DE69802367T2 - Plattierungsverfahren - Google Patents

Plattierungsverfahren

Info

Publication number
DE69802367T2
DE69802367T2 DE69802367T DE69802367T DE69802367T2 DE 69802367 T2 DE69802367 T2 DE 69802367T2 DE 69802367 T DE69802367 T DE 69802367T DE 69802367 T DE69802367 T DE 69802367T DE 69802367 T2 DE69802367 T2 DE 69802367T2
Authority
DE
Germany
Prior art keywords
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69802367T
Other languages
English (en)
Other versions
DE69802367D1 (de
Inventor
Ryushin Omasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Techno KK
Original Assignee
Nihon Techno KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Techno KK filed Critical Nihon Techno KK
Application granted granted Critical
Publication of DE69802367D1 publication Critical patent/DE69802367D1/de
Publication of DE69802367T2 publication Critical patent/DE69802367T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/54—Contact plating, i.e. electroless electrochemical plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C23C18/1646—Characteristics of the product obtained
    • C23C18/165—Multilayered product
    • C23C18/1653—Two or more layers with at least one layer obtained by electroless plating and one layer obtained by electroplating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1633—Process of electroless plating
    • C23C18/1655—Process features
    • C23C18/1664—Process features with additional means during the plating process
    • C23C18/1669—Agitation, e.g. air introduction
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/06—Suspending or supporting devices for articles to be coated
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/10—Agitating of electrolytes; Moving of racks
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/003—Electroplating using gases, e.g. pressure influence
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/20—Electroplating using ultrasonics, vibrations
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0085—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor
    • H05K3/0088—Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor for treatment of holes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
    • H05K2203/0292—Using vibration, e.g. during soldering or screen printing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08—Treatments involving gases
    • H05K2203/081—Blowing of gas, e.g. for cooling or for providing heat during solder reflowing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1518—Vertically held PCB
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S205/00—Electrolysis: processes, compositions used therein, and methods of preparing the compositions
    • Y10S205/92—Electrolytic coating of circuit board or printed circuit, other than selected area coating
DE69802367T 1997-10-21 1998-04-28 Plattierungsverfahren Expired - Lifetime DE69802367T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30662997 1997-10-21

Publications (2)

Publication Number Publication Date
DE69802367D1 DE69802367D1 (de) 2001-12-13
DE69802367T2 true DE69802367T2 (de) 2002-05-16

Family

ID=17959398

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69802367T Expired - Lifetime DE69802367T2 (de) 1997-10-21 1998-04-28 Plattierungsverfahren

Country Status (6)

Country Link
US (2) US6261435B1 (de)
EP (1) EP0915182B1 (de)
KR (1) KR100296780B1 (de)
CN (2) CN1089120C (de)
DE (1) DE69802367T2 (de)
HK (2) HK1020202A1 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015004746A1 (de) 2015-04-11 2016-10-13 AUDI Hungaria Verfahren zur erweiterten Beschichtung der Zylinderlaufbahnen von Aluminium-Zylinderkurbelgehäusen
DE102016003891A1 (de) * 2016-03-31 2017-10-05 Boardtek Electronics Corporation Galvanisierungssystem

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* Cited by examiner, † Cited by third party
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GB9906136D0 (en) * 1999-03-18 1999-05-12 Protective Finishing Group Lim Jig cleaning
JP3046594B1 (ja) * 1999-04-02 2000-05-29 日本テクノ株式会社 振動流動攪拌を活用した金属の陽極酸化処理システム
JP2002121699A (ja) * 2000-05-25 2002-04-26 Nippon Techno Kk めっき浴の振動流動とパルス状めっき電流との組み合わせを用いた電気めっき方法
US20030226767A1 (en) * 2000-05-25 2003-12-11 Ryushin Omasa Method and device for continuous electrolytic disposal of waste water
CA2343440A1 (en) * 2000-07-13 2002-01-13 G. Alan Thompson Ultrasonic process for autocatalytic deposition of metal
CA2445717C (en) * 2001-05-02 2010-07-13 Japan Techno Co., Ltd. Hydrogen-oxygen gas generator and hydrogen-oxygen gas generating method thereof
US7338586B2 (en) 2001-06-25 2008-03-04 Japan Techno Co., Ltd. Vibratingly stirring apparatus, and device and method for processing using the stirring apparatus
US7029529B2 (en) * 2002-09-19 2006-04-18 Applied Materials, Inc. Method and apparatus for metallization of large area substrates
KR20040029920A (ko) * 2002-10-04 2004-04-08 홍성태 헤어 롯드 및 그 제조방법
DE10259367A1 (de) * 2002-12-18 2004-07-08 Siemens Ag Verfahren zur Verbesserung der Wechselwirkung zwischen einem Medium und einem Bauteil
US20110146599A1 (en) * 2009-12-18 2011-06-23 Sciban Stanley J Hydrogen generating system
CN102874679B (zh) * 2012-09-18 2015-06-10 纽科伦（新乡）起重机有限公司 振动起升吊具及使用该振动起升吊具的起重机
JP5684431B2 (ja) * 2012-10-05 2015-03-11 古河電気工業株式会社 銀反射膜、光反射部材、および光反射部材の製造方法
KR101278711B1 (ko) * 2013-02-14 2013-06-25 (주)티에스피에스 반도체 웨이퍼 도금 장치 및 이를 이용한 도금 방법
CN103436946A (zh) * 2013-08-01 2013-12-11 黄海 一种自动化电镀系统
CN104953022A (zh) * 2015-05-15 2015-09-30 富通集团（天津）超导技术应用有限公司 超导线材的制备方法
CN106048563A (zh) * 2016-06-08 2016-10-26 柏弥兰金属化研究股份有限公司 可挠性基板的水平连续式化学电镀方法及其设备
CA3049907C (en) * 2017-01-26 2023-02-28 Curium Us Llc Systems and methods for electroplating sources for alpha spectroscopy
IT201600127075A1 (it) * 2017-03-14 2018-09-14 L Gv Lavorazioni Galvaniche Metodo migliorato per la galvanostegia di fori ciechi.
CN107779939A (zh) * 2017-10-24 2018-03-09 江门崇达电路技术有限公司 一种电镀铜缸阳极的清洗方法
TWI690620B (zh) * 2018-08-22 2020-04-11 華紹國際有限公司 化學鍍裝置及金屬化基板的製造方法
CN114277427B (zh) * 2022-01-19 2024-03-12 东莞市丰卓自动化科技有限公司 一种电镀设备

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US2746732A (en) * 1952-11-01 1956-05-22 Louis J Guillette Oscillator attachment for plating tank
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JPH0671544B2 (ja) 1990-03-26 1994-09-14 日本テクノ株式会社 液槽における液体の攪拌方法および装置
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CH683007A5 (de) * 1990-08-17 1993-12-31 Hans Henig Verfahren zum kontinuierlichen Austausch der wässrigen Lösungen während einer Oberflächenbehandlung sowie eine Vorrichtung dazu.
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JP3055434B2 (ja) * 1995-07-14 2000-06-26 株式会社村田製作所 チップ型電子部品のメッキ装置
JP2911393B2 (ja) 1995-07-25 1999-06-23 日本テクノ株式会社 無電解ニッケルめっき廃液から肥料水溶液を製造する方法と装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015004746A1 (de) 2015-04-11 2016-10-13 AUDI Hungaria Verfahren zur erweiterten Beschichtung der Zylinderlaufbahnen von Aluminium-Zylinderkurbelgehäusen
DE102015004746B4 (de) * 2015-04-11 2018-11-15 AUDI HUNGARIA Zrt. Verfahren zur erweiterten Beschichtung der Zylinderlaufbahnen von Aluminium-Zylinderkurbelgehäusen sowie Anordnung zur Durchführung des Verfahrens
DE102016003891A1 (de) * 2016-03-31 2017-10-05 Boardtek Electronics Corporation Galvanisierungssystem

Also Published As

Publication number Publication date
HK1020202A1 (en) 2000-03-31
KR100296780B1 (ko) 2002-11-18
KR19990036494A (ko) 1999-05-25
US6261435B1 (en) 2001-07-17
EP0915182B1 (de) 2001-11-07
DE69802367D1 (de) 2001-12-13
CN1401822A (zh) 2003-03-12
CN1089120C (zh) 2002-08-14
CN1238570C (zh) 2006-01-25
CN1215096A (zh) 1999-04-28
US6123815A (en) 2000-09-26
HK1054058A1 (en) 2003-11-14
EP0915182A1 (de) 1999-05-12
HK1054058B (zh) 2006-08-18

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