corporation | Laser-based method and system for removing one or more target link structures |
US20030222324A1 (en) * | 2000-01-10 | 2003-12-04 | Yunlong Sun | Laser systems for passivation or link processing with a set of laser pulses |
US7671295B2 (en) * | 2000-01-10 | 2010-03-02 | Electro Scientific Industries, Inc. | Processing a memory link with a set of at least two laser pulses |
US20060141681A1 (en) * | 2000-01-10 | 2006-06-29 | Yunlong Sun | Processing a memory link with a set of at least two laser pulses |
US20070173075A1 (en) * | 2001-03-29 | 2007-07-26 | Joohan Lee | Laser-based method and system for processing a multi-material device having conductive link structures |
US6639177B2 (en) * | 2001-03-29 | 2003-10-28 | Gsi Lumonics Corporation | Method and system for processing one or more microstructures of a multi-material device |
WO2002101888A2 (en) * | 2001-06-13 | 2002-12-19 | Orbotech Ltd. | Multi-beam micro-machining system and method |
TW529172B (en) | 2001-07-24 | 2003-04-21 | Asml Netherlands Bv | Imaging apparatus |
EP1280007B1 (en) * | 2001-07-24 | 2008-06-18 | ASML Netherlands B.V. | Imaging apparatus |
US6909730B2 (en) * | 2002-03-19 | 2005-06-21 | Lightwave Electronics Corporation | Phase-locked loop control of passively Q-switched lasers |
US6951995B2 (en) | 2002-03-27 | 2005-10-04 | Gsi Lumonics Corp. | Method and system for high-speed, precise micromachining an array of devices |
US7563695B2 (en) | 2002-03-27 | 2009-07-21 | Gsi Group Corporation | Method and system for high-speed precise laser trimming and scan lens for use therein |
KR20030095313A (en) * | 2002-06-07 | 2003-12-18 | 후지 샤신 필름 가부시기가이샤 | Laser annealer and laser thin-film forming apparatus |
TWI246238B (en) * | 2002-10-28 | 2005-12-21 | Orbotech Ltd | Selectable area laser assisted processing of substrates |
JP2004259153A (en) * | 2003-02-27 | 2004-09-16 | Canon Inc | Information processor, method of controlling the same, and control program |
US6784400B1 (en) * | 2003-03-03 | 2004-08-31 | Paul S. Banks | Method of short pulse hole drilling without a resultant pilot hole and backwall damage |
DE10317363B3 (en) * | 2003-04-15 | 2004-08-26 | Siemens Ag | Laser-powered hole boring machine for manufacture of substrates for electrical switching circuits has scanning system with oscillating mirrors and focusing lens |
US6873398B2 (en) * | 2003-05-21 | 2005-03-29 | Esko-Graphics A/S | Method and apparatus for multi-track imaging using single-mode beams and diffraction-limited optics |
US7521651B2 (en) * | 2003-09-12 | 2009-04-21 | Orbotech Ltd | Multiple beam micro-machining system and method |
WO2005037478A2 (en) * | 2003-10-17 | 2005-04-28 | Gsi Lumonics Corporation | Flexible scan field |
JP2005144487A (en) * | 2003-11-13 | 2005-06-09 | Seiko Epson Corp | Laser beam machining device and laser beam machining method |
DE10360640B4 (en) * | 2003-12-23 | 2016-02-18 | Jochen Strenkert | Device having a unit for actuating an adjustable drive unit of a motor vehicle |
US7885311B2 (en) * | 2007-03-27 | 2011-02-08 | Imra America, Inc. | Beam stabilized fiber laser |
US20060000811A1 (en) * | 2004-06-30 | 2006-01-05 | Matsushita Electric Industrial Co., Ltd. | Diffractive optical element changer for versatile use in laser manufacturing |
US7525654B2 (en) * | 2004-10-20 | 2009-04-28 | Duquesne University Of The Holy Spirit | Tunable laser-based chemical imaging system |
US20060191884A1 (en) * | 2005-01-21 | 2006-08-31 | Johnson Shepard D | High-speed, precise, laser-based material processing method and system |
US7391794B2 (en) * | 2005-05-25 | 2008-06-24 | Jds Uniphase Corporation | Injection seeding of frequency-converted Q-switched laser |
JP5030512B2 (en) * | 2005-09-30 | 2012-09-19 | 日立ビアメカニクス株式会社 | Laser processing method |
US7385768B2 (en) * | 2005-11-22 | 2008-06-10 | D + S Consulting, Inc. | System, method and device for rapid, high precision, large angle beam steering |
US7945087B2 (en) * | 2006-06-26 | 2011-05-17 | Orbotech Ltd. | Alignment of printed circuit board targets |
US8084706B2 (en) * | 2006-07-20 | 2011-12-27 | Gsi Group Corporation | System and method for laser processing at non-constant velocities |
JP4917382B2 (en) * | 2006-08-09 | 2012-04-18 | 株式会社ディスコ | Laser beam irradiation device and laser processing machine |
KR100791005B1 (en) * | 2006-12-01 | 2008-01-04 | 삼성전자주식회사 | Equipment and method for transmittance measurement of photomask under off axis illumination |
JP2008212999A (en) * | 2007-03-06 | 2008-09-18 | Disco Abrasive Syst Ltd | Laser beam machining apparatus |
US7897924B2 (en) * | 2007-04-12 | 2011-03-01 | Imra America, Inc. | Beam scanning imaging method and apparatus |
DE102007024700A1 (en) * | 2007-05-25 | 2008-12-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Method for processing materials with laser radiation and apparatus for carrying out the method |
JP4880561B2 (en) * | 2007-10-03 | 2012-02-22 | 新光電気工業株式会社 | Flip chip mounting device |
JP5259154B2 (en) | 2007-10-24 | 2013-08-07 | オリンパス株式会社 | Scanning laser microscope |
US9123114B2 (en) * | 2007-12-06 | 2015-09-01 | The United States Of America As Represented By The Secretary Of The Army | System and processor implemented method for improved image quality and enhancement based on quantum properties |
JP5659020B2 (en) * | 2008-01-10 | 2015-01-28 | オルボテック リミテッド | Multiple beam drilling system |
JP5274085B2 (en) * | 2008-04-09 | 2013-08-28 | 株式会社アルバック | Laser processing apparatus, laser beam pitch variable method, and laser processing method |
DE102008022014B3 (en) * | 2008-05-02 | 2009-11-26 | Trumpf Laser- Und Systemtechnik Gmbh | Dynamic beam deflection of a laser beam |
EP2294240B1 (en) * | 2008-06-19 | 2017-03-08 | Utilight Ltd. | Light induced patterning |
CN102245339B (en) * | 2008-10-10 | 2015-08-26 | Ipg微系统有限公司 | There is laser-processing system and the method for multiple narrow laser beam transmission system |
US8652872B2 (en) * | 2008-10-12 | 2014-02-18 | Utilight Ltd. | Solar cells and method of manufacturing thereof |
US8680430B2 (en) * | 2008-12-08 | 2014-03-25 | Electro Scientific Industries, Inc. | Controlling dynamic and thermal loads on laser beam positioning system to achieve high-throughput laser processing of workpiece features |
WO2011016176A1 (en) * | 2009-08-03 | 2011-02-10 | 東芝機械株式会社 | Pulse laser machining apparatus and pulse laser machining method |
KR100958745B1 (en) * | 2009-11-30 | 2010-05-19 | 방형배 | Laser scribing apparatus, method, and laser scribing head |
US9035673B2 (en) | 2010-01-25 | 2015-05-19 | Palo Alto Research Center Incorporated | Method of in-process intralayer yield detection, interlayer shunt detection and correction |
US20120102907A1 (en) | 2010-10-28 | 2012-05-03 | Dole Fresh Vegetables, Inc. | Mechanical Produce Harvester |
US10081075B2 (en) * | 2011-01-05 | 2018-09-25 | Yuki Engineering System Co. Ltd. | Beam processor |
US8312701B1 (en) | 2011-06-10 | 2012-11-20 | Dole Fresh Vegetables, Inc. | Decoring mechanism with mechanized harvester |
US9434025B2 (en) | 2011-07-19 | 2016-09-06 | Pratt & Whitney Canada Corp. | Laser drilling methods of shallow-angled holes |
US20130020291A1 (en) * | 2011-07-19 | 2013-01-24 | Pratt & Whitney Canada Corp. | Laser drilling methods of shallow-angled holes |
EP2564976B1 (en) | 2011-09-05 | 2015-06-10 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Marking apparatus with at least one gas laser and heat dissipator |
ES2438751T3 (en) | 2011-09-05 | 2014-01-20 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Device and procedure for marking an object by means of a laser beam |
ES2530070T3 (en) * | 2011-09-05 | 2015-02-26 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Marking apparatus with a plurality of individually adjustable lasers and sets of deflection means |
DK2565996T3 (en) | 2011-09-05 | 2014-01-13 | Alltec Angewandte Laserlicht Technologie Gmbh | Laser device with a laser unit and a fluid container for a cooling device of the laser unit |
DK2564973T3 (en) * | 2011-09-05 | 2015-01-12 | Alltec Angewandte Laserlicht Technologie Ges Mit Beschränkter Haftung | Marking apparatus having a plurality of lasers and a kombineringsafbøjningsindretning |
EP2564972B1 (en) * | 2011-09-05 | 2015-08-26 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Marking apparatus with a plurality of lasers, deflection means and telescopic means for each laser beam |
EP2565994B1 (en) | 2011-09-05 | 2014-02-12 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Laser device and method for marking an object |
EP2564974B1 (en) * | 2011-09-05 | 2015-06-17 | ALLTEC Angewandte Laserlicht Technologie Gesellschaft mit beschränkter Haftung | Marking apparatus with a plurality of gas lasers with resonator tubes and individually adjustable deflection means |
CN104105994B (en) | 2011-12-22 | 2017-04-26 | 英特尔公司 | Configuration of acousto-optic deflectors for laser beam scanning |
CN103379681B (en) * | 2012-04-28 | 2016-03-30 | 清华大学 | Heating resistance pad |
DE102013206363A1 (en) * | 2013-04-11 | 2014-10-16 | Tesa Scribos Gmbh | scanning device |
US11536956B2 (en) | 2013-11-25 | 2022-12-27 | Preco, Llc | High density galvo housing for use with multiple laser beams |
US10239155B1 (en) * | 2014-04-30 | 2019-03-26 | The Boeing Company | Multiple laser beam processing |
US9269149B2 (en) | 2014-05-08 | 2016-02-23 | Orbotech Ltd. | Calibration of a direct-imaging system |
CN106537899B (en) | 2014-05-15 | 2022-01-18 | Mtt创新公司 | Optimizing drive schemes for multi-projector systems |
US20150343560A1 (en) * | 2014-06-02 | 2015-12-03 | Fracturelab, Llc | Apparatus and method for controlled laser heating |
CA2956844A1 (en) | 2014-08-14 | 2016-02-18 | Mtt Innovation Incorporated | Multiple-laser light source |
HUE044462T2 (en) * | 2014-10-15 | 2019-10-28 | Inst Nat Sante Rech Med | Method for determining the characteristics of a system for generating a spatial light modulation in phase and amplitude at high refresh rate |
US9855626B2 (en) * | 2015-01-29 | 2018-01-02 | Rohr, Inc. | Forming a pattern of apertures in an object with a plurality of laser beams |
KR101586219B1 (en) * | 2015-07-02 | 2016-01-19 | 대륭포장산업 주식회사 | Apparatus for producing a breathable film using a UV laser |
JP7148513B2 (en) * | 2016-11-18 | 2022-10-05 | アイピージー フォトニクス コーポレーション | Systems and methods for laser processing of materials |
KR102618163B1 (en) * | 2016-12-05 | 2023-12-27 | 삼성디스플레이 주식회사 | Laser processing apparatus |
MX2020010479A (en) * | 2018-04-10 | 2021-01-20 | Talens Systems S L U | Apparatus and method for processing cardboard. |
TW202042946A (en) * | 2019-01-31 | 2020-12-01 | 美商伊雷克托科學工業股份有限公司 | Laser-processing apparatus, methods of operating the same, and methods of processing workpieces using the same |
CN113874790A (en) | 2019-03-29 | 2021-12-31 | 迈康尼股份公司 | Long sweep length DUV microlithographic beam scanning acousto-optic deflector and optics design |
DE102019115554A1 (en) | 2019-06-07 | 2020-12-10 | Bystronic Laser Ag | Processing device for laser processing of a workpiece and method for laser processing of a workpiece |
DE102020102077B4 (en) | 2020-01-29 | 2022-03-31 | Pulsar Photonics Gmbh | Laser processing device and method for laser processing a workpiece |
BE1027700B1 (en) * | 2020-04-24 | 2021-05-18 | Laser Eng Applications | Device for a laser machining optical system |
DE102020134422A1 (en) * | 2020-12-21 | 2022-06-23 | Trumpf Laser Gmbh | Device for influencing the beam of a laser beam |
FR3121760A1 (en) * | 2021-04-12 | 2022-10-14 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | REFLECTOR DEVICE INTENDED TO EMIT A PLURALITY OF REFLECTED BEAMS FROM A SINGLE MAIN LIGHT BEAM |
TW202319163A (en) * | 2021-09-15 | 2023-05-16 | 南韓商Eo科技股份有限公司 | Apparatus of forming groove |
FR3128140A1 (en) | 2021-10-19 | 2023-04-21 | SteeLEMAT S.à r.l | Hybrid Ultrasonic Non-Destructive Test Device Monolithic Rotating Optical Assembly Laser/Acoustic Electromagnetic Transducers of Matrix Agile Laser Transmitters for Testing Metallurgical Objects |
Citations (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3594081A (en) * | 1968-11-04 | 1971-07-20 | Werner Tschink | Adjustable illuminating device |
US4038108A (en) * | 1976-05-10 | 1977-07-26 | Union Carbide Corporation | Method and apparatus for making an instantaneous thermochemical start |
US4258468A (en) * | 1978-12-14 | 1981-03-31 | Western Electric Company, Inc. | Forming vias through multilayer circuit boards |
US4279472A (en) * | 1977-12-05 | 1981-07-21 | Street Graham S B | Laser scanning apparatus with beam position correction |
US4447291A (en) * | 1983-08-31 | 1984-05-08 | Texas Instruments Incorporated | Method for via formation in HgCdTe |
US4602852A (en) * | 1983-04-23 | 1986-07-29 | International Standard Electric Corporation | Acousto-optic deflector systems |
US4784449A (en) * | 1981-09-29 | 1988-11-15 | Siemens Aktiengesellschaft | High resolution acousto-optical light deflector |
US4833681A (en) * | 1985-12-26 | 1989-05-23 | Yokogawa Electric Corporation | Semiconductor laser wavelength stabilizer |
US4838631A (en) * | 1986-12-22 | 1989-06-13 | General Electric Company | Laser beam directing system |
US4950862A (en) * | 1988-10-12 | 1990-08-21 | Nec Corporation | Laser machining apparatus using focusing lens-array |
US5113055A (en) * | 1989-10-25 | 1992-05-12 | Matsushita Electric Industrial Co., Ltd. | Laser beam optical system and laser beam machining method using the same |
US5404247A (en) * | 1993-08-02 | 1995-04-04 | International Business Machines Corporation | Telecentric and achromatic f-theta scan lens system and method of use |
US5408553A (en) * | 1992-08-26 | 1995-04-18 | The United States Of America As Represented By The United States Department Of Energy | Optical power splitter for splitting high power light |
US5585019A (en) * | 1995-03-10 | 1996-12-17 | Lumonics Inc. | Laser machining of a workpiece through adjacent mask by optical elements creating parallel beams |
US5593606A (en) * | 1994-07-18 | 1997-01-14 | Electro Scientific Industries, Inc. | Ultraviolet laser system and method for forming vias in multi-layered targets |
US5614114A (en) * | 1994-07-18 | 1997-03-25 | Electro Scientific Industries, Inc. | Laser system and method for plating vias |
US5674414A (en) * | 1994-11-11 | 1997-10-07 | Carl-Zeiss Stiftung | Method and apparatus of irradiating a surface of a workpiece with a plurality of beams |
US5676866A (en) * | 1994-01-01 | 1997-10-14 | Carl-Zeiss Stiftung | Apparatus for laser machining with a plurality of beams |
US5690845A (en) * | 1994-10-07 | 1997-11-25 | Sumitomo Electric Industries, Ltd. | Optical device for laser machining |
US5789121A (en) * | 1993-09-08 | 1998-08-04 | International Business Machines Corporation | High density template: materials and processes for the application of conductive pastes |
US5837962A (en) * | 1996-07-15 | 1998-11-17 | Overbeck; James W. | Faster laser marker employing acousto-optic deflection |
US5841099A (en) * | 1994-07-18 | 1998-11-24 | Electro Scientific Industries, Inc. | Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets |
US5896877A (en) * | 1996-11-20 | 1999-04-27 | Sez Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung Ag | Support for wafer-like objects |
US5933216A (en) * | 1997-10-16 | 1999-08-03 | Anvik Corporation | Double-sided patterning system using dual-wavelength output of an excimer laser |
US5948288A (en) * | 1996-05-28 | 1999-09-07 | Komag, Incorporated | Laser disk texturing apparatus |
US5948291A (en) * | 1997-04-29 | 1999-09-07 | General Scanning, Inc. | Laser beam distributor and computer program for controlling the same |
US5969877A (en) * | 1997-11-26 | 1999-10-19 | Xerox Corporation | Dual wavelength F-theta scan lens |
US6011654A (en) * | 1996-09-04 | 2000-01-04 | Carl-Zeiss-Stiftung | Optical arrangement for several individual beams with a segmented mirror field |
US6037968A (en) * | 1993-11-09 | 2000-03-14 | Markem Corporation | Scanned marking of workpieces |
US6037564A (en) * | 1998-03-31 | 2000-03-14 | Matsushita Electric Industrial Co., Ltd. | Method for scanning a beam and an apparatus therefor |
US6040552A (en) * | 1997-01-30 | 2000-03-21 | Jain; Kanti | High-speed drilling system for micro-via pattern formation, and resulting structure |
US6058132A (en) * | 1997-05-15 | 2000-05-02 | Sumitomo Heavy Industries, Ltd. | Laser beam machining apparatus using a plurality of galvanoscanners |
US6172331B1 (en) * | 1997-09-17 | 2001-01-09 | General Electric Company | Method and apparatus for laser drilling |
US6184490B1 (en) * | 1996-04-09 | 2001-02-06 | Carl-Zeiss-Stiftung | Material irradiation apparatus with a beam source that produces a processing beam for a workpiece, and a process for operation thereof |
US6233044B1 (en) * | 1997-01-21 | 2001-05-15 | Steven R. J. Brueck | Methods and apparatus for integrating optical and interferometric lithography to produce complex patterns |
US6252667B1 (en) * | 1998-09-18 | 2001-06-26 | Zygo Corporation | Interferometer having a dynamic beam steering assembly |
US6295171B1 (en) * | 1999-07-09 | 2001-09-25 | Advanced Optical Technologies, Inc. | Piezoelectric light beam deflector |
US20010030176A1 (en) * | 1999-12-07 | 2001-10-18 | Yunlong Sun | Switchable wavelength laser-based etched circuit board processing system |
US6310701B1 (en) * | 1999-10-08 | 2001-10-30 | Nanovia Lp | Method and apparatus for ablating high-density array of vias or indentation in surface of object |
US6313918B1 (en) * | 1998-09-18 | 2001-11-06 | Zygo Corporation | Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion |
US20010045690A1 (en) * | 2000-05-25 | 2001-11-29 | Brandinger Jay J. | Maskless laser beam patterning device and apparatus for ablation of multilayered structures with continuous monitoring of ablation |
US6329634B1 (en) * | 2000-07-17 | 2001-12-11 | Carl-Zeiss-Stiftung | Workpiece irradiation system |
US6376799B1 (en) * | 1993-06-04 | 2002-04-23 | Seiko Epson Corporation | Laser machining apparatus with a rotatable phase grating |
US6420675B1 (en) * | 1999-10-08 | 2002-07-16 | Nanovia, Lp | Control system for ablating high-density array of vias or indentation in surface of object |
US6423935B1 (en) * | 2000-02-18 | 2002-07-23 | The Regents Of The University Of California | Identification marking by means of laser peening |
US6462307B1 (en) * | 1999-07-12 | 2002-10-08 | Mdc Max Datwyler Ag Bleienbach | Process for producing an intensity distribution over a working laser beam and a device for this purpose |
US6462306B1 (en) * | 1999-04-27 | 2002-10-08 | Gsi Lumonics, Inc. | System and method for material processing using multiple laser beams |
US20020166845A1 (en) * | 2001-03-29 | 2002-11-14 | Cordingley James J. | Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure |
US6491361B1 (en) * | 2000-11-09 | 2002-12-10 | Encad, Inc. | Digital media cutter |
US6515257B1 (en) * | 2001-03-26 | 2003-02-04 | Anvik Corporation | High-speed maskless via generation system |
US6521866B1 (en) * | 1999-01-14 | 2003-02-18 | Hitachi Via Mechanics, Ltd. | Laser beam machining and laser beam machine |
US6566627B2 (en) * | 2000-08-11 | 2003-05-20 | Westar Photonics, Inc. | Laser method for shaping of optical lenses |
US6605796B2 (en) * | 2000-05-25 | 2003-08-12 | Westar Photonics | Laser beam shaping device and apparatus for material machining |
US6674564B2 (en) * | 2001-06-15 | 2004-01-06 | Maniabarco, Inc. | System, method and article of manufacture for a beam splitting acousto-optical modulator |
US6800237B1 (en) * | 1999-04-02 | 2004-10-05 | Murata Manufacturing Co., Ltd. | Method for machining ceramic green sheet |
US6972392B2 (en) * | 1995-08-07 | 2005-12-06 | Mitsubishi Denki Kabushiki Kaisha | Laser beam machining method for wiring board, laser beam machining apparatus for wiring board, and carbonic acid gas laser oscillator for machining wiring board |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10A (en) * | 1836-08-10 | Gtttlslto andi | ||
US4060322A (en) * | 1974-07-10 | 1977-11-29 | Canon Kabushiki Kaisha | Image information handling device |
JPS5581095A (en) | 1978-12-12 | 1980-06-18 | Ricoh Co Ltd | Ultra-fine hole processing method |
US4950962A (en) * | 1985-05-20 | 1990-08-21 | Quantum Diagnostics, Ltd. | High voltage switch tube |
JPH01316415A (en) * | 1988-06-17 | 1989-12-21 | Nippon Steel Corp | Laser beam heat treating method using polygon mirror and apparatus thereof |
JPH082511B2 (en) * | 1989-05-08 | 1996-01-17 | 松下電器産業株式会社 | Laser processing equipment |
US5302798A (en) * | 1991-04-01 | 1994-04-12 | Canon Kabushiki Kaisha | Method of forming a hole with a laser and an apparatus for forming a hole with a laser |
US5309178A (en) * | 1992-05-12 | 1994-05-03 | Optrotech Ltd. | Laser marking apparatus including an acoustic modulator |
US5475416A (en) * | 1992-06-03 | 1995-12-12 | Eastman Kodak Company | Printing system for printing an image with lasers emitting diverging laser beams |
US6480334B1 (en) * | 1994-01-18 | 2002-11-12 | Massachusetts Institute Of Technology | Agile beam steering using phased-array-like elements |
EP0683007B1 (en) | 1994-04-14 | 1998-05-20 | Carl Zeiss | Machining device |
JPH08243765A (en) | 1995-03-07 | 1996-09-24 | Komatsu Ltd | Laser marking device |
KR100198832B1 (en) * | 1995-12-28 | 1999-06-15 | 김덕중 | Welder using laser beam |
US5973290A (en) * | 1997-02-26 | 1999-10-26 | W. L. Gore & Associates, Inc. | Laser apparatus having improved via processing rate |
DE19801364A1 (en) | 1998-01-16 | 1999-07-22 | Zeiss Carl Fa | Workpiece irradiation apparatus, e.g. for printed circuit board processing |
JP3324982B2 (en) * | 1998-03-26 | 2002-09-17 | 松下電工株式会社 | Circuit board manufacturing method |
JP2002523905A (en) * | 1998-08-20 | 2002-07-30 | オルボテック リミテッド | Laser repetition rate multiplier |
JP3346374B2 (en) * | 1999-06-23 | 2002-11-18 | 住友電気工業株式会社 | Laser drilling machine |
CN1376100A (en) | 1999-09-28 | 2002-10-23 | 住友重机械工业株式会社 | Laser drilling method and laser drilling device |
JP2001102886A (en) * | 1999-09-30 | 2001-04-13 | Seiko Epson Corp | Method and device for forming electrode for piezoelectric vibrator |
US6386992B1 (en) * | 2000-05-04 | 2002-05-14 | Acushnet Company | Golf ball compositions including microcellular materials and methods for making same |
JP4228552B2 (en) * | 2000-07-04 | 2009-02-25 | 宇部興産株式会社 | Method for purifying 1,5,9-cyclododecatriene epoxidation reaction mixture |
WO2002101888A2 (en) * | 2001-06-13 | 2002-12-19 | Orbotech Ltd. | Multi-beam micro-machining system and method |
JP4777826B2 (en) * | 2006-05-25 | 2011-09-21 | 日本碍子株式会社 | Sheet processing machine |
-
2002
- 2002-06-13 WO PCT/IL2002/000461 patent/WO2002101888A2/en active Application Filing
- 2002-06-13 IL IL15919902A patent/IL159199A0/en unknown
- 2002-06-13 KR KR1020037016348A patent/KR101012913B1/en active IP Right Grant
- 2002-06-13 KR KR1020097018128A patent/KR100992262B1/en active IP Right Grant
- 2002-06-13 KR KR1020097018129A patent/KR100938325B1/en active IP Right Grant
- 2002-06-13 US US10/170,212 patent/US7642484B2/en not_active Expired - Fee Related
- 2002-06-13 AU AU2002311597A patent/AU2002311597A1/en not_active Abandoned
- 2002-06-13 KR KR1020097018127A patent/KR100990300B1/en active IP Right Grant
- 2002-06-13 EP EP02738586A patent/EP1451907A4/en not_active Withdrawn
- 2002-06-13 JP JP2003504516A patent/JP4113495B2/en not_active Expired - Fee Related
- 2002-06-13 CN CN028155564A patent/CN1538893B/en not_active Expired - Lifetime
- 2002-06-21 TW TW91113617A patent/TW574082B/en not_active IP Right Cessation
- 2002-10-07 US US10/265,455 patent/US7176409B2/en not_active Expired - Lifetime
- 2002-10-07 US US10/265,420 patent/US7633036B2/en not_active Expired - Fee Related
- 2002-10-07 US US10/265,425 patent/US20030047546A1/en not_active Abandoned
- 2002-10-07 US US10/265,335 patent/US6809290B2/en not_active Expired - Lifetime
-
2003
- 2003-09-02 US US10/652,688 patent/US7629555B2/en not_active Expired - Lifetime
-
2006
- 2006-02-24 US US11/276,356 patent/US20060146395A1/en not_active Abandoned
-
2008
- 2008-02-20 JP JP2008038177A patent/JP5231039B2/en not_active Expired - Fee Related
Patent Citations (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3594081A (en) * | 1968-11-04 | 1971-07-20 | Werner Tschink | Adjustable illuminating device |
US4038108A (en) * | 1976-05-10 | 1977-07-26 | Union Carbide Corporation | Method and apparatus for making an instantaneous thermochemical start |
US4279472A (en) * | 1977-12-05 | 1981-07-21 | Street Graham S B | Laser scanning apparatus with beam position correction |
US4258468A (en) * | 1978-12-14 | 1981-03-31 | Western Electric Company, Inc. | Forming vias through multilayer circuit boards |
US4784449A (en) * | 1981-09-29 | 1988-11-15 | Siemens Aktiengesellschaft | High resolution acousto-optical light deflector |
US4602852A (en) * | 1983-04-23 | 1986-07-29 | International Standard Electric Corporation | Acousto-optic deflector systems |
US4447291A (en) * | 1983-08-31 | 1984-05-08 | Texas Instruments Incorporated | Method for via formation in HgCdTe |
US4833681A (en) * | 1985-12-26 | 1989-05-23 | Yokogawa Electric Corporation | Semiconductor laser wavelength stabilizer |
US4838631A (en) * | 1986-12-22 | 1989-06-13 | General Electric Company | Laser beam directing system |
US4950862A (en) * | 1988-10-12 | 1990-08-21 | Nec Corporation | Laser machining apparatus using focusing lens-array |
US5113055A (en) * | 1989-10-25 | 1992-05-12 | Matsushita Electric Industrial Co., Ltd. | Laser beam optical system and laser beam machining method using the same |
US5408553A (en) * | 1992-08-26 | 1995-04-18 | The United States Of America As Represented By The United States Department Of Energy | Optical power splitter for splitting high power light |
US6376799B1 (en) * | 1993-06-04 | 2002-04-23 | Seiko Epson Corporation | Laser machining apparatus with a rotatable phase grating |
US5404247A (en) * | 1993-08-02 | 1995-04-04 | International Business Machines Corporation | Telecentric and achromatic f-theta scan lens system and method of use |
US5789121A (en) * | 1993-09-08 | 1998-08-04 | International Business Machines Corporation | High density template: materials and processes for the application of conductive pastes |
US6037968A (en) * | 1993-11-09 | 2000-03-14 | Markem Corporation | Scanned marking of workpieces |
US5676866A (en) * | 1994-01-01 | 1997-10-14 | Carl-Zeiss Stiftung | Apparatus for laser machining with a plurality of beams |
US5841099A (en) * | 1994-07-18 | 1998-11-24 | Electro Scientific Industries, Inc. | Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets |
US5614114A (en) * | 1994-07-18 | 1997-03-25 | Electro Scientific Industries, Inc. | Laser system and method for plating vias |
US5593606A (en) * | 1994-07-18 | 1997-01-14 | Electro Scientific Industries, Inc. | Ultraviolet laser system and method for forming vias in multi-layered targets |
US5690845A (en) * | 1994-10-07 | 1997-11-25 | Sumitomo Electric Industries, Ltd. | Optical device for laser machining |
US5674414A (en) * | 1994-11-11 | 1997-10-07 | Carl-Zeiss Stiftung | Method and apparatus of irradiating a surface of a workpiece with a plurality of beams |
US5585019A (en) * | 1995-03-10 | 1996-12-17 | Lumonics Inc. | Laser machining of a workpiece through adjacent mask by optical elements creating parallel beams |
US6972392B2 (en) * | 1995-08-07 | 2005-12-06 | Mitsubishi Denki Kabushiki Kaisha | Laser beam machining method for wiring board, laser beam machining apparatus for wiring board, and carbonic acid gas laser oscillator for machining wiring board |
US6184490B1 (en) * | 1996-04-09 | 2001-02-06 | Carl-Zeiss-Stiftung | Material irradiation apparatus with a beam source that produces a processing beam for a workpiece, and a process for operation thereof |
US5948288A (en) * | 1996-05-28 | 1999-09-07 | Komag, Incorporated | Laser disk texturing apparatus |
US5837962A (en) * | 1996-07-15 | 1998-11-17 | Overbeck; James W. | Faster laser marker employing acousto-optic deflection |
US6011654A (en) * | 1996-09-04 | 2000-01-04 | Carl-Zeiss-Stiftung | Optical arrangement for several individual beams with a segmented mirror field |
US5896877A (en) * | 1996-11-20 | 1999-04-27 | Sez Semiconductor-Equipment Zubehor Fur Die Halbleiterfertigung Ag | Support for wafer-like objects |
US6233044B1 (en) * | 1997-01-21 | 2001-05-15 | Steven R. J. Brueck | Methods and apparatus for integrating optical and interferometric lithography to produce complex patterns |
US6040552A (en) * | 1997-01-30 | 2000-03-21 | Jain; Kanti | High-speed drilling system for micro-via pattern formation, and resulting structure |
US5948291A (en) * | 1997-04-29 | 1999-09-07 | General Scanning, Inc. | Laser beam distributor and computer program for controlling the same |
US6058132A (en) * | 1997-05-15 | 2000-05-02 | Sumitomo Heavy Industries, Ltd. | Laser beam machining apparatus using a plurality of galvanoscanners |
US6172331B1 (en) * | 1997-09-17 | 2001-01-09 | General Electric Company | Method and apparatus for laser drilling |
US5933216A (en) * | 1997-10-16 | 1999-08-03 | Anvik Corporation | Double-sided patterning system using dual-wavelength output of an excimer laser |
US5969877A (en) * | 1997-11-26 | 1999-10-19 | Xerox Corporation | Dual wavelength F-theta scan lens |
US6037564A (en) * | 1998-03-31 | 2000-03-14 | Matsushita Electric Industrial Co., Ltd. | Method for scanning a beam and an apparatus therefor |
US6252667B1 (en) * | 1998-09-18 | 2001-06-26 | Zygo Corporation | Interferometer having a dynamic beam steering assembly |
US6313918B1 (en) * | 1998-09-18 | 2001-11-06 | Zygo Corporation | Single-pass and multi-pass interferometery systems having a dynamic beam-steering assembly for measuring distance, angle, and dispersion |
US6521866B1 (en) * | 1999-01-14 | 2003-02-18 | Hitachi Via Mechanics, Ltd. | Laser beam machining and laser beam machine |
US6800237B1 (en) * | 1999-04-02 | 2004-10-05 | Murata Manufacturing Co., Ltd. | Method for machining ceramic green sheet |
US6462306B1 (en) * | 1999-04-27 | 2002-10-08 | Gsi Lumonics, Inc. | System and method for material processing using multiple laser beams |
US6295171B1 (en) * | 1999-07-09 | 2001-09-25 | Advanced Optical Technologies, Inc. | Piezoelectric light beam deflector |
US6462307B1 (en) * | 1999-07-12 | 2002-10-08 | Mdc Max Datwyler Ag Bleienbach | Process for producing an intensity distribution over a working laser beam and a device for this purpose |
US6420675B1 (en) * | 1999-10-08 | 2002-07-16 | Nanovia, Lp | Control system for ablating high-density array of vias or indentation in surface of object |
US6310701B1 (en) * | 1999-10-08 | 2001-10-30 | Nanovia Lp | Method and apparatus for ablating high-density array of vias or indentation in surface of object |
US20010030176A1 (en) * | 1999-12-07 | 2001-10-18 | Yunlong Sun | Switchable wavelength laser-based etched circuit board processing system |
US6423935B1 (en) * | 2000-02-18 | 2002-07-23 | The Regents Of The University Of California | Identification marking by means of laser peening |
US20010045690A1 (en) * | 2000-05-25 | 2001-11-29 | Brandinger Jay J. | Maskless laser beam patterning device and apparatus for ablation of multilayered structures with continuous monitoring of ablation |
US6605796B2 (en) * | 2000-05-25 | 2003-08-12 | Westar Photonics | Laser beam shaping device and apparatus for material machining |
US6329634B1 (en) * | 2000-07-17 | 2001-12-11 | Carl-Zeiss-Stiftung | Workpiece irradiation system |
US6566627B2 (en) * | 2000-08-11 | 2003-05-20 | Westar Photonics, Inc. | Laser method for shaping of optical lenses |
US6491361B1 (en) * | 2000-11-09 | 2002-12-10 | Encad, Inc. | Digital media cutter |
US6515257B1 (en) * | 2001-03-26 | 2003-02-04 | Anvik Corporation | High-speed maskless via generation system |
US20020166845A1 (en) * | 2001-03-29 | 2002-11-14 | Cordingley James J. | Methods and systems for precisely relatively positioning a waist of a pulsed laser beam and method and system for controlling energy delivered to a target structure |
US6674564B2 (en) * | 2001-06-15 | 2004-01-06 | Maniabarco, Inc. | System, method and article of manufacture for a beam splitting acousto-optical modulator |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10339472A1 (en) * | 2003-08-27 | 2005-03-24 | Ralph Schmid | Process and facility to label data media has mirror matrix deflecting the laser beam |
US20130193618A1 (en) * | 2009-12-30 | 2013-08-01 | Resonetics Llc | Laser Machining System and Method for Machining Three-Dimensional Objects from a Plurality of Directions |
US9132585B2 (en) * | 2009-12-30 | 2015-09-15 | Resonetics, LLC | Laser machining system and method for machining three-dimensional objects from a plurality of directions |
US20130286390A1 (en) * | 2012-04-30 | 2013-10-31 | Agilent Technologies, Inc. | Optical emission system including dichroic beam combiner |
US9279722B2 (en) * | 2012-04-30 | 2016-03-08 | Agilent Technologies, Inc. | Optical emission system including dichroic beam combiner |
US9752933B2 (en) | 2012-04-30 | 2017-09-05 | Agilent Technologies, Inc. | Optical emission system including dichroic beam combiner |
US10401221B2 (en) | 2012-04-30 | 2019-09-03 | Agilent Technologies, Inc. | Optical emission system including dichroic beam combiner |
US20150029490A1 (en) * | 2013-07-25 | 2015-01-29 | Funai Electric Co., Ltd. | Laser scanning device |
WO2020178813A1 (en) * | 2019-03-06 | 2020-09-10 | Orbotech Ltd. | High-speed dynamic beam shaping |
CN113518684A (en) * | 2019-03-06 | 2021-10-19 | 奥宝科技有限公司 | High speed dynamic beam shaping |
Also Published As
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KR20040060853A (en) | 2004-07-06 |
KR20090108652A (en) | 2009-10-15 |
KR20090108651A (en) | 2009-10-15 |
KR100938325B1 (en) | 2010-01-22 |
TW574082B (en) | 2004-02-01 |
US20030042230A1 (en) | 2003-03-06 |
JP4113495B2 (en) | 2008-07-09 |
CN1538893A (en) | 2004-10-20 |
US20040056009A1 (en) | 2004-03-25 |
WO2002101888A2 (en) | 2002-12-19 |
EP1451907A4 (en) | 2007-05-09 |
US7176409B2 (en) | 2007-02-13 |
CN1538893B (en) | 2012-01-04 |
US7642484B2 (en) | 2010-01-05 |
US20060146395A1 (en) | 2006-07-06 |
KR101012913B1 (en) | 2011-02-08 |
JP2004533724A (en) | 2004-11-04 |
EP1451907A2 (en) | 2004-09-01 |
AU2002311597A1 (en) | 2002-12-23 |
US7633036B2 (en) | 2009-12-15 |
US7629555B2 (en) | 2009-12-08 |
US20030024912A1 (en) | 2003-02-06 |
WO2002101888A3 (en) | 2004-05-13 |
KR20090108653A (en) | 2009-10-15 |
JP5231039B2 (en) | 2013-07-10 |
KR100992262B1 (en) | 2010-11-05 |
US20030019854A1 (en) | 2003-01-30 |
US6809290B2 (en) | 2004-10-26 |
KR100990300B1 (en) | 2010-10-26 |
IL159199A0 (en) | 2004-06-01 |
JP2008207247A (en) | 2008-09-11 |
US20030048814A1 (en) | 2003-03-13 |
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