DE69829774D1 - Vorrichtung und verfahren zur dampfphasenabscheidung einer beschichtung - Google Patents

Vorrichtung und verfahren zur dampfphasenabscheidung einer beschichtung

Info

Publication number
DE69829774D1
DE69829774D1 DE69829774T DE69829774T DE69829774D1 DE 69829774 D1 DE69829774 D1 DE 69829774D1 DE 69829774 T DE69829774 T DE 69829774T DE 69829774 T DE69829774 T DE 69829774T DE 69829774 D1 DE69829774 D1 DE 69829774D1
Authority
DE
Germany
Prior art keywords
coating
vapor phase
phase deposition
deposition
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69829774T
Other languages
English (en)
Other versions
DE69829774T2 (de
Inventor
S Lyons
I Ruta
J Fleming
E Blette
E Wright
H Tokie
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Application granted granted Critical
Publication of DE69829774D1 publication Critical patent/DE69829774D1/de
Publication of DE69829774T2 publication Critical patent/DE69829774T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/60Deposition of organic layers from vapour phase
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02Spray pistols; Apparatus for discharge
    • B05B7/08Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
    • B05B7/0807Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets
    • B05B7/0861Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets with one single jet constituted by a liquid or a mixture containing a liquid and several gas jets
DE69829774T 1997-12-01 1998-11-12 Vorrichtung und verfahren zur dampfphasenabscheidung einer beschichtung Expired - Lifetime DE69829774T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/980,947 US6045864A (en) 1997-12-01 1997-12-01 Vapor coating method
US980947 1997-12-01
PCT/US1998/024230 WO1999028051A1 (en) 1997-12-01 1998-11-12 Vapor coating apparatus and method

Publications (2)

Publication Number Publication Date
DE69829774D1 true DE69829774D1 (de) 2005-05-19
DE69829774T2 DE69829774T2 (de) 2006-03-09

Family

ID=25527985

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69829774T Expired - Lifetime DE69829774T2 (de) 1997-12-01 1998-11-12 Vorrichtung und verfahren zur dampfphasenabscheidung einer beschichtung

Country Status (6)

Country Link
US (2) US6045864A (de)
EP (1) EP1035927B1 (de)
JP (1) JP4526704B2 (de)
KR (1) KR100571893B1 (de)
DE (1) DE69829774T2 (de)
WO (1) WO1999028051A1 (de)

Families Citing this family (180)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6224948B1 (en) 1997-09-29 2001-05-01 Battelle Memorial Institute Plasma enhanced chemical deposition with low vapor pressure compounds
FR2774013B1 (fr) * 1998-01-23 2000-04-07 Jean Paul Garidel Procede de traitement thermique d'une piece a l'aide d'au moins un liquide de transfert thermique et four a condensation pour sa mise en oeuvre
US6546757B1 (en) * 1998-07-28 2003-04-15 Brown University Research Foundation Liquid spray pyrolysis method for the fabrication of optical fiber preforms, with reactant mixing
WO2000026973A1 (en) 1998-11-02 2000-05-11 Presstek, Inc. Transparent conductive oxides for plastic flat panel displays
US6228436B1 (en) * 1998-12-16 2001-05-08 Battelle Memorial Institute Method of making light emitting polymer composite material
US6207238B1 (en) * 1998-12-16 2001-03-27 Battelle Memorial Institute Plasma enhanced chemical deposition for high and/or low index of refraction polymers
US6228434B1 (en) * 1998-12-16 2001-05-08 Battelle Memorial Institute Method of making a conformal coating of a microtextured surface
US6274204B1 (en) 1998-12-16 2001-08-14 Battelle Memorial Institute Method of making non-linear optical polymer
US6217947B1 (en) 1998-12-16 2001-04-17 Battelle Memorial Institute Plasma enhanced polymer deposition onto fixtures
US6207239B1 (en) 1998-12-16 2001-03-27 Battelle Memorial Institute Plasma enhanced chemical deposition of conjugated polymer
US6268695B1 (en) 1998-12-16 2001-07-31 Battelle Memorial Institute Environmental barrier material for organic light emitting device and method of making
US6503564B1 (en) * 1999-02-26 2003-01-07 3M Innovative Properties Company Method of coating microstructured substrates with polymeric layer(s), allowing preservation of surface feature profile
US6506461B2 (en) * 1999-03-31 2003-01-14 Battelle Memorial Institute Methods for making polyurethanes as thin films
US6358570B1 (en) 1999-03-31 2002-03-19 Battelle Memorial Institute Vacuum deposition and curing of oligomers and resins
US6238734B1 (en) * 1999-07-08 2001-05-29 Air Products And Chemicals, Inc. Liquid precursor mixtures for deposition of multicomponent metal containing materials
US6503561B1 (en) * 1999-07-08 2003-01-07 Air Products And Chemicals, Inc. Liquid precursor mixtures for deposition of multicomponent metal containing materials
US6229640B1 (en) * 1999-08-11 2001-05-08 Adc Telecommunications, Inc. Microelectromechanical optical switch and method of manufacture thereof
US7081277B1 (en) * 1999-10-22 2006-07-25 Fujitsu Limited Magnetic disk drive having a surface coating on a magnetic disk
US20090191342A1 (en) * 1999-10-25 2009-07-30 Vitex Systems, Inc. Method for edge sealing barrier films
US20100330748A1 (en) 1999-10-25 2010-12-30 Xi Chu Method of encapsulating an environmentally sensitive device
US20070196682A1 (en) * 1999-10-25 2007-08-23 Visser Robert J Three dimensional multilayer barrier and method of making
US6866901B2 (en) 1999-10-25 2005-03-15 Vitex Systems, Inc. Method for edge sealing barrier films
US6573652B1 (en) 1999-10-25 2003-06-03 Battelle Memorial Institute Encapsulated display devices
US6623861B2 (en) * 2001-04-16 2003-09-23 Battelle Memorial Institute Multilayer plastic substrates
US6413645B1 (en) 2000-04-20 2002-07-02 Battelle Memorial Institute Ultrabarrier substrates
US6548912B1 (en) 1999-10-25 2003-04-15 Battelle Memorial Institute Semicoductor passivation using barrier coatings
US6492026B1 (en) 2000-04-20 2002-12-10 Battelle Memorial Institute Smoothing and barrier layers on high Tg substrates
DE10057491A1 (de) * 2000-11-20 2002-05-23 Aixtron Ag Vorrichtung und Verfahren zum Zuführen eines in die Gasform gebrachten flüssigen Ausgangsstoffes in einen CVD-Reaktor
DE10058700A1 (de) * 2000-11-25 2002-06-06 Saint Gobain Glasscheibe mit einem metallisch reflektierenden Schichtsystem
US6468595B1 (en) * 2001-02-13 2002-10-22 Sigma Technologies International, Inc. Vaccum deposition of cationic polymer systems
US20090208754A1 (en) * 2001-09-28 2009-08-20 Vitex Systems, Inc. Method for edge sealing barrier films
US7442227B2 (en) * 2001-10-09 2008-10-28 Washington Unniversity Tightly agglomerated non-oxide particles and method for producing the same
US6709514B1 (en) 2001-12-28 2004-03-23 Advanced Cardiovascular Systems, Inc. Rotary coating apparatus for coating implantable medical devices
US7119418B2 (en) * 2001-12-31 2006-10-10 Advanced Technology Materials, Inc. Supercritical fluid-assisted deposition of materials on semiconductor substrates
US7030168B2 (en) * 2001-12-31 2006-04-18 Advanced Technology Materials, Inc. Supercritical fluid-assisted deposition of materials on semiconductor substrates
US7208195B2 (en) * 2002-03-27 2007-04-24 Ener1Group, Inc. Methods and apparatus for deposition of thin films
US8808457B2 (en) 2002-04-15 2014-08-19 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
US8900366B2 (en) * 2002-04-15 2014-12-02 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
US7095009B2 (en) * 2002-05-21 2006-08-22 3M Innovative Properties Company Photopic detector system and filter therefor
US20050041292A1 (en) * 2002-05-21 2005-02-24 Wheatley John A. Visible wavelength detector systems and filters therefor
US6933051B2 (en) 2002-08-17 2005-08-23 3M Innovative Properties Company Flexible electrically conductive film
US6818291B2 (en) * 2002-08-17 2004-11-16 3M Innovative Properties Company Durable transparent EMI shielding film
US7215473B2 (en) 2002-08-17 2007-05-08 3M Innovative Properties Company Enhanced heat mirror films
US6929864B2 (en) * 2002-08-17 2005-08-16 3M Innovative Properties Company Extensible, visible light-transmissive and infrared-reflective film and methods of making and using the film
US7018713B2 (en) * 2003-04-02 2006-03-28 3M Innovative Properties Company Flexible high-temperature ultrabarrier
US7648925B2 (en) 2003-04-11 2010-01-19 Vitex Systems, Inc. Multilayer barrier stacks and methods of making multilayer barrier stacks
US7510913B2 (en) * 2003-04-11 2009-03-31 Vitex Systems, Inc. Method of making an encapsulated plasma sensitive device
US20040202708A1 (en) * 2003-04-14 2004-10-14 3M Innovative Properties Company Transdermal drug delivery device with translucent inorganic barrier layer
JP2004335564A (ja) * 2003-05-01 2004-11-25 Japan Pionics Co Ltd 気化器
US7442412B2 (en) * 2003-05-08 2008-10-28 Texas Instruments Incorporated Hydrophobic coating for oxide surfaces
US7051282B2 (en) * 2003-06-13 2006-05-23 Microsoft Corporation Multi-layer graphical user interface
US20040261707A1 (en) * 2003-06-26 2004-12-30 Venkat Selvamanickam Apparatus for and method of cooling and positioning a translating substrate tape for use with a continuous vapor deposition process
US7758699B2 (en) * 2003-06-26 2010-07-20 Superpower, Inc. Apparatus for and method of continuous HTS tape buffer layer deposition using large scale ion beam assisted deposition
US7052772B2 (en) * 2003-08-14 2006-05-30 3M Innovative Properties Company Material for packaging electronic components
US20050079278A1 (en) * 2003-10-14 2005-04-14 Burrows Paul E. Method and apparatus for coating an organic thin film on a substrate from a fluid source with continuous feed capability
FI115209B (fi) * 2003-12-15 2005-03-31 Waertsilae Finland Oy Järjestely vesialuksessa
JP4787173B2 (ja) * 2003-12-30 2011-10-05 スリーエム イノベイティブ プロパティズ カンパニー 色シフティング再帰反射体およびその製造方法
US7399668B2 (en) * 2004-09-30 2008-07-15 3M Innovative Properties Company Method for making electronic devices having a dielectric layer surface treatment
JP2008518280A (ja) * 2004-10-29 2008-05-29 スリーエム イノベイティブ プロパティズ カンパニー 環状オレフィンコポリマーを組み入れた光学フィルム
US7435353B2 (en) * 2004-12-09 2008-10-14 President And Fellows Of Harvard College Patterning by energetically-stimulated local removal of solid-condensed-gas layers and solid state chemical reactions produced with such layers
US20070014018A1 (en) * 2004-12-30 2007-01-18 Wheatley John A Internal components of optical device comprising hardcoat
US9050615B2 (en) * 2005-04-26 2015-06-09 Bayer Intellectual Property Gmbh Apparatus and method for coating substrates for analyte detection by means of an affinity assay method
US20070020451A1 (en) 2005-07-20 2007-01-25 3M Innovative Properties Company Moisture barrier coatings
US7767498B2 (en) * 2005-08-25 2010-08-03 Vitex Systems, Inc. Encapsulated devices and method of making
US8945684B2 (en) * 2005-11-04 2015-02-03 Essilor International (Compagnie Generale D'optique) Process for coating an article with an anti-fouling surface coating by vacuum evaporation
KR20080080154A (ko) * 2005-12-29 2008-09-02 쓰리엠 이노베이티브 프로퍼티즈 컴파니 코팅 공정을 위한 물질의 분무화 방법
US20070194470A1 (en) * 2006-02-17 2007-08-23 Aviza Technology, Inc. Direct liquid injector device
US20070237897A1 (en) * 2006-03-28 2007-10-11 Erich Thallner Device and method for coating a microstructured and/or nanostructured structural substrate
JP2007260895A (ja) 2006-03-28 2007-10-11 Erich Thallner マイクロ構造および/またはナノ構造の構造基板をコーティングするための装置および方法
EP1840940B8 (de) 2006-03-28 2014-11-26 Thallner, Erich, Dipl.-Ing. Vorrichtung und Verfahren zum Beschichten eines mikro- und/oder nanostrukturierten Struktursubstrats
US20070243258A1 (en) * 2006-04-13 2007-10-18 3M Innovative Properties Company Method and apparatus for forming crosslinked chromonic nanoparticles
US20070285778A1 (en) * 2006-06-13 2007-12-13 Walker Christopher B Optical films comprising high refractive index and antireflective coatings
US20070285779A1 (en) * 2006-06-13 2007-12-13 Walker Christopher B Optical films comprising high refractive index and antireflective coatings
US20080006819A1 (en) * 2006-06-19 2008-01-10 3M Innovative Properties Company Moisture barrier coatings for organic light emitting diode devices
US20080033336A1 (en) * 2006-08-02 2008-02-07 Sangha Jangbir S Specimen collector with dissolvable coating
WO2008079209A1 (en) * 2006-12-19 2008-07-03 Veeco Instruments Inc. Vapor deposition sources and methods
BRPI0721299B1 (pt) * 2006-12-28 2018-07-24 3M Innovative Properties Company. Método para formação de um filme condutivo em um suporte de polímero flexível, filme condutivo e método para a fabricação de um artigo de vitrificação
US8120854B2 (en) * 2006-12-28 2012-02-21 3M Innovative Properties Company Interference films having acrylamide layer and method of making same
EP2118336B1 (de) * 2006-12-29 2017-02-15 3M Innovative Properties Company Verfahren zur härtung von filmen, die metal-alkoxide enthalten
US20100068542A1 (en) * 2006-12-29 2010-03-18 3M Innovative Properties Company Method of making inorganic or inorganic/organic hybrid films
US8084102B2 (en) * 2007-02-06 2011-12-27 Sion Power Corporation Methods for co-flash evaporation of polymerizable monomers and non-polymerizable carrier solvent/salt mixtures/solutions
WO2009041964A1 (en) 2007-09-25 2009-04-02 Entrotech, Inc. Paint replacement films, composites therefrom, and related methods
US9295167B2 (en) 2007-10-30 2016-03-22 Acm Research (Shanghai) Inc. Method to prewet wafer surface
KR101487708B1 (ko) * 2007-10-30 2015-01-29 에이씨엠 리서치 (상하이) 인코포레이티드 전해질 용액으로부터 금속배선 형성을 위해 웨이퍼 표면을 프리웨팅하는 방법 및 장치
EP2212726A1 (de) * 2007-10-30 2010-08-04 3M Innovative Properties Company Optischer mehrfach-stapel-bandpassfilm mit elektromagnetischer störungsabschirmung für optische anzeigefilter
JP2011508062A (ja) * 2007-12-28 2011-03-10 スリーエム イノベイティブ プロパティズ カンパニー 可撓性封入フィルムシステム
KR101550946B1 (ko) * 2007-12-28 2015-09-07 쓰리엠 이노베이티브 프로퍼티즈 컴파니 태양광 조절 및 그 외의 용도의 적외선 반사 필름
US10981371B2 (en) 2008-01-19 2021-04-20 Entrotech, Inc. Protected graphics and related methods
JP5231028B2 (ja) * 2008-01-21 2013-07-10 東京エレクトロン株式会社 塗布液供給装置
US20100300351A1 (en) * 2008-02-29 2010-12-02 Yasui Seiki Co., Ltd. Apparatus for production of composite material sheet
CN102066582B (zh) * 2008-04-16 2015-02-25 丹普罗技术有限公司 用于浸渍物品的方法和设备
US8350451B2 (en) * 2008-06-05 2013-01-08 3M Innovative Properties Company Ultrathin transparent EMI shielding film comprising a polymer basecoat and crosslinked polymer transparent dielectric layer
EP2304069A4 (de) * 2008-06-30 2012-01-04 3M Innovative Properties Co Verfahren zur herstellung von anorganischen barrierefilmen oder anorganisch/organischen hybridbarrierefilmen
US9790318B2 (en) * 2008-09-26 2017-10-17 entrotech, inc Methods for polymerizing films in-situ
US8715804B2 (en) * 2008-10-23 2014-05-06 International Business Machines Corporation Method and device for high density data storage
US20110223434A1 (en) * 2008-11-17 2011-09-15 Roehrig Mark A Gradient composition barrier
EP2379768A4 (de) * 2008-12-18 2013-11-13 Veeco Instr Inc Vakuumabscheidungsquellen mit erhitzten austrittsöffnungen
US9337446B2 (en) * 2008-12-22 2016-05-10 Samsung Display Co., Ltd. Encapsulated RGB OLEDs having enhanced optical output
US9184410B2 (en) * 2008-12-22 2015-11-10 Samsung Display Co., Ltd. Encapsulated white OLEDs having enhanced optical output
US20100167002A1 (en) * 2008-12-30 2010-07-01 Vitex Systems, Inc. Method for encapsulating environmentally sensitive devices
EP2408947A1 (de) * 2009-03-19 2012-01-25 Anthony Herbert Vorrichtung und verfahren zur abscheidung von funktionellen überzügen
US9062369B2 (en) * 2009-03-25 2015-06-23 Veeco Instruments, Inc. Deposition of high vapor pressure materials
US9464179B2 (en) 2009-04-15 2016-10-11 3M Innovative Properties Company Process and apparatus for a nanovoided article
IN2011CN07418A (de) 2009-04-15 2015-08-21 3M Innovative Properties Co
TWI491930B (zh) 2009-04-15 2015-07-11 3M新設資產公司 光學膜
US9291752B2 (en) 2013-08-19 2016-03-22 3M Innovative Properties Company Retroreflecting optical construction
WO2010120468A1 (en) 2009-04-15 2010-10-21 3M Innovative Properties Company Process and apparatus for a nanovoided article
SG178225A1 (en) 2009-08-03 2012-03-29 3M Innovative Properties Co Process for forming optically clear conductive metal or metal alloy thin films and films made therefrom
WO2011062836A1 (en) 2009-11-18 2011-05-26 3M Innovative Properties Company Multi-layer optical films
US20120236528A1 (en) * 2009-12-02 2012-09-20 Le John D Multilayer emi shielding thin film with high rf permeability
US8590338B2 (en) * 2009-12-31 2013-11-26 Samsung Mobile Display Co., Ltd. Evaporator with internal restriction
US8828303B2 (en) 2010-03-31 2014-09-09 Entrotech, Inc. Methods for polymerizing films in-situ using a radiation source
KR101954456B1 (ko) 2010-04-15 2019-03-05 쓰리엠 이노베이티브 프로퍼티즈 캄파니 광학적 활성 영역 및 광학적 불활성 영역을 포함하는 재귀반사성 물품
KR101960149B1 (ko) 2010-04-15 2019-03-19 쓰리엠 이노베이티브 프로퍼티즈 캄파니 광학적 활성 영역 및 광학적 불활성 영역을 포함하는 재귀반사성 물품
US9791604B2 (en) 2010-04-15 2017-10-17 3M Innovative Properties Company Retroreflective articles including optically active areas and optically inactive areas
US8555965B2 (en) * 2010-05-06 2013-10-15 Schlumberger Technology Corporation High frequency surface treatment methods and apparatus to extend downhole tool survivability
WO2012003417A1 (en) 2010-07-02 2012-01-05 3M Innovative Properties Company Barrier assembly with encapsulant and photovoltaic cell
US9254506B2 (en) 2010-07-02 2016-02-09 3M Innovative Properties Company Moisture resistant coating for barrier films
RU2445150C1 (ru) * 2010-08-09 2012-03-20 Государственное образовательное учреждение высшего профессионального образования "Санкт-Петербургский государственный горный институт имени Г.В. Плеханова (технический университет)" Способ очистки от углеводородов парогазовой среды
TW201209219A (en) * 2010-08-16 2012-03-01 Hon Hai Prec Ind Co Ltd Coating apparatus and coating method
WO2012029765A1 (ja) * 2010-09-03 2012-03-08 株式会社アルバック 保護膜形成方法、表面平坦化方法
CN103154319B (zh) 2010-10-06 2016-08-10 3M创新有限公司 具有基于纳米二氧化硅的涂层和阻挡层的抗反射制品
WO2012047422A1 (en) 2010-10-06 2012-04-12 3M Innovative Properties Company Anti-reflective articles with nanosilica-based coatings
DE102011014311A1 (de) * 2011-03-17 2012-09-20 Centrotherm Thermal Solutions Gmbh & Co. Kg Verfahren und Vorrichtung zum Einbringen eines Prozessgases in einem Prozessraum einer Prozesskammer
SG2014007876A (en) 2011-08-04 2014-03-28 3M Innovative Properties Co Edge protected barrier assemblies
KR102040758B1 (ko) 2011-08-05 2019-11-05 쓰리엠 이노베이티브 프로퍼티즈 캄파니 증기 처리 시스템 및 방법
KR101930849B1 (ko) * 2011-12-28 2018-12-20 삼성디스플레이 주식회사 박막 증착 장치 및 그것을 이용한 박막 증착 방법
EP2868767B1 (de) * 2012-06-29 2019-08-07 ULVAC, Inc. Vorrichtung zur bildung organischer dünnschichten
TWI610806B (zh) 2012-08-08 2018-01-11 3M新設資產公司 障壁膜,製造該障壁膜之方法,及包含該障壁膜之物件
BR112015002836A2 (pt) 2012-08-08 2018-04-24 3M Innovative Properties Co dispositivos fotovoltaicos com filme de barreira para encapsulação.
EP2882761B1 (de) 2012-08-08 2017-04-19 3M Innovative Properties Company Harnstoff(multi)-urethan(meth)acrylat-silanzusammensetzungen und artikel damit
US10784455B2 (en) 2012-08-08 2020-09-22 3M Innovative Properties Company Coatings for barrier films and methods of making and using the same
WO2014025570A1 (en) 2012-08-08 2014-02-13 3M Innovative Properties Company Barrier film constructions and methods of making same
US20150294793A1 (en) 2012-11-21 2015-10-15 3M Innovative Properties Company Multilayer film including first and second dielectric layers
CN104937685A (zh) 2012-11-21 2015-09-23 3M创新有限公司 包括第一介电层和第二介电层的多层膜
TW201433580A (zh) 2012-12-20 2014-09-01 3M Innovative Properties Co 具有吸收紫外線基團之共聚物及包含彼等之氟聚合物組合物
WO2014100580A1 (en) 2012-12-20 2014-06-26 3M Innovative Properties Company Fluoropolymer composition including an oligomer having an ultraviolet absorbing group
JP2016519039A (ja) * 2013-03-15 2016-06-30 エヌディーエスユー リサーチ ファウンデーション 直接注入による液状ヒドロロシラン組成物を用いたシリコン含有材料の合成方法
US20150024522A1 (en) * 2013-07-22 2015-01-22 Rohm And Haas Electronic Materials Llc Organometal materials and process
EP3024883A1 (de) 2013-07-24 2016-06-01 3M Innovative Properties Company Konstruktion eines haftbarrierenfilms
FI125920B (en) * 2013-09-09 2016-04-15 Beneq Oy A method of coating a substrate
US9782955B2 (en) 2013-09-24 2017-10-10 3M Innovative Properties Company Transferable transparent conductive patterns and display stack materials
US20160326741A1 (en) 2013-12-19 2016-11-10 3M Innovative Properties Company Barrier films and vacuum insulated panels employing same
US9220294B2 (en) 2014-02-11 2015-12-29 Timothy McCullough Methods and devices using cannabis vapors
US10821240B2 (en) 2014-02-11 2020-11-03 Vapor Cartridge Technology Llc Methods and drug delivery devices using cannabis
US9380813B2 (en) 2014-02-11 2016-07-05 Timothy McCullough Drug delivery system and method
KR101540969B1 (ko) 2014-05-28 2015-08-03 한국원자력연구원 임팩트 구조 개선에 의한 입자회수율 제고장치
WO2015200657A1 (en) 2014-06-25 2015-12-30 3M Innovative Properties Company Copolymers including a triazine group and compositions including them
WO2015200655A1 (en) 2014-06-25 2015-12-30 3M Innovative Properties Company Fluoropolymer composition including at least one oligomer
US11110689B2 (en) 2014-06-25 2021-09-07 3M Innovative Properties Company Pressure sensitive adhesive composition including ultraviolet light-absorbing oligomer
CN105633300B (zh) * 2014-11-07 2018-03-06 罗门哈斯电子材料有限公司 金属有机材料和方法
US20160223269A1 (en) * 2015-02-04 2016-08-04 Outlast Technologies, LLC Thermal management films containing phase change materials
RU2594423C1 (ru) * 2015-05-29 2016-08-20 Общество с ограниченной ответственностью "КОРА Инжиниринг" Установка для дозированной подачи компонентов композитного материала
KR20160147482A (ko) * 2015-06-15 2016-12-23 삼성전자주식회사 가스 혼합부를 갖는 반도체 소자 제조 설비
US10519350B2 (en) 2015-06-25 2019-12-31 3M Innovative Properties Company Copolymer including ultraviolet light-absorbing group and compositions including the same
US20180141080A1 (en) 2015-06-30 2018-05-24 3M Innovative Properties Company Discontinuous coatings and methods of forming the same
CN107922805B (zh) 2015-08-17 2020-09-15 3M创新有限公司 纳米粘土填充的阻挡粘合剂组合物
CN107925010B (zh) 2015-08-17 2020-11-06 3M创新有限公司 阻挡膜构造
WO2017031294A1 (en) 2015-08-19 2017-02-23 3M Innovative Properties Company Composite article including a multilayer barrier assembly and methods of making the same
EP3337847B1 (de) 2015-08-19 2019-07-10 3M Innovative Properties Company Verbundartikel und verfahren zur herstellung davon
US11584113B2 (en) 2015-08-19 2023-02-21 3M Innovative Properties Company Composite article including a multilayer barrier assembly and methods of making the same
CN108698369B (zh) 2016-03-04 2021-03-09 3M创新有限公司 磁性多层片材
CN109075262A (zh) 2016-03-25 2018-12-21 3M创新有限公司 多层阻挡膜
US20190112711A1 (en) 2016-04-01 2019-04-18 3M Innovative Properties Company Roll-To-Roll Atomic Layer Deposition Apparatus and Method
CH712376A1 (de) * 2016-04-19 2017-10-31 Camag Derivatisierungsgerät und -verfahren.
US10894903B2 (en) 2016-06-16 2021-01-19 3M Innovative Properties Company Nanoparticle filled barrier adhesive compositions
WO2017218500A1 (en) 2016-06-16 2017-12-21 3M Innovative Properties Company Nanoparticle filled barrier adhesive compositions
US20190136095A1 (en) 2016-09-20 2019-05-09 Aero Advanced Paint Technology, Inc. Paint Film Appliques with Reduced Defects, Articles, and Methods
WO2018080830A1 (en) 2016-10-28 2018-05-03 3M Innovative Properties Company Nanostructured article
CN106901460A (zh) * 2017-03-22 2017-06-30 岳西县海创饰品有限公司 一种利用蜡蒸汽冷凝附着的拉链打蜡装置
CN106880135A (zh) * 2017-03-22 2017-06-23 岳西县海创饰品有限公司 一种拉链打蜡设备
US11117358B2 (en) 2017-03-30 2021-09-14 3M Innovative Properties Company Transfer articles
WO2018193392A1 (en) 2017-04-21 2018-10-25 3M Innovative Properties Company Barrier adhesive compositions and articles
WO2019064417A1 (ja) * 2017-09-28 2019-04-04 シャープ株式会社 成膜方法及びそれを用いた表示装置の製造方法
CN109628910B (zh) * 2017-10-07 2023-06-30 株式会社Flosfia 形成膜的方法
WO2019111182A1 (en) 2017-12-06 2019-06-13 3M Innovative Properties Company Barrier adhesive compositions and articles
MX2022003189A (es) 2019-09-16 2022-06-08 Vapor Cartridge Tech Llc Sistema de administración de fármacos con sustratos apilables.
US20240023350A1 (en) 2020-12-09 2024-01-18 3M Innovative Properties Company Barrier assembly for solar cells
EP4341086A1 (de) 2021-05-19 2024-03-27 3M Innovative Properties Company Verpackte schleifartikel
CN117320889A (zh) 2021-05-20 2023-12-29 3M创新有限公司 微切削图案化制品及其制造方法

Family Cites Families (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3379803A (en) * 1964-05-04 1968-04-23 Union Carbide Corp Coating method and apparatus for deposition of polymer-forming vapor under vacuum
US3374111A (en) * 1964-06-30 1968-03-19 Ibm Method for depositing thin dielectric polymer films
GB1168641A (en) * 1966-05-19 1969-10-29 British Iron Steel Research Formation of Polymer Coatings on Substrates.
US3518111A (en) * 1966-12-01 1970-06-30 Gen Electric Photopolymerized film,coating and product,and method of forming
US3665269A (en) * 1969-12-29 1972-05-23 Gen Electric Capacitors having a photopolymerized dielectric film
FR2110622A5 (de) * 1970-10-23 1972-06-02 Commissariat Energie Atomique
CA1071035A (en) * 1975-01-20 1980-02-05 Rudolph J. Angelo Gas-barrier coated films, sheets or foils and method of preparation
US4104438A (en) * 1975-01-20 1978-08-01 E. I. Du Pont De Nemours And Company Gas-barrier coated films, sheets or foils and method of preparation
US4076866A (en) * 1975-03-30 1978-02-28 Massachusetts Institute Of Technology Method of growing films by flash vaporization
US4325986A (en) * 1979-05-29 1982-04-20 University Of Delaware Method for continuous deposition by vacuum evaporation
US4290384A (en) * 1979-10-18 1981-09-22 The Perkin-Elmer Corporation Coating apparatus
JPS57134558A (en) * 1981-02-16 1982-08-19 Fuji Photo Film Co Ltd Production of organic vapor deposited thin film
US4734451A (en) * 1983-09-01 1988-03-29 Battelle Memorial Institute Supercritical fluid molecular spray thin films and fine powders
US4734227A (en) * 1983-09-01 1988-03-29 Battelle Memorial Institute Method of making supercritical fluid molecular spray films, powder and fibers
US5018048A (en) * 1983-12-19 1991-05-21 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making
US4499520A (en) * 1983-12-19 1985-02-12 General Electric Company Capacitor with dielectric comprising poly-functional acrylate polymer and method of making
US5032461A (en) * 1983-12-19 1991-07-16 Spectrum Control, Inc. Method of making a multi-layered article
US4842893A (en) * 1983-12-19 1989-06-27 Spectrum Control, Inc. High speed process for coating substrates
US5097800A (en) * 1983-12-19 1992-03-24 Spectrum Control, Inc. High speed apparatus for forming capacitors
US5125138A (en) * 1983-12-19 1992-06-30 Spectrum Control, Inc. Miniaturized monolithic multi-layer capacitor and apparatus and method for making same
DE3571772D1 (en) * 1984-03-21 1989-08-31 Ulvac Corp Improvements in or relating to the covering of substrates with synthetic resin films
JPS60239921A (ja) * 1984-05-11 1985-11-28 Fujitsu Ltd 磁気記録媒体表面の潤滑膜形成方法
US4722515A (en) * 1984-11-06 1988-02-02 Spectrum Control, Inc. Atomizing device for vaporization
US4682565A (en) * 1984-11-19 1987-07-28 Sfe Technologies Vapor nozzle with gas barrier bars
EP0242460A1 (de) * 1985-01-18 1987-10-28 SPECTRUM CONTROL, INC. (a Pennsylvania corporation) Zerstäuber zum Verdampfen eines Monomers
DE3682130D1 (de) * 1985-07-15 1991-11-28 Japan Res Dev Corp Verfahren zur herstellung von ultrafeinen organischen verbindungen.
JP2543337B2 (ja) * 1985-07-22 1996-10-16 ノ−ドソン株式会社 熱可塑性接着剤の塗布方法
US4675270A (en) * 1986-02-10 1987-06-23 Loctite (Ireland) Limited Imaging method for vapor deposited photoresists of anionically polymerizable monomer
US4954371A (en) * 1986-06-23 1990-09-04 Spectrum Control, Inc. Flash evaporation of monomer fluids
US4771946A (en) * 1986-11-13 1988-09-20 Ashland Oil, Inc. Modified spray guns for vaporous amine-assisted spray coatings and method therefor
IT1199795B (it) * 1986-12-17 1988-12-30 Ausimont Spa Processo per il consolidamento di materiali a struttura discontinua
EP0283311B1 (de) * 1987-03-18 2001-08-01 Kabushiki Kaisha Toshiba Verfahren zur Herstellung von Dünnschichten
US4891249A (en) * 1987-05-26 1990-01-02 Acumeter Laboratories, Inc. Method of and apparatus for somewhat-to-highly viscous fluid spraying for fiber or filament generation, controlled droplet generation, and combinations of fiber and droplet generation, intermittent and continuous, and for air-controlling spray deposition
JPH0829273B2 (ja) * 1988-08-24 1996-03-27 マークテック株式会社 複数のノズルを持つ二流体スプレーガン
US5456945A (en) * 1988-12-27 1995-10-10 Symetrix Corporation Method and apparatus for material deposition
US5316579A (en) * 1988-12-27 1994-05-31 Symetrix Corporation Apparatus for forming a thin film with a mist forming means
DE3921255A1 (de) * 1989-06-29 1991-01-03 Krebsoege Gmbh Sintermetall Verfahren zur erzeugung eines in einem traegergasstrom foerderbaren fluessigkeitsnebels und vorrichtung zur durchfuehrung des verfahrens
US5090985A (en) * 1989-10-17 1992-02-25 Libbey-Owens-Ford Co. Method for preparing vaporized reactants for chemical vapor deposition
JP2992760B2 (ja) * 1990-02-15 1999-12-20 ノードソン株式会社 ノズル孔より流出する液体又は溶融体をその周辺よりの気体噴出流により偏向分配する方法
US5190592A (en) * 1990-05-02 1993-03-02 Commissariat A L'energie Atomique Aerosol injection system for producing composite layers by pyrolysis
JPH05138083A (ja) * 1991-11-15 1993-06-01 Matsushita Electric Ind Co Ltd 液体の微粒化装置
US5229171A (en) * 1991-12-23 1993-07-20 Research Triangle Institute Apparatus and method for uniformly coating a substrate in an evacuable chamber
DE69218152T2 (de) * 1991-12-26 1997-08-28 Canon Kk Herstellungsverfahren einer niedergeschlagenen Schicht mittels CVD, unter Verwendung von flüssigem Rohstoff und dazu geeignete Vorrichtung
JP3222518B2 (ja) * 1991-12-26 2001-10-29 キヤノン株式会社 液体原料気化装置および薄膜形成装置
DE4202652C2 (de) * 1992-01-30 1996-03-28 Fraunhofer Ges Forschung Verfahren zum Aufbringen einer UV- und/oder elektronenstrahlempfindlichen Lackschicht
NL9200415A (nl) * 1992-03-06 1993-10-01 Bronkhorst High Tech Bv Werkwijze voor het omzetten van een vloeistofstroom in een gasstroom, en inrichting voor het uitvoeren van de werkwijze.
US5271957A (en) * 1992-06-18 1993-12-21 Eastman Kodak Company Chemical vapor deposition of niobium and tantalum oxide films
FR2704558B1 (fr) 1993-04-29 1995-06-23 Air Liquide Procede et dispositif pour creer un depot d'oxyde de silicium sur un substrat solide en defilement.
US5440446A (en) * 1993-10-04 1995-08-08 Catalina Coatings, Inc. Acrylate coating material
KR100241470B1 (ko) * 1993-10-04 2000-02-01 지. 쇼 데이비드 커패시터 유전체 및 산소 배리어의 형성에 유용한 가교 결합된 아크릴레이트 코팅 물질
US5630878A (en) * 1994-02-20 1997-05-20 Stec Inc. Liquid material-vaporizing and supplying apparatus
US5492724A (en) * 1994-02-22 1996-02-20 Osram Sylvania Inc. Method for the controlled delivery of vaporized chemical precursor to an LPCVD reactor
US5478014A (en) * 1994-04-20 1995-12-26 Hynds; James E. Method and system for hot air spray coating and atomizing device for use therein
US5776254A (en) * 1994-12-28 1998-07-07 Mitsubishi Denki Kabushiki Kaisha Apparatus for forming thin film by chemical vapor deposition
US5607789A (en) * 1995-01-23 1997-03-04 Duracell Inc. Light transparent multilayer moisture barrier for electrochemical cell tester and cell employing same
US5540959A (en) * 1995-02-21 1996-07-30 Howard J. Greenwald Process for preparing a coated substrate
US5877895A (en) * 1995-03-20 1999-03-02 Catalina Coatings, Inc. Multicolor interference coating
US5653813A (en) * 1995-04-03 1997-08-05 Novellus Systems, Inc. Cyclone evaporator
US5811183A (en) * 1995-04-06 1998-09-22 Shaw; David G. Acrylate polymer release coated sheet materials and method of production thereof
US5681615A (en) * 1995-07-27 1997-10-28 Battelle Memorial Institute Vacuum flash evaporated polymer composites
US5711994A (en) * 1995-12-08 1998-01-27 Kimberly-Clark Worldwide, Inc. Treated nonwoven fabrics
US5958510A (en) * 1996-01-08 1999-09-28 Applied Materials, Inc. Method and apparatus for forming a thin polymer layer on an integrated circuit structure
WO1998055668A1 (en) * 1997-06-02 1998-12-10 Msp Corporation Method and apparatus for vapor generation and film deposition
US5882416A (en) * 1997-06-19 1999-03-16 Advanced Technology Materials, Inc. Liquid delivery system, heater apparatus for liquid delivery system, and vaporizer
US6203898B1 (en) 1997-08-29 2001-03-20 3M Innovatave Properties Company Article comprising a substrate having a silicone coating

Also Published As

Publication number Publication date
EP1035927B1 (de) 2005-04-13
EP1035927A1 (de) 2000-09-20
KR20010032621A (ko) 2001-04-25
KR100571893B1 (ko) 2006-04-18
JP4526704B2 (ja) 2010-08-18
US6045864A (en) 2000-04-04
WO1999028051A1 (en) 1999-06-10
DE69829774T2 (de) 2006-03-09
JP2001524386A (ja) 2001-12-04
US6245150B1 (en) 2001-06-12

Similar Documents

Publication Publication Date Title
DE69829774D1 (de) Vorrichtung und verfahren zur dampfphasenabscheidung einer beschichtung
DE69621750D1 (de) Verfahren und Gerät zur Abscheidung einer Antireflexbeschichtung
DE69636618D1 (de) Verfahren zur behandlung einer substratoberfläche und behandlungsmittel hierfür
DE69618900T2 (de) Verfahren und vorrichtung zur interpolation einer formfreien oberfläche
DE69815951T2 (de) Verfahren und Anlage zur Innenbeschichtung einer Behandlungskammer
DE69707257T2 (de) Vorrichtung und Verfahren zur Heisstauchbeschichtung
DE69829488D1 (de) Verfahren und vorrichtung zur gasphasenbeschichtung komplexer innerer flächen hohler gegenstände
DE69307523T2 (de) Vorrichtung und verfahren zur elektrostatischen sprühbeschichtung
DE794839T1 (de) Verfahren zur beschichtung einer oberfläche
DE69711702D1 (de) Verfahren und vorrichtung zur herstellung einer kohlenstoffreichen beschichtung auf einem beweglichen substrat
DE69510138D1 (de) Verfahren und Vorrichtung zur chemischen Gasphasenabscheidung
DE69633770D1 (de) Verfahren und Vorrichtung zur chemischen Gasphasenabscheidung dünner Schichten
DE69701134T2 (de) Vorrichtung und verfahren zur trocknung einer beschichtigung auf einem substrat
DE69821429D1 (de) Vorrichtung und Verfahren zur Herstellung einer Dünnschicht einer Verbindung
DE69701034T2 (de) Vorrichtung und verfahren zur steuerung des luftüberschusses während der trocknung einer beschichtung auf einem substrat
DE59701990D1 (de) Verfahren und System zur Farbversorgung einer Beschichtungsanlage
DE59702419D1 (de) Verfahren und Vorrichtung zur Sputterbeschichtung
DE69933427D1 (de) Verfahren zur Entfernung einer Wärmedämmschicht
DE69224541D1 (de) Verfahren und Gebrauch einer Vorrichtung zur Dampfphasen-Abscheidung
DE69521786D1 (de) Verfahren und Vorrichtung zur plasma-unterstützten zeilenweisen Dampfabscheidung
DE59609506D1 (de) Verfahren und Vorrichtung zum Umbugen einer Überzugsschicht um eine Kante
DE60010994D1 (de) Verfahren und Vorrichtung zur Herstellung einer Beschichtungsfolie
DE69837043D1 (de) Verfahren zur regelung einer plasmabehandlungsvorrichtung
DE59913460D1 (de) Keramisches schichtsystem und verfahren zur herstellung einer keramischen heizeinrichtung
DE69811800D1 (de) Verfahren zur Ablagerung einer dielektrischen Ta2O5-Schicht

Legal Events

Date Code Title Description
8364 No opposition during term of opposition