DE69817474D1 - Herstellung von sich verjüngenden Wellenleitern(Taper) - Google Patents

Herstellung von sich verjüngenden Wellenleitern(Taper)

Info

Publication number
DE69817474D1
DE69817474D1 DE69817474T DE69817474T DE69817474D1 DE 69817474 D1 DE69817474 D1 DE 69817474D1 DE 69817474 T DE69817474 T DE 69817474T DE 69817474 T DE69817474 T DE 69817474T DE 69817474 D1 DE69817474 D1 DE 69817474D1
Authority
DE
Germany
Prior art keywords
taper
manufacture
tapered waveguides
waveguides
tapered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69817474T
Other languages
English (en)
Other versions
DE69817474T2 (de
Inventor
Giovanni Barbarossa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agere Systems LLC
Original Assignee
Agere Systems Optoelectronics Guardian Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agere Systems Optoelectronics Guardian Corp filed Critical Agere Systems Optoelectronics Guardian Corp
Publication of DE69817474D1 publication Critical patent/DE69817474D1/de
Application granted granted Critical
Publication of DE69817474T2 publication Critical patent/DE69817474T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49016—Antenna or wave energy "plumbing" making
DE69817474T 1997-07-10 1998-06-30 Herstellung von sich verjüngenden Wellenleitern(Taper) Expired - Lifetime DE69817474T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US891439 1997-07-10
US08/891,439 US6003222A (en) 1997-07-10 1997-07-10 Manufacture of tapered waveguides

Publications (2)

Publication Number Publication Date
DE69817474D1 true DE69817474D1 (de) 2003-10-02
DE69817474T2 DE69817474T2 (de) 2004-06-24

Family

ID=25398188

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69817474T Expired - Lifetime DE69817474T2 (de) 1997-07-10 1998-06-30 Herstellung von sich verjüngenden Wellenleitern(Taper)

Country Status (4)

Country Link
US (1) US6003222A (de)
EP (1) EP0890850B1 (de)
JP (1) JP3436691B2 (de)
DE (1) DE69817474T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6849334B2 (en) * 2001-08-17 2005-02-01 Neophotonics Corporation Optical materials and optical devices
US6470117B1 (en) 1998-12-04 2002-10-22 Radiant Photonics, Inc. Compression-molded three-dimensional tapered universal waveguide couplers
GB2346706A (en) * 1999-02-05 2000-08-16 Univ Glasgow Multiple core waveguide
US6269203B1 (en) 1999-03-17 2001-07-31 Radiant Photonics Holographic optical devices for transmission of optical signals
AUPP930799A0 (en) * 1999-03-18 1999-04-15 University Of Sydney, The Optical planar waveguide device and method of its fabrication
US6282337B1 (en) 1999-09-24 2001-08-28 Radiant Photonics, Inc. System and method for wavelength division multiplexing and demultiplexing
GB2355079A (en) * 1999-10-07 2001-04-11 Kymata Ltd Multi-core waveguide
JP3497794B2 (ja) * 2000-02-08 2004-02-16 日本電信電話株式会社 光スポットサイズ変換器の作製方法
US6253015B1 (en) 2000-02-08 2001-06-26 Corning Incorporated Planar waveguides with high refractive index
US7255978B2 (en) * 2000-05-09 2007-08-14 Shipley Company, L.L.C. Multi-level optical structure and method of manufacture
US6976792B1 (en) 2000-09-26 2005-12-20 International Business Machines Corporation Optical fiber space transformation
AU2001296351A1 (en) * 2000-10-06 2002-04-22 Microcoating Technologies, Inc. Optical waveguides and integrated optical subsystems on-a-chip
US7068870B2 (en) * 2000-10-26 2006-06-27 Shipley Company, L.L.C. Variable width waveguide for mode-matching and method for making
JP3712934B2 (ja) * 2000-11-01 2005-11-02 株式会社日立製作所 光導波路部材、その製造方法及び光モジュール
US7251406B2 (en) * 2000-12-14 2007-07-31 Shipley Company, L.L.C. Optical waveguide termination with vertical and horizontal mode shaping
EP1356327B1 (de) * 2000-12-14 2008-04-16 Shipley Company LLC Konverter zur Veränderung der optischen Modengrösse mit vertikaler und horizontaler Modenformung
US7158701B2 (en) * 2001-02-21 2007-01-02 Shipley Company, L.L.C. Method for making optical devices with a moving mask and optical devices made thereby
US6912345B2 (en) * 2001-03-30 2005-06-28 Shipley Company, L.L.C. Tapered optical fiber for coupling to diffused optical waveguides
JP3976514B2 (ja) * 2001-04-05 2007-09-19 日本電気株式会社 光導波路の製造方法
US6775454B2 (en) * 2001-05-14 2004-08-10 Nippon Telegraph And Telephone Corporation Silica-based optical waveguide circuit and fabrication method thereof
US20020191916A1 (en) * 2001-06-15 2002-12-19 Confluent Photonics, Corporation Vertical waveguide tapers for optical coupling between optical fibers and thin silicon waveguides
US6922508B2 (en) * 2001-08-17 2005-07-26 Fujitsu Limited Optical switching apparatus with adiabatic coupling to optical fiber
JP2002156539A (ja) * 2001-09-28 2002-05-31 Nec Corp 光導波路
US6931180B2 (en) * 2004-01-13 2005-08-16 Lucent Technologies Inc. Method and apparatus for compactly coupling an optical fiber and a planar optical waveguide
US20060078258A1 (en) * 2004-10-07 2006-04-13 University Of Toledo Apparatus and method for trimming and tuning coupled photonic waveguides
AT502050B1 (de) * 2006-02-10 2007-01-15 Photeon Technologies Gmbh Verfahren zum herstellen einer lichtkopplungseinrichtung
JP2015084019A (ja) * 2013-10-25 2015-04-30 富士通株式会社 スポットサイズ変換器及び光装置
US10330863B2 (en) 2017-04-18 2019-06-25 Neophotonics Corporation Planar lightwave circuit optical splitter / mixer
CN108383077A (zh) * 2018-02-05 2018-08-10 上海华虹宏力半导体制造有限公司 斜坡状非晶硅薄膜成膜方法
US10731988B1 (en) * 2019-07-10 2020-08-04 Anello Photonics, Inc. System architecture for integrated photonics optical gyroscopes

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4998793A (en) * 1989-11-14 1991-03-12 At&T Bell Laboratories Adiabatic polarization manipulating device
US4932032A (en) * 1989-08-03 1990-06-05 At&T Bell Laboratories Tapered semiconductor waveguides
US5133029A (en) * 1991-06-28 1992-07-21 Bell Communications Research, Inc. Adiabatic polarization splitter
JPH05182948A (ja) * 1992-01-06 1993-07-23 Ricoh Co Ltd 薄膜テーパー構造の形成方法
JPH05188227A (ja) * 1992-01-08 1993-07-30 Sumitomo Electric Ind Ltd 導波路
US5402511A (en) * 1993-06-11 1995-03-28 The United States Of America As Represented By The Secretary Of The Army Method of forming an improved tapered waveguide by selectively irradiating a viscous adhesive resin prepolymer with ultra-violet light
US5473710A (en) * 1993-10-08 1995-12-05 Industrial Technology Research Institute Controlled tapered angle etching process for fabricating optical integrated circuits
US5432877A (en) * 1994-06-03 1995-07-11 Photonic Integration Research, Inc. Integrated optical circuit having a waveguide end of lens geometry, and method for making same
JP2870632B2 (ja) * 1995-07-13 1999-03-17 日本電気株式会社 半導体光集積回路およびその製造方法

Also Published As

Publication number Publication date
EP0890850B1 (de) 2003-08-27
US6003222A (en) 1999-12-21
EP0890850A1 (de) 1999-01-13
JPH1184156A (ja) 1999-03-26
DE69817474T2 (de) 2004-06-24
JP3436691B2 (ja) 2003-08-11

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Legal Events

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8364 No opposition during term of opposition