DE69834415D1 - Lichtemittierendes galliumnitridhalbleiterelement mit einer aktiven schicht mit multiplexquantentrogstruktur und halbleiterlaserlichtquellenvorrichtung - Google Patents

Lichtemittierendes galliumnitridhalbleiterelement mit einer aktiven schicht mit multiplexquantentrogstruktur und halbleiterlaserlichtquellenvorrichtung

Info

Publication number
DE69834415D1
DE69834415D1 DE69834415T DE69834415T DE69834415D1 DE 69834415 D1 DE69834415 D1 DE 69834415D1 DE 69834415 T DE69834415 T DE 69834415T DE 69834415 T DE69834415 T DE 69834415T DE 69834415 D1 DE69834415 D1 DE 69834415D1
Authority
DE
Germany
Prior art keywords
active layer
source device
gallium nitride
light source
laser light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69834415T
Other languages
English (en)
Other versions
DE69834415T2 (de
Inventor
Toshiyuki Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP05259697A external-priority patent/JP4365898B2/ja
Priority claimed from JP6572597A external-priority patent/JPH10261838A/ja
Application filed by Sharp Corp filed Critical Sharp Corp
Application granted granted Critical
Publication of DE69834415D1 publication Critical patent/DE69834415D1/de
Publication of DE69834415T2 publication Critical patent/DE69834415T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region
    • H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
    • H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
    • H01L33/06—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/3415—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers containing details related to carrier capture times into wells or barriers
DE69834415T 1997-03-07 1998-02-27 Lichtemittierendes galliumnitridhalbleiterelement mit einer aktiven schicht mit multiplexquantentrogstruktur und halbleiterlaserlichtquellenvorrichtung Expired - Lifetime DE69834415T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP5259697 1997-03-07
JP05259697A JP4365898B2 (ja) 1997-03-07 1997-03-07 窒化ガリウム系半導体レーザ素子、及び半導体レーザ光源装置
JP6572597A JPH10261838A (ja) 1997-03-19 1997-03-19 窒化ガリウム系半導体発光素子及び半導体レーザ光源装置
JP6572597 1997-03-19
PCT/JP1998/000828 WO1998039827A1 (fr) 1997-03-07 1998-02-27 Element electroluminescent semi-conducteur a base de nitrure de gallium muni d'une zone active presentant une structure de multiplexage a puits quantique et un dispostif semi-conducteur a sources de lumiere utilisant le laser

Publications (2)

Publication Number Publication Date
DE69834415D1 true DE69834415D1 (de) 2006-06-08
DE69834415T2 DE69834415T2 (de) 2006-11-16

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
DE69834415T Expired - Lifetime DE69834415T2 (de) 1997-03-07 1998-02-27 Lichtemittierendes galliumnitridhalbleiterelement mit einer aktiven schicht mit multiplexquantentrogstruktur und halbleiterlaserlichtquellenvorrichtung

Country Status (5)

Country Link
US (3) US6377597B1 (de)
EP (1) EP1022825B1 (de)
KR (1) KR100447367B1 (de)
DE (1) DE69834415T2 (de)
WO (1) WO1998039827A1 (de)

Families Citing this family (113)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1022825B1 (de) * 1997-03-07 2006-05-03 Sharp Kabushiki Kaisha Lichtemittierendes galliumnitridhalbleiterelement mit einer aktiven schicht mit multiplexquantentrogstruktur und halbleiterlaserlichtquellenvorrichtung
EP1168539B1 (de) * 1999-03-04 2009-12-16 Nichia Corporation Nitridhalbleiterlaserelement
JP2000286448A (ja) 1999-03-31 2000-10-13 Toyoda Gosei Co Ltd Ｉｉｉ族窒化物系化合物半導体発光素子
DE19955747A1 (de) 1999-11-19 2001-05-23 Osram Opto Semiconductors Gmbh Optische Halbleitervorrichtung mit Mehrfach-Quantentopf-Struktur
JP2001308460A (ja) * 2000-04-27 2001-11-02 Sharp Corp 窒化物半導体レーザ素子とその光ピックアップ装置
US6914922B2 (en) * 2000-07-10 2005-07-05 Sanyo Electric Co., Ltd. Nitride based semiconductor light emitting device and nitride based semiconductor laser device
WO2002013245A1 (en) 2000-08-04 2002-02-14 The Regents Of The University Of California Method of controlling stress in gallium nitride films deposited on substrates
US6649287B2 (en) * 2000-12-14 2003-11-18 Nitronex Corporation Gallium nitride materials and methods
KR100397609B1 (ko) * 2001-02-16 2003-09-13 삼성전기주식회사 캐리어 유입 경로의 폭을 임의로 제어할 수 있는 반도체레이저 다이오드
JP2002261377A (ja) * 2001-02-27 2002-09-13 Hitachi Ltd 光モジュール
US6526083B1 (en) * 2001-10-09 2003-02-25 Xerox Corporation Two section blue laser diode with reduced output power droop
US6970490B2 (en) * 2002-05-10 2005-11-29 The Trustees Of Princeton University Organic light emitting devices based on the formation of an electron-hole plasma
US7485902B2 (en) * 2002-09-18 2009-02-03 Sanyo Electric Co., Ltd. Nitride-based semiconductor light-emitting device
JP4727169B2 (ja) * 2003-08-04 2011-07-20 日本碍子株式会社 エピタキシャル基板、当該エピタキシャル基板の製造方法、当該エピタキシャル基板の反り抑制方法、および当該エピタキシャル基板を用いた半導体積層構造
KR101045202B1 (ko) * 2003-10-17 2011-06-30 삼성전자주식회사 ＩＩＩ-Ｖ 족 ＧａＮ 계 반도체 소자 및 그 제조방법
GB2407700A (en) * 2003-10-28 2005-05-04 Sharp Kk MBE growth of nitride semiconductor lasers
US7138648B2 (en) * 2003-12-17 2006-11-21 Palo Alto Research Center Incorporated Ultraviolet group III-nitride-based quantum well laser diodes
JP3994287B2 (ja) * 2004-07-07 2007-10-17 サンケン電気株式会社 半導体発光素子
JP2006270028A (ja) * 2005-02-25 2006-10-05 Mitsubishi Electric Corp 半導体発光素子
JP2007110090A (ja) 2005-09-13 2007-04-26 Sony Corp ＧａＮ系半導体発光素子、発光装置、画像表示装置、面状光源装置、及び、液晶表示装置組立体
GB2432715A (en) * 2005-11-25 2007-05-30 Sharp Kk Nitride semiconductor light emitting devices
KR101274206B1 (ko) * 2006-02-21 2013-06-14 삼성전자주식회사 리지 구조를 가지는 반도체 레이저 다이오드
JP2008078311A (ja) 2006-09-20 2008-04-03 Toshiba Corp 窒化物系半導体レーザ装置
JP2008235606A (ja) * 2007-03-20 2008-10-02 Sony Corp 半導体発光素子、半導体発光素子の製造方法、バックライト、表示装置、電子機器および発光装置
JP4655103B2 (ja) * 2008-04-14 2011-03-23 ソニー株式会社 ＧａＮ系半導体発光素子、発光素子組立体、発光装置、ＧａＮ系半導体発光素子の駆動方法、及び、画像表示装置
US8847249B2 (en) 2008-06-16 2014-09-30 Soraa, Inc. Solid-state optical device having enhanced indium content in active regions
US8259769B1 (en) 2008-07-14 2012-09-04 Soraa, Inc. Integrated total internal reflectors for high-gain laser diodes with high quality cleaved facets on nonpolar/semipolar GaN substrates
US8805134B1 (en) 2012-02-17 2014-08-12 Soraa Laser Diode, Inc. Methods and apparatus for photonic integration in non-polar and semi-polar oriented wave-guided optical devices
US8143148B1 (en) 2008-07-14 2012-03-27 Soraa, Inc. Self-aligned multi-dielectric-layer lift off process for laser diode stripes
US8673074B2 (en) 2008-07-16 2014-03-18 Ostendo Technologies, Inc. Growth of planar non-polar {1 -1 0 0} M-plane and semi-polar {1 1 -2 2} gallium nitride with hydride vapor phase epitaxy (HVPE)
US8284810B1 (en) 2008-08-04 2012-10-09 Soraa, Inc. Solid state laser device using a selected crystal orientation in non-polar or semi-polar GaN containing materials and methods
US8124996B2 (en) 2008-08-04 2012-02-28 Soraa, Inc. White light devices using non-polar or semipolar gallium containing materials and phosphors
CN101728451B (zh) * 2008-10-21 2013-10-30 展晶科技(深圳)有限公司 半导体光电元件
KR101228983B1 (ko) 2008-11-17 2013-02-04 삼성전자주식회사 질화물 반도체 발광소자
US8422525B1 (en) 2009-03-28 2013-04-16 Soraa, Inc. Optical device structure using miscut GaN substrates for laser applications
US8294179B1 (en) * 2009-04-17 2012-10-23 Soraa, Inc. Optical device structure using GaN substrates and growth structures for laser applications
US8634442B1 (en) 2009-04-13 2014-01-21 Soraa Laser Diode, Inc. Optical device structure using GaN substrates for laser applications
WO2010120819A1 (en) 2009-04-13 2010-10-21 Kaai, Inc. Optical device structure using gan substrates for laser applications
US8254425B1 (en) 2009-04-17 2012-08-28 Soraa, Inc. Optical device structure using GaN substrates and growth structures for laser applications
US8242522B1 (en) 2009-05-12 2012-08-14 Soraa, Inc. Optical device structure using non-polar GaN substrates and growth structures for laser applications in 481 nm
US8837545B2 (en) 2009-04-13 2014-09-16 Soraa Laser Diode, Inc. Optical device structure using GaN substrates and growth structures for laser applications
KR101603777B1 (ko) * 2009-04-16 2016-03-15 삼성전자주식회사 백색 발광 다이오드
US8416825B1 (en) 2009-04-17 2013-04-09 Soraa, Inc. Optical device structure using GaN substrates and growth structure for laser applications
US9250044B1 (en) 2009-05-29 2016-02-02 Soraa Laser Diode, Inc. Gallium and nitrogen containing laser diode dazzling devices and methods of use
US8247887B1 (en) 2009-05-29 2012-08-21 Soraa, Inc. Method and surface morphology of non-polar gallium nitride containing substrates
US8427590B2 (en) 2009-05-29 2013-04-23 Soraa, Inc. Laser based display method and system
US8509275B1 (en) 2009-05-29 2013-08-13 Soraa, Inc. Gallium nitride based laser dazzling device and method
US9800017B1 (en) 2009-05-29 2017-10-24 Soraa Laser Diode, Inc. Laser device and method for a vehicle
JP5233911B2 (ja) * 2009-08-26 2013-07-10 株式会社リコー 電気光学素子
US8314429B1 (en) 2009-09-14 2012-11-20 Soraa, Inc. Multi color active regions for white light emitting diode
US8355418B2 (en) 2009-09-17 2013-01-15 Soraa, Inc. Growth structures and method for forming laser diodes on {20-21} or off cut gallium and nitrogen containing substrates
US8750342B1 (en) 2011-09-09 2014-06-10 Soraa Laser Diode, Inc. Laser diodes with scribe structures
KR101368906B1 (ko) 2009-09-18 2014-02-28 소라, 인코포레이티드 전력 발광 다이오드 및 전류 밀도 작동 방법
US8933644B2 (en) 2009-09-18 2015-01-13 Soraa, Inc. LED lamps with improved quality of light
US9293644B2 (en) 2009-09-18 2016-03-22 Soraa, Inc. Power light emitting diode and method with uniform current density operation
US9583678B2 (en) 2009-09-18 2017-02-28 Soraa, Inc. High-performance LED fabrication
KR20110042560A (ko) * 2009-10-19 2011-04-27 엘지이노텍 주식회사 발광소자, 발광소자 제조방법 및 발광소자 패키지
US8629065B2 (en) * 2009-11-06 2014-01-14 Ostendo Technologies, Inc. Growth of planar non-polar {10-10} M-plane gallium nitride with hydride vapor phase epitaxy (HVPE)
US8905588B2 (en) 2010-02-03 2014-12-09 Sorra, Inc. System and method for providing color light sources in proximity to predetermined wavelength conversion structures
US10147850B1 (en) 2010-02-03 2018-12-04 Soraa, Inc. System and method for providing color light sources in proximity to predetermined wavelength conversion structures
US9927611B2 (en) 2010-03-29 2018-03-27 Soraa Laser Diode, Inc. Wearable laser based display method and system
CN103003961B (zh) 2010-04-30 2015-11-25 波士顿大学理事会 具有能带结构电位波动的高效紫外发光二极管
US8451876B1 (en) 2010-05-17 2013-05-28 Soraa, Inc. Method and system for providing bidirectional light sources with broad spectrum
JP5636773B2 (ja) * 2010-07-06 2014-12-10 ソニー株式会社 半導体レーザ
US8816319B1 (en) 2010-11-05 2014-08-26 Soraa Laser Diode, Inc. Method of strain engineering and related optical device using a gallium and nitrogen containing active region
US9048170B2 (en) 2010-11-09 2015-06-02 Soraa Laser Diode, Inc. Method of fabricating optical devices using laser treatment
US8975615B2 (en) 2010-11-09 2015-03-10 Soraa Laser Diode, Inc. Method of fabricating optical devices using laser treatment of contact regions of gallium and nitrogen containing material
EP2667421A1 (de) 2011-01-21 2013-11-27 Panasonic Corporation Lichtemittierendes halbleiterelement aus einer galliumnitridverbindung und mit besagtem lichtemittierenden element ausgerüstete lichtquelle
US9025635B2 (en) 2011-01-24 2015-05-05 Soraa Laser Diode, Inc. Laser package having multiple emitters configured on a support member
US9595813B2 (en) 2011-01-24 2017-03-14 Soraa Laser Diode, Inc. Laser package having multiple emitters configured on a substrate member
US9318875B1 (en) 2011-01-24 2016-04-19 Soraa Laser Diode, Inc. Color converting element for laser diode
US9093820B1 (en) 2011-01-25 2015-07-28 Soraa Laser Diode, Inc. Method and structure for laser devices using optical blocking regions
US9236530B2 (en) 2011-04-01 2016-01-12 Soraa, Inc. Miscut bulk substrates
US9287684B2 (en) 2011-04-04 2016-03-15 Soraa Laser Diode, Inc. Laser package having multiple emitters with color wheel
JP5996846B2 (ja) 2011-06-30 2016-09-21 シャープ株式会社 窒化物半導体発光素子およびその製造方法
US9646827B1 (en) 2011-08-23 2017-05-09 Soraa, Inc. Method for smoothing surface of a substrate containing gallium and nitrogen
US8971370B1 (en) 2011-10-13 2015-03-03 Soraa Laser Diode, Inc. Laser devices using a semipolar plane
JP5522147B2 (ja) * 2011-11-02 2014-06-18 住友電気工業株式会社 窒化物半導体発光素子、及び、窒化物半導体発光素子の作製方法
US8723189B1 (en) 2012-01-06 2014-05-13 Trustees Of Boston University Ultraviolet light emitting diode structures and methods of manufacturing the same
CN103296047A (zh) * 2012-03-02 2013-09-11 华夏光股份有限公司 发光二极管装置
US9020003B1 (en) 2012-03-14 2015-04-28 Soraa Laser Diode, Inc. Group III-nitride laser diode grown on a semi-polar orientation of gallium and nitrogen containing substrates
US10559939B1 (en) 2012-04-05 2020-02-11 Soraa Laser Diode, Inc. Facet on a gallium and nitrogen containing laser diode
US9800016B1 (en) 2012-04-05 2017-10-24 Soraa Laser Diode, Inc. Facet on a gallium and nitrogen containing laser diode
US9343871B1 (en) 2012-04-05 2016-05-17 Soraa Laser Diode, Inc. Facet on a gallium and nitrogen containing laser diode
US9099843B1 (en) 2012-07-19 2015-08-04 Soraa Laser Diode, Inc. High operating temperature laser diodes
US8971368B1 (en) 2012-08-16 2015-03-03 Soraa Laser Diode, Inc. Laser devices having a gallium and nitrogen containing semipolar surface orientation
US9166372B1 (en) 2013-06-28 2015-10-20 Soraa Laser Diode, Inc. Gallium nitride containing laser device configured on a patterned substrate
US9379525B2 (en) 2014-02-10 2016-06-28 Soraa Laser Diode, Inc. Manufacturable laser diode
US9368939B2 (en) 2013-10-18 2016-06-14 Soraa Laser Diode, Inc. Manufacturable laser diode formed on C-plane gallium and nitrogen material
US9520695B2 (en) 2013-10-18 2016-12-13 Soraa Laser Diode, Inc. Gallium and nitrogen containing laser device having confinement region
US9362715B2 (en) 2014-02-10 2016-06-07 Soraa Laser Diode, Inc Method for manufacturing gallium and nitrogen bearing laser devices with improved usage of substrate material
US9209596B1 (en) 2014-02-07 2015-12-08 Soraa Laser Diode, Inc. Manufacturing a laser diode device from a plurality of gallium and nitrogen containing substrates
US9871350B2 (en) 2014-02-10 2018-01-16 Soraa Laser Diode, Inc. Manufacturable RGB laser diode source
US9520697B2 (en) 2014-02-10 2016-12-13 Soraa Laser Diode, Inc. Manufacturable multi-emitter laser diode
US9564736B1 (en) 2014-06-26 2017-02-07 Soraa Laser Diode, Inc. Epitaxial growth of p-type cladding regions using nitrogen gas for a gallium and nitrogen containing laser diode
US9246311B1 (en) 2014-11-06 2016-01-26 Soraa Laser Diode, Inc. Method of manufacture for an ultraviolet laser diode
US9653642B1 (en) 2014-12-23 2017-05-16 Soraa Laser Diode, Inc. Manufacturable RGB display based on thin film gallium and nitrogen containing light emitting diodes
US9666677B1 (en) 2014-12-23 2017-05-30 Soraa Laser Diode, Inc. Manufacturable thin film gallium and nitrogen containing devices
US9873170B2 (en) * 2015-03-24 2018-01-23 Nichia Corporation Method of manufacturing light emitting element
US11437775B2 (en) 2015-08-19 2022-09-06 Kyocera Sld Laser, Inc. Integrated light source using a laser diode
US10938182B2 (en) 2015-08-19 2021-03-02 Soraa Laser Diode, Inc. Specialized integrated light source using a laser diode
US11437774B2 (en) 2015-08-19 2022-09-06 Kyocera Sld Laser, Inc. High-luminous flux laser-based white light source
US10879673B2 (en) 2015-08-19 2020-12-29 Soraa Laser Diode, Inc. Integrated white light source using a laser diode and a phosphor in a surface mount device package
JP6669144B2 (ja) * 2016-12-16 2020-03-18 日亜化学工業株式会社 発光素子の製造方法
US10505072B2 (en) 2016-12-16 2019-12-10 Nichia Corporation Method for manufacturing light emitting element
CN110494987B (zh) * 2017-04-24 2022-03-01 苏州晶湛半导体有限公司 一种半导体结构和制备半导体结构的方法
CN108511326A (zh) * 2018-05-04 2018-09-07 中山大学 一种化合物半导体材料InGaN及其外延制备方法
US11421843B2 (en) 2018-12-21 2022-08-23 Kyocera Sld Laser, Inc. Fiber-delivered laser-induced dynamic light system
US11239637B2 (en) 2018-12-21 2022-02-01 Kyocera Sld Laser, Inc. Fiber delivered laser induced white light system
US11884202B2 (en) 2019-01-18 2024-01-30 Kyocera Sld Laser, Inc. Laser-based fiber-coupled white light system
US11228158B2 (en) 2019-05-14 2022-01-18 Kyocera Sld Laser, Inc. Manufacturable laser diodes on a large area gallium and nitrogen containing substrate
US10903623B2 (en) 2019-05-14 2021-01-26 Soraa Laser Diode, Inc. Method and structure for manufacturable large area gallium and nitrogen containing substrate
CN111641107B (zh) * 2020-05-29 2021-09-10 南京邮电大学 基于二氧化钛光子晶体的氮化镓基面激光器及制备方法

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59188988A (ja) * 1983-04-11 1984-10-26 Nec Corp 半導体レ−ザおよびその駆動方法
JP2670046B2 (ja) 1987-04-15 1997-10-29 株式会社日立製作所 光電子装置
JP2723921B2 (ja) 1988-09-07 1998-03-09 株式会社日立製作所 半導体レーザ素子
US4961197A (en) 1988-09-07 1990-10-02 Hitachi, Ltd. Semiconductor laser device
JP2679714B2 (ja) * 1988-11-14 1997-11-19 東洋紡績 株式会社 吸着性シートおよび空気浄化用フィルター
DE3840717A1 (de) * 1988-12-02 1990-06-07 Max Planck Gesellschaft Lichtemittierendes bauelement aus verbindungs-halbleiter
JPH02168746A (ja) 1988-12-22 1990-06-28 Toshiba Corp 高周波重畳形発光駆動回路
JPH05102604A (ja) * 1991-10-11 1993-04-23 Fuji Xerox Co Ltd 半導体レーザ装置
DE4214136C2 (de) 1992-04-29 1995-09-21 Daimler Benz Aerospace Ag Zweiachsig messender Sonnensensor
JP2932467B2 (ja) * 1993-03-12 1999-08-09 日亜化学工業株式会社 窒化ガリウム系化合物半導体発光素子
JP3489878B2 (ja) 1993-10-22 2004-01-26 シャープ株式会社 半導体レーザ素子およびその自励発振強度の調整方法
JP3277711B2 (ja) 1994-03-03 2002-04-22 ソニー株式会社 半導体レーザ及びその製造方法
JPH07263798A (ja) 1994-03-25 1995-10-13 Mitsubishi Electric Corp 半導体レーザ，及びその製造方法
JPH0818159A (ja) 1994-04-25 1996-01-19 Hitachi Ltd 半導体レーザ素子及びその作製方法
JPH08111558A (ja) 1994-10-07 1996-04-30 Hitachi Ltd 半導体レーザ素子
JP2780691B2 (ja) 1994-12-02 1998-07-30 日亜化学工業株式会社 窒化物半導体発光素子
US5777350A (en) 1994-12-02 1998-07-07 Nichia Chemical Industries, Ltd. Nitride semiconductor light-emitting device
JP3538275B2 (ja) * 1995-02-23 2004-06-14 日亜化学工業株式会社 窒化物半導体発光素子
JP3505259B2 (ja) 1995-03-27 2004-03-08 三洋電機株式会社 半導体レーザ素子
JP3453916B2 (ja) 1995-04-03 2003-10-06 ソニー株式会社 半導体レーザ
JP3268958B2 (ja) * 1995-05-15 2002-03-25 三洋電機株式会社 半導体レーザ装置
JP2705641B2 (ja) 1995-06-02 1998-01-28 日本電気株式会社 半導体レーザ装置
GB2301708A (en) 1995-06-03 1996-12-11 Sharp Kk Variable coherence light source
JPH09116225A (ja) * 1995-10-20 1997-05-02 Hitachi Ltd 半導体発光素子
JP2877063B2 (ja) * 1995-11-06 1999-03-31 松下電器産業株式会社 半導体発光素子
US5923690A (en) * 1996-01-25 1999-07-13 Matsushita Electric Industrial Co., Ltd. Semiconductor laser device
US5767704A (en) * 1996-08-30 1998-06-16 Larson; Francis Willard High frequency analog switch for use with a laser diode
US6031858A (en) * 1996-09-09 2000-02-29 Kabushiki Kaisha Toshiba Semiconductor laser and method of fabricating same
JP3854693B2 (ja) * 1996-09-30 2006-12-06 キヤノン株式会社 半導体レーザの製造方法
US5838707A (en) * 1996-12-27 1998-11-17 Motorola, Inc. Ultraviolet/visible light emitting vertical cavity surface emitting laser and method of fabrication
EP1022825B1 (de) * 1997-03-07 2006-05-03 Sharp Kabushiki Kaisha Lichtemittierendes galliumnitridhalbleiterelement mit einer aktiven schicht mit multiplexquantentrogstruktur und halbleiterlaserlichtquellenvorrichtung
US5892786A (en) * 1997-03-26 1999-04-06 The United States Of America As Represented By The Secretary Of The Air Force Output control of vertical microcavity light emitting device
US6154477A (en) * 1997-05-13 2000-11-28 Berkeley Research Associates, Inc. On-board laser-triggered multi-layer semiconductor power switch

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KR20000075981A (ko) 2000-12-26
EP1022825A1 (de) 2000-07-26
EP1022825B1 (de) 2006-05-03
US20020085603A1 (en) 2002-07-04
US6956882B2 (en) 2005-10-18
US6377597B1 (en) 2002-04-23
DE69834415T2 (de) 2006-11-16
US20050211971A1 (en) 2005-09-29
EP1022825A4 (de) 2000-07-26
US7183569B2 (en) 2007-02-27
WO1998039827A1 (fr) 1998-09-11

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