EP1460035A4 - Electrostatic drive mems element, manufacturing method thereof, optical mems element, optical modulation element, glv device, and laser display - Google Patents

Electrostatic drive mems element, manufacturing method thereof, optical mems element, optical modulation element, glv device, and laser display

Info

Publication number
EP1460035A4
EP1460035A4 EP02805882A EP02805882A EP1460035A4 EP 1460035 A4 EP1460035 A4 EP 1460035A4 EP 02805882 A EP02805882 A EP 02805882A EP 02805882 A EP02805882 A EP 02805882A EP 1460035 A4 EP1460035 A4 EP 1460035A4
Authority
EP
European Patent Office
Prior art keywords
optical
mems element
manufacturing
laser display
electrostatic drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02805882A
Other languages
German (de)
French (fr)
Other versions
EP1460035A1 (en
Inventor
Koichi Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Publication of EP1460035A1 publication Critical patent/EP1460035A1/en
Publication of EP1460035A4 publication Critical patent/EP1460035A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/0015—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0161—Controlling physical properties of the material
    • B81C2201/0171—Doping materials
    • B81C2201/0173—Thermo-migration of impurities from a solid, e.g. from a doped deposited layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0109—Bonding an individual cap on the substrate
EP02805882A 2001-12-26 2002-12-16 Electrostatic drive mems element, manufacturing method thereof, optical mems element, optical modulation element, glv device, and laser display Withdrawn EP1460035A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001394880 2001-12-26
JP2001394880A JP3755460B2 (en) 2001-12-26 2001-12-26 Electrostatically driven MEMS element and manufacturing method thereof, optical MEMS element, light modulation element, GLV device, laser display, and MEMS apparatus
PCT/JP2002/013127 WO2003055788A1 (en) 2001-12-26 2002-12-16 Electrostatic drive mems element, manufacturing method thereof, optical mems element, optical modulation element, glv device, and laser display

Publications (2)

Publication Number Publication Date
EP1460035A1 EP1460035A1 (en) 2004-09-22
EP1460035A4 true EP1460035A4 (en) 2009-01-07

Family

ID=19188914

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02805882A Withdrawn EP1460035A4 (en) 2001-12-26 2002-12-16 Electrostatic drive mems element, manufacturing method thereof, optical mems element, optical modulation element, glv device, and laser display

Country Status (6)

Country Link
US (1) US7116462B2 (en)
EP (1) EP1460035A4 (en)
JP (1) JP3755460B2 (en)
KR (1) KR100958441B1 (en)
TW (1) TWI232320B (en)
WO (1) WO2003055788A1 (en)

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JP2004157522A (en) * 2002-10-17 2004-06-03 Sony Corp Image generating device, image display device, image display method, and device for adjusting optical modulation element
KR100519348B1 (en) * 2003-01-27 2005-10-07 엘지전자 주식회사 Laser display Device
TWI251712B (en) * 2003-08-15 2006-03-21 Prime View Int Corp Ltd Interference display plate
TW593127B (en) * 2003-08-18 2004-06-21 Prime View Int Co Ltd Interference display plate and manufacturing method thereof
TW593126B (en) * 2003-09-30 2004-06-21 Prime View Int Co Ltd A structure of a micro electro mechanical system and manufacturing the same
EP1585219A1 (en) 2004-04-06 2005-10-12 Seiko Epson Corporation A micro-flap type nano/micro mechanical device and fabrication method thereof
KR100627139B1 (en) 2004-06-18 2006-09-25 한국전자통신연구원 Micromechanical structures and Method thereof
KR100761476B1 (en) 2004-07-13 2007-09-27 삼성전자주식회사 MEMS RF-switch for using semiconductor
US7184202B2 (en) * 2004-09-27 2007-02-27 Idc, Llc Method and system for packaging a MEMS device
US8124434B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US7573547B2 (en) * 2004-09-27 2009-08-11 Idc, Llc System and method for protecting micro-structure of display array using spacers in gap within display device
US7405924B2 (en) * 2004-09-27 2008-07-29 Idc, Llc System and method for protecting microelectromechanical systems array using structurally reinforced back-plate
US7446926B2 (en) * 2004-09-27 2008-11-04 Idc, Llc System and method of providing a regenerating protective coating in a MEMS device
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US7701631B2 (en) 2004-09-27 2010-04-20 Qualcomm Mems Technologies, Inc. Device having patterned spacers for backplates and method of making the same
KR100640872B1 (en) * 2004-10-06 2006-11-02 엘지전자 주식회사 projection display apparatus
KR100815362B1 (en) 2005-01-05 2008-03-19 삼성전기주식회사 Interdigitate-type diffraction optical modulator
EP1858796B1 (en) * 2005-02-23 2011-01-19 Pixtronix Inc. Methods and apparatus for actuating displays
US8159428B2 (en) 2005-02-23 2012-04-17 Pixtronix, Inc. Display methods and apparatus
US9261694B2 (en) 2005-02-23 2016-02-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8310442B2 (en) 2005-02-23 2012-11-13 Pixtronix, Inc. Circuits for controlling display apparatus
US7999994B2 (en) 2005-02-23 2011-08-16 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
US8519945B2 (en) 2006-01-06 2013-08-27 Pixtronix, Inc. Circuits for controlling display apparatus
US9229222B2 (en) 2005-02-23 2016-01-05 Pixtronix, Inc. Alignment methods in fluid-filled MEMS displays
US9158106B2 (en) 2005-02-23 2015-10-13 Pixtronix, Inc. Display methods and apparatus
US8482496B2 (en) 2006-01-06 2013-07-09 Pixtronix, Inc. Circuits for controlling MEMS display apparatus on a transparent substrate
US20070205969A1 (en) 2005-02-23 2007-09-06 Pixtronix, Incorporated Direct-view MEMS display devices and methods for generating images thereon
US9082353B2 (en) 2010-01-05 2015-07-14 Pixtronix, Inc. Circuits for controlling display apparatus
US7474171B2 (en) * 2005-06-01 2009-01-06 Raytheon Company Method and apparatus for reducing dielectric charging in MEMS structures
US8526096B2 (en) 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
WO2007120887A2 (en) * 2006-04-13 2007-10-25 Qualcomm Mems Technologies, Inc Packaging a mems device using a frame
US8003537B2 (en) * 2006-07-18 2011-08-23 Imec Method for the production of planar structures
JP2008132583A (en) * 2006-10-24 2008-06-12 Seiko Epson Corp Mems device
US8582981B2 (en) * 2007-01-15 2013-11-12 Fujitsu Limited Optical transmitter and control method therefor
US9176318B2 (en) * 2007-05-18 2015-11-03 Pixtronix, Inc. Methods for manufacturing fluid-filled MEMS displays
JP2008216456A (en) * 2007-03-01 2008-09-18 Sanyo Electric Co Ltd Projection type color projector device
US20090122278A1 (en) * 2007-11-13 2009-05-14 Texas Instruments Incorporated Non-specular folding mirror and a system of using the same
KR101458904B1 (en) 2008-01-18 2014-11-07 삼성디스플레이 주식회사 Display device
KR100867667B1 (en) * 2008-04-18 2008-11-10 주식회사 엔아이씨테크 Microstructure and method manufacturing the same
US20090323170A1 (en) * 2008-06-30 2009-12-31 Qualcomm Mems Technologies, Inc. Groove on cover plate or substrate
US8520285B2 (en) 2008-08-04 2013-08-27 Pixtronix, Inc. Methods for manufacturing cold seal fluid-filled display apparatus
US7977635B2 (en) * 2008-08-08 2011-07-12 Oliver Edwards Radiant energy imager using null switching
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
US8023175B2 (en) * 2009-02-06 2011-09-20 The United States Of America As Represented By The Secretary Of The Army Dynamic imaging and/or identification apparatus and method thereof
US8379392B2 (en) * 2009-10-23 2013-02-19 Qualcomm Mems Technologies, Inc. Light-based sealing and device packaging
BR112012019383A2 (en) 2010-02-02 2017-09-12 Pixtronix Inc CIRCUITS TO CONTROL DISPLAY APPARATUS
DE102010012607B4 (en) * 2010-03-24 2012-01-26 Eads Deutschland Gmbh RF MEMS switch
US20130205455A1 (en) * 2012-02-07 2013-08-08 University Of Western Australia System and method of performing atomic force measurements
US9057706B2 (en) 2011-02-25 2015-06-16 University Of Western Australia Optical cantilever based analyte detection
US9835591B2 (en) 2011-02-25 2017-12-05 Panorama Synergy Ltd Optical cantilever based analysis
JP2013211650A (en) * 2012-03-30 2013-10-10 Seiko Epson Corp Mems vibrator and manufacturing method of mems vibrator
US9134552B2 (en) 2013-03-13 2015-09-15 Pixtronix, Inc. Display apparatus with narrow gap electrostatic actuators
KR102065107B1 (en) 2013-05-20 2020-02-12 삼성디스플레이 주식회사 Maskless exposure device
US9162868B2 (en) * 2013-11-27 2015-10-20 Infineon Technologies Ag MEMS device
EP3153851A1 (en) 2015-10-06 2017-04-12 Carrier Corporation Mems die with sensing structures
US10209510B2 (en) * 2017-03-09 2019-02-19 Microvision, Inc. Compact modular scanners for scanning laser devices

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US5818623A (en) * 1995-07-19 1998-10-06 Commissariat A L'energie Atomique Scanning micro-elements for optical systems

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US5028939A (en) * 1988-08-23 1991-07-02 Texas Instruments Incorporated Spatial light modulator system
US5818623A (en) * 1995-07-19 1998-10-06 Commissariat A L'energie Atomique Scanning micro-elements for optical systems

Non-Patent Citations (3)

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GOOSSEN K W: "MEMS-based variable optical interference devices", OPTICAL MEMS, 2000 IEEE/LEOS INTERNATIONAL CONFERENCE ON 21-24 AUGUST 2000, PISCATAWAY, NJ, USA,IEEE, 21 August 2000 (2000-08-21), pages 17 - 18, XP010518517, ISBN: 978-0-7803-6257-4 *
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See also references of WO03055788A1 *

Also Published As

Publication number Publication date
JP3755460B2 (en) 2006-03-15
WO2003055788A1 (en) 2003-07-10
KR20040074908A (en) 2004-08-26
EP1460035A1 (en) 2004-09-22
TW200305737A (en) 2003-11-01
US20040076008A1 (en) 2004-04-22
TWI232320B (en) 2005-05-11
US7116462B2 (en) 2006-10-03
JP2003200394A (en) 2003-07-15
KR100958441B1 (en) 2010-05-18

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