EP0708160A3 - Chemical mechanical polishing slurry for metal layers - Google Patents

Chemical mechanical polishing slurry for metal layers Download PDF

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Publication number
EP0708160A3
EP0708160A3 EP95306994A EP95306994A EP0708160A3 EP 0708160 A3 EP0708160 A3 EP 0708160A3 EP 95306994 A EP95306994 A EP 95306994A EP 95306994 A EP95306994 A EP 95306994A EP 0708160 A3 EP0708160 A3 EP 0708160A3
Authority
EP
European Patent Office
Prior art keywords
mechanical polishing
metal layers
chemical mechanical
polishing slurry
slurry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95306994A
Other languages
German (de)
French (fr)
Other versions
EP0708160B1 (en
EP0708160A2 (en
Inventor
David J Fluch
Cheng-Hung Hung
Michael A Lucarelli
Matthew Neville
Debra Lynn Scherber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CMC Materials Inc
Original Assignee
Cabot Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23241322&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0708160(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Cabot Corp filed Critical Cabot Corp
Publication of EP0708160A2 publication Critical patent/EP0708160A2/en
Publication of EP0708160A3 publication Critical patent/EP0708160A3/en
Application granted granted Critical
Publication of EP0708160B1 publication Critical patent/EP0708160B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F3/00—Brightening metals by chemical means
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1436—Composite particles, e.g. coated particles
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H01L21/3212—Planarisation by chemical mechanical polishing [CMP]

Abstract

A slurry for use in chemical-mechanical polishing of a metal layer comprising high purity fine metal oxide particles uniformly dispersed in a stable aqueous medium. <IMAGE>
EP95306994A 1994-10-06 1995-10-03 Chemical mechanical polishing slurry for metal layers Expired - Lifetime EP0708160B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/319,213 US5527423A (en) 1994-10-06 1994-10-06 Chemical mechanical polishing slurry for metal layers
US319213 1994-10-06

Publications (3)

Publication Number Publication Date
EP0708160A2 EP0708160A2 (en) 1996-04-24
EP0708160A3 true EP0708160A3 (en) 1997-06-11
EP0708160B1 EP0708160B1 (en) 2002-07-17

Family

ID=23241322

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95306994A Expired - Lifetime EP0708160B1 (en) 1994-10-06 1995-10-03 Chemical mechanical polishing slurry for metal layers

Country Status (13)

Country Link
US (1) US5527423A (en)
EP (1) EP0708160B1 (en)
JP (1) JP3377892B2 (en)
KR (1) KR100362141B1 (en)
CN (1) CN1074035C (en)
AT (1) ATE220711T1 (en)
AU (1) AU3549495A (en)
DE (2) DE69527406T2 (en)
ES (1) ES2159495T3 (en)
HK (1) HK1004666A1 (en)
IL (1) IL115454A (en)
MY (1) MY112735A (en)
WO (1) WO1996011082A1 (en)

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